JP2022045252A - Heat treatment furnace - Google Patents

Abstract

To suppress the penetration of gases at the outside of a furnace body into a treatment chamber.SOLUTION: A heat treatment furnace comprises a furnace body 12, a carrier device 20, a plurality of guide rollers (22a, 22b, 22c, 24), heating devices (22, 26), a gas feed device 38 and an air curtain device 48. The carrier device carries a workpiece W stretched over from a carry-in port 15a to a carry-out port 16a from the carry-in port 15a to the carry-out port 16a through a treatment chamber 19. The guide rollers (22a, 22b, 22c, 24) guide the workpiece carried by the carrier device. The heating devices (22, 26) are arranged at the inside of the treatment chamber, and heat the workpiece carried by the carrier device. The air feed device 38 feeds a first gas into the treatment chamber. The air curtain device 48 is provided in the vicinity of the carry-in port 15a and jets a second gas toward the carry-in port 15a.SELECTED DRAWING: Figure 1

Description

The technique disclosed herein relates to a heat treatment furnace that heat-treats an object to be treated.

In the heat treatment furnace disclosed in Patent Document 1, the object to be processed is bridged from the carry-in port to the carry-out port through the processing chamber. The object to be processed is carried into the processing chamber from the carry-in entrance, transported in the processing chamber, and carried out from the carry-out port. The object to be processed is heated by a heating device arranged in the processing chamber, and heat treatment is performed on the object to be processed while being conveyed in the processing chamber. In order to effectively heat-treat the object to be treated, it is necessary to control the atmosphere in the treatment room. Therefore, in the heat treatment furnace of Patent Document 1, gas is supplied to the processing chamber by an air supply device to control the atmosphere in the processing chamber.

International Publication 2014/163175

In the above heat treatment furnace, the object to be processed is bridged from the carry-in entrance to the carry-out port through the treatment chamber. Therefore, the carry-in entrance and the carry-out port are always open, and the processing room communicates with the outside of the furnace body through the carry-in entrance and the carry-out port. As a result, the gas outside the furnace body enters the processing chamber through the carry-in inlet and the carry-out port, and the atmosphere in the treatment chamber is deteriorated. In particular, at the carry-in inlet, as the object to be processed is transported from the outside of the furnace to the treatment chamber, the gas outside the furnace body easily enters the treatment chamber, and the atmosphere in the treatment chamber near the carry-in inlet tends to deteriorate. There was a problem. The present specification discloses a technique for suppressing the entry of gas outside the furnace body into the processing chamber.

The heat treatment furnace disclosed in the present specification includes a furnace body including a carry-in port, a carry-out port, and a processing chamber arranged between the carry-in port and the carry-out port, and a cover spanned from the carry-in port to the carry-out port. In the processing chamber, there is a transport device that transports the processed material from the carry-in entrance through the processing chamber to the carry-out port, a plurality of guide rollers that are arranged in the processing chamber and guide the processed object to be conveyed by the transport device, and the processing chamber. A heating device for heating the object to be processed to be conveyed by the transfer device, a first air supply device for supplying the first gas to the processing chamber, and a second gas provided near the carry-in inlet are provided. It is equipped with an air curtain device that blows out and shuts off the carry-in entrance.

In the above heat treatment furnace, an air curtain device is provided in the vicinity of the carry-in port, and the carry-in port is blocked by the second gas ejected from the air curtain device. Therefore, it is possible to prevent the gas outside the furnace body from entering the processing chamber. As a result, it is possible to prevent the atmosphere in the processing chamber near the carry-in entrance from deteriorating.

The vertical sectional view of the heat treatment furnace which concerns on Example 1. FIG. FIG. 1 is a sectional view taken along line II-II of FIG. Sectional drawing of the heater which concerns on Example 1. FIG. Sectional drawing of the air supply pipe which concerns on Example 1. FIG. A vertical sectional view showing an enlarged view of the vicinity of the carry-in entrance where the air curtain device is arranged. FIG. 5 is a sectional view taken along line VI-VI of FIG. Sectional drawing of the air curtain air supply pipe which concerns on Example 1. FIG. A vertical sectional view showing an enlarged opening width adjusting device arranged near the carry-in entrance of the heat treatment furnace. FIG. 8 is a sectional view taken along line IX-IX of FIG. A cross-sectional view showing an enlarged view of a bearing portion that supports the rotating shaft of the guide roller.

In the heat treatment furnace disclosed in the present specification, the object to be processed may be a film body stretched from the carry-in port to the carry-out port. The air curtain device is arranged on the front surface side of the film body, a first air supply port for ejecting a second gas toward the surface of the film body, and on the back surface side of the film body, on the back surface of the film body. It may be provided with a second air supply port that ejects a second gas toward the air. According to such a configuration, the opening formed on the surface side of the film body to be treated (the opening formed between the wall on the surface side of the carry-in entrance and the surface of the film body) is the first air supply. The opening formed on the back surface side of the film body (the opening formed between the wall on the back surface side of the carry-in entrance and the back surface of the film body) blocked by the second gas ejected from the mouth is the second air supply. It is blocked by a second gas ejected from the mouth. As a result, it is possible to effectively prevent the gas outside the furnace body from entering the treatment chamber.

In the heat treatment furnace disclosed in the present specification, the first air supply port may be arranged on the processing chamber side in the vicinity of the carry-in port. The direction in which the second gas is ejected from the first air supply port may be a direction toward the outside of the furnace body from the first air supply port through the carry-in inlet. Further, the second air supply port may be arranged on the processing chamber side near the carry-in entrance. The direction in which the second gas is ejected from the second air supply port may be a direction toward the outside of the furnace body from the second air supply port through the carry-in inlet. According to such a configuration, since the second gas is ejected from the processing chamber toward the outside of the furnace body through the carry-in inlet, the gas outside the furnace body is effectively suppressed from entering the treatment chamber. be able to.

In the heat treatment furnace disclosed in the present specification, the direction in which the second gas is ejected from the first air supply port and the film when viewed in a cross section orthogonal to the surface of the film body and passing through the carry-in inlet and the carry-out port. The angle formed by the surface of the body may be in the range of 0 to 90 degrees. Further, the angle between the direction in which the second gas is ejected from the second air supply port and the back surface of the film body may be in the range of 0 to 90 degrees. According to such a configuration, the second gas ejected from the first air supply port and the second air supply port collides with the front surface or the back surface of the film body, and at least a part thereof is along the surface of the film body. Flows. Such a second gas flow can effectively prevent the gas outside the furnace from entering the processing chamber.

