JP2022051291A - Vacuum lamination apparatus and method for manufacturing laminate - Google Patents

Abstract

To provide a vacuum lamination apparatus capable of reducing components necessary for taking vacuum measures to perform alignment and lamination, and a method for manufacturing a laminate.SOLUTION: A vacuum lamination apparatus 100 includes: a conveyance plate 1 for holding a work piece W; alignment means 30 for positioning the work piece W held on the conveyance plate 1 while fixing and supporting the conveyance plate 1; lamination means 50 for laminating the positioned work piece W in a vacuum; and conveyance means 40 for conveying the work piece W from the alignment means 30 to the lamination means 50 while fixing and supporting the conveyance plate 1 in the state of holding the work piece W on the conveyance plate 1. The conveyance plate 1 is attachable to/detachable from the alignment means 30 and the conveyance means 40; the work piece W is electrostatically fixed on one side thereof; the conveyance means 40 is magnetically fixed on the other side; and thereby, components necessary for taking vacuum measures are reduced to perform alignment and lamination.SELECTED DRAWING: Figure 2

Description

The present invention particularly relates to a vacuum laminating apparatus provided with a removable transport plate and a method for manufacturing a laminated body.

The vacuum laminating device stacks a plurality of workpieces constituting an electronic component, and includes an alignment means and a laminating means. This alignment means aligns the works before the works are laminated by the laminating means, thereby suppressing the displacement between the works of the formed laminated body. Further, the laminating means prevents air from being mixed between the layers of the work by laminating under vacuum when laminating the work. In order to adsorb and fix the work under such a vacuum, a means other than negative pressure suction such as charge fixing is adopted.

Here, Patent Document 1 is a vacuum stacking device, which comprises a charging means and an alignment means in a vacuum chamber, one work is charged and fixed to the charging means, and the other work is aligned. It is described that the alignment operation and the laminating operation are performed in the vacuum chamber placed in the vacuum chamber under vacuum.

Japanese Unexamined Patent Publication No. 2013-167712

However, in Patent Document 1, there is a possibility that an increase in cost may be caused by taking a vacuum measure for maintaining sealing property, slidability, etc. for the charging means and the alignment means composed of a large number of parts. ..

The present invention has been made in view of such a problem, and provides a vacuum laminating apparatus and a method for manufacturing a laminated body capable of performing an alignment operation and a laminating operation by reducing the number of parts requiring vacuum countermeasures. The purpose is to do.

In order to solve the above problems, it is a vacuum laminating device for sequentially laminating a plurality of workpieces of the present invention, and is held by the transport plate while fixing and supporting the transport plate that holds the work and the transport plate. The work is moved between the alignment means for aligning the work, the laminating means for laminating the aligned work on the laminating stage under vacuum, and the alignment means and the laminating means, and the work is said. In a state of being held by the transport plate, the transport plate is provided with a transport means for transporting the work from the alignment means to the stacking means while fixedly supporting the transport plate, and the transport plate includes the alignment means and the transport. It is removable from each of the means, and the work is charged and fixed on one side, and the other side is magnetically fixed to the transport means.

Further, in the vacuum laminating device, the transport plate may be made of a magnetic material and an insulator may be provided on one side of the transport plate.

Further, in the vacuum laminating device, the transport plate may be charged and fixed on a non-adhesive second surface which is opposite to the first surface of the work having adhesiveness.

Further, in the vacuum laminating device, the alignment means includes an alignment stage and an installation block on the alignment stage, and the transport plate is such that the work and the alignment stage are in a non-contact state. , May be placed on the installation block.

Further, in the vacuum stacking device, the transport means is brought into contact with the stacking means to form a closed space, and the transport plate is moved by the transport means in the closed space under vacuum. The work may be laminated.

Further, the vacuum laminating device is further provided with a transport plate collecting means, and the transport plate collecting means can remove static electricity from the transport plate so that the transport plate can be peeled off from the work, and the transport plate can be removed. It may be collected.

In order to solve the above problems, it is a method of manufacturing a laminated body in which a plurality of works of the present invention are sequentially laminated, in which a step of charging and fixing the work on one side of a transport plate and fixing the transport plate to an alignment stage. In the supported state, the step of aligning the work charged and fixed to the transport plate, and with the work charged and fixed to one side of the transport plate, the other side of the transport plate is magnetically fixed. It includes a step of transporting the aligned work from the alignment stage to the laminating stage, and a step of laminating the aligned work on the laminating stage under vacuum.

Further, in the method for manufacturing the laminated body, the step of transporting the work is to magnetically fix the transport plate in a vacuum chamber having an upper wall and a side wall, and the vacuum chamber is transferred to the laminated stage. By abutting them, a closed space may be formed.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a vacuum laminating apparatus and a method for manufacturing a laminated body capable of performing an alignment operation and a laminating operation by reducing the number of parts requiring vacuum countermeasures.

