JP2023026818A - Cleaning method of cover - Google Patents

Abstract

To effectively clean and remove fouling on an inner wall in the case of cleaning the inner wall of a cover of a cleaning device.SOLUTION: A method of cleaning an inner wall 348 of a cover 34 of a cleaning device 3, comprises at least: a table 30 including a holding surface 302 that holds a substrate 19; a cleaning water supply nozzle 35 that supplies a cleaning water 356 to the substrate 19 held by the table 30; and the cover 34 that surrounds an outer periphery of the table 30. The method includes: a step of supply the cleaning water 356 by the cleaning water supply nozzle 35 to the holding surface 302 and accumulating the cleaning water 356 onto the holding surface 302; a step of splashing the cleaning water 356 accumulated onto the table 30 in the accumulation step to the inner wall 348 of the cover 34 while rotating the table 30; and a step of removing the cleaning water 356 attached to the inner wall 348 of the cover 34 by a wind pressure by the rotation while rotating the table 30 after the execution of a discharge step.SELECTED DRAWING: Figure 2

Description

The present invention relates to a cover cleaning method for cleaning the inner wall of a cover of a cleaning device.

2. Description of the Related Art For cleaning a semiconductor substrate, a cleaning apparatus is used that cleans the substrate by rotating the holding table while supplying cleaning water to the substrate held on the holding table (see, for example, Patent Document 1).

JP 2012-015347 A

The cleaning space of the cleaning equipment is surrounded by a cylindrical cover, but because the cleaning water scatters, the inner wall of the cover is stained with foreign substances removed by cleaning, and the dirt adhering to the inner wall falls onto the substrate. There is a risk that the substrate will be contaminated again.

Conventionally, the cleaning method for cleaning the inner wall of the cover is to supply cleaning water to the upper surface of the holding table arranged in the cover while rotating the holding table at a constant speed to atomize and spread the cleaning water. A common method is to wet the inner wall of the cover. However, since the cleansing water is atomized, the diameter of the water droplets hitting the cover becomes small, and the amount of water at the collision point is small, resulting in a weak cleansing power.

Therefore, when cleaning the inner wall of the cover of the cleaning device, there is a problem of more effectively cleaning and removing dirt from the inner wall.

A cleaning apparatus comprising at least a holding table having a holding surface for holding a substrate, a cleaning water supply nozzle supplying cleaning water to the substrate held on the holding table, and a cover surrounding the outer circumference of the holding table. A cleaning method for cleaning the inner wall of a cover, comprising: a storing step of supplying the cleaning water to the holding surface by the cleaning water supply nozzle and storing the cleaning water on the holding surface; and rotating the holding table. a discharging step of blowing the wash water accumulated on the holding table in the storing step toward the inner wall of the cover; and a removing step of removing the cleaning water adhering to the inner wall of the cover.
Further, in the cover cleaning method according to the present invention, it is preferable to repeat the storing step, the discharging step, and the removing step a predetermined number of times.
Further, the cleaning apparatus includes a control unit for controlling at least the rotation of the holding table, the control unit controlling the height at which the cleaning water collides with the inner wall of the cover in the discharging step and the rotation of the holding table. In the method for cleaning a cover according to the present invention, in the discharging step, the speed and the speed are stored in a storage unit for storing the correlation data, and in the discharge step, the inner wall reaches the desired height based on the correlation data. It is preferable to control the rotation speed of the holding table so that the wash water impinges on it.
Further, in the cover cleaning method according to the present invention, in the storing step, a frame unit configured by bonding a sheet to an annular frame having an opening so as to cover the opening is held on the holding surface. Instead of the surface, the washing water may be accumulated on the sheet corresponding to the opening.
Further, in the cover cleaning method according to the present invention, in the storing step, a container having a convex portion on the outer periphery and a concave portion at the center surrounded by the convex portion is held on the holding surface, and the holding surface Alternatively, the cleaning water may be stored in the concave portion.

