JP4640589B2 - X-ray equipment - Google Patents

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JP4640589B2
JP4640589B2 JP2005139486A JP2005139486A JP4640589B2 JP 4640589 B2 JP4640589 B2 JP 4640589B2 JP 2005139486 A JP2005139486 A JP 2005139486A JP 2005139486 A JP2005139486 A JP 2005139486A JP 4640589 B2 JP4640589 B2 JP 4640589B2
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JP2006317249A (en
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修平 大西
修平 石黒
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Shimadzu Corp
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本発明は産業用のX線撮影装置に関し、具体的には、被写体の断層像を得るためのいわゆるX線CT装置等と称されるX線撮影装置に関する。 Relates the X-ray imaging apparatus of the present invention for industrial, in particular, to referred X-ray imaging apparatus with a so-called X-ray CT apparatus or the like for obtaining a tomographic image of the Utsushitai.

各種工業製品等を非破壊のもとに観察する方法として、従来、X線透視装置やX線CT装置などのX線撮影装置を用いる方法が知られている。X線透視装置においては、図に模式的に示すように、X線源71とX線検出器72とを対向配置するとともに、その間に被写体Wを保持するためのテーブル等の保持部73を配置した構成を採る(例えば特許文献1参照)。また、X線CT装置においては、図に模式的に示すように、同じくX線源81とX線検出器82とを対向配置するとともに、その間に被写体Wを保持してX線光軸Lに直交する回転軸Rを中心とした回転を与えるための回転テーブル83を配置した構成を採る(例えば特許文献2参照)。 As a method for observing various industrial products and the like under non-destructive methods, a method using an X-ray imaging apparatus such as an X-ray fluoroscope or an X-ray CT apparatus has been conventionally known. In the X-ray fluoroscopic apparatus, as schematically shown in FIG. 5 , an X-ray source 71 and an X-ray detector 72 are arranged to face each other, and a holding unit 73 such as a table for holding the subject W is provided therebetween. The arrangement | positioning structure is taken (for example, refer patent document 1). In the X-ray CT apparatus, as schematically shown in FIG. 6 , the X-ray source 81 and the X-ray detector 82 are similarly arranged opposite to each other, and the subject W is held therebetween, and the X-ray optical axis L A configuration is adopted in which a rotary table 83 for giving rotation about a rotation axis R perpendicular to the axis is arranged (see, for example, Patent Document 2).

これらの装置においては、X線源から発生したX線を被写体Wを透過させた後にX線検出器に入射させ、そのX線検出器の各画素出力であるX線透過データ、つまり各画素の濃淡情報を取り込む。X線透視装置ではそのX線検出器72の各画素の濃淡情報を当該各画素の位置に対応させて、表示器の表示画素の濃淡を決定して表示器に表示することによって被写体のX線透視像を構築する。   In these apparatuses, X-rays generated from an X-ray source are transmitted through a subject W and then incident on an X-ray detector, and X-ray transmission data that is an output of each pixel of the X-ray detector, that is, each pixel's output. Import grayscale information. In the X-ray fluoroscopic apparatus, the density information of each pixel of the X-ray detector 72 is made to correspond to the position of each pixel, and the density of the display pixel of the display is determined and displayed on the display, so that the X-ray of the subject is displayed. Construct a perspective image.

一方、X線CT装置においては、回転テーブル83を駆動することによって被写体Wに回転軸Rを中心とする回転を与え、微小回転角度ごとにX線検出器82からのX線透過データを取り込み、通常は360°分のX線透過データを再構成演算することにより、回転軸Rに直交する平面で被写体をスライスした断層像を構築する。   On the other hand, in the X-ray CT apparatus, by rotating the rotation table 83, the subject W is rotated about the rotation axis R, and X-ray transmission data from the X-ray detector 82 is taken in every minute rotation angle. Usually, a tomographic image in which a subject is sliced on a plane orthogonal to the rotation axis R is constructed by reconstructing X-ray transmission data for 360 °.

