JP2022042086A - Recognition camera calibration system and recognition camera calibration method - Google Patents

Abstract

To provide a recognition camera calibration system and a recognition camera calibration method, with which it is possible to calibrate recognition cameras in a short time.SOLUTION: A recognition camera calibration system comprises a recognition camera calibration plate, a recognition camera, and control means. A reference mark is formed on a first principal surface of the recognition camera calibration plate. The recognition camera is arranged on a second principal surface side of the recognition camera calibration plate, and is adjusted so that the optical axis is substantially perpendicular to the second principal surface. The recognition camera acquires a first image in which the recognition camera calibration plate including the reference mark is photographed by light of a first wavelength and a second image having been photographed by light of a second wavelength differing in wavelength from the light of the first wavelength. The control means calculates the inclination of the optical axis of the recognition camera on the basis of a difference between a first recognition position which is the recognition position of the reference mark in the first image and a second recognition position which is the recognition position of the reference mark in the second image.SELECTED DRAWING: Figure 1

Description

The present invention relates to a recognition camera calibration system and a recognition camera calibration method.

In order to position and mount the electronic device at a predetermined position on the substrate with high accuracy, the positioning mark formed on the electronic device and the substrate is used. In many cases, first, the positioning marks of the electronic device and the substrate are recognized by the recognition camera, the positions of the respective positioning marks are calculated, and the positions of the electronic devices and the substrate are measured with high accuracy. Then, the electronic device or the substrate is moved, and the electronic device is positioned and mounted at a predetermined mounting position on the substrate.

In the above construction method, when the mounted device continues to operate, the dimensions of the camera support member change or the dimensions of the mounted stage change due to the heat generated from the device during operation and changes in the ambient temperature. The positional relationship between the mounting stage of the mounted device and the recognition camera may change. Therefore, in order to position the electronic device on the substrate with high accuracy, it is necessary to accurately calibrate the position of the recognition camera with respect to the mounting surface. This calibration is the measurement of the amount of deviation of the recognition camera from the reference state. The reference state can be arbitrarily set for each device, but for example, it can be the state when the mounted device is started up and the recognition camera is adjusted so that the mounted device satisfies the accuracy of the specifications. ..

For example, Patent Document 1 discloses a method for accurately calibrating a recognition camera as described above. In this technique, a flat plate-shaped measuring jig with actual size is used. For calibration, first, the mounting jig is placed on the mounting surface. Next, the image of the measuring jig is taken with the recognition camera from the direction perpendicular to the upper surface of the measuring jig. At this time, the measuring jig is raised and lowered, and a plurality of images having different distances between the recognition camera and the measuring jig are taken. Then, from the captured image, the correspondence between the dimension per pixel of the camera and the actual size is obtained for each height of the upper surface of the measuring jig. Further, by obtaining the relationship between the amount of deviation between the center position of the measuring jig and the center position of the captured image and the height of the upper surface of the measuring jig in a plurality of captured images, the measurement control of the imaging direction of the recognition camera can be obtained. The inclination in the direction perpendicular to the upper surface of the tool can be obtained.

Japanese Unexamined Patent Publication No. 2008-072058

In Patent Document 1, a plurality of images are taken while changing the height of the measuring jig. Therefore, there is a problem that it takes time to calibrate because a step of changing the height of the measuring jig a plurality of times is required.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a recognition camera calibration system and a recognition camera calibration method that enable calibration of a recognition camera in a short time.

In order to solve the above problems, the recognition camera calibration system of the present invention includes a recognition camera calibration plate, a recognition camera, and control means. The recognition camera calibration plate has a reference mark formed on the first main surface. The recognition camera is arranged on the side of the second main surface of the recognition camera calibration plate, and the optical axis is adjusted so as to be substantially perpendicular to the second main surface. The recognition camera takes a first image of the recognition camera calibration plate including the reference mark with light of the first wavelength and a second image of light having a wavelength different from that of the light of the first wavelength. Acquire the image of 2. In the control means, the recognition position of the reference mark in the first image is set as the first recognition position, the recognition position of the reference mark in the second image is set as the second recognition position, and the second is based on the difference between the two. Calculate the tilt of the optical axis of the recognition camera with respect to the vertical direction of the main surface of.