An inner wall of a cover of a cleaning apparatus comprising at least a holding table having a holding surface for holding a substrate, a cleaning water supply nozzle supplying cleaning water to the substrate held by the holding table, and a cover surrounding the outer circumference of the holding table. The cleaning method according to the present invention for cleaning the holding surface comprises a step of supplying cleaning water to the holding surface by a cleaning water supply nozzle and pooling the cleaning water on the holding surface; A discharging step of blowing the washing water accumulated on the top toward the inner wall of the cover, and a removing step of removing the washing water adhering to the inner wall of the cover by wind pressure caused by the rotation while rotating the holding table after the discharging step. By providing it, dirt on the inner wall of the cover can be washed and removed more effectively. In other words, unlike the conventional apparatus, after washing water is once stored on the holding surface of the holding table, the washing water is discharged radially outward as large droplets instead of fine sprays by rotating the holding table in the discharging step. The droplet-shaped washing water with a large amount of water hits the inner wall of the cover, so that the dirt can be more effectively removed from the inner wall (easily peeled off). After that, in the removing step, the cleaning water containing the dirt adhering to the inner wall is blown off and removed by the wind pressure caused by the rotation of the holding table, so that the dirt flows down together with the cleaning water, leaving no dirt on the inner wall. becomes possible.
Also, the washing apparatus comprises a control unit for controlling at least the rotation of the holding table, and the control unit stores correlation data between the height at which washing water collides with the inner wall of the cover in the discharging step and the rotational speed of the holding table. In the cover cleaning method according to the present invention, the control unit controls the rotational speed of the holding table in the discharge step based on the correlation data so that the cleaning water collides with the desired height of the inner wall. The control allows intensive and effective cleaning of the dirty targeted areas of the inner wall.
For example, in the storing step, by holding a frame unit configured by bonding a sheet to the holding surface so as to close the opening of the annular frame having the opening, instead of the holding surface, the sheet corresponding to the opening is held. Therefore, it is possible to store washing water efficiently.
Further, in the storing step, the holding surface of the holding table holds the container provided with the convex portion on the outer periphery and the concave portion surrounded by the convex portion in the center. Washing water can be stored efficiently.

It is a perspective view which shows an example of a washing|cleaning apparatus. FIG. 4 is a cross-sectional view for explaining a state in which a storage step is being performed; FIG. 10 is a cross-sectional view for explaining a state in which a releasing step is being performed; It is an example of correlation data in table format showing the correlation between the height at which wash water collides with the inner wall of the cover in the discharge step and the rotation speed of the holding table. FIG. 5 is a cross-sectional view for explaining a state in which a removal step is being performed; FIG. 10 is a perspective view showing an example of a container having a convex portion on the outer periphery and a concave portion surrounded by the convex portion in the center.

The cleaning apparatus 3 shown in FIG. 1 is, for example, a single substrate cleaning apparatus that supplies cleaning water to the substrate 19 held on the holding table 30 to clean the substrate 19 . In addition, the cleaning device 3 may be incorporated in a processing device such as a grinding device or a cutting device, or may be used alone.

The substrate 19 shown in FIG. 1 is, for example, a circular plate-shaped silicon semiconductor wafer, and devices 192 are arranged in grid-like regions partitioned by dividing lines 191 on a surface 190 of the substrate 19 facing upward. formed. For example, the back surface 193 of the substrate 19 is attached to the attachment surface (front surface) of the sheet 198 . The outer peripheral portion of the sheet 198 is attached to the annular frame 197, whereby the substrate 19 is supported by the annular frame 197 through the sheet 198, and becomes a work set 199 that can be handled using the annular frame 197. ing. The center of the annular frame 197 and the center of the substrate 19 are substantially aligned. The substrate 19 is not limited to the above example, and may be a single substrate instead of the work set 199. In addition to silicon, gallium arsenide, sapphire, gallium nitride, resin, ceramics, silicon carbide, or the like may be used. , a substrate on which no device is formed, a package substrate, or the like.

The cleaning apparatus 3 shown in FIG. 1 includes, for example, a holding table 30 having a holding surface 302 for holding the substrate 19, a rotating mechanism 32 for rotating the holding table 30, and a bottomed cylindrical shape with a circular opening on the upper end side. and a cleaning water supply nozzle 35 for supplying cleaning water to the substrate 19 .