In the heat treatment furnace disclosed in the present specification, the carry-in inlet is a pair of first sides parallel to the surface of the film body when viewed along the transport direction of the film body, and the surface of the film body. It may have a rectangular shape having a pair of orthogonal second sides. The first air supply port and the second air supply port may be arranged along the first side. According to such a configuration, between one side (front side side) of the pair of first sides and the surface of the film body, and the other side (back side side) of the pair of first sides and the film. Each of the space between the back surface of the body and the back surface of the body can be blocked from the outside of the furnace by the first air supply port and the second gas ejected from the second air supply port.

In the heat treatment furnace disclosed in the present specification, where L is the length of the first side of the carry-in inlet and L1 is the dimension in the direction parallel to the first side of the first air supply port, L ≦ L1. The relationship may be established. According to such a configuration, since the first air supply port is provided at a length equal to or longer than the length of the first side, it is possible to effectively suppress the intrusion of gas outside the furnace from the carry-in port. The first air supply port may be formed from a single air supply port (for example, a slit-shaped air supply port). In this case, the dimension L1 of the single air supply port may be L or more. Alternatively, the first air supply port may be formed from a plurality of air supply ports arranged at intervals in a direction parallel to the first side. In this case, the dimension L1 from the air supply port arranged at one end of the plurality of air supply ports to the air supply port arranged at the other end may be L or more.

In the heat treatment furnace disclosed in the present specification, the carry-in inlet is a pair of first sides parallel to the surface of the film body when viewed along the transport direction of the film body, and the surface of the film body. It may have a rectangular shape having a pair of orthogonal second sides. The heat treatment furnace may further include an opening width adjusting device for adjusting the dimensions of the second side of the carry-in inlet. According to such a configuration, by adjusting the opening width of the carry-in inlet, it is possible to adjust the degree to which the gas outside the furnace enters the processing chamber.

In the heat treatment furnace disclosed in the present specification, the opening width adjusting device includes a first shielding plate arranged on the front surface side of the film body and a second shielding plate arranged on the back surface side of the film body. You may be. The first shielding plate may be movable in a direction orthogonal to the surface of the film body. The second shielding plate may be movable in a direction orthogonal to the back surface of the film body. Then, by adjusting the positions of the first shield plate and the second shield plate, the dimensions of the second side of the carry-in inlet may be adjusted. According to such a configuration, the opening width of the carry-in entrance can be adjusted by adjusting the positions of the two shielding plates.

In the heat treatment furnace disclosed in the present specification, the furnace body may be provided for each guide roller and may include a bearing portion that rotatably supports the guide roller. Each bearing portion may further include a second air supply device that supplies at least one of a first gas and a second gas to the space between the bearing portion and the processing chamber. According to such a configuration, it is possible to prevent the gas outside the furnace from entering the processing chamber through the bearing portion.

In the heat treatment furnace disclosed in the present specification, the object to be processed may be conveyed from the carry-in port to the carry-out port through a transfer path defined by a plurality of guide rollers. The heating device may be arranged along the transport path and include a plurality of heaters that radiate electromagnetic waves in the infrared region to heat the object to be processed. With such a configuration, the object to be processed can be heated by a plurality of heaters arranged along the transport path while being transported along the transport path.

In the heat treatment furnace disclosed in the present specification, the first air supply device is arranged in the processing chamber along the transport path, and a plurality of air supply pipes for ejecting the first gas toward the object to be processed. May be provided. According to such a configuration, the atmosphere in the heat treatment furnace can be adjusted to a desired atmosphere by a plurality of air supply pipes arranged along the transport path.

In the heat treatment furnace disclosed herein, the object to be treated may be a film body including a film and a paste applied to at least one of the front surface and the back surface of the film. The heating device may remove the water contained in the paste. According to such a configuration, the atmosphere in the treatment chamber can be controlled to a desired atmosphere, so that the moisture contained in the paste can be effectively removed.

In the heat treatment furnace disclosed in the present specification, the transfer device is arranged outside the furnace body and in the vicinity of the carry-in inlet, and is carried by the carry-in inlet roller around which the object to be processed is wound and outside the furnace body. Further, a carry-out outlet roller, which is arranged in the vicinity of the outlet and winds up the object to be processed carried in the processing chamber, may be provided. By rotating the carry-in inlet roller and the carry-out outlet roller, the object to be processed that has been ticketed to the carry-in inlet roller may be sent out from the carry-in inlet roller and conveyed in the processing chamber. According to such a configuration, the heat treatment can be continuously performed on the object to be processed that has been passed through the carry-in inlet roller.

In the heat treatment furnace disclosed in the present specification, the atmosphere in the treatment chamber may be an inert gas atmosphere having a dew point of 0 ° C. or lower. According to such a configuration, it is possible to suppress the condensation of the water contained in the atmospheric gas.

Hereinafter, the heat treatment furnace 10 according to the first embodiment will be described. The heat treatment furnace 10 of this embodiment is a drying furnace (dehydrating device) for removing water contained in a work W (an example of an object to be treated). The work W is a sheet body that continuously extends in the longitudinal direction, and corresponds to, for example, a film (an example of a film body) used for a liquid crystal display, an organic EL, a battery, or the like. In such a film, when the film itself contains water, or when the film is coated with a coating layer, the coating layer may contain water. Therefore, the water contained in the film is first removed, and then the film from which the water has been removed is cut into a desired size to produce a final product. The heat treatment furnace 10 of this embodiment can be used to remove water from such a sheet body.

Hereinafter, the configuration of the heat treatment furnace 10 will be described with reference to the drawings. As shown in FIGS. 1 and 2, the heat treatment furnace 10 includes a rectangular parallelepiped furnace body 12, a transfer device 20 for loading and unloading the work W into and out of the furnace body 12, and a heating device (26,) for heating the work W. 28) and an air supply device (38, etc.) that supplies cooling gas to the surface of the work W are provided.

