JP2022053623A - Optical member and method for manufacturing the same - Google Patents

Abstract

To provide an optical member which presents an excellent light shieling property in a desired region and has a small reflectance and a high productivity, and a method for manufacturing the optical member.SOLUTION: The optical member according to the present invention includes a member body 2 and an optical film 3 on the member body 2. The optical film 3 has a light shielding film 5 made of an oxynitride, MxOyNz, and a first reflection prevention film 6 on the light shielding film 5. The light shielding film 5 is located closer to the member body 2 than a first reflection prevention film 6 is, and y>z is established for the light shielding film 5.SELECTED DRAWING: Figure 2

Description

The present invention relates to an optical member and a method for manufacturing the same.

Conventionally, various optical members such as prisms and optical filters have been used in optical devices. In an optical device, stray light may occur due to unintended reflection of light in the housing. In order to prevent stray light from entering the optical member, a light-shielding film may be provided on the optical member.

Patent Document 1 discloses an example of an optical filter member having a light-shielding film. In this optical filter member, a light-shielding film is formed in a peripheral region on the upper surface of the substrate. Metals and metal oxides are used for the light-shielding film. The upper surface of the substrate and the light-shielding film are covered with an optical multilayer film.

Japanese Unexamined Patent Publication No. 2014-170182

However, in the optical filter member as described in Patent Document 1, there is a problem that not only the light-shielding property of the light-shielding film is high, but also the reflectance of the light-shielding film is high. Therefore, the light-shielding film reflects the incident light, and the light is further reflected in the housing of the optical device, which may cause stray light. In recent years, the miniaturization of optical devices has been promoted, and the problem of stray light has become more prominent because the optical members are close to each other.

On the other hand, a resin having excellent light-shielding properties may be used for the light-shielding film. However, when the resin is applied, it is difficult to sufficiently improve the position accuracy as compared with the case where the metal film or the metal oxide film is formed by using a sputtering method, a photolithography method, or the like. Therefore, it is difficult to sufficiently increase productivity.

An object of the present invention is to provide an optical member having excellent light-shielding property, low reflectance, and high productivity in a desired region, and a method for manufacturing the same.

The optical member according to the present invention includes a member main body, an optical film provided on the member main body, and the like.
The optical film has a light-shielding film made of M _{x Oy Nz} , which is an oxynitride, and an antireflection film laminated on the light-shielding film, and the light-shielding film is a member main body rather than the antireflection film. It is located on the side and is characterized in that y> z in the light-shielding film.

It is preferable that M of M _x O _y N _z in the light-shielding film is any element of Ti, Cr, Ta, Zr, Si and Al.

When x of M _x O _y N _z in the light-shielding film is 1, it is preferable that y is 0.5 or more and 1.5 or less, and z is 0.05 or more and 0.3 or less.

It is preferable that the antireflection film is the first antireflection film, and further includes a second antireflection film located between the light shielding film and the member main body.

In the method for manufacturing the above optical member, a step of directly or indirectly laminating an oxide film on the member body and a step of nitriding the oxide film, _MxOyN which is an _oxynitride . It is characterized by including a step of forming a light-shielding film made of _z and a step of laminating an antireflection film on the light-shielding film.

The oxide film is preferably made of any oxide of titanium oxide, chromium oxide, tantalum oxide, zirconium oxide, silicon oxide and aluminum oxide.

The antireflection film is a first antireflection film, further comprising a step of laminating a second antireflection film on the main body of the member, and an oxide on the second antireflection film in the step of laminating the oxide film. It is preferable to stack the films.

According to the present invention, it is possible to provide an optical member having excellent light-shielding property, low reflectance, and high productivity in a desired region, and a method for manufacturing the same.

It is a schematic cross-sectional view of the optical member which concerns on 1st Embodiment of this invention. It is a schematic cross-sectional view which shows the vicinity of an optical film of the optical member which concerns on 1st Embodiment of this invention. It is a figure which shows the relationship between the transmittance and the reflectance of an optical film in 1st Embodiment of this invention, and a wavelength. It is a figure which shows the result of the heat cycle test of the optical film in 1st Embodiment of this invention. (A)-(d) are schematic cross-sectional views for explaining the manufacturing method of the optical member which concerns on 2nd Embodiment of this invention. (A) to (c) are schematic cross-sectional views for explaining an example of the steps of forming an optical film in the method for manufacturing an optical member according to the second embodiment of the present invention. (A) is a diagram showing the vicinity of the peak of the Ti element in the XPS analysis result of the light-shielding film according to the first embodiment of the present invention, and (b) is a diagram showing the vicinity of the peak of the O element. , (C) is a diagram showing the vicinity of the peak of the N element.