The holding table 30 has, for example, a circular outer shape, and includes a suction unit 300 made of a porous member or the like to suck the work set 199 , and a frame 301 supporting the suction unit 300 . The suction unit 300 communicates with a suction source (not shown), and a suction force generated by suction by the suction source is applied to a holding surface 302 that is an exposed surface of the suction unit 300 and is formed flush with the upper surface of the frame 301 . By being transmitted, the holding table 30 can suction-hold the substrate 19 on the holding surface 302 . For example, four fixing clamps 304 for fixing the annular frame 197 are evenly arranged around the frame 301 . The fixed clamp 304 is, for example, a pendulum type fixed clamp, and when the holding table 30 starts to rotate, the weight receives centrifugal force and the clamp plates sandwich the annular frame 197 . Note that the fixed clamp 304 may be a spring-type mechanical clamp.

The rotating mechanism 32 arranged below the holding table 30 is composed of a spindle 320 whose upper end is fixed to the bottom surface of the holding table 30 and which can rotate around the axis in the vertical direction (Z-axis direction), a motor, and the like. and a rotary drive source 321 connected to the lower end side of the spindle 320 . As the rotation drive source 321 rotates the spindle 320, the holding table 30 fixed to the spindle 320 also rotates. The rotary drive source 321 is supported so as to be vertically movable by an elevating unit 322 such as an air cylinder. The elevating unit 322 lifts the rotary drive source 321 to raise the holding table 30 to position the holding table 30 at the loading/unloading height position of the substrate 19 , and lowers the rotary driving source 321 to lift the substrate. The holding table 30 holding the 19 is lowered to position the holding table 30 at the cleaning work height position within the cover 34 .

The holding table 30 is housed in the inner space of a cover 34 surrounding the outer circumference of the holding table 30 . In FIG. 1, the outer plate 340 and the like of the cover 34 are partially cut away so that the inside can be grasped. The cover 34 includes an outer plate 340 surrounding the holding table 30, a bottom plate 341 integrally connected to the lower portion of the outer plate 340 and having an opening in the center through which the spindle 320 is inserted, and an inner peripheral edge of the opening of the bottom plate 341. It is composed of an inner plate 342 provided. The cover 34 is supported by legs 343 having one end fixed to the bottom plate 341 . A discharge port 349 is formed through the bottom plate 341 in the thickness direction. A hose 346 is connected to discharge to.

As shown in FIGS. 1 and 2, between the lower surface of the holding table 30 and the upper end surface of the inner plate 342 of the cover 34, a circular skirt cover 344 is inserted into the spindle 320. When the holding table 30 is positioned at the working height position within the cover 34 , the skirt cover 344 hanging from the outer peripheral edge of the skirt cover 344 in the −Z direction surrounds the inner plate 342 . The skirt cover 344 prevents dirt-laden wash water flowing down from the holding surface 302 of the holding table 30 from entering the gap between the spindle 320 and the opening of the bottom plate 341 .

As shown in FIG. 1, the cover 34 contains a cleaning water supply nozzle 35 for spraying cleaning water onto the surface 190 of the substrate 19 sucked and held by the holding surface 302, and a substrate 19 sucked and held by the holding surface 302. An air injection nozzle 37 for injecting air onto the surface 190 is arranged. The cleaning water supply nozzle 35 and the air injection nozzle 37 are erected, for example, from the bottom plate 341 of the cover 34, and have a substantially L-shaped outer shape when viewed from the side. It opens toward the holding surface 302 of the table 30 . Both nozzles are rotatable around the axis in the Z-axis direction, and each injection port can be moved from above the holding table 30 to the retracted position. The cleaning water supply nozzle 35 communicates with a cleaning water supply source 350 such as a pump capable of delivering cleaning water such as pure water. Further, the air injection nozzle 37 communicates with an air supply source 370 such as a compressor capable of sending out compressed air.

As shown in FIG. 1, the cleaning apparatus 3 includes a control unit 9 that controls at least the rotation of the holding table 30. The control unit 9 controls a CPU that performs arithmetic processing according to a control program and a storage unit 91 such as a memory. It is configured. The control unit 9 is electrically connected, for example, via a wired or wireless communication path to a rotational driving source 321 including a motor or the like for the rotating mechanism 32 .
The rotary drive source 321 is, for example, a servomotor, and when an operation signal is supplied to the rotary drive source 321 from the output interface of the control unit 9 that also functions as a servo amplifier, the spindle 320 rotates and the encoder rotates. The recognized rotational speed of the holding table 30 is output to the input interface of the control unit 9 as an encoder signal. Then, the control unit 9 that receives the encoder signal can perform feedback control to set the rotational speed of the holding table 30 to a desired rotational speed.