It is a plane schematic diagram which shows the vacuum stacking apparatus which concerns on embodiment of this invention. FIG. 3 is a schematic cross-sectional view of the vacuum laminating apparatus shown in FIG. 1 cut in an XZ plane. It is sectional drawing which explains from the charging operation to the alignment operation in the work laminating process. d) Alignment operation, respectively. It is sectional drawing which explains the transport operation by the transport unit in the work laminating process, (a) transport preparation state, (b) magnetic fixation state of a transport plate, (c) separation state from an alignment stage, (d) stacking. Each represents the state of contact with the stage. It is sectional drawing which explains the laminating operation under vacuum in the laminating process of a work, (a) a vacuum drawing state, (b) a laminating state, (c) an extension state of a peeling piston, (d) magnetic fixing of a transport plate. It represents the released state and (e) the retracted state of the peeling piston. FIG. 2A is a schematic cross-sectional view (a)-(c), (e) and a schematic plan view (d) for explaining the recovery operation of the transport plate in the work laminating process, (a) open to the atmosphere, and (b) transport. The state of being separated from the stacking stage of the unit, (c) and (d) the recovery operation of the transport plate, and (e) the recovery operation of the transport plate are completed.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below exemplify embodiments in which the present invention is specifically realized. Therefore, the configuration of the embodiments described below should be appropriately modified or changed depending on the configuration of the apparatus to which the present invention is applied and various conditions, and the present invention is not limited to the following embodiments. do not have.

<Terminology>
In the description of the present specification and claims, each term is defined as follows. "Laminating" refers to laminating a plurality of sheets (including two sheets). The “laminated body” refers to a structure in which a plurality of (including two) work Ws are bonded together. “Movement in the XYθ axis” means movement in the X-axis direction and the Y-axis direction and rotation in the θ direction.

FIG. 1 is a schematic plan view showing a vacuum stacking device 100 according to an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view of the vacuum stacking device 100 shown in FIG. 1 cut in an XZ plane. Here, the X-axis direction indicates the direction in which the work W moves when each processing step for the work W is performed, and the Y-axis direction indicates a direction orthogonal to the X-axis direction. Further, the Z-axis direction is orthogonal to the X-axis direction and the Y-axis direction, and indicates the direction in which the work W faces when each processing step for the work W is performed.

<Vacuum laminating device>
The vacuum laminating device 100 stacks a plurality of work Ws, which are various thinned substrates of electronic components, with high accuracy and high speed. The vacuum laminating device 100 includes a transport plate 1, a reversing unit (reversing means) 10, a charging unit (charging means) 20, an alignment unit (alignment means) 30, a transport unit (conveying means) 40, and a laminating unit. (Laminating means) 50 and a transport plate recovery unit (transport plate recovery means) 60 are provided. Hereinafter, they will be described in order. The vacuum stacking device 100 further includes control means (not shown) for controlling driving of the reversing unit 10, the charging unit 20, the alignment unit 30, the transport unit 40, the stacking unit 50, and the transport plate recovery unit 60. ..

In the present embodiment, as shown in FIG. 3A, the work W is provided with an adhesive layer a on one side (first surface) and a protective layer p for preventing dust or the like from adhering to the adhesive layer a. Is used. However, the work W is not limited to this, and various modes of work W are used, such as those provided with the adhesive layer a and the protective layer p on both sides, and those not provided with the adhesive layer a and the protective layer p on any surface. be able to.

<About the transport plate>
The transport plate 1 has a substantially rectangular shape set so that the work W can be placed so as not to protrude when viewed from the Z-axis direction, and is composed of an iron-based material and a magnetic material such as SUS440. Further, on one side 1a (see FIG. 3A), which is the surface of the transport plate 1, at least the region where the work W is placed is an insulator (not shown), for example, a silicon-based material such as silicon rubber. Is provided. The work W is charged and fixed to one side 1a of the transport plate 1 via this insulator. On the other hand, the other side 1b (see FIG. 3A), which is the back surface of the transport plate 1 located on the side opposite to the one side 1a, is magnetically fixed by the transport plate chuck 42 (see FIG. 4B).

The transport plate 1 of the present embodiment is made of a magnetic material, and by providing an insulator on one side 1a, different fixing means (one side 1a of the transport plate 1 are charged) with respect to the same transport plate 1. Fixing and magnetic fixing to the other side 1b of the transport plate 1) can be applied. Further, in the present embodiment, by making the transport plate 1 removable from each unit (reversing unit 10, alignment unit 30, transport unit 40), the work W can be attached to each unit via the transport plate 1. You can move to. Since each unit can be physically separated in this way, the transfer plate 1 in which the work W is charged and fixed, instead of arranging the charging unit and the alignment unit in the vacuum chamber as in Patent Document 1. Can only be placed. As a result, the number of members that need to take measures against vacuum can be reduced, and the alignment operation and the laminating operation can be performed.

<About the reversing unit>
The reversing unit 10 moves the reversing stage 11 and the reversing unit 10 in the X-axis direction (arrow III direction: charging / reversing position A, alignment stage position B), moves in the Z-axis direction (arrow IV direction), and A reversing unit drive mechanism (not shown) that rotates around the Y axis (direction of arrow II) is provided. The reversing stage 11 includes a transport plate fixing mechanism (not shown) for fixing the transport plate 1 in a state of being placed on the reversing stage 11. This transport plate fixing mechanism may be configured by vacuum suction by a plurality of suction ports provided on the reversing stage 11, a mechanical chuck, a magnetic force, or a combination thereof. The holding force by the transport plate fixing mechanism is set in advance to a value such that the transport plate 1 does not fall from the reverse stage 11 when the reversing stage 11 fixing the transport plate 1 is inverted.

<About the charging unit>
The charging unit 20 includes a charged particle irradiating unit 21 that irradiates the charged particles c, and a charging unit driving mechanism (not shown) that moves the charging unit 20 in the X-axis direction (arrow I direction), and is an inversion unit. It is arranged above the 10 in the Z-axis direction. The charged particle irradiating unit 21 irradiates the charged particles c downward in the vertical direction, and may be, for example, an ionizer that irradiates anions or cations. As shown in FIG. 1, the charged particle irradiation unit 21 extends so as to cover the inversion stage 11 in the Y-axis direction.

<About the alignment unit>
The alignment unit 30 includes an alignment stage 31, an installation block 32 provided on the alignment stage 31, and an XYθ-axis electric actuator 33 for moving the alignment stage 31 to the XYθ-axis. Further, the alignment unit 30 includes an alignment imaging unit 34 that captures an alignment mark, which is a mark for alignment reference of the work W, from below. Hereinafter, they will be described in order.

The alignment stage 31 includes a plurality of windows (not shown) extending from each corner of the alignment stage 31 toward the center and made of a transparent member.

A plurality of installation blocks 32 are arranged along the outer peripheral edge on the alignment stage 31 so as to be point-symmetrical with respect to the center of the alignment stage 31 when viewed from the Z-axis direction. Further, the installation block 32 is provided with a plurality of suction ports (not shown) on the upper surface for vacuum suctioning the transport plate 1. A plurality of installation blocks 32 in the present embodiment are arranged so as to be point-symmetrical with respect to the center of the alignment stage 31, but the present invention is not limited to this, and all the outer peripheral edges on the alignment stage 31 are surrounded. It may be provided.

The XYθ axis electric actuator 33 can move to the XYθ axis, that is, move and rotate in the XY plane in order to align the work W with the reference position.

The alignment image pickup unit 34 includes an alignment camera (not shown) and an alignment illumination (not shown), and images the alignment mark of the work W from below the alignment stage 31 through a plurality of windows.

<About the transport unit>
The transfer unit 40 includes a vacuum chamber 41, a transfer plate chuck 42, an X-axis direction (arrow V direction: alignment stage position B, standby position C, stacking stage position D) and a Z-axis direction (arrow IV and arrow IV) of the transfer unit 40. A transport unit drive mechanism (not shown) for moving in the VI direction) is provided. Hereinafter, they will be described in order.

The vacuum chamber 41 includes a substantially rectangular upper wall 41t and a peripheral wall 41s that hangs down so as to continuously surround each outer peripheral edge of the upper wall 41t.

The upper wall 41t of the vacuum chamber 41 is composed of an elevating piston 43, a pair of guide shaft portions 44, and a pair of peeling pistons 45, and is provided with a drive mechanism for driving in the vacuum chamber 41. First, the lower end of the elevating piston 43 is fixed to the transport plate chuck 42, and the elevating piston 43 expands and contracts between a standby state contracted in the Z-axis direction and an extended state extended in the Z-axis direction (arrow VII direction). , The transport plate chuck 42 is moved in the Z-axis direction (arrow VII direction). Further, the lower ends of the pair of guide shaft portions 44 are fixed to the transport plate chuck 42, respectively, and when the elevating piston 43 expands and contracts in the Z-axis direction, the pair of guide shaft portions 44 elevates and lowers in order to maintain the levelness of the transport plate chuck 42. It expands and contracts in synchronization with the piston 43. Further, the pair of peeling pistons 45 are between a standby state contracted in the Z-axis direction and a movement restricted state extended in the Z-axis direction (arrow VIII direction) through the through hole 42h of the transport plate chuck 42. It expands and contracts. In the movement restricted state in which the pair of peeling pistons 45 are extended in the Z-axis direction (arrow VIII direction), the lower end of the peeling piston 45 is set to be flush with the lower surface of the transport plate chuck 42. (See FIG. 5 (c)).

In the present embodiment, the elevating piston 43 and the pair of peeling pistons 45 are configured to be expandable and contractible by, for example, an air cylinder or a hydraulic cylinder. Further, the drive mechanism in the vacuum chamber 41 of the present embodiment adopts a guide block structure in which a seal member is interposed, whereby the internal space and the external space of the vacuum chamber 41 are connected via the drive mechanism. Prevents fluid communication. The arrangement and number of drive mechanisms in the vacuum chamber 41 in the present embodiment are merely examples, and the optimum arrangement and number can be appropriately selected.

A sealing member (not shown) is continuously provided at the lower end of the peripheral wall 41s of the vacuum chamber 41 so as to form a closed region when viewed from below in the Z-axis direction. By abutting and bringing the seal member of the vacuum chamber 41 into contact with and in close contact with the laminated stage 51, the internal space of the vacuum chamber 41 can be maintained in a sealed state (see FIG. 4D).

The transport plate chuck 42 has a substantially rectangular shape set so that the transport plate 1 can be held so as not to protrude when viewed from the Z-axis direction, and has a pair of through holes 42h and a plurality of magnetic force portions 42m. And. The pair of through holes 42h are arranged at positions corresponding to the peeling piston 45, and the diameter of the through holes 42h is larger than the diameter of the peeling piston 45 so that the peeling piston 45 can be inserted in a non-contact state. It is set. Further, the plurality of magnetic force portions 42m are for magnetically fixing the transport plate 1 to the transport plate chuck 42, and are composed of permanent magnets.

The transport plate chuck 42 of the present embodiment has a through hole 42h so as to allow expansion and contraction of the peeling piston 45 in the Z-axis direction, but the present invention is not limited to this, and for example, the outer peripheral edge of the transport plate chuck 42. May be provided with a continuous notch. Further, the magnetic force portion 42m of the present embodiment is made of a permanent magnet, but the present invention is not limited to this, and for example, an electromagnet that performs ON / OFF control according to an instruction from the control means may be used. The arrangement and number of the through holes 42h and the magnetic force portion 42m in the transport plate chuck 42 of the present embodiment are merely examples, and the optimum arrangement and number can be appropriately selected.

The transport unit drive mechanism may move the transport unit 40 in the X-axis direction (arrow V direction: alignment stage position B, standby position C, stacking stage position D) and in the Z-axis direction (arrow IV and VI directions). can. In particular, the transport unit drive mechanism moves the transport unit 40 in the Z-axis direction (arrows IV and VI directions) to recover the transport plate 1 (see FIGS. 4 (b) and 4 (c)). , The formation of a closed space used for evacuation (see FIG. 4D) can be performed, but the details will be described later.

<About the laminated unit>
The laminating unit 50 includes a laminating stage 51 on which the work W is laminated. The laminated stage 51 has a substantially rectangular shape set so that the vacuum chamber 41 of the transport unit 40 can be installed so as not to protrude when viewed from the Z-axis direction, and the peripheral walls 41s of the vacuum chamber 41 are laminated. By sitting on the stage 51, a closed space is formed. Further, the laminated stage 51 includes an exhaust port (not shown) and an open port (not shown) for evacuating and opening the closed space formed by the vacuum chamber 41 and the laminated stage 51 to the atmosphere. Further, the laminated stage 51 includes a work fixing mechanism (not shown) for fixing the work W in a state of being placed on the laminated stage 51.

The exhaust port and the open port in the present embodiment are provided in the stacking stage 51, but are not limited to this, and may be provided in, for example, the vacuum chamber 41. Further, the work fixing mechanism in the present embodiment may have any form as long as the work W is fixed on the laminated stage 51, and for example, vacuum suction, sticking with an adhesive, or the like is adopted. Can be done. Here, when the work fixing mechanism is vacuum suction, the degree of vacuum in the vacuum suction of the work W is set larger than the degree of vacuum in the closed space formed in the vacuum chamber 41.

<About the transport plate recovery unit>
The transport plate recovery unit 60 includes a gripping means 61, a static elimination means 62, and a transport plate recovery unit drive mechanism (not shown) that moves the transport plate recovery unit 60 in the X-axis direction (arrow IX direction). .. Hereinafter, they will be described in order.

The gripping means 61 can grip the transport plate 1 from the vertical direction and move the transport plate 1 into the XY plane (XY axis direction and θ direction) (see FIG. 6D). The gripping means 61 may have any form as long as it can grip the transport plate 1, and for example, a mechanical hand or a pusher driven by an electric actuator, an air actuator, or the like may be adopted.

The static elimination means 62 comprises an ionizer that generates charges necessary for charge neutralization and supplies the charges as static elimination air i to a charged object (insulator provided on one side 1a of the transport plate 1). As shown in FIG. 6 (c), the static eliminator means 62 flows the static eliminator air i into the insulator provided on one side 1a of the transport plate 1 to allow the transport plate 1 and the uppermost portion of the laminated body L to flow. Positively reduces the electrostatic adsorption force with.

The static elimination means 62 in the present embodiment employs an ionizer, but in addition to this, for example, an insulator provided on one side 1a of the transport plate 1 is formed wider than the area on which the work W is placed. , The one that directly grips the outer peripheral edge of this insulator with the conductive gripping means 61 may be adopted. As a result, charge neutralization is performed in the insulator via the outer peripheral edge of the insulator and the gripping means 61, so that the electrostatic adsorption force between the transport plate 1 and the uppermost portion of the laminated body L is more positively reduced. be able to.

The transport plate recovery unit drive mechanism moves the gripping means 61 close to the transport plate 1 and the static elimination means 62 in the X-axis direction (arrow IX direction) so as to be close to the laminated stage 51. Can be done.

<About the work laminating process>
The laminating process of the work W in the specific vacuum laminating apparatus 100 will be described in order with reference to FIGS. 3 to 6. The driving of each unit (reversing unit 10, charging unit 20, alignment unit 30, transfer unit 40, stacking unit 50, and transfer plate recovery unit 60) is mainly performed by the control means, and is executed by instructions from the control means. Will be done. Here, in the work laminating process, since the transport plate 1 is always fixed to any of the units, the work W can be aligned and transported in a stable state.

<About charging operation>
First, as shown in FIG. 3A, the transfer plate supply unit (not shown) is placed on the reversing stage 11 arranged at the charging / reversing position A so that the other side 1b of the transport plate 1 is in contact with the reversing stage 11. At the same time, the transport plate 1 is fixed to the reversing stage 11 by the transport plate fixing mechanism. Next, the surface (second surface) of the work W not provided with the adhesive layer a and the protective layer p comes into contact with the insulator provided on one side 1a of the transport plate 1 by a work supply unit (not shown). It is placed so that it does. Further, the charging unit 20 is moved in the X-axis direction (arrow I (1) direction) by the charging unit driving mechanism so as to cross above the inversion stage 11. At this time, the charged particles c are irradiated downward from the charged particle irradiation unit 21, so that the insulator provided on one side 1a of the transport plate 1 is surface-charged and is charged through the insulator. , The work W is charged and fixed to one side 1a of the transport plate 1. Here, as shown in FIG. 1, when one side 1a of the transport plate 1 on which the work W is mounted is viewed from the Z-axis direction, the region on which the work W is not mounted surrounds the work W. It is formed.

In the charging operation in the present embodiment, after the work W is placed on the transport plate 1 fixed to the inversion stage 11, the work W is charged and fixed to the insulator by the charging unit 20, but the present invention is limited to this. do not have. For example, before the work W is placed on the transport plate 1 fixed to the reversing stage 11, the insulator of the transport plate 1 is charged by the charging unit 20, and then the work W is charged and fixed to the insulator. You may. In addition, as in the charging operation of the present embodiment, after the work W is placed on the transport plate 1 fixed to the inversion stage 11, the work W is charged and fixed to the insulator to charge and fix the work W in the transport plate 1. It is possible to suppress misalignment and wrinkles, as well as the danger of discharge from the insulator and the occurrence of contamination in the insulator.

<About reversing and transport operation by reversing unit>
First, as shown in FIG. 3B, the protective layer p provided on the work W charged and fixed to the transport plate 1 is peeled off by a peeling unit (not shown). As a result, the work W charged and fixed on the transport plate 1 becomes a work W (hereinafter referred to as “work Wa with adhesive”) in which the adhesive layer a having adhesiveness is provided only on one side. After that, the reversing unit 10 is rotated by 180 ° around the Y axis (direction of arrow II (2)) by the reversing unit drive mechanism, and the adhesive layer a of the work Wa with adhesive is arranged so as to face downward. To. Here, the fixed holding force of the other side 1b of the transport plate 1 with respect to the reversing stage 11 by the transport plate fixing mechanism and the electrostatic adsorption force of the work Wa with the adhesive to the one side 1a of the transport plate 1 by charge fixing are reversed. The values are set in advance so that the transport plate 1 and the work Wa with the adhesive do not fall from the inverted stage 11 when the stage 11 is inverted.

In the present embodiment, as the work W charged and fixed on the transport plate 1, the work W in which the adhesive layer a and the protective layer p are provided on only one side is adopted, but the present invention is not limited to this, and for example, adhesive. A work W in which the layer a and the protective layer p are provided on both sides, or a work W in which the adhesive layer a and the protective layer p are not provided on both sides may be adopted. When a work W having an adhesive layer a and a protective layer p on both sides is adopted as the work W charged and fixed on the transport plate 1, the protective layer p on any surface of the work W is transported. It is placed directly on the insulator of 1a on one side of the plate 1.

Next, as shown in FIG. 3C, the reversing unit 10 moves from the charging / reversing position A to the alignment stage position B in the X-axis direction (arrow III (3) direction) by the reversing unit drive mechanism. After that, it is moved downward in the Z-axis direction (arrow IV (4) direction). As a result, the region on which the work Wa on one side 1a of the transport plate 1 is not placed is brought into contact with the upper surface of the installation block 32 of the alignment unit 30. Then, after the transport plate 1 is adsorbed and fixed to the upper surface of the installation block 32, the transport plate 1 is released from being fixed to the other side 1b with respect to the reversing stage 11 by the transport plate fixing mechanism. After that, as shown in FIG. 3D, the reversing unit 10 is moved upward in the Z-axis direction (in the direction of arrow IV (5)) by the reversing unit drive mechanism, and then charged / reversed from the alignment stage position B. It is moved to the position A in the X-axis direction (arrow III (6) direction).

<Alignment operation>
As shown in FIG. 3D, the alignment imaging unit 34 images a pair of alignment marks provided on the work Wa with an adhesive from below. This captured image is transmitted to an image processing device (not shown), and the positions of the pair of alignment marks are calculated by the image processing, and the positions of the calculated pair of alignment marks are predetermined. The error from the reference position is calculated. Here, if this error is within a predetermined range, it is determined that the alignment of the work Wa with adhesive has been properly performed, and the alignment operation of the work Wa with adhesive is terminated. On the other hand, if this error is out of the predetermined range, it is determined that the work Wa with the adhesive is not properly aligned. At this time, the XYθ-axis electric actuator 33 moves the work Wa with the adhesive to the XYθ-axis via the alignment stage 31, the installation block 32, and the transport plate 1 so that the error is minimized. This alignment to the predetermined reference position is continued until the error is within the predetermined range.

Since the alignment operation in the present embodiment is performed in a non-contact state between the work Wa with the adhesive and the alignment stage 31, it can be smoothly performed without dust or the like adhering to the adhesive layer a.

<Transfer operation by transport unit>
The transport operation by the transport unit will be described separately in two states, a magnetically fixed state and a transport state, of the transport plate, using FIGS. 4 (a) to 4 (d).

(Magnetic fixing state of the transport plate)
The transport unit 40 is stopped at the standby position C in a standby state in which the elevating piston 43 and the peeling piston 45 are contracted. First, when it is determined that the alignment of the work Wa with the adhesive is properly performed in the alignment unit 30, the transfer unit 40 is placed in the standby position C by the transfer unit drive mechanism, as shown in FIG. 4A. Is moved to the alignment stage position B in the X-axis direction (arrow V (7) direction). After that, as shown in FIG. 4B, the transport unit 40 is moved downward in the Z-axis direction (in the direction of arrow IV (8)) by the transport unit drive mechanism, and the transport plate chuck 42 is moved to the transport plate 1 by the transfer unit drive mechanism. It is in contact with the other side 1b. At this time, the transport plate 1 made of a magnetic material is magnetically fixed to the transport plate chuck 42 by a plurality of magnetic force portions 42 m made of permanent magnets. Here, in the transport plate 1, the suction holding force on the installation block 32 acting downward in the Z-axis direction is set to be larger than the magnetic force on the magnetic force portion 42m acting upward in the Z-axis direction. As a result, the transport plate 1 is magnetically fixed to the transport plate chuck 42 in a state of being adsorbed and fixed to the installation block 32 without floating from the installation block 32, so that the adhesive is charged and fixed on the transport plate 1. It is possible to prevent the position of the attached work Wa from shifting.

In the present embodiment, the magnetic force portion 42m employs a permanent magnet, but when an electromagnet that performs ON / OFF control is adopted instead, the transport plate chuck 42 is other than the transport plate 1. The magnetic force may be generated by switching from the OFF control to the ON control at the timing before and after the contact with the side 1b.

(Transport state)
First, after releasing the suction fixing of one side 1a of the transport plate 1 to the upper surface of the installation block 32, the transport unit 40 is moved upward in the Z-axis direction by the transport unit drive mechanism as shown in FIG. 4 (c). It is moved in the direction of arrow IV (9). After that, as shown in FIG. 4D, the transfer unit 40 was moved from the alignment stage position B to the stacking stage position D in the X-axis direction (arrow V (10) direction) by the transfer unit drive mechanism. After that, it is moved downward in the Z-axis direction (arrow VI (11) direction). As a result, the sealing member provided at the lower end of the peripheral wall 41s of the vacuum chamber 41 abuts and adheres to the laminated stage 51, so that a closed space (internal pressure is atmospheric pressure Pa) is formed in the vacuum chamber 41. At this time, the work Wa with an adhesive charged and fixed to the transport plate 1 and the laminated body L laminated on the laminated stage 51 are arranged so as to face each other in the vertical direction in a non-contact state.

Here, in the laminated body L laminated on the laminated stage 51, only the lowermost work W is the work W without the adhesive layer a, and is fixed to the laminated stage 51 by the work fixing mechanism. The work W is made of a work Wa with an adhesive, and is fixed by the adhesive force between the two. In the present embodiment, the transfer unit drive mechanism adjusts the pressing force of the vacuum chamber 41 with respect to the stacking stage 51 to a desired value, thereby increasing the air density of the closed space formed in the vacuum chamber 41. ing.

<About stacking operation>
From here, the laminating operation will be described separately in three states, a vacuum drawing state, a laminating state, and a magnetic fixing release state of the transport plate, using FIGS. 5 (a) to 5 (e). In addition, in FIGS. 5 (b) to 5 (e), in order to make it easy to grasp the operation of the elevating piston 43 or the pair of peeling pistons 45, the members in the operating state are shown in gray.

(Vacuum state)
First, as shown in FIG. 5A, the gas in the closed space formed in the vacuum chamber 41 is exhausted through the exhaust port provided in the laminated stage 51, so that evacuation is performed. (See the dot area in the figure). The vacuum pressure Pv in this enclosed space is set to, for example, about -100 (kpa). Here, the work Wa with adhesive is charged and fixed to the transport plate 1, and the transport plate 1 is magnetically fixed to the transport plate chuck 42. Therefore, even under vacuum, the work Wa with adhesive and the transport plate 1 are fixed. Does not fall from the transport plate chuck 42.

(Laminated state)
After the vacuum pressure Pv in the vacuum chamber 41 reaches a desired value, as shown in FIG. 5B, the elevating piston 43 shifts to the extended state, and the transport plate chuck 42 moves downward in the Z-axis direction. It is moved in the direction of arrow VII (12). Then, the work Wa with an adhesive charged and fixed to the transport plate 1 is brought into contact with the uppermost portion of the laminated body L laminated on the laminated stage 51. Further, from this state, the elevating piston 43 moves the transport plate chuck 42 downward in the Z-axis direction (arrow VII) by a preset pushing amount depending on the type of the adhesive used for the work Wa with the adhesive. Move in the (12) direction). As a result, the work Wa with an adhesive charged and fixed to the transport plate 1 is integrally laminated with the laminated body L by the adhesive force.

In the present embodiment, after the space between the work Wa with an adhesive charged and fixed to the transport plate 1 and the laminated body L laminated on the laminating stage 51 is evacuated, the work Wa with an adhesive is laminated. By being integrally laminated on the body L, air is prevented from being mixed into the layers of the laminated body L. Further, in the present embodiment, the transport unit 40 can not only transport the transport plate 1 but also form a closed space, stack the work W, and the like, and thus constitutes the vacuum stacking device 100. Each unit can be simplified and the cost can be reduced. In the laminating operation of the present embodiment, in order to further improve the laminating accuracy of the laminated body L, for example, a pin guide laminating method, that is, pins and guide holes provided in the laminating stage 51 and the transport plate chuck 42 are engaged with each other. A method of combining and laminating may be adopted.

(Magnetic fixing release state of the transport plate)
First, as shown in FIG. 5 (c), the pair of peeling pistons 45 are extended downward in the Z-axis direction (arrow VIII (13) direction), and the through hole 42h provided in the transport plate chuck 42 is provided. Is inserted in a non-contact state. Then, the extension of the peeling piston 45 is stopped when the lower end of the peeling piston 45 reaches a position where it is flush with the lower surface of the transport plate chuck 42, that is, a position where it abuts on the other side 1b of the transport plate 1. Will be done. Here, since the lower end of the peeling piston 45 is in contact with the transport plate 1 and is firmly fixed in a movement restricted state, the movement of the transport plate 1 upward in the Z-axis direction is restricted.

Next, as shown in FIG. 5D, the transport plate chuck 42 is moved upward in the Z-axis direction (in the direction of arrow VII (14)) by the elevating piston 43, and is placed in a contracted standby state. .. At this time, a force larger than the magnetic force of the magnetic force portion 42m acting on the transport plate 1 is applied to the transport plate chuck 42 by the elevating piston 43, and the magnetic fixing between the transport plate chuck 42 and the transport plate 1 is released. Further, since the peeling piston 45 restricts the upward movement of the transport plate 1 in the Z-axis direction, no external force such as peeling is applied between the layers of the laminated body L, and the laminated body L is not loaded. The stacking accuracy can be maintained. Then, as shown in FIG. 5 (e), the pair of peeling pistons 45 are moved upward in the Z-axis direction (direction of arrow VIII (15)) and placed in a contracted standby state.

In the present embodiment, the magnetic force portion 42m employs a permanent magnet, but when an electromagnet that controls ON / OFF is adopted instead, the lower end of the peeling piston 45 is the transport plate 1. The magnetic force may be extinguished by switching from the ON control to the OFF control at the timing before and after the contact with the other side 1b.

<About the collection operation of the transport plate>
The recovery operation of the transport plate will be described separately in two states, a recovery preparation state and a recovery state, using FIGS. 6 (a) to 6 (e). 6 (a) to 6 (c) and 6 (e) are schematic cross-sectional views illustrating the recovery operation of the transport plate 1, and FIG. 6 (d) is the transport in FIG. 6 (c). It is a plane schematic diagram which shows only a plate 1 and a laminated body L.

(Preparation for collection)
First, as shown in FIG. 6A, gas is supplied into the closed space formed in the vacuum chamber 41 through the open port provided in the stacking stage 51, and the internal pressure becomes atmospheric pressure Pa. It is open to the atmosphere so that it becomes. Then, as shown in FIG. 6B, after the transport unit 40 is moved upward in the Z-axis direction (arrow VI (16) direction) by the transport unit drive mechanism, the stacking stage position D to the standby position C Is moved in the X-axis direction (arrow V (17) direction).

(Recovery status)
As shown in FIG. 6C, the transport plate recovery unit 60 is moved in the X-axis direction (arrow IX direction) by the transport plate recovery unit drive mechanism, so that the gripping means 61 is close to the transport plate 1. At the same time, the static elimination means 62 is brought close to the stacking stage 51. Then, after the transport plate 1 is gripped from the vertical direction by the gripping means 61 at the gripping position G, the transport plate 1 is moved in the XY plane (XY axis direction and θ direction) as shown in FIG. 6 (d). Will be moved. In addition, the static elimination means 62 causes the static elimination air i to flow between the transport plate 1 and the laminated body L.

