JP2022509277A - 流体接触方法、コーティングされた物品、およびコーティング方法 - Google Patents
流体接触方法、コーティングされた物品、およびコーティング方法 Download PDFInfo
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- JP2022509277A JP2022509277A JP2021530982A JP2021530982A JP2022509277A JP 2022509277 A JP2022509277 A JP 2022509277A JP 2021530982 A JP2021530982 A JP 2021530982A JP 2021530982 A JP2021530982 A JP 2021530982A JP 2022509277 A JP2022509277 A JP 2022509277A
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Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12049—Nonmetal component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12063—Nonparticulate metal component
- Y10T428/12069—Plural nonparticulate metal components
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- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
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Abstract
【選択図】図1
Description
[0001]本出願は、2018年11月29日に出願され、参照によりその全体が本明細書に組み込まれる、表題「FLUID CONTACT PROCESS,COATED ARTICLE,AND COATING PROCESS」の米国仮特許出願第62/772,747号の優先権と利益を主張する特許協力条約特許出願である。
[0002]本発明は、コーティングされた物品、そのようなコーティングされた物品の使用、および物品をコーティングする方法を対象とする。より詳細には、本発明は、炭素およびケイ素を含むコーティングを対象とする。
[0015]流体接触方法、コーティングされた物品、およびコーティング方法が提供される。本開示の実施形態は、例えば、本明細書に開示される特徴の1つまたは複数を含まない概念と比較して、処理の一貫性/再現性を高め、熱処理した残留材料の影響を低減または排除し、不活性を高め(例えば、原子または分子の吸着の減少または排除による、および/または金属イオンの移動の減少または排除による)、硫黄吸着に対する耐性を高め、美観を均質化し、微細構造を変更し、層間剥離を削減または排除し(または接着を高め)、ナノワイヤーの成長を削減または排除し、光学特性を変更し、多孔性を変更し、耐食性を変更し、光沢を変更し、表面の特徴を変更し、より効率的な処理生産を可能にし、幅広い形状の処理を可能にし(例えば、狭いチャネル/チューブ、3次元的に複雑な形状、曲がりくねった経路、および/または隠れたまたは見通し外の形状、例えば、針、チューブ、プローブ、固定具、複雑な平面および/または非平面形状物品、単純な非平面および/または平面形状物品、およびそれらの組み合わせ)、欠陥/ミクロ多孔性を低減または排除し、大量の物品の処理を可能にし、フロースルー方法ではない方法に対して感度が高すぎると従来考えられている産業で使用されるコンポーネントで使用または交換でき(例えば、組成の純度、汚染物質の存在、厚さの均一性、および/または内部に埋め込まれた気相核形成の量に基づく)、普通ならプラズマ環境で電気アークを生成する基板として材料の使用を可能にし、またはそれらの組み合わせを可能にする。
[0057]一実施形態では、金属材料は、重量で、0.7%~1.1%のマグネシウム、0.6%~0.9%のケイ素、0.2%~0.7%の鉄、0.1%~0.4%の銅、0.05%~0.2%のマンガン、0.02%~0.1%の亜鉛、0.02%~0.1%のチタン、および残りがアルミニウムの組成物であるか、それを含む。別の実施形態では、金属材料は、合金6061である。
[0069]第2の比較例では、合金6061は、アモルファスシリコンでコーティングされ、その後、表題「SURFACE MODIFICATION OF SOLID SUPPORTS THROUGH THE THERMAL DECOMPOSITION AND FUNCTIONALIZATION OF SILANES」の米国特許第6,444,326号で開示された方法と一致する方法で官能化される。表2は、第2の比較例、ならびに同じ方法を用いてコーティングした304ステンレス鋼および316ステンレス鋼に関連する腐食速度を示す。
