JP2023031680A - Cutting device - Google Patents

Abstract

To provide a cutting device capable of efficiently supplying cutting water to a processing point by suppressing clinging of the cutting water to a rear side of the processing point.SOLUTION: A cutting device comprises: a holding table for holding a workpiece; a cutting unit 20 including a cutting blade 21 for cutting the workpiece held by the holding table; and a cutting water supply nozzle for supplying cutting water to the cutting blade 21. The cutting blade 21 includes a circular base 61 and a cutting blade part 62 formed at an outer edge of the circular base 61. The cutting unit 20 includes a fixed flange 71 fixed to a rotary shaft of a rotatable spindle 22, and a nut 72 for holding the cutting blade 21 between the nut and the fixed flange 71. On outer peripheries 92, 93, 91 and 94 of at least any one of the fixed flange 71, the circular base 61, and the nut 72, unevenness 99 is formed.SELECTED DRAWING: Figure 5

Description

TECHNICAL FIELD The present invention relates to a cutting device that processes a workpiece with a cutting blade.

In a cutting device that cuts a workpiece with a cutting blade, if it is difficult to supply cutting water directly to the processing point, cutting water is supplied to the cutting blade before the processing point, and the cutting blade rotates to cut to the processing point. A cutting device that supplies water is known (see Patent Document 1, for example).

JP 2010-042490 A

However, there is a problem in that the cutting water passes through the machining point as the cutting blade rotates, and the cutting water is not efficiently supplied to the machining point, resulting in reduced cooling and cleaning effects of the machining point. In addition, if the cutting water containing cutting waste that has passed through the machining point is entrained to the upper side of the cutting blade and drips from the upper side of the cutting blade, there is a risk that the dirt will adhere to the workpiece again.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and its object is to provide a cutting apparatus capable of suppressing entrainment of cutting water behind a machining point and efficiently supplying cutting water to the machining point. is.

In order to solve the above-described problems and achieve the object, the cutting apparatus of the present invention provides a cutting unit having a holding table for holding a workpiece and a cutting blade for cutting the workpiece held on the holding table. and a cutting water supply nozzle for supplying cutting water to the cutting blade, the cutting blade including a circular base and a cutting edge portion formed on the outer edge of the circular base, and the cutting unit includes a fixed flange fixed to the axis of rotation of a rotatable spindle and a nut sandwiching the cutting blade between the fixed flange, the circular base and the nut and at least one of the outer circumferences thereof is formed with unevenness.

Further, in order to solve the above-described problems and achieve the object, the cutting apparatus of the present invention has a holding table for holding a workpiece and a cutting blade for cutting the workpiece held on the holding table. A cutting unit and a cutting water supply nozzle for supplying cutting water to the cutting blade, the cutting blade having a cutting edge, and the cutting unit being fixed to the rotating shaft of a rotatable spindle a fixed flange, a hold-down flange sandwiching the cutting blade between the fixed flange, and a nut fixing the hold-down flange and the cutting blade to the fixed flange, wherein the fixed flange and the Concavities and convexities are formed on at least one of the pressing flange and the nut.

According to the present invention, cutting water can be efficiently supplied to the machining point by suppressing entrainment of cutting water behind the machining point.