A case of cleaning the substrate 19 by the cleaning apparatus 3 shown in FIG. 1 will be described below.
A work set 199 is conveyed above the holding table 30 and placed on the holding surface 302 such that the center of the work set 199 approximately coincides with the center of the holding surface 302 of the holding table 30 . A suction force generated by a suction source (not shown) is transmitted onto the holding surface 302 of the holding table 30 so that the holding table 30 holds the work set 199 by suction.
Then, the holding table 30 sucking and holding the work set 199 is lowered by the lifting unit 322 to the washing work height position (for example, the lowest height position) within the cover 34 .

Next, the cleaning water supply nozzle 35 pivots, and the injection port of the cleaning water supply nozzle 35 is positioned above the central region of the surface 190 of the substrate 19 sucked and held by the holding table 30 . Then, cleaning water (for example, pure water) is jetted from the injection port of the cleaning water supply nozzle 35 toward the center of the surface 190 of the substrate 19 . In addition, the cleaning water supply nozzle 35 for spraying cleaning water reciprocates above the substrate 19 at a predetermined angle around the axis in the Z-axis direction. Further, the washing water is sprayed from the washing water supply nozzle 35 onto the entire surface 190 of the substrate 19 by rotating the holding table 30 at a predetermined rotational speed.

As a result, the substrate 19 is washed, and the centrifugal force generated by the rotation of the holding table 30 causes the washing water to flow over the surface 190 of the substrate 19 from the center side toward the outer peripheral side, and the holding table 30 is covered. It flows down to the bottom plate 341 of 34 . After the substrate 19 has been washed with the washing water for a predetermined time, the injection of the washing water from the washing water supply nozzle 35 is stopped. Next, air is jetted toward the center of the surface 190 of the substrate 19 from the jet port of the air jet nozzle 37 . Furthermore, the air injection nozzle 37 that injects air revolves above the substrate 19 so as to reciprocate at a predetermined angle around the axis in the Z-axis direction. Further, the rotation mechanism 32 rotates the holding table 30 at a predetermined rotation speed, so that the entire surface 190 of the substrate 19 is dried by air blow. When the drying of the substrate 19 is completed, the air injection nozzle 37 is swiveled and retracted from the holding table 30 , and the work set 199 is carried out from the holding table 30 .

As described above, for example, by cleaning a plurality of substrates 19 in succession, it is possible to avoid the case where cleaning water containing stains scattered by the rotation of the holding table 30 adheres to the inner wall 348 of the outer plate 340 of the cover 34. Suppose.
Therefore, in the cleaning device 3 shown in FIG. 1, the operation of each component of the cleaning device 3 when cleaning the inner wall 348 of the cover 34 will be described below together with each step of the cleaning method according to the present invention.

(1) Storing Step First, in the present embodiment, as shown in FIG. The cleaning water is supplied from the cleaning water supply nozzles 35 to the annular frame 197, and the cleaning water is stored on the sheet 198 corresponding to the opening of the annular frame 197. As shown in FIG. The washing water may be stored directly on the holding surface 302 of the holding table 30, but since the holding surface 302 is not completely horizontal, there is a risk that the washing water may flow down, and surface tension may limit the amount of water that can be stored. Therefore, it is preferable to use the frame unit 196 because the amount of wash water that can be stored by the annular frame 197 can be increased.

The frame unit 196 has a structure in which the substrate 19 of the work set 199 shown in FIG. 1 is not attached to the sheet 198 . Note that the sheet 198 may be an adhesive tape having a glue layer. Also, the sheet 198 is, for example, a polyester-based resin sheet. The polyester-based sheet 198 is a polymer sheet synthesized using dicarboxylic acid (compound having two carboxyl groups) and diol (compound having two hydroxyl groups) as monomers. Since this polyester-based sheet 198 does not have a glue layer, it cannot be adhered to the annular frame 197 at room temperature. However, since the polyester-based sheet 198 has thermoplasticity, when it is heated to a temperature near the melting point while being joined to the annular frame 197 while applying a predetermined pressure, it partially melts and forms the annular frame 197 . Can be glued. The sheet 198 may be a heat-adherable polyolefin sheet or polystyrene sheet without a glue layer.

