JP2023045891A - X-ray fluoroscopic image imaging device - Google Patents

Abstract

To provide an X-ray fluoroscopic image imaging device that is easy to capture an entire image of an inspected object when cone beam scanning a workpiece greatly different from 1:1 in an aspect ratio of an imaging object part on a fluoroscopic image, and can effectively utilize an imaging area of an X-ray detector.SOLUTION: An X-ray fluoroscopic image imaging device 100 comprises: an inspection table 1 that loads an inspected object A, and is rotatably provided; an X-ray generator 2 that irradiates the inspected object A with an X-ray; and an X-ray detector 3 that has a rectangular two-dimensional pixel arrayed imaging area 31, and is installed so that a center O of the imaging area 31 matches to an optical axis R of the X-ray generator 2. The X-ray fluoroscopic image imaging device comprises: a rotation drive unit 4 that, with the optical axis R of the X-ray generator 2 and the center O of the imaging area 31 as a rotation axis, causes the X-ray detector 3 to rotate so that the imaging area 31 is longitudinally long or laterally long; and a display unit 5 that displays a fluoroscopic image F of the inspected object A acquired by the X-ray detector 3.SELECTED DRAWING: Figure 1

Description

Embodiments of the present invention relate to an X-ray fluoroscopic imaging apparatus.

2. Description of the Related Art In recent years, industrial X-ray fluoroscopic imaging apparatuses for inspecting small electronic parts such as lithium ion batteries and semiconductor devices with high resolution have been widely used. In this X-ray fluoroscopic imaging apparatus, an X-ray generator that emits X-rays and an X-ray detector with a two-dimensional pixel array that detects X-rays are arranged opposite to each other. A rotatable examination table is provided between the X-ray source and the X-ray detector. While the object to be inspected placed on the inspection table is irradiated with X-rays, the inspection table rotates once to irradiate the object to be inspected with X-rays in all directions. A tomographic image can be obtained by image reconstruction of a set of fluoroscopic images collected by the X-ray generator from hundreds to thousands of X-ray exposure directions during one rotation. Recently, cone-beam CT (CBCT) is often used in which several hundreds to thousands of tomographic images can be obtained in one rotation scan.

Generally, an X-ray detector having a rectangular or square imaging area is used. The larger the imaging area of the X-ray detector and the larger the number of pixels thereof, the larger the imaging field of view of the inspection object in one fluoroscopic image and the higher the definition. Therefore, X-ray detectors with as large an imaging area and as many pixels as possible are preferred.

JP 2011-122930 A Japanese Patent Application Publication No. 2011-512235

In this type of X-ray fluoroscopic imaging apparatus, the larger the imaging area and the number of pixels of the X-ray detector, the higher the cost and the larger the processing time and image capacity. Therefore, in Patent Document 1, by varying the pixel pitch of the X-ray detector and the focal size of the X-rays emitted from the X-ray source, it is possible to image a specific region of the object to be inspected with high definition. .

However, in the prior art, when cone-beam scanning a workpiece whose aspect ratio differs greatly from 1:1 on a fluoroscopic image, it is difficult to capture the entire image of the object. Moreover, part of the data acquired from these X-ray detectors, processed and stored includes unnecessary parts due to a phenomenon called cone beam artifact, and the imaging area of the X-ray detectors cannot be effectively used. That is, the contour of the body-axis cross-section perpendicular to the rotation axis of the object to be inspected is clear with respect to the body-axis cross-section on or near the optical axis of the X-ray, but the contour of the body-axis cross-section becomes sharper as the distance from the optical axis of the X-ray increases. The outline of the body becomes unclear, and it becomes impossible to clearly distinguish between the layers of the body axis cross section.

On the other hand, Patent Document 2 discloses a medical X-ray fluoroscopic imaging apparatus in which an X-ray detector having a rectangular imaging area is rotated by 90° so as to be vertically long for facial use and horizontally long for dental use. This rotation axis is located away from the center of the imaging area of the X-ray detector. Therefore, the rotation of the X-ray detector causes the bottom short edge of the vertically oriented X-ray detector imaging area to be on the same line as the horizontally oriented bottom long edge, and the vertically oriented left hand long edge to be on the same line. It lies in line with the left hand short edge in landscape orientation.