The furnace body 12 has a lower wall 13, an upper wall 14 facing the lower wall 13, and side walls 17 and 18 having one end connected to the lower wall 13 and the other end connected to the upper wall 14 (see FIG. 2). And the carry-in side wall 15 and the carry-out side wall 16 that close the ends of the processing chambers (19a, 19b) surrounded by these walls 13, 14, 17, and 18.
The lower wall 13 is a rectangular plate material when viewed in a plan view, and is arranged below the processing chambers (19a, 19b). As shown in FIG. 1, the lower wall 13 is provided with a plurality of exhaust ports 13a at intervals of substantially constant in the x direction. Of the plurality of exhaust ports 13a, the five exhaust ports 13a arranged in the center are arranged at positions facing the guide rollers 24 described later. The exhaust port 13a arranged at one end in the x direction of the plurality of exhaust ports 13a is arranged at a position close to the carry-in side wall 15. The exhaust port 13a arranged at the other end of the plurality of exhaust ports 13a in the x direction is arranged at a position close to the carry-out side wall 15. Each of the plurality of exhaust ports 13a is connected to the exhaust fan 13b. When the exhaust fan 13b is operated, the atmospheric gas in the processing chambers (19a, 19b) is exhausted to the outside of the processing chambers (19a, 19b).
The upper wall 14 is a plate material having the same shape as the lower wall 13, and is arranged above the processing chambers (19a, 19b). Similar to the lower wall 13, the upper wall 14 is also provided with a plurality of exhaust ports 14a at a substantially constant interval in the x direction. Each of the plurality of exhaust ports 14a is arranged at a position facing each of the plurality of exhaust ports 13a. Each of the plurality of exhaust ports 14a is connected to the exhaust fan 14b. When the exhaust fan 14b is operated, the atmospheric gas in the processing chambers (19a, 19b) is exhausted to the outside of the processing chambers (19a, 19b).
A carry-in inlet 15a is formed on the carry-in side wall 15, and a carry-out outlet 16b is formed on the carry-out side wall 16. The positions of the carry-in inlet 15a and the carry-out port 16b in the height direction are the same, and the carry-in inlet 15a and the carry-out port 16b face each other. As is clear from FIG. 1, the processing chambers (19a, 19b) are arranged between the carry-in inlet 15a and the carry-out port 16b.
The inner surfaces (that is, the surfaces on the processing chamber (19a, 19b) side) of the walls 13, 14, 15, 16, 17, and 18 constituting the furnace body 12 are mirror-finished. As a result, the reflectance of the electromagnetic waves in the infrared region of these surfaces (specifically, the electromagnetic waves radiated by the heaters 26 and 28 described later) is 50% or more. This makes it possible to efficiently irradiate the work W with the electromagnetic waves radiated by the heaters 26 and 28.

The transport device 20 includes a carry-in inlet roller 21 which is outside the furnace body 12 and is arranged near the carry-in inlet 15a, and a carry-out roller 25 which is outside the furnace body 12 and is arranged near the carry-out port 16a. , A plurality of guide rollers (22a, 22b, 22c, 24) arranged in the processing chamber (19a, 19b) are provided.
The work W is wound around the carry-in inlet roller 21. The work W ticketed to the carry-in inlet roller 21 is bridged from the carry-in entrance 15a through the processing chambers (19a, 19b) to the carry-out port 16a. Specifically, the work W is bridged from the carry-in inlet roller 21 through the carry-in inlet 15a to the guide rollers (22a, 22b, 22c, 24), and further carried from the guide rollers (22a, 22b, 22c, 24). It is bridged to the carry-out roller 25 via the outlet 16a.
The carry-out roller 25 is a roller that winds up the work W carried out from the processing chambers (19a, 19b). A drive device (not shown) is connected to the carry-out roller 25, and the carry-out roller 25 is rotationally driven by the drive device. When the carry-out roller 25 rotates, the work W ticketed to the carry-in inlet roller 21 is sent out to the processing chambers (19a, 19b). The work W sent out from the carry-in inlet roller 21 is guided by the guide rollers (22a, 22b, 22c, 24) to move in a predetermined transport path in the processing chamber (19a, 19b), and moves from the carry-out port 16a to the processing chamber. (19a, 19b) It is sent out and wound up by the carry-out roller 25. That is, the guide rollers (22a, 22b, 22c, 24) define the transport path of the work W in the processing chamber (19a, 19b).

The guide rollers (22a, 22b, 22c, 24) include a plurality of upper guide rollers (22a, 22b, 22c) arranged in the vicinity of the upper wall 14 and a plurality of lower guide rollers arranged in the vicinity of the lower wall 13. 24 is provided. In this embodiment, the guide rollers (22a, 22b, 22c, 24) are contact type rollers that come into contact with the work W, but non-contact type rollers that guide the work W in a non-contact manner may also be used. can.
The upper guide rollers (22a, 22b, 22c) are arranged at regular intervals in the x direction. Specifically, the upper guide roller 22a is arranged adjacent to the carry-in inlet 15a, and the upper guide roller 22c is arranged adjacent to the carry-out port 16a. The plurality of guide rollers 22b are arranged at equal intervals between the upper guide rollers 22a and the upper guide rollers 22c. The positions of the upper guide rollers (22a, 22b, 22c) in the height direction are the same.
Like the upper guide rollers (22a, 22b, 22c), each of the plurality of lower guide rollers 24 is arranged at regular intervals in the x direction. The distance between the adjacent lower guide rollers 24 in the x direction is the same as the distance between the upper guide rollers (22a, 22b, 22c) in the x direction. The positions of the plurality of lower guide rollers 24 in the x direction are the central positions of the adjacent upper guides (22a, 22b, 22c). The positions of the plurality of lower guide rollers 24 in the height direction are the same.

Since the upper guide rollers (22a, 22b, 22c) and the lower guide roller 24 are arranged as described above, the work W conveyed in the x direction from the carry-in inlet 15a is conveyed downward by the upper guide roller 22a. Then, it is conveyed upward by the lower guide roller 24, and thereafter, it is repeatedly conveyed in the vertical direction by the upper guide roller 22b and the lower guide roller 24. Then, the work W conveyed upward from the lower guide roller 24 arranged on the most side of the carry-out port 16a is conveyed toward the carry-out port 16a by the upper guide roller 22c. In this way, by repeatedly transporting the work W in the processing chamber (19a, 19b) in the vertical direction, the space in the processing chamber (19a, 19b) can be effectively utilized, and the processing time for drying the work W is secured. ing. As is clear from FIG. 1, the processing chambers (19a, 19b) are provided on the upper wall 14 side by the work W spanning the guide rollers (22a, 22b, 22c, 24). And the lower processing chamber 19b provided on the lower wall 13 side. As is clear from FIG. 2, the upper processing chamber 19a and the lower processing chamber 19b are connected at a position where there is no work W (that is, a position outside both ends of the work W in the Y direction).

The heating device is arranged in the processing chambers (19a, 19b) and heats the work W transported by the transport device 20. The heating device includes a first heater (26a, 26b) arranged in the vicinity of the guide roller (22a, 22b, 22c, 24), and a height between the upper guide roller (22a, 22b, 22c) and the lower guide roller 24. It is provided with a second heater 28 arranged on the roller. As shown in FIG. 2, the first heater (26a, 26b) and the second heater 28 extend in the axial direction of the guide rollers (22a, 22b, 22c, 24), and extend in the width direction (y direction) of the work W. It is possible to heat the whole of.

As shown in FIG. 1, the first heaters (26a, 26b) are arranged below a plurality of first upper heaters 26a arranged above the upper guide rollers (22a, 22b, 22c) and below the lower guide rollers 24. A plurality of first lower heaters 26b are provided. Each of the first upper heaters 26a is arranged to face the corresponding upper guide rollers (22a, 22b, 22c), and each of the first lower heaters 26b is arranged to face the corresponding lower guide rollers 24. ing. Therefore, the work W is located between the first upper heater 26a and the upper guide rollers (22a, 22b, 22c), and the work W is directly heated by the first upper heater 26a. Similarly, the work W is located between the first lower heater 26b and the lower guide roller 24, and the work W is directly heated by the first lower heater 26b.