The frame unit 196 is placed on the holding surface 302 so that the center of the frame unit 196 approximately coincides with the center of the holding surface 302 of the holding table 30 , and the holding table 30 holds the frame unit 196 by suction. Then, the holding table 30 sucking and holding the frame unit 196 is lowered to, for example, the lowest height position within the cover 34 by the lifting unit 322 (not shown in FIG. 2).

The cleansing water supply nozzle 35 pivots, and the injection port of the cleansing water supply nozzle 35 is positioned above the central region of the opening of the frame unit 196 sucked and held by the holding table 30 . Then, the cleaning water 356 is dripped onto the sheet 198 corresponding to the opening of the frame unit 196 from the injection port of the cleaning water supply nozzle 35 . Also, the holding table 30 rotates at a predetermined rotational speed. Note that the holding table 30 may be stopped without rotating.
The holding table 30 rotates, for example, at a lower speed than the rotation speed of the holding table 30 in the later-described discharge step and removal step. The rotational speed is controlled to such an extent that the sheet 198 corresponding to the opening of the frame unit 196 is not scattered. This slow rotation of the holding table 30 in the storage step is due to the fact that the holding surface 302 is not perfectly horizontal, so that the sheet 198 corresponding to the opening of the frame unit 196 held by suction on the holding surface 302 is not fully horizontal. This is to store the wash water 356 more evenly.

Washing water 356 is dripped onto the sheet 198 from the injection port of the washing water supply nozzle 35 for a predetermined period of time. complete the step. Even after the storing step is completed, the cleaning water supply nozzle 35 continues supplying the cleaning water 356 to the sheet 198 on the holding surface 302 .

When the washing water 356 is stored directly on the holding surface 302 without using the frame unit 196, the washing water 356 flows from the injection port of the washing water supply nozzle 35 onto the holding surface 302 rotating at a low speed for a predetermined time. is dropped and a predetermined amount of cleaning water 356 is stored on the holding surface 302 by surface tension, the storing step is completed. Note that the cleaning water supply nozzle 35 continues to supply the cleaning water 356 to the holding surface 302 even after the storing step is completed.

(2) Discharging Step By completing the storing step, a predetermined amount of wash water 356 has accumulated on the sheet 198 of the frame unit 196, and as shown in FIG. Under the control of the rotating mechanism 32 by 9 is faster than the dwell step. As a result, the washing water 356 accumulated on the sheet 198 of the frame unit 196 on the holding table 30 in the storing step is discharged as large droplets toward the inner wall 348 of the outer plate 340 of the cover 34 by centrifugal force. .

Conventionally, the cleaning water supplied from the cleaning water supply nozzle collides with the holding surface of the holding table rotating at high speed and is scattered and atomized by the collision. Since the cleaning water 356 stored on the sheet 198 of the frame unit 196 or the holding surface 302 of the holding table 30 is discharged by centrifugal force, it is not atomized and forms more water droplets than before. Droplet-shaped washing water 356 with a large diameter and a large amount of water collides with the inner wall 348 . As a result, dirt such as milling waste adhering to the inner wall 348 receives an impact, falls off the inner wall 348 , and is included in the washing water 356 adhering to the inner wall 348 .
The cleaning water 356 continues to be supplied from the cleaning water supply nozzle 35 toward the sheet 198 even during the discharging step.

For example, the memory 91 of the control unit 9 stores in advance the correlation data 99 shown in FIG. ing. The correlation data 99 is data obtained experimentally, empirically, or theoretically from past experiments or the like. As the correlation data 99, data in a table format showing the correspondence relationship between the rotation speed of the holding table 30 and the collision height of the washing water 356 is used, but data in a graph format may also be used. The correlation data 99 indirectly indicates the height at which the cleansing water 356 collides with the inner wall 348 by the angle at which the droplets of the cleansing water 356 scattered by the centrifugal force scatter diagonally upward with the holding surface 302 as a reference of 0 degrees. However, it is not limited to this. Further, even when the cleaning water 356 is stored on the sheet 198 of the frame unit 196 as in this embodiment, the correlation data 99 can be used as it is. This is because the sheet 198 is so thin that there is no problem even if its thickness is ignored. Further, when a thick sheet is used as the sheet 198, an angle obtained by adding the thickness of the sheet to the angle of the correlation data 99 as a correction value may be recognized as an appropriate angle.