[0071]第3の比較例では、合金6061は、ジメチルシランの分解によってコーティングされ、その後、表題「CHEMICAL VAPOR DEPOSITION COATING, ARTICLE, AND METHOD」の米国特許第9,777,368号で開示された方法と一致する方法でトリメチルシランで官能化される。表3は、第3の比較例、ならびに同じ方法を用いてコーティングした304ステンレス鋼と316ステンレス鋼に関連する腐食速度を示す。
Claims (15)
- アルミニウム含有基材;
前記アルミニウム含有基材上の第1領域であって、炭素およびケイ素を含む前記第1領域;
前記第1領域と比べて前記アルミニウム含有基材から遠位の第2領域であって、前記第1領域より重量でより高い濃度の酸素を有する前記第2領域;
前記第2領域と比べて前記第1領域から遠位の第3領域であって、アモルファスシリコンを含む前記第3領域
を含む、コーティングされた物品。 - 前記コーティングされた物品が、コーティングされていないの状態の前記アルミニウム含有基材と比べて、重量で少なくとも5%のHClを含む第1の腐食性流体に接触した場合に、増加した耐食性を有する、請求項1に記載のコーティングされた物品。
- 前記アルミニウム含有基材が、摂氏450度を超える温度で発生する熱増感効果がない、請求項1に記載のコーティングされた物品。
- 前記第1領域が、前記アルミニウム含有基材の直接上にあり、前記アルミニウム含有基材のすべての露出領域を完全に覆い、前記第2領域が、前記第1領域の直接上にあり、前記第1領域のすべての露出領域を完全に覆い、前記第3領域が、前記第2領域の直接上にあり、前記第2領域のすべての露出領域を完全に覆う、請求項1に記載のコーティングされた物品。
- 前記第1領域が、ジメチルシランおよびシラン含有混合物の熱化学気相堆積である、請求項1に記載のコーティングされた物品。
- コーティングされた物品に接触するように腐食性流体を流すことを含む、流体接触方法であって、
前記コーティングされた物品が、アルミニウム含有基材、前記アルミニウム含有基材上の第1領域であって、炭素およびケイ素を含む前記第1領域、前記第1領域と比べて前記アルミニウム含有基材から遠位の第2領域であって、前記第1領域より重量でより高い濃度の酸素を有する前記第2領域、および前記第2領域に比べて前記第1領域から遠位の第3領域であって、アモルファスシリコンを含む前記第3領域を有する、前記流体接触方法。 - 前記コーティングされた物品が、分析機器産業で使用される、請求項6に記載の流体接触方法。
- 前記コーティングされた物品が、油およびガス産業で使用される、請求項6に記載の流体接触方法。
- 前記コーティングされた物品が、輸送および物流産業で使用される、請求項6に記載の流体接触方法。
- 前記コーティングされた物品が、施設管理で使用される、請求項6に記載の流体接触方法。
- 前記コーティングされた物品が、食品および飲料産業で使用される、請求項6に記載の流体接触方法。
- 前記コーティングされた物品が、航空、防衛、または航空宇宙産業で使用される、請求項6に記載の流体接触方法。
- 前記コーティングされた物品が、自動車産業で使用される、請求項6に記載の流体接触方法。
- 前記コーティングされた物品が、医療または製薬産業で使用される、請求項6に記載の流体接触方法。
- 密閉チャンバー内にアルミニウム含有基材を置くこと、次いで、
前記密閉チャンバー内でジメチルシランおよびシラン含有混合物を熱分解し、それによって前記密閉チャンバー内のすべての露出表面に炭素およびケイ素を付けて、第1領域を生成すること、次いで、
前記第1領域を熱酸化し、それによって、前記第1領域と比べて前記アルミニウム含有基材から遠位の第2領域であり、前記第1領域より重量でより高い濃度の酸素を有する前記第2領域を生成すること、次いで、
前記密閉チャンバー内でシランを熱分解し、それによって、前記第2領域と比べて前記第1領域から遠位の第3領域であり、アモルファスシリコンを含む前記第3領域を生成すること
を含むコーティング方法。
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US201862772747P | 2018-11-29 | 2018-11-29 | |
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PCT/US2019/063513 WO2020112938A1 (en) | 2018-11-29 | 2019-11-27 | Fluid contact process, coated article, and coating process |
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US20120251797A1 (en) * | 2009-10-27 | 2012-10-04 | Silcotek Corp. | Chemical vapor deposition coating, article, and method |
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