CN217755820U - Panel storage container - Google Patents
Panel storage container Download PDFInfo
- Publication number
- CN217755820U CN217755820U CN202220650775.3U CN202220650775U CN217755820U CN 217755820 U CN217755820 U CN 217755820U CN 202220650775 U CN202220650775 U CN 202220650775U CN 217755820 U CN217755820 U CN 217755820U
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- Prior art keywords
- panel
- support
- storage container
- container body
- container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Gas-Filled Discharge Tubes (AREA)
Abstract
The utility model provides an improve panel storage container of detection precision of panel position. A panel storage container (1) is provided with: a container body (10) capable of accommodating two or more panels (P); and a panel support unit (30) for supporting the panel (P); the container body (10) has a retroreflective article (50) which is provided on a back plate (16) facing a front opening (11) of a panel (P) that can be carried in and out, and reflects light projected from a panel position detection sensor (60). The retroreflective article (50) is provided so as to include a range that overlaps with the maximum bending position where the panel (P) supported by the panel support means (30) is most bent when viewed from the front on the opening (11) side.
Description
Technical Field
The utility model relates to a panel storage container of storage panel.
Background
A panel storage container for storing two or more panels is used for temporarily storing the panels when the panels are transferred from a manufacturing device to another manufacturing device in a manufacturing process of processing the panels such as glass substrates for liquid crystal panels or the like.
In the case of storing or taking out a panel in or from the panel storage container, although a carry-in/carry-out mechanism including an arm that holds the panel is used, in order to position the arm at the height of each panel support unit of the panel storage container, the panel position (height) of each stage is detected (measured) by a panel position detection sensor provided at a load port (load port) or an arm, and mapping processing is performed to store the detected data in a mapping storage unit (see, for example, patent documents 1 and 2).
The panel position detection sensors described in patent documents 1 and 2 use a transmission type sensor, and position (the vicinity of the front end of) the panel between the left light projecting element and the right light receiving element, and detect the position of the panel by the receivable signal light that is not blocked.
In recent years, as liquid crystal panels have been increased in size, various panels have been increased in size. Further, when the panel is enlarged, the weight is increased to 5kg to 8kg, and therefore, the bending amount of the large panel supported by the panel support body of the panel support unit is also increased due to the increase of its own weight or the increase of the distance between the panel support bodies.
Prior Art
Patent document
Patent document 1: japanese laid-open patent publication No. 2006-128294
Patent document 2: japanese patent laid-open No. 2020-053417
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved by the utility model
However, since the panel position detection sensors disclosed in patent documents 1 and 2 detect on the opening side (carrying-in and carrying-out side) of the panel storage container, if the amount of bending is large at a position different from the panel detection position (for example, the back side opposite to the opening), when the arm of the carrying-in and carrying-out mechanism enters, the arm may come into contact with the panel, and the panel may be damaged. In particular, in the case of a large panel, since the amount of bending itself is large, the difference in the amount of bending also becomes large, and the possibility of panel breakage increases.
Here, an object of the present invention is to provide a panel container that can improve the detection accuracy of the panel position.
Means for solving the problems
(1) An embodiment of the present invention is a panel storage container, which comprises: a container body capable of accommodating more than two panels; and a panel supporting unit for supporting the panel; the container body has a retro-reflector provided on a back plate opposed to an opening on the front surface of the panel, and reflects light projected from the panel position detection sensor.
(2) In the embodiment of the above (1), the retro-reflector is provided so as to include a range that overlaps with a maximum bending position of the most bent panel supported by the panel support unit when viewed from the front of the opening side.
Effect of the utility model
According to the utility model discloses, can provide a panel storage container, this panel storage container can improve the detection precision of panel position.
Drawings
Fig. 1 is a schematic cross-sectional view showing a state in which a lid body of a panel storage container according to an embodiment of the present invention is removed at a loading port.
Fig. 2A is a perspective view showing a container body of the panel storage container according to the embodiment of the present invention.
Fig. 2B is a front view showing a container body of the panel storage container according to the embodiment of the present invention.
Fig. 2C is a cross-sectional view showing a container body of the panel storage container according to the embodiment of the present invention.
Fig. 3A is a schematic diagram showing a state in which, when a retro-reflector is present, signal light from the position detection sensor is received as reflected light.
Fig. 3B is a schematic diagram showing a state in which, when there is no retro-reflector, the signal light from the position detection sensor is received as reflected light.