Two second heaters 28 are arranged below each of the upper guide rollers (22a, 22b, 22c) at intervals in the z direction. Further, two second heaters 28 are arranged above each of the lower guide rollers 24 with an interval in the z direction. Therefore, 11 second heaters 28 are arranged side by side with an interval in the x direction, and two second heaters 28 are arranged side by side with an interval in the y direction. As is clear from the figure, the second heater 28 is adjacent to the position facing the work W bridged between the upper guide roller (22a, 22b, 22c) and the lower guide roller 24 (that is, adjacent to the work W in the transport direction). It is located near the intermediate position between the guide rollers). Since the second heater 28 extends in the axial direction of the guide roller (22a, 22b, 22c, 24), the width direction of the work W bridged between the upper guide roller (22a, 22b, 22c) and the lower guide roller 24. The whole of is heated by the second heater 28.

The first heaters (26a, 26b) are known wavelength-controllable heaters that radiate electromagnetic waves in the infrared region, and the first heaters (26a, 26b) and the second heater 28 have the same structure. Therefore, here, the structure of the second heater 28 will be briefly described.
As shown in FIG. 3, the second heater 28 includes a filament 30, an inner tube 32 for accommodating the filament 30, and an outer tube 34 for accommodating the inner tube 32. The filament 30 is, for example, a heating element made of tungsten, and is supplied with electric power from an external power source (not shown). When electric power is supplied to the filament 30 to reach a predetermined temperature (for example, 1200 to 1700 ° C.), an electromagnetic wave including infrared rays is radiated from the filament 30. The inner tube 32 is formed of an infrared transmissive material that transmits only electromagnetic waves in a specific wavelength region (infrared region in this embodiment) among the electromagnetic waves radiated from the filament 30. By appropriately selecting the infrared transmissive material forming the inner tube 32, the wavelength of the electromagnetic wave radiated from the filament 30 to the outside of the inner tube 32 can be adjusted to a desired wavelength. The outer tube 34 is also made of the same infrared transmissive material as the inner tube 32. Therefore, the electromagnetic wave transmitted through the inner tube 32 is transmitted through the outer tube 34 and radiated to the outside. The space 36 between the inner pipe 32 and the outer pipe 34 is a refrigerant flow path through which a refrigerant (for example, air) flows. By supplying the refrigerant to the space 36 (that is, the refrigerant flow path), it is prevented that the temperature of the outer pipe 34 becomes too high. This prevents the work W from overheating. A wavelength-controllable heater that radiates an electromagnetic wave in the infrared region is disclosed in detail in, for example, Japanese Patent No. 4790092.

The air supply device (an example of the first air supply device) includes a plurality of air supply pipes 38 extending in the y direction inside the processing chamber (19a, 19b) and a plurality of air supply pipes arranged outside the treatment chamber (19a, 19b). The 38 is provided with an air supply fan (not shown) for supplying a cooling gas (an example of the first gas). As shown in FIG. 4, the air supply pipe 38 is formed with ejection holes 39a and 39b at two locations in the circumferential direction. Therefore, the cooling gas supplied from the air supply fan to the air supply pipe 38 is injected into the processing chambers (19a, 19b) from the ejection holes 39a, 39b. In this embodiment, the direction in which the air supply pipe 38 is installed is adjusted so that the ejection direction of the cooling gas injected from the ejection holes 39a and 39b is orthogonal to the surface of the work W. As shown in FIG. 4, the ejection holes 39a and 39b are arranged at positions facing each other across the axis of the air supply pipe 38. Therefore, when the work W is located on each of the carry-in inlet 15a side and the carry-out port 16a side of the air supply pipe 38, the cooling gas injected from the ejection hole 39a of the air supply pipe 38 is injected into one work W, and the work W is concerned. The cooling gas injected from the ejection hole 39b of the air supply pipe 38 is injected into the other work W. Further, as shown in FIG. 2, a plurality of ejection holes 39a and 39b of the air supply pipe 38 are formed at intervals in the y direction. Therefore, the cooling gas injected from the ejection holes 39a and 39b is injected in the entire width direction (y direction) of the work W.

As shown in FIG. 1, two air supply pipes 38 are arranged below each of the upper guide rollers (22a, 22b, 22c) at intervals in the z direction. Further, two air supply pipes 38 are arranged above each of the lower guide rollers 24 with an interval in the z direction. As is clear from FIG. 1, the air supply pipe 38 is arranged at a position different from the position where the first heater (26a, 26b) and the second heater 28 are arranged. Specifically, the second heater 28 and the air supply pipe 38 are alternately arranged at equal intervals in the z direction (conveying direction). Further, as described above, the processing chamber (19a, 19b) is divided into an upper processing chamber 19a and a lower processing chamber 19b by the work W bridged over the guide rollers (22a, 22b, 22c, 24). However, the air supply pipe 38 is arranged in each of the upper treatment chamber 19a and the lower treatment chamber 19b.

As the cooling gas supplied to the air supply pipe 38, for example, an inert gas, nitrogen, Ar gas or the like can be used. The atmospheric gas in the treatment chambers (19a, 19b) is adjusted by the gas injected from the air supply pipe 38 into the treatment chambers (19a, 19b). In this embodiment, in order to remove the water contained in the work W, the atmospheric gas in the treatment chambers (19a, 19b) is adjusted to a gas having a dew point of 0 ° C. or lower. The cooling gas may be an atmosphere having a dew point of 0 ° C. or lower.

As shown in FIGS. 1, 5 and 6, the heat treatment furnace 10 further includes an air curtain device 50 provided in the vicinity of the carry-in inlet 15a. The air curtain device 50 includes a lower air supply pipe 48b extending in the y direction inside the processing chamber 19b, an upper air supply pipe 48a extending in the y direction inside the processing chamber 19a, and an upper supply pipe 48a arranged outside the processing chamber (19a, 19b). An air supply fan (not shown) for supplying a blocking gas (an example of a second gas) to the trachea 48a and the lower air supply pipe 48b is provided.

As shown in FIGS. 5 and 6, the lower air supply pipe 48b is located in the vicinity of the carry-in side wall 15 in the processing chamber 19b and is arranged on the back surface side of the work W. Specifically, the lower air supply pipe 48b is slightly below the lower side 151b of the carry-in inlet 15a and is arranged along the lower side 151b. That is, when viewed along the transport direction of the work W, the carry-in inlet 15a has a pair of upper side 151a and lower side 151b (an example of the first side) extending in the y direction and a pair of side sides 152 extending in the z direction (the first). It is formed in a rectangular shape having an example of two sides). The lower air supply pipe 48b is arranged along the lower side 151b parallel to the back surface of the work W, one end thereof is located in the -y direction from one end (the end in the -y direction) of the lower side 151b, and the other end is processed. It extends to the outside of the chamber 19b. That is, the lower air supply pipe 48b has a longer dimension in the y direction than the dimension L of the lower side 151b, and the lower air supply pipe 48b is arranged on the entire lower side of the lower side 151b.

