JP2022072603A - 歪みセンサモジュール - Google Patents
歪みセンサモジュール Download PDFInfo
- Publication number
- JP2022072603A JP2022072603A JP2020182132A JP2020182132A JP2022072603A JP 2022072603 A JP2022072603 A JP 2022072603A JP 2020182132 A JP2020182132 A JP 2020182132A JP 2020182132 A JP2020182132 A JP 2020182132A JP 2022072603 A JP2022072603 A JP 2022072603A
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- sensor module
- strain sensor
- electronic component
- base film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 abstract description 16
- 239000000758 substrate Substances 0.000 description 22
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910018054 Ni-Cu Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910018481 Ni—Cu Inorganic materials 0.000 description 1
- 241000209140 Triticum Species 0.000 description 1
- 235000021307 Triticum Nutrition 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020182132A JP2022072603A (ja) | 2020-10-30 | 2020-10-30 | 歪みセンサモジュール |
PCT/JP2021/039827 WO2022092206A1 (ja) | 2020-10-30 | 2021-10-28 | 歪みセンサモジュール |
TW110140321A TW202234014A (zh) | 2020-10-30 | 2021-10-29 | 應變感測器模組 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020182132A JP2022072603A (ja) | 2020-10-30 | 2020-10-30 | 歪みセンサモジュール |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2022072603A true JP2022072603A (ja) | 2022-05-17 |
Family
ID=81383356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020182132A Pending JP2022072603A (ja) | 2020-10-30 | 2020-10-30 | 歪みセンサモジュール |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2022072603A (zh) |
TW (1) | TW202234014A (zh) |
WO (1) | WO2022092206A1 (zh) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3036262B2 (ja) * | 1992-08-31 | 2000-04-24 | ヤマハ株式会社 | 曲げセンサ |
JP3233248B2 (ja) * | 1994-05-13 | 2001-11-26 | エヌオーケー株式会社 | 歪ゲ−ジ用薄膜およびその製造法 |
-
2020
- 2020-10-30 JP JP2020182132A patent/JP2022072603A/ja active Pending
-
2021
- 2021-10-28 WO PCT/JP2021/039827 patent/WO2022092206A1/ja active Application Filing
- 2021-10-29 TW TW110140321A patent/TW202234014A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2022092206A1 (ja) | 2022-05-05 |
TW202234014A (zh) | 2022-09-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230928 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240507 |