However, if the X-ray optical axis and the center of the imaging area of the X-ray detector are misaligned, depending on the size and shape of the object to be inspected, the imaging area may be deviated due to rotation. In addition to being limited, there is a problem that the imaging area of the X-ray detector cannot be effectively used.

The embodiments of the present invention have been made to solve the above problems. An object of the present invention is to provide an X-ray fluoroscopic imaging apparatus which can easily capture an entire image of an object to be inspected and can effectively utilize the imaging area of an X-ray detector.

An X-ray fluoroscopic imaging apparatus according to an embodiment has the following configuration.
(1) A rotatable inspection table on which an object to be inspected is placed.
(2) an X-ray generator for irradiating the object to be inspected with X-rays;
(3) An X-ray detector having an imaging area with a rectangular two-dimensional pixel array and installed so that the center of the imaging area coincides with the optical axis of the X-ray generator.
(4) A rotary drive unit that rotates the X-ray detector so that the imaging region is vertically long or horizontally long, with the optical axis of the X-ray generator and the center of the imaging region as rotation axes.
(5) A display unit for displaying an image of the inspection object acquired by the X-ray detector.

The X-ray fluoroscopic imaging apparatus of the embodiment may further have the following configuration.
(1) A control unit that changes the display area of the fluoroscopic image of the inspection object on the display unit vertically or horizontally according to the vertically long or horizontally long arrangement of the X-ray detector.
(2) A movement mechanism for moving the examination table between the X-ray generator and the X-ray detector depending on whether the X-ray detector is arranged vertically or horizontally.
(3) A moving mechanism that adjusts the distance between the X-ray detector and the object to be inspected according to whether the X-ray detector is arranged vertically or horizontally.
(4) An imaging area calculation unit for displaying an imaging area in a landscape arrangement in a vertically arranged fluoroscopic image in the imaging area of the X-ray detector.

1 is a functional block diagram showing the overall configuration of an X-ray fluoroscopic imaging apparatus according to a first embodiment; FIG. 4 is a flow chart showing a rotation procedure of the X-ray detector in the first embodiment; FIG. 11 is a perspective view showing the positional relationship between an X-ray generator, a sample table, and an X-ray detector in a second embodiment, in which (a) is a vertical arrangement of the imaging area, and (b) is a horizontal arrangement of the imaging area; It is a figure which shows when it assumes. FIG. 11 is a diagram schematically showing an imaging region of an X-ray detector according to a third embodiment; FIG.

[1. First Embodiment]
[1-1. composition]
An X-ray fluoroscopic imaging apparatus 100 according to the first embodiment will be described below with reference to FIG. The X-ray fluoroscopic imaging apparatus 100 of the first embodiment has an industrial cone-beam CT (CBCT) function for inspecting small electronic parts such as lithium ion batteries and semiconductor devices as well as casting parts with high resolution. It is an image capturing device.

The X-ray fluoroscopic imaging apparatus 100 is an apparatus for non-destructive inspection of an object A to be inspected. The X-ray fluoroscopic imaging apparatus 100 irradiates an X-ray beam that passes through the inspection object A around the inspection object A, and detects the X-ray dose that has been attenuated by passing through the inspection object A. A CT image, which is a cross-sectional image of the inspection object A, is generated based on this detection result. The X-ray fluoroscopic imaging apparatus 100 generates a 3D image from a plurality of generated CT images.

Such an X-ray fluoroscopic imaging apparatus 100 includes an examination table 1, an X-ray generator 2, an X-ray detector 3, a rotation drive section 4, a display section 5 and a control section 6, as shown in FIG. An inspection table 1 is a table having a mounting surface on which an object A to be inspected is mounted. The inspection table 1 is movable in a direction parallel to or perpendicular to the placement surface. Further, the inspection table 1 is rotatable around a direction perpendicular to the mounting surface. The inspection table 1 has a sample table 11, an x-, y-, and z-axis movement mechanism 12, and a rotation/elevation mechanism (not shown).

The sample table 11 places an object A to be inspected thereon. The sample table 11 is composed of, for example, an actuator including a drive source such as a motor, and is rotatable about a direction orthogonal to the mounting surface. By rotating the sample table 11 while the X-ray beam is being irradiated, the object A to be inspected is irradiated with the X-ray beam in all directions.

