JP2022103667A - Actuator, and robot - Google Patents

Abstract

To provide an actuator capable of efficiently installing cables in an actuator housing, and to provide a robot thereof.SOLUTION: An actuator 100 comprises a ball screw 20, an actuator housing 30, a slider 40, and a supply cable group 50. The supply cable group 50, at least part of which is arranged in a hole 31a of a base 31a, is supported by a slider 40 while supplying power, a signal or air to another actuator as well as an electronic device as a moving object moving together with the slider 40. The supply cable group 50 comprises a first bent part 50-1 pulled out from the base 31; folded back after extension in - X direction that is one direction in a linear motion direction D1; and connected to the slider 40, and a second bent part 50-2 pulled out from the base 31; folded back after extension in + X direction that is the other direction in the linear motion direction D1; and connected to the slider 40.SELECTED DRAWING: Figure 10

Description

The present invention relates to actuators and robots.

In Patent Document 1, the ball nut rotates with the rotation of the rotating shaft of the motor, and the ball nut screwed to the screw shaft rotates with the rotation of the ball nut together with the slide table, the motor, and the rotary encoder. An actuator that moves forward and backward is disclosed. The ball nut is configured as a moving body that moves integrally with the slide table, motor, and rotary encoder. The power supply cable that supplies power to the motor is drawn from the base of the substrate provided at one end of the actuator casing, crawls on the bottom surface of the actuator casing, and extends along the moving direction of the slide table. ing. Then, the power feeding cable extends from the slide table to the other side of the actuator housing, is folded back in an arc shape, and is connected to the motor.

Japanese Patent No. 2959617

In the actuator described in Patent Document 1, the laying length of the power feeding cable becomes long, and the power feeding cable easily floats from the inner surface of the actuator casing. As a result, the power supply cable may come into contact with the moving body. For example, in the case of a uniaxial actuator as described in Patent Document 1, it is relatively easy to secure a cable laying space even if a cable is installed in the actuator casing, but a robot combining a multi-axis actuator is relatively easy. Then, cables for supplying power to the drive unit of the actuator after the next shaft are required, and the number of cables also increases. Therefore, if cables are to be installed in the actuator casing without increasing the size of the actuator, it becomes difficult to secure a space for laying the cables. Therefore, in such an actuator, it is desired that cables can be efficiently installed in the actuator casing.

The present invention has been made under the above circumstances, and an object of the present invention is to provide an actuator and a robot capable of efficiently incorporating cables into an actuator housing.

In order to achieve the above object, the actuator according to the first aspect of the present invention is
A ball screw having a ball screw shaft that rotates with the rotational movement of the rotary shaft of the motor,
A slider that linearly moves with the rotational movement of the ball screw shaft,
An actuator housing having a base that linearly supports the slider and covering at least a portion of the ball screw and the slider.
With a supply cable group that is directly or indirectly supported by the slider and supplies power, a signal, or air to a moving object that moves with the slider, and at least a part thereof is arranged inside the base. ,
Equipped with
The supply cable group is
A first bent portion that is pulled out of the base, extended in one direction in the direction of linear motion, then folded back and connected to the slider.
A second bent portion that is pulled out of the base, extended in the other direction opposite to one in the linear motion direction, then folded back and connected to the slider.
Have.

The first bent portion and the second bent portion are folded back on one side of the ball screw shaft.
The supply cable group is
A third bent portion that is pulled out of the base, extended in one direction, then folded back on the other side of the ball screw shaft and connected to the slider.
A fourth bent portion drawn from the base, extended in the other direction, then folded back on the other side of the ball screw shaft and connected to the slider.
May have.

The supply cable group may be pulled out from the center in the linear motion direction at the base.

An opening through which the supply cable group is inserted is formed in the base.
The opening may be provided in the center of the base in the direction of linear motion.

The robot according to the second aspect of the present invention is
A plurality of actuators according to the first aspect are provided.

In the actuator according to the present invention, the supply cable group has a first bent portion connected to the slider from one direction and a second bent portion connected to the slider from the other direction. Therefore, in the actuator according to the present invention, even if the number of cables or tubes constituting the supply cable group increases, the contact between the cables or tubes is reduced and the cables or tubes are easily bent in the actuator housing. Can be done. This makes it possible to provide an actuator and a robot capable of efficiently incorporating a supply cable group (cables) in the actuator housing.

It is a perspective view of the robot which concerns on embodiment of this invention. It is an exploded perspective view of the 1st actuator which concerns on embodiment of this invention. It is a rear view of the 1st actuator. FIG. 3 is a sectional view taken along the line AA of FIG. FIG. 4 is a sectional view taken along the line BB of FIG. (A) is a perspective view (No. 1) of the slider of the first actuator. (B) is a perspective view (No. 1) of the slider from which the seat guide member is removed and the supply cable group in the first actuator. (A) is a perspective view (No. 2) of the slider of the first actuator. (B) is a perspective view (No. 2) of the slider from which the seat guide member is removed and the supply cable group in the first actuator. It is a perspective view which made a part of the cross section for demonstrating the air flow path of a slider in a 1st actuator. It is an exploded perspective view of the slider and the base in the 1st actuator, and the slider cover. It is sectional drawing which showed the part of the 1st actuator simply. It is a perspective view which showed the part of the base of the 1st actuator enlarged. It is a perspective view which showed the vicinity of the slider cover of the 1st actuator in an enlarged manner. It is a perspective view of the slider, the supply cable group, and the base in the 1st actuator. It is sectional drawing of the 2nd actuator which concerns on embodiment. It is sectional drawing which showed the part of the 2nd actuator simply. It is sectional drawing for demonstrating the position of the opening formed in the base in the 2nd actuator. (A) is a perspective view (No. 1) of the bracket. (B) is a perspective view (No. 2) of the bracket. It is an exploded perspective view of the 2nd actuator. It is a perspective view which showed the part of the base of the 2nd actuator enlarged. It is a perspective view of the slider, the supply cable group, and the base in the 2nd actuator. It is a side view of the robot which concerns on embodiment. It is sectional drawing of the 3rd actuator. It is sectional drawing which showed the part of the 3rd actuator simply. It is an exploded perspective view (the 1) of the 3rd actuator. FIG. 2 is an exploded perspective view (No. 2) of the third actuator. FIG. 3 is a perspective view of a slider, a supply cable group, and a base in a third actuator. FIG. 3 is an enlarged perspective view showing a part of the base of the third actuator. FIG. 3 is an exploded perspective view of a slider, a rod, and an auxiliary rod of the third actuator.

Hereinafter, the actuators 100, 200, 300 according to the embodiment of the present invention and the robot 1 including them will be described. In addition, the XYZ coordinates in the figure will be described as appropriate.

As shown in FIG. 1, the robot 1 is an actuator system in which a plurality of axes actuators 100, 200, and 300 are combined. The robot 1 has a first actuator 100 having a slider table T1, a bracket B1, a second actuator 200 having a slider table T2, a bracket B2, and a third rod having a reciprocating rod in the Z-axis direction. The actuator 300 and the moving objects 400 and 500 that move based on the operation of the actuators 100, 200 and 300 are provided.

In the present embodiment, the moving target 400 is a wrist unit that rotates the moving target 500 in the rotation direction R, the rotation direction B, and the rotation direction T. The moving object 400 has three motors for rotating the moving object 500 in each rotation direction of the rotation direction R, the rotation direction B, and the rotation direction T. The moving target 500 is a gripper that is attached to the moving target 400 and that the pair of claws 501 move in the pressing direction G to sandwich the work or separate from each other. The moving target 500 is an air-driven type that moves a pair of claw portions 501 in the pinching direction G by supplying air. However, it is not limited to this. The moving target 400 may be an electric type having one motor that moves the pair of claws 501 in the pinching direction G by being supplied with electric power. Further, in the present embodiment, the moving object 400 is a wrist unit, and the moving object 500 is a gripper, but the present invention is not limited to this. The moving objects 400 and 500 may be other tools or electronic devices other than the wrist unit and the gripper.

In the robot 1 according to the present embodiment, the slider table T1 of the actuator 100 reciprocates in the linear motion direction D1 parallel to the X-axis direction, and the slider table T2 of the actuator 200 reciprocates in the linear motion direction D2 parallel to the Y-axis direction. By doing so, the actuator 300 reciprocates in the X-axis direction together with the moving objects 400 and 500. The rod of the actuator 300 reciprocates in the linear motion direction D3 parallel to the Z-axis direction, so that the moving objects 400 and 500 reciprocate in the Z-axis direction. As a result, the moving target 500 moves to a position where the work can be sandwiched. Further, the supply cable group 50 drawn from the actuator 100 is wired inside the actuators 100, 200, and 300.

As shown in FIGS. 2 and 3, the actuator 100 is a table type actuator including a slider table T1 that reciprocates in the linear motion direction D1. The actuator 100 is a supply cable including a motor unit 10, a ball screw 20, an actuator housing 30, a slider 40, an air tube 51, a power cable 52, and a signal cable 53 in addition to the slider table T1. The group 50 and the like. Further, in the present embodiment, the slider table T1 is composed of a slider 40 and a slider cover 41d.

The X-axis drive controller (not shown) that drives and controls the motor unit 10 of the actuator 100 and the control controller (not shown) that controls the entire robot 1 are installed outside the robot 1, and the robot 1 and the supply cable group 50 are used. It is connected. The X-axis drive controller controls the actuator 100, for example, based on the input from the control controller that controls the entire robot 1 shown in FIG. The X-axis drive controller includes, for example, a CPU (Central Processing Unit), a main storage unit, an auxiliary storage unit, and the like. A power cable 52 out of a plurality of power cables 52 of the supply cable group 50 is connected to the X-axis drive controller. Further, a signal cable 53 and a motor / encoder cable are pulled out from this X-axis drive controller. Although the X-axis drive controller is installed outside the robot 1, it may be installed in the actuator 100 as in the Y-axis drive controller and the Z-axis drive controller described later.

As shown in FIGS. 2 and 3, the slider cover 41d reciprocates in the linear motion direction D1 together with the slider 40 by being fixed to the slider 40. The slider cover 41d is used to prevent the seat member 33 from coming into contact with an object or device installed on the slider 40. The slider cover 41d is formed with a hole 41d1 penetrating in the Z-axis direction. The hole 41d1 is a hole having a substantially rectangular opening whose longitudinal direction is the X-axis direction.

As shown in FIGS. 2 and 4, the motor unit 10 includes, for example, a motor body 11, an output shaft 12 (rotating shaft), a rotor, a stator, an encoder, and the like. Power is supplied to the motor body 11 from the supply cable group 50. By supplying electric power to the motor body 11, the rotor rotates, and as a result, the rotary motion of the rotor is output to the output shaft 12. A coupling 13 is attached to the output shaft 12.

The ball screw 20 is used to move the slider 40 in a linear motion by converting the rotational motion of the output shaft 12 of the motor unit 10 into a linear motion. The ball screw 20 has a ball screw shaft 21, a ball screw nut 22, a tip support portion 23, a base end support portion 24, and a coupling 25.

The ball screw shaft 21 has a ball screw shaft main body whose outer peripheral surface is configured as a spiral ball screw surface and a tip portion 21a on the −X side of the ball screw shaft 21 formed to have a smaller diameter than the ball screw shaft main body. And a base end portion 21b on the + X side.

The tip portion 21a is formed so as to project in the −X direction from the ball screw shaft main body. The tip portion 21a is a portion in which a ball screw surface is not formed on the outer peripheral surface, unlike the ball screw shaft main body. The tip portion 21a may be integrally formed with the ball screw shaft main body, or the tip portion 21a may be formed separately from the ball screw shaft main body and fixed to the ball screw shaft main body.

The base end portion 21b is formed so as to project in the + X direction from the ball screw shaft main body. The base end portion 21b is a portion in which a ball screw surface is not formed on the outer peripheral surface, unlike the ball screw shaft main body. The base end portion 21b may be integrally formed with the ball screw shaft main body, or the base end portion 21b may be formed separately with the ball screw shaft main body and fixed to the ball screw shaft main body. A coupling 25 is attached to the base end portion 21b. The ball screw shaft 21 rotates together with the output shaft 12 by connecting the coupling 25 attached to the base end portion 21b to the coupling 13 attached to the output shaft 12 of the motor unit 10. As a result, the rotational movement of the output shaft 12 is transmitted to the ball screw shaft 21.

The ball screw nut 22 is screwed and arranged on the outer peripheral surface of the ball screw shaft main body of the ball screw shaft 21. The ball screw nut 22 is fitted into the ball screw shaft 21 via a rigid sphere. The ball screw nut 22 makes a linear motion based on the rotational motion of the ball screw shaft 21.

The tip support portion 23 has a bearing. The bearing included in the tip support portion 23 is, for example, a ball bearing. By this ball bearing, the tip support portion 23 rotatably supports the tip portion 21a of the ball screw shaft 21. The bearing included in the tip support portion 23 is not limited to the ball bearing. The bearing may be a sliding bearing.

The base end support portion 24 has a bearing. A through hole for inserting the ball screw shaft 21 is formed in the base end support portion 24, and the output shaft 12, the coupling 13, and 25 of the bearing and the motor unit 10 are arranged in the through hole. Has been done. The bearing included in the base end support portion 24 is, for example, a ball bearing. By this ball bearing, the proximal end support portion 24 rotatably supports the proximal end portion 21b of the ball screw shaft 21. The bearing included in the base end support portion 24 is not limited to the ball bearing. The bearing may be a sliding bearing.

The actuator housing 30 covers each component inside the actuator 100 by accommodating the motor unit 10, the ball screw 20, and the slider 40. In the present embodiment, the actuator housing 30 covers the entire ball screw 20 and the slider 40. However, it is not limited to this. The actuator housing 30 may be formed so as to cover at least a part of the ball screw 20 and the slider 40. As shown in FIGS. 2 and 3, the actuator housing 30 has a base 31, a pair of side covers 32R and 32L, a seat member 33, a front bracket 34, and a rear bracket 35.

As shown in FIG. 5, the base 31 constitutes a bottom portion of the actuator housing 30 and a part of side wall portions on both sides. The base 31 is a member having a rail structure that supports the slider 40 so as to be slidable in both the + X direction and the −X direction via a plurality of linear guide rolling elements. The base 31 is formed by, for example, extruding a metal such as aluminum. Further, the base 31 is formed so that its cross section (YZ cross section) is substantially U-shaped. A pair of rolling element grooves extending in the X-axis direction are formed on the inner surfaces of the pair of substantially U-shaped side wall portions of the base 31 facing each other. The slider 40 smoothly reciprocates as the linear guide rolling element rolls in the rolling element groove.

A hole 31a parallel to the X-axis direction is formed in the substantially U-shaped bottom portion of the base 31. The hole 31a is formed so as to penetrate in the X-axis direction, for example. The holes 31a are mainly formed to reduce the weight of the base 31. The hole 31a of the base 31 is also used as a hole through which the supply cable group 50 is inserted.

The rolling element for the linear guide is made of a highly rigid material, specifically, a steel material. The rolling element for the linear guide is formed in a spherical shape. A plurality of linear guide rolling elements are arranged between the base 31 and the slider 40, and are used to smoothly move the slider 40 in the X-axis direction with respect to the base 31.

The side covers 32R and 32L form a part of the side wall portion on both sides of the actuator housing 30 and a part of the ceiling wall portion. The side covers 32R and 32L, together with the base 31, protect each component inside the actuator 100.

The seat member 33 is a stainless steel sheet that closes the upper opening between the side cover 32R and the side cover 32L. As shown in FIG. 2, the sheet member 33 is a substantially rectangular sheet whose longitudinal direction is the X-axis direction. As shown in FIG. 5, the seat member 33 closes the upper opening between the side cover 32R and the side cover 32L, so that the seat member 33 constitutes a part of the ceiling wall portion of the actuator housing 30. As shown in FIG. 2, the end portion of the seat member 33 on the −X side is fixed to the front bracket 34. Similarly, the + X side end of the seat member 33 is fixed to the rear bracket 35.

The front bracket 34 constitutes a tip portion on the −X side of the actuator housing 30, and is fixed to the −X side of the base 31. The front bracket 34, together with the base 31, side covers 32R and 32L, protects each component inside the actuator 100. The front bracket 34 is made of resin in the present embodiment from the viewpoint of shock absorption and weight reduction. However, it is not limited to this. The front bracket 34 may be made of a material other than resin, for example, metal. Further, from the front bracket 34, the air tube 51, the power cable 52, and the signal cable 53 are incorporated inside the actuator 100.

The rear bracket 35 is fixed to the + X side of the base 31. The base end portion on the + X side of the actuator housing 30 is formed and fixed to the + X side of the base 31. The rear bracket 35, together with the base 31, side covers 32R and 32L, and the front bracket 34, protects each component inside the actuator 100. The rear bracket 35 is made of resin in the present embodiment from the viewpoint of shock absorption and weight reduction. However, it is not limited to this. The rear bracket 35 may be made of a material other than resin, for example, metal.

The slider 40 is supported by the base 31 so as to be linearly movable in the X-axis direction via a rolling element for linear guide. As shown in FIGS. 6 and 7, the slider 40 includes a main body 41, return members 42a and 42b, seat guide members 43a and 43b, an air joint 44, a wiring and piping receiving roller 45, and a supply cable group 50. It has a cable fixing bracket 46 for fixing the signal cable 53 of the above, and a manifold 47.

The main body 41 is made of a highly rigid material, for example, metal. As shown in FIG. 8, an air flow path 41a for flowing air is formed inside the main body 41. In the present embodiment, two air flow paths 41a are formed in the main body 41. The air supplied from the air tube 51 of the supply cable group 50 passes through the air flow path 41a. Further, as shown in FIGS. 6 and 7, a pair of work mounting portions 41R and 41L and a seat member arranging surface 41b are formed on the main body portion 41.

The work mounting portions 41R and 41L are formed so as to project upward (+ Z direction) from the seat member arranging surface 41b. Screw holes are formed on the upper surfaces (+ Z side surface) of the work mounting portions 41R and 41L. As shown in FIG. 2, the slider cover 41d is fixed to the work mounting portions 41R and 41L by fasteners (not shown) such as screws.

The seat member arranging surface 41b is formed between the work mounting portion 41R and the work mounting portion 41L. The sheet member arranging surface 41b is formed in a plane parallel to the XY plane. The seat member 33 is arranged on the seat member arrangement surface 41b.

As shown in FIGS. 6 and 7, the return member 42a is fixed to the front end surface of the main body 41 on the −X side with fasteners or the like. The return member 42a is formed with a rolling element circulation path through which the rolling element for linear guide is passed.

The return member 42b is fixed to the rear end surface on the + X side of the main body 41 with fasteners or the like. Similar to the return member 42a, the return member 42b is formed with a rolling element circulation path through which the rolling element for linear guide is passed.

The seat guide members 43a and 43b are formed with an inclined surface that is inclined with respect to the XY plane. As shown in FIG. 9, the seat member 33 is arranged on the inclined surface of the seat guide members 43a and 43b.

As shown in FIG. 8, the air joint 44 constitutes the discharge port of the air flow path 41a of the main body 41. The air tube 51 of the supply cable group 50 of the actuator 200 is connected to the air joint 44. From the air joint 44, the air supplied from the air tube 51 of the supply cable group 50 is sent to the air tube 51 of the supply cable group 50 of the actuator 200. In this embodiment, two air joints 44 are provided.

As shown in FIGS. 5 to 7, two wiring / piping receiving rollers 45 are attached to the front end surface on the −X side and the rear end surface on the + X side of the main body 41. The wiring / piping receiving roller 45 is rotatably supported around the Y axis with respect to the main body 41. The wiring / piping receiving roller 45 prevents the supply cable group 50 from being caught in the movement of the slider 40 by disposing the supply cable group 50 so as to be pressed against the bottom surface of the base 31 as the slider 40 moves. Is formed for.

As shown in FIG. 8, the manifold 47 constitutes an intake port of the air flow path 41a of the main body 41. An air flow path is formed in the manifold 47. The manifold 47 is attached to the front end surface on the −X side of the main body 41. The air tube 51 of the supply cable group 50 is connected to the manifold 47. As a result, air is supplied to the manifold 47 from the air tube 51. Then, the manifold 47 supplies the air from the air tube 51 to the air flow path 41a of the main body 41. The flow rate of the three sets of air tubes 51 connected to the manifold 47 and the flow rate of the air flow path 41a formed in the main body 41 are the same.

As shown in FIGS. 4 and 10, the supply cable group 50 is drawn into the actuator 100 from the front bracket 34. The supply cable group 50 wired inside the actuator 100 includes three air tubes 51, two power cables 52, three signal cables 53, and an arbitrary number of motor / encoder cables (not shown). ) And. The supply cable group 50 is configured by partially bundling these tubes and cables. In the present embodiment, the supply cable group 50 includes two sets of air tubes 51 with three sets, two sets of power cables 52 with two sets, and three sets. It has two sets of signal cables 53. However, the number of the air tube 51, the power cable 52, and the signal cable 53 is not limited to this, and the number of the air tube 51, the power cable 52, and the signal cable 53 is arbitrary. The number may be other than the number shown in the present embodiment.

As shown in FIG. 1, when the moving objects 400 and 500 included in the robot 1 are devices that require air, the air tube 51 is used to supply air to the device.

The power cable 52 is used to supply electric power to the motor unit 10 included in the actuators 100, 200, and 300, and to supply electric power to the moving targets 400, 500.

The signal cable 53 supplies a signal for controlling the rotation of the rotating shaft to the motor unit 10 included in the actuators 100, 200, and 300, and supplies a signal for controlling the operation to the moving targets 400, 500. It is used to supply.

The motor / encoder cable is drawn from the front bracket 34 as a supply cable group 50 together with the air tube 51, the power cable 52, and the signal cable 53. Then, as can be seen with reference to FIG. 10, the motor / encoder cable is wired in the order of the inside of the hole 31a of the base 31 and the inside of the rear bracket 35, and then the motor included in the actuator 100 inside the rear bracket 35. It is connected to the unit 10. This motor / encoder cable supplies a signal for controlling the motor body 11 of the motor unit 10.

As shown in FIG. 10, the supply cable group 50 drawn from the front bracket 34 is arranged in the order of the inside of the front bracket 34 and the inside of the hole 31a of the base 31. Then, as shown in FIG. 11, the air tube 51 in the supply cable group 50 is drawn out from the tube opening 31b formed in the bottom portion of the base 31. Specifically, a manifold 61 in which an air flow path is formed is attached to the bottom portion of the base 31. Then, the air tube 51 is pulled out from the tube opening 31b via the manifold 61. The air tube 51 drawn out from the tube opening 31b extends in the −X direction (one direction in the linear motion direction D1). The air tube 51 extending in the −X direction is extended while being crawled on the bottom surface of the base 31. Further, in the present embodiment, two tube openings 31b are provided. Then, three air tubes 51 are pulled out from each of the two tube openings 31b. Although two air tubes 51 are installed inside the holes 31a, the air tubes 51 are set of three when they are pulled out from the two tube openings 31b by passing through the manifold 61. It is converted into a pair of air tubes 51 that have become. The air flow rate of the two air tubes 51 and the air flow rate of the pair of air tubes 51 in a set of three are the same.

Further, the power cable 52 in the supply cable group 50 is drawn out from the cable opening 31c formed in the bottom portion of the base 31. The power cable 52 drawn out from the cable opening 31c extends in the −X direction (one direction in the linear motion direction D1). The power cable 52 extending in the −X direction is extended while being laid on the bottom surface of the base 31. In the present embodiment, the power cable 52 drawn out from the cable opening 31c is not fixed to the base 31 by a fixing bracket or the like. However, the present invention is not limited to this, and the power cable 52 drawn out from the cable opening 31c may be fixed to the base 31 with a fixing bracket or the like. Further, in the present embodiment, two cable openings 31c are provided. Two power cables 52 are pulled out from each of the two cable openings 31c. The power cables 52 arranged inside the holes 31a are laid in a loose wire state, but a pair of power cables 52 are paired when they are pulled out from the two cable openings 31c. It is molded into.

Further, the signal cable 53 in the supply cable group 50 is drawn out from the cable opening 31d formed in the bottom portion of the base 31. The signal cable 53 pulled out from the cable opening 31d is fixed to the bottom surface of the base 31 via a fixing bracket 62 attached to the bottom surface of the base 31 by a binding band 63. Further, the signal cable 53 extends in the + X direction (the other direction opposite to one in the linear motion direction D1). The signal cable 53 extending in the + X direction is extended while being laid on the bottom surface of the base 31. Further, in the present embodiment, two cable openings 31d are provided. Then, three signal cables 53 are pulled out from each of the two cable openings 31d. The signal cable 53 arranged inside the hole 31a is laid in a loose wire state, but when it is pulled out from the two cable openings 31d, it is formed into a pair of flat cables in a set of three. It is molded.

As shown in FIGS. 6, 7 and 10, the air tube 51 and the power cable 52 drawn out from the base 31 are extended in the −X direction and then folded back in the + X direction. The air tube 51 and the power cable 52 are connected to the slider 40.

Specifically, the air tube 51 folded back in the + X direction is connected to the manifold 47 of the slider 40 as shown in FIG. As a result, the air supplied from the air tube 51 passes through the air flow path, the air flow path 41a, and the air joint 44 inside the manifold 47, and the air tube 51 of the supply cable group 50 arranged in the actuator 200. Is supplied to.

Further, as shown in FIGS. 6 and 7, the power cable 52 folded back in the + X direction is fixed to the air tube 51 by a binding band (not shown) in the vicinity of the front end surface on the −X side of the slider 40. The power cable 52 is wired on the side surface of the slider 40 on the −Y side, and then bent upward (in the + Z direction) of the slider 40. Then, as shown in FIG. 12, the power cable 52 is pulled out upward (+ Z direction) from the hole 41d1 formed in the slider cover 41d.

Further, as shown in FIGS. 6, 7 and 10, the signal cable 53 drawn out from the base 31 is extended in the + X direction and then folded back in the −X direction. The signal cable 53 is connected to the slider 40.

Specifically, as shown in FIGS. 6 and 7, the signal cable 53 folded back in the −X direction is fixed to the slider 40 by the cable fixing bracket 46 in the vicinity of the rear end surface on the + X side of the slider 40. .. Then, the signal cable 53 is wired on the side surface on the −Y side of the slider 40, and then bent upward (+ Z direction) of the slider 40. Then, as shown in FIG. 12, the signal cable 53 is pulled out upward (+ Z direction) from the hole 41d1 formed in the slider cover 41d together with the power cable 52. The signal cable 53 drawn from the hole 41d1 of the slider cover 41d is drawn from, for example, a signal cable 53 for a user that supplies a signal for controlling the operation of the moving targets 400 and 500, and an X-axis drive controller. The signal cable 53 and the signal cable 53 are included.

As shown in FIG. 13, the supply cable group 50 configured as described above has the first to fourth bent portions 50-1 to 50-4 including the folded bent shape. , Wired inside the actuator 100.

The first bent portion 50-1 is pulled out from the base 31 and extended in the −X direction (one direction in the linear motion direction D1) and then in the + X direction (the other side opposite to the one in the linear motion direction D1). It is folded back in the direction of) and connected to the slider 40. Further, the first bent portion 50-1 is folded back on the right side (side of the −Y side, one side) of the ball screw shaft 21 when viewed in the + X direction.

The second bent portion 50-2 is pulled out from the base 31, extended in the + X direction (the other direction in the linear motion direction D1), and then folded back in the −X direction (one direction in the linear motion direction D1). Is connected to the slider 40. Further, the second bent portion 50-2 is folded back on the right side (side of the −Y side, one side) of the ball screw shaft 21 when viewed in the + X direction.

The third bent portion 50-3 is pulled out from the base 31 and extended in the −X direction (one direction in the linear motion direction D1) and then in the + X direction (the other side opposite to the one in the linear motion direction D1). It is folded back in the direction of) and connected to the slider 40. Further, the third bent portion 50-3 is folded back on the left side (side of the + Y side and the other side) of the ball screw shaft 21 when viewed in the + X direction. Therefore, the third bent portion 50-3 and the first bent portion 50-1 are folded back on both the left and right sides of the ball screw shaft 21.

The fourth bent portion 50-4 is pulled out from the base 31, extended in the + X direction (the other direction in the linear motion direction D1), and then folded back in the −X direction (one direction in the linear motion direction D1). Is connected to the slider 40. Further, the fourth bent portion 50-4 is folded back on the left side (side of the + Y side and the other side) of the ball screw shaft 21 when viewed in the + X direction. Therefore, the fourth bent portion 50-4 and the second bent portion 50-2 are folded back on both the left and right sides of the ball screw shaft 21.

As shown in FIGS. 10 and 11, the openings (tube openings 31b, cable openings 31c, 31d) from which the supply cable group 50 is pulled out are formed near the center of the linear motion direction D1 of the base 31. Has been done. That is, the opening is formed at a position of L1 × 1/2 from the end on the −X side of the base 31 with respect to the total length L1 in the linear motion direction D1 of the base 31. Specifically, in the actuator 100, the tube opening 31b is formed in the center of the linear motion direction D1 of the base 31. The cable opening 31c is formed slightly closer to −X than the tube opening 31b in the linear motion direction D1. The cable opening 31d is formed slightly closer to + X than the tube opening 31b in the linear motion direction D1.

As described above, in the actuator 100, as shown in FIG. 13, the supply cable group 50 is pulled out from the base 31, extended in one direction in the linear motion direction D1, folded back, and connected to the slider 40. The first and third bent portions 50-1, 50-3 and the second bent portion 50-1, 50-3, which are drawn from the base 31, extend in the other direction of the linear motion direction D1, are folded back, and are connected to the slider 40. , 4th bent portions 50-2, 50-4. Therefore, in the actuator 100, the air tube 51, the power cable 52, or the signal cable 53 constituting the supply cable group 50 are distributed and installed in the bent portions 50-1 to 50-4 in the actuator housing 30. Therefore, even if the number of the air tube 51, the power cable 52, or the signal cable 53 increases, the bent portions 50-1 to 50-4 of the air tube 51, the power cable 52, or the signal cable 53 may come into contact with each other. You can reduce the number of wires in. Further, since the number of air tubes 51, power cables 52, or signal cables 53 installed in the bent portions 50-1 to 50-4 can be reduced, the air tubes 51, power cables 52, or signals can be reduced in the actuator housing 30. The cable 53 can be easily bent. As a result, in the actuator 100, the supply cable group 50 can be efficiently installed in the actuator housing 30.

Further, in the actuator 100, the first bent portion 50-1 and the third bent portion 50-3 of the supply cable group 50 are folded back on both the left and right sides of the ball screw shaft 21 and connected to the slider 40. Further, the second bent portion 50-2 and the fourth bent portion 50-4 of the supply cable group 50 are also folded back on both the left and right sides of the ball screw shaft 21 and connected to the slider 40. As a result, in the actuator 100, even if the number of air tubes 51, power cables 52, or signal cables 53 constituting the supply cable group 50 increases, the supply cable group 50 can be efficiently installed in the actuator housing 30. Can be done.

In the actuator 100, as shown in FIGS. 6, 7 and 10, the air tube 51 and the power cable 52 drawn out from the base 31 are extended in the −X direction and then folded back in the + X direction. It has been. Further, the signal cable 53 drawn out from the base 31 is extended in the + X direction and then folded back in the −X direction. However, it is not limited to this. The folding direction and extending direction of the air tube 51, the power cable 52, and the signal cable 53 are appropriately changed according to the usage status of the actuator 100.

As shown in FIGS. 14 to 17, the bracket B1 is for fixing the actuator 200 as a moving target to be moved by the actuator 100 to the slider table T1. The actuator 200 reciprocates along the linear motion direction D1 together with the slider table T1 by being fixed to the slider table T1 via the bracket B1. A groove B1a is formed in the bracket B1 along the Y-axis direction. The supply cable group 50 is arranged in the groove portion B1a and is covered with the bracket cover B1b.

As shown in FIGS. 14 to 16, the actuator 200 is a table type actuator including a slider table T2 that reciprocates in the linear motion direction D2, similarly to the actuator 100. The actuator 200 is a supply cable including a motor unit 10, a ball screw 20, an actuator housing 30, a slider 40, an air tube 51, a power cable 52, and a signal cable 53 in addition to the slider table T2. The group 50 and the controller C2 are provided. Further, in the present embodiment, the slider table T2 is composed of a slider 40 and a slider cover 41d. In the actuator 200, the same reference numerals are used for the same or equivalent configurations as the actuator 100, and the description thereof will be omitted.

The controller C2 is a Y-axis drive controller, and is fixed to the outer surface of the base 31 on the −Z side. The controller C2 controls the actuator 200, for example, based on the input from the control controller that controls the entire robot 1 shown in FIG. The controller C2 includes, for example, a CPU (Central Processing Unit), a main storage unit, an auxiliary storage unit, and the like. Some power cables 52 out of the plurality of power cables 52 of the supply cable group 50 are connected to the controller C2. Further, some signal cables 53 (signal cables drawn from the X-axis controller) out of the plurality of signal cables 53 are connected to the controller C2. Further, a signal cable 53 and a motor / encoder cable (not shown) are pulled out from the controller C2.

As can be seen with reference to FIG. 15, the motor / encoder cable drawn from the controller C2 is wired inside the base 31 through a hole formed in the base 31 and is drawn into the inside of the rear bracket 35. .. The motor / encoder cable is connected to the motor unit 10 included in the actuator 200 inside the rear bracket 35. The motor / encoder cable supplies a signal for controlling the motor body 11 of the motor unit 10 included in the actuator 200.

By being fixed to the slider 40, the slider cover 41d reciprocates in the linear motion direction D2 together with the slider 40. As shown in FIG. 18, the slider cover 41d is formed with a hole 41d1 penetrating in the Z-axis direction.

The motor unit 10 and the ball screw 20 are equivalent to those of the actuator 100.

The actuator housing 30 covers each component inside the actuator 200 by accommodating the motor unit 10, the ball screw 20, and the slider 40. The actuator housing 30 further includes a base 31, a pair of side covers 32R, 32L (see FIG. 5), a seat member 33, a front bracket 34, a rear bracket 35, and an edge cover 36.

As shown in FIGS. 15, 16 and 18, the edge cover 36 is attached to the base 31 so as to cover the outer surface of the base 31 on the −Z side. A supply cable group 50 is wired inside the edge cover 36. Further, the edge cover 36 covers and protects the controller C2 fixed to the outer surface on the −Z side of the base 31.

The slider 40 is equivalent to that of the actuator 100.

The supply cable group 50 is drawn into the actuator 200 from the edge cover 36. Specifically, a communication hole (not shown) is formed on the lower surface of the base 31 to communicate the space on the lower surface side of the base 31 and the inside of the hole 31a in the Z-axis direction. The supply cable group 50 is drawn into the inside of the hole 31a from the inside of the edge cover 36 (the lower surface of the base 31) via the communication hole. The supply cable group 50 drawn into the hole 31a is formed from a plurality of openings (tube opening 31b, cable opening 31c, 31d) communicating the inside of the hole 31a with the inside of the actuator 200. It is pulled out in the + X direction and the −X direction and is drawn into the inside of the actuator 200. The supply cable group 50 wired inside the actuator 200 includes a plurality of air tubes 51, a plurality of power cables 52, and a plurality of signal cables 53. In the actuator 200, the supply cable group 50 is laid in the edge cover 36 in the Y-axis direction, but the supply cable group 50 is inside the edge cover 36 near the end on the + Y-axis direction side of the base 31. A hole that communicates with the hole 31a may be provided and inserted, and may be laid in the hole 31a in the Y-axis direction in the same manner as the actuator 100.

As shown in FIG. 19, the air tube 51 of the supply cable group 50 is drawn out from the tube opening 31b via the manifold 61. The air tube 51 drawn out from the tube opening 31b extends in the −Y direction (one direction in the linear motion direction D2). The air tube 51 extending in the −Y direction is extended while being crawled on the bottom surface of the base 31. Further, in the present embodiment, two tube openings 31b are provided. Then, three air tubes 51 are pulled out from each of the two tube openings 31b. Although two air tubes 51 are installed inside the edge cover 36, a set of three air tubes 51 is pulled out from the two tube openings 31b by passing through the manifold 61. It is converted into a pair of air tubes 51 that have become. The air flow rate of the two air tubes 51 and the air flow rate of the pair of air tubes 51 in a set of three are the same.

Further, the power cable 52 in the supply cable group 50 is drawn out from the cable opening 31c. The power cable 52 drawn out from the cable opening 31c extends in the −Y direction (one direction in the linear motion direction D2). The power cable 52 extending in the −Y direction is extended while being laid on the bottom surface of the base 31. In the present embodiment, the power cable 52 drawn out from the cable opening 31c is not fixed to the base 31 with a fixing bracket or the like. However, the present invention is not limited to this, and the power cable 52 drawn out from the cable opening 31c may be fixed to the base 31 with a fixing bracket or the like. Further, in the present embodiment, two cable openings 31c are provided. Two power cables 52 are pulled out from each of the two cable openings 31c.

Further, the signal cable 53 in the supply cable group 50 is drawn out from the cable opening 31d. The signal cable 53 pulled out from the cable opening 31d is fixed to the bottom surface of the base 31 via a fixing bracket 62 attached to the bottom surface of the base 31 by a binding band 63. Further, the signal cable 53 extends in the + Y direction (the other direction opposite to one in the linear motion direction D2). The signal cable 53 extending in the + Y direction is extended while being laid on the bottom surface of the base 31. Further, in the present embodiment, two cable openings 31d are provided. Then, three signal cables 53 are pulled out from each of the two cable openings 31d.

As shown in FIGS. 15 and 16, the air tube 51 and the power cable 52 drawn out from the base 31 are extended in the −Y direction and then folded back in the + Y direction. The air tube 51 and the power cable 52 are connected to the slider 40.

Specifically, the air tube 51 folded back in the + Y direction is connected to the manifold 47 of the slider 40 as shown in FIG. As a result, the air supplied from the air tube 51 is supplied to the air tube 51 of the supply cable group 50 of the actuator 300 via the air flow path 41a (see FIG. 15).

Further, as shown in FIG. 20, the power cable 52 folded back in the + Y direction is fixed to the air tube 51 by a binding band (not shown) in the vicinity of the front end surface on the −Y side of the slider 40. Then, the power cable 52 is wired on the side surface of the slider 40 on the + X side, and then bent upward (in the + Z direction) of the slider 40. Then, as shown in FIG. 18, the power cable 52 is pulled out upward (+ Z direction) from the hole 41d1 formed in the slider cover 41d.

Further, as shown in FIG. 20, the signal cable 53 drawn out from the base 31 is extended in the + Y direction and then folded back in the −Y direction. The signal cable 53 is connected to the slider 40.

Specifically, the signal cable 53 folded back in the −Y direction is fixed to the slider 40 by the cable fixing bracket 46 in the vicinity of the rear end surface on the + Y side of the slider 40. Then, the signal cable 53 is wired on the side surface of the slider 40 on the + X side, and then bent upward (in the + Z direction) of the slider 40. Then, as shown in FIG. 18, the signal cable 53 is pulled out upward (+ Z direction) from the hole 41d1 formed in the slider cover 41d together with the power cable 52. The signal cable 53 drawn out from the hole 41d1 of the slider cover 41d is, for example, a signal cable 53 for a user for controlling the operation of the moving targets 400 and 500, and a signal cable drawn out from the Y-axis drive controller. 53 and is included.

As shown in FIG. 20, the supply cable group 50 configured as described above has the first to fourth bent portions 50-1 to 50-4 including the folded bent shape. , Wired inside the actuator 200.

The first bent portion 50-1 is pulled out from the base 31 and extended in the −Y direction (one direction in the linear motion direction D2) and then in the + Y direction (the other side opposite to the one in the linear motion direction D2). It is folded back in the direction of) and connected to the slider 40. Further, the first bent portion 50-1 is folded back on the right side (side of the + X side, one side) of the ball screw shaft 21 when viewed in the + Y direction.

The second bent portion 50-2 is pulled out from the base 31, extended in the + Y direction (the other direction in the linear motion direction D2), and then folded back in the −Y direction (one direction in the linear motion direction D2). Is connected to the slider 40. Further, the second bent portion 50-2 is folded back on the right side (side of the + X side, one side) of the ball screw shaft 21 when viewed in the + Y direction.

The third bent portion 50-3 is pulled out from the base 31, extended in the −Y direction (one direction in the linear motion direction D2), and then folded back in the + Y direction (the other direction in the linear motion direction D2). Is connected to the slider 40. Further, the third bent portion 50-3 is folded back on the left side (side of the −X side, the other side) of the ball screw shaft 21 when viewed in the + Y direction. Therefore, the third bent portion 50-3 and the first bent portion 50-1 are folded back on both the left and right sides of the ball screw shaft 21.

The fourth bent portion 50-4 is pulled out from the base 31, extended in the + Y direction (the other direction in the linear motion direction D2), and then folded back in the −Y direction (one direction in the linear motion direction D2). Is connected to the slider 40. Further, the fourth bent portion 50-4 is folded back on the left side (side of the −X side, the other side) of the ball screw shaft 21 when viewed in the + Y direction. Therefore, the fourth bent portion 50-4 and the second bent portion 50-2 are folded back on both the left and right sides of the ball screw shaft 21.

As shown in FIGS. 16 and 19, the openings (tube openings 31b, cable openings 31c, 31d) from which the supply cable group 50 is pulled out are formed near the center of the linear motion direction D2 of the base 31. Has been done. That is, the opening is formed at a position of L2 × 1/2 from the end on the −Y side of the base 31 with respect to the total length L2 in the linear motion direction D2 of the base 31. Specifically, in the actuator 200, the tube opening 31b is formed in the center of the linear motion direction D2 of the base 31. The cable opening 31c is formed slightly closer to −Y than the tube opening 31b in the linear motion direction D2. The cable opening 31d is formed slightly closer to + Y than the tube opening 31b in the linear motion direction D2.

As described above, in the actuator 200, as shown in FIG. 20, the supply cable group 50 is pulled out from the base 31, extended in one direction in the linear motion direction D2, folded back, and connected to the slider 40. A second bent portion 50-1, 50-3, which is pulled out from the base 31, extends in the other direction of the linear motion direction D2, is folded back, and is connected to the slider 40. , 4th bent portions 50-2, 50-4. Therefore, in the actuator 200, the air tube 51, the power cable 52, or the signal cable 53 constituting the supply cable group 50 are distributed and installed in the bent portions 50-1 to 50-4 in the actuator housing 30. Therefore, even if the number of the air tube 51, the power cable 52, or the signal cable 53 increases, the bent portions 50-1 to 50-4 of the air tube 51, the power cable 52, or the signal cable 53 may come into contact with each other. You can reduce the number of wires in. Further, since the number of air tubes 51, power cables 52, or signal cables 53 installed in the bent portions 50-1 to 50-4 can be reduced, the air tubes 51, power cables 52, or signals can be reduced in the actuator housing 30. The cable 53 can be easily bent. As a result, in the actuator 100, the supply cable group 50 can be efficiently installed in the actuator housing 30.

Further, in the actuator 200, the first bent portion 50-1 and the third bent portion 50-3 of the supply cable group 50 are folded back on both the left and right sides of the ball screw shaft 21 and connected to the slider 40. Further, the second bent portion 50-2 and the fourth bent portion 50-4 of the supply cable group 50 are also folded back on both the left and right sides of the ball screw shaft 21 and connected to the slider 40. As a result, in the actuator 200, even if the number of air tubes 51, power cables 52, or signal cables 53 constituting the supply cable group 50 increases, the supply cable group 50 can be efficiently installed in the actuator housing 30. Can be done.

In the actuator 200, as shown in FIGS. 15 and 16, the air tube 51 and the power cable 52 drawn out from the base 31 are extended in the −Y direction and then folded back in the + Y direction. .. Further, the signal cable 53 drawn out from the base 31 is extended in the + Y direction and then folded back in the −Y direction. However, it is not limited to this. The folding direction and extending direction of the air tube 51, the power cable 52, and the signal cable 53 are appropriately changed according to the usage status of the actuator 200.

As shown in FIG. 1, the bracket B2 is for fixing the actuator 300 as a moving target to be moved by the actuator 200 to the slider table T2. The actuator 300 reciprocates along the linear motion direction D2 together with the slider table T2 by being fixed to the slider table T2 via the bracket B2.

As shown in FIG. 21, the actuator 300 is a rod type actuator including a rod R1 that reciprocates in the linear motion direction D3, unlike the actuators 100 and 200. As shown in FIGS. 22 and 23, the actuator 300 includes auxiliary rods R2, R3, a controller C3, a belt 70, a steady rest member 80, a motor unit 10, a ball screw 20, and a ball screw 20 in addition to the rod R1. It includes an actuator housing 30, a slider 40, and a supply cable group 50 including an air tube 51, a signal cable 53, and a motor / encoder cable 54. In the actuator 300, the same reference numerals are used for the same or equivalent configurations as the actuators 100 and 200, and the description thereof will be omitted.

The rod R1 is a cylindrical member whose longitudinal direction is the Z-axis direction. The rod R1 reciprocates in both the + Z direction and the −Z direction by being fixed to the main body 41 of the slider 40. The rod R1 is made of, for example, aluminum. However, the material of the rod R1 is arbitrary and may be other than aluminum. For example, it may be stainless steel. The rod R1 is formed with a hole in which the tip portion 21a of the ball screw shaft 21 is inserted along the Z-axis direction. A steady rest member 80 is attached to the tip portion 21a.

As shown in FIGS. 22, 24, and 25, the auxiliary rods R2 and R3 are supported by a rod bracket 90 fixed to the main body 41 of the slider 40. As a result, the auxiliary rods R2 and R3 are arranged so that their cylindrical axial directions are parallel to the cylindrical axial direction of the rod R1. The auxiliary rods R2 and R3 are formed in the shape of a pipe having a through hole. The auxiliary rods R2 and R3 are provided to support the rod R1 to increase the rigidity and to suppress the runout of the tip of the rod R1. Further, the supply cable group 50 is inserted and wired in the through holes of the auxiliary rods R2 and R3. The tip of the auxiliary rods R2 and R3 on the −Z side is connected to the tip of the rod R1 on the −Z side by a rod connecting member 91. In this embodiment, two auxiliary rods R2 and R3 are provided. However, it is not limited to this. Only one auxiliary rod R2 and R3 may be provided, or three or more auxiliary rods R2 and R3 may be provided.

The belt 70 is attached to the output shaft 12 of the motor unit 10 and the base end portion 21b of the ball screw 20 in a tensioned state. As a result, the rotational movement of the output shaft 12 is transmitted to the base end portion 21b of the ball screw 20. The belt 70 is, for example, a timing belt in which a plurality of teeth engaging with the teeth formed in the pulley attached to the output shaft 12 and the proximal end portion 21b are formed.

The steady rest member 80 is a member for suppressing the runout of the tip portion 21a of the ball screw shaft 21. The steady rest member 80 is rotatably fitted in the tip portion 21a of the ball screw shaft 21. The steady rest member 80 is composed of, for example, an annular main body portion and an O-ring fitted to the main body portion. In the present embodiment, the steady rest member 80 is composed of a main body portion and an O-ring. However, it is not limited to this. Any structure and shape may be used as long as the structure and shape can suppress the swing of the tip portion 21a of the ball screw shaft 21. For example, the steady rest member 80 may be composed of a single member made of an elastic material such as resin.

The controller C3 includes a Z-axis drive controller that controls the actuator 300, a wrist unit for controlling the movement targets 400 and 500, and a control controller for the gripper. The controller C3 controls the actuator 300 and the moving targets 400 and 500 based on the input from the control controller that controls the entire robot 1 shown in FIG. 1, for example. The controller C3 includes, for example, a CPU (Central Processing Unit), a main storage unit, an auxiliary storage unit, and the like. A plurality of power cables 52 of the supply cable group 50 are connected to the controller C3. Further, some signal cables 53 (signal cables drawn from the Y-axis drive controller (controller C2)) among the plurality of signal cables 53 are connected to the Z-axis drive controller of the controller C3. Ru. Further, a signal cable (not shown) is pulled out from the Z-axis drive controller and connected to the control controller. In the controller C3, for example, the Z-axis drive controller is fixed to the outer surface of the base 31 on the −X side and is arranged inside the edge cover 36. Further, the wrist unit and the control controller for the gripper are arranged inside the bracket B2. The number of control controllers arranged inside the bracket B2 corresponds to the total number of motors of the moving targets 400 and 500. For example, when the number of motors of the moving targets 400 and 500 is three in total, three control controllers arranged inside the bracket B2 are provided. The power cable 52 of the supply cable group 50 is connected to the controller C3. Further, some signal cables 53 out of a plurality of signal cables 53 are connected to the controller C3. Further, the motor / encoder cable 54 is pulled out from the control controller in the controller C3. Further, a motor / encoder cable (not shown) different from the motor / encoder cable 54 is pulled out from the Z-axis drive controller of the controller C3 and connected to the motor unit 10.

The motor unit 10 and the ball screw 20 are equivalent to those of the actuator 100.

The actuator housing 30 covers each component inside the actuator 100 by accommodating the motor unit 10, the ball screw 20, and the slider 40. The actuator housing 30 further includes a base 31, a front bracket 34, a rear bracket 35, an edge cover 36, a main cover 37, and a balancer (a urging portion, not shown). The actuator housing 30 of the actuator 300 does not have the side covers 32R and 32L and the seat member 33, unlike those of the actuators 100 and 200.

The edge cover 36 is attached to the base 31 so as to cover the outer surface of the lower side (-X side) of the base 31. A supply cable group 50 is wired inside the edge cover 36.

The main cover 37 is a member that covers the upper part of the slider 40 and is attached to the base 31. The main cover 37 is formed, for example, by extrusion molding aluminum.

The balancer urges the ball screw shaft 21 of the ball screw 20 in a predetermined rotation direction. This balancer is arranged inside the rear bracket 35. The balancer has a royal fern mechanism and a speed-increasing portion.

In the Zenmai mechanism, the output shaft 12 of the motor unit 10 stores energy by rotating the ball screw shaft 21 in a rotation direction opposite to a predetermined rotation direction, and rotates the ball screw shaft 21 in a predetermined rotation direction. This releases the accumulated energy. As a result, when the slider 40 is moved upward to lift the rods R1, auxiliary rods R2, and R3, the motor unit 10 receives the urging force of the royal fern mechanism that attempts to move the slider 40 upward. As a result, the output of the motor unit 10 when the slider 40 is moved upward can be suppressed. Further, when energy is stored in the royal fern mechanism, the slider 40 may be moved downward in the direction of gravity action, so that the slider 40 can be moved while utilizing the acting gravity.

The speed-increasing portion connects the base end portion 21b of the ball screw shaft 21 and the balancer's royal fern mechanism. The speed increasing portion assists the rotational movement of the output shaft 12 via the ball screw shaft 21.

The slider 40 is supported by the base 31 so as to be linearly movable in the Z-axis direction via a rolling element for linear guide. As shown in FIGS. 25 and 26, the slider 40 is for fixing the main body 41, the return members 42a and 42b, the wiring / piping receiving roller 45, the air tube 51 of the supply cable group 50, and the signal cable 53. It has a cable fixing bracket 48, a cable fixing bracket 49 for fixing the motor / encoder cable 54, and a rod bracket 90.

The main body 41 is made of a highly rigid material, for example, metal. A through hole 41c penetrating in the Z-axis direction is formed in the main body 41. A rod R1 is attached to the through hole 41c from the −Z side. For example, a female threaded portion is formed in the through hole 41c, and a male threaded portion into which the female threaded portion is screwed is formed at an end portion of the rod R1 on the + Z side. The rod R1 is attached to and fixed to the through hole 41c by screwing the female threaded portion and the male threaded portion.

The rod bracket 90 is fixed to the main body 41. The rod bracket 90 is formed with through holes 90a and 90b penetrating in the Z-axis direction. Auxiliary rods R2 and R3 are attached to the through holes 90a and 90b. For example, female threaded portions are formed in the through holes 90a and 90b, and male threaded portions into which the female threaded portions are screwed are formed at the + Z side ends of the auxiliary rods R2 and R3. The auxiliary rods R2 and R3 are attached to and fixed to the through holes 90a and 90b by screwing the female threaded portion and the male threaded portion.

As shown in FIG. 23, the supply cable group 50 is drawn into the actuator 300 from the edge cover 36. The supply cable group 50 arranged inside the actuator 300 includes an air tube 51, a signal cable 53, and a motor / encoder cable 54. The signal cable 53 also includes a signal line used by the user of the robot 1 in the movement targets 400 and 500. This signal line is used, for example, to supply a signal to a sensor that detects the presence or absence of a work to be pinched by the moving target 500, which is a gripper.
In the actuator 300, the supply cable group 50 is laid in the edge cover 36 in the Z-axis direction, but the supply cable group 50 is inside the edge cover 36 near the end on the −Z-axis direction side of the base 31. A hole for communicating the hole 31a with the hole 31a of the base 31 is provided and inserted, and the hole 31a is laid in the hole 31a in the Z-axis direction in the same manner as the actuator 100. It may be drawn out from the tube opening 31b and the cable opening 31d, 31e) into the actuator 300.
Further, like the actuator 200, the supply cable group 50 is connected from the edge cover 36 to the inside of the hole 31a via a communication hole that communicates the space on the lower surface side of the base 31 and the inside of the hole 31a in the X-axis direction. It is drawn in and pulled out in the + Y direction and the −Y direction from a plurality of openings (for example, tube opening 31b, cable opening 31d, 31e) communicating the inside of the hole 31a and the inside of the actuator 300. It may be drawn into the actuator 300.

The motor / encoder cable 54 is a cable that supplies a signal for controlling a motor included in the moving targets 400 and 500.

As shown in FIG. 27, the air tube 51 of the supply cable group 50 is drawn out from the tube opening 31b via the air joint 65. The air tube 51 drawn out from the tube opening 31b extends in the −Z direction (one direction in the linear motion direction D3). The air tube 51 extending in the −Z direction is extended while being crawled on the bottom surface of the base 31.

Further, the signal cable 53 in the supply cable group 50 is drawn out from the cable opening 31d. The signal cable 53 pulled out from the cable opening 31d is fixed to the bottom surface of the base 31 by the fixing bracket 62 attached to the bottom surface of the base 31. Further, the signal cable 53 extends in the −Z direction. The signal cable 53 extending in the −Z direction is extended while being laid on the bottom surface of the base 31.

Further, the motor / encoder cable 54 in the supply cable group 50 is drawn out from the cable opening 31e. The signal cable 53 pulled out from the cable opening 31e is fixed to the bottom surface of the base 31 by the fixing bracket 64 attached to the bottom surface of the base 31. Further, the motor / encoder cable 54 extends in the + Z direction (the other direction opposite to one in the linear motion direction D3). The motor / encoder cable 54 extending in the −Z direction is extended while being laid on the bottom surface of the base 31.

As shown in FIG. 26, the air tube 51 and the signal cable 53 drawn out from the base 31 are extended in the −Z direction and then folded back in the + Z direction. The air tube 51 and the signal cable 53 are connected to the slider 40.

Specifically, the air tube 51 and the signal cable 53 folded back in the + Z direction are fixed to the slider 40 by the cable fixing bracket 48. The air tube 51 and the signal cable 53 are wired above the main body 41 of the slider 40 and inserted into the through hole 90a of the rod bracket 90.

Further, the motor / encoder cable 54 drawn out from the base 31 is extended in the + Z direction and then folded back in the −Z direction. The motor / encoder cable 54 is connected to the slider 40.

Specifically, the motor / encoder cable 54 folded back in the −Z direction is fixed to the slider 40 by the cable fixing bracket 49. The motor / encoder cable 54 is wired above the main body 41 of the slider 40 and is inserted into the through hole 90b of the rod bracket 90.

As shown in FIGS. 23 and 28, the air tube 51 and the signal cable 53 inserted through the through hole 90a of the rod bracket 90 are inserted into the auxiliary rod R2 and the motor / encoder cable inserted into the through hole 90b. 54 is inserted through the auxiliary rod R3. The air tube 51, the signal cable 53, and the motor / encoder cable 54 are pulled out from the openings on the −Z side of the auxiliary rods R2 and R3. In FIG. 23, the air tube 51 and the signal cable 53 are inserted through the auxiliary rod R2, and the motor / encoder cable 54 is inserted through the auxiliary rod R3. However, this is an example, and the cables and tubes inserted through the auxiliary rods R2 and R3 are appropriately modified and used. Further, all of the air tube 51, the signal cable 53, and the motor / encoder cable 54 do not necessarily have to be inserted into the auxiliary rods R2 and R3. For example, a part of these cables and tubes may be pulled out from the actuator housing 30 without being inserted into the auxiliary rods R2 and R3.

As shown in FIG. 26, the supply cable group 50 configured as described above has the first to fourth bent portions 50-1 to 50-4 including the folded bent shape. , Wired inside the actuator 300.

The first bent portion 50-1 is pulled out from the base 31 and extended in the −Z direction (one direction in the linear motion direction D3) and then in the + Z direction (the other side opposite to the one in the linear motion direction D3). It is folded back in the direction of) and connected to the slider 40. Further, the first bent portion 50-1 is folded back on the left side (side of the −Y side, one side) of the ball screw shaft 21 when viewed in the + Z direction.