Further, the recognition camera calibration method of the present invention uses a recognition camera calibration plate in which the first main surface and the second main surface are parallel to each other and the reference mark is formed on the first main surface. Then, the recognition camera calibration plate is photographed by the recognition camera from a direction substantially perpendicular to the second main surface on the side of the second main surface. Then, the first image taken by illuminating the recognition camera calibration plate with the light of the first wavelength and the second image taken by illuminating the recognition camera calibration plate with the light of the second wavelength different from the first wavelength are acquired. The control means is an optical axis of the recognition camera with respect to the vertical direction of the second main surface based on the difference between the first recognition position of the reference mark in the first image and the second recognition position in the second image. Calculate the slope of.

An effect of the present invention is to be able to provide a recognition camera calibration system and a recognition camera calibration method that enable the recognition camera to be calibrated in a short time.

It is a schematic diagram which shows the structure of the recognition camera calibration system of 1st Embodiment. It is a perspective view schematic diagram which shows the structure of the recognition camera calibration system of 2nd Embodiment. It is a schematic diagram for demonstrating the calculation method of the camera angle of 2nd Embodiment. It is a schematic diagram for demonstrating the calculation method of the recognition position deviation of 2nd Embodiment. It is a perspective view which shows the arrangement of the 1st recognition camera, the 2nd recognition camera, and the recognition camera calibration plate of 3rd Embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, although the embodiments described below have technically preferable limitations for carrying out the present invention, the scope of the invention is not limited to the following. Note that similar components in each drawing may be numbered the same and description may be omitted.

(First Embodiment)
FIG. 1 is a schematic diagram showing the recognition camera calibration system 10 of the present embodiment. The recognition camera calibration system 10 includes a recognition camera calibration plate 1, a recognition camera 2, and a control means 3.

The recognition camera calibration plate 1 is a translucent plate in which the first main surface 1a and the second main surface 1b are parallel to each other, and the reference mark 1c is formed on the first main surface 1a. The recognition camera calibration plate 1 is arranged on the mounting surface 9 of the mounting machine.

The recognition camera 2 is arranged on the side of the second main surface 1b of the recognition camera calibration plate 1, and its optical axis is adjusted so as to face a direction substantially perpendicular to the second main surface 1b. The recognition camera 2 captures an image of the recognition camera calibration plate 1 including the reference mark 1c. In FIG. 1, the optical axis of the recognition camera 2 is drawn so as to be greatly tilted from the direction perpendicular to the second main surface 1b, but this is for the sake of explanation, and the optical axis is actually It is adjusted so as to match the direction perpendicular to the second main surface 1b as much as possible.

The recognition camera 2 acquires an image of the recognition camera calibration plate 1 including the reference mark 1c, which is taken by the light of the first wavelength. Further, an image of the recognition camera calibration plate 1 including the reference mark 1c taken by the light of the second wavelength having a wavelength different from the light of the first wavelength is acquired. In order to obtain an image taken with the light of the first wavelength and the light of the second wavelength, for example, the recognition camera calibration plate 1 is illuminated with the light including the light of the first wavelength and the light of the second wavelength. , Each light may be taken out by a filter and photographed by the recognition camera 2. Alternatively, using the illumination that radiates the light of the first wavelength and the illumination that radiates the light of the second wavelength, the image when the recognition camera calibration plate 1 is illuminated may be taken by the respective illuminations. ..

The control means 3 acquires the recognition position of the reference mark 1c as the first recognition position in the image captured by the light of the first wavelength. Further, the recognition position of the reference mark 1c in the image taken with the light of the second wavelength is acquired as the second recognition position.

