JP2022089842A5 - Metal plate manufacturing method and mask manufacturing method - Google Patents

Claims (9)

A method for manufacturing a metal plate having a longitudinal direction, which is used for manufacturing a mask by forming a plurality of through holes, comprising:
The through holes of the mask are formed by etching the elongated metal plate being conveyed,
The method for manufacturing the metal plate comprises:
A rolling step of rolling a base material to obtain the metal plate;
a cutting step of cutting off a predetermined range of one end and the other end in the width direction of the metal plate;
a calculation step of calculating the slope of the steepness of the metal plate after the cutting step;
A sorting step of sorting the metal plate based on the calculated slope of the steepness ,
In the width direction of the metal plate after the cutting step, the metal plate has a central portion, a one end portion positioned closer to one end side in the width direction of the metal plate than the central portion, and a portion closer to the central portion than the central portion. and the other end portion located on the other end side in the width direction of the metal plate,
When the percentage of the height of the wave shape of the metal plate with respect to the period in the longitudinal direction of the wave shape of the metal plate calculated in the calculation step is referred to as the steepness, the steepness at the first position in the width direction and the second A method of manufacturing a metal plate, wherein a value obtained by dividing a difference between the steepness at a position and the distance between the first position and the second position is the inclination of the steepness. 2. The method of manufacturing a metal plate according to claim 1, wherein said mask manufactured from said metal plate is a vapor deposition mask used for vapor deposition in a desired pattern. 3. The method of manufacturing a metal plate according to claim 1, wherein said mask is allocated to said central portion. The method of manufacturing a metal plate according to any one of claims 1 to 3, wherein the one end portion and the other end portion occupy an equal proportion of the width of the metal plate after the cutting step. The range on one end side and the range on the other end side of the metal plate to be cut in the cutting step are determined based on the result of the step of observing the wavy shape of the metal plate, which is performed before the cutting step. The method for manufacturing a metal plate according to any one of claims 1 to 4. An annealing step of annealing the metal plate obtained by the rolling step to remove internal stress of the metal plate,
The method for manufacturing a metal plate according to any one of claims 1 to 5, wherein the annealing step is performed while stretching the rolled base material in the longitudinal direction. The method for manufacturing a metal plate according to any one of claims 1 to 6, wherein the base material is composed of an iron alloy containing nickel. The method for manufacturing a metal plate according to any one of claims 1 to 7, wherein the absolute value of the slope of the steepness is 6%/m or less in the central portion. A method for manufacturing a mask having a plurality of through holes,
A step of preparing a metal plate manufactured by the method for manufacturing a metal plate according to any one of claims 1 to 8;
a resist pattern forming step of forming a resist pattern on the metal plate;
and an etching step of etching a region of the metal plate that is not covered with the resist pattern to form a concave portion defining the through hole in the metal plate.