JP2022150845A - Panel housing container - Google Patents

Abstract

To provide a panel housing container that improves detection accuracy of panel positions.SOLUTION: A panel housing container 1 comprises a container body 10 capable of housing a plurality of panels P and panel support means 30 for supporting the panels P. The container body 10 has a retroreflector 50 that reflects light projected from a panel position detection sensor 60 on a back plate 16 facing a front opening 11 through which the panels P can be carried in and out. The retroreflector 50 is provided so as to include a range overlapping the maximum bending position where the panels P supported by the panel support means 30 bend most when viewed from the opening 11 side.SELECTED DRAWING: Figure 1

Description

The present invention relates to a panel storage container for storing panels.

In the manufacturing process that handles panels such as glass substrates for liquid crystal panels, panel storage containers are used to store multiple panels when transferring panels from manufacturing equipment to manufacturing equipment in another process or when panels are temporarily stored. used.

When a panel is stored in or taken out of this panel storage container, a loading/unloading mechanism having an arm for holding the panel is used. In addition, the panel position (height) is detected (measured) by the panel position detection sensor provided on the load port, arm, etc., and mapping processing is performed to store the detected data in the mapping storage unit. (See Patent Documents 1 and 2, for example).

The panel position detection sensors described in Patent Documents 1 and 2 use transmissive sensors. The position of the panel is detected from the received signal light.

By the way, in recent years, the size of liquid crystal panels has increased, and along with this, various types of panels have also increased in size. As the size of the panel increases, the weight also increases to 5 kg to 8 kg. Therefore, the large panel supported by the panel supports of the panel support means increases its own weight and the distance between the panel supports. As a result, the amount of deflection is also increasing.

JP 2006-128294 A JP 2020-053417 A

However, the panel position detection sensors as seen in Patent Documents 1 and 2 detect on the opening side (loading/unloading side) of the panel storage container, so the position different from the panel detection position (for example, the position opposite to the opening). If the amount of deflection on the rear side) is larger, the arm of the loading/unloading mechanism may come into contact with the panel and damage the panel when it enters. In particular, in the case of a large panel, since the amount of deflection itself is large, the difference in the amount of deflection is also large, increasing the possibility of panel breakage.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a panel storage container that improves the accuracy of panel position detection.

(1) One aspect of the present invention is a panel storage container including a container body that stores a plurality of panels and a panel support that supports the panels, wherein the container body carries out the panels. And the back plate facing the front opening into which the panel can be carried in has a retroreflector that reflects the light projected from the panel position detection sensor.
(2) In the above aspect (1), the retroreflective object includes a range that overlaps a maximum deflection position where the panel supported by the panel support means is most deflected when viewed from the opening side. may be provided in

ADVANTAGE OF THE INVENTION According to this invention, the panel storage container which improves the detection accuracy of a panel position can be provided.

FIG. 4 is a schematic cross-sectional view showing a state in which the lid body of the panel container according to the embodiment of the present invention is removed at the load port; It is a perspective view which shows the container main body of the panel storage container of embodiment which concerns on this invention. It is a front view which shows the container main body of the panel storage container of embodiment which concerns on this invention. It is a sectional view showing a container body of a panel storage container of an embodiment concerning the present invention. FIG. 4 is a schematic diagram showing how signal light from a position detection sensor is received as reflected light when a retroreflective object exists. FIG. 4 is a schematic diagram showing how signal light from a position detection sensor is received as reflected light when there is no retroreflection object.

A panel storage container 1 according to an embodiment of the present invention will be described below with reference to the accompanying drawings. In addition, in the embodiment of this specification, the same code|symbol is attached|subjected to the same member through the whole.

First, before describing the panel storage container 1 of the embodiment according to the present invention, the load port 100 on which the panel storage container 1 is mounted will be described.
FIG. 1 is a schematic cross-sectional view showing a state in which a lid body 20 of a panel storage container 1 according to an embodiment of the present invention is removed at a load port 100. FIG.

