JP2013530911A5 - - Google Patents
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- Publication number
- JP2013530911A5 JP2013530911A5 JP2013509053A JP2013509053A JP2013530911A5 JP 2013530911 A5 JP2013530911 A5 JP 2013530911A5 JP 2013509053 A JP2013509053 A JP 2013509053A JP 2013509053 A JP2013509053 A JP 2013509053A JP 2013530911 A5 JP2013530911 A5 JP 2013530911A5
- Authority
- JP
- Japan
- Prior art keywords
- opening
- plenum
- sheet
- width
- gas jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US33207310P | 2010-05-06 | 2010-05-06 | |
| US61/332,073 | 2010-05-06 | ||
| US13/037,789 US8685162B2 (en) | 2010-05-06 | 2011-03-01 | Removing a sheet from the surface of a melt using gas jets |
| US13/037,789 | 2011-03-01 | ||
| PCT/US2011/026790 WO2011139402A1 (en) | 2010-05-06 | 2011-03-02 | Removing a sheet from the surface of a melt using gas jets |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015084457A Division JP5961303B2 (ja) | 2010-05-06 | 2015-04-16 | ガスジェットを用いる融液の表面からのシートの取り出し |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013530911A JP2013530911A (ja) | 2013-08-01 |
| JP2013530911A5 true JP2013530911A5 (https=) | 2014-03-13 |
| JP5771271B2 JP5771271B2 (ja) | 2015-08-26 |
Family
ID=44901074
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013509053A Expired - Fee Related JP5771271B2 (ja) | 2010-05-06 | 2011-03-02 | ガスジェットを用いる融液の表面からのシートの取り出し |
| JP2015084457A Expired - Fee Related JP5961303B2 (ja) | 2010-05-06 | 2015-04-16 | ガスジェットを用いる融液の表面からのシートの取り出し |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015084457A Expired - Fee Related JP5961303B2 (ja) | 2010-05-06 | 2015-04-16 | ガスジェットを用いる融液の表面からのシートの取り出し |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8685162B2 (https=) |
| EP (2) | EP2567003B1 (https=) |
| JP (2) | JP5771271B2 (https=) |
| KR (2) | KR101898905B1 (https=) |
| CN (1) | CN103025926B (https=) |
| TW (1) | TWI550142B (https=) |
| WO (1) | WO2011139402A1 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9957636B2 (en) * | 2014-03-27 | 2018-05-01 | Varian Semiconductor Equipment Associates, Inc. | System and method for crystalline sheet growth using a cold block and gas jet |
| US10526720B2 (en) * | 2015-08-19 | 2020-01-07 | Varian Semiconductor Equipment Associates, Inc. | Apparatus for forming crystalline sheet from a melt |
| US10179958B2 (en) * | 2016-09-16 | 2019-01-15 | Varian Semiconductor Equipment Associates, Inc | Apparatus and method for crystalline sheet growth |
| US11661672B2 (en) * | 2018-08-06 | 2023-05-30 | Carnegie Mellon University | Method for producing a sheet from a melt by imposing a periodic change in the rate of pull |
| US20220145494A1 (en) * | 2019-05-13 | 2022-05-12 | Leading Edge Crystal Technologies, Inc. | Exposure of a silicon ribbon to gas in a furnace |
| JP2022543358A (ja) * | 2019-08-09 | 2022-10-12 | リーディング エッジ イクウィップメント テクノロジーズ インコーポレイテッド | 酸素濃度の低い領域を有するリボンまたはウェハの製造 |
| TW202136597A (zh) | 2020-02-19 | 2021-10-01 | 美商先鋒設備科技公司 | 在熔體表面形成之結晶片材的主動邊緣控制 |