これらの装置における撮影倍率、つまり拡大率は、X線源(焦点)と被写体Wとの距離(SOD)と、X線源(焦点)とX線検出器との距離(SID)の比によって定まる。このような撮影倍率を自由に選択できるように、これらの装置においては、通常、保持部73ないしは回転テーブル83をX線光軸Lに沿った方向に移動させ、あるいはX線検出器72ないしは82を同方向に移動させ、更にはX線源71ないしは81を同方向に移動させる駆動機構を備えている。加えて、X線透視装置においては、保持部73をX線光軸Lに直交する平面上で移動させる移動機構を設けることにより、被写体Wの要観察部(注目部位)を透視像上の中心に位置させることができるようになっている。また、X線CT装置においては、回転テーブル83の上に、被写体Wを保持ないしは搭載して、X線光軸Lに直交する平面に沿って移動する移動テーブルを配置し、この移動テーブルの駆動により被写体Wを回転軸Rに対して移動させることにより、被写体Wの注目部位を中心とした断層像を得ることができるように構成されたものが多い。
特開2004−170226号公報 特開2004−184122号公報
The imaging magnification in these apparatuses, that is, the enlargement ratio, is determined by the ratio of the distance (SOD) between the X-ray source (focus) and the subject W and the distance (SID) between the X-ray source (focus) and the X-ray detector. . In these apparatuses, the holding unit 73 or the rotary table 83 is usually moved in the direction along the X-ray optical axis L, or the X-ray detectors 72 or 82 so that such an imaging magnification can be freely selected. Are moved in the same direction, and further a drive mechanism for moving the X-ray source 71 or 81 in the same direction is provided. In addition, in the X-ray fluoroscopic apparatus, by providing a moving mechanism that moves the holding unit 73 on a plane orthogonal to the X-ray optical axis L, the observation target portion (attention site) of the subject W is centered on the fluoroscopic image. Ru Tei can now be located. In the X-ray CT apparatus, a moving table that holds or mounts the subject W and moves along a plane orthogonal to the X-ray optical axis L is disposed on the rotary table 83, and the moving table is driven. By moving the subject W with respect to the rotation axis R in many cases, it is often configured to obtain a tomographic image centered on the region of interest of the subject W.
JP 2004-170226 A JP 2004-184122 A

ところで、X線検出器には様々なタイプのものがあるが、いずれも、決まった視野および画素数を有し、その出力は、最終的には各画素の濃度値とするデジタルデータとなる。この視野と画素数は、用いるX線検出器によって一意的に定まり、一定の視野中の画素数が多い検出器を用いることにより、高い分解能のX線透視像もしくはX線断層像が得られることになる反面、コストアップになるという問題がある。また、同じサイズの検出器であれば、画素数が増えることにより感度が低下することは避けられない。 By the way, there are various types of X-ray detectors, all of which have a fixed visual field and the number of pixels, and the output finally becomes digital data which is the density value of each pixel. This field of view and the number of pixels are uniquely determined by the X-ray detector used, and a high-resolution X-ray fluoroscopic image or X-ray tomographic image can be obtained by using a detector with a large number of pixels in a fixed field of view. However, there is a problem that the cost increases. In addition, if the detectors have the same size, it is inevitable that the sensitivity decreases due to an increase in the number of pixels.

本発明の課題は、殆どコストアップを伴うことなく、かつ、感度を低下させることなく、高分解能のX線断層像を得ることのできるX線撮影装置を提供することにある。 An object of the present invention is to provide an X-ray imaging apparatus capable of obtaining a high-resolution X- ray tomographic image with almost no increase in cost and without reducing sensitivity.