Description of the reference numerals
1: panel storage container
10: container body
11: opening of the container
12: left side wall
13: right side wall
14: top board
15: base plate
16: back plate
17: positioning concave part
20: cover body
30: side supporting parts (Panel supporting unit)
31: panel support
32: support post
33: side support
34: end support
35: front stop block
40: central supporting parts (Panel supporting unit)
41: panel support
42: support post
44: end support
50: retro-reflector
60: panel position detection sensor
61: light projection element
62: light receiving element
100: load port
110: placing table
111: positioning mechanism
120: opening window
130: port door
131: cover opening and closing mechanism
140: gate plate
300: transfer robot
310: arm(s)
320: hand (W.E.)
Detailed Description
Hereinafter, a panel storage container 1 according to an embodiment of the present invention will be described with reference to the drawings. In the embodiments of the present specification, the same or corresponding components or members are denoted by the same or corresponding reference numerals.
First, before describing the panel storage container 1 according to the embodiment of the present invention, the load port 100 on which the panel storage container 1 is mounted will be described.
Fig. 1 is a schematic cross-sectional view showing a state where a lid 20 of a panel storage container 1 according to an embodiment of the present invention is removed from a load port 100.
As shown in fig. 1, the load port 100 is disposed adjacent to a sidewall of the semiconductor manufacturing apparatus disposed in the clean room to constitute a carry-in and carry-out panel P between the inside and the outside of the semiconductor manufacturing apparatus.
The load port 100 includes: a mounting table 110 on which the panel storage container 1 is mounted; and an opening window 120 provided opposite to the panel container 1 placed on the placing table 110; and a port door 130 for opening and closing the opening window 120.
The mounting table 110 includes a positioning mechanism 111 for positioning the panel container 1 on the mounting table 110. The positioning mechanism 111 is engaged with (brought into contact with) a positioning concave portion 17 formed in the bottom plate 15 of the container body 10 of the panel container 1 or a pad attached to the bottom plate 15, thereby positioning the panel container 1 at a predetermined position with respect to the opening window 120.
The port door 130 can open and close (open and close) the opening window 120 by a swing unit. The port door 130 includes a lid opening/closing mechanism 131 for releasing a locking mechanism (not shown) of the lid 20 of the panel storage container 1 and removing the lid 20 from the container body 10 when the opening window 120 is opened. On the contrary, when the lid 20 is attached to the container body 10, the lid opening/closing mechanism 131 can lock the locking mechanism to fix the lid 20 to the container body 10.
If necessary, the opening window 120 may be provided with a shutter 140, and when the port door 130 is removed from the container body 10 to open the opening window 120, the shutter 140 may quickly close the opening window 120 instead of the port door 130.
Further, a transfer robot 300 for transferring the panel P is provided on the semiconductor manufacturing apparatus side via the port door 130. The transfer robot 300 includes a multi-joint arm 310 that moves up and down, moves back and forth, and horizontally rotates, and a hand 320 that is provided at the tip of the arm 310 and holds (sucks) the panel P.
The hand 320 enters the container body 10 from which the lid 20 is removed as the arm 310 moves, and carries in and out the panel P. Since the loading and unloading steps of the panel P are the same as those in the conventional art, the detailed operations of the load port 100 and the transfer robot 300 will not be described.
In the loading port 100, when the lid 20 is removed from the container body 10, the panel position detection sensor 60 that detects the position (height) of the panel P is moved to a position facing the internal space of the container body 10 by a moving mechanism (not shown).
The panel position detection sensor 60 is, for example, a reflection type sensor using an optical fiber, and includes: a light projecting element 61 that projects signal light (infrared light) using an LED, a laser, or the like as a light source, and a light receiving element 62 that receives reflected light of the signal light reflected by an object (see fig. 3A). The panel position detection sensor 60 further includes an amplifier (amplifier), a power supply, and the like, and is connected to a higher-level control device that controls the mapping process or the entire semiconductor manufacturing apparatus.
The control means detects (calculates) the position of the panel P by detecting the amount of reflected light received by the light receiving elements 62, and for example, the position of the panel P can be directly detected by the light receiving position of the reflected light.
The panel storage container 1 will be described below.
Fig. 2A to 2C are views showing a container body 10 of a panel storage container 1 according to an embodiment of the present invention, fig. 2A is a perspective view, fig. 2B is a front view, and fig. 2C is a cross-sectional view. In fig. 2C, the panel P is omitted.
The panel storage container 1 is a container used in a processing apparatus (processing step) for processing electronic components, and is used for transferring the panel P between steps, for example, a step of forming a plurality of electronic components on a large carrier panel such as a glass plate or a stainless plate, a step of encapsulating the electronic components with epoxy resin or the like, a step of peeling the encapsulated electronic components (panel form) from the carrier panel, a step of cutting the electronic components from the encapsulated panel, and the like.