Here, the light having the first wavelength and the light having the second wavelength have different wavelengths. Therefore, when the optical axis of the recognition camera 2 is tilted from the direction perpendicular to the second main surface, the refraction angles of both at the interface between the atmosphere and the recognition camera calibration plate 1 are different. As a result, the first recognition position and the second recognition position are different. The difference between the two corresponds to the inclination of the optical axis of the recognition camera 2 from the direction perpendicular to the second main surface. The control means 5 utilizes this phenomenon to determine the inclination of the optical axis of the recognition camera 2 from the direction perpendicular to the second main surface 1b based on the difference between the first recognition position and the second recognition position. calculate.

As described above, in the recognition camera calibration system of the present embodiment, it is possible to calibrate the camera without performing the process of capturing a plurality of images while changing the height of the measurement target as in Patent Document 1. can. Therefore, the camera can be calibrated in a short time.

(Second embodiment)
In this embodiment, a specific configuration example and a calibration method of the recognition camera calibration system based on the first embodiment will be described. In the present embodiment, the mounting surface of the substrate, which is the object to be recognized, is a horizontal plane in the mounting machine or the like, and the recognition camera shoots from a direction substantially perpendicular to the mounting surface. Then, calibration is performed to acquire the amount of deviation of the optical axis of the recognition camera from the exact vertical direction with respect to the mounting surface. In the following description, the direction parallel to the mounting surface may be abbreviated as the horizontal direction, and the direction perpendicular to the mounting surface may be abbreviated as the vertical direction.

FIG. 2 is a schematic perspective view showing the recognition camera calibration system 1000 of the present embodiment. The recognition camera calibration system 1000 includes a recognition camera calibration plate 100, a recognition camera 200, a lighting means 300, a control means 400, and a recognition camera calibration plate moving means 500. Although not shown in FIG. 2, the illuminating means 300 emits a first illuminating unit that emits light having a first wavelength and a second illuminating unit having a wavelength different from that of the first wavelength light. It has two lighting units.

Similar to the first embodiment, the recognition camera calibration plate 100 is a translucent plate in which the first main surface 110 and the second main surface 120 are parallel to each other, and the reference mark 130 is formed on the first main surface 110. Has been done. The recognition camera calibration plate 100 is arranged on a mounting surface of a mounting machine (not shown).

The recognition camera 200 is arranged on the second main surface 120 side of the recognition camera calibration plate 100, and is adjusted so that the optical axis faces in a direction substantially perpendicular to the second main surface 120. The recognition camera 200 captures an image of the recognition camera calibration plate 100 including the position of the reference mark 130.

The lighting means 300 can illuminate the recognition camera calibration plate 100 with light having a first wavelength. Further, it is possible to illuminate the recognition camera calibration plate 100 with light having a second wavelength different from that of the light having the first wavelength.

In the recognition camera calibration system 1000, the recognition camera calibration plate 100 is illuminated by the first lighting unit, and the recognition camera 200 takes a picture of the recognition camera calibration plate 100. The control means 400 acquires the recognition position of the reference mark 130 in the image taken at this time as the first recognition position. Further, the recognition camera calibration plate 100 is illuminated by the second lighting unit, and the recognition camera calibration plate 100 is photographed by the recognition camera 200. The control means 400 acquires the recognition position of the reference mark 130 in the image taken at this time as the second recognition position.

Here, the light having the first wavelength and the light having the second wavelength have different wavelengths. Therefore, when the optical axis of the recognition camera 200 is tilted from the direction perpendicular to the second main surface 120, the refraction angles of both at the interface between the atmosphere and the recognition camera calibration plate 100 are different. As a result, the first recognition position and the second recognition position are different. The difference between the two corresponds to the inclination of the optical axis of the recognition camera 200 from the direction perpendicular to the second main surface 120. The control means 400 utilizes this phenomenon to incline the optical axis of the recognition camera 200 from a direction perpendicular to the second main surface 120 based on the difference between the first recognition position and the second recognition position. calculate. In the following description, the inclination of the optical axis of the recognition camera 200 from the direction perpendicular to the second main surface 120 may be abbreviated as the inclination of the recognition camera 200 or the angle of the recognition camera 200. do.