上記の課題を解決するため、発明のX線撮影装置は、互いに対向配置されたX線源とX線検出器の間に、被写体を保持する保持部が配置されているとともに、その保持部に保持された被写体に上記X線源からのX線光軸に直交する回転軸を中心とした回転を与える回転駆動手段と、その保持部に保持された被写体にX線を照射しつつ当該被写体を回転させ、その微小回転角度ごとに上記X線検出器の出力を取り込む撮影動作により得られるX線透過データを再構成して上記回転軸に直交する被写体の断層像を構築する画像形成手段を備えたX線撮影装置において、
上記保持部を、上記X線源からのX線光軸に直交する平面上で、上記X線検出器の画素ピッチの整数分の一のピッチで移動させることのできる保持部移動機構を設け、上記X線画像形成手段は、その保持部移動機構により上記整数分の一のピッチで保持部をずらせた複数の位置においてそれぞれ取り込んだX線透過データを1回の撮影動作により得られるX線透過データとして取り扱って被写体の断層像を構築することによって特徴づけられる。
In order to solve the above-described problems, in the X-ray imaging apparatus of the present invention, a holding unit that holds a subject is disposed between an X-ray source and an X-ray detector that are arranged to face each other, and the holding unit. A rotation driving means for rotating the subject held by the X-ray source around a rotation axis perpendicular to the X-ray optical axis, and the subject held by the holding portion while irradiating the subject with X-rays An image forming means for reconstructing X-ray transmission data obtained by an imaging operation for capturing the output of the X-ray detector for each minute rotation angle and constructing a tomographic image of a subject orthogonal to the rotation axis In the X-ray imaging apparatus provided,
A holding unit moving mechanism capable of moving the holding unit on a plane orthogonal to the X-ray optical axis from the X-ray source at an integer pitch of the pixel pitch of the X-ray detector; the X-ray imaging means, the X-ray transmission data taken each at a plurality of positions shifting the holding portion by its holding portion moving mechanism in one pitch of the integral fraction, X-rays obtained by one shooting operation Characterized by constructing a tomographic image of a subject treated as transmission data.

本発明は、被写体の保持部を、X線源からのX線光軸に直交する平面上で、X線検出器の画素ピッチの整数分の一のピッチでX線源とX線検出器に対して相対的にずらせた複数の位置で取り込んだX線透過データを、1回の撮影動作により得られるX線透過データとして取り扱うことにより、課題を解決しようとするものである。   In the present invention, the object holding unit is placed on the X-ray source and the X-ray detector at a pitch that is an integral number of the pixel pitch of the X-ray detector on a plane orthogonal to the X-ray optical axis from the X-ray source. The present invention intends to solve the problem by handling X-ray transmission data captured at a plurality of positions shifted relative to each other as X-ray transmission data obtained by one imaging operation.

すなわち、被写体の保持部をX線源とX線検出器に対して、例えばX線検出器の画素ピッチの1/2のピッチでX線光軸に直交する平面上で互いに直交する2方向にそれぞれずらせた合計4箇所において取り込んだX線透過データを、1回の撮影により得られるX線透過データとして取り扱ってX線断層像を構築すると、これらの画像の空間分解能はX線検出器が本来的に有している空間分解能に比して4倍に向上し、かつ、感度はX線検出器が本来的に有しているものと変わらない。 That is, the object holding unit is set in two directions orthogonal to the X-ray source and the X-ray detector on a plane orthogonal to the X-ray optical axis at a pitch of 1/2 of the pixel pitch of the X-ray detector, for example. When X-ray transmission data captured at a total of four positions are handled as X-ray transmission data obtained by one imaging and X- ray tomograms are constructed, the spatial resolution of these images is originally determined by the X-ray detector. The spatial resolution is four times higher than that of the spatial resolution, and the sensitivity is the same as that inherent in the X-ray detector.