The panel P stored in the panel storage container 1 may be, for example, a carrier panel having a size of 625mm × 615mm or a package panel having a size of 600mm × 600 mm. Therefore, it is preferable to prepare two or more kinds of panel containers 1 corresponding to the respective sizes.
The panel storage container 1 includes a container body 10 capable of storing two or more (e.g., 6, 12, … …, 25) rectangular panels P; and a lid 20 that openably and closably covers the opening 11 formed in the front surface of the container body 10 (see fig. 1).
As shown in fig. 2A to 2C, the container body 10 is a front opening box-type container having an opening 11 in the front, and is formed by a left side wall 12 and a right side wall 13, a top plate 14, a bottom plate 15, and a back plate 16 facing the opening 11 when viewed from the front.
Lifting flanges held by the conveyance machine are provided on the outer surfaces of the left side wall 12 and the right side wall 13. Further, a robot flange held by a ceiling transport mechanism in a manufacturing plant is provided on the upper surface of the top plate 14. Further, two or more (for example, three) positioning recesses 17 are provided on the outer surface of the base plate 15, and the positioning recesses 17 are supported by positioning means such as a processing device or a transfer robot.
The container body 10 may be configured by assembling wall members to air-tightly cover left and right side surfaces, an upper surface, a lower surface, and a rear surface of a frame body assembled in a rectangular parallelepiped shape by columnar members. In order to maintain the cleanliness of the internal space of the panel storage container 1 and the low humidity, a gas supply unit for supplying an inert gas or the like into the container body 10 or a gas discharge unit for discharging the gas in the container body 10 may be provided on the bottom plate 15 of the container body 10.
The panel storage container 1 includes side support members 30 as panel support means for supporting left and right end portions of the panel P, and further includes a center support member 40 for supporting a center portion of the panel P.
The side support member 30 has a panel support 31 for supporting the panel P, and a pillar 32 and a side support 33 for fixing the panel support 31, and they are oppositely provided on the inner surfaces of the left and right side walls 12, 13.
The support columns 32 are prism-shaped columns that constitute a part of the rear surface of the container body 10, and two support columns 32 are provided upright on the left and right between the top plate 14 and the bottom plate 15. In addition, between the stay 32 and a stay 42 described later, and between the stay 32 and the frame body, wall plate members are installed to form the back plate 16.
The side support 33 has a rectangular shape having a long side in the left-right direction in plan view, and is fixed to the left and right side walls 12 and 13, respectively. Further, the side support 33 has a first surface formed with a first step portion, and a second surface formed with a second step portion on a back surface side thereof, and can support the panel P with both surfaces.
Here, the positions of the first step portion and the second step portion from the left and right side walls 12 and 13 are different, and the mounting direction of the side support 33 is selected, whereby the panels P having different widths can be supported between the step portions. Further, the side supports 33 are formed so that the height of the support panel P does not change even when the mounting directions of the first step portion and the second step portion are interchanged.
On the other hand, the end support 34 has a rectangular shape having a long side in the front-rear direction in a plan view, and is fixed to the pillar 32. Further, similarly to the side supports 33, the end support 34 has a third face formed with a third step portion, and a fourth face formed with a fourth step portion on the back face side thereof, and the panel P can be supported by these two faces.
The third step and the fourth step are different in position from the strut 32, and panels P of different lengths (depths) can be supported by selecting the mounting direction of the end support 34. Further, the end supports 34 are formed so that the height of the support panel P does not change even when the mounting directions of the third step portion and the fourth step portion are interchanged, similarly to the side supports 33. In the panel storage container 1 of the present embodiment, the stepped portions of the side supports 33 and the end supports 34 are sized to support both the carrier panel and the package panel.
The side supports 33 and the end supports 34 may be formed of a resin material having higher friction and higher cushioning conductivity than a metal material, so that the supported panel P can be prevented from sliding and from being damaged, or only a portion in contact with the panel P may be formed of a resin material and the other portions may be formed of a metal material.
The panel support body 31 is columnar or cylindrical, and is fixed by the above-described support column 32, side support member 33, and end support member 34. Specifically, the rear end portion of the panel support body 31 is inserted into and fixed to a locking hole formed in the stay 32, the vicinity of the rear end portion is inserted into a through hole formed in the end support 34, and the vicinity of the intermediate portion and the front end portion are inserted into and fixed to an insertion hole (of a half-open structure) formed in the side support 33.
The panel support body 31 is covered with a cylindrical tube made of an elastic body except for the fixed portions fixed to the stay 32, the side support 33, and the end support 34. Instead of the cylindrical pipe, two or more O-rings or the like may be attached to the panel support body 31.