In the discharging step in this embodiment, the control unit 9 rotates the holding table 30 based on the correlation data 99 so that the washing water 356 discharged by centrifugal force collides with the desired height of the inner wall 348 of the cover 34. Control speed. That is, for example, as shown in the correlation data 99, the height position at which the imaginary line L1 with an inclination of 15 degrees collides obliquely upward with respect to the holding surface 302 of the holding table 30 positioned at the lowest height position. When water droplets of the cleaning water 356 are caused to collide with the inner wall 348 on which a particularly large amount of dirt is adhered, the control unit 9 refers to the correlation data 99 to control the rotational speed of the holding table 30. is set to 1000 rpm. As a result, with the holding surface 302 as a reference of 0 degrees, toward the inner wall 348 at a height position where the imaginary line L1 having an inclination of 15 degrees obliquely upward from the outer peripheral region of the seat 198 corresponding to the opening of the annular frame 197 collides, Water droplets of the cleaning water 356 fly and collide.
If the holding table 30 is rotated at a low speed, the water droplets of the cleaning water 356 can collide with the inner wall 348 at a lower height position, and if the holding table 30 is rotated at a higher speed, the water droplets can be made to reach a higher height. Water droplets of cleaning water 356 can be made to impinge on the inner wall 348 of the position.

As described above, by performing the discharging step for a predetermined time while controlling the rotational speed of the holding table 30, the cleaning water 356 that has been retained on the sheet 198 of the frame unit 196 is eliminated, and the holding table 30 is sucked and held. Once the discharge step is completed to move to washing the inner wall 348 with the conventionally atomized washing water 356 impinging against the sheet 198 of the frame unit 196 that has been sprayed.

(3) Removal step Next, after the discharge step is performed, a removal step is performed in which the holding table 30 is rotated and the cleaning water 356 containing dirt adhering to the inner wall 348 of the cover 34 is removed by the wind pressure generated by the holding table 30 due to the rotation. implement.
First, as shown in FIG. 5, the supply of the washing water 356 onto the sheet 198 by the washing water supply nozzle 35 is stopped. Then, for example, under rotation control by the control unit 9 , the holding table 30 rotates at a higher speed than the rotation speed in the release step, and wind 308 is generated from the holding table 30 toward the inner wall 348 of the cover 34 . Due to the wind pressure of the wind 308 , the cleaning water 356 containing dirt adhering to the inner wall 348 is pushed away from the inner wall 348 and flows down to the bottom plate 341 of the cover 34 . That is, foreign matter and stains separated from the inner wall 348 are washed away together with the cleaning water 356 . It is preferable that the holding table 30 rotates at high speed so that the wind 308 impinges on the upper region of the inner wall 348 and flows along the inner wall 348 toward the bottom plate 341 . Further, the rotation speed of the holding table 30 in the removing step may be the same as or slower than that in the discharging step, as long as the wind pressure that can wash away the cleaning water adhering to the inner wall 348 of the cover 34 is generated.

After performing the removing step while rotating the holding table 30 at high speed as described above for a predetermined time, the removing step is once completed. Even if one cycle of the storage step, the release step, and the removal step as described above is completed, the dirt on the inner wall 348 may not be completely removed. is preferably repeated a predetermined number of times.

As described above, the holding table 30 having the holding surface 302 holding the substrate 19 , the cleaning water supply nozzle 35 supplying cleaning water to the substrate 19 held on the holding table 30 , and the holding table 30 are surrounded by A cleaning method according to the present invention for cleaning the inner wall 348 of the cover 34 of the cleaning device 3 including at least the cover 34 , supplying cleaning water 356 to the holding surface 302 by the cleaning water supply nozzle 35 , and cleaning the holding surface 302 . a storing step of storing the water 356; a discharging step of blowing the cleaning water 356 collected on the holding table 30 toward the inner wall 348 of the cover 34 while rotating the holding table 30 in the storing step; and a removing step of removing the cleaning water 356 adhering to the inner wall 348 of the cover 34 by the wind pressure caused by rotation while rotating the table 30, so that dirt on the inner wall 348 of the cover 34 can be washed and removed more effectively. In other words, unlike the conventional art, after the washing water 356 is temporarily accumulated on the holding surface 302 of the holding table 30, the washing water 356 is not sprayed finely but radially outward by rotating the holding table 30 in the discharge step, and the washing water 356 is sprayed in large droplets. Since it is discharged as water droplets, the droplet-like washing water 356 hits the inner wall 348 of the cover 34, making it easier to remove (separate) dirt from the inner wall 348 more effectively. After that, in the removing step, the washing water 356 containing the dirt adhering to the inner wall 348 is blown off and removed by the wind pressure generated by the rotation of the holding table 30, so that the inner wall 348 can be kept in a dirt-free state. It becomes possible.