本発明によれば、同じX線検出器を用いても、従来のX線撮影装置に比してより解像度の高いX線断層像を得ることができ、しかも、感度の低下もなく、更には、多くのX線撮影装置が透視視野等の移動等のために有している保持部移動機構をそのまま用いることができ。これにより、安価で高解像度のX線透視装置が得られる。 According to the present invention, same with the X-ray detector, as compared with the conventional X-ray imaging apparatus can obtain a higher have X-ray tomographic image resolution, moreover, no reduction in sensitivity, further The holder moving mechanism that many X-ray imaging apparatuses have for moving the perspective field of view can be used as it is. Thus, high-resolution X-ray fluoroscopic equipment is obtained at low cost.

以下、図面を参照しつつ本発明の実施の形態について説明する。
図1は本発明実施の形態の構成図であり、機械的構成を表す模式図とシステム構成を表すブロック図とを併記して示す図で、図2はその機械的構成の模式的平面図を示す。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration diagram of an embodiment of the present invention , and is a diagram showing a schematic diagram showing a mechanical configuration and a block diagram showing a system configuration . FIG. 2 is a schematic plan view of the mechanical configuration. Indicates.

X線源発生装置1はその焦点1aからコーン状のX線を出力する。このX線発生装置1に対向して2次元の検出面を持つX線検出器2が配置されている。このX線検出器2はFPDである。これらのX線発生装置1とX線検出器2の間に、被写体Wを保持する被写体保持部並びに被写体Wに回転を与えるための回転駆動手段としての回転テーブル23が配置されている。 X-ray source generator 2 1 outputs a cone-shaped X-ray from the focal point 2 1a. Opposed to the X-ray detector having a two-dimensional detection plane 2 2 is disposed in the X-ray generator 2 1. The X-ray detector 2 2 is FPD. Between these X-ray generator 2 1 and the X-ray detector 2 2, the turntable 2 3 are arranged as a rotary drive means for imparting rotation to the object holder and object W to hold the object W .

回転テーブル23の回転軸Rは、X線発生装置21からのX線光軸L(x軸方向)に直交するz軸方向に沿っている。この回転テーブル23は、テーブル移動機構24により、X線光軸方向であるx軸方向と、そのx軸に直交するy,z軸方向に移動させることができるようになっている。The rotation axis R of the turntable 23 is along the z-axis direction orthogonal to the X-ray optical axis L (x-axis direction) from the X-ray generator 21. The rotary table 23 can be moved by the table moving mechanism 24 in the x-axis direction that is the X-ray optical axis direction and in the y and z-axis directions orthogonal to the x-axis.

転テーブル23の上に、被写体Wを搭載保持してX線光軸Lに直交するy,z軸方向に微動させる被写体微動機構25が配置されている。この被写体微動機構25により、被写体WをX線検出器22の画素ピッチaの整数分の一、例えば1/2のピッチでy軸方向およびz軸方向に微動させることができる。 On the rotary table 23, y orthogonal mounted hold the object W in X-ray optical axis L, the subject fine movement mechanism 25 for finely moving in the z-axis direction is disposed. The subject fine movement mechanism 25 can finely move the subject W in the y-axis direction and the z-axis direction at a pitch that is an integral number of the pixel pitch a of the X-ray detector 22, for example, 1/2.

回転テーブル23は回転テーブル駆動回路31からの駆動信号により回転し、また、テーブル移動機構24および被写体微動機構25は、それぞれテーブル移動機構駆動回路32および被写体微動機構駆動回路33からの信号によって駆動制御される。これらの回転テーブル駆動回路31、テーブル移動機構駆動回路32および被写体微動機構駆動回路33はパーソナルコンピュータ34の制御下に置かれている。このパーソナルコンピュータ34には断層像再構成演算装置35が接続されているとともに、マウスやキーボード、あるいはジョイスティック等からなる操作部36と、断層像等を表示するための表示器37が接続されている。   The rotary table 23 is rotated by a drive signal from the rotary table drive circuit 31, and the table moving mechanism 24 and the subject fine movement mechanism 25 are driven and controlled by signals from the table movement mechanism drive circuit 32 and the subject fine movement mechanism drive circuit 33, respectively. Is done. The rotary table drive circuit 31, the table moving mechanism drive circuit 32, and the subject fine movement mechanism drive circuit 33 are placed under the control of the personal computer 34. The personal computer 34 is connected with a tomogram reconstruction calculation device 35 and is also connected with an operation unit 36 such as a mouse, a keyboard, or a joystick, and a display 37 for displaying a tomogram or the like. .

