JP2023023068A5

JP2023023068A5 -

Info

Publication number: JP2023023068A5
Application number: JP2021128254A
Authority: JP
Filing date: 2021-08-04
Publication date: 2024-04-30

Claims

A holder that holds a rectangular workpiece to be immersed in a processing liquid with the front and back surfaces of the workpiece vertical;
Two mutually insulated power-supplied parts for setting the work as a cathode;
two conductive parts that conduct electricity between the two power-receiving parts and the holding part and are insulated from each other;
having
The holding portion includes an upper frame, a lower frame, and two vertical frames,
Each of the upper frame, the lower frame, and the two vertical frames extends parallel to one side of the workpiece and includes two conductive plates that are insulated from each other, and the holding portion is formed by a total of eight plates ;
One of the two plates provided on each of the two vertical frames is supported on the upper frame via an insulating member, and each lower end is connected to both ends of one of the two plates provided on the lower frame,
The other of the two plates provided on each of the two vertical frames is supported on the upper frame via an insulating member, and each lower end is connected to both ends of the other of the two plates provided on the lower frame,
Each of the upper frame and the lower frame is provided with a ramp that holds the work by clamping it,
The clamper includes a conductive first clamp piece that contacts the front surface of the workpiece and a conductive second clamp piece that contacts the back surface of the workpiece ,
the first clamp piece is electrically connected to one of the two power receiving parts, the two conductive parts, and the two plates;
The second clamp piece is electrically connected to the other of the two power-receiving parts, the two conductive parts, and the two plates, a workpiece holding jig.

In claim 1 ,
the two conductive parts include first to eighth conductive parts, the first conductive part provides electrical continuity between one of the two power-receiving parts and one end of one of the two plates provided on the upper frame,
the second conductive portion provides electrical continuity between one of the two power-receiving portions and the other end of one of the two plates provided on the upper frame;
the third conductive portion provides electrical continuity between the other of the two power-receiving portions and one end of the other of the two plates provided on the upper frame,
the fourth conductive portion provides electrical continuity between the other of the two power-receiving portions and the other end of the other of the two plates provided on the upper frame,
the fifth conductive portion provides electrical continuity between one of the two power-receiving portions and one of the two plates provided on one of the two vertical frames;
the sixth conductive portion provides electrical continuity between one of the two power-receiving portions and one of the two plates provided on the other of the two vertical frames;
the seventh conductive portion provides electrical continuity between the other of the two power-receiving portions and the other of the two plates provided on one of the two vertical frames;
The eighth conductive portion provides electrical conductivity between the other of the two power-receiving portions and the other of the two plates provided on the other of the two vertical frames.

In claim 2 ,
The first to fourth conductive portions each have a higher electrical resistance than the fifth to eighth conductive portions, respectively.

a processing tank in which a rectangular workpiece is immersed in a processing solution;
an anode disposed in the treatment tank, the anode including a first anode facing the front surface of the workpiece and a second anode facing the rear surface of the workpiece;
Eight rows of power supply rails arranged in parallel and insulated from each other;
a total of eight rectifiers including four rectifiers respectively connected between four of the eight power supply rails and the first anode, and four other rectifiers respectively connected between the other four of the eight power supply rails and the second anode;
Four movable work holding jigs each holding the work and electrically connected to two of the eight rows of power supply rails, respectively;
Including,
A surface treatment device, wherein each of the four workpiece holding jigs is a workpiece holding jig as defined in any one of claims 1 to 3 .

In claim 4 ,
The four rectifiers are connected to the four power supply rails in odd-numbered columns of the eight power supply rails, respectively;
The other four rectifiers are respectively connected to the other four power supply rails in even-numbered columns among the eight columns of power supply rails.

In claim 4 ,
The four rectifiers are respectively connected to the four power supply rails in first to fourth columns adjacent to each other among the eight columns of power supply rails;
the other four rectifiers are respectively connected to the other four power supply rails in fifth to eighth rows adjacent to each other among the eight rows of power supply rails.

In any one of claims 4 to 6,
Each of the four workpiece holding jigs is
A first support arm that supports one of the two power-supplied parts;
a second support arm that supports the other of the two power-supplied parts;
a horizontal arm portion to which the first and second support arms are fixed;
and
the positions at which the first and second support arms are fixed to the horizontal arm portion are adjustable in a direction perpendicular to a direction in which the eight rows of power supply rails extend to match two positions of each of the eight rows of power supply rails.