Further, a front stopper 35 is provided at the front end of the panel support body 31 for preventing the panel P from being ejected forward.
On the other hand, the center support member 40 has a panel support 41 provided on the inner surface of the back panel 16 for supporting the panel P, a stay 42 for fixing the panel support 41, and an end support 44.
The panel support body 41 is cylindrical or cylindrical, similar to the panel support body 31, and is fixed by the support columns 42 and the end support members 44, wherein the support columns 42 and the end support members 44 are similar in structure to the support columns 32 and the end support members 34 described above. However, the panel support body 41 does not have the front stopper 35, and is formed to have a length shorter than that of the panel support body 31.
On the other hand, the lid body 20 can close the opening 11 of the container body 10 in an airtight state with a seal gasket interposed therebetween, and has a locking mechanism (locking means) for locking (fixing) the lid body 20 to the container body 10 or unlocking the lid body from the container body 10.
The locking mechanism includes a latch that is displaced between a locked position and an unlocked position by being fitted by an operation of a key inserted into a keyhole, and locks and unlocks the lid body 20 by engaging or disengaging the latch with or from an engagement portion on the container body 10 side.
The container body 10 or the lid body 20 described above may be formed of two or more members formed of a metal material, a resin material, or the like. Examples of the resin contained in the molding material for the resin member include: thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, and polyvinyl chloride, and alloys thereof. Additives imparting various functions, such as a conductive substance, an antistatic agent, and an ultraviolet absorber, may be added to these resins.
In addition, a retro-reflector 50 (see fig. 2A and 2B) for reflecting light projected from the panel position detection sensor 60 is provided on the rear plate 16. Specifically, the container body 10 is provided at a position on the left side wall 12 side (between the left support column 32 and the center support column 42), a position at the center portion (at least one of the left side or the right side of the center support column 42), and a position on the right side wall 13 side (between the center support column 42 and the right support column 32) of the back plate 16 when viewed from the front of the opening 11 side of the container body. These positions include a range that overlaps with the maximum bending position at which the panel P supported by the side support members 30 and the center support member 40 is most bent when viewed from the front.
Further, since the panel storage container can be used by removing the central support member 40 depending on the type and size of the panel P, the retroreflective article 50 is also provided in the central portion, which is the maximum bending position at which the panel P supported only by the side support members 30 is most bent.
The retro-reflector 50 is formed of a material having excellent light reflection performance, and may be attached by bonding means such as adhesion, welding, screwing, or fitting, for example, by being formed as a film base material, a sheet base material, or a plate material. And such a retro-reflector 50 appears black, for example.
In addition, although the retro-reflector 50 may be provided on the inner surface of the back sheet 16, it may be provided on the outer surface of the back sheet 16 when the back sheet 16 is formed of a light-transmissive material. However, the retro-reflector 50 may be a wall member forming the container body 10, that is, the back plate 16 itself, or may be a column member to which the pillars 32, 42, etc. of the back plate 16 are attached.
Finally, a state in which the signal light from the panel position detection sensor 60 is reflected by the retro-reflector 50 and received as reflected light by the panel position detection sensor 60 will be described.
Fig. 3A is a schematic diagram showing a state in which, when the retro-reflector 50 is present, the signal light from the position detection sensor 60 is received as reflected light. Fig. 3B is a schematic diagram showing a state in which, when the retro-reflector 50 is not present, the signal light from the position detection sensor 60 is received as reflected light.
When the retro-reflector 50 is not present, as shown in fig. 3B, the signal light projected from the light projecting element 61 of the panel position detection sensor 60 is reflected by the front end surface of the panel P, and the reflected light can be received at the light receiving element 62. However, since the reflected light reflected by the region other than the front end face of the panel P (the surface or the rear end face on the back plate 16 side of the container body 10) is diffused as the diffused light to the surroundings, it cannot be received by the light receiving element 62. Therefore, regardless of the tilted state or the bent state of the panel P, the panel position detection sensor 60 always detects the position of the front end face of the panel P as the height position of the panel P.
On the other hand, when the retro-reflector 50 is present, as shown in fig. 3A, the signal light projected from the light projecting element 61 of the panel position detection sensor 60 is reflected by the end surface (front end surface) of the panel P and the reflected light can be received by the light receiving element 62, as in the conventional case. Further, since the reflected light reflected by the surface of the panel P (on the back plate 16 side of the container body 10) is diffused as the diffused light to the surroundings, it cannot be received by the light receiving element 62.
