JP2023034849A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2023034849A5 JP2023034849A5 JP2021141294A JP2021141294A JP2023034849A5 JP 2023034849 A5 JP2023034849 A5 JP 2023034849A5 JP 2021141294 A JP2021141294 A JP 2021141294A JP 2021141294 A JP2021141294 A JP 2021141294A JP 2023034849 A5 JP2023034849 A5 JP 2023034849A5
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- substrate
- pattern
- mold
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021141294A JP7705310B2 (ja) | 2021-08-31 | 2021-08-31 | インプリント装置、インプリント方法、物品の製造方法、及び、プログラム |
| US17/874,785 US20230060799A1 (en) | 2021-08-31 | 2022-07-27 | Imprint apparatus, method of imprinting, method of manufacturing article, and program therefor |
| KR1020220105204A KR20230032928A (ko) | 2021-08-31 | 2022-08-23 | 임프린트 장치, 임프린트 방법, 물품 제조 방법, 및 이를 위한 프로그램 |
| US19/285,510 US20250353244A1 (en) | 2021-08-31 | 2025-07-30 | Imprint apparatus, method of imprinting, method of manufacturing article, and program therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021141294A JP7705310B2 (ja) | 2021-08-31 | 2021-08-31 | インプリント装置、インプリント方法、物品の製造方法、及び、プログラム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023034849A JP2023034849A (ja) | 2023-03-13 |
| JP2023034849A5 true JP2023034849A5 (cg-RX-API-DMAC7.html) | 2024-07-31 |
| JP7705310B2 JP7705310B2 (ja) | 2025-07-09 |
Family
ID=85288342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021141294A Active JP7705310B2 (ja) | 2021-08-31 | 2021-08-31 | インプリント装置、インプリント方法、物品の製造方法、及び、プログラム |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US20230060799A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP7705310B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR20230032928A (cg-RX-API-DMAC7.html) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4660581B2 (ja) * | 2008-09-19 | 2011-03-30 | 株式会社東芝 | パターン形成方法 |
| KR20110021291A (ko) * | 2009-08-26 | 2011-03-04 | 엘아이지에이디피 주식회사 | 미세패턴 형성장치 |
| JP2013008815A (ja) * | 2011-06-24 | 2013-01-10 | Toshiba Corp | パターン形成装置、パターン形成方法及びパターン形成用プログラム |
| JP2016021544A (ja) * | 2014-07-11 | 2016-02-04 | 株式会社東芝 | インプリント装置およびインプリント方法 |
| JP6823374B2 (ja) * | 2016-03-10 | 2021-02-03 | キヤノン株式会社 | パターンの欠陥の分析を行う方法、インプリント装置、及び物品の製造方法 |
| KR102527567B1 (ko) * | 2018-02-23 | 2023-05-03 | 에스케이하이닉스 주식회사 | 파티클에 의한 템플레이트 손상을 억제하는 임프린트 패턴 형성 방법 |
-
2021
- 2021-08-31 JP JP2021141294A patent/JP7705310B2/ja active Active
-
2022
- 2022-07-27 US US17/874,785 patent/US20230060799A1/en not_active Abandoned
- 2022-08-23 KR KR1020220105204A patent/KR20230032928A/ko not_active Ceased
-
2025
- 2025-07-30 US US19/285,510 patent/US20250353244A1/en active Pending