The x-, y-, and z-axis movement mechanism 12 is provided below the sample table 11 . The x-, y-, and z-axis moving mechanism 12 moves the X-ray beam in a direction parallel to the mounting surface and perpendicular to the optical axis R of the X-ray beam and the rotation axis S of the sample table 11 (x-axis). The mounting surface is moved in a direction (y-axis) parallel to the optical axis R and a direction (z-axis) perpendicular to the mounting surface. The x-, y-, and z-axis moving mechanism 12 can use, for example, a ball screw mechanism driven by a servomotor.

The rotation/elevation mechanism is provided inside or under the sample table 11, and for example, a ball screw mechanism driven by a servomotor can be used. The rotating/lifting mechanism is movable in a direction orthogonal to the mounting surface. That is, the height of the mounting surface can be adjusted by moving the rotating/lifting mechanism in a direction orthogonal to the mounting surface. By adjusting the height of the placement surface, it is possible to align the optical axis R of the X-rays with the center of the object A to be inspected or with the user's arbitrary position. Further, the rotation/elevation mechanism can rotate about a rotation axis S in a direction orthogonal to the mounting surface.

The X-ray generator 2 irradiates an X-ray beam that passes through the object A to be inspected. The X-ray beam is a bundle of X-rays that spread conically with the focal point P of the X-ray generator 2 at the apex and having a cone angle. In this embodiment, the X-ray generator 2 is, for example, a reflective or transmissive microfocus X-ray tube and generates an X-ray beam. In addition to X-rays, for example, γ-rays that pass through the inspection object A can be used.

The X-ray detector 3 is provided facing the X-ray generator 2 with the inspection table 1 and the inspection object A interposed therebetween, and detects a two-dimensional distribution of X-ray intensity that is attenuated according to the transmission path of the X-rays. , and outputs the fluoroscopic image to the control unit 6 . The X-ray detector 3 has an imaging region 31 with a rectangular two-dimensional pixel array, and is configured by, for example, a flat panel detector (FPD). The imaging area 31 should preferably have a length ratio of about 1:1.2 to 1:1.2. The X-ray detector 3 is installed such that the center O of the imaging region 31 coincides with the optical axis R of the X-ray generator 2 . The X-ray detector 3 has a y-axis movement mechanism 32 for adjusting the distance from the object A to be inspected. The y-axis movement mechanism 32 is orthogonal to the imaging region 31 and movable parallel to the optical axis R of the X-ray beam.

The rotation drive unit 4 rotates the X-ray detector 3 around the optical axis R of the X-ray beam and the center O of the imaging region 31 as rotation axes so that the imaging region 31 becomes vertically long or horizontally long. For example, it is composed of an actuator including a drive source such as a motor, and is provided behind the imaging region 31 of the X-ray detector 3 .

The display unit 5 is, for example, a monitor such as a liquid crystal display or an organic EL display. The display unit 5 displays various images such as a fluoroscopic image F of the inspection object A, a CT image, and a 3D image, an imaging area, imaging conditions, and the like.

Although not shown, the X-ray fluoroscopic imaging apparatus 100 has an input unit. A keyboard, mouse, touch panel, or the like can be used as the input unit. This input unit accepts various operations such as menu selection for main imaging or trial imaging, setting of imaging conditions, manual operation of the moving mechanism, start of imaging, and selection of a portion of the object A to be observed.

The control unit 6 is composed of a computer and a driver circuit. A computer is composed of a storage such as an HDD or SSD, a RAM, a CPU, and the like. The control unit 6 is connected to an input unit (not shown), and the user causes the control unit 6 to control each component of the X-ray fluoroscopic imaging apparatus 100 via the input unit. As shown in FIG. 1, the control unit 6 includes a sample table rotation control unit 61, a sample table x-, y-, and z-axis control unit 62, an X-ray generator control unit 63, an X-ray detector control unit 64, an X-ray detection unit. It has an instrument y-axis control section 65 , an X-ray detector rotation drive section control section 66 and an image processing section 67 .

A sample table rotation control unit 61 controls the rotation angle, rotation direction, and rotation speed of the sample table 11 of the inspection table 1 . A sample table x, y, z-axis control unit 62 controls the x, y, z-axis movement mechanism 12 and the rotation/elevation mechanism. These controllers 61 and 62 align the inspection object A placed on the inspection table 1 with the optical axis R of the X-ray beam, and rotate the inspection object A once during irradiation with the X-ray beam.