CT撮影に際しては、回転テーブル23上の被写体微動機構25上に載せられた被写体Wに対してX線を照射しながら、その被写体Wを回転軸Rの回りに微小角度ずつ回転させ、その各回転角度ごとにX線検出器2の各画素出力であるX線透過データを断層像再構成演算装置35に取り込む。この断層像再構成演算装置35では、その取り込んだX線透過データを後述するように再構成することにより、操作部36を通じて設定されるスライス面(z軸方向任意の位置におけるx−y平面)に沿った被写体Wの断層像を構築し、表示器37に表示する。   At the time of CT imaging, the subject W is rotated around the rotation axis R by a minute angle while irradiating the subject W placed on the subject fine movement mechanism 25 on the rotary table 23 with each rotation. X-ray transmission data, which is each pixel output of the X-ray detector 2, is taken into the tomographic image reconstruction calculation device 35 for each angle. In this tomographic image reconstruction calculation device 35, the acquired X-ray transmission data is reconstructed as will be described later, whereby a slice plane set through the operation unit 36 (xy plane at an arbitrary position in the z-axis direction). A tomographic image of the subject W along the line is constructed and displayed on the display 37.

また、CT撮影に先立ち、操作部36の操作によりテーブル移動機構34を移動させてSODの設定による撮影倍率の設定、あるいは被写体Wの注目領域を視野中心に移動させる等を行うとともに、同じく操作部36の操作によりCT撮影のモードとして、通常モードと高解像度モードを選択できるようになっている。   Prior to CT imaging, the table moving mechanism 34 is moved by operating the operation unit 36 to set the imaging magnification by setting the SOD, or to move the attention area of the subject W to the center of the visual field, and the like. The normal mode and the high resolution mode can be selected as the CT imaging mode by the operation of 36.

通常モードを選択した場合には、上記したようにX線を照射しながら被写体Wを微小角度ずつ360°にわたって回転させ、断層像再構成演算装置35では、従来のX線CT装置と同様に、その各回転角度ごとにX線検出器2からの各画素出力を取り込んで記憶し、これらを用いた再構成演算により、被写体Wの断層像を構築する。   When the normal mode is selected, the tomogram reconstruction calculation device 35 rotates the subject W over 360 ° while irradiating X-rays as described above, as in the conventional X-ray CT device. For each rotation angle, each pixel output from the X-ray detector 2 is captured and stored, and a tomographic image of the subject W is constructed by reconstruction calculation using them.