The recognition camera calibration plate moving means 500 adjusts the relative distance between the recognition camera 200 and the recognition camera calibration plate 100. Therefore, instead of the recognition camera calibration plate moving means 500, a recognition camera moving means for moving the recognition camera 200 in the Z direction may be provided. Further, although not shown in FIG. 2, there are means for moving the recognition camera 200 in the XY direction of the coordinate system of FIG. 2, means for moving the recognition camera calibration plate 100 in the XY direction, or both means. You may. By providing these means, for example, the image can be acquired at a position where the recognition camera calibration plate 100 is brightly proved.

Next, a specific method for calculating the inclination of the optical axis of the recognition camera 200 from the direction perpendicular to the second main surface 120 will be described. FIG. 3 is a schematic diagram for explaining this calculation method.

As shown in FIG. 3, it is assumed that the lighting means 300 has a red lighting 310 as the first lighting and a purple lighting 320 as the second lighting. There is no strict definition for the wavelength range of red and purple, but here, for example, it is assumed that the wavelength of red is 620 to 780 nm and that of purple is 380 to 450 nm. In the case of BK7, which is a general optical glass, the relationship between the wavelength and the refractive index is 1.5115 at a wavelength of 768 nm, 1.5143 at 656 nm, 1.5267 at 435 nm, and 1.5302 at 405 nm. As described above, when the first wavelength and the second wavelength are separated from each other, the difference in the refractive index becomes larger, so that the measurement becomes easier. Further, in the example of FIG. 3, the light emitted from the red illumination 310 and the purple illumination 320 is reflected by the half mirror 330 and is applied to the recognition camera calibration plate 100 substantially parallel to the optical axis of the recognition camera 200. .. By doing so, the light of the illumination can be concentrated on the recognition camera calibration plate, so that the utilization efficiency of the illumination is good. However, the lighting method is not limited to this configuration.

Next, a method of calculating the inclination of the recognition camera 200 will be described. Here, the refractive index of air is n ₀ , the refractive index of red light in the recognition camera calibration plate 100 is n _R , and the refractive index of purple light is n _V. First, only the red lighting 310 is turned on in the lighting means 300. Assuming that the angle of the recognition camera 200 is θ _y , the optical axis of the red light is refracted at the interface between the air and the recognition camera calibration plate 100. Assuming that the refraction angle of the optical axis of red light is θ _yR , sin θ _y / sin θ _yR = n _R / n ₀ (1) according to Snell's law.
Will be. Assuming that the refractive index n ₀ of air is 1, the equation (1) becomes the following equation.
sinθ _y / sinθ _yR = n _R (2)
In this red light, the result (X direction) of measuring the position of the reference mark 130 formed on the first main surface 110 by image recognition is defined as P _xR .

Next, in the lighting means 300, only the purple lighting 320 is turned on. Assuming that the angle of the recognition camera 200 is θ _y , the optical axis of purple light is refracted at the interface between the air and the recognition camera calibration plate 100. Assuming that the refraction angle of the optical axis of purple light is θ _yV , sin θ _y / sin θ _yV = n _V / n ₀ (3) according to Snell's law.
Will be. When the refractive index n ₀ of air is 1, the equation (3) becomes the following equation.
sinθ _y / sinθ _yV = n _V (4)
In this purple light, the result (X direction) of measuring the position of the reference mark 130 formed on the first main surface 110 by image recognition is defined as P _xV .