The X-ray generator control unit 63 controls the X-ray generator 2 to irradiate the object A to be inspected with an X-ray beam. That is, the X-ray generator control unit 63 controls the energy and amount of X-rays to be irradiated, the irradiation timing, etc. to irradiate the X-ray beam in all directions of the object A to be inspected, and the X-ray detector 3 performs fluoroscopy. Obtain an image F.

The X-ray detector control unit 64 controls the light receiving sensitivity, detection area, detection timing, etc. of the X-ray detector 3, and collects data of the fluoroscopic image F of the inspection object A in the imaging area 31 of the X-ray detector 3. do.

The X-ray detector y-axis control unit 65 moves the X-ray detector 3 in the y-axis direction, adjusting the distance from the X-ray focus P to the X-ray detector 3 according to the size of the object A to be inspected. During adjustment, the movement of the y-axis moving mechanism 32 is controlled.

The X-ray detector rotation drive unit control unit 66 controls the rotation drive unit 4 so that the imaging region 31 is vertically or horizontally long with the optical axis R of the X-ray beam and the center O of the imaging region 31 as rotation axes. Rotate the X-ray detector 3 . The X-ray detector rotation driving unit control unit 66 controls the rotation accuracy of the rotation axis of the X-ray detector in the rotation driving unit 4 so that the angle between the X-ray optical axis R and the X-ray optical axis R is approximately 0.001°, and the horizontal and vertical directions are approximately 0.001°. It is preferable to control the rotation driving unit 4 so that the amount of deviation of each is about 1/10 (≈20 μm) of the pixel pitch in the imaging region 31 of the X-ray detector 3 .

The image processing unit 67 generates CT images. The image processing unit 67 acquires various data such as offset data and gain data from the X-ray detector 3, corrects the fluoroscopic image F based on the various data, and performs image reconstruction on the corrected fluoroscopic image. to generate a CT image. For reconstruction, for example, the FDK method is used, and a CT image is generated by performing filtering and back projection (back projection) for each corrected fluoroscopic image.

The image processing unit 67 changes the display area of the fluoroscopic image F of the inspection object A on the display unit 5 vertically or horizontally according to the vertical or horizontal arrangement of the X-ray detector 3 . Normally, the readout order of the two-dimensionally arranged pixels of the X-ray detector 3 is fixed. Therefore, for example, when the X-ray detector 3 in which the readout order of the pixels is in the direction of the short side and an erect image of the object to be inspected A is obtained in the vertically long display area in the vertically long arrangement of the imaging area 31 is used in the horizontally long arrangement, , the image processing unit 67 rearranges the pixels read from the X-ray detector 3 so that an erect image of the inspection object A can be obtained in the horizontally long display area of the display unit 5, and rotates the entire image by 90°. It is controlled so that it is rotated and displayed on the display unit 5 . Further, when cone-beam scanning is performed in a horizontally long arrangement, for example, the data necessary for reconstructing a CT image on the optical axis R of X-rays is the data of the X-ray detector 3 positioned on the optical axis R of X-rays. It is a row of pixels in the long side direction. Therefore, the image processing unit 67 extracts necessary data in the long side direction from the data read out in the short side direction of the X-ray detector 3 . When obtaining a CT image by cone beam scanning over the upper and lower sides of the optical axis R of the X-ray, the image processing unit 67 scans the pixel rows in the long side direction of the X-ray detector 3 positioned above and below the optical axis R of the X-ray. Extract.

[1-2. action]
The operation of the X-ray fluoroscopic imaging apparatus 100 of the first embodiment having the configuration as described above will be described with reference to the flow chart of FIG. Note that in the flowchart of FIG. 2, the main processing will be described with step codes S01 to S06.

First, it is confirmed whether or not the current arrangement of the X-ray detectors 3 needs to be changed according to the shape of the object A placed on the inspection table 1 (step S01). If it is necessary to change the current arrangement of the X-ray detector 3 ("Change" in step S01), the X-ray detector rotation drive section control section 66 controls the rotation drive section 4 so that the X-ray generator 2 The X-ray detector 3 is rotated around the optical axis R and the center O of the imaging region 31 as rotation axes so that the imaging region 31 is arranged vertically or horizontally. After the X-ray detector 3 rotates, the X-ray generator 2 irradiates the object A to be inspected with an X-ray beam to capture a fluoroscopic image F of the object A (step S02).