FIG. 1 is a perspective view showing a configuration example of a cutting device according to Embodiment 1. FIG. FIG. 2 is an exploded perspective view showing a main part of the cutting unit of FIG. 1. FIG. 3 is a perspective view showing a main part of the cutting water supply nozzle of FIG. 1. FIG. 4 is a front view showing a first example of a main part of the cutting unit of FIG. 1. FIG. 5 is a cross-sectional view showing a first example of a main part of the cutting unit of FIG. 1. FIG. 6 is a front view showing a second example of the main part of the cutting unit of FIG. 1. FIG. 7 is a cross-sectional view showing a second example of the main part of the cutting unit of FIG. 1. FIG. 8 is a front view showing a third example of the main part of the cutting unit of FIG. 1. FIG. 9 is a cross-sectional view showing a third example of the main part of the cutting unit of FIG. 1. FIG. FIG. 10 is an exploded perspective view showing a main part of a cutting unit of a cutting device according to Embodiment 2. FIG. 11 is a front view showing a fourth example of the essential part of the cutting unit of FIG. 10. FIG. 12 is a cross-sectional view showing a fourth example of the main part of the cutting unit of FIG. 10. FIG. 13 is a front view showing a fifth example of the essential part of the cutting unit of FIG. 10. FIG. 14 is a cross-sectional view showing a fifth example of the main part of the cutting unit of FIG. 10. FIG. 15A and 15B are diagrams for explaining the effects of the cutting device according to the first embodiment. FIG.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A cutting device 1 according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing a configuration example of a cutting device 1 according to Embodiment 1. FIG. FIG. 2 is an exploded perspective view showing the essential parts of the cutting unit 20 of FIG. 3 is a perspective view showing a main part of the cutting water supply nozzle 30 of FIG. 1. FIG. The cutting apparatus 1 includes a holding table 10, a cutting unit 20, a cutting water supply nozzle 30, a moving unit 40, and a control unit 50, as shown in FIG.

In the first embodiment, the workpiece 100 to be processed by the cutting apparatus 1 is, for example, a disk-shaped semiconductor device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like as a base material. Device wafers and the like. As shown in FIG. 1, a workpiece 100 has devices 103 formed in regions partitioned by a plurality of planned division lines 102 formed in a grid pattern on a flat surface 101 . In Embodiment 1, the workpiece 100 has the adhesive tape 105 attached to the back surface 104 on the back side of the front surface 101, and the annular frame 106 is attached to the outer edge of the adhesive tape 105, but the present invention is limited to this. not. In the present invention, the workpiece 100 may be a rectangular package substrate having a plurality of resin-sealed devices, a ceramic plate, a glass plate, or the like.

The holding table 10 has a disk-shaped frame body with a recess and a disk-shaped suction portion fitted in the recess. The suction portion of the holding table 10 is made of porous ceramic or the like, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the holding table 10 is a holding surface 11 on which the workpiece 100 is placed and which sucks and holds the placed workpiece 100 . In Embodiment 1, the workpiece 100 is placed on the holding surface 11 with the surface 101 facing upward, and the holding surface 11 holds the placed workpiece 100 by suction from the rear surface 104 side via the adhesive tape 105 . The holding surface 11 and the upper surface of the frame of the holding table 10 are arranged on the same plane and formed parallel to the horizontal XY plane. The holding table 10 is movable in the X-axis direction parallel to the horizontal direction by the X-axis moving unit 41 of the moving unit 40, and in the vertical Z-axis direction perpendicular to the holding surface 11 by a rotation drive source (not shown). It is rotatably provided around an axis parallel to.

The cutting unit 20 includes a cutting blade 21, a spindle 22, a spindle housing 23, a mount unit 24, and a blade cover 25, as shown in FIGS. The spindle 22 is provided rotatably about an axis parallel to the Y-axis direction which is parallel to the horizontal direction and perpendicular to the X-axis direction. It rotates clockwise (in the direction of the arrow in FIG. 3) when viewed from the front (−Y direction shown in FIG. 2) to the rear (+Y direction shown in FIG. 2). The outer periphery of the spindle 22 is tapered such that the outer diameter gradually decreases toward the tip (-Y direction shown in FIG. 2). A cutting blade 21 is attached to the tip of the spindle 22 via a mount unit 24 .

The cutting blade 21 is a so-called hub blade in the first embodiment, and as shown in FIG. and an annular cutting edge portion 62 projecting from the outer edge of the circular base 61 . The cutting blade 21 is mounted on the tip of the spindle 22 through the mount unit 24 in the mounting hole 63, and is rotated clockwise when viewed from the front to the rear by the spindle 22, which serves as the rotation axis. to cut. The circular base 61 is made of metal such as aluminum alloy, for example. The cutting edge portion 62 is made of, for example, abrasive grains such as diamond or CBN (Cubic Boron Nitride), and a bonding material such as metal or resin, and is formed to have a predetermined thickness.