In FIG. 3, assuming that the thickness of the recognition camera calibration plate 100 is t, the difference L between the recognition position P _xR by red light and the recognition position P _{x V} by purple light can be calculated by the following formula.
L = t × tanθ _yR －t × _{tanθ yV} (5)
Also, from the definition, there is a relationship of the following equation.
L = P _xV -P _xR (6)
From equations (5) and (6), t × (tanθ _yR − tanθ _yV ) = P _xV −P _xR (7)
Will be.
Since the optical axis of the recognition camera 200 is adjusted so as to be close to the vertical direction of the second main surface of the recognition camera calibration plate 100, θ _y is a minute angle. Further, since the refractive index n _R of red light and the refractive index n _V of purple light of the recognition camera calibration plate 100 are larger than the refractive index n ₀ of air, θ _yR and θ _yV are smaller than θ _y . Therefore, the following equation is approximated.
sin θ _y ≒ θ _y (8)
sinθ _yR ≒ tanθ _yR ≒ θ _yR (9)
sinθ _yV ≒ _{tanθ yV} ≒ θ _yV (10)
Substituting Eqs. (8) and (9) into Eq. (2) yields the following equation.
θ _y / θ _yR = n _R
θ _yR = θ _y / n _R (11)
Substituting Eqs. (8) and (10) into Eq. (4) yields the following equation.
θ _y / θ _yV = n _V
θ _yV = θ _y / n _V (12)
Substituting Eqs. (9) and (10) into Eq. (7) yields the following equation.
t × (θ _yR −θ _yV ) = P _xV −P _xR (13)
Substituting equations (11) and (12) into equation (13), t × (θ _y / n _R −θ _y / n _V ) = P _xV −P _xR
Is.
t × θ _y (1 / n _R -1 / n _V ) = P _xV −P _xR
θ _y = (P _xV −P _xR ) / (t × (1 / n _R -1 / n _V )) (14)
From equation (14), the recognition result P _xR in red light, the recognition result P _xV in purple light, the thickness t of the recognition camera calibration plate 100, the refractive index _nR of red light, and purple in the X direction of the reference mark 130. The refractive index n _V of light can be used to represent the tilt θ _y of the recognition camera 200.

Similarly, the angle θ _x around the X axis of the recognition camera 200 can be obtained from the Y direction recognition result P _yR with red light and the Y direction recognition result P _yV with purple light of the reference mark 130 by the following equation.
θ _x = (P _yV − P _yR ) / (t × (1 / n _R -1 / n _V )) (15)
Next, the camera calibration method of the present embodiment when the electronic device is mounted on the substrate will be described. In the recognition camera calibration method of the present embodiment, the reference angle (θ _x , θ _y ) of the recognition camera 200 is measured in advance at the reference timing (time). Here, the recognition camera reference angle is an angle formed by the optical axis of the recognition camera 200 in a direction perpendicular to the mounting surface in an arbitrarily determined reference state. The reference state can be, for example, the state when the mounted machine is started up and the optical axis of the recognition camera 200 is adjusted to be as close to the vertical direction as possible to the mounting surface by mechanical measurement or the like. The angle of the optical axis of the recognition camera 200 obtained in this state from the direction perpendicular to the mounting surface is used as the reference angle. Then, the angle of the recognition camera 200 at the time immediately before mounting the electronic device on the substrate after a certain time has passed from the reference state is defined as (θ _x ', θ _y '). As described above, the inclination of the optical axis of the recognition camera 200 from the direction perpendicular to the second main surface 120 can be obtained from the equations (14) and (15), and the inclination obtained in the reference state can be obtained. Is (θ _x , θ _y ), and the inclination obtained immediately before mounting is (θ _x ', θ _y '). In the following description, the angle (θ _x ', θ _y ') formed by the optical axis of the recognition camera 200 with respect to the direction perpendicular to the second main surface is simply referred to as the angle of the recognition camera. ..

With the above definition, the difference between the recognition camera angle (θ _x ', θ _y ') and the recognition camera reference angle (θ _x , θ _y ) is calculated, and the recognition camera angle deviation (Δθ _x , Δθ _y ) is calculated. ) Can be calculated to perform calibration before mounting. Next, the amount of deviation (ΔL _x , ΔL _y ) of the recognition position on the surface of the electronic device due to the deviation of the recognition camera angle from the reference angle is calculated. Then, by adding (or subtracting) the deviation amount to the recognized alignment mark position, the recognition position of the alignment mark can be corrected. From the definition, the angle deviations Δθ _x and Δθ _y of the recognition camera angle immediately before mounting from the recognition camera reference angle can be expressed by the following equations.
Δθ _x = θ _{x'-θ x (} 16)
Δθ _y = θ _{y'-θ y (} 17)
Next, the relationship between the deviation of the recognition camera angle from the reference angle and the deviation of the recognition position on the surface of the mounted electronic device will be described. FIG. 4 is a schematic diagram for this explanation. Here, the image sensor in the recognition camera 200 is 210. Then, let A be the point where the perpendicular line drawn from the center of the image pickup device 210 to the surface of the electronic device 2000 intersects the surface of the electronic device 2000, and let D be the distance from the center of the image pickup element 210 to A.