Hereinafter, preferred embodiments will be described. However, the following embodiments are merely examples, and the present invention is not limited to the following embodiments. Further, in each drawing, members having substantially the same function may be referred to by the same reference numeral.

(Optical member)
(First Embodiment)
FIG. 1 is a schematic cross-sectional view of an optical member according to a first embodiment of the present invention. The optical member 1 is a beam splitter. The beam splitter is an example, and the optical member of the present invention may be a member other than the beam splitter.

As shown in FIG. 1, the optical member 1 includes a member body 2 and an optical film 3. The member main body 2 includes a first prism 4A, a second prism 4B, and a translucent member 4C. The first prism 4A and the second prism 4B are joined to the translucent member 4C. The member main body 2 has a substantially rectangular parallelepiped shape. The member main body 2 has an upper surface, a lower surface, and a plurality of side surfaces. The plurality of sides are connected to the top surface and the side surface. The plurality of side surfaces include a first side surface 2a, a second side surface 2b, a third side surface 2c and a fourth side surface 2d. The first side surface 2a and the third side surface 2c face each other. The second side surface 2b and the fourth side surface 2d face each other.

FIG. 2 is a schematic cross-sectional view showing the vicinity of an optical film of the optical member according to the first embodiment of the present invention. The optical film 3 is provided on the first side surface 2a of the member main body 2. The optical film 3 has a light-shielding film 5 and a first antireflection film 6. The second antireflection film 8 is laminated on the member main body 2, and the light shielding film 5 is laminated on the member main body 2 via the second antireflection film 8. The first antireflection film 6 is laminated on the light-shielding film 5.

In the present embodiment, the light-shielding film 5 is made of titanium oxynitride. The material of the light-shielding film 5 is not limited to the above, and may be M _x O _y N _z , which is an oxynitride, and y> z. The material of the light-shielding film 5 is preferably made of metal oxynitride. It is preferable that M in M _x O _y N _z is any element of Ti, Cr, Ta, Zr, Si and Al.

The first antireflection film 6 is made of a laminated film. Specifically, in the first antireflection film 6, the high refractive index film 6a, the low refractive index film 6b, and the high refractive index film 6c are laminated in this order. The number of layers of the high-refractive index film and the number of layers of the low-refractive index film in the first antireflection film 6 are not particularly limited.

In the present embodiment, the high refractive index film 6a and the high refractive index film 6c in the first antireflection film 6 are made of TiO ₂ . The low refractive index film 6b in the first antireflection film 6 is made of SiO ₂ . However, the materials for the high-refractive index film and the low-refractive index film are not limited to the above. As the low refractive index film, for example, MgF ₂ or the like may be used. As the high refractive index film, for example, Ta ₂ O ₅ , ZrO ₂ or HfO ₂ may be used.

Returning to FIG. 1, the first prism 4A and the second prism 4B have a triangular columnar shape. On the other hand, the translucent member 4C has a square columnar shape. The first prism 4A, the second prism 4B, and the translucent member 4C each have a top surface, a bottom surface, and a plurality of side surfaces. The upper and lower surfaces of the first prism 4A and the second prism 4B have a substantially right-angled isosceles triangle shape. The upper surface and the lower surface of the translucent member 4C have a substantially parallel quadrilateral shape.

The first side surface 2a of the member main body 2 is composed of a side surface of the second prism 4B and a side surface of the translucent member 4C. The second side surface 2b is composed of the side surface of the first prism 4A. The third side surface 2c is composed of a side surface of the first prism 4A and a side surface of the translucent member 4C. The fourth side surface 2d is composed of the side surface of the second prism 4B. A second antireflection film 8 is provided on the first side surface 2a, the second side surface 2b, the third side surface 2c, and the fourth side surface 2d. The optical film 3 is indirectly provided on the member main body 2 via a second antireflection film 8. However, the second antireflection film 8 does not necessarily have to be provided.

The second antireflection film 8 is made of a laminated film. Specifically, in the second antireflection film 8, the high refractive index film 8a, the low refractive index film 8b, the high refractive index film 8c, and the low refractive index film 8d are laminated in this order. The number of layers of the high-refractive index film and the number of layers of the low-refractive index film in the second antireflection film 8 are not particularly limited.