The lower air supply pipe 48b is formed with an air supply port 49b (an example of a second air supply port) that ejects the shutoff gas supplied from the air supply fan toward the back surface of the work W (see FIG. 7). .. In this embodiment, the air supply port 49b is formed in a slit shape extending in the axial direction (y direction) of the lower air supply pipe 48b. The slit-shaped air supply port 49b is formed in the range of L1 shown in FIG. Therefore, the dimension L1 of the air supply port 49b in the y direction is equal to or greater than the dimension L of the lower side 151b of the carry-in inlet 15a (L ≦ L1). Further, as is clear from FIG. 6, one end of the air supply port 49b is located in the −y direction from one end of the lower side 151b (the end in the −y direction), and the other end is the other end of the lower side 151b (the end in the + y direction). Part) is located in the + y direction. Therefore, the air supply port 49b is always located below the carry-in port 15a, and the blocking gas from the air supply port 49b is ejected to the entire carry-in port 15a in the y direction.
The air supply port 49b of this embodiment is a single slit-shaped air supply port extending in the y direction, but the present invention is not limited to such a form. For example, the air supply port 49b may be formed from a plurality of air supply ports arranged at predetermined intervals in the y direction. In this case, the air supply port arranged at one end of the plurality of air supply ports is located in the −y direction from one end (end in the −y direction) of the lower side 151b, and the air supply port is arranged at the other end. Is located in the + y direction from the other end (the end in the + y direction) of the lower side 151b, so that the blocking gas may be ejected to the entire carry-in inlet 15a.

As shown in FIG. 7, the air supply port 49b is formed at one position in the circumferential direction of the lower air supply pipe 48b. Therefore, the blocking gas ejected from the air supply port 49b is ejected in a specific direction in the circumferential direction of the lower air supply pipe 48b. In this embodiment, as shown in FIG. 5, the direction of the blocking gas ejected from the air supply port 49b (direction of the arrow 62a) is such that the blocking gas passes from the air supply port 49b through the carry-in inlet 15a to the outside of the furnace body 12. It is in the direction of going to. As is clear from FIG. 5, the shutoff gas ejected from the air supply port 49b collides with the back surface of the work W outside the furnace body 12, and flows toward the outside of the furnace (arrow 62c) and flows toward the inside of the furnace (arrow). It is divided into 62b) and. In this embodiment, since the breaking gas collides with the back surface of the work W outside the furnace body 12, the flow toward the outside of the furnace (arrow 62c) becomes stronger than the flow toward the inside of the furnace (arrow 62b). As a result, it is possible to effectively suppress the entry of the atmosphere outside the furnace body 12 into the treatment chambers (19a, 19b).

The direction in which the shutoff gas is ejected from the air supply port 49b may be any direction as long as it can shut off the carry-in inlet 15a, and is not limited to the direction shown in FIG. For example, when viewed in a cross section orthogonal to the front surface (or back surface) of the work W and passing through the carry-in inlet 15a and the carry-out port 16a (that is, when viewed in the cross section shown in FIG. 5), the air supply port 49b is cut off. The direction in which the blocking gas is ejected may be set so that the angle between the gas ejection direction and the back surface of the work W (θ ₂ in FIG. 5) is in the range of 0 to 90 degrees. Even with such a configuration, the breaking gas collides with the back surface of the work W, so that a sufficient flow toward the outside of the furnace is generated, and the atmosphere outside the furnace body 12 enters the treatment chamber (19a, 19b). It can be suppressed.

On the other hand, the upper air supply pipe 48a is located near the carry-in side wall 15 in the processing chamber 19a and is arranged on the surface side of the work W (see FIGS. 5 and 6). Specifically, the upper air supply pipe 48a is located slightly above the upper side 151a of the carry-in inlet 15a and along the upper side 151a parallel to the surface of the work W. Like the lower air supply pipe 48b, the upper air supply pipe 48a has one end located in the −y direction from one end (the end in the −y direction) of the upper side 151a, and the other end extends to the outside of the processing chamber 19a. ..

The upper air supply pipe 48a is formed with an air supply port 49a (an example of the first air supply port) that ejects the shutoff gas supplied from the air supply fan toward the surface of the work W (see FIG. 7). .. Like the air supply port 49b, the air supply port 49a is formed in a slit shape extending in the axial direction (y direction) of the upper air supply pipe 48a, and is formed in the range of L1 shown in FIG. Therefore, the dimension of the air supply port 49a in the y direction is the same as the dimension L1 of the air supply port 49b, and is equal to or greater than the dimension L of the upper side 151a of the carry-in inlet 15a (L ≦ L1). Further, also in the upper air supply pipe 48a, the air supply port 49a is always located above the carry-in port 15a, and the shutoff gas from the air supply port 49a is ejected to the entire carry-in port 15a in the y direction. There is. The air supply port 49a may be formed of a plurality of air supply ports arranged at predetermined intervals in the y direction, similarly to the air supply port 49b.

As shown in FIG. 5, the direction of the blocking gas ejected from the air supply port 49a (direction of the arrow 60a) is the direction in which the blocking gas flows from the air supply port 49a through the carry-in inlet 15a to the outside of the furnace body 12. ing. In this embodiment, the blocking gas ejected from the air supply port 49a collides with the surface of the work W outside the furnace body 12, and has a flow toward the outside of the furnace (arrow 60c) and a flow toward the inside of the furnace (arrow 60b). Divided into. As is clear from the figure, the flow toward the outside of the furnace (arrow 60c) is stronger than the flow toward the inside of the furnace (arrow 60b), so that the atmosphere outside the furnace body 12 enters the treatment chamber (19a, 19b). Can be effectively suppressed.

As is clear from FIG. 6, the position where the blocking gas ejected from the air supply port 49a collides with the work W (the position in the y direction) and the position where the blocking gas ejected from the air supply port 49b collides with the work W. (Position in the y direction) is set to be the same position. Therefore, at a position where there is no work W (position in the y direction (see FIG. 6)), the blocking gas ejected from the air supply port 49a collides with the blocking gas ejected from the air supply port 49b and heads toward the outside of the furnace. A flow and a flow toward the inside of the furnace are formed. By colliding the flow of the shutoff gas from the upper air supply pipe 48a with the flow of the shutoff gas from the lower air supply pipe 48b to form a flow toward the outside of the furnace, the atmosphere outside the furnace body 12 is made into the treatment chamber (19a, It effectively suppresses entry into 19b).

