JP2022075127A - 半導体ウエーハの評価装置、及び、半導体ウエーハの製造方法 - Google Patents
半導体ウエーハの評価装置、及び、半導体ウエーハの製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 183
- 238000011156 evaluation Methods 0.000 title claims abstract description 83
- 238000004519 manufacturing process Methods 0.000 title claims description 52
- 230000007547 defect Effects 0.000 claims abstract description 160
- 239000013078 crystal Substances 0.000 claims abstract description 59
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052753 mercury Inorganic materials 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 235000012431 wafers Nutrition 0.000 claims description 155
- 238000000034 method Methods 0.000 claims description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 16
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 230000003071 parasitic effect Effects 0.000 claims description 10
- 238000004611 spectroscopical analysis Methods 0.000 claims description 4
- 230000001052 transient effect Effects 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 40
- 229910010271 silicon carbide Inorganic materials 0.000 description 40
- 239000002994 raw material Substances 0.000 description 15
- 238000009826 distribution Methods 0.000 description 8
- 239000011148 porous material Substances 0.000 description 7
- 239000000523 sample Substances 0.000 description 7
- 238000005314 correlation function Methods 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 238000003949 trap density measurement Methods 0.000 description 1
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Abstract
Description
非破壊で評価することが可能なため、製品そのものを検査することもできる。
10 寄生インダクタンス、及び、寄生容量を補償する手段
11 半導体ウエーハ
12 制御手段
21 評価装置
22 テーブル
23 プローブ手段
24 接触子
25 パルス電源
26 容量計
27 評価手段
29 光照射手段
Claims (9)
- 評価対象である半導体ウエーハに、室温で液体とされる金属(ショットキー電極)が接触する接触子と、
寄生インダクタンス、及び、寄生容量を補償する手段を介して、前記接触子に電圧を印加する電源手段と、
前記電源手段からの電圧の印加状態を間欠的に行う印加制御手段と、
前記印加制御手段により電圧が間欠的に印加された際の半導体ウエーハの静電容量の状況に基づいて、半導体ウエーハの点欠陥の状態を評価する評価手段とを備えた
ことを特徴とする半導体ウエーハの評価装置。 - 請求項1に記載の半導体ウエーハの評価装置において、
室温で液体とされる金属は、水銀である
ことを特徴とする半導体ウエーハの評価装置。 - 請求項2に記載の半導体ウエーハの評価装置において、
点欠陥は、室温付近で信号がピークとなる欠陥であり、
点欠陥の状態は、点欠陥の種類、密度である
ことを特徴とする半導体ウエーハの評価装置。 - 請求項1から請求項3のいずれか一項に記載の半導体ウエーハの評価装置において、
半導体ウエーハの平面方向に対し、直径150mm以上の範囲で、前記接触子を相対的に移動させる移動手段を備えた
ことを特徴とする半導体ウエーハの評価装置。 - 請求項1から請求項4のいずれか一項に記載の半導体ウエーハの評価装置において、
前記印加制御手段は、印加電圧を変化させる機能を有し、
前記評価手段は、
印加電圧が高くされた際に、深さ方向に深い場所での点欠陥の状態を評価する
ことを特徴とする半導体ウエーハの評価装置。 - 請求項1から請求項5のいずれか一項に記載の半導体ウエーハの評価装置において、
半導体ウエーハのバンドギャップ以上の光を照射する光照射手段を備え、
前記評価手段では、
少数キャリア過渡分光により欠陥が評価される
ことを特徴とする半導体ウエーハの評価装置。 - 請求項1から請求項6のいずれか一項に記載の半導体ウエーハの評価装置において、
前記半導体ウエーハは、SiC単結晶である
ことを特徴とする半導体ウエーハの評価装置。 - 請求項7に記載の半導体ウエーハの評価装置において、
前記SiC単結晶の中の点欠陥は、炭素空孔起因であるZ1/2センターである
ことを特徴とする半導体ウエーハの評価装置。 - 請求項1から請求項8のいずれか一項に記載の半導体ウエーハの評価装置を用い、得られた点欠陥の情報に基づいて半導体製造手段による成膜の条件を調整・制御することで半導体ウエーハを製造することを特徴とする半導体ウエーハの製造方法。
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JP5192661B2 (ja) * | 2006-05-29 | 2013-05-08 | 一般財団法人電力中央研究所 | 炭化珪素半導体素子の製造方法 |
JP6119680B2 (ja) * | 2014-06-25 | 2017-04-26 | 信越半導体株式会社 | 半導体基板の欠陥領域の評価方法 |
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