On the other hand, if there is no need to change the current arrangement of the X-ray detector 3 (step S01 is "no change"), the X-ray generator 2 irradiates the object A to be inspected with an X-ray beam. A fluoroscopic image F of the inspection object A is photographed (step S02).

Next, the CT imaging range is set from the input unit (step S03). When the setting of the CT imaging range is input, it is selected whether or not to automatically rotate the X-ray detector 3 (step S04). When the rotation operation of the X-ray detector 3 is automatically performed ("automatic" in step S04), the X-ray detector rotation driving unit control unit 66 controls the rotation driving unit 4 to rotate the optical axis of the X-ray generator 2. The X-ray detector 3 is automatically rotated around R and the center O of the imaging region 31 as a rotation axis so that the imaging region 31 is arranged horizontally (step S05). After the X-ray detector 3 rotates, the X-ray generator 2 irradiates an X-ray beam that passes through the object A to be inspected and takes a CT image of the object A (step S06).

When the rotation operation of the X-ray detector 3 is manually performed (step S04 is "manual"), the user moves the X-ray detector 3 so that the imaging region 31 of the X-ray generator 2 is arranged horizontally as necessary. Rotate (step S05). After rotating the X-ray detector 3, the X-ray generator 2 irradiates an X-ray beam that passes through the object A to be inspected, and takes a CT image of the object A (step S06).

[1-3. effect]
The effects of this embodiment are as follows.
(1) The X-ray fluoroscopic imaging apparatus 100 of this embodiment has an imaging region 31 with a rectangular two-dimensional pixel array, and the center of the imaging region 31 is aligned with the optical axis R of the X-ray generator 2. The installed X-ray detector 3, the optical axis R of the X-ray generator 2, and the center O of the imaging region 31 are used as rotation axes, and the X-ray detector 3 is rotated so that the imaging region 31 becomes vertically long or horizontally long. A rotation drive unit 4 is provided. As a result, when cone-beam scanning is performed on a workpiece whose aspect ratio of the object to be imaged differs greatly from 1:1 on the fluoroscopic image, the entire image of the object to be inspected A can be easily captured, and the imaging area of the X-ray detector can be reduced. It is possible to provide an X-ray fluoroscopic imaging apparatus that can be effectively used.

(2) The X-ray fluoroscopic imaging apparatus 100 of the present embodiment uses the X-ray detector 3 having the imaging area 31 with a rectangular two-dimensional pixel array, and scans X-rays so that the imaging area 31 is vertically long or horizontally long. Detector 3 is rotated. Therefore, even if the imaging area 31 of the X-ray detector 3 and the number of pixels are not large, the X-ray detector 3 can be arranged vertically or horizontally according to the size and shape of the object A to be inspected. , CT images with excellent spatial resolution can be obtained economically and efficiently from the viewpoint of data capacity and its transfer/processing.

(3) The X-ray fluoroscopic imaging apparatus 100 of this embodiment rotates the X-ray detector so that the imaging region 31 is vertically long or horizontally long, with the optical axis R of the X-ray beam and the center O of the imaging region 31 as rotation axes. Rotate 3. Therefore, the object A to be inspected does not move out of the imaging region 31 due to the rotation of the X-ray detector 3, so the size and shape of the object to be inspected A are not limited.

(4) The X-ray fluoroscopic imaging apparatus 100 of the present embodiment makes the display area of the fluoroscopic image F of the inspection object A on the display unit 5 vertically or horizontally according to the vertically or horizontally long arrangement of the X-ray detector 3. It has an X-ray detector rotation driving section control section 66 for changing to . Therefore, since the image of the inspection object A on the X-ray detector 3 and the display unit 5 match, it is easier to capture the entire image of the inspection object A, and high image quality can be obtained in the desired imaging area. .

(5) In the X-ray fluoroscopic imaging apparatus 100 of this embodiment, the examination table 1 has an x-, y-, and z-axis moving mechanism 12 that moves between the X-ray generator 2 and the X-ray detector 3 . Therefore, the position of the object to be inspected A can be adjusted to the optical axis R of the X-ray and the center O of the imaging area of the X-ray detector or the desired imaging area 31. image quality can be obtained.