Here, a static elimination mechanism using the gripping means 61 and the static elimination means 62 will be described. First, the charge fixing between the work Wa with the adhesive laminated on the uppermost portion of the laminated body L and the transport plate 1 is strong against the tensile force in the Z-axis direction, but is parallel to the XY plane. Lateral slippage occurs relatively easily with respect to a large shear force. Therefore, as shown in FIG. 6D, the position of the laminated body L remains fixed, and the transport plate 1 is slid into the XY plane with respect to the laminated body L by the gripping means 61. .. At this time, since the static eliminating air i is poured between the transport plate 1 and the laminated body L by the static eliminating means 62, the work Wa with the adhesive laminated on the uppermost portion of the laminated body L and the transport plate 1 The electrostatic adsorption force gradually weakens from the outside to the inside of the insulator. By repeating this slide and the pouring of the static elimination air i, the transport plate 1 is separated from the laminated body L and recovered. As a result, as shown in FIG. 6E, the work Wa with the adhesive is integrally laminated on the uppermost portion of the laminated body L on the laminated stage 51.

In the present embodiment, when the transport plate 1 is separated from the laminated body L and recovered, an external force such as peeling is not applied between the layers of the laminated body L, so that it is possible to prevent air from being mixed between the layers. Further, the work W in the present embodiment has been described using the work Wa with an adhesive, but instead of this, when the work W provided with the adhesive layer a and the protective layer p on both sides is used, the work W is used. After being laminated on the laminated body L, the protective layer p located on the upper surface side of the work W may be peeled off. Further, in the present embodiment, when the adhesive force between the layers of the laminated body L is relatively larger than the electrostatic adsorption force between the laminated body L and the transport plate 1, the transport plate 1 is gripped by the gripping means 61. , In addition to being moved in the XY plane, it may be moved in the Z-axis direction. This is because even if an external force in the Z-axis direction is applied to the laminated body L by the gripping means 61, the layers of the laminated body L are not peeled off, so that it is possible to prevent air from entering the layers and the stacking accuracy. This is because it can be maintained.

As described above, the laminating step of laminating one work W on the laminated body L has been described, but when it is necessary to further laminate the work W on the laminated body L, the laminating step (FIGS. 3 to 6) is performed. By repeating the process for the required number of sheets, the desired laminated body L can be formed.

100 Vacuum stacking device 1 Conveyor plate 10 Inversion unit (inversion means)
11 Inversion stage 20 Charging unit (charging means)
30 Alignment unit (alignment means)
31 Alignment stage 32 Installation block 40 Transport unit (transport means)
41 Vacuum chamber 42 Conveyor plate chuck 43 Elevating piston 44 Guide shaft part 45 Peeling piston 50 Laminating unit (laminating means)
51 Laminating stage 60 Conveyor plate recovery unit (conveyor plate recovery means)
61 Gripping means 62 Static elimination means A Charging / reversing position B Alignment stage position C Standby position D Laminated stage position L Laminated body W Work Wa Work with adhesive

Claims (8)

A vacuum stacking device that sequentially stacks multiple workpieces.
A transport plate that holds the work and
An alignment means for aligning the work held by the transport plate while fixing and supporting the transport plate.
Laminating means for laminating the aligned workpieces on the laminating stage under vacuum.
The work is transported from the alignment means to the stacking means while moving between the alignment means and the laminating means, and while the work is held by the transport plate, the transport plate is fixedly supported. Equipped with a means of transportation,
The transport plate is detachable from each of the alignment means and the transport means, and is characterized in that the work is charged and fixed on one side and magnetically fixed on the other side with the transport means. The vacuum laminating device according to claim 1, wherein the transport plate is made of a magnetic material and an insulator is provided on one side of the transport plate. The vacuum laminating device according to claim 1 or 2, wherein the transport plate is charged and fixed on a non-adhesive second surface which is opposite to the first surface of the work having adhesiveness. .. The alignment means includes an alignment stage and an installation block on the alignment stage.
The vacuum laminating device according to any one of claims 1 to 3, wherein the transport plate is placed on the installation block so that the work and the alignment stage are in a non-contact state. .. The transport means is brought into contact with the stacking means to form a closed space, and the transport plate is moved by the transport means in the closed space under vacuum to stack the workpieces. The vacuum laminating apparatus according to any one of claims 1 to 4, wherein the vacuum laminating apparatus is characterized. Further equipped with a transport plate collection means,
The method according to any one of claims 1 to 5, wherein the transport plate collecting means collects the transport plate by removing static electricity from the transport plate so that the transport plate can be peeled off from the work. The vacuum stacking device described. It is a method of manufacturing a laminated body in which a plurality of workpieces are sequentially laminated.
A step of charging and fixing the work on one side of the transport plate,
A step of aligning the work charged and fixed to the transport plate while the transport plate is fixedly supported by the alignment stage, and
With the work charged and fixed to one side of the transport plate, the other side of the transport plate is magnetically fixed, and the aligned work is transported from the alignment stage to the laminated stage.
A step of laminating the work aligned on the laminating stage under vacuum, and a step of laminating the work.
A method for manufacturing a laminated body, which comprises the above. The step of transporting the work is to magnetically fix the transport plate in a vacuum chamber having an upper wall and a side wall, and to form a closed space by bringing the vacuum chamber into contact with the laminated stage. The method for manufacturing a laminated body according to claim 7.

Images