Further, the direction of ejecting the breaking gas from the air supply port 49a is the same as that of the air supply port 49b, and the direction of ejecting the breaking gas from the air supply port 49a and the surface of the work W are formed when viewed in the cross section shown in FIG. The direction in which the blocking gas is ejected may be set so that the angle (θ ₁ in FIG. 5) is in the range of 0 to 90 degrees.

As the blocking gas injected from the air supply ports 49a and 49b, the same gas as the cooling gas supplied to the air supply pipe 38, for example, an inert gas, nitrogen, Ar gas or the like can be used, or the air supply pipe. A gas different from the cooling gas supplied to 38 can also be used. In this embodiment, in order to remove the water contained in the work W, it is preferable that the atmospheric gas in the treatment chambers (19a, 19b) is adjusted to a gas having a dew point of 0 ° C. or lower. Therefore, for example, the air supply pipe 38 supplies an inert gas or air having a dew point of −40 ° C., and the air curtain device 50 supplies an inert gas or air having a dew point of −60 ° C. or a dew point of −20 ° C. May be.

Further, as is clear from the above description, the opening between the work W of the carry-in inlet 15a and the upper side 151a is blocked by the blocking gas injected from the air supply port 49a, and from the work W of the carry-in inlet 15a to the lower side 151b. The opening between them is blocked by the blocking gas injected from the air supply port 49b. On the other hand, as is clear from the figure, the distance from the work W to the upper side 151a of the carry-in entrance 15a is shorter than the distance from the work W to the lower side 151b of the carry-in entrance 15a. Therefore, in this embodiment, the flow rate of the blocking gas injected from the air supply port 49a may be set to be smaller than the flow rate of the blocking gas injected from the air supply port 49b. However, the flow rate of the blocking gas injected from the air supply port 49a and the flow rate of the blocking gas injected from the air supply port 49b may be set to be the same.

The controller 44 is composed of a processor including a CPU, a ROM, and a RAM, and controls a transfer device 20, a heating device (26, 28), and an air supply device. Specifically, the controller 44 controls the transport speed and tension of the work W by controlling the transport device 20, and controls the heating amount of the work W by controlling the heating devices (26, 28). By controlling the air device, the flow rate and the flow velocity of the cooling gas injected from the air supply pipe 38 to the work W are controlled. Further, the controller 44 controls the flow rate and the flow velocity of the breaking gas injected from the air curtain device 50.

The heat treatment furnace 10 is provided with a through device for setting the work W wound around the carry-in inlet roller 21 on the carry-out port roller 25. As shown in FIG. 1, the threading device includes a chain 42 that circulates inside the processing chamber (19a, 19b) and outside the processing chamber (19a, 19b), and a drive device (not shown) that drives the chain 42. ing. Similar to the work W spanned over the guide rollers (22a, 22b, 22c, 24), the chain 42 extends from the carry-in port 15a to the carry-out port 16a while changing its direction in the vertical direction, and extends from the carry-out port 16a to the processing chamber (the carry-out port 16a). It passes through the outside of 19a, 19b) and returns to the carry-in entrance 15a. As shown in FIG. 1, the route over which the chain 42 is laid intersects the route over which the work W is laid (that is, the transport path of the work W) at a plurality of places. Since the position where the chain 42 is arranged is a position outside the width direction (y direction) of the work W, the chain 42 and the work W do not interfere with each other (see FIG. 2). In order to set the work W on the carry-out roller 25 by the threading device, first, the work W wound around the carry-in inlet roller 21 is clamped by a clamp (not shown) provided on the chain 42. Next, the chain 42 is circulated by the drive device, and the work W is sent out from the carry-in inlet roller 21. As a result, the work W held by the clamp of the chain 42 moves in the processing chamber (19a, 19b) together with the chain 42, and moves to the carry-out port 16a. When the work W moves to the carry-out port 16a, the clamp is operated to release the work W from the chain 42, and the work W is set on the carry-out port roller 25. Finally, by rotating the carry-out roller 25 to apply tension to the work W, the work W is bridged from the carry-in inlet 15a to the carry-out port 16a via the guide rollers (22a, 22b, 22c, 24).

Next, a process of removing water from the work W using the heat treatment furnace 10 described above will be described. First, the cooling gas is supplied from the air supply pipe 38 into the treatment chamber (19a, 19b), and the inside of the treatment chamber (19a, 19b) is adjusted to a predetermined atmosphere. At this time, the air curtain device 50 is operated, and the carry-in inlet 15a is shut off from the outside of the furnace body 12 by the shutoff gas injected from the air supply ports 49a and 49b. As a result, the gas outside the furnace body 12 is suppressed from entering the processing chamber (19a, 19b) through the carry-in inlet 15a. Next, the controller 44 drives the transport device 20 to transport the work W from the carry-in inlet 15a to the carry-out port 16a through the processing chambers (19a, 19b). At this time, the controller 44 controls the heating device (26, 28) to irradiate the work W with electromagnetic waves in the infrared region, and ejects cooling gas from the air supply pipe 38 to the surface of the work W. When an electromagnetic wave in the infrared region is irradiated from the heating device (26, 28), the water contained in the work W absorbs the irradiated electromagnetic wave and the water evaporates. Moisture evaporated from the work W is removed from the surface of the work W by the cooling gas jetted from the air supply pipe 38. Atmospheric gas containing water removed from the surface of the work W (however, the water contains a trace amount of organic solvent) is treated from each of the exhaust port 13a of the lower wall 13 and the exhaust port 14a of the upper wall 14. It is exhausted to the outside of the room (19a, 19b). Moisture is removed from the work W while it is being conveyed from the carry-in port 15a to the carry-out port 16a. The work W from which the water has been removed is taken up by the carry-out roller 25.

According to the heat treatment furnace 10 described above, a first heater (26a, 26b) facing the guide roller (22a, 22b, 22c, 24) is provided in the vicinity of the guide roller (22a, 22b, 22c, 24). Further, a second heater 28 is provided between the upper guide roller (22a, 22b, 22c) and the lower guide roller 24. Since these heaters 26a, 26b, 28 can control the heat balance with respect to the work W in the state of being in contact with the guide rollers (22a, 22b, 22c, 24), and also in contact with the guide rollers (22a, 22b, 22c, 24). It is possible to control the heat balance with respect to the work W in the non-working state. Therefore, the heat balance of the work W can be suitably controlled, and the efficiency of the process of removing water from the work W can be significantly improved. For example, when the work W comes into contact with the guide rollers (22a, 22b, 22c, 24), heat flows from the work W to the guide rollers (22a, 22b, 22c, 24) and the work W is cooled too much. Increases the amount of heat supplied to the work W from the first heaters (26a, 26b) so that the work W is not overcooled. This makes it possible to prevent the efficiency of removing water from the work W from being lowered.

