JP2022519443A - 冷間溶接フリップチップ相互接続構造 - Google Patents
冷間溶接フリップチップ相互接続構造 Download PDFInfo
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- JP2022519443A JP2022519443A JP2021538196A JP2021538196A JP2022519443A JP 2022519443 A JP2022519443 A JP 2022519443A JP 2021538196 A JP2021538196 A JP 2021538196A JP 2021538196 A JP2021538196 A JP 2021538196A JP 2022519443 A JP2022519443 A JP 2022519443A
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- protrusions
- bumps
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- G06N10/00—Quantum computing, i.e. information processing based on quantum-mechanical phenomena
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Abstract
Description
Claims (20)
- 基板上に形成された第1の突起のセットと、
量子ビット・チップ上に形成された第2の突起のセットと、
インタポーザ上に形成されたバンプのセットであって、前記バンプのセットが室温領域で閾値を超える延性を有する材料から形成されており、前記バンプのセットの第1のサブセットが、前記第1の突起のセットに冷間溶接するように構成され、前記バンプのセットの第2のサブセットが、前記第2の突起のセットに冷間溶接するように構成されている、前記バンプのセットと、
を含む、量子デバイス。 - 前記第1の突起のセットが、金および白金を含む群から選択された少なくとも1つの部材である、請求項1に記載の量子デバイス。
- 前記第2の突起のセットが、金および白金を含む群から選択された少なくとも1つの部材である、請求項1に記載の量子デバイス。
- 前記バンプのセットが、インジウム、スズ、鉛、およびビスマスを含む群から選択された少なくとも1つの部材である、請求項1に記載の量子デバイス。
- 前記第1の突起のセットが円錐形を有する、請求項1に記載の量子デバイス。
- 前記第2の突起のセットが角錐形を有する、請求項1に記載の量子デバイス。
- 前記バンプのセットが、極低温領域で超伝導を示す材料を含む、請求項1に記載の量子デバイス。
- 複数の前記第1の突起のセットが、前記バンプのセットのうちの1つに冷間溶接するように構成されている、請求項1に記載の量子デバイス。
- 前記第1の突起のセットが、金でコーティングされた超伝導材料を含む、請求項1に記載の量子デバイス。
- 前記第2の突起のセットが、金でコーティングされた超伝導材料を含む、請求項1に記載の量子デバイス。
- 基板上に第1の突起のセットを形成することと、
量子ビット・チップ上に第2の突起のセットを形成することと、
インタポーザ上に形成されたバンプのセットを形成することであって、前記バンプのセットが室温領域で閾値を超える延性を有する材料から形成されている、前記バンプのセットを形成することと、
前記バンプのセットのサブセットを前記第1の突起のセットに冷間溶接し、前記バンプのセットの第2のサブセットを前記第2の突起のセットに冷間溶接することと、
を含む、方法。 - 前記第1の突起のセットが、金および白金を含む群から選択された少なくとも1つの部材である、請求項9に記載の方法。
- 前記第2の突起のセットが、金および白金を含む群から選択された少なくとも1つの部材である、請求項9に記載の方法。
- 前記バンプのセットが、インジウム、スズ、鉛、およびビスマスを含む群から選択された少なくとも1つの部材である、請求項9に記載の方法。
- 前記第1の突起のセットが円錐形を有する、請求項9に記載の方法。
- 前記第2の突起のセットが角錐形を有する、請求項9に記載の方法。
- 前記バンプのセットが、極低温領域で超伝導を示す材料を含む、請求項9に記載の方法。
- 複数の前記第1の突起のセットが、前記バンプのセットのうちの1つに冷間溶接するように構成されている、請求項9に記載の方法。
- 前記第1の突起のセットが、金でコーティングされた超伝導材料を含む、請求項9に記載の方法。
- 請求項11ないし19のいずれかに記載の方法の動作を実行する回路製造システム。
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US16/272,481 US11165010B2 (en) | 2019-02-11 | 2019-02-11 | Cold-welded flip chip interconnect structure |
US16/272,481 | 2019-02-11 | ||
PCT/EP2020/051293 WO2020164864A1 (en) | 2019-02-11 | 2020-01-20 | Cold-welded flip chip interconnect structure |
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US20220020715A1 (en) * | 2020-07-17 | 2022-01-20 | International Business Machines Corporation | Uniform chip gaps via injection-molded solder pillars |
US11676903B2 (en) * | 2020-08-20 | 2023-06-13 | International Business Machines Corporation | Combined backing plate and housing for use in bump bonded chip assembly |
US20220189922A1 (en) * | 2020-12-16 | 2022-06-16 | International Business Machines Corporation | Create a protected layer for interconnects and devices in a packaged quantum structure |
WO2023132064A1 (ja) | 2022-01-07 | 2023-07-13 | 富士通株式会社 | 量子演算装置及び量子演算装置の製造方法 |
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CN113412541A (zh) | 2021-09-17 |
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