JP2013530911A5 - - Google Patents

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Publication number
JP2013530911A5
JP2013530911A5 JP2013509053A JP2013509053A JP2013530911A5 JP 2013530911 A5 JP2013530911 A5 JP 2013530911A5 JP 2013509053 A JP2013509053 A JP 2013509053A JP 2013509053 A JP2013509053 A JP 2013509053A JP 2013530911 A5 JP2013530911 A5 JP 2013530911A5
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JP
Japan
Prior art keywords
opening
plenum
sheet
width
gas jet
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JP2013509053A
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English (en)
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JP2013530911A (ja
JP5771271B2 (ja
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Priority claimed from US13/037,789 external-priority patent/US8685162B2/en
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Publication of JP2013530911A5 publication Critical patent/JP2013530911A5/ja
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図１１は、ガスジェットの実施形態の断面図である。ガスジェット２２はプレナム３２及び開口部３０を有する。ガスは矢印の方向に流れる。プレナム３２を開口部３０より大きくすることにより、均一な圧力と開口部３０の大きさにわたる均一な流れを確保することができる。一実施形態では、開口部３０は、図４のシート１３のようなシートの幅にほぼ等しい幅を有する。もちろん、他の大きさも可能である。
JP2013509053A 2010-05-06 2011-03-02 ガスジェットを用いる融液の表面からのシートの取り出し Active JP5771271B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US33207310P 2010-05-06 2010-05-06
US61/332,073 2010-05-06
US13/037,789 US8685162B2 (en) 2010-05-06 2011-03-01 Removing a sheet from the surface of a melt using gas jets
US13/037,789 2011-03-01
PCT/US2011/026790 WO2011139402A1 (en) 2010-05-06 2011-03-02 Removing a sheet from the surface of a melt using gas jets

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015084457A Division JP5961303B2 (ja) 2010-05-06 2015-04-16 ガスジェットを用いる融液の表面からのシートの取り出し

Publications (3)

Publication Number Publication Date
JP2013530911A JP2013530911A (ja) 2013-08-01
JP2013530911A5 true JP2013530911A5 (ja) 2014-03-13
JP5771271B2 JP5771271B2 (ja) 2015-08-26

Family

ID=44901074

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013509053A Active JP5771271B2 (ja) 2010-05-06 2011-03-02 ガスジェットを用いる融液の表面からのシートの取り出し
JP2015084457A Active JP5961303B2 (ja) 2010-05-06 2015-04-16 ガスジェットを用いる融液の表面からのシートの取り出し

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015084457A Active JP5961303B2 (ja) 2010-05-06 2015-04-16 ガスジェットを用いる融液の表面からのシートの取り出し

Country Status (7)

Country Link
US (2) US8685162B2 (ja)
EP (2) EP2567003B1 (ja)
JP (2) JP5771271B2 (ja)
KR (2) KR101898905B1 (ja)
CN (1) CN103025926B (ja)
TW (1) TWI550142B (ja)
WO (1) WO2011139402A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9957636B2 (en) * 2014-03-27 2018-05-01 Varian Semiconductor Equipment Associates, Inc. System and method for crystalline sheet growth using a cold block and gas jet
US10526720B2 (en) * 2015-08-19 2020-01-07 Varian Semiconductor Equipment Associates, Inc. Apparatus for forming crystalline sheet from a melt
US10179958B2 (en) * 2016-09-16 2019-01-15 Varian Semiconductor Equipment Associates, Inc Apparatus and method for crystalline sheet growth
WO2020033419A1 (en) * 2018-08-06 2020-02-13 Carnegie Mellon University Method for producing a sheet from a melt by imposing a periodic change in the rate of pull
JP2022533146A (ja) * 2019-05-13 2022-07-21 リーディング エッジ イクウィップメント テクノロジーズ インコーポレイテッド 炉内でのシリコンリボンのガス曝露
AU2020328504A1 (en) 2019-08-09 2022-02-17 Leading Edge Equipment Technologies, Inc. Producing a ribbon or wafer with regions of low oxygen concentration

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2633961C2 (de) * 1975-07-28 1986-01-02 Mitsubishi Kinzoku K.K. Verfahren zum Ziehen eines dünnen Halbleiter-Einkristallbandes
JPS5215485A (en) * 1975-07-28 1977-02-05 Toyo Silicon Kk Process for growth of ribbon crystals by lateral pulling
JPS5261180A (en) 1975-11-14 1977-05-20 Toyo Shirikon Kk Horizontal growth of crystal ribbons
US4221754A (en) * 1977-12-29 1980-09-09 Nowak Welville B Method for producing solid ribbons
US4289571A (en) 1979-06-25 1981-09-15 Energy Materials Corporation Method and apparatus for producing crystalline ribbons
US4627887A (en) * 1980-12-11 1986-12-09 Sachs Emanuel M Melt dumping in string stabilized ribbon growth
US6019576A (en) * 1997-09-22 2000-02-01 Thut; Bruno H. Pumps for pumping molten metal with a stirring action
JP2001122696A (ja) 1999-10-21 2001-05-08 Matsushita Seiko Co Ltd リボンシリコンウェハの製造方法
JP2002114597A (ja) * 2000-10-06 2002-04-16 Sharp Corp 結晶シートの製造方法およびその結晶シートを用いた太陽電池
AU2007300183B2 (en) 2006-09-28 2012-03-29 Amg Idealcast Solar Corporation Method and apparatus for the production of crystalline silicon substrates
US7855087B2 (en) 2008-03-14 2010-12-21 Varian Semiconductor Equipment Associates, Inc. Floating sheet production apparatus and method
US7816153B2 (en) 2008-06-05 2010-10-19 Varian Semiconductor Equipment Associates, Inc. Method and apparatus for producing a dislocation-free crystalline sheet
US8475591B2 (en) 2008-08-15 2013-07-02 Varian Semiconductor Equipment Associates, Inc. Method of controlling a thickness of a sheet formed from a melt
ES2425885T3 (es) * 2008-08-18 2013-10-17 Max Era, Inc. Procedimiento y aparato para el desarrollo de una cinta cristalina mientras se controla el transporte de contaminantes en suspensión en un gas a través de una superficie de cinta
MX336781B (es) 2009-03-09 2016-02-02 1366 Tech Inc Metodos y aparatos para fabricar cuerpos semiconductores delgados de material fundido.

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