In the present embodiment, the high refractive index film 8a and the high refractive index film 8c in the second antireflection film 8 are made of TiO ₂ . The low refractive index film 8b and the low refractive index film 8d in the second antireflection film 8 are made of SiO ₂ . However, the materials for the high-refractive index film and the low-refractive index film are not limited to the above. As the low refractive index film, for example, MgF ₂ or the like may be used. As the high refractive index film, for example, Ta ₂ O ₅ , ZrO ₂ or HfO ₂ may be used.

A first transmittance adjusting film 9A is provided between the first prism 4A and the translucent member 4C. Similarly, a second transmittance adjusting film 9B is provided between the second prism 4B and the translucent member 4C. The first transmittance adjusting film 9A and the second transmittance adjusting film 9B transmit a part of light and reflect another light. In the present embodiment, the first transmittance adjusting film 9A and the second transmittance adjusting film 9B are light transmissive films and have a transmittance of 50%. However, the transmittance of the first transmittance adjusting film 9A and the second transmittance adjusting film 9B is not limited to 50%.

The optical member 1 of this embodiment is a beam splitter. The optical member 1 has an incident portion 1a, a first emitting portion 1b, a second emitting portion 1c, and a third emitting portion 1d. The incident portion 1a is located on the first side surface 2a. Specifically, the incident portion 1a is located at the portion of the translucent member 4C on the first side surface 2a. The first emission unit 1b and the second emission unit 1c are located on the third side surface 2c. Specifically, the first emitting portion 1b is located at the portion of the first prism 4A on the third side surface 2c. The second emission portion 1c is located at the portion of the translucent member 4C on the third side surface 2c. The third emission unit 1d is located on the fourth side surface 2d.

As described above, the optical film 3 is provided on the first side surface 2a of the member main body 2. Specifically, the optical film 3 is continuously provided on the portion of the second prism 4B and the portion of the translucent member 4C on the first side surface 2a. The optical film 3 is provided so as not to obstruct the incident light A.

A part of the incident light A incident from the incident portion 1a passes through the first transmittance adjusting film 9A and is emitted as the emitted light C1 from the first emitting portion 1b. The other part of the incident light A is reflected by the first transmittance adjusting film 9A to become the reflected light B. A part of the reflected light B is reflected by the second transmittance adjusting film 9B, and is emitted as the emitted light C2 from the second emitting portion 1c. The other part of the reflected light B passes through the second transmittance adjusting film 9B and is emitted as the emitted light C3 from the third emitting portion 1d.

The features of this embodiment are that the optical film 3 has a light-shielding film 5 and a first antireflection film 6, the light-shielding film 5 is composed of M _x O _y N _z , and y> z. The light-shielding film 5 is located closer to the member body 2 than the first antireflection film 6. Since the optical film 3 has the light-shielding film 5, the light-shielding property is excellent in the portion where the optical film 3 is provided. Further, since the light-shielding film 5 is made of an oxynitride, the reflectance can be significantly lowered as compared with the case where the light-shielding film 5 is made of an oxide such as a metal oxide or a metal. In addition, since the light-shielding film 5 is located closer to the member body 2 than the first antireflection film 6, the reflectance of the optical film 3 as a whole can be further lowered. Therefore, it is possible to suppress the occurrence of stray light. When the light-shielding film 5 is made of metal, the incident light is reflected by the light-shielding film 5. Further, when the light-shielding film 5 is made of a metal oxide, it is difficult to obtain the effect of lowering the reflectance in the first antireflection film 6.

In the present embodiment, the optical film 3 can be formed by using a sputtering method, a vapor deposition method, or the like. Therefore, the accuracy of the forming position can be easily improved as compared with the case of forming the light-shielding film made of resin. Therefore, the defect rate due to the accuracy of the position can be easily reduced. Therefore, productivity can be increased.

Hereinafter, the details of the optical characteristics of the optical film 3 in the present embodiment will be shown. Specifically, the transmittance and the reflectance of the optical film 3 are shown. The reflectance shows an example when the incident angle is 12 ° and when the incident angle is 30 °. In addition, the results of the heat cycle test are also shown. In the heat cycle test, 500 cycles were performed with the temperature increase / decrease of cooling to −55 ° and heating to 125 ° as one cycle. The optical characteristics were measured and compared before the temperature was raised and lowered and after the temperature was raised and lowered for 500 cycles.