As shown in FIG. 1, the load port 100 is installed adjacent to the side wall of the semiconductor manufacturing apparatus installed in the clean room, and loads and unloads the panel P between the inside and outside of the semiconductor manufacturing apparatus. is configured to

The load port 100 includes a mounting table 110 on which the panel storage container 1 is mounted, an opening window 120 facing the panel storage container 1 mounted on the mounting table 110, and a port door 130 for opening and closing the opening window 120. I have.

The mounting table 110 has a positioning mechanism 111 for positioning the panel container 1 on the mounting table 110 . The positioning mechanism 111 engages (contacts) the bottom plate 15 of the container body 10 of the panel storage container 1 or the positioning concave portion 17 formed in the bottom plate attached to the bottom plate 15, thereby opening the panel storage container 1 into the opening window. 120 is positioned at a predetermined position.

The port door 130 enables opening and closing (opening and closing) of the opening window 120 by means of swinging means. The port door 130 has a lid opening/closing mechanism 131 that releases the locking mechanism (not shown) of the lid 20 of the panel storage container 1 and removes the lid 20 from the container body 10 when the opening window 120 is opened. ing. When attaching the lid 20 to the container body 10 , the lid opening/closing mechanism 131 can conversely lock the locking mechanism to fix the lid 20 to the container body 10 .

The opening window 120 requires a shutter 140 that closes the opening window 120 at high speed instead of the port door 130 when the opening window 120 is opened by removing the lid 20 from the container body 10. may be provided accordingly.

A transport robot 300 for transporting the panel P is installed on the side of the semiconductor manufacturing apparatus through the port door 130 . This transport robot 300 has a multi-joint arm 310 that moves up and down, advances and retreats, rotates horizontally, and a hand 320 that is provided at the tip of the arm 310 and holds (adsorbs) the panel P. FIG.

As the arm 310 moves, the hand 320 enters the container body 10 from which the lid 20 has been removed, and carries the panel P in and out. Since the process of loading and unloading the panel P is the same as the conventional one, the detailed description of the operations of the load port 100 and the transport robot 300 is omitted.

In such a load port 100, when the lid 20 is removed from the container body 10, the panel position detection sensor 60 for detecting the position (height) of the panel P moves to a position facing the internal space of the container body 10. It is moved by a mechanism (not shown).

The panel position detection sensor 60 is, for example, a reflective sensor using an optical fiber. and a light receiving element 62 for receiving the reflected light (see FIG. 3A). This panel position detection sensor 60 also has an amplifier (amplifier), a power source, etc., and is connected to a higher-level control device that controls the mapping process and the semiconductor manufacturing apparatus as a whole.

The control device detects (calculates) the position of the panel P by detecting the amount of reflected light received by the light receiving element 62. For example, the position of the panel P is detected directly at the position where the reflected light is received. can be

Here, the panel container 1 will be explained.
FIG. 2 shows the container body 10 of the panel storage container 1 of the embodiment according to the present invention, FIG. 2A is a perspective view, FIG. 2B is a front view, and FIG. 2C is a cross-sectional view. Note that the panel P is omitted in FIG. 2C.

The panel storage container 1 is used in a processing apparatus (processing step) for processing electronic components. Between each process such as the process of sealing the electronic parts with epoxy resin etc., the process of peeling the sealed electronic parts (panel form) from the carrier panel, the process of cutting out the electronic parts from the sealing panel, etc. Used when transporting.

The panel P to be stored in the panel storage container 1 has, for example, a carrier panel size of 625 mm×615 mm and a sealing panel size of 600 mm×600 mm. Therefore, it is preferable that two or more types of panel storage containers 1 corresponding to each size are prepared.

This panel storage container 1 has a container body 10 capable of storing a plurality of (for example, 6, 12, . . . 25) rectangular panels P, and an opening 11 formed in the front of the container body 10. and a lid body 20 (see FIG. 1) that can be opened and closed.