The spindle housing 23 exposes the tip of the spindle 22 and accommodates the portion other than the tip, so that the spindle 22 is inserted. The spindle housing 23 supports the spindle 22 rotatably around its axis.

The mount unit 24 includes a fixed flange 71, a nut 72, and a screw 73, as shown in FIG. 2 in the first embodiment. The fixed flange 71 is integrally formed with a cylindrical boss portion 81 extending in the front-rear direction (the Y-axis direction shown in FIG. 2) and protruding radially outward from the boss portion 81 from the rear side of the boss portion 81 . and a cylindrical portion 83 formed integrally with the flange portion 82 so as to protrude further rearward. The fixed flange 71 has a boss portion 81, a flange portion 82, and a cylindrical portion 83, whose central axes overlap with each other, and these central axes are arranged along the Y-axis direction.

A mounting hole 84 is formed inside the fixed flange 71 over the boss portion 81 , the flange portion 82 and the cylindrical portion 83 . The mounting hole 84 is formed in a tapered shape so that the base end (+Y direction shown in FIG. 2) side is tapered such that the inner diameter gradually decreases toward the distal end, and is fitted to the outer periphery of the distal end of the spindle 22 without a gap. be. The fixed flange 71 is fixed to the tip of the rotating shaft of the spindle 22 by inserting the screw 73 into the mounting hole 84 and screwing it into the screw hole 27 formed at the tip of the rotating shaft of the spindle 22 and tightening it. .

The cutting blade 21 is attached to the boss portion 81 from the rear surface 67 side. Specifically, as shown in FIG. 2, the boss portion 81 is inserted into the mounting hole 63 of the circular base 61 of the cutting blade 21 from the rear surface 67 side. The nut 72 has a thread groove formed in the inner periphery of a mounting hole formed in the center and screwed into a thread groove 88 formed in the tip of the outer peripheral surface 85 of the boss portion 81 to which the cutting blade 21 is mounted. be tightened. Thus, the nut 72 clamps the cutting blade 21 along the axial direction between the nut 72 and the fixed flange 71 to fix the cutting blade 21 to the tip of the spindle 22 together with the fixed flange 71 .

The rear surface 86 of the nut 72 faces the front surface 66 of the attached cutting blade 21 , and the surface 86 of the nut 72 supports the front surface 66 of the cutting blade 21 . The front surface 87 of the flange portion 82 faces the rear surface 67 of the mounted cutting blade 21 , and the surface 87 of the flange portion 82 supports the rear surface 67 of the cutting blade 21 . Further, the outer peripheral surface 85 of the boss portion 81 faces the inner peripheral surface of the mounting hole 63 of the circular base 61 of the mounted cutting blade 21 , and the boss portion 81 forms the circular base of the cutting blade 21 at the outer peripheral surface 85 . It supports the inner peripheral surface of the mounting hole 63 of the base 61 .

The blade cover 25 is attached to the tip side of the spindle housing 23 and covers the cutting blade 21 attached to the tip of the spindle 22 from above, front and rear. A plurality of water channels are formed inside the blade cover 25, and as shown in FIG. 3, a cutting water supply source (not shown) is connected to the other upper ends of the plurality of water channels. The cutting water supplied by the cutting water supply source is pure water, for example.

The cutting water supply nozzle 30 includes a nozzle 31, a nozzle 32, and a nozzle 33, as shown in FIG. The nozzles 31 , 32 , and 33 are each provided at one lower end of each water channel formed inside the blade cover 25 .

As shown in FIG. 3, the nozzle 31 supplies cutting water supplied from a cutting water supply source (not shown) through a water channel formed in the blade cover 25 to the side portion of the cutting edge portion 62 of the cutting blade 21. A blade cooler nozzle. Here, the side portion of the cutting edge portion 62 is a portion of the side surface of the cutting edge portion 62 that passes near the processing point. Further, the processing point refers to a region of the workpiece 100 that is cut by the rotating cutting blade 21, and is a region where the rotating cutting blade 21 and the workpiece 100 are in contact.