FIG. 4 shows the relationship between the angle around the Y axis of the recognition camera 200 and the distance between the center position of the image captured by the recognition camera 200 and the point A. Assuming that the distance between the point A at the reference angle θ _y and the center of the image is L _x , and the distance between the point A at the angle θ _y ′ of the recognition camera immediately before mounting and the center of the image is L _x ′, L _x and L _x ′ are respectively. It is expressed by the following equation.
L _x = D x tan θ _y (18)
L _x ´ = D × tan θ _y ´ (19)
Therefore, the amount of deviation of the recognition position immediately before mounting from the recognition position in the reference state is expressed by the following equation.
ΔL _x = L _{x'-L x =} D (tanθ _{y'-tanθ y )} (20)
Similarly, the amount of deviation in the Y direction is expressed by the following equation.
ΔL _y = L _{y'-L y =} D (tanθ _{x'-tanθ x )} (21)
The recognition position of the alignment mark can be corrected by using (ΔL _x , ΔL _y ) obtained above.

As described above, according to the present embodiment, the camera is calibrated in a short time without performing the process of taking a plurality of images while changing the height of the measurement target as in Patent Document 1. The recognition position of the recognition camera can be corrected.

(Third embodiment)
In addition to the recognition camera 200 of the second embodiment, some electronic device mounting machines have a recognition camera on the lower side of the mounting surface. In this embodiment, calibration of such a lower recognition camera will be described.

FIG. 5 is a perspective view showing the configuration of the recognition camera calibration system 1000a having the recognition camera 200 on the upper side and the second recognition camera 600 on the lower side of the mounting surface. In the recognition camera calibration system 1000a, in addition to the configuration of the second embodiment, the recognition camera calibration plate 100a having the second reference mark 140a is also used on the second main surface 120a. Then, the second recognition camera 600 is adjusted so that the optical axis of the recognition camera calibration plate 100a approaches the direction perpendicular to the first main surface 110a. Since the first main surface 110a and the second main surface 120a are parallel to each other, the direction perpendicular to the first main surface 110a and the direction perpendicular to the second main surface 120a are the same.

Although not shown, the second lighting means 700 uses light of a third wavelength to illuminate the recognition camera calibration plate 100a and light of a fourth wavelength different from the third wavelength. It has a fourth illumination that illuminates the recognition camera calibration plate 100a.

As is clear from FIG. 4, the relationship between the second recognition camera 600 and the second reference mark 140a is the same as the relationship between the recognition camera 200 and the reference mark 130 in the second embodiment. By substituting each data according to the correspondence of this relationship, the second recognition camera 600 can be calibrated in the same manner as in the second embodiment. That is, based on the difference between the recognition position of the second reference mark 140a when shooting with the third illumination and the recognition position of the second reference mark 140a when shooting with the fourth illumination. , The second control means 800 can determine the angle of the second recognition camera 600. Therefore, as in the second embodiment, the calibration of the second recognition camera 600 and the correction of the recognition position can be performed in a short time.

The present invention has been described above by using the above-mentioned first to third embodiments as exemplary examples. However, the present invention is not limited to the above embodiment. That is, the present invention can apply various aspects that can be understood by those skilled in the art within the scope of the present invention.

