JP2022533886A - メモリデバイス - Google Patents
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- JP2022533886A JP2022533886A JP2021557453A JP2021557453A JP2022533886A JP 2022533886 A JP2022533886 A JP 2022533886A JP 2021557453 A JP2021557453 A JP 2021557453A JP 2021557453 A JP2021557453 A JP 2021557453A JP 2022533886 A JP2022533886 A JP 2022533886A
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- 239000000758 substrate Substances 0.000 claims abstract description 259
- 239000004065 semiconductor Substances 0.000 claims description 55
- 238000002955 isolation Methods 0.000 claims description 24
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 41
- 238000000034 method Methods 0.000 description 25
- 238000010586 diagram Methods 0.000 description 22
- 239000011229 interlayer Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 14
- 238000003491 array Methods 0.000 description 8
- 239000011241 protective layer Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 238000013461 design Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B80/00—Assemblies of multiple devices comprising at least one memory device covered by this subclass
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
- H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/08—Word line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, for word lines
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/50—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the boundary region between the core region and the peripheral circuit region
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
- H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/50—EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
- H10B63/34—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors of the vertical channel field-effect transistor type
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/50—Peripheral circuit region structures
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
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- General Physics & Mathematics (AREA)
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- Semiconductor Memories (AREA)
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Abstract
Description
Claims (20)
- メモリデバイスであって、
第1の基板と、
前記第1の基板上に配置された第1のメモリアレイであって、少なくとも1つの第1のワード線構造を含む、第1のメモリアレイと、
第2の基板であって、前記第1のメモリアレイは、縦方向において前記第1の基板と前記第2の基板との間に配置される、第2の基板と、
前記少なくとも1つの第1のワード線構造と電気的に接続された少なくとも1つの第1の縦型トランジスタであって、前記少なくとも1つの第1の縦型トランジスタの少なくとも一部は、前記第2の基板内に配置される、少なくとも1つの第1の縦型トランジスタと、を含む、
メモリデバイス。 - 前記少なくとも1つの第1の縦型トランジスタは、前記第2の基板を前記縦方向に貫通する第1の半導体チャネルを含む、
請求項1に記載のメモリデバイス。 - 前記少なくとも1つの第1の縦型トランジスタは、前記第2の基板内に配置され、かつ前記第1の半導体チャネルを水平方向に囲む第1のゲート電極をさらに含む、
請求項2に記載のメモリデバイス。 - 前記少なくとも1つの第1の縦型トランジスタは、前記第2の基板内に配置され、かつ前記第1のゲート電極と前記第1の半導体チャネルとの間に配置された第1のゲート誘電体層をさらに含む、
請求項3に記載のメモリデバイス。 - 前記第1のメモリアレイは、複数の前記少なくとも1つの第1のワード線構造を含み、前記メモリデバイスは、前記複数の前記少なくとも1つの第1のワード線構造とそれぞれ電気的に接続された複数の前記少なくとも1つの第1の縦型トランジスタを含む、
請求項3に記載のメモリデバイス。 - 前記複数の前記少なくとも1つの第1の縦型トランジスタの前記第1のゲート電極は、前記第2の基板内で互いに物理的および電気的に接続される、
請求項5に記載のメモリデバイス。 - 前記第2の基板は半導体領域を含み、前記第1のゲート電極は前記第2の基板内に配置されたドープ領域を含む、
請求項3に記載のメモリデバイス。 - 前記第2の基板内に配置された分離構造であって、前記半導体領域と前記第1のゲート電極との間に配置される、分離構造をさらに含む、
請求項7に記載のメモリデバイス。 - 前記少なくとも1つの第1の縦型トランジスタと前記少なくとも1つの第1のワード線構造との間に配置されたワード線接触構造をさらに含み、
前記少なくとも1つの第1のワード線構造は、前記ワード線接触構造を介して前記少なくとも1つの第1の縦型トランジスタと電気的に接続される、
請求項1に記載のメモリデバイス。 - 前記少なくとも1つの第1の縦型トランジスタは、前記縦方向において前記ワード線接触構造を完全に覆う、
請求項9に記載のメモリデバイス。 - 前記第2の基板は、第1の面と、前記第1の面と前記縦方向に対向する第2の面とを有し、
前記第1のメモリアレイおよび前記ワード線接触構造は、前記第2の基板の前記第1の面に配置される、
請求項9に記載のメモリデバイス。 - 前記第2の基板の前記第2の面に配置された導電線と、
前記第2の基板の前記第2の面に配置され、前記導電線と前記少なくとも1つの第1の縦型トランジスタとの間に配置された接続構造であって、前記導電線が前記接続構造、前記少なくとも1つの第1の縦型トランジスタ、および前記ワード線接触構造を介して前記少なくとも1つの第1のワード線構造と電気的に接続される、接続構造と、をさらに含む、
請求項11に記載のメモリデバイス。 - 第3の基板であって、前記第1のメモリアレイが前記縦方向において前記第1の基板と前記第3の基板との間に配置される、第3の基板と、
第2のメモリアレイであって、前記第2のメモリアレイが少なくとも1つの第2のワード線構造を含む、第2のメモリアレイと、
前記少なくとも1つの第2のワード線構造と電気的に接続される少なくとも1つの第2の縦型トランジスタと、をさらに含む、
請求項1に記載のメモリデバイス。 - 前記第2のメモリアレイは、前記第3の基板上に配置され、
前記少なくとも1つの第2の縦型トランジスタの少なくとも一部は、前記第2の基板内に配置される、
請求項13に記載のメモリデバイス。 - 前記少なくとも1つの第2の縦型トランジスタは、
前記第2の基板を前記縦方向に貫通する第2の半導体チャネルと、
前記第2の基板内に配置され、かつ前記第2の半導体チャネルを水平方向に囲む第2のゲート電極と、を含む、
請求項14に記載のメモリデバイス。 - 前記少なくとも1つの第1の縦型トランジスタは、前記第2の基板内に配置された第1のゲート電極を含み、
前記第1のゲート電極は、前記第2のゲート電極と物理的および電気的に接続される、
請求項15に記載のメモリデバイス。 - 前記少なくとも1つの第1の縦型トランジスタは、前記第2の基板内に配置された第1のゲート電極を含み、
前記第1のゲート電極は、前記第2のゲート電極と電気的に分離される、
請求項15に記載のメモリデバイス。 - 前記第3の基板は、前記縦方向において前記第1の基板と前記第2の基板との間に配置され、
前記第2のメモリアレイは、前記縦方向において前記第2の基板と前記第3の基板との間に配置される、
請求項14に記載のメモリデバイス。 - 前記第2の基板は、前記縦方向において前記第1の基板と前記第3の基板との間に配置され、
前記第2のメモリアレイは、前記縦方向において前記第2の基板と前記第3の基板との間に配置される、
請求項13に記載のメモリデバイス。 - 前記第2のメモリアレイは、前記第2の基板上に配置され、
前記少なくとも1つの第2の縦型トランジスタの少なくとも一部は、前記第3の基板内に配置される、
請求項19に記載のメモリデバイス。
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EP (2) | EP4351297A2 (ja) |
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US11985825B2 (en) * | 2020-06-25 | 2024-05-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | 3D memory array contact structures |
US11587920B2 (en) | 2020-07-22 | 2023-02-21 | Sandisk Technologies Llc | Bonded semiconductor die assembly containing through-stack via structures and methods for making the same |
US11501821B2 (en) * | 2020-11-05 | 2022-11-15 | Sandisk Technologies Llc | Three-dimensional memory device containing a shared word line driver across different tiers and methods for making the same |
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