The nozzle 32 is a shower nozzle that supplies cutting water supplied from a cutting water supply source (not shown) through a water channel formed in the blade cover 25 to the front portion of the cutting edge portion 62 of the cutting blade 21 . Here, the front portion of the cutting edge portion 62 is the portion of the outer peripheral surface and the side surface of the cutting edge portion 62 passing in front of the processing point along the rotation direction.

The nozzle 33 is a spray nozzle that supplies cutting water supplied from a cutting water supply source (not shown) through a water channel formed in the blade cover 25 onto the workpiece 100 in front of the cutting edge portion 62 of the cutting blade 21 . be.

The spindle housing 23 is provided so as to be movable in the Y-axis direction with respect to the workpiece 100 held by the holding table 10 by the Y-axis movement unit 42 of the movement unit 40, and the Z-axis movement unit of the movement unit 40. 43 is provided so as to be movable in the Z-axis direction. A spindle 22 rotatably supported by a spindle housing 23, a cutting blade 21 attached to the tip of the spindle 22, a blade cover 25 attached to the tip side of the spindle housing 23, and cutting water provided in the blade cover 25. Nozzles 31 , 32 , 33 of supply nozzle 30 move with spindle housing 23 .

The cutting apparatus 1 sets the cutting blade 21 attached to the tip of the spindle 22 to a predetermined position with respect to the workpiece 100 held on the holding table 10 by the moving unit 40, and the nozzles 31, 32, 33 perform cutting. By supplying water and rotating the cutting blade 21 and moving it relative to the workpiece 100 along the line 102 to be divided, the cutting blade 21 moves the workpiece 100 along the line 102 to be divided. Cut along. The cutting device 1 supplies cutting water to the front portion of the cutting blade 21 through the nozzle 32, i.e., to the front (front side) of the processing point along the rotational direction. It is guided towards the working point by rotation.

The control unit 50 controls the operation of each component of the cutting device 1 to cause the cutting device 1 to perform cutting processing by the cutting unit 20 . The control unit 50 includes a computer system in the first embodiment. The computer system including the control unit 50 includes an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as ROM (Read Only Memory) or RAM (Random Access Memory), and an input/output interface device. The arithmetic processing device of the control unit 50 performs arithmetic processing according to a computer program stored in the storage device of the control unit 50, and outputs a control signal for controlling the cutting device 1 to the input/output interface device of the cutting device 1. to each component of the cutting device 1 via.

Next, this specification explains the unevenness|corrugation 99 which is the principal part of the cutting device 1 which concerns on Embodiment 1. FIG. In the first embodiment, at least one of the outer circumference 91 of the circular base 61, the outer circumferences 92 and 93 of the flange portion 82 and the cylindrical portion 83 of the fixed flange 71, and the outer circumference 94 of the nut 72 has irregularities 99 ( 4 to 9) are formed. In Embodiment 1, as shown in FIGS. 4, 6 and 8, the unevenness 99 is a plurality of convex portions continuously arranged at equal intervals in the circumferential direction over the entire circumference of the outer periphery on which the unevenness 99 is formed. formed by A plurality of convex portions forming the unevenness 99 protrude in the radial direction and are formed with a constant thickness that is greater than the cutting edge portion 62 of the cutting blade 21 in the axial direction of the spindle 22 . The radial length of the projections that make up the unevenness 99 and the axial thickness of the spindle 22 are the same as the axial thickness of the spindle 22 . It is formed to have sufficient length and thickness to disturb the airflow along the clockwise circumferential direction when viewed from the rear. For this reason, the unevenness 99 rotates with the rotation of the spindle 22 , thereby disturbing the flow of air along the circumferential direction created by the rotating cutting blade 21 and the mounting unit 24 , thereby allowing the nozzle 32 to cut the processing point. The cutting water supplied to the front of the cutting blade 21 is suppressed from rotating along with the rotation.