一方、高解像度モードを選択した場合には、以下の手順によりCT撮影を行う。すなわち、X線検出器22の画素ピッチが図3(A)に示すように、x,y軸方向にそれぞれaであったとすると、まず、断層像再構成演算装置35は当初の位置(初期位置)において上記と同様にX線検出器2の各画素からのX線透過データを取り込んで記憶し(1回目のCT撮影)、次に、パーソナルコンピュータ34から供給される制御信号のもとに被写体微動機構25を駆動して、被写体WをX線検出器2の画素ピッチaの1/2だけy軸方向に自動的に移動させた後、同様にX線検出器2の各画素からのX線透過データを取り込んで記憶し(2回目のCT撮影)、更に被写体微動機構25の駆動により被写体Wを自動的にz軸方向にa/2だけ移動させた後、各画素からのX線透過データを取り込んで記憶し(3回目のCT撮影)、更にまた被写体微動機構25の駆動により自動的に被写体Wをy軸方向に上記とは逆向きにa/2だけ移動させた後、各画素からのX線透過データを取り込んで記憶する(4回目のCT撮影)。 On the other hand, when the high resolution mode is selected, CT imaging is performed according to the following procedure. That is, assuming that the pixel pitch of the X-ray detector 22 is a in the x and y axis directions as shown in FIG. 3A, first, the tomographic image reconstruction calculation device 35 has an initial position (initial position). ) in store captures X-ray transmission data from the same manner as described above each pixel of the X-ray detector 2 2 P (1 st CT imaging), then, under the control signal supplied from the personal computer 34 Then, the subject fine movement mechanism 25 is driven to automatically move the subject W in the y-axis direction by ½ of the pixel pitch a of the X-ray detector 2, and similarly from each pixel of the X-ray detector 2. X-ray transmission data is captured and stored (second CT imaging), and the subject W is automatically moved by a / 2 in the z-axis direction by driving the subject fine movement mechanism 25, and then the X-rays from each pixel are captured. Capture and store the line transmission data (3rd CT scan In addition, the subject W is automatically moved by a / 2 in the direction opposite to the above in the y-axis direction by driving the subject fine movement mechanism 25, and then X-ray transmission data from each pixel is taken in and stored. (4th CT scan).

(B)は、以上の撮影動作により得られるX線透過データの空間分布を示す図であり、1〜4回目の撮影により得られるX線透過データをT1〜T4で表して模式的に示している。この図に示されるように、合計4回の撮影により得られるX線透過データの合計の空間分解能は、画素ピッチがa/2のX線検出器により得られるデータの空間分解能と等価となる。 3 (B) is more than a diagram showing the spatial distribution of X-ray transmission data obtained by the photographing operation, the X-ray transmission data obtained by the photographing of 1-4 th schematically represented by T1~T4 Show. As shown in this figure, the total spatial resolution of X-ray transmission data obtained by a total of four imagings is equivalent to the spatial resolution of data obtained by an X-ray detector with a pixel pitch of a / 2.

層像再構成演算装置35では、この合計4回のCT撮影により得られた全てのX線透過データを一体として取扱い、つまり実質的に1回のCT撮影により得られたX線透過データとして取扱い、被写体Wの断層像を再構成する。従って、得られる断層像は、前記した通常モードでCT撮影して得られる断層像、換言すればX線検出器22と同じ空間分解能のX線検出器を用いた従来のX線CT装置で得られる断層像に比して、空間分解能が4倍に向上する。 In the cross-sectional layer image reconstruction calculation unit 35, handling all the X-ray transmission data obtained by the total of four CT imaging as an integral, i.e. as a substantially X-ray transmission data obtained by one of CT imaging Handling and reconstructing a tomographic image of the subject W. Therefore, the obtained tomographic image is obtained by a conventional X-ray CT apparatus using an X-ray detector having the same spatial resolution as that of the X-ray detector 22, in other words, a tomographic image obtained by CT imaging in the normal mode. Spatial resolution is improved by a factor of 4 compared to the tomographic image.

なお、以上のように被写体Wを微動させると、図に模式的に示すように、微動前後の撮影により、被写体Wの同じ位置Wpを異なる方向から透視したデータが得られることになり、微動前後の画像に若干の歪みが生じることになるが、被写体Wの位置(座標)があらかじめわかっている場合には、公知の手法によりこの歪みを計算により補正することができ、z軸方向のある座標を通るx−y平面において歪みのない画像を作ることができる。また、X線の照射角度が狭い場合には、この歪みを無視することができる。 When the subject W is finely moved as described above, as shown schematically in FIG. 4 , data obtained by seeing through the same position Wp of the subject W from different directions can be obtained by photographing before and after the fine movement. Although some distortion will occur in the front and back images, if the position (coordinates) of the subject W is known in advance, this distortion can be corrected by calculation using a known method, and there is a z-axis direction. An image without distortion can be created in the xy plane passing through the coordinates. Further, when the X-ray irradiation angle is narrow, this distortion can be ignored.