| JP2023514607A (ja) * | 2020-02-19 | 2023-04-06 | リーディング エッジ イクウィップメント テクノロジーズ インコーポレイテッド | 表面冷却と溶融加熱を組み合わせて用いる、溶融物の表面上に形成された結晶シートの厚さ及び幅の制御 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2633961C2 (de) * | 1975-07-28 | 1986-01-02 | Mitsubishi Kinzoku K.K. | Verfahren zum Ziehen eines dünnen Halbleiter-Einkristallbandes |
| JPS5215485A (en) * | 1975-07-28 | 1977-02-05 | Toyo Silicon Kk | Process for growth of ribbon crystals by lateral pulling |
| JPS5261180A (en) | 1975-11-14 | 1977-05-20 | Toyo Shirikon Kk | Horizontal growth of crystal ribbons |
| US4221754A (en) * | 1977-12-29 | 1980-09-09 | Nowak Welville B | Method for producing solid ribbons |
| US4289571A (en) | 1979-06-25 | 1981-09-15 | Energy Materials Corporation | Method and apparatus for producing crystalline ribbons |
| US4627887A (en) * | 1980-12-11 | 1986-12-09 | Sachs Emanuel M | Melt dumping in string stabilized ribbon growth |
| US6019576A (en) * | 1997-09-22 | 2000-02-01 | Thut; Bruno H. | Pumps for pumping molten metal with a stirring action |
| JP2001122696A (ja) | 1999-10-21 | 2001-05-08 | Matsushita Seiko Co Ltd | リボンシリコンウェハの製造方法 |
| JP2002114597A (ja) * | 2000-10-06 | 2002-04-16 | Sharp Corp | 結晶シートの製造方法およびその結晶シートを用いた太陽電池 |
| CN101522960B (zh) | 2006-09-28 | 2012-07-25 | Amg艾迪卡斯特太阳能公司 | 用于生产晶体硅基板的方法和设备 |
| US7855087B2 (en) | 2008-03-14 | 2010-12-21 | Varian Semiconductor Equipment Associates, Inc. | Floating sheet production apparatus and method |
| US7816153B2 (en) | 2008-06-05 | 2010-10-19 | Varian Semiconductor Equipment Associates, Inc. | Method and apparatus for producing a dislocation-free crystalline sheet |
| US8475591B2 (en) | 2008-08-15 | 2013-07-02 | Varian Semiconductor Equipment Associates, Inc. | Method of controlling a thickness of a sheet formed from a melt |
| ES2425885T3 (es) * | 2008-08-18 | 2013-10-17 | Max Era, Inc. | Procedimiento y aparato para el desarrollo de una cinta cristalina mientras se controla el transporte de contaminantes en suspensión en un gas a través de una superficie de cinta |
| MY160016A (en) | 2009-03-09 | 2017-02-15 | 1366 Tech Inc | Methods and apparati for making thin semiconductor bodies from molten material |
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2011
- 2011-03-01 US US13/037,789 patent/US8685162B2/en active Active
- 2011-03-02 KR KR1020177026816A patent/KR101898905B1/ko not_active Expired - Fee Related
- 2011-03-02 JP JP2013509053A patent/JP5771271B2/ja not_active Expired - Fee Related
- 2011-03-02 KR KR1020127030651A patent/KR101783226B1/ko not_active Expired - Fee Related
- 2011-03-02 EP EP11710924.9A patent/EP2567003B1/en not_active Not-in-force
- 2011-03-02 WO PCT/US2011/026790 patent/WO2011139402A1/en not_active Ceased
- 2011-03-02 EP EP17201509.1A patent/EP3305946B1/en active Active
- 2011-03-02 CN CN201180031762.2A patent/CN103025926B/zh not_active Expired - Fee Related
- 2011-03-03 TW TW100107128A patent/TWI550142B/zh not_active IP Right Cessation
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2014
- 2014-04-01 US US14/242,566 patent/US9677193B2/en active Active
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2015
- 2015-04-16 JP JP2015084457A patent/JP5961303B2/ja not_active Expired - Fee Related