The projections that constitute the unevenness 99 may have a U-shape with the radially outer side formed along the circumferential direction, that is, a rectangular shape, or may have a shape that is pointed radially outwardly. . The unevenness 99 may be, for example, a gear shape in which a plurality of rectangular protrusions are arranged in the circumferential direction at intervals approximately equal to the width of the protrusion in the circumferential direction, or may be a plurality of sharp-shaped protrusions. It may have a sawtooth shape in which the convex portions are arranged in the circumferential direction at a constant pitch. Also, the convex portions may be formed continuously at predetermined intervals over the circumference, or may be formed partially or partially at a plurality of locations without being formed over the circumference.

Next, in this specification, a first example, a second example, and a third example, which are specific aspects of the unevenness 99, will be described. FIG. 4 is a front view showing a first example of a main part of the cutting unit 20 of FIG. 1. FIG. FIG. 5 is a cross-sectional view showing a first example of the essential parts of the cutting unit 20 of FIG. FIG. 6 is a front view showing a second example of the essential parts of the cutting unit 20 of FIG. FIG. 7 is a cross-sectional view showing a second example of the essential parts of the cutting unit 20 of FIG. FIG. 8 is a front view showing a third example of the essential parts of the cutting unit 20 of FIG. FIG. 9 is a cross-sectional view showing a third example of the essential parts of the cutting unit 20 of FIG.

A first example of the cutting device 1 according to the first embodiment is, as shown in FIGS. is. In the first example, the outer periphery 92 of the flange portion 82 is formed in a two-stepped shape so that the circular base 61 of the cutting blade 21, the nut 72, and the cutting edge portion 62 are sandwiched as shown in FIG. It has a symmetrical shape left and right (-Y direction and +Y direction shown in FIG. 5, front and back) so that the unevenness 99 can be formed symmetrically in the front and back with the cutting edge portion 62 of the cutting blade 21 interposed therebetween. In the first example, as shown in FIG. 4, the diameters of the outer peripheries 92 and 94 on which the unevenness 99 is formed are the same, and the respective unevennesses 99 formed on the outer peripheries 92 and 94 extend in the axial direction of the spindle 22 (front-rear direction). are arranged so as to overlap each other. In the first example, as shown in FIG. 5, the unevenness 99 formed on the outer circumference 94, the cutting edge portion 62 of the cutting blade 21, and the unevenness 99 formed on the outer circumference 92 are arranged at regular intervals in the front-rear direction. are placed in Therefore, in the first example, when the spindle 22 rotates, the cutting blade 21 and the mount unit 24 that rotate together with the spindle 22 are less likely to become eccentric, making it easy to maintain balance.

As shown in FIGS. 6 and 7, the second example of the cutting device 1 according to the first embodiment is different from the first example in that the recesses and protrusions 99 formed on the rear side of the cutting edge portion 62 of the cutting blade 21, that is, the fixed flange 71 The position of the unevenness 99 formed on the outer circumference 92 of the flange portion 82 is changed so as to approach the cutting edge portion 62 of the cutting blade 21 . In the second example, the unevenness 99 on the rear side of the cutting edge portion 62 is closer to the cutting edge portion 62 of the cutting blade 21 than in the first example. The effect of suppressing rotation is enhanced more than in the first example.

In the second example, as shown in FIG. 6, the diameters of outer peripheries 92 and 94 formed with irregularities 99 are different, and the respective irregularities 99 formed on the outer peripheries 92 and 94 extend in the axial direction (front-rear direction) of the spindle 22. are arranged so that they do not overlap. In a second example, as shown in FIG. 7, the unevenness 99 formed on the outer circumference 94, the cutting edge portion 62 of the cutting blade 21, and the unevenness 99 formed on the outer circumference 92 are formed with different diameters. ing. Thus, in the second example, as shown in FIG. 6 and FIG. It is formed asymmetrically in the front-rear direction with the cutting edge portion 62 of the cutting blade 21 interposed therebetween. In such a second example, the cutting blade 21 that rotates together with the spindle 22 is cut or made a hole in the circular base 61 of the cutting blade 21 or the mount unit 24 where the unevenness 99 is not formed. And the eccentricity of the mount unit 24 can be prevented and balanced.