なお、上記した各例においては、X線検出器としていずれもFPDを用いたが、イメージインテンシファイアとCCDとを組み合わせたX線検出器を用いてもよい。   In each of the above-described examples, the FPD is used as the X-ray detector, but an X-ray detector combining an image intensifier and a CCD may be used.

本発明の実施の形態の構成図で、機械的構成を表す模式図とシステム構成を表すブロック図とを併記して示す図である。In block diagram of the implementation of the embodiment of the present invention, it is a view showing shown together with a block diagram showing the schematic system configuration representing the mechanical structure. における機械的構成の模式的平面図である。FIG. 2 is a schematic plan view of a mechanical configuration in FIG. 1 . 本発明の実施の形態による撮影動作で得られるX線透過データの説明図で、(A)はX線検出器2の画素の配列例の説明図であり、(B)は被写体微動機構を微動させて4回にわたる撮影により得られるX線透過データの空間分布の説明図である。In illustration of X-ray transmission data obtained by the photographing operation according to an embodiment of the present invention, (A) is an explanatory view of the arrangement example of the pixel X-ray detector 2, (B) fine movement of an object fine movement mechanism It is explanatory drawing of the spatial distribution of the X-ray-transmission data obtained by letting it image | photograph 4 times. 本発明において、被写体の微動前後の撮影により被写体Wの同じ位置Wpを透過したX線が入射するX線検出器の位置の説明図である。In the present invention, it is an explanatory view of the position of the X-ray detector X-rays transmitted through the same position Wp of the object W by the imaging before and after the fine movement of the object scene object is incident. 従来のX線透視装置の基本的構成例を示す模式図である。It is a schematic diagram which shows the example of a fundamental structure of the conventional X-ray fluoroscope. 従来のX線CT装置の基本的構成例を示す模式図である。It is a schematic diagram which shows the example of a fundamental structure of the conventional X-ray CT apparatus.

21 X線発生装置
21a 焦点(X線源)
22 X線検出器
23 回転テーブル
24 テーブル移動機構
25 被写体微動機構
31 回転テーブル駆動回路
32 テーブル移動機構駆動回路
33 被写体微動機構駆動回路
34 パーソナルコンピュータ
35 断層像再構成演算装置
36 操作部
37 表示器
L X線光軸
R 回転軸
W 被写体
21 X-ray generator 21a Focus (X-ray source)
22 X-ray detector 23 Rotary table 24 Table moving mechanism 25 Subject fine movement mechanism 31 Rotary table drive circuit 32 Table movement mechanism drive circuit 33 Subject fine movement mechanism drive circuit 34 Personal computer 35 Tomographic image reconstruction calculation device 36 Operation unit 37 Display unit L X-ray optical axis R Rotation axis W Subject

Claims (1)