The cleaning device 3 also comprises a control unit 9 that controls at least the rotation of the holding table 30 , the control unit 9 controlling the height at which the cleaning water 356 hits the inner wall 348 of the cover 34 in the discharge step and the rotation of the holding table 30 . In the cleaning method for the cover 34 according to the present invention, the control unit 9 determines the desired height of the inner wall 348 based on the correlation data 99 in the discharge step. By controlling the rotation speed of the holding table 30 so that the washing water 356 collides with the inner wall 348, the dirty area of the inner wall 348 can be more effectively and intensively washed with the droplet-shaped washing water 356.

For example, as in the present embodiment, in the storing step, the holding surface 302 holds the frame unit 196 configured by adhering the sheet 198 so as to close the opening of the annular frame 197 having the opening. Instead of the sheet 198 corresponding to the opening, the cleaning water 356 can be accumulated more efficiently.

It goes without saying that each step of the cleaning method according to the present invention is not limited to the above embodiment, and may be implemented in various forms within the scope of the technical idea. Also, the configuration of the cleaning device 3 to be used can be changed as appropriate within the range in which the effects of the present invention can be exhibited.

For example, when performing the storing step, the discharging step, and the removing step, a container 4 having a convex portion 40 on the outer circumference and a concave portion 41 surrounded by the convex portion 40 in the center, as shown in FIG. For example, by sucking and holding a thin dish-shaped container 4 that is circular in plan view on the holding surface 302 of the holding table 30, the height of the convex portion is formed according to the volume to be stored, and the concave portion 41 is used in the storage step to increase efficiency. The cleaning water may be stored well.
In addition, in the storing step, the cleaning water supply nozzle 35 may not turn and may be stopped as long as the cleaning water can be stored. Even during the discharging step, if the washing water can be supplied from the washing water supply nozzle 35 onto the sheet 198 or the concave portion 41, the washing water supply nozzle 35 is stopped even if it is swiveling. good too.

19: Substrate 199: Work set 196: Frame unit 3: Cleaning device
30: Holding table 302: Holding surface 304: Fixing clamp 32: Rotation mechanism 322: Lifting unit 34: Cover
35: Cleaning water supply nozzle 37: Air injection nozzle 9: Control unit 91: Storage unit 99: Correlation data

Claims (5)

A cleaning apparatus comprising at least a holding table having a holding surface for holding a substrate, a cleaning water supply nozzle supplying cleaning water to the substrate held on the holding table, and a cover surrounding the outer circumference of the holding table. A cleaning method for cleaning the inner wall of a cover, comprising:
a storing step of supplying the washing water to the holding surface by the washing water supply nozzle and storing the washing water on the holding surface;
a discharging step of blowing the wash water accumulated on the holding table in the storing step toward the inner wall of the cover while rotating the holding table;
a removing step of removing the washing water adhering to the inner wall of the cover by wind pressure caused by the rotation while rotating the holding table after performing the discharging step. 2. The cover cleaning method according to claim 1, wherein said storing step, said discharging step, and said removing step are repeated a predetermined number of times. The cleaning device comprises a control unit that controls at least the rotation of the holding table,
The control unit has a storage section for storing correlation data between a height at which the washing water collides with the inner wall of the cover in the discharging step and a rotation speed of the holding table,
2. The control unit controls the rotation speed of the holding table in the discharge step based on the correlation data so that the washing water collides with the inner wall at a desired height. Or the cleaning method of the cover according to claim 2. In the storing step, a frame unit configured by bonding a sheet to an annular frame having an opening so as to close the opening is held on the holding surface, and the sheet corresponding to the opening is substituted for the holding surface. 4. The method of cleaning a cover according to claim 1, wherein said cleaning water is stored on said cover. In the storing step,
holding a container provided with a convex portion on the outer periphery and a concave portion surrounded by the convex portion in the center on the holding surface;
4. A method of cleaning a cover according to claim 1, wherein said cleaning water is stored in said concave portion instead of said holding surface.

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