In the third example of the cutting device 1 according to the first embodiment, as shown in FIGS. The position of the unevenness 99 is changed so as to be formed on the outer circumference 91 of the circular base 61 of the cutting blade 21 . In the third example, the unevenness 99 on the front side of the cutting edge portion 62 is closer to the cutting edge portion 62 of the cutting blade 21 than in the first and second examples, so that the cutting water due to the unevenness 99 flows into the cutting blade. The effect of suppressing rotation along with the rotation of 21 is enhanced as compared with the first and second examples. In the third example, as in the second example, two unevennesses 99 are formed asymmetrically in the front-rear direction with the cutting edge portion 62 of the cutting blade 21 interposed therebetween. The eccentricity of the cutting blade 21 and the mount unit 24 rotating together with the spindle 22 can be prevented and the balance can be maintained by cutting or making holes in the portion where the unevenness 99 is not formed.

In the first to third examples, unevenness 99 is formed on both front and rear sides of the cutting edge portion 62 of the cutting blade 21, but the present invention is not limited to this. The unevenness 99 may be formed only on one of the front and rear sides of the blade portion 62 . In addition, in the first to third examples, one unevenness 99 is formed on each of the front and rear sides of the cutting edge 62 of the cutting blade 21, but the present invention is not limited to this, Concavities and convexities 99 may be formed at two or more locations on either the front or rear side of the cutting edge portion 62 of the cutting blade 21 .

The cutting apparatus 1 according to Embodiment 1 having the above configuration includes the outer circumference 91 of the circular base 61, the outer circumferences 92 and 93 of the flange portion 82 and the cylindrical portion 83 of the fixed flange 71, and the outer circumference of the nut 72. Asperities 99 are formed on at least one of 94 and . For this reason, in the cutting device 1 according to the first embodiment, the unevenness 99 rotates as the spindle 22 rotates, thereby causing the air flow along the circumferential direction created by the rotating cutting blade 21 and the mount unit 24 to move. By disturbing, cutting water supplied to the front of the machining point by the nozzle 32 is suppressed from entraining to the rear of the machining point. It is possible to suppress the risk of reattachment of dirt to the 100, and reduce the amount of cutting water that passes through and circulates behind the processing point, so that the cutting water supplied by the nozzle 32 can be sufficiently efficiently supplied to the processing point. There is an operational effect.

[Embodiment 2]
A cutting device 1-2 according to Embodiment 2 of the present invention will be described with reference to the drawings. FIG. 10 is an exploded perspective view showing the essential parts of the cutting unit 20-2 of the cutting device 1-2 according to the second embodiment. FIG. 11 is a front view showing a fourth example of the essential parts of the cutting unit 20-2 of FIG. FIG. 12 is a cross-sectional view showing a fourth example of the essential parts of the cutting unit 20-2 of FIG. FIG. 13 is a front view showing a fifth example of the essential parts of the cutting unit 20-2 of FIG. FIG. 14 is a cross-sectional view showing a fifth example of the essential parts of the cutting unit 20-2 of FIG. In FIGS. 10 to 14, the same reference numerals are assigned to the same parts as in the first embodiment, and the description thereof is omitted.

A cutting apparatus 1-2 according to the second embodiment is the same as the first embodiment except that the cutting unit 20 is changed to a cutting unit 20-2. As shown in FIG. 10, the cutting unit 20-2 has a cutting blade 21 in the cutting unit 20, which is a so-called hubless blade having an annular cutting edge portion 62 and no circular base 61. 21-2, and the mount unit 24 is modified to include a pressing flange 74. FIG. In Embodiment 2, the shape of the boss portion 81, the flange portion 82, the cylindrical portion 83, and the nut 72 of the fixed flange 71 are changed according to the shape of the cutting blade 21-2. It is the same as the first embodiment.