FIG. 3 is a diagram showing the relationship between the transmittance and reflectance of the optical film and the wavelength in the first embodiment. FIG. 4 is a diagram showing the results of a heat cycle test of an optical film according to the first embodiment. In addition, in FIG. 3 and FIG. 4, an example of an optical film 3 used for light of about 1500 nm or more and 1650 nm or less is shown.

As shown in FIG. 3, it can be seen that the transmittance of the optical film 3 is less than 1% at 1500 nm to 1650 nm. It can be seen that the reflectance of the optical film 3 is less than 1% at 1500 nm to 1650 nm in both the case where the incident angle is 12 ° and the case where the incident angle is 30 °. As described above, it can be seen that the optical film 3 is excellent in light-shielding property and the reflectance of the optical film 3 is low. Therefore, the optical member 1 of the first embodiment has excellent light-shielding property and low reflectance in a desired region, that is, a region provided with the optical film 3.

As shown in FIG. 4, it can be seen that there is almost no change in the transmittance and the reflectance of the optical film 3 before and after the temperature is repeatedly raised and lowered. As described above, in the present embodiment, the reliability of the optical film 3 can also be improved.

The number of layers of the first antireflection film 6 is preferably one or more, and more preferably three or more. In this case, the reflectance of the optical film 3 can be suitably lowered. The number of layers of the first antireflection film 6 is preferably 9 layers or less, and more preferably 5 layers or less. In this case, the film stress of the first antireflection film 6 can be suitably lowered, and the first antireflection film 6 is difficult to peel off.

The film on the light-shielding film 5 side of the first antireflection film 6 is preferably a high-refractive index film. In this case, the difference in refractive index can be reduced at the interface between the light-shielding film 5 and the first antireflection film 6. As a result, the light incident on the optical film 3 is difficult to be reflected at the interface between the first antireflection film 6 and the light shielding film 5. Further, the film on the light-shielding film 5 side of the second antireflection film 8 is preferably a low refractive index film. In this case, the difference in refractive index becomes large at the interface between the light-shielding film 5 and the second antireflection film 8, and light is easily reflected at the interface between the light-shielding film 5 and the second antireflection film 8. As a result, it is more difficult for light to enter the member main body 2 in the portion where the light-shielding film 5 is provided. Further, since the transmittance of the light-shielding film 5 is low, the light reflected at the interface between the light-shielding film 5 and the second antireflection film 8 is substantially shielded by the light-shielding film 5.

As the miniaturization of optical devices progresses, the problem of stray light becomes more prominent because the members are close to each other. The optical member 1 of the present embodiment is particularly suitable when used in a small optical device because it can suppress the generation of stray light.

The optical member according to the present invention is not limited to a beam splitter, and may be, for example, a prism or a lens. The member body in the optical member may be, for example, a prism, a lens, a glass substrate, or the like.

(Production method)
(Second embodiment)
Hereinafter, a method for manufacturing an optical member as a second embodiment of the present invention will be described. The second embodiment is an example of a method for manufacturing the optical member 1.

5 (a) to 5 (d) are schematic cross-sectional views for explaining a method for manufacturing an optical member according to a second embodiment of the present invention. 6 (a) to 6 (c) are schematic cross-sectional views for explaining an example of a step of forming an optical film in the method for manufacturing an optical member according to a second embodiment of the present invention.

As shown in FIGS. 5A to 5C, a first prism base material 14A, a second prism base material 14B, and a translucent member base material 14C are prepared. As shown in FIG. 5A, the first prism base material 14A has a bonded surface 16a. The bonding surface 16a is a surface of the first prism base material 14A that is bonded to the light-transmitting member base material 14C. The first transmittance adjusting film 9A is formed on the bonded surface 16a of the first prism base material 14A. Further, the second antireflection film 8 is formed on the surface of the first prism base material 14A other than the bonded surface 16a.

The first transmittance adjusting film 9A can be formed by laminating an appropriate metal film or dielectric film by using, for example, a sputtering method, a vacuum vapor deposition method, or the like. The second antireflection film 8 can be formed by alternately laminating low refractive index films and high refractive index films by using, for example, a sputtering method or a vacuum vapor deposition method. The order in which the first transmittance adjusting film 9A and the second antireflection film 8 are formed is not particularly limited.