However, although there is a case where the reflected light of the signal light reflected by the retro-reflector 50 may be further reflected at the rear end face or the like of the panel P without reaching the light receiving element 62, it can reach the light receiving element 62 as long as it can be reflected from below the lowermost side of the maximum bent position or inclined state of the panel P. Therefore, by acquiring two peaks, the panel position detection sensor 60 can detect the panel P existing immediately above the lower peak. Therefore, the panel position detection sensor 60 can detect the height position of the panel P by taking the inclination state or the bending state of the panel P into consideration.
As described above, the panel storage container 1 according to the embodiment of the present invention includes the container body 10 that stores two or more panels P, and the panel support units 30 and 40 that support the panels P, wherein the container body 10 includes the retro-reflector 50 provided on the back plate 16 facing the opening 11 on the front surface of the movable-out and movable-in panel P, and reflecting the light projected from the panel position detection sensor 60. Accordingly, even if the panel P supported by the panel supporting units 30, 40 is in an inclined state or a bent state, the position of the panel P can be accurately detected.
The retro-reflector 50 of the embodiment is provided so as to include a range that overlaps with the most curved maximum curved position of the panels P supported by the panel supporting units 30, 40 when viewed from the front on the opening 11 side. Accordingly, the position of the lowest point of the panel P can be confirmed, and thus interference between the panel P and the hand 320 of the transfer robot 300 can be prevented.
While the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various modifications and changes can be made within the scope of the gist of the present invention described in the claims.
(modification example)
In the above-described embodiment, the retro-reflector 50 is provided so as to include a range that overlaps with the maximum bending position of the most bent panel P supported by the panel support units 30 and 40 when viewed from the front of the opening 11 side, but may be provided so as to include a range that overlaps with the hand 320 of the transfer robot 300 when the panel P is carried in and out when viewed from the front of the opening 11 side. By providing the retro-reflector 50 at such a position and detecting the height position of the panel P, the positional relationship between the panel P and the hand 320 can be grasped more accurately, and therefore interference between them can be prevented.
In the above-described embodiment, although the panel position detection sensor 60 is provided in the load port 100 (in the vicinity of the port door 130), the panel position detection sensor 60 may be provided in the transfer robot 300 (for example, the hand 320). Accordingly, the transfer robot 300 that transfers the panel P may also serve as a transfer mechanism for the panel position detection sensor 60.
In the above-described embodiment, one panel position detection sensor 60 is moved up and down by the moving mechanism to detect the position of each panel P and perform the mapping process, but the panel position detection sensors 60 may be provided in parallel in the vertical direction in the same number as the number of the panels to be stored in the panel storage containers 1 (the number of stages of the panel support member 31) to simultaneously detect the positions of the panels P.
In the above-described embodiment, the opening 11 of the container body 10 is closed by the lid body 20 in the panel container 1, but depending on the application of the panel container 1 (panel P), the lid body 20 may be used as an open box without being attached to the opening 11 of the container body 10.
Claims (2)
1. A panel storage container is characterized by comprising:
a container body capable of accommodating more than two panels; and
a panel supporting unit for supporting the panel;
the container body has a retro-reflector provided on a back plate opposed to an opening in the front surface of the panel, the retro-reflector reflecting light projected from the panel position detection sensor.
2. The panel receiving container of claim 1,
the retro-reflector is disposed at a specific position on the back plate when viewed from the front of the opening side, the specific position including a range that coincides with a maximum bending position at which the panel supported by the panel supporting unit is most bent.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021053631A JP2022150845A (en) | 2021-03-26 | 2021-03-26 | Panel housing container |
| JP2021-053631 | 2021-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217755820U true CN217755820U (en) | 2022-11-08 |
Family
ID=83437884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220650775.3U Active CN217755820U (en) | 2021-03-26 | 2022-03-24 | Panel storage container |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2022150845A (en) |
| KR (1) | KR20220002375U (en) |
| CN (1) | CN217755820U (en) |
| TW (1) | TWM629454U (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006128294A (en) | 2004-10-27 | 2006-05-18 | Shinko Electric Co Ltd | Wafer detector |
| JP7151318B2 (en) | 2018-09-21 | 2022-10-12 | 東京エレクトロン株式会社 | SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER MODULE |
-
2021
- 2021-03-26 JP JP2021053631A patent/JP2022150845A/en active Pending
-
2022
- 2022-01-14 KR KR2020220000113U patent/KR20220002375U/en unknown
- 2022-02-15 TW TW111201532U patent/TWM629454U/en unknown
- 2022-03-24 CN CN202220650775.3U patent/CN217755820U/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20220002375U (en) | 2022-10-05 |
| TWM629454U (en) | 2022-07-11 |
| JP2022150845A (en) | 2022-10-07 |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |