JP2022102093A - Fluid driving type actuator, manufacturing method of the same, and actuator system - Google Patents

Abstract

To provide a fluid driving type actuator which enables strain sensing and is excellent in durability against deformation.SOLUTION: A fluid driving type actuator of the invention includes: a tube member 10 which deforms when a fluid flows thereinto; and an elastic conductive layer 39 laminated on a part of or an entire part of at least one of an inner surface and an outer surface of the tube member 10. The fluid driving type actuator measures change of electric characteristics through the elastic conductive layer 30 to detect a deformation state of the tube member 10.SELECTED DRAWING: Figure 1

Description

The present invention relates to a fluid driven actuator, a method for manufacturing the same, and an actuator system.

Various developments have been made on actuator sensing technology. As this kind of technique, for example, the technique described in Patent Document 1 is known. Patent Document 1 describes a tubular elastic body composed of a first elastic sheet and a second elastic sheet having electrical conductivity, and two electrodes attached to the outer surface of the first elastic sheet. A fluid-driven actuator is described (Patent Document 1, paragraph 0080, FIG. 6, etc.).

JP-A-2015-180829

However, as a result of the study by the present inventor, it has been found that the fluid-driven actuator described in Patent Document 1 has room for improvement in terms of deformation durability.

As a further study, the present inventor has found that, in a fluid-driven actuator, by forming an elastic conductive layer on the surface of a tube member, it is possible to sense the deformation state of the tube member through the elastic conductive layer. We have found that the deformation durability when repeatedly deformed can be improved, and have completed the present invention.

According to the present invention
A tube member that deforms when a fluid flows in,
A stretchable conductive layer laminated on a part or the whole of at least one of the inner surface and the outer surface of the tube member is provided.
By measuring the change in electrical characteristics via the elastic conductive layer, the deformed state of the tube member can be detected.
A fluid driven actuator is provided.

Further, according to the present invention.
With the above fluid-driven actuator,
A measuring unit that measures changes in electrical characteristics,
Fluid pressure control that detects the deformed state of the tube member based on the measured change in the electrical characteristics and adjusts the pressure of the fluid flowing into the tube member according to the deformed state of the tube member. With a department,
An actuator system is provided.

Further, according to the present invention.
A method for manufacturing a fluid-driven actuator, comprising: a tube member that deforms when a fluid flows in, and an elastic conductive layer laminated on the surface of the tube member.
The process of forming the tube member using an insulating elastomer, and
Manufacture of a fluid-driven actuator comprising a step of forming the stretchable conductive layer using a conductive paste on a part or the whole of at least one of the inner surface and the outer surface of the tube member. The method is provided.

INDUSTRIAL APPLICABILITY According to the present invention, a fluid-driven actuator capable of strain sensing and excellent in deformation durability, a manufacturing method thereof, and an actuator system are provided.

It is a figure which shows an example of the structure of the fluid drive type actuator of this embodiment. (A) is a sectional view taken along the line AA of FIG. 1, (b) is a sectional view taken along the line BB of FIG. 1, and (c) is a section taken along the line CC of FIG. It is a figure which shows the modification of the structure of the fluid drive type actuator of this embodiment. It is a figure which shows the relationship between the applied pressure and the outer peripheral change rate of a tube in the expansion test of Examples 1 and 2. It is a figure which shows the relationship between the applied pressure and the resistance value of a stretchable conductive layer in the expansion test of Examples 1 and 2.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all drawings, similar components are designated by the same reference numerals, and description thereof will be omitted as appropriate. Further, the figure is a schematic view and does not match the actual dimensional ratio.

The fluid-driven actuator of this embodiment will be outlined.

The fluid-driven actuator of the present embodiment has a tube member that deforms when a fluid flows in, and elastic conductivity laminated on a part or the whole of at least one of the inner surface and the outer surface of the tube member. A layer is provided, and the deformation state of the tube member can be detected by measuring the change in electrical characteristics via the elastic conductive layer.

A fluid-driven actuator is a drive device that expands or contracts a tube member using a fluid such as gas or liquid and converts it into mechanical motion. Specific examples of the fluid include gas such as air and nitrogen, and liquid such as water and oil.

Fluid-driven actuators can be used for various purposes, such as artificial muscles used in daily life such as nursing care, welfare, medical care, daily life, and sports, and work in agriculture, manufacturing, and construction. It can be used as a drive device for artificial muscles that support on-site work, artificial muscles for robots, and indirect structures.

According to this embodiment, it is possible to realize a fluid-driven actuator that can perform strain sensing and has excellent deformation durability.

Each configuration of the fluid-driven actuator of the present embodiment will be described in detail.

1 and 2 show an example of the configuration of a fluid-driven actuator (actuator 100).
The actuator 100 of FIG. 1 includes at least a tube member 10 and an elastic conductive layer 30.

The tube member 10 is composed of a tubular elastic body that expands and contracts due to the pressure of a fluid.
The tube member 10 is capable of stretching and contracting in the axial direction and / or expanding or flexing in at least one radial direction.

The actuator 100 may have a cap 20 on at least one of the ends of the tube member 10.
The cap 20 is composed of a lid member provided at the axial end of the tube member 10. The cap 20 may have the hole 22 shown in FIG. 2 (b). A fluid can be injected or discharged into the space 12 of the tube member 10 through the hole 22. When the fluid is injected into the space 12, the tube member 10 expands in the radial direction and contracts in the axial direction (FIGS. 2 (b) and 2 (c)). That is, the actuator 100 generates a contraction force in the axial direction and an expansion force in the radial direction of the tube member 10.

The stretchable conductive layer 30 functions as a stretchable sensor unit that detects deformation such as stretching and bending of the tube member 10.

The stretchable conductive layer 30 is laminated on a part or the whole of at least one of the inner surface and the outer surface of the tube member 10.

In the actuator 100, the state in which the tube member 10 and the elastic conductive layer 30 are laminated is a state in which the surfaces are in surface contact with each other and are chemically and / or physically bonded and in close contact with each other. May be good. Therefore, it is possible to suppress the possibility of damage such as peeling of the stretchable conductive layer 30 from the surface of the tube member 10 even during stretching or repeated stretching. As a result, the actuator 100 having excellent deformation durability can be realized.

Such an elastic conductive layer 30 is configured to cover a small part of the surface of the tube member 10 in an expanded and / or contracted state. Covering means covering at least a part or the entire surface of the surface.

The elastic conductive layer 30 is subsequently deformed according to the deformation of the tube member 10, and the electrical characteristics fluctuate. By measuring this change in electrical characteristics, it is possible to detect the deformed state of the tube member 10. That is, the stretchable conductive layer 30 functions as a strain sensor of the tube member 10 utilizing the pressure resistance effect.

Here, an example of measuring the change in the resistance value of the stretchable conductive layer 30 will be described.
For example, as shown in FIG. 1, the stretchable conductive layer 30 may have a ring structure extending on the outer surface of the tube member 10 in the circumferential direction of the axis. As shown in FIG. 2A, the stretchable conductive layer 30 has a portion that is not partially continuous in the circumferential direction but is separated from each other in a cross-sectional view in the axial direction.
Then, as shown in FIGS. 1A to 1B, when the tube member 10 contracts in the axial direction and expands in the radial direction, the stretchable conductive layer 30 is in a state of extending in the circumferential direction. .. At this time, it is possible to measure the fluctuation of the resistance value of the elastic conductive layer 30 before and after the deformation of the tube member 10. For example, a wiring (not shown) is connected to the end of the elastic conductive layer 30, and the resistance value thereof is measured via the wiring.

In this way, as shown in FIGS. 1 (a) and 1 (b), when the tube member 10 expands in the radial direction and contracts in the axial direction when the fluid flows in, the tube member 10 follows the elastic conductivity. Since the layer 30 is deformed, the expanded state of the tube member 10 can be detected via the elastic conductive layer 30.

The stretchable conductive layer 30 may be configured to be formed on the inner surface of the tube member 10. As a result, even when the outer surface of the tube member 10 may come into contact with the sleeve or other member, the change in the electrical characteristics of the elastic conductive layer 30 can be stably measured because it exists inside the tube member 10. Is. Further, by forming the stretchable conductive layer 30 on the inside of the tube member 10, it is possible to suppress the decrease in the expandability of the tube member 10 as compared with the case where the stretchable conductive layer 30 is on the outside.

The tube member 10 may be made of an insulating elastomer, and / or the stretchable conductive layer 30 may be made of a conductive elastomer.

The insulating elastomer and the conductive elastomer are each composed of an elastic elastomer. Since the stretchable conductive layer 30 containing the conductive elastomer is laminated on the tube member 10 containing the insulating elastomer, it is possible to improve the durability even during elongation.

The tube member 10 and the elastic conductive layer 30 may be configured to contain the same type of elastomer such as the same type of silicone rubber. As a result, even when the elastomer of the tube member 10 is plastically deformed due to repeated use, the stretchable conductive layer 30 is also plastically deformed to the same extent. Therefore, it becomes possible to detect the deformed state of the tube member 10 including the plastically deformed portion.

By configuring the tube member 10 and the elastic conductive layer 30 so as to contain the same type of silicone rubber, the adhesion between them can be improved. Therefore, even when the tube member 10 is deformed, it is possible to prevent the elastic conductive layer 30 from being peeled off or misaligned. When the stretchable conductive layer 30 is formed on the inner surface of the tube member 10, it is preferably configured in this way.

A modified example of the actuator 100 will be described.

The tube member 10 may have a cylindrical structure extending in the axial direction, or may have a curved structure in which the whole or a part is curved.

The tube member 10 may have one or more spaces 12 inside. Specifically, the tube member 10 may have a space 12 divided into a plurality of spaces by one or more rings or by adhering the inner surfaces of the silicone rubber layers to each other. The plurality of spaces 12 are arranged so as to be aligned in the axial direction of the tube member 10.

The tube member 10 may be a single layer or may be composed of two or more layers in a cross section in the radial direction. The layer may be composed of one kind or two or more kinds of silicone rubber layers. For example, a fiber layer may be provided between the two silicone rubber layers. Further, the tube member 10 may have at least a part of two or more silicone rubber layers having different expansion / contraction ratios or a layer other than the silicone rubber.

The stretchable conductive layer 30 may be formed only on the inner surface as shown in FIG. 1, but may be formed only on the outer surface, and the tube member 10 may be formed on both the inner surface surface and the outer surface surface. It may be formed so as to sandwich it.

An elastic cover layer may be formed on the elastic conductive layer 30. Thereby, the durability of the stretchable conductive layer 30 can be improved. The stretchable conductive layer 30 on the inner surface can be prevented from coming into contact with the deterioration component contained in the fluid by the stretchable cover layer. On the other hand, the stretchable conductive layer 30 on the outer surface may be prevented from coming into contact with the sleeve or other members by the stretchable cover layer.

The elastic cover layer may be made of an insulating elastomer or may be made of the same material as the tube member 10.

Further, an example of the stretchable conductive layer 30 may be a strain sensor of the tube member 10 utilizing the capacitance. The strain sensor in this case is composed of an elastic capacitor. In the stretchable capacitor, a tube member 10 made of an insulating elastomer is adopted as a capacitance film made of a stretchable conductive material, and a stretchable conductive layer 30 is used as two stretchable electrodes sandwiching the capacitance film. Can be adopted.

The change in the capacitance of the tube member 10 can be measured via the elastic conductive layers 30 formed on the inner surface and the outer surface of the tube member 10 so as to sandwich the tube member 10. Since the thickness of the tube member 10 changes according to the expansion state in the radial direction by the same principle that the capacitance changes according to the thickness of the insulating film of the capacitor, the change in the thickness is the change in the capacitance. It can be measured as a quantity. Then, the deformed state of the tube member 10 can be grasped from the thickness.

In the present embodiment, as changes in electrical characteristics measured via the elastic conductive layer 30, changes in the resistance value of the elastic conductive layer 30 and the capacitance of the tube member 10 sandwiched between the elastic conductive layers 30. It is possible to use at least one of the changes in.

As shown in FIG. 1, the stretchable conductive layer 30 may have a ring structure extending in the circumferential direction, a line structure extending in the axial direction, or the circumferential direction and the axial direction. It may have a tube structure extending to.

The ring structure may be annular or non-annular. When the elastic conductive layer 30 has a ring structure, it may be provided on the end side in the axial direction of the tube member 10 or may be provided in the center as shown in FIG. 1 (a). The ring structure may be O-shaped or C-shaped in cross-sectional view with respect to the axial direction.

When the elastic conductive layer 30 has a line shape, it may have various shapes, and can be formed by various wiring patterns such as linear and wavy. As will be described in detail later, the stretchable conductive layer 30 is formed by a coating means such as printing using a conductive paste, so that a pattern of a desired shape and a wiring thickness can be realized.

As shown in FIG. 3A, the stretchable conductive layer 30 may have a tube structure having a space 12. FIG. 3B is a cross-sectional view taken along the line DD of FIG. 3A.
The tubular stretchable conductive layer 30 is configured to cover at least a part or all of the inner surface of the tube member 10. Thereby, the mechanical strength of the actuator 100 itself can be improved.

The cap 20 may be installed on the inner peripheral surface of the tube member 10, but may be installed on the outer peripheral surface of the tube member 10. The cap 20 may have a connecting mechanism for connecting to another mechanism or member.

Further, the actuator 100 may have a sleeve on the outer peripheral surface of the tube member 10. The sleeve is composed of a tubular member and covers at least a part of the outer surface of the outer peripheral surface of the tube member 10. Such sleeves may have a mesh-like reinforcing structure composed of fibers.
The actuator 100 having the tube member 10 and the sleeve is a Macchiben type artificial muscle.

In an example of the actuator 100 of the present embodiment, the tube member 10 is made of an insulating elastomer, and the stretchable conductive layer 30 is made of a conductive elastomer. These elastomers will be described.

As the insulating elastomer, for example, silicone rubber, urethane rubber, fluororubber, nitrile rubber, acrylic rubber, styrene rubber, chloroprene rubber, ethylene propylene rubber and the like can be used. Among these, the elastomer includes one or more thermosetting elastomers (elastomer materials) selected from the group consisting of silicone rubber, urethane rubber, and fluororubber.
The insulating elastomer may be composed of the elastomer material alone, or may be configured to include an elastomer material and a non-conductive filler. Examples of insulating elastomers include silicone rubber, preferably silicone rubber and non-conductive fillers. Silicone rubber is chemically stable among elastomers and has excellent mechanical strength.
Among these, from the viewpoint of hygiene, it is preferable to use silicone rubber having high biocompatibility as the elastomer material.

As the conductive elastomer, for example, silicone rubber, urethane rubber, fluororubber, nitrile rubber, acrylic rubber, styrene rubber, chloroprene rubber, ethylene propylene rubber and the like can be used. Among them, the elastomer includes one or more thermosetting elastomers (elastomer materials) selected from the group consisting of silicone rubber, urethane rubber, and fluororubber, and conductive fillers.
Preferred examples of conductive elastomers include silicone rubber and conductive fillers. As a result, the elasticity and conductivity of the conductive elastomer can be enhanced.

At least one of the insulating elastomer and the conductive elastomer, preferably both, may contain a non-conductive filler. As the non-conductive filler, known materials can be used, but for example, silica particles, silicone rubber particles, talc and the like may be used. Among these, silica particles may be included.

The conductive filler may contain, for example, one or more selected from the group consisting of powdery or fibrous metal-based fillers, carbon-based fillers, metal oxide fillers, and metal-plated fillers. Among these, as the conductive filler, a carbon-based filler such as carbon or a metal-based filler such as silver powder may be used.

The conductive elastomer may further contain a non-conductive filler in addition to the conductive filler. This enhances the mechanical properties of the conductive elastomer.

At least two or all of the conductive elastomer of the stretchable conductive layer 30, the insulating elastomer of the tube member 10, and the insulating elastomer of the stretchable cover layer may be configured to contain the same elastomer material.

In the present specification, the inclusion of the same elastomer material means that each of the above-exemplified types of thermosetting elastomer contains at least one or more of the same type of elastomer material.
Further, when the same silicone rubber is contained, the silicone rubber may be composed of a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane.

The insulating elastomer may be composed of a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane. Further, the conductive elastomer may be composed of a conductive filler and a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane.

Hereinafter, the components of the silicone rubber-based curable composition will be described in detail.

In the present specification, the inclusion of the same silicone rubber means that the silicone rubber-based curable composition contains at least the same kind of vinyl group-containing linear organopolysiloxane, and further, the same kind of cross-linking agent. It may contain one or more selected from the group consisting of the same type of non-conductive filler, the same type of silane coupling agent, and the same type of catalyst.

The insulating elastomer may be composed of a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane. Further, the conductive elastomer may be composed of a conductive filler and a cured product of a silicone rubber-based curable composition containing a vinyl group-containing organopolysiloxane.

The vinyl group-containing linear organopolysiloxane of the same type may contain at least the same vinyl group as the functional group and may have a linearity, and the amount of vinyl group, the molecular weight distribution, or the amount thereof added in the molecule may be. It may be different.

The cross-linking agent of the same type may have at least a common structure such as a linear structure or a branched structure, may contain a molecular weight distribution in the molecule or a different functional group, and the addition amount thereof is different. You may.

The non-conductive fillers of the same type may have at least a common constituent material, and may differ in particle size, specific surface area, surface treatment agent, or addition amount thereof.

The silane coupling agent of the same type may have at least a common functional group, and other functional groups in the molecule and the amount added may be different.

The catalysts of the same type may have at least a common constituent material, and the catalysts may contain different compositions or may have different addition amounts.

The silicone rubber-based curable composition constituting the same silicone rubber further comprises different types of vinyl group-containing linear organopolysiloxanes, cross-linking agents, non-conductive fillers, silane coupling agents, and catalysts. It may contain one or more selected from the group.

The silicone rubber-based curable composition of the present embodiment can contain a vinyl group-containing organopolysiloxane (A). The vinyl group-containing organopolysiloxane (A) is a polymer that is the main component of the silicone rubber-based curable composition of the present embodiment.

The vinyl group-containing organopolysiloxane (A) can include a vinyl group-containing linear organopolysiloxane (A1) having a linear structure.

The vinyl group-containing linear organopolysiloxane (A1) has a linear structure and contains a vinyl group, and the vinyl group serves as a cross-linking point at the time of curing.

The content of the vinyl group of the vinyl group-containing linear organopolysiloxane (A1) is not particularly limited, but is preferably, for example, having two or more vinyl groups in the molecule and 15 mol% or less. .. As a result, the amount of vinyl groups in the vinyl group-containing linear organopolysiloxane (A1) is optimized, and a network with each component described later can be reliably formed.

In the present specification, the vinyl group content is the mol% of the vinyl group-containing siloxane unit when all the units constituting the vinyl group-containing linear organopolysiloxane (A1) are 100 mol%. .. However, it is considered that there is one vinyl group for each vinyl group-containing siloxane unit.

The degree of polymerization of the vinyl group-containing linear organopolysiloxane (A1) is not particularly limited, but is preferably in the range of, for example, preferably about 1000 to 10000, and more preferably about 2000 to 5000. The degree of polymerization can be determined, for example, as a polystyrene-equivalent number average degree of polymerization (or number average molecular weight) in GPC (gel permeation chromatography) using chloroform as a developing solvent.

In the present specification, "to" means that an upper limit value and a lower limit value are included unless otherwise specified.

Further, the specific gravity of the vinyl group-containing linear organopolysiloxane (A1) is not particularly limited, but is preferably in the range of about 0.9 to 1.1.

By using a vinyl group-containing linear organopolysiloxane (A1) having a degree of polymerization and specific gravity within the above range, the silicone rubber obtained has heat resistance, flame retardancy, chemical stability, etc. Can be improved.

The vinyl group-containing linear organopolysiloxane (A1) preferably has a structure represented by the following formula (1).

In formula (1), R ¹ is a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, an alkenyl group, an aryl group, or a hydrocarbon group in which these are combined. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group and the like, and among them, a methyl group is preferable. Examples of the alkenyl group having 1 to 10 carbon atoms include a vinyl group, an allyl group, a butenyl group and the like, and among them, a vinyl group is preferable. Examples of the aryl group having 1 to 10 carbon atoms include a phenyl group and the like.

Further, R ² is a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, an alkenyl group, an aryl group, or a hydrocarbon group in which these are combined. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group and the like, and among them, a methyl group is preferable. Examples of the alkenyl group having 1 to 10 carbon atoms include a vinyl group, an allyl group, and a butenyl group. Examples of the aryl group having 1 to 10 carbon atoms include a phenyl group.

Further, R ³ is a substituted or unsubstituted alkyl group having 1 to 8 carbon atoms, an aryl group, or a hydrocarbon group in which these are combined. Examples of the alkyl group having 1 to 8 carbon atoms include a methyl group, an ethyl group, a propyl group and the like, and among them, a methyl group is preferable. Examples of the aryl group having 1 to 8 carbon atoms include a phenyl group.

Further, examples of the substituent of R ¹ and R ² in the formula (1) include a methyl group, a vinyl group and the like, and examples of the substituent of R ³ include a methyl group and the like.

In the equation (1), the plurality of R ^1s are independent of each other and may be different from each other or may be the same. The same applies to R ² and R ³ .

Further, m and n are the number of repeating units constituting the vinyl group-containing linear organopolysiloxane (A1) represented by the formula (1), m is an integer of 0 to 2000, and n is 1000 to 10000. Is an integer of. m is preferably 0 to 1000, and n is preferably 2000 to 5000.

Moreover, as a specific structure of the vinyl group-containing linear organopolysiloxane (A1) represented by the formula (1), for example, the one represented by the following formula (1-1) can be mentioned.

In formula (1-1), R ¹ and R ² are each independently a methyl group or a vinyl group, and at least one of them is a vinyl group.

The vinyl group-containing linear organopolysiloxane (A1) is a first vinyl group-containing linear siloxane having a vinyl group content of 2 or more in the molecule and 0.4 mol% or less. Organopolysiloxane (A1-1) may be included. The vinyl group amount of the first vinyl group-containing linear organopolysiloxane (A1-1) may be 0.1 mol% or less.

The vinyl group-containing linear organopolysiloxane (A1) has a vinyl group content of 0.5 to 15 mol% with the first vinyl group-containing linear organopolysiloxane (A1-1). May contain a vinyl group-containing linear organopolysiloxane (A1-2).

As raw rubber which is a raw material of silicone rubber, a first vinyl group-containing linear organopolysiloxane (A1-1) and a second vinyl group-containing linear organopolysiloxane (A1-2) having a high vinyl group content are used. ), The vinyl groups can be unevenly distributed, and the cross-linking density can be more effectively formed in the cross-linking network of the silicone rubber. As a result, the tear strength of the silicone rubber can be increased more effectively.

Specifically, as the vinyl group-containing linear organopolysiloxane (A1), for example, in the above formula (1-1), a unit in which R1 is a vinyl group and / or a unit in which R2 is a vinyl group is a molecule. A first vinyl group-containing linear organopolysiloxane (A1-1) having two or more of them and containing 0.4 mol% or less, and a unit in which R1 is a vinyl group and / or R2 is a vinyl group. It is preferable to use a second vinyl group-containing linear organopolysiloxane (A1-2) containing 0.5 to 15 mol% of the unit.

Further, the first vinyl group-containing linear organopolysiloxane (A1-1) preferably has a vinyl group content of 0.01 to 0.2 mol%. Further, the vinyl group-containing linear organopolysiloxane (A1-2) preferably has a vinyl group content of 0.8 to 12 mol%.

Further, when the first vinyl group-containing linear organopolysiloxane (A1-1) and the second vinyl group-containing linear organopolysiloxane (A1-2) are blended in combination (A1-1). The ratio of and (A1-2) is not particularly limited, but for example, the weight ratio of (A1-1) :( A1-2) is preferably 50:50 to 95: 5, and 80:20 to 90: It is more preferably 10.

The first and second vinyl group-containing linear organopolysiloxanes (A1-1) and (A1-2) may be used alone or in combination of two or more. good.

Further, the vinyl group-containing organopolysiloxane (A) may contain a vinyl group-containing branched organopolysiloxane (A2) having a branched structure.

<< Organohydrogenpolysiloxane (B) >>
The silicone rubber-based curable composition of the present embodiment can contain organohydrogenpolysiloxane (B).
Organohydrogenpolysiloxane (B) is classified into linear organohydrogenpolysiloxane (B1) having a linear structure and branched organohydrogenpolysiloxane (B2) having a branched structure. Either one or both can be included.

The linear organohydrogenpolysiloxane (B1) has a linear structure and a structure (≡Si—H) in which hydrogen is directly bonded to Si, and is a vinyl group-containing organopolysiloxane (A). In addition to the vinyl group, it is a polymer that undergoes a hydrosilylation reaction with the vinyl group of the components contained in the silicone rubber-based curable composition to crosslink these components.

The molecular weight of the linear organohydrogenpolysiloxane (B1) is not particularly limited, but for example, the weight average molecular weight is preferably 20000 or less, and more preferably 1000 or more and 10000 or less.

The weight average molecular weight of the linear organohydrogenpolysiloxane (B1) can be measured, for example, by polystyrene conversion in GPC (gel permeation chromatography) using chloroform as a developing solvent.

Further, the linear organohydrogenpolysiloxane (B1) is usually preferably one having no vinyl group. This makes it possible to accurately prevent the cross-linking reaction from proceeding in the molecule of the linear organohydrogenpolysiloxane (B1).

As the linear organohydrogenpolysiloxane (B1) as described above, for example, one having a structure represented by the following formula (2) is preferably used.

In formula (2), ^R4 is a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, an alkenyl group, an aryl group, a hydrocarbon group combining these, or a hydride group. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group and the like, and among them, a methyl group is preferable. Examples of the alkenyl group having 1 to 10 carbon atoms include a vinyl group, an allyl group, a butenyl group and the like. Examples of the aryl group having 1 to 10 carbon atoms include a phenyl group.

Further, R5 is a substituted or unsubstituted alkyl group having 1 to ¹⁰ carbon atoms, an alkenyl group, an aryl group, a hydrocarbon group combining these, or a hydride group. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group and a propyl group, and among them, a methyl group is preferable. Examples of the alkenyl group having 1 to 10 carbon atoms include a vinyl group, an allyl group, a butenyl group and the like. Examples of the aryl group having 1 to 10 carbon atoms include a phenyl group.

In the equation (2), the plurality of R ^4s are independent of each other and may be different from each other or may be the same. The ^same applies to R5. However, of the plurality of ^R4 and R5, at ^least two or more are hydride groups.

Further, R ⁶ is a substituted or unsubstituted alkyl group having 1 to 8 carbon atoms, an aryl group, or a hydrocarbon group in which these are combined. Examples of the alkyl group having 1 to 8 carbon atoms include a methyl group, an ethyl group, a propyl group and the like, and among them, a methyl group is preferable. Examples of the aryl group having 1 to 8 carbon atoms include a phenyl group. The plurality of ^R6s are independent of each other and may be different from each other or may be the same.

Examples of the substituent of R ⁴ , R ⁵ , and R ⁶ in the formula (2) include a methyl group and a vinyl group, and a methyl group is preferable from the viewpoint of preventing an intramolecular cross-linking reaction.

Further, m and n are the number of repeating units constituting the linear organohydrogenpolysiloxane (B1) represented by the formula (2), where m is an integer of 2 to 150 and n is an integer of 2 to 150. Is. Preferably, m is an integer of 2 to 100 and n is an integer of 2 to 100.

The linear organohydrogenpolysiloxane (B1) may be used alone or in combination of two or more.

Since the branched organohydrogenpolysiloxane (B2) has a branched structure, it forms a region having a high crosslink density and is a component that greatly contributes to the formation of a dense structure having a crosslink density in the silicone rubber system. Further, like the linear organohydrogenpolysiloxane (B1), it has a structure (≡Si—H) in which hydrogen is directly bonded to Si, and in addition to the vinyl group of the vinyl group-containing organopolysiloxane (A), silicone. It is a polymer that undergoes a hydrosilylation reaction with the vinyl group of the component contained in the rubber-based curable composition and crosslinks these components.

The specific gravity of the branched organohydrogenpolysiloxane (B2) is in the range of 0.9 to 0.95.

Further, the branched organohydrogenpolysiloxane (B2) is usually preferably one having no vinyl group. This makes it possible to accurately prevent the cross-linking reaction from proceeding in the molecule of the branched organohydrogenpolysiloxane (B2).

The branched organohydrogenpolysiloxane (B2) is preferably represented by the following average composition formula (c).

Average composition formula (c)
(H _a (R ⁷ ) _3-a SiO _1/2 ) _m (SiO _4/2 ) _n
(In the formula (c), R ⁷ is a monovalent organic group, a is an integer in the range of 1 to 3, m is _a number of Ha (R ⁷ ) _3-a SiO _1/2 units, and n is SiO _{4 /.} It is a number of ₂ units)

In formula (c), R ⁷ is a monovalent organic group, preferably a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, an aryl group, or a hydrocarbon group in combination thereof. Examples of the alkyl group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group and the like, and among them, a methyl group is preferable. Examples of the aryl group having 1 to 10 carbon atoms include a phenyl group.

In the formula (c), a is the number of hydride groups (hydrogen atoms directly bonded to Si), and is an integer in the range of 1 to 3, preferably 1.

Further, in the formula ( _c ), m is the number of Ha (R ⁷ ) _3-a SiO _1/2 unit, and n is the number of SiO _4/2 unit.

The branched organohydrogenpolysiloxane (B2) has a branched structure. The linear organohydrogenpolysiloxane (B1) and the branched organohydrogenpolysiloxane (B2) differ in that their structure is linear or branched, and the Si is the same as when the number of Si is 1. The number of alkyl groups R to be bonded (R / Si) is 1.8 to 2.1 for the linear organohydrogenpolysiloxane (B1) and 0.8 to 1 for the branched organohydrogenpolysiloxane (B2). It is in the range of 0.7.

Since the branched organohydrogenpolysiloxane (B2) has a branched structure, for example, the amount of residue when heated to 1000 ° C. at a heating rate of 10 ° C./min under a nitrogen atmosphere is 5% or more. Will be. On the other hand, since the linear organohydrogenpolysiloxane (B1) is linear, the amount of residue after heating under the above conditions is almost zero.

Further, specific examples of the branched organohydrogenpolysiloxane (B2) include those having a structure represented by the following formula (3).

In formula (3), R ⁷ is a substituted or unsubstituted alkyl group having 1 to 8 carbon atoms, an aryl group, or a hydrocarbon group in combination thereof, or a hydrogen atom. Examples of the alkyl group having 1 to 8 carbon atoms include a methyl group, an ethyl group, a propyl group and the like, and among them, a methyl group is preferable. Examples of the aryl group having 1 to 8 carbon atoms include a phenyl group. Examples of the substituent of R ⁷ include a methyl group and the like.

In the equation (3), the plurality of R ^7s are independent of each other and may be different from each other or may be the same.

Further, in the equation (3), "-O-Si≡" indicates that Si has a branched structure that spreads three-dimensionally.

The branched organohydrogenpolysiloxane (B2) may be used alone or in combination of two or more.

Further, in the linear organohydrogenpolysiloxane (B1) and the branched organohydrogenpolysiloxane (B2), the amount of hydrogen atoms (hydride groups) directly bonded to Si is not particularly limited. However, in the silicone rubber-based curable composition, the linear organohydrogenpolysiloxane (B1) and the branched organohydrogenpoly are added to 1 mol of the vinyl group in the vinyl group-containing linear organopolysiloxane (A1). The total amount of hydride groups of siloxane (B2) is preferably 0.5 to 5 mol, more preferably 1 to 3.5 mol. This ensures that a crosslinked network is formed between the linear organohydrogenpolysiloxane (B1) and the branched organohydrogenpolysiloxane (B2) and the vinyl group-containing linear organopolysiloxane (A1). Can be made to.

<< Silica particles (C) >>
The silicone rubber-based curable composition of the present embodiment may contain silica particles (C) as a non-conductive filler, if necessary.

The silica particles (C) are not particularly limited, but for example, fumed silica, calcined silica, precipitated silica and the like are used. These may be used alone or in combination of two or more.

The specific surface area of the silica particles (C) by, for example, the BET method is preferably, for example, 50 to 400 m ² / g, and more preferably 100 to 400 m ² / g. The average primary particle size of the silica particles (C) is preferably, for example, 1 to 100 nm, and more preferably about 5 to 20 nm.

By using the silica particles (C) within the range of the specific surface area and the average particle size, it is possible to improve the hardness and mechanical strength of the formed silicone rubber, particularly the tensile strength.

<< Silane Coupling Agent (D) >>
The silicone rubber-based curable composition of the present embodiment can contain a silane coupling agent (D).
The silane coupling agent (D) can have a hydrolyzable group. The hydrolyzing group is hydrolyzed by water to become a hydroxyl group, and this hydroxyl group undergoes a dehydration condensation reaction with the hydroxyl group on the surface of the silica particles (C), whereby the surface of the silica particles (C) can be modified.

Further, the silane coupling agent (D) can include a silane coupling agent having a hydrophobic group. As a result, this hydrophobic group is imparted to the surface of the silica particles (C), so that the cohesive force of the silica particles (C) is reduced in the silicone rubber-based curable composition and thus in the silicone rubber (hydrogen due to the silanol group). Aggregation due to bonding is reduced), and as a result, it is presumed that the dispersibility of the silica particles in the silicone rubber-based curable composition is improved. As a result, the interface between the silica particles and the rubber matrix is increased, and the reinforcing effect of the silica particles is increased. Further, it is presumed that the slipperiness of the silica particles in the matrix is improved when the rubber matrix is deformed. Then, by improving the dispersibility and slipperiness of the silica particles (C), the mechanical strength (for example, tensile strength, tear strength, etc.) of the silicone rubber due to the silica particles (C) is improved.

Further, the silane coupling agent (D) can include a silane coupling agent having a vinyl group. As a result, a vinyl group is introduced on the surface of the silica particles (C). Therefore, when the silicone rubber-based curable composition is cured, that is, the vinyl group contained in the vinyl group-containing organopolysiloxane (A) and the hydride group contained in the organohydrogenpolysiloxane (B) undergo a hydrosilylation reaction. When the network (crosslinked structure) formed by these substances is formed, the vinyl group of the silica particles (C) is also involved in the hydrosilylation reaction with the hydride group of the organohydrogenpolysiloxane (B). Silica particles (C) will also be incorporated into. As a result, it is possible to reduce the hardness and increase the modulus of the formed silicone rubber.

As the silane coupling agent (D), a silane coupling agent having a hydrophobic group and a silane coupling agent having a vinyl group can be used in combination.

Examples of the silane coupling agent (D) include those represented by the following formula (4).

Y _n -Si- (X) _4-n ... (4)
In the above equation (4), n represents an integer of 1 to 3. Y represents any functional group having a hydrophobic group, a hydrophilic group or a vinyl group, and when n is 1, it is a hydrophobic group, and when n is 2 or 3, at least one of them is. It is a hydrophobic group. X represents a hydrolyzable group.

The hydrophobic group is an alkyl group having 1 to 6 carbon atoms, an aryl group, or a hydrocarbon group in which these are combined, and examples thereof include a methyl group, an ethyl group, a propyl group, a phenyl group, and the like. Methyl groups are preferred.

Examples of the hydrophilic group include a hydroxyl group, a sulfonic acid group, a carboxyl group, a carbonyl group and the like, and a hydroxyl group is particularly preferable. The hydrophilic group may be contained as a functional group, but is preferably not contained from the viewpoint of imparting hydrophobicity to the silane coupling agent (D).

Further, examples of the hydrolyzable group include an alkoxy group such as a methoxy group and an ethoxy group, a chloro group or a silazane group, and among them, a silazane group is preferable because it has high reactivity with the silica particles (C). A group having a silazane group as a hydrolyzable group has two structures of ( _Yn —Si—) in the above formula (4) due to its structural characteristics.

Specific examples of the silane coupling agent (D) represented by the above formula (4) include methyltrimethoxysilane, dimethyldimethoxysilane, phenyltrimethoxysilane, and methyltri, as those having a hydrophobic group as a functional group. Alkoxysilanes such as ethoxysilane, dimethyldiethoxysilane, phenyltriethoxysilane, n-propyltrimethoxysilane, n-propyltriethoxysilane, hexyltrimethoxysilane, hexyltriethoxysilane, decyltrimethoxysilane; methyltrichlorosilane , Chlorosilanes such as dimethyldichlorosilane, trimethylchlorosilane, phenyltrichlorosilane; hexamethyldisilazane, examples of which have a vinyl group as a functional group include methacrypropyltriethoxysilane, methacrypropyltrimethoxysilane, methacryoxy. Ekalkylsilanes such as propylmethyldiethoxysilane, methacryloxypropylmethyldimethoxysilane, vinyltriethoxysilane, vinyltrimethoxysilane, vinylmethyldimethoxysilane; chlorosilanes such as vinyltrichlorosilane, vinylmethyldichlorosilane; divinyltetramethyldi Examples thereof include silazanes, but in consideration of the above description, hexamethyldisilazane is particularly preferable as having a hydrophobic group, and divinyltetramethyldisilazane is preferable as having a vinyl group.

In the present embodiment, the lower limit of the content of the silane coupling agent (D) is preferably 1% by mass or more with respect to 100 parts by weight of the total amount of the vinyl group-containing organopolysiloxane (A). It is more preferably 5% by mass or more, and further preferably 5% by mass or more. The upper limit of the content of the silane coupling agent (D) is preferably 100% by mass or less, preferably 80% by mass or less, based on 100 parts by mass of the total amount of the vinyl group-containing organopolysiloxane (A). It is more preferably present, and further preferably 40% by mass or less.
By setting the content of the silane coupling agent (D) to the above lower limit value or more, when the silica particles (C) are used, it can contribute to the improvement of the mechanical strength of the silicone rubber as a whole. Further, by setting the content of the silane coupling agent (D) to the above upper limit value or less, the silicone rubber can have appropriate mechanical properties.

<< Platinum or platinum compound (E) >>
The silicone rubber-based curable composition of the present embodiment can contain platinum or a platinum compound (E).
Platinum or the platinum compound (E) is a catalytic component that acts as a catalyst during curing. The amount of platinum or the platinum compound (E) added is the amount of the catalyst.

As the platinum or the platinum compound (E), known ones can be used, for example, platinum black, platinum supported on silica, carbon black or the like, platinum chloride acid or an alcohol solution of platinum chloride acid, chloride. Examples thereof include a complex salt of platinum acid and olefin, and a complex salt of platinum chloride acid and vinyl siloxane.

As the platinum or the platinum compound (E), only one type may be used alone, or two or more types may be used in combination.

<< Water (F) >>
Further, the silicone rubber-based curable composition of the present embodiment may contain water (F) in addition to the above components (A) to (E).

Water (F) functions as a dispersion medium for dispersing each component contained in the silicone rubber-based curable composition, and is a component that contributes to the reaction between the silica particles (C) and the silane coupling agent (D). .. Therefore, in the silicone rubber, the silica particles (C) and the silane coupling agent (D) can be more reliably connected to each other, and uniform characteristics can be exhibited as a whole.

Further, when water (F) is contained, the content thereof can be appropriately set, but specifically, for example, 10 to 100 parts by weight with respect to 100 parts by weight of the silane coupling agent (D). It is preferably in the range of 30 to 70 parts by weight, and more preferably in the range of 30 to 70 parts by weight. This makes it possible to more reliably proceed the reaction between the silane coupling agent (D) and the silica particles (C).

(Other ingredients)
Further, the silicone rubber-based curable composition of the present embodiment may further contain other components in addition to the above components (A) to (F). Other components include silica particles (C) such as diatomaceous earth, iron oxide, zinc oxide, titanium oxide, barium oxide, magnesium oxide, cerium oxide, calcium carbonate, magnesium carbonate, zinc carbonate, glass wool, and mica. Examples thereof include additives such as inorganic fillers, reaction inhibitors, dispersants, pigments, dyes, antioxidants, antioxidants, flame retardants, and thermal conductivity improvers.

In the silicone rubber-based curable composition, the content ratio of each component is not particularly limited, but is set as follows, for example.

In the present embodiment, the upper limit of the content of the silica particles (C) may be, for example, 60 parts by weight or less, preferably 50 parts by weight, based on 100 parts by weight of the total amount of the vinyl group-containing organopolysiloxane (A). It may be less than or equal to, and more preferably 40 parts by weight or less. This makes it possible to balance mechanical strength such as hardness and tensile strength. The lower limit of the content of the silica particles (C) is not particularly limited with respect to 100 parts by weight of the total amount of the vinyl group-containing organopolysiloxane (A), but may be, for example, 10 parts by weight or more.

The silane coupling agent (D) is preferably contained in a proportion of, for example, 5 parts by weight or more and 100 parts by weight or less of the vinyl group-containing organopolysiloxane (A) with respect to 100 parts by weight. More preferably, it is contained in a proportion of 5 parts by weight or more and 40 parts by weight or less. Thereby, the dispersibility of the silica particles (C) in the silicone rubber-based curable composition can be surely improved.

The content of the organohydrogenpolysiloxane (B) is specifically, for example, with respect to 100 parts by weight of the total amount of the vinyl group-containing organopolysiloxane (A), the silica particles (C) and the silane coupling agent (D). , 0.5 part by weight or more and 20 parts by weight or less is preferable, and 0.8 parts by weight or more and 15 parts by weight or less is more preferable. When the content of (B) is within the above range, a more effective curing reaction may be possible.

The content of platinum or the platinum compound (E) means the amount of catalyst and can be appropriately set, but specifically, vinyl group-containing organopolysiloxane (A), silica particles (C), and silane coupling agent ( The amount of the platinum group metal in this component is 0.01 to 1000 ppm by weight, preferably 0.1 to 500 ppm, based on the total amount of D). By setting the content of platinum or the platinum compound (E) to the above lower limit value or more, the obtained silicone rubber composition can be sufficiently cured. By setting the content of platinum or the platinum compound (E) to the above upper limit value or less, the curing rate of the obtained silicone rubber composition can be improved.

Further, when water (F) is contained, the content thereof can be appropriately set, but specifically, for example, 10 to 100 parts by weight with respect to 100 parts by weight of the silane coupling agent (D). It is preferably in the range of 30 to 70 parts by weight, and more preferably in the range of 30 to 70 parts by weight. This makes it possible to more reliably proceed the reaction between the silane coupling agent (D) and the silica particles (C).

<Manufacturing method of silicone rubber>
Next, a method for manufacturing the silicone rubber of the present embodiment will be described.
As a method for producing a silicone rubber of the present embodiment, a silicone rubber-based curable composition can be prepared, and the silicone rubber-based curable composition can be cured to obtain a silicone rubber.
The details will be described below.

First, each component of the silicone rubber-based curable composition is uniformly mixed by an arbitrary kneading device to prepare a silicone rubber-based curable composition.

[1] For example, a vinyl group-containing organopolysiloxane (A), silica particles (C), and a silane coupling agent (D) are weighed in a predetermined amount and then kneaded by an arbitrary kneading device. A kneaded product containing each of these components (A), (C) and (D) is obtained.

The kneaded product is preferably obtained by kneading the vinyl group-containing organopolysiloxane (A) and the silane coupling agent (D) in advance, and then kneading (mixing) the silica particles (C). This further improves the dispersibility of the silica particles (C) in the vinyl group-containing organopolysiloxane (A).

Further, when obtaining this kneaded product, water (F) may be added to the kneaded product of each component (A), (C), and (D) as needed. This makes it possible to more reliably proceed the reaction between the silane coupling agent (D) and the silica particles (C).

Further, it is preferable that the kneading of each component (A), (C), and (D) goes through a first step of heating at the first temperature and a second step of heating at the second temperature. Thereby, in the first step, the surface of the silica particles (C) can be surface-treated with the coupling agent (D), and in the second step, the silica particles (C) and the coupling agent (D) are combined. By-products produced by the reaction can be reliably removed from the kneaded product. Then, if necessary, the component (A) may be added to the obtained kneaded product and further kneaded. This makes it possible to improve the familiarity of the components of the kneaded product.

The first temperature is preferably, for example, about 40 to 120 ° C., and more preferably about 60 to 90 ° C., for example. The second temperature is, for example, preferably about 130 to 210 ° C, more preferably about 160 to 180 ° C.

Further, the atmosphere in the first step is preferably under an inert atmosphere such as under a nitrogen atmosphere, and the atmosphere in the second step is preferably under a reduced pressure atmosphere.

Further, the time of the first step is preferably, for example, about 0.3 to 1.5 hours, and more preferably about 0.5 to 1.2 hours. The time of the second step is, for example, preferably about 0.7 to 3.0 hours, and more preferably about 1.0 to 2.0 hours.

By setting the first step and the second step under the above-mentioned conditions, the above-mentioned effect can be obtained more remarkably.

[2] Next, the organohydrogenpolysiloxane (B) and platinum or the platinum compound (E) are weighed in a predetermined amount, and then the kneaded product prepared in the above step [1] using an arbitrary kneading device. By kneading each component (B) and (E), a silicone rubber-based curable composition is obtained. The obtained silicone rubber-based curable composition may be a paste containing a solvent.

When kneading the respective components (B) and (E), the kneaded product previously prepared in the above step [1] and the organohydrogenpolysiloxane (B) were prepared in the above step [1]. It is preferable to knead the kneaded product with platinum or the platinum compound (E), and then knead the respective kneaded products. This ensures that each component (A) to (E) is contained in the silicone rubber-based curable composition without proceeding with the reaction between the vinyl group-containing organopolysiloxane (A) and the organohydrogenpolysiloxane (B). Can be dispersed in.

The temperature at which each component (B) and (E) is kneaded is preferably, for example, about 10 to 70 ° C., more preferably about 25 to 30 ° C. as the roll set temperature.

Further, the kneading time is preferably, for example, about 5 minutes to 1 hour, and more preferably about 10 to 40 minutes.

By setting the temperature within the above range in the above step [1] and the above step [2], the progress of the reaction between the vinyl group-containing organopolysiloxane (A) and the organohydrogenpolysiloxane (B) is more accurately performed. Can be prevented or suppressed. Further, in the above steps [1] and the above steps [2], by setting the kneading time within the above range, each component (A) to (E) is more reliably dispersed in the silicone rubber-based curable composition. Can be done.

The kneading device used in each of the steps [1] and [2] is not particularly limited, and for example, a kneader, a two-roll, a Banbury mixer (continuous kneader), a pressurized kneader, or the like can be used.

Further, in this step [2], a reaction inhibitor such as 1-ethynylcyclohexanol may be added to the kneaded product. As a result, even if the temperature of the kneaded product is set to a relatively high temperature, the progress of the reaction between the vinyl group-containing organopolysiloxane (A) and the organohydrogenpolysiloxane (B) is more accurately prevented or suppressed. be able to.

[3] Next, a silicone rubber is formed by curing the silicone rubber-based curable composition.

In the present embodiment, the curing step of the silicone rubber-based curable resin composition is, for example, heating (primary curing) at 100 to 250 ° C. for 1 to 30 minutes and then post-baking (secondary) at 200 ° C. for 1 to 4 hours. It is done by curing).

Through the above steps, a silicone rubber made of a cured product of a silicone rubber-based curable resin composition can be obtained.

[3] Next, the insulating paste can be obtained by dissolving the silicone rubber-based curable composition obtained in the step [2] in a solvent.
Further, [3] Next, the silicone rubber-based curable composition obtained in the step [2] is dissolved in a solvent, and a conductive filler is added to obtain a conductive paste.

(solvent)
Conductive pastes and insulating pastes contain solvents.
As the solvent, various known solvents can be used, and for example, a high boiling point solvent can be included. These may be used alone or in combination of two or more.

The lower limit of the boiling point of the high boiling point solvent is, for example, 100 ° C. or higher, preferably 130 ° C. or higher, and more preferably 150 ° C. or higher. This makes it possible to improve printing stability such as screen printing. On the other hand, the upper limit of the boiling point of the high boiling point solvent is not particularly limited, but may be, for example, 300 ° C. or lower, 290 ° C. or lower, or 280 ° C. or lower. As a result, excessive heat history at the time of wiring formation can be suppressed, so that damage to the base and the shape of the wiring formed of the conductive paste can be maintained satisfactorily.

The solvent can be appropriately selected from the viewpoint of solubility and boiling point of the silicone rubber-based curable resin composition. For example, an aliphatic hydrocarbon having 5 or more and 20 or less carbon atoms, preferably 8 or more and 18 or less carbon atoms. It is possible to contain an aliphatic hydrocarbon of the above, more preferably an aliphatic hydrocarbon having 10 or more and 15 or less carbon atoms.

Examples of the solvent include aliphatic hydrocarbons such as pentane, hexane, cyclohexane, heptane, methylcyclohexane, ethylcyclohexane, octane, decane, dodecane and tetradecane; benzene, toluene, ethylbenzene, xylene, mecitylene and tri. Aromatic hydrocarbons such as fluoromethylbenzene and benzotrifluoride; diethyl ether, diisopropyl ether, dibutyl ether, cyclopentylmethyl ether, cyclopentyl ethyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol monobutyl ether, dipropylene Ethers such as glycol dimethyl ether, dipropylene glycol methyl-n-propyl ether, 1,4-dioxane, 1,3-dioxane, tetrahydrofuran; dichloromethane, chloroform, 1,1-dichloroethane, 1,2-dichloroethane, 1,1 , 1-Trichloroethane, haloalkanes such as 1,1,2-trichloroethane; carboxylic acid amides such as N, N-dimethylformamide, N, N-dimethylacetamide; Esters and the like can be exemplified. These may be used alone or in combination of two or more.
The solvent used here may be appropriately selected from the solvents capable of uniformly dissolving or dispersing the composition components in the above conductive paste.

The upper limit of the polarity term (δ _p ) of the Hansen solubility parameter of the solvent is, for example, 10 MPa ^1/2 or less, preferably 7 MPa ^1/2 or less, and more preferably 5.5 MPa ^1/2 or less. It can contain a first solvent. This makes it possible to improve the dispersibility and solubility of the silicone rubber-based curable resin composition in the paste. The lower limit of the polarity term (δ _p ) of the first solvent is not particularly limited, but may be, for example, 0 Pa ^1/2 or more.

The upper limit of the hydrogen bond term (δ _h ) of the Hansen solubility parameter in the first solvent is, for example, 20 MPa ^1/2 or less, preferably 10 MPa ^1/2 or less, and more preferably 7 MPa ^1/2 or less. be. This makes it possible to improve the dispersibility and solubility of the silicone rubber-based curable resin composition in the paste. The lower limit of the hydrogen bond term (δ _h ) of the first solvent is not particularly limited, but may be, for example, 0 Pa ^1/2 or more.

The Hansen solubility parameter (HSP) is an index of the solubility of a substance in another substance. HSP represents solubility as a three-dimensional vector. This three-dimensional vector can be typically represented by a dispersion term (δ _d ), a polarity term (δ _p ), and a hydrogen bond term (δ _h ). And it can be judged that those having similar vectors have high solubility. It is possible to judge the similarity of the vector by the distance (HSP distance) of the Hansen solubility parameter.

The Hansen solubility parameter (HSP value) used in the present specification can be calculated using software called HSPiP (Hansen Solubility Parameter in Practice). Here, the computer software HSPiP developed by Hansen and Abbott includes a function for calculating the HSP distance and a database describing various resin and solvent or non-solvent Hansen parameters.
The solubility of each resin in a pure solvent and a mixed solvent of a good solvent and a poor solvent was investigated, and the results were input to the HSPiP software. Is calculated.

As the solvent of the present embodiment, for example, an elastomer or a solvent having a small difference in HSP distance, polarity term and hydrogen bond term between the constituent unit constituting the elastomer and the solvent can be selected.

The lower limit of the viscosity of the conductive paste and / or the insulating paste when measured at a room temperature of 25 ° C. and a shear rate of 20 [1 / s] is, for example, 1 Pa · s or more, preferably 5 Pa · s or more. , More preferably 10 Pa · s or more. Thereby, the film forming property can be improved. In addition, the shape retention can be improved even when a thick film is formed. On the other hand, the upper limit of the viscosity of the conductive paste and / or the insulating paste at room temperature of 25 ° C. is, for example, 100 Pa · s or less, preferably 90 Pa · s or less, and more preferably 80 Pa · s or less. .. Thereby, the printability in the paste can be improved.

At room temperature 25 ° C., the viscosity when measured at a shear rate of 1 [1 / s] is η1, the viscosity when measured at a shear rate of 5 [1 / s] is η5, and the viscosity index is the viscosity ratio (η1 / η5). ).
At this time, the lower limit of the thixotropic index of the conductive paste and / or the insulating paste is, for example, 1.0 or more, preferably 1.1 or more, and more preferably 1.2 or more. As a result, the shape of the wiring obtained by the printing method can be stably maintained. On the other hand, the upper limit of the thixotropic index of the conductive paste and / or the insulating paste is, for example, 3.0 or less, preferably 2.5 or less, and more preferably 2.0 or less. This makes it possible to improve the printability of the paste.

The content of the silicone rubber-based curable composition in the insulating paste is preferably 10% by mass or more, more preferably 15% by mass or more, and 20% by mass or more in 100% by mass of the insulating paste. Is more preferable. The content of the silicone rubber-based curable composition in the insulating paste is preferably 50% by mass or less, more preferably 40% by mass or less, and 35% by mass in 100% by mass of the insulating paste. It is more preferably% or less.

(Conductive filler)
As the conductive filler, a known conductive material may be used, but metal powder (G) may be used.
The metal constituting the metal powder (G) is not particularly limited, but for example, copper, silver, gold, nickel, tin, lead, zinc, bismuth, antimon, or at least one kind of metal powder alloyed with these. Alternatively, two or more of these can be included.
Of these, the metal powder (G) preferably contains silver or copper, that is, silver powder or copper powder, because of its high conductivity and high availability.
As these metal powders (G), those coated with other kinds of metals can also be used.

In the present embodiment, the shape of the metal powder (G) is not limited, but conventionally used metal powders (G) such as dendritic powder, spherical powder, and shard-shaped metal powder can be used. Among these, phosphorus flake-shaped metal powder (G) may be used.

Further, the particle size of the metal powder (G) is not limited, but for example, the average particle size _D50 is preferably 0.001 μm or more, more preferably 0.01 μm or more, still more preferably 0.1 μm or more. be. The particle size of the metal powder (G) is, for example, preferably 1,000 μm or less, more preferably 100 μm or less, and further preferably 20 μm or less with an average particle size _D50 .
By setting the average particle size D ₅₀ in such a range, it is possible to exhibit appropriate conductivity as a silicone rubber.
The particle size of the metal powder (G) is determined by, for example, observing a conductive paste or a silicone rubber formed by using the conductive paste with a transmission electron microscope or the like, performing image analysis, and arbitrarily selecting a metal. It can be defined as the average value of 200 pieces of flour.

The content of the conductive filler in the conductive paste is preferably 30% by mass or more, more preferably 40% by mass or more, and more preferably 50% by mass or more in 100% by mass of the conductive paste. More preferred. The content of the conductive filler in the conductive paste is preferably 85% by mass or less, more preferably 75% by mass or less, and 65% by mass or less in 100% by mass of the conductive paste. Is even more preferable.
By setting the content of the conductive filler to the above lower limit value or more, the silicone rubber can have an appropriate conductive property. Further, by setting the content of the conductive filler to the above upper limit value or less, the silicone rubber can have appropriate flexibility.

The content of the silicone rubber-based curable composition in the conductive paste is preferably 1% by mass or more, more preferably 3% by mass or more, and 5% by mass or more in 100% by mass of the conductive paste. Is more preferable. The content of the silicone rubber-based curable composition in the conductive paste is preferably 25% by mass or less, more preferably 20% by mass or less, and 15% by mass in 100% by mass of the conductive paste. It is more preferably% or less.
By setting the content of the silicone rubber-based curable composition to the above lower limit value or more, the silicone rubber can have appropriate flexibility. Further, by setting the content of the silicone rubber-based curable composition to the above upper limit value or less, the mechanical strength of the silicone rubber can be improved.

The lower limit of the content of the silica particles (C) in the conductive paste is, for example, 1% by mass or more, preferably 3% by mass or more, based on 100% by mass of the total amount of the silica particles (C) and the conductive filler. It is more preferably 5% by mass or more. Thereby, the mechanical strength of the silicone rubber can be improved. On the other hand, the upper limit of the content of the silica particles (C) in the conductive paste is preferably 20% by mass or less in the total amount of 100% by mass of the silica particles (C) and the conductive filler. Is 15% by mass or less, more preferably 10% by mass or less. This makes it possible to balance the elastic electrical characteristics and the mechanical strength of the silicone rubber.

The content of the conductive filler in the conductive cured product obtained by curing the conductive paste constituting the wiring such as the lower wiring and the upper wiring is preferably 65% by mass or more in 100% by mass of the conductive cured product. It is more preferably 70% by mass or more, and further preferably 75% by mass or more. The content of the conductive filler in the conductive cured product is preferably 95% by mass or less, more preferably 90% by mass or less, and 85% by mass or less in 100% by mass of the conductive cured product. Is more preferable.
By setting the content of the conductive filler to the above lower limit value or more, the silicone rubber can have an appropriate conductive property. Further, by setting the content of the conductive filler to the above upper limit value or less, the silicone rubber can have appropriate flexibility.

In the present embodiment, an insulating elastomer can be obtained by curing the above-mentioned silicone rubber-based curable composition.
Further, using the above-mentioned silicone rubber-based curable composition, an insulating elastomer having a tube structure can be obtained by various molding methods such as extrusion molding and compression molding.
Further, an insulating elastomer can be obtained by forming a coating film using various coating means such as printing, spraying, and dipping with an insulating paste and drying the coating film.
Similar to the insulating paste, the conductive paste is used to form a coating film using various coating means such as printing, spraying, and dipping, and the coating film is dried to obtain a conductive elastomer.

The method for manufacturing a fluid-driven actuator of the present embodiment includes a step of forming a tube member using an insulating elastomer and at least one of the inner surface and the outer surface of the tube member, in part or in whole. It comprises a step of forming an elastic conductive layer using a conductive paste. As a result, a fluid-driven actuator including a tube member that deforms when a fluid flows in and an elastic conductive layer laminated on the surface of the tube member can be obtained.

As a specific example of the manufacturing process of the actuator 100, for example, a silicone rubber-based curable composition is used and extruded into a tube shape using an extruder to obtain a tube member 10 containing an insulating elastomer. By applying the conductive paste on the inner surface and / or the outer surface of the obtained tube member 10 and drying it, the conductive elastomer is contained on the inner surface and / or the outer surface of the tube member 10. The actuator 100 in which the elastic conductive layer 30 is laminated can be formed.

The upper limit of the durometer hardness A of the insulating elastomer is not particularly limited, but may be, for example, 80 or less, preferably 70 or less, and more preferably 65 or less. This makes it possible to balance the cured physical properties of the silicone rubber. As a result, it is possible to enhance the deformability of the silicone rubber, which facilitates deformation such as bending and stretching.
On the other hand, the lower limit of the durometer hardness A is, for example, 40 or more, preferably 42 or more, and more preferably 48 or more. As a result, deformation due to external stress can be suppressed. In addition, the friction durability and mechanical strength of silicone rubber can be enhanced.

(Measurement procedure of durometer hardness A)
A sheet-shaped test piece was prepared using a cured product of a silicone rubber-based curable composition, and the durometer hardness A of the obtained sheet-shaped test piece was measured at 25 ° C. in accordance with JIS K6253 (1997). do.

The lower limit of the tensile strength of the insulating elastomer is, for example, 5.0 MPa or more, preferably 6.0 MPa or more, and more preferably 7.0 MPa or more. As a result, it is possible to realize a structure having excellent elongation durability during repeated expansion and deformation.
On the other hand, the upper limit of the tensile strength is not particularly limited, but may be, for example, 25 MPa or less. This makes it possible to balance various characteristics of the silicone rubber.

(Procedure for measuring tensile strength)
A dumbbell-shaped No. 3 test piece was prepared in accordance with JIS K6251 (2004) using a cured product of a silicone rubber-based curable composition, and the tensile strength of the dumbbell-shaped No. 3 test piece at 25 ° C. was determined. Measure.

The lower limit of the elongation at break of the insulating elastomer is, for example, 500% or more, preferably 600% or more, and more preferably 700% or more. This makes it possible to improve the elongation durability at the time of repeated elongation deformation.
On the other hand, the upper limit of the elongation at break is not particularly limited, but may be, for example, 2000% or less, or 1800% or less. This makes it possible to balance various characteristics of the silicone rubber.

(Measurement conditions for breaking elongation)
A dumbbell-shaped No. 3 test piece was prepared in accordance with JIS K6251 (2004) using a cured product of a silicone rubber-based curable composition, and the obtained dumbbell-shaped No. 3 test piece was prepared at 25 ° C. Measure the elongation at break. The breaking elongation is calculated by [distance between marked lines (mm)] ÷ [distance between initial marked lines (20 mm)] × 100.

The lower limit of the tear strength of the insulating elastomer is, for example, 25 N / mm or more, preferably 28 N / mm or more, more preferably 30 N / mm or more, still more preferably 33 N / mm or more, still more preferably 34 N / mm or more. This makes it possible to improve the durability of the silicone rubber during repeated use. In addition, the scratch resistance and mechanical strength of the silicone rubber can be improved.
On the other hand, the upper limit of the tear strength is not particularly limited, but may be, for example, 80 N / mm or less, or 70 N / mm or less. This makes it possible to balance various characteristics of the silicone rubber.

(Procedure for measuring tear strength)
A crescent-shaped test piece is prepared according to JIS K6252 (2001) using a cured product of a silicone rubber-based curable composition, and the tear strength of the obtained crescent-shaped test piece is measured at 25 ° C.

In the present embodiment, for example, by appropriately selecting the type and blending amount of each component contained in the silicone rubber-based curable composition, the method for preparing the silicone rubber-based curable composition, and the like, the above-mentioned hardness, tensile strength, and the like can be obtained. It is possible to control the breaking elongation and the tear strength. Among these, for example, the type and blending ratio of the resin constituting the silicone rubber, the cross-linking density of the resin, the cross-linking structure, etc. are appropriately controlled, and the blending ratio of the inorganic filler and the bond of the inorganic filler with the rubber are improved. To be allowed, to use the first vinyl group-containing linear organopolysiloxane (A1-1) having a vinyl group content of 0.4 mol% or less, to use a silane coupling agent having a vinyl group, silica. Appropriate adjustment of the content of the particles (C) and the content of the silane coupling agent can be mentioned as factors for setting the hardness, tensile strength, breaking elongation, and tear strength within the desired numerical ranges.

The actuator system of this embodiment will be described.
An example of the configuration of the actuator system includes the above-mentioned fluid-driven actuator, a measuring unit for measuring changes in electrical characteristics, and a fluid pressure control unit for adjusting the pressure of the fluid flowing into the tube member.

The measuring unit measures changes in electrical characteristics such as changes in the resistance value of the stretchable conductive layer and changes in the capacitance of the capacitor formed by the stretchable conductive layer via the stretchable conductive layer provided in the fluid-driven actuator. ..

The fluid pressure control unit detects the deformed state of the tube member based on the change in the electrical characteristics measured by the measuring unit, and adjusts the pressure of the fluid flowing into the tube member according to the deformed state of the tube member. .. For example, the fluid pressure control unit can increase or decrease the pressure so that the degree of expansion of the tube member is within a desired range based on the relationship between the resistance value of the elastic conductive layer and the deformed state of the tube member. This makes it possible to more accurately control the degree of deformation of the tube member even after the tube member is repeatedly deformed such as expansion and contraction.
Information regarding the relationship between the change in electrical characteristics and the deformed state of the tube member as described above can be obtained and stored in advance.

Each component included in the measuring unit and the fluid pressure control unit may be configured by dedicated hardware or may be realized by executing a software program suitable for each component. Each component may be realized by a program execution unit such as a CPU or a processor reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.

Although the embodiments of the present invention have been described above, these are examples of the present invention, and various configurations other than the above can be adopted. Further, the present invention is not limited to the above-described embodiment, and modifications, improvements, and the like to the extent that the object of the present invention can be achieved are included in the present invention.

Hereinafter, the present invention will be described in detail with reference to Examples, but the present invention is not limited to the description of these Examples.
The raw material components shown in Table 1 are shown below.
(A1-1): First vinyl group-containing linear organopolysiloxane: Vinyl group-containing dimethylpolysiloxane synthesized by the following synthesis scheme 1 (structure represented by the above formula (1-1)).
(A1-2): Second vinyl group-containing linear organopolysiloxane: Vinyl group-containing dimethylpolysiloxane synthesized by the following synthesis scheme 2 ( ^R1 and R having a structure represented by the above formula (1-1)). Structure in which ² is a vinyl group)

(Organohydrogenpolysiloxane (B))
(B-1): Organohydrogenpolysiloxane: Momentive, "TC-25D"

(Silica particles (C))
(C): Silica fine particles (particle size 7 nm, specific surface area 300 m ² / g), manufactured by Nippon Aerosil Co., Ltd., "AEROSIL300"

(Silane Coupling Agent (D))
(D-1): Hexamethyldisilazane (HMDZ), manufactured by Gelest, "HEXAMETHYLDISILAZANE (SIH6110.1)".
(D-2) Divinyltetramethyldisilazane, manufactured by Gelest, "1,3-DIVINYLTRAMETHYLDISILAZANE (SID4612.0)"

(Platinum or platinum compound (E))
(E-1): Platinum compound (manufactured by Momentive, trade name "TC-25A")

(Water (F))
(F): Pure water

(Metal powder (G))
(G1): Silver powder, manufactured by Tokuriki Kagaku Kenkyusho, trade name "TC-101", median diameter d ₅₀ : 8.0 μm, aspect ratio 16.4, average major axis 4.6 μm

(Synthesis of vinyl group-containing organopolysiloxane (A))
[Synthesis scheme 1: Synthesis of first vinyl group-containing linear organopolysiloxane (A1-1)]
The first vinyl group-containing linear organopolysiloxane (A1-1) was synthesized according to the following formula (5).
That is, 74.7 g (252 mmol) of octamethylcyclotetrasiloxane and 0.1 g of potassium silicate were placed in a 300 mL separable flask having a cooling tube and a stirring blade substituted with Ar gas, heated, and heated at 120 ° C. for 30 minutes. Stirred. At this time, an increase in viscosity was confirmed.
Then, the temperature was raised to 155 ° C., and stirring was continued for 3 hours. Then, after 3 hours, 0.1 g (0.6 mmol) of 1,3-divinyltetramethyldisiloxane was added, and the mixture was further stirred at 155 ° C. for 4 hours.
After 4 hours, it was diluted with 250 mL of toluene and then washed 3 times with water. The organic layer after washing was washed with 1.5 L of methanol several times for reprecipitation purification, and the oligomer and the polymer were separated. The obtained polymer was dried under reduced pressure at 60 ° C. overnight to obtain a first vinyl group-containing linear organopolysiloxane (A1-1) ⁽ Mn = 2,2 × 105, Mw = 4.8 ×). 10 ⁵ ). The vinyl group content calculated by 1 H-NMR spectrum measurement was 0.04 mol%.

[Synthesis scheme 2: Synthesis of second vinyl group-containing linear organopolysiloxane (A1-2)]
In the above synthesis step (A1-1), in addition to 74.7 g (252 mmol) of octamethylcyclotetrasiloxane, 2,4,6,8-tetramethyl 2,4,6,8-tetravinylcyclotetrasiloxane 0. By performing the same as the synthesis step of (A1-1) except that 86 g (2.5 mmol) was used, a second vinyl group-containing linear organopolysiloxane (as shown in the following formula (6)) ( A1-2) was synthesized. (Mn = 2.3 × 105, Mw = 5.0 × 105). The vinyl group content calculated by 1 H-NMR spectrum measurement was 0.93 mol%.

(Preparation of silicone rubber-based curable composition)
The silicone rubber-based curable compositions of Samples 1 and 2 were prepared according to the following procedure.
First, a mixture of 90% vinyl group-containing organopolysiloxane (A), silane coupling agent (D) and water (F) is kneaded in advance at the ratio shown in Table 1 below, and then silica particles (silica particles ()) are added to the mixture. C) was added and further kneaded to obtain a kneaded product (silicone rubber compound).
Here, the kneading after the addition of the silica particles (C) is carried out in the first step of kneading under a nitrogen atmosphere at 60 to 90 ° C. for 1 hour for the coupling reaction, and the removal of the by-product (ammonia). Therefore, it is carried out by going through the second step of kneading under a reduced pressure atmosphere under the condition of 160 to 180 ° C. for 2 hours, and then cooling, and the remaining 10% of the vinyl group-containing organopolysiloxane (A) is added twice. It was added separately and kneaded for 20 minutes.
Subsequently, organohydrogenpolysiloxane (B), platinum or platinum compound (E) was added to 100 parts by weight of the obtained kneaded product (silicone rubber compound) at the ratio shown in Table 2 below, and kneaded with a roll. Then, a silicone rubber-based curable composition was obtained.