Further, in the heat treatment furnace 10, the air supply pipe 38 and the second heater 38 are alternately arranged in the transport direction, and the cooling gas from the air supply pipe 38 is injected from the direction orthogonal to the surface of the work W. As a result, the water evaporated from the inside of the work W is quickly removed from the surface of the work W, and the removal of the water from the work W is promoted. This also makes it possible to increase the efficiency of removing water from the work W.

Further, the processing chamber (19a, 19b) is divided into an upper processing chamber 19a and a lower processing chamber 19b by the work W bridged over the guide rollers (22a, 22b, 22c, 24). The air supply pipe 38 and the exhaust ports 14a and 13a are arranged in each of the lower treatment chamber 19b. Therefore, the cooling gas supplied to the upper processing chamber 19a and the cooling gas supplied to the lower cooling chamber 19b are quickly exhausted to the outside of the treatment chamber (19a, 19b) together with the removed water. This also makes the gas flow in the treatment chambers (19a, 19b) suitable, and can improve the water removal efficiency of the work W. Further, in the present embodiment, the air curtain device 50 is arranged in the vicinity of the carry-in inlet 15a, and the gas outside the furnace body 12 is suppressed from entering the processing chamber (19a, 19b) through the carry-in inlet 15a. To. Therefore, the deterioration of the atmosphere in the treatment chambers (19a, 19b) is suppressed, and the water removal efficiency of the work W can be improved.

The heaters (26a, 26b, 28) can adjust the wavelength region of the infrared rays emitted by selecting the infrared transmissive material forming the inner tube and the outer tube. Therefore, the heat treatment efficiency of the work W can be improved by adjusting the wavelength of the electromagnetic wave radiated according to the characteristics of the work W. For example, as the work W, a solid content (phenol / epoxy resin, 10 to 90 wt%) and a solvent (water or solvent (for example, IPA (isopropyl alcohol, NMP (N-methyl)) that makes the solid content into a slurry or paste form. Consider the case of drying a substance composed of (-2-pyrrolidone), etc.). When drying such a work W, a heater (26a, 26b, 28) having a near-infrared wavelength selected is used in the first half of the heat treatment furnace 10. The water or solvent may be dried, and in the latter half of the heat treatment furnace 10, annealing may be performed by a heater (26a, 26b, 28) having a far infrared wavelength selected.

Further, in the above embodiment, the heaters (26a, 26b, 28) all radiate electromagnetic waves in the same wavelength region, but the present invention is not limited to such an example. For example, the wavelength of the electromagnetic wave radiated from the heaters (26a, 26b, 28) may be adjusted according to the position on the transport path. For example, when water is removed from the work W by the heat treatment furnace 10, the amount of water contained in the work W gradually decreases from the carry-in inlet 15a toward the carry-out port 16a. Therefore, by gradually increasing the wavelength of the electromagnetic wave radiated from the heaters (26a, 26b, 28) from the carry-in inlet 15a toward the carry-out port 16a, the work W is irradiated with the electromagnetic wave corresponding to the amount of water. Can be done.

Further, in the above embodiment, the first heaters (26a, 26b) are arranged in the vicinity of the guide rollers (22a, 22b, 22c, 24), and the work W is heated by the first heaters (26a, 26b). It is not limited to such an example. For example, a flow path through which the heat medium flows may be provided inside the guide roller, and the work W may be heated by the guide roller. Even with such a configuration, the heat balance of the work W in contact with the guide roller can be controlled, and the heat treatment efficiency of the work W can be improved.

Further, the heat treatment furnace 10 according to the above embodiment may be provided with an opening width adjusting device for adjusting the opening width (dimension in the z direction) in the vertical direction of the carry-in inlet 15a. For example, as shown in FIG. 8.9, the opening width adjusting device is arranged on the back surface side of the work W and the upper shielding plate 52 (an example of the first shielding plate) arranged on the front surface side of the work W. A lower shielding plate 54 (an example of a second shielding plate) is provided. The upper shielding plate 52 is an outer surface of the carry-in side wall 15, and is attached above the carry-in entrance 15a. The upper blocking plate 52 is a rectangular plate material when viewed from the front, and can be manually moved in the vertical direction with respect to the carry-in side wall 15 by a user's operation. The lower shielding plate 54 is an outer surface of the carry-in side wall 15, and is attached below the carry-in entrance 15a. The lower blocking plate 54 is also a rectangular plate material when viewed from the front, and can be manually moved in the vertical direction with respect to the carry-in side wall 15 by a user's operation. Therefore, the user moves the upper shielding plate 52 downward to a position close to the front surface of the work W, and moves the lower shielding plate 54 upward to a position close to the back surface of the work W. As shown in 9, the vertical opening width of the carry-in inlet 15a can be reduced. As a result, it is possible to further suppress the entry of the atmosphere outside the furnace body 12 into the processing chamber (19a, 19b) through the carry-in inlet 15a, and the atmosphere inside the processing chamber (19a, 19b) is desired. It becomes easier to control the state. The upper shielding plate 52 and the lower shielding plate 54 may be moved in the vertical direction by an electric motor or the like.

Further, in the heat treatment furnace 10 according to the above embodiment, it is possible to prevent the gas outside the furnace body 12 from entering the treatment chamber (19a, 19b) in the bearing portions of the guide rollers 22a, 22b, 22c, 24. It may have a structure for doing so. For example, as shown in FIG. 10, the guide rollers (22a, 22b, 22c, 24) include a rotating shaft 56, which is rotatably supported by bearings 58, 59 provided on the side walls 17, 18. Has been done. Each of the side walls 17 and 18 has a space 60 located between the bearing 59 arranged on the processing chamber side and the bearing 58 arranged on the outside of the furnace, and one end opens into the space 60 while the other end is outside the furnace. An air supply passage 62 (an example of a second air supply device) that opens to the air supply passage 62 is provided. An air supply fan (not shown) is connected to the other end of the air supply passage 62. When the air supply fan operates, cooling gas (gas supplied to the air supply pipe 38) or breaking gas (gas supplied to the air curtain device 50) is supplied to the other end of the air supply passage 62. As a result, the cooling gas or the breaking gas is supplied into the space 60 from one end of the air supply passage 62. As a result, it is possible to prevent the atmosphere outside the furnace body 12 from entering the processing chamber (19a, 19b) through the bearing portions 58, 59.

Further, in the above embodiment, the air curtain device 50 is provided inside the processing chamber (19a, 19b), but the present invention is not limited to such an example, and air is provided outside the processing chamber (for example, the outer surface of the carry-in side wall 15). A curtain device may be provided. Further, in the above embodiment, the air curtain device 50 is provided only at the carry-in inlet 15a, but the present invention is not limited to such an example, and an air curtain device may be further provided at the carry-out port 16a.