Similarly, as shown in FIG. 5B, the second prism base material 14B has a bonded surface 16b. A second transmittance adjusting film 9B is formed on the bonded surface 16b of the second prism base material 14B. Further, the second antireflection film 8 is formed on the surface of the second prism base material 14B other than the bonded surface 16b. In the present embodiment, the second prism base material 14B, the second transmittance adjusting film 9B, and the second antireflection film 8 are the first prism base material 14A shown in FIG. 5A. It is configured in the same manner as the first transmittance adjusting film 9A and the second antireflection film 8. In this case, by dividing the first prism base material 14A on which the first transmittance adjusting film 9A and the second antireflection film 8 are formed, the second transmittance adjusting film 9B and the second A second prism base material 14B on which the antireflection film 8 is formed may be obtained.

As shown in FIG. 5C, the base material 14C for a translucent member has a bonded surface 16c and a bonded surface 16d. The bonding surface 16c is a surface of the light-transmitting member base material 14C to be bonded to the first prism base material 14A. The bonding surface 16d is a surface of the light-transmitting member base material 14C to be bonded to the second prism base material 14B. The second antireflection film 8 is formed on the surfaces other than the bonded surface 16c and the bonded surface 16d in the base material 14C for the translucent member. The first transmittance adjusting film 9A may be provided on the bonded surface 16c of the base material 14C for a translucent member. The second transmittance adjusting film 9B may be provided on the bonded surface 16d of the base material 14C for a translucent member.

Next, as shown in FIG. 5D, the bonding surface 16a of the first prism base material 14A and the bonding surface 16c of the translucent member base material 14C are bonded together. The bonding surface 16b of the second prism base material 14B and the bonding surface 16d of the translucent member base material 14C are bonded together. As a result, the base material 12 for the main body is obtained. An appropriate adhesive or the like may be used for joining the first prism base material 14A and the second prism base material 14B to the translucent member base material 14C. The second antireflection film 8 may be formed after joining the first prism base material 14A and the second prism base material 14B and the translucent member base material 14C. However, the second antireflection film 8 does not necessarily have to be formed.

The base material 12 for the main body has a side surface 12a. The side surface 12a corresponds to the first side surface 2a of the member main body 2 shown in FIG. As shown in FIG. 6A, a second antireflection film 8 is formed on the side surface 12a. The second antireflection film 8 can be formed by alternately laminating low refractive index films and high refractive index films by using, for example, a sputtering method or a vacuum vapor deposition method.

Next, the metal oxide film 15 as the oxide film in the present invention is formed on the second antireflection film 8. In the present embodiment, the metal oxide film 15 is made of titanium oxide. However, the material of the oxide film in the present invention is not limited to the above. The oxide film may be made of, for example, an oxide of chromium oxide, tantalum oxide, zirconium oxide, silicon oxide or aluminum oxide. The metal oxide film 15 can be formed by, for example, a sputtering method, a vacuum vapor deposition method, or the like. The same applies when the oxide film is formed of silicon oxide or the like.

Next, the metal oxide film 15 is nitrided. As a result, as shown in FIG. 6B, a light-shielding film 5 is obtained. In the present embodiment, the light-shielding film 5 is made of titanium oxynitride. However, as described above, the light-shielding film 5 may be made of an oxynitride other than titanium oxynitride. Next, as shown in FIG. 6C, the first antireflection film 6 is laminated on the light shielding film 5. The first antireflection film 6 can be formed by alternately laminating low refractive index films and high refractive index films by using, for example, a sputtering method or a vacuum vapor deposition method. Next, a plurality of optical members 1 are obtained by cutting the main body base material 12.

Here, the present inventor has found a problem that the optical characteristics of the light-shielding film are not stable when the metal or the like is oxidized and nitrided at the same time. This is because the optical characteristics change greatly due to the variation in the ratio of nitrogen elements in the light-shielding film. Furthermore, the present inventor has found that when oxidation and nitriding of a metal or the like are carried out at the same time, y> z cannot be stably obtained in M _x O _y N _z as an oxynitride. As a result, the variation in the optical characteristics of the light-shielding film tends to be large. Therefore, it may not be possible to sufficiently reduce the reflectance of the light-shielding film, and as a result, it becomes difficult to suppress stray light. Further, in order to reduce the reflectance of the entire optical film, it is necessary to measure the optical characteristics such as the refractive index of the light-shielding film and prepare a first antireflection film that matches the optical characteristics. In this way, it becomes difficult to increase productivity.