(6) The X-ray fluoroscopic imaging apparatus 100 of the present embodiment has the y-axis movement mechanism 32 for adjusting the distance between the X-ray detector 3 and the object A to be inspected. Therefore, since the fluoroscopic image F of the inspection object A can be adjusted so that it is positioned at the center O of the imaging area of the X-ray detector or the desired imaging area 31, better image quality can be obtained.

[2. Second Embodiment]
A second embodiment will be described with reference to FIG. In the second embodiment, by moving the examination table 1 and/or the X-ray detector 3 with the x, y, z-axis movement mechanism 12 and/or the y-axis movement mechanism 32 of the first embodiment, the X-ray detector 3 is A function is added to automatically change the X-ray geometric magnification when the imaging region 31 is changed from the vertically long arrangement to the horizontally long arrangement. The same reference numerals are assigned to the same configurations and the same functions as those of the first embodiment, and detailed description thereof will be omitted.

In the second embodiment, first, the fluoroscopic image F of the inspection object A is observed with the imaging region 31 of the X-ray detector 3 arranged vertically. Next, when the imaging area 31 of the X-ray detector 3 is arranged horizontally, the horizontal fluoroscopic image F of the object to be inspected A is aligned with the imaging area 31 extending in the horizontal direction. The x-, y-, and z-axis movement mechanisms 12 automatically move the inspection table 1 in the direction of the X-ray focal point P so as to substantially satisfy the direction, and automatically change the X-ray geometrical magnification to the direction of enlargement. do. The increase in the X-ray geometrical magnification when shifting from the portrait orientation to the landscape orientation is a value (aspect ratio) obtained by dividing the length of the long side of the imaging area of the X-ray detector 3 by the length of the short side. Almost equal.

Without moving the inspection table 1, the y-axis moving mechanism 32 moves the X-ray detector 3 away from the inspection object A, or moves both the inspection table 1 and the X-ray detector 3. Also good. The selection is made so that the X-ray generator 2 and the object A to be inspected and the object A to be inspected and the X-ray detector 3 do not interfere with each other.

As described above, the X-ray fluoroscopic imaging apparatus 100 of the present embodiment moves the examination table 1 and/or the X-ray detector 3 by the x, y, and z-axis movement mechanism 12 and/or the y-axis movement mechanism 32, To automatically change the X-ray geometric enlargement magnification when an imaging region 31 of an X-ray detector 3 is changed from a vertically long arrangement to a horizontally long arrangement. Therefore, it is possible to economically and efficiently obtain a CT image with superior spatial resolving power from the viewpoint of data volume and its transfer/processing.

[3. Third Embodiment]
A third embodiment will be described with reference to FIG. In the third embodiment, in addition to the configurations of the first and second embodiments, imaging area calculation for displaying the imaging area in the horizontally arranged perspective image F in the vertically arranged fluoroscopic image F in the imaging area 31 of the X-ray detector 3 A part (not shown) is provided. The same reference numerals are assigned to the same configurations and the same functions as those of the first embodiment, and detailed description thereof will be omitted.

In the third embodiment, the imaging region 31 of the X-ray detector 3 is arranged vertically, and the fluoroscopic image F of the inspected object A under observation is displayed. The field of view of the fluoroscopic image F when the magnification is increased is estimated by calculation and displayed. In the calculation, for example, 95 to 100% of the length in the short side direction of the display area of the fluoroscopic image F in the portrait orientation is taken as the long side direction of the display area of the fluoroscopic image F in the landscape orientation. The value obtained by dividing by the aspect ratio of the X-ray detector 3 is defined as the direction of the short side of the display area of the fluoroscopic image F in the horizontally long arrangement.

As described above, the X-ray fluoroscopic imaging apparatus 100 of the present embodiment includes an imaging area calculation unit that displays an imaging area in a horizontal arrangement on a vertically arranged fluoroscopic image F in the imaging area 31 of the X-ray detector 3 . Therefore, it is possible to grasp the field of view of the fluoroscopic image F and the CT image when the imaging region 31 of the X-ray detector 3 is horizontally long before changing the imaging region 31 of the X-ray detector 3 to the horizontally long arrangement. can.