The second bent portion 50-2 is pulled out from the base 31, extended in the + Z direction (the other direction in the linear motion direction D3), and then folded back in the −Z direction (one direction in the linear motion direction D3). Is connected to the slider 40. Further, the second bent portion 50-2 is folded back on the left side (side of the −Y side, one side) of the ball screw shaft 21 when viewed in the + Z direction.

The third bent portion 50-3 is pulled out from the base 31, extended in the −Z direction (one direction in the linear motion direction D3), and then folded back in the + Z direction (the other direction in the linear motion direction D3). Is connected to the slider 40. Further, the third bent portion 50-3 is folded back on the right side (side of the + Y side and the other side) of the ball screw shaft 21 when viewed in the + Z direction. Therefore, the third bent portion 50-3 and the first bent portion 50-1 are folded back on both the left and right sides of the ball screw shaft 21.

The fourth bent portion 50-4 is pulled out from the base 31, extended in the + Z direction (the other direction in the linear motion direction D3), and then folded back in the −Z direction (one direction in the linear motion direction D3). Is connected to the slider 40. Further, the fourth bent portion 50-4 is folded back on the right side (side of the + Y side and the other side) of the ball screw shaft 21 when viewed in the + Z direction. Therefore, the fourth bent portion 50-4 and the second bent portion 50-2 are folded back on both the left and right sides of the ball screw shaft 21.

As shown in FIG. 23, the openings (tube openings 31b, cable openings 31c, 31e) from which the supply cable group 50 is pulled out are formed near the center of the linear motion direction D3 of the base 31. .. Specifically, the opening is formed at a position of L3 × 1/2 from the + Z side end of the base 31 with respect to the total length L3 in the linear motion direction D3 of the base 31.

As described above, in the actuator 300, as shown in FIGS. 24 and 25, the supply cable group 50 is pulled out from the base 31, extended in one direction in the linear motion direction D3, and then folded back to form the slider 40. The first and third bent portions 50-1, 50-3 connected to the base 31, are drawn from the base 31, extended in the other direction of the linear motion direction D3, then folded back and connected to the slider 40. It has second and fourth bent portions 50-2 and 50-4. Therefore, in the actuator 300, the air tube 51, the signal cable 53, or the motor / encoder cable 54 constituting the supply cable group 50 are distributed and installed in the bent portions 50-1 to 50-4 in the actuator housing 30. Therefore, even if the number of the air tube 51, the signal cable 53, or the motor / encoder cable 54 increases, each bent portion 50 of the air tube 51, the signal cable 53, or the motor / encoder cable 54 may come into contact with the air tube 51, the signal cable 53, or the motor / encoder cable 54. The number of -1 to 50-4 can be reduced. Further, since the number of air tubes 51, signal cables 53, or motor / encoder cables 54 installed in the bent portions 50-1 to 50-4 can be reduced, the air tubes 51, signal cables 53, and so on in the actuator housing 30. Alternatively, the motor / actuator cable 54 can be easily bent. As a result, in the actuator 100, the supply cable group 50 can be efficiently installed in the actuator housing 30.

Further, in the actuator 300, the first bent portion 50-1 and the third bent portion 50-3 of the supply cable group 50 are folded back on both the left and right sides of the ball screw shaft 21 and connected to the slider 40. Further, the second bent portion 50-2 and the fourth bent portion 50-4 of the supply cable group 50 are also folded back on both the left and right sides of the ball screw shaft 21 and connected to the slider 40. In the actuator 300, even if the number of air tubes 51, power cables 52, or signal cables 53 constituting the supply cable group 50 increases, the supply cable group 50 can be efficiently installed in the actuator housing 30.

In the actuator 300, as shown in FIG. 23, the air tube 51 and the signal cable 53 drawn out from the base 31 are extended in the + Z direction and then folded back in the −Z direction. Further, the motor / encoder cable 54 drawn out from the base 31 is extended in the −Z direction and then folded back in the + Z direction. However, it is not limited to this. The folding direction and extending direction of the air tube 51, the power cable 52, and the signal cable 53 are appropriately changed according to the usage status of the actuator 300.

Further, the robot 1 according to the present embodiment is a three-axis type in which the supply cable group 50 is wired in the order of the actuator 100, the actuator 200, and the actuator 300. Then, the supply cable group 50 of each of the actuators 100, 200, and 300 is pulled out from the base 31, extended in one direction in the linear motion directions D1, D2, and D3, then folded back, and connected to the slider 40. The first and third bent portions 50-1, 50-3 and the base 31, are extended in the other direction of the linear motion directions D1, D2, and D3, then folded back and connected to the slider 40. It has the second and fourth bent portions 50-2 and 50-4 to be formed. Therefore, although the robot 1 according to the present embodiment is a three-axis type, even if the number of cables or tubes constituting the supply cable group 50 increases, the actuator 1 does not increase in size as a whole. The supply cable group 50 can be efficiently installed in each of the actuator housings 30 of 100, 200, and 300.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments and the like.

For example, in the embodiment of the present invention, the robot 1 includes three actuators 100, 200, and 300. However, it is not limited to this. The robot 1 may include two or four or more actuators 100, 200, 300.

Further, in the actuators 100, 200 and 300, the motor unit 10 is mounted inside the actuator housing 30. However, it is not limited to this. The actuators 100, 200, and 300 may be configured so that the motor can be attached and detached. In this case, the user may connect the output shaft of the attached motor and the ball screw by using a known transmission means.

The present invention allows for various embodiments and modifications without departing from the broad spirit and scope of the invention. The embodiments described above are for the purpose of explaining the present invention and do not limit the scope of the present invention.

1: Robot 10: Motor unit 11: Motor body 12: Output shaft 13: Coupling 20: Ball screw 21: Ball screw shaft 21a: Tip part 21b: Base end part 22: Ball screw nut 23: Tip support part 24: Base End support 25: Coupling 30: Actuator housing 31: Base 31a: Hole 31b: Tube opening 31c: Cable opening 31d: Cable opening 31e: Cable opening 32R, 32L: Side cover 33: Seat Member 34: Front bracket 35: Rear bracket 36: Edge cover 40: Slider 41: Main body 41a: Air flow path 41b: Seat member placement surface 41c: Through hole 41d: Slider cover 41d1: Hole 41R, 41L: Work mounting part 42a , 42b: Return member 43a, 43b: Seat guide member 44: Air joint 45: Wiring pipe receiving roller 46, 48, 49: Cable fixing bracket 47: Manifold 50: Supply cable group 50-1: First bent part 50-2 : 2nd bent part 50-3: 3rd bent part 50-4: 4th bent part 51: Air tube 52: Power cable 53: Signal cable 61: Manifold 62, 64: Fixing bracket 63: Bundling band 65: Air joint 70: Belt 80: Anti-sway member 90: Rod bracket 90a, 90b: Through hole 91: Rod connecting member 100, 200, 300: Actuator 400, 500: Movement target 501: Claws B1, B2: Brackets D1, D2, D3: Linear motion direction T1, T2: Slider table R1: Rod R2, R3: Auxiliary rod L1, L2, L3: Total length (of base) Rotation direction: R, B, T
Pinching direction: G

Claims (5)

A ball screw having a ball screw shaft that rotates with the rotational movement of the rotary shaft of the motor,
A slider that linearly moves with the rotational movement of the ball screw shaft,
An actuator housing having a base that linearly supports the slider and covering at least a portion of the ball screw and the slider.
With a supply cable group that is directly or indirectly supported by the slider and supplies power, a signal, or air to a moving object that moves with the slider, and at least a part thereof is arranged inside the base. ,
Equipped with
The supply cable group is
A first bent portion that is pulled out of the base, extended in one direction in the direction of linear motion, then folded back and connected to the slider.
A second bent portion that is pulled out of the base, extended in the other direction opposite to one in the linear motion direction, then folded back and connected to the slider.
Has an actuator. The first bent portion and the second bent portion are folded back on one side of the ball screw shaft.
The supply cable group is
A third bent portion that is pulled out of the base, extended in one direction, then folded back on the other side of the ball screw shaft and connected to the slider.
A fourth bent portion drawn from the base, extended in the other direction, then folded back on the other side of the ball screw shaft and connected to the slider.
The actuator according to claim 1. The actuator according to claim 1 or 2, wherein the supply cable group is pulled out from the center in the linear motion direction at the base. An opening through which the supply cable group is inserted is formed in the base.
The actuator according to claim 3, wherein the opening is provided in the center of the base in the direction of linear motion. A robot comprising a plurality of actuators according to any one of claims 1 to 4.

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