On the other hand, in the present embodiment, the metal oxide film 15 is nitrided after the metal oxide film 15 is formed. Thereby, in M _x O _y N _z as the oxynitride, y> z can be stably obtained. In this case, even if the ratio of the nitrogen element in the oxynitride varies, the change in the optical characteristics becomes small. Therefore, the reflectance of the light-shielding film 5 can be stably lowered. Further, since the variation in the optical characteristics of the light-shielding film 5 is small, it is not necessary to change the configuration of the first antireflection film 6 according to the variation in the optical characteristics of the light-shielding film 5. Therefore, productivity can be effectively increased.

Hereinafter, the results of analysis by XPS (X-ray Photoelectron Spectroscopy) of the light-shielding film 5 in the optical film 3 of the first embodiment produced by the method of the second embodiment are shown.

FIG. 7A is a diagram showing the vicinity of the peak of the Ti element in the XPS analysis result of the light-shielding film in the first embodiment, and FIG. 7B is a diagram showing the vicinity of the peak of the O element. Yes, FIG. 7 (c) is a diagram showing the vicinity of the peak of the N element. As shown in FIGS. 7 (a) to 7 (c), it can be seen that the peak of the nitrogen element (N element) is lower than the peak of the titanium element (Ti element) and the oxygen element (O element). Therefore, it can be seen that y> z in Ti _x O _y N _z .

When x of M _x O _y N _z in the light-shielding film 5 is 1, y is preferably 0.5 or more and 1.5 or less, and more preferably 0.8 or more and 1.3 or less. preferable. z is preferably 0.05 or more and 0.3 or less, and more preferably 0.1 or more and 0.15 or less. In particular, when z is within the above range, even when the proportion of nitrogen elements varies in the composition of the light-shielding film 5, the variation in the optical characteristics of the optical film 3 can be further reduced, and the optics can be further reduced. The reflectance of the film 3 can be lowered even more reliably.

1 ... Optical member 1a ... Incident portion 1b to 1d ... First to third emission portions 2 ... Member body 2a to 2d ... First to fourth side surfaces 3 ... Optical films 4A, 4B ... First and second prisms 4C ... Translucent member 5 ... Light-shielding film 6 ... First antireflection film 6a ... High refraction film 6b ... Low refraction film 6c ... High refraction film 8 ... Second antireflection film 8a ... High refraction film 8b ... Low refraction film 8c ... High refraction film 8d ... Low refraction film 9A, 9B ... First and second transmission rate adjusting films 12 ... Main body base material 12a ... Side surfaces 14A, 14B ... First and second Base material for prism 14C ... Base material for translucent member 15 ... Metal oxide film 16a to 16d ... Bonded surface

Claims (7)

The main body of the member and
The optical film provided on the member body and
Equipped with
The optical film has a light-shielding film made of M _{x Oy Nz} , which is an oxynitride, and an antireflection film laminated on the light-shielding film.
The light-shielding film is located closer to the member body than the antireflection film.
An optical member in which y> z in the light-shielding film. The optical member according to claim 1, wherein M of M _x O _y N _z in the light-shielding film is any element of Ti, Cr, Ta, Zr, Si and Al. When x of M _x O _y N _z in the light-shielding film is 1, y is 0.5 or more and 1.5 or less, and z is 0.05 or more and 0.3 or less, claim 1 or 2. The optical member according to 2. The antireflection film is the first antireflection film, and the antireflection film is a first antireflection film.
The optical member according to any one of claims 1 to 3, further comprising a second antireflection film located between the light-shielding film and the member main body. The method for manufacturing the optical member according to any one of claims 1 to 4.
A step of directly or indirectly laminating an oxide film on the member body,
A step of forming the light-shielding film made of M _x O _y N _z , which is an acid nitride, by nitriding the oxide film, and a step of forming the light-shielding film.
The step of laminating the antireflection film on the light-shielding film and
A method for manufacturing an optical member. The method for producing an optical member according to claim 5, wherein the oxide film is made of an oxide of any one of titanium oxide, chromium oxide, tantalum oxide, zirconium oxide, silicon oxide and aluminum oxide. The antireflection film is the first antireflection film, and the antireflection film is a first antireflection film.
Further provided with a step of laminating a second antireflection film on the member main body,
The method for manufacturing an optical member according to claim 5 or 6, wherein in the step of laminating the oxide film, the oxide film is laminated on the second antireflection film.

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