[4. Other embodiments]
Although multiple embodiments of the present invention have been described herein, these embodiments are provided by way of example and are not intended to limit the scope of the invention. The above embodiments can be implemented in various other forms, and various omissions, replacements, and modifications can be made without departing from the scope of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, as well as the scope of the invention described in the claims and equivalents thereof.

(1) Although the X-ray generator 2 is fixed in the above embodiment, it may be provided with a moving mechanism capable of moving in a direction parallel to the optical axis R of the X-ray beam. When the imaging region 31 of the X-ray detector 3 is arranged horizontally, by automatically moving the X-ray generator 2 in the direction of the inspection object A, the X-ray geometric magnification is automatically increased. can be changed on the fly. Also, the X-ray generator 2 may include a moving mechanism capable of moving in a direction orthogonal to the optical axis R of the X-ray beam. In that case, the X-ray detector 3 is also provided with a movement mechanism capable of moving in a direction orthogonal to the optical axis R of the X-ray beam, so that the center of the imaging region 31 coincides with the optical axis R of the X-ray generator 2. make it

(2) In the above-described embodiment, the X-ray detector 3 is provided with the rotation drive unit 4. However, by providing the inspection table 1 with the rotation drive unit and rotating the object A to be inspected about the optical axis R, Portrait or landscape orientation may be converted. In this case, since the object A to be inspected must be fixed, the inspection table 1 may be appropriately provided with a holder, a case, or the like for fixing the object A to be inspected.

(3) The number of display units 5 for displaying the fluoroscopic image F and the CT image of the object A to be inspected is not limited to one, and may be plural. For example, two display units 5 can be provided, one of which can display the fluoroscopic image F of the inspection object A, and the other of which can display the CT image.

(4) In the above embodiment, the x-, y-, and z-axis movement mechanisms 12 are provided in the examination table 1, and the y-axis movement mechanism 32 is provided in the X-ray detector 3, but only one of them may be provided. Further, the inspection table 1 and the X-ray detector 3 may be movable along all of the x, y, and z axes, or may be movable along any one or two axes.

100 X-ray fluoroscopic imaging apparatus 1 examination table 11 sample table 12 x, y, z-axis movement mechanism 2 X-ray generator 3 X-ray detector 31 imaging region 32 y-axis movement mechanism 4 rotation drive unit 5 display unit 6 control unit 61 sample table rotation control unit 62 sample table x, y, z axis control unit 63 X-ray generator control unit 64 X-ray detector control unit 65 X-ray detector y-axis control unit 66 X-ray detector rotation drive unit control unit 67 Image processing unit A Object to be inspected P Focus R Optical axis O Center of imaging area F Perspective image

Claims (5)

a rotatable inspection table on which an object to be inspected is placed;
an X-ray generator for irradiating the object to be inspected with X-rays;
an X-ray detector having an imaging area with a rectangular two-dimensional pixel array and installed so that the center of the imaging area coincides with the optical axis of the X-ray generator;
a rotation driving unit that rotates the X-ray detector so that the imaging region is vertically long or horizontally long, with the optical axis of the X-ray generator and the center of the imaging region as rotation axes;
a display unit for displaying an image of the object to be inspected obtained by the X-ray detector;
An X-ray fluoroscopic imaging apparatus comprising: 2. The apparatus according to claim 1, further comprising a control unit that changes a display area of the fluoroscopic image of the inspection object on the display unit vertically or horizontally according to the vertically long or horizontally long arrangement of the X-ray detector. X-ray fluoroscopic imaging device. 2. The examination table includes a moving mechanism for moving between the X-ray generator and the X-ray detector depending on whether the X-ray detector is arranged vertically or horizontally. The X-ray fluoroscopic imaging apparatus according to claim 2. 4. The X-ray detector according to any one of claims 1 to 3, further comprising a moving mechanism for adjusting a distance from the object to be inspected depending on whether the X-ray detector is arranged vertically or horizontally. X-ray fluoroscopic imaging apparatus according to any one of the above. 5. The X-ray fluoroscopic image according to claim 3, further comprising an imaging area calculation unit for displaying an imaging area in a horizontal arrangement on a vertically arranged fluoroscopic image in the imaging area of the X-ray detector. Imaging device.

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