As shown in FIG. 2, the container body 10 is a front open box type container having an opening 11 on the front, and faces the left side wall 12 and the right side wall 13, the top plate 14, the bottom plate 15 and the opening 11 in a front view. It is formed from a back plate 16 .

The outer surfaces of the left and right side walls 12, 13 may be provided with lift flanges that are held by the transport machine. In some cases, the upper surface of the top plate 14 is provided with a robotic flange that is held by the ceiling transfer mechanism of the manufacturing plant. Furthermore, the outer surface of the bottom plate 15 is provided with a plurality of (for example, three) positioning recesses 17 supported by positioning means such as a processing device or transfer robot.

The container body 10 is preferably configured by assembling wall plate members so as to airtightly cover the left and right side surfaces, the upper surface, the lower surface and the rear surface of a frame formed by assembling columnar members into a rectangular parallelepiped shape. In order to keep the inner space of the panel storage container 1 clean and low humidity, the bottom plate 15 of the container body 10 is provided with an air supply unit for supplying an inert gas or the like into the container body 10, or the container body 10 An exhaust part for exhausting the air inside may be provided.

By the way, this panel storage container 1 has side support portions 30 for supporting the left and right ends of the panel P as panel support means, and additionally has a central support portion 40 for supporting the central portion of the panel P. is doing.

The side support portion 30 has a panel support 31 that supports the panel P, a column 32 that fixes the panel support 31, and side supports 33, and is opposed to the inner surfaces of the left and right side walls 12 and 13. As shown in FIG.

The pillars 32 are in the form of prisms forming part of the back surface of the container body 10 , and are erected on the left and right between the top plate 14 and the bottom plate 15 . Wall plate members are attached between the post 32 and a post 42 described later and between the post 32 and the frame to form the back plate 16 .

The side support 33 has a rectangular shape elongated in the horizontal direction in a plan view, and is fixed to the left and right side walls 12 and 13, respectively. In addition, the side support 33 has a first surface on which a first stepped portion is formed and a second surface on which a second stepped portion is formed on the back side thereof. The panel P can be supported.

The first stepped portion and the second stepped portion are located at different positions from the left and right side walls 12 and 13, and by selecting the mounting direction of the side support 33, the panel P having different widths can be formed between the stepped portions. Supportable. Further, the side supports 33 are formed so that the height for supporting the panel P does not change even if the mounting direction is changed between the front and back.

On the other hand, the end support 34 has a rectangular shape elongated in the front-rear direction in plan view, and is fixed to the column 32 . Also, the end support 34 has a third surface on which a third stepped portion is formed, and a fourth surface on which a fourth stepped portion is formed on the back side of the end support 34, similarly to the side support 33. , and the panel P can be supported on both sides thereof.

These third stepped portion and fourth stepped portion are located at different positions from the column 32, and by selecting the mounting direction of the end support 34, it is possible to support panels P of different lengths (depths). . Also, like the side supports 33, the end supports 34 are formed so that the height at which the panel P is supported does not change even if the mounting direction is changed between the front and back. In the panel storage container 1 of this embodiment, the dimensions of the stepped portions of the side supports 33 and the end supports 34 are set so as to support two types of panels P, ie, the carrier panel and the sealing panel.

Such side supports 33 and end supports 34 have higher friction than metal material in order to prevent the supporting panel P from slipping, and have higher friction than the metal material in order to prevent damage to the supporting panel P. It is preferably made of a conductive resin material with high cushioning properties, or alternatively, only the contact portion with the panel P may be made of a resin material, and the other portions may be made of a metal material.

The panel support 31 has a columnar or cylindrical shape and is fixed by the struts 32, the side supports 33 and the end supports 34 described above. Specifically, the rear end of the panel support 31 is inserted into a locking hole formed in the column 32 and fixed, and the vicinity of the rear end is inserted into a through hole formed in the end support 34, The intermediate portion and the vicinity of the tip portion are inserted into and fixed to through-holes (of a half-split structure) formed in the side support 33 .

Moreover, the panel support 31 is covered with a cylindrical tube made of an elastic material, except for fixed portions fixed to the struts 32, the side supports 33 and the end supports 34. As shown in FIG. Note that the panel support 31 may be attached with a plurality of O-rings or the like instead of the tube.

Further, a front stopper 35 is provided at the tip of the panel support 31 to prevent the panel P from jumping forward.

On the other hand, the center support portion 40 has a panel support 41 that supports the panel P, and supports 42 and end supports 44 that fix the panel support 41 , and is provided on the inner surface of the back plate 16 .

The panel support 41, like the panel support 31, has a columnar or cylindrical shape, and is fixed by supports 42 and end supports 44, which are constructed in the same manner as the supports 32 and end supports 34 described above. However, the panel support 41 does not have the front stopper 35 and its length is formed shorter than the length of the panel support 31 .

On the other hand, the lid 20 enables the opening 11 of the container body 10 to be airtightly closed via a seal gasket. )have.

The locking mechanism includes a latch that is recessed and displaced between a locked position and an unlocked position according to the operation of the key inserted into the keyhole, and the latch is engaged with or released from the engaging portion on the container body 10 side. The locking and unlocking of the lid body 20 are performed by pressing the lid 20 .

The container main body 10 and the lid 20 as described above are composed of a plurality of parts molded from a metal material or a resin material. Examples of resins contained in molding materials for resin parts include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, and polyvinyl chloride. These alloys and the like are included. Additives that impart various functions, such as a conductive substance, an antistatic agent, and an ultraviolet absorber, may be added to these resins.

Incidentally, the back plate 16 is provided with a retroreflector 50 that reflects the light projected from the panel position detection sensor 60 (see FIGS. 2A and 2B). Specifically, in the front view from the opening 11 side of the container body 10, the left side wall 12 side of the back plate 16 (intermediate between the left support 32 and the central support 42), the central part (left of the central support 42) or at least one of the right side) and the right side wall 13 side (intermediate between the central support 42 and the right support 32). These positions include a range that overlaps the maximum bending position where the panel P supported by the side support portions 30 and the central support portion 40 bends most when viewed from the front.

Depending on the type and size of the panel P, the center support portion 40 may be removed for use. A reflector 50 is provided.

The retroreflection object 50 is formed of a material having excellent light reflecting performance, and is configured as, for example, a film base material, a sheet base material, or a plate material, and is connected by bonding means such as adhesion, welding, screws, fitting, or the like. It is mountable. Such a retroreflection object 50 is, for example, black.

The retroreflector 50 may be provided on the inner surface of the back plate 16, for example, but may be provided on the outer surface of the back plate 16 when the back plate 16 is made of a light-transmissive material. good too. However, the retroreflector 50 may be a wall surface member forming the container body 10, that is, the back plate 16 itself, or may be a column member such as the struts 32 and 42 to which the back plate 16 is attached.

Finally, a description will be given of how the signal light from the panel position detection sensor 60 is reflected by the retroreflection object 50 and received by the panel position detection sensor 60 as reflected light.
FIG. 3A is a schematic diagram showing how the signal light from the panel position detection sensor 60 is received as reflected light when the retroreflector 50 is present, and FIG. 3 is a schematic diagram showing how signal light from a panel position detection sensor 60 is received as reflected light. FIG.

3B, the signal light projected from the light projecting element 61 of the panel position detection sensor 60 is reflected by the front end face of the panel P, and the reflected light is received by the light receiving element. It can be received at 62 . However, the reflected light reflected by the area other than the front end surface of the panel P (such as the surface located on the back plate 16 side of the container body 10 and the rear end surface) is diffused as diffused light, and is received by the light receiving element 62. I can't. Therefore, the panel position detection sensor 60 always detects the position of the front end face of the panel P as the height position of the panel P regardless of the panel P being tilted or bent.

On the other hand, when the retroreflective object 50 exists, as shown in FIG. , and the reflected light can be received by the light receiving element 62 . In addition, the reflected light reflected by the surface of the panel P (positioned on the back plate 16 side of the container body 10) is diffused as diffused light, and cannot be received by the light receiving element 62. FIG.

However, the signal light reflected by the retroreflection object 50 may be reflected further by the rear end surface of the panel P and may not reach the light receiving element 62. The light can reach the light receiving element 62 from below the point. Therefore, the panel position detection sensor 60 acquires two peak values, and can detect that the panel P exists up to just above the lower peak value. Therefore, the panel position detection sensor 60 detects the height position of the panel P taking into account the tilted state and the bent state of the panel P.

As described above, the panel storage container 1 of the embodiment according to the present invention is a panel storage container 1 that includes a container body 10 that stores a plurality of panels P and panel support means 30 and 40 that support the panels P. The container body 10 has a retroreflective object 50 that reflects the light projected from the panel position detection sensor 60 on the back plate 16 facing the front opening 11 through which the panel P can be carried in and out. be. Thereby, even if the panel P supported by the panel support means 30 and 40 is in an inclined state or a bent state, the position of the panel P can be accurately detected.

The retroreflective object 50 of the embodiment is provided so as to include a range where the panels P supported by the panel supporting means 30 and 40 are most bent at the maximum bending position when viewed from the opening 11 side. As a result, the position of the lowest point of the panel P can be grasped, and interference between the panel P and the hand 320 of the transfer robot 300 can be prevented.

Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications, Change is possible.

(Modification)
In the above-described embodiment, the retroreflective object 50 is provided so as to include a range in which the panels P supported by the panel support means 30 and 40 are most flexed at the maximum deflection position when viewed from the opening 11 side. However, in a front view from the opening 11 side, it may be provided so as to include a range that overlaps with the hand 320 of the transfer robot 300 when carrying out and carrying in the panel P. By providing the retroreflective object 50 at such a position and detecting the height position of the panel P, the positional relationship between the panel P and the hand 320 can be grasped more accurately, thereby preventing their interference. be able to.

Although the panel position detection sensor 60 is provided in the load port 100 (near the port door 130) in the above embodiment, the panel position detection sensor 60 may be provided in the transfer robot 300 (for example, the hand 320). As a result, the transport robot 300 that transports the panel P can also serve as a moving mechanism for the panel position detection sensor 60 .

In the above-described embodiment, one panel position detection sensor 60 is vertically moved by the moving mechanism to detect the position of the panel P on each stage and perform mapping processing. The same number of panel position detection sensors 60 as the number of stages of the supports 31 may be arranged vertically to detect the position of the panel P at the same time.

In the above-described embodiment, in the panel storage container 1, the opening 11 of the container body 10 is closed by the lid 20. 11, and may be used as an open box.

1 panel storage container 10 container body, 11 opening, 12 left side wall, 13 right side wall, 14 top plate, 15 bottom plate, 16 back plate, 17 positioning recess 20 lid 30 side support portion (panel support means), 31 panel support, 32 strut, 33 side support, 34 end support, 35 front stopper 40 central support (panel support means), 41 panel support, 42 strut, 44 end support 50 regressive reflector 60 panel position detection sensor, 61 light projecting element, 62 Light receiving element 100 Load port 110 Placement table 111 Positioning mechanism 120 Opening window 130 Port door 131 Lid opening/closing mechanism 140 Shutter 300 Transfer robot 310 Arm 320 Hand

Claims (2)

a container body capable of accommodating a plurality of panels;
A panel storage container comprising panel support means for supporting the panel,
The container body has a retroreflector that reflects the light projected from the panel position detection sensor on the back plate facing the front opening through which the panel can be carried in and out,
A panel storage container characterized by: The retroreflective object is provided so as to include a range that overlaps a maximum deflection position where the panel supported by the panel support means is most deflected in a front view from the opening side.
The panel storage container according to claim 1, characterized by:

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