(Preparation of conductive paste)
The obtained 13.7 parts by weight of the silicone rubber-based curable composition of Sample 2 was immersed in 31.8 parts by weight of tetradecane (solvent), and subsequently stirred with a rotation / revolution mixer to 54.5 parts by weight. After adding the metal powder (G1) of No. 1 and kneading with three rolls, a conductive paste was obtained.

(Manufacturing of fluid-driven actuator)
Using the silicone rubber-based curable composition of Sample 1 or Sample 2, extrusion molding was performed into a tube shape using an extruder to obtain a silicone rubber tube member having the dimensions shown in Table 2.
The obtained conductive paste was applied on the circumference of the outer surface of the obtained silicone rubber tube member to draw a pattern having a width of 1 mm and a length of 20 mm, and this was applied at 200 ° C. for 4 hours. It was heat-cured under the conditions to form a conductive silicone rubber sensor portion having a thickness of 50 μm.
As a result, FIG. 2 shows a tube member 10 made of an insulating elastomer and a stretchable conductive layer 30 (stretchable sensor unit) made of a conductive elastomer laminated on the outer surface of the tube member 10. A tube with a conductive sensor unit (fluid-driven actuator) was obtained.

<Tube expansion test and strain sensing evaluation>
In the tube expansion test in which caps are attached to both ends of the obtained tube with a conductive sensor part and pressure is applied to the inside of the tube from the cap on one side to inject air, when the pressure for injecting air is gradually increased, the time passes. Therefore, the outer peripheral length (mm) on the outer surface of the tube and the resistance value (Ω) of the elasticity sensor portion from the wiring connected to both ends were measured.
The outer peripheral length was measured using a peripheral gauge, and the resistance value was measured using an electric resistance measuring instrument. In addition, the outer circumference change rate is set to [(the outer circumference length of the tube when pressure is applied-the outer circumference length of the initial tube without pressure application) / (the outer circumference length of the initial tube without pressure application)]. Calculated based on × 100. The results in the tubes of Examples 1 and 2 are shown in Table 3. The relationship between the pressure and the outer circumference change rate and the pressure and the resistance value in Table 3 were plotted, respectively, and the graphs shown in FIGS. 4 and 5 were created.
From FIGS. 4 and 5, it is shown that the resistance value of the stretchable sensor portion also fluctuates according to the fluctuation of the outer peripheral change rate of the tube, that is, the degree of deformation of the tube, and the tube with the conductive sensor portion in each embodiment shows. It turned out that strain sensing is possible.

＜変形耐久性＞
実施例１，２の導電性センサ部付チューブを用いて、０ＭＰａ→０．０６ＭＰａ→０ＭＰａの繰り返し膨張を１０回繰り返しおこなう条件で、上記のチューブ膨張試験を実施した。その後、チューブと導電性センサ部の間に剥離がないこと、導電性センサ部の抵抗値が測定可能であることを確認した。

<Deformation durability>
Using the tubes with the conductive sensor part of Examples 1 and 2, the above tube expansion test was carried out under the condition that repeated expansion of 0 MPa → 0.06 MPa → 0 MPa was repeated 10 times. After that, it was confirmed that there was no peeling between the tube and the conductive sensor portion and that the resistance value of the conductive sensor portion could be measured.

<Expansion controllability>
Using the tube with the conductive sensor part of Example 2, a pressure of 0.12 MPa was applied (first time), air was removed, and then a pressure of 0.12 MPa was applied again (second time). A tube expansion test was performed. The rate of change in the outer circumference of the tube was about 10% for the first time and about 12% for the second time.
Immediately after applying the second pressure, the pressure is adjusted so that the second resistance value of the conductive sensor unit becomes the same as the first resistance value, so that the outer circumference changes the first time even after the second time. It was possible to control the outer circumference change rate to the same level as the rate.

<Easy expansion>
A predetermined pressure was applied to the obtained tube with a conductive sensor portion and the tube on which the conductive sensor portion was not formed, and air was injected to evaluate the degree of expansion. In each case, it was confirmed that the outer circumference change rate at the same applied pressure was about the same.

(Making silicone rubber for evaluation)
The silicone rubber-based curable composition obtained in Sample 1 or Sample 2 was pressed at 170 ° C. and 10 MPa for 10 minutes to form a sheet having a thickness of 1 mm, and was first cured. Subsequently, it was heated at 200 ° C. for 4 hours for secondary curing. From the above, a sheet-shaped silicone rubber (a cured product of a silicone rubber-based curable composition) was obtained.

The obtained sheet-shaped silicone rubber (sheet-shaped elastomer) was evaluated based on the following evaluation items. The results are shown in Table 4.
Tensile strength and elongation at break were measured with three samples, and the average value of the three was used as the measured value.
The tear strength was measured with 5 samples, and the average value of 5 was used as the measured value.
The hardness was measured at n = 5, and the average value was used as the measured value. The average value of each is shown in the table.
In the table, ">" indicates that the failure was not reached due to the stroke limit of the tensile tester.

<Hardness: Durometer hardness>
Six sheets of the obtained 1 mm-thick sheet-shaped silicone rubber were laminated to prepare a 6 mm test piece. The hardness of the obtained test piece was measured at 25 ° C. according to JIS K6253 (1997) with a type A durometer.

<Tear strength>
Using the obtained sheet-shaped silicone rubber having a thickness of 1 mm, a crescent-shaped test piece was prepared in accordance with JIS K6252 (2001), and the obtained crescent-shaped test piece was subjected to tear strength (TS) at 25 ° C. Was measured. The unit is N / mm.

<Breaking elongation>
Using the obtained sheet-shaped silicone rubber having a thickness of 1 mm, a dumbbell-shaped No. 3 test piece was prepared in accordance with JIS K6251 (2004), and the obtained dumbbell-shaped No. 3 test piece was subjected to 25 ° C. The breaking elongation in. The breaking elongation was calculated by [distance between marked lines (mm)] ÷ [distance between initial marked lines (20 mm)] × 100. The unit is%.

<Tensile strength>
Using the obtained sheet-shaped silicone rubber having a thickness of 1 mm, a dumbbell-shaped No. 3 test piece was prepared in accordance with JIS K6251 (2004), and the obtained dumbbell-shaped No. 3 test piece was subjected to 25 ° C. The tensile strength in was measured. The unit is MPa.

It was shown that the tubes (fluid-driven actuators) with the conductive sensor part of Examples 1 and 2 are capable of strain sensing and have excellent deformation durability.

10 Tube member 12 Space 20 Cap 22 Hole 30 Elastic conductive layer 100 Actuator

Claims (17)

A tube member that deforms when a fluid flows in,
A stretchable conductive layer laminated on a part or the whole of at least one of the inner surface and the outer surface of the tube member is provided.
By measuring the change in electrical characteristics via the elastic conductive layer, the deformed state of the tube member can be detected.
Fluid driven actuator. The fluid-driven actuator according to claim 1.
The tube member is made of an insulating elastomer.
A fluid-driven actuator in which the stretchable conductive layer is made of a conductive elastomer. The fluid-driven actuator according to claim 2.
A fluid-driven actuator having a tear strength of 25 N / mm or more of the insulating elastomer measured at 25 ° C. in accordance with JIS K6252 (2001). The fluid-driven actuator according to claim 2 or 3.
A fluid-driven actuator having a breaking elongation of 500% or more of the insulating elastomer measured at 25 ° C. according to JIS K6251 (2004). The fluid-driven actuator according to any one of claims 2 to 4.
A fluid-driven actuator having a tensile strength of 5.0 MPa or more of the insulating elastomer measured at 25 ° C. in accordance with JIS K6251 (2004). The fluid-driven actuator according to any one of claims 2 to 5.
A fluid-driven actuator in which at least one of the insulating elastomer and the conductive elastomer contains a non-conductive filler. The fluid-driven actuator according to claim 6.
A fluid-driven actuator in which the non-conductive filler contains silica particles. The fluid-driven actuator according to any one of claims 2 to 7.
A fluid-driven actuator in which the conductive elastomer contains a conductive filler. The fluid-driven actuator according to claim 8.
A fluid-driven actuator in which the conductive filler comprises one or more selected from the group consisting of a metal-based filler, a carbon-based filler, a metal oxide filler, and a metal-plated filler. The fluid-driven actuator according to any one of claims 2 to 9.
A fluid-driven actuator in which the insulating elastomer and the conductive elastomer are composed of a cured product of a silicone rubber-based curable composition containing the same type of vinyl group-containing organopolysiloxane. The fluid-driven actuator according to any one of claims 1 to 10.
A fluid-driven actuator in which an elastic cover layer is formed on the surface of the elastic conductive layer. The fluid-driven actuator according to any one of claims 1 to 11.
A fluid-driven actuator in which the stretchable conductive layer is formed on the inner surface of the tube member. The fluid-driven actuator according to any one of claims 1 to 12.
A fluid-driven actuator having a sleeve on the outer peripheral surface of the tube member. The fluid-driven actuator according to any one of claims 1 to 13.
When the fluid flows in, the tube member expands in the radial direction and contracts in the axial direction.
A fluid-driven actuator that can detect the expanded state of the tube member. The fluid-driven actuator according to any one of claims 1 to 14.
A fluid-driven actuator in which the change in electrical characteristics includes at least one of a change in the resistance value of the stretchable conductive layer and a change in the capacitance of the tube member sandwiched between the stretchable conductive layers. The fluid-driven actuator according to any one of claims 1 to 15.
A measuring unit that measures changes in electrical characteristics,
Fluid pressure control that detects the deformed state of the tube member based on the measured change in the electrical characteristics and adjusts the pressure of the fluid flowing into the tube member according to the deformed state of the tube member. With a department,
Actuator system. A method for manufacturing a fluid-driven actuator, comprising: a tube member that deforms when a fluid flows in, and an elastic conductive layer laminated on the surface of the tube member.
The process of forming the tube member using an insulating elastomer, and
Manufacture of a fluid-driven actuator comprising a step of forming the stretchable conductive layer using a conductive paste on a part or the whole of at least one of the inner surface and the outer surface of the tube member. Method.

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