Further, in the above embodiment, the upper air supply pipe 48a and the lower air supply pipe 48b cannot rotate around their axes, but the present invention is not limited to such an example, and for example, the upper air supply pipe 48a and the lower air supply pipe 48b. May be rotatably supported on the side wall 17 or 18. According to such a configuration, the direction in which the breaking gas is ejected can be adjusted by rotating the upper air supply pipe 48a and the lower air supply pipe 48b around the axis. Thereby, the shutoff effect of the carry-in entrance by the air curtain device can be adjusted.

Further, in the above embodiment, as shown in FIG. 6, the upper air supply pipe 48a is arranged along the upper side 151a of the carry-in inlet 15a, and the lower air supply pipe 48b is arranged along the lower side 151b of the carry-in inlet 15a. , Not limited to such an example. For example, the air supply pipe may be arranged along one of the pair of side sides 152 and 152 of the carry-in inlet 15a. That is, the air supply pipe may be arranged so as to extend in the z direction along either one of the side sides 152, and the breaking gas may be ejected from the air supply pipe in the horizontal direction. According to such a configuration, since the blocking gas is ejected in parallel with the front surface (back surface) of the work W, the entire carry-in port 15a can be blocked by arranging the air supply pipe only on one of the pair of side sides 152. Can be done.

The technical elements described herein or in the drawings exhibit their technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the techniques exemplified in the present specification or the drawings achieve a plurality of purposes at the same time, and achieving one of the purposes itself has technical usefulness.

10 Heat treatment furnace 12 Furnace 22 Upper guide roller 24 Lower guide roller 26 1st heater 28 2nd heater 38 Air supply pipe 48a Upper air supply pipe 48b Lower air supply pipe 49a, 49b Air supply port 50 Air curtain device

Claims (14)

A furnace body including a carry-in inlet, a carry-out port, and a processing chamber arranged between the carry-in entrance and the carry-out port.
A transport device for transporting an object to be processed, which is bridged from the carry-in port to the carry-out port, from the carry-in entrance to the carry-out port through the processing chamber.
A plurality of guide rollers arranged in the processing chamber and guiding the object to be processed to be conveyed by the conveying device, and
A heating device that is arranged in the processing chamber and heats the object to be processed that is conveyed by the transfer device.
A first air supply device that supplies a first gas to the processing chamber,
A heat treatment furnace provided in the vicinity of the carry-in port and provided with an air curtain device that ejects a second gas to shut off the carry-in port. The object to be processed is a film body that is bridged from the carry-in port to the carry-out port.
The air curtain device is
A first air supply port arranged on the surface side of the film body and ejecting the second gas toward the surface of the film body, and a first air supply port.
A second air supply port arranged on the back surface side of the film body and ejecting the second gas toward the back surface of the film body, and a second air supply port.
The heat treatment furnace according to claim 1. The first air supply port is arranged on the processing chamber side near the carry-in entrance.
The direction in which the second gas is ejected from the first air supply port is a direction from the first air supply port to the outside of the furnace body through the carry-in inlet.
The second air supply port is arranged on the processing chamber side near the carry-in entrance.
According to claim 2, the direction in which the second gas is ejected from the second air supply port is a direction from the second air supply port to the outside of the furnace body through the carry-in inlet. The heat treatment furnace described. When viewed in a cross section orthogonal to the surface of the film body and passing through the carry-in inlet and the carry-out port.
The angle between the direction in which the second gas is ejected from the first air supply port and the surface of the film body is in the range of 0 to 90 degrees.
The heat treatment furnace according to claim 3, wherein the angle between the direction of ejecting the second gas from the second air supply port and the back surface of the film body is in the range of 0 to 90 degrees. The carry-in port has a pair of first sides parallel to the surface of the film body and a pair of second sides orthogonal to the surface of the film body when viewed along the transport direction of the film body. It has a rectangular shape with the sides of
The heat treatment furnace according to claim 2 to 4, wherein the first air supply port and the second air supply port are arranged along the first side. Assuming that the length of the first side of the carry-in inlet is L and the dimension of the first air supply port in the direction parallel to the first side is L1, the relationship of L≤L1 is established. The heat treatment furnace according to claim 5. The carry-in port has a pair of first sides parallel to the surface of the film body and a pair of second sides orthogonal to the surface of the film body when viewed along the transport direction of the film body. It has a rectangular shape with the sides of
The heat treatment furnace according to any one of claims 2 to 6, further comprising an opening width adjusting device for adjusting the dimensions of the second side of the carry-in inlet. The opening width adjusting device is
A first shielding plate arranged on the surface side of the film body and
A second shielding plate arranged on the back surface side of the film body is provided.
The first shielding plate is movable in a direction orthogonal to the surface of the film body, and is movable.
The second shielding plate can be moved in a direction orthogonal to the back surface of the film body.
The heat treatment furnace according to claim 7, wherein the dimensions of the second side of the carry-in inlet are adjusted by adjusting the positions of the first shielding plate and the second shielding plate. The furnace body is provided for each guide roller and includes a bearing portion that rotatably supports the guide roller.
1. The bearing portion further includes a second air supply device that supplies at least one of the first gas and the second gas in the space between the bearing portion and the processing chamber. The heat treatment furnace according to any one of 8 to 8. The object to be processed is conveyed from the carry-in port to the carry-out port through a transport path defined by the plurality of guide rollers.
The method according to any one of claims 1 to 9, wherein the heating device is arranged along the transport path and includes a plurality of heaters that radiate electromagnetic waves in the infrared region to heat the object to be processed. Heat treatment furnace. The first air supply device is arranged in the processing chamber along the transport path, and includes a plurality of air supply pipes for ejecting the first gas toward the object to be processed. The heat treatment furnace according to claim 10. The object to be treated is a film body including a film and a paste applied to at least one of the front surface and the back surface of the film.
The heat treatment furnace according to any one of claims 1 to 11, wherein the heating device removes water contained in the paste. The transport device is
A carry-in roller located outside the furnace body and in the vicinity of the carry-in port and around which the object to be processed is wound.
Further, it is provided with a carry-out roller, which is located outside the furnace body and is arranged in the vicinity of the carry-out port, and winds up the object to be processed which has been conveyed in the processing chamber.
Claims 1 to 1, wherein the object to be processed, which has been ticketed to the inlet roller by rotating the carry-in inlet roller and the carry-out outlet roller, is sent out from the carry-in inlet roller and conveyed in the processing chamber. The heat treatment furnace according to any one of 12. The heat treatment furnace according to any one of claims 1 to 13, wherein the atmosphere in the treatment chamber is an inert gas atmosphere having a dew point of 0 ° C. or lower.

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