In the second embodiment, as shown in FIG. 10, the boss portion 81 is inserted into the mounting hole 63 formed in the center of the cutting edge portion 62 of the cutting blade 21-2 from the rear surface 67 side. In the second embodiment, the boss portion 81 is further inserted into the mounting hole 76 formed in the center of the pressing flange 74 from the rear surface 89 side. In the second embodiment, the nut 72 has a thread groove formed in the inner periphery of the mounting hole formed in the center, at the tip of the outer peripheral surface 85 of the boss portion 81 to which the cutting blade 21-2 and the pressing flange 74 are mounted. It is screwed into the formed screw groove 88 and tightened. Thus, in the second embodiment, the nut 72 fixes the pressing flange 74 and the cutting blade 21 to the fixed flange 71, and the cutting blade 21-2 is axially positioned between the pressing flange 74 and the fixed flange 71. , the cutting blade 21-2 is fixed to the tip of the spindle 22 together with the fixing flange 71 and the pressing flange 74. As shown in FIG.

In the second embodiment, the rear side surface 89 of the holding flange 74 faces the front side surface 66 of the attached cutting blade 21-2, and the holding flange 74 faces the front side of the cutting blade 21-2 at the surface 89. Support surface 66 . Further, in the second embodiment, the outer peripheral surface 85 of the boss portion 81 faces the inner peripheral surface of the mounting hole 63 of the cutting edge portion 62 of the attached cutting blade 21-2, and the boss portion 81 has the outer peripheral surface 85 support the inner peripheral surface of the mounting hole 63 of the cutting edge portion 62 of the cutting blade 21-2. Further, as in the first embodiment, the surface 87 of the flange portion 82 supports the rear side surface 67 of the cutting blade 21-2.

In the second embodiment, at least one of the outer peripheries 92 and 93 of the flange portion 82 and the cylindrical portion 83 of the fixed flange 71, the outer perimeter 95 of the pressing flange 74, and the outer perimeter 94 of the nut 72 has the same structure as in the first embodiment. Asperities 99 (see FIGS. 11-14) of similar shape and nature are formed.

Next, in this specification, a fourth example and a fifth example, which are specific aspects of the unevenness 99 that is the main part of the cutting device 1-2 according to the second embodiment, will be described. In a fourth example of the cutting device 1-2 according to Embodiment 2, as shown in FIGS. It is what I did. In the fourth example, the shape of the flange portion 82 of the fixed flange 71 is formed to be symmetrical to the shape of the holding flange 74 and the nut 72 in FIG. Similarly to , it is possible to form unevenness 99 symmetrically in the front-rear direction across the cutting edge portion 62 of the cutting blade 21 . Therefore, when the spindle 22 rotates, the cutting blade 21 and the mount unit 24 rotating together with the spindle 22 can be easily balanced.

In the fifth example of the cutting device 1-2 according to the second embodiment, as shown in FIGS. The position of the unevenness 99 formed on the outer periphery 92 of the pressing flange 74 is changed so as to be formed on the outer periphery 95 of the pressing flange 74 .

In the fifth example, the unevenness 99 is brought closer to the cutting edge portion 62 of the cutting blade 21 than in the fourth example. It is higher than 4 cases. In addition, in the fifth example, as in the fourth example, the shape of the fixing flange 71 is formed in the same manner as the shape of the pressing flange 74, so that the cutting edge portion 62 of the cutting blade 21 is symmetrically forward and backward. It is possible to form unevenness 99 . Therefore, when the spindle 22 rotates, the cutting blade 21 and the mount unit 24 rotating together with the spindle 22 can be easily balanced.

The cutting device 1-2 according to the second embodiment having the above configuration is the cutting device 1 of the first embodiment, except that the cutting blade 21 does not have the circular base 61, and the mounting unit 24 is changed to include a pressing flange 74 , and the outer circumference 91 of the circular base 61 , which is one of candidates for the position where the unevenness 99 is formed, is changed to the outer periphery 95 of the pressing flange 74 . Therefore, the cutting device 1-2 according to the second embodiment has the same effects as those of the first embodiment.

Next, the inventors of the present invention confirmed the effects of the cutting device 1 according to the first embodiment. 15A and 15B are diagrams illustrating the effects of the cutting device 1 according to Embodiment 1. FIG. FIG. 15 summarizes the results obtained when confirming the action and effect.