互いに対向配置されたX線源とX線検出器の間に、被写体を保持する保持部が配置されているとともに、その保持部に保持された被写体に上記X線源からのX線光軸に直交する回転軸を中心とした回転を与える回転駆動手段と、その保持部に保持された被写体にX線を照射しつつ当該被写体を回転させ、その微小回転角度ごとに上記X線検出器の出力を取り込む撮影動作により得られるX線透過データを再構成して上記回転軸に直交する被写体の断層像を構築する画像形成手段を備えたX線撮影装置において、
上記保持部を、上記X線源からのX線光軸に直交する平面上で、上記X線検出器の画素ピッチの整数分の一のピッチで移動させることのできる保持部移動機構を設け、上記X線画像形成手段は、その保持部移動機構により上記整数分の一のピッチで保持部をずらせた複数の位置においてそれぞれ取り込んだX線透過データを1回の撮影動作により得られるX線透過データとして取り扱って被写体の断層像を構築することを特徴とするX線撮影装置。
Between the X-ray source and the X-ray detector arranged opposite to each other, a holding unit that holds the subject is arranged, and the subject held by the holding unit is placed on the X-ray optical axis from the X-ray source. Rotation driving means for giving rotation about an orthogonal rotation axis, and rotating the subject while irradiating the subject held by the holding portion with X-rays, and outputting the X-ray detector for each minute rotation angle In an X-ray imaging apparatus provided with image forming means for reconstructing X-ray transmission data obtained by an imaging operation for capturing image and constructing a tomographic image of a subject orthogonal to the rotation axis ,
A holding unit moving mechanism capable of moving the holding unit on a plane orthogonal to the X-ray optical axis from the X-ray source at an integer pitch of the pixel pitch of the X-ray detector; the X-ray imaging means, the X-ray transmission data taken each at a plurality of positions shifting the holding portion by its holding portion moving mechanism in one pitch of the integral fraction, X-rays obtained by one shooting operation An X-ray imaging apparatus characterized by constructing a tomographic image of a subject by handling as transmission data.
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Publication number Priority date Publication date Assignee Title
US7113566B1 (en) * 2005-07-15 2006-09-26 Jordan Valley Applied Radiation Ltd. Enhancing resolution of X-ray measurements by sample motion
US8243878B2 (en) 2010-01-07 2012-08-14 Jordan Valley Semiconductors Ltd. High-resolution X-ray diffraction measurement with enhanced sensitivity
US8687766B2 (en) 2010-07-13 2014-04-01 Jordan Valley Semiconductors Ltd. Enhancing accuracy of fast high-resolution X-ray diffractometry
US8437450B2 (en) 2010-12-02 2013-05-07 Jordan Valley Semiconductors Ltd. Fast measurement of X-ray diffraction from tilted layers
US8781070B2 (en) 2011-08-11 2014-07-15 Jordan Valley Semiconductors Ltd. Detection of wafer-edge defects
JP5907824B2 (en) * 2012-06-29 2016-04-26 株式会社リガク X-ray imaging apparatus and X-ray imaging method
US9726624B2 (en) 2014-06-18 2017-08-08 Bruker Jv Israel Ltd. Using multiple sources/detectors for high-throughput X-ray topography measurement
EP3745120B1 (en) * 2016-05-24 2022-11-02 Jed Co., Ltd X-ray inspection apparatus and method for controlling x-ray inspection apparatus
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6253636A (en) * 1985-09-02 1987-03-09 株式会社島津製作所 Image pickup apparatus
JPH0438938A (en) * 1990-06-04 1992-02-10 Toshiba Corp Image reconstruction
JPH0599643A (en) * 1991-10-09 1993-04-23 Hitachi Ltd Method for x-ray inspection of soldering portion
JPH0682305A (en) * 1992-08-31 1994-03-22 Shimadzu Corp Two-dimensional detector
JPH0737075A (en) * 1993-04-05 1995-02-07 General Electric Co <Ge> Method for generating images having high resolution for radiation imaging system, x-ray imaging system and incident radiation and method for enhancing decomposable space frequency of digital radiation imaging system
JP2004194946A (en) * 2002-12-19 2004-07-15 Toshiba Corp X-ray computer tomograph

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6253636A (en) * 1985-09-02 1987-03-09 株式会社島津製作所 Image pickup apparatus
JPH0438938A (en) * 1990-06-04 1992-02-10 Toshiba Corp Image reconstruction
JPH0599643A (en) * 1991-10-09 1993-04-23 Hitachi Ltd Method for x-ray inspection of soldering portion
JPH0682305A (en) * 1992-08-31 1994-03-22 Shimadzu Corp Two-dimensional detector
JPH0737075A (en) * 1993-04-05 1995-02-07 General Electric Co <Ge> Method for generating images having high resolution for radiation imaging system, x-ray imaging system and incident radiation and method for enhancing decomposable space frequency of digital radiation imaging system
JP2004194946A (en) * 2002-12-19 2004-07-15 Toshiba Corp X-ray computer tomograph

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