The column on the right side of "Comparative Example" in FIG. The state of the cutting water when the is rotated is shown in a schematic diagram. The column on the right side of "Example" in FIG. 15 shows cutting results when the first example of the cutting apparatus 1 according to Embodiment 1 rotates the spindle 22 on which the cutting blade 21 is mounted while supplying cutting water. The state of water is shown in a schematic diagram.

As shown in FIG. 15, in a conventional equivalent cutting device in which unevenness is not formed, a large amount of cutting water is entrained up to the upper part of the cutting blade as the cutting blade rotates, and stays at the machining point. It was confirmed that the flow rate of the cutting water, which exerts the effect of washing and cooling the cutting blade and the workpiece, is reduced. On the other hand, in the first example of the cutting apparatus 1 according to the first embodiment in which the unevenness 99 is formed, the amount of cutting water that rotates along with the rotation of the cutting blade 21 is greatly reduced compared to the conventional case, and the amount of cutting water is large. is supplied to the processing point and the flow rate of the cutting water that exerts the effect of washing and cooling the cutting blade 21 and the workpiece 100 at the processing point increases, and the cutting water flows along the upper surface of the workpiece 100 (surface 101) It was confirmed that the Accordingly, in the embodiment shown in FIG. 15, by forming irregularities 99 on the outer circumference 92 of the flange portion 82 of the fixed flange 71 and the outer circumference 94 of the nut 72, the cutting water supplied from the nozzle 32 to the front of the machining point is reduced. It has been clarified that the cutting water supplied from the nozzle 32 can be efficiently supplied to the machining point by suppressing the entrainment of the cutting water to the machining point.

Further, FIG. 15 shows the unevenness 99 formed according to the first example, but even when other unevenness 99 such as the second or third example is formed, the tendency is the same as that of the example shown in FIG. As a result, the cutting water supplied from the nozzle 32 to the front of the working point is suppressed from entraining to the rear of the working point, and the cutting water supplied from the nozzle 32 can be efficiently supplied to the working point.

Also, with respect to the cutting device 1-2 according to the second embodiment, the cutting device equivalent to the conventional cutting device in which unevenness is not formed, and the fourth example and the cutting device 1-2 according to the second embodiment in which the unevenness 99 is formed. When the five examples were compared in the same manner as in the first embodiment, by forming the unevenness 99 in the same manner as in the first embodiment, the cutting water supplied from the nozzle 32 to the front of the machining point is entrained to the rear of the machining point. As a result, the cutting water supplied from the nozzle 32 can be efficiently supplied to the machining point.

It should be noted that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the present invention.

1, 1-2 Cutting Device 10 Holding Table 20, 20-2 Cutting Unit 21, 21-2 Cutting Blade 22 Spindle 24 Mounting Unit 30 Cutting Water Supply Nozzle 31, 32, 33 Nozzle 61 Circular Base 62 Cutting Edge 71 Fixed Flange 72 Nut 74 Pressing flange 91, 92, 93, 94, 95 Periphery 99 Unevenness 100 Workpiece

Claims (2)

a holding table that holds the workpiece;
a cutting unit having a cutting blade for cutting a workpiece held on the holding table;
a cutting water supply nozzle that supplies cutting water to the cutting blade,
The cutting blade includes a circular base and a cutting edge formed on the outer edge of the circular base,
The cutting unit
a fixed flange fixed to the axis of rotation of a rotatable spindle; and a nut sandwiching the cutting blade therebetween;
A cutting device, wherein irregularities are formed on the outer periphery of at least one of the fixed flange, the circular base, and the nut. a holding table that holds the workpiece;
a cutting unit having a cutting blade for cutting a workpiece held on the holding table;
a cutting water supply nozzle that supplies cutting water to the cutting blade,
The cutting blade has a cutting edge,
The cutting unit includes a fixed flange fixed to the rotating shaft of a rotatable spindle, a hold-down flange that sandwiches the cutting blade between the fixed flange, the hold-down flange, and the cutting blade. a nut that secures to the flange;
A cutting device, wherein unevenness is formed on the outer periphery of at least one of the fixing flange, the holding flange, and the nut.

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