Some or all of the above embodiments may also be described, but not limited to:
(Appendix 1)
A recognition camera calibration plate arranged on the mounting surface of the mounting machine and having a reference mark formed on the first main surface of the translucent plate in which the first main surface and the second main surface are parallel to each other.
The recognition camera calibration plate is photographed with light of the first wavelength, arranged on the side of the second main surface and adjusted so that the optical axis is oriented substantially perpendicular to the second main surface. A recognition camera that acquires an image of 1 and acquires a second image taken with light having a second wavelength different from the first wavelength.
The recognition position of the reference mark in the first image is acquired as the first recognition position, the recognition position of the reference mark in the second image is acquired as the second recognition position, and the first recognition position is acquired. A control means for calculating the inclination of the optical axis of the recognition camera with respect to the vertical direction of the second main surface based on the difference between the second recognition position and the second recognition position.
A recognition camera calibration system characterized by having.
(Appendix 2)
The recognition camera
It is characterized in that it receives light including both the light of the first wavelength and the light of the second wavelength and separates the two by an optical element to acquire the first image and the second image. The recognition camera calibration system according to Appendix 1.
(Appendix 3)
It is characterized by having a first lighting means for illuminating the recognition camera calibration plate with the light of the first wavelength and a second lighting means for illuminating the recognition camera calibration plate with the light of the second wavelength. The recognition camera calibration system according to Appendix 1 or 2.
(Appendix 4)
The first lighting means irradiates light having the first wavelength substantially parallel to the optical axis of the recognition camera.
The second lighting means irradiates light having the second wavelength substantially parallel to the optical axis of the recognition camera.
The recognition camera calibration system according to Appendix 3, wherein the recognition camera calibration system is characterized in that.
(Appendix 5)
The recognition camera calibration system according to any one of Supplementary note 1 to 4, wherein the light having the first wavelength is red light, and the light having the second wavelength is purple light.
(Appendix 6)
The control means
It is characterized in that the recognition position correction amount of the recognition camera in a plane parallel to the second main surface is calculated based on the inclination of the optical axis of the recognition camera with respect to the vertical direction of the second main surface. The recognition camera calibration system according to any one of Supplementary note 1 to 5.
(Appendix 7)
A second reference mark is formed on the second main surface of the recognition camera calibration plate.
A first image of the recognition camera calibration plate taken with light of a first wavelength, arranged on the side of the first main surface and adjusted so that the optical axis points in a direction substantially perpendicular to the first main surface. A second recognition camera that acquires an image of 3 and acquires a fourth image taken with light having a second wavelength different from the first wavelength.
The recognition position of the reference mark in the third image is acquired as the third recognition position, the recognition position of the reference mark in the fourth image is acquired as the fourth recognition position, and the third recognition position is acquired. A second control means for calculating the inclination of the optical axis of the second recognition camera with respect to the direction perpendicular to the first main surface based on the difference between the fourth recognition position and the fourth recognition position.
The recognition camera calibration system according to any one of Supplementary note 1 to 6, wherein the recognition camera calibration system is characterized by having the above.
(Appendix 8)
The second control means is
The recognition position correction amount of the second recognition camera in the plane parallel to the first surface is calculated based on the inclination of the optical axis of the second recognition camera with respect to the vertical direction of the first main surface. The recognition camera calibration system according to Appendix 5, wherein the recognition camera is calibrated.
(Appendix 9)
A recognition camera calibration plate having a reference mark formed on the first main surface of the translucent plate in which the first main surface and the second main surface are parallel is placed on the mounting surface of the mounting machine.
The recognition camera acquires a first image of the recognition camera calibration plate taken with light of the first wavelength from a direction substantially perpendicular to the second main surface on the side of the second main surface, and said. A second image of the recognition camera calibration plate taken with light of a second wavelength different from the first wavelength was acquired.
The recognition position of the reference mark in the first image is set as the first recognition position.
The recognition position of the reference mark in the second image is set as the second recognition position.
A recognition camera calibration method characterized in that the inclination of the optical axis of the recognition camera with respect to the vertical direction of the second main surface is calculated based on the difference between the first recognition position and the second recognition position. ..
(Appendix 10)
The recognition camera
It is characterized in that it receives light including both the light of the first wavelength and the light of the second wavelength and separates the two by an optical element to acquire the first image and the second image. The recognition camera calibration method according to Appendix 9.
(Appendix 11)
The recognition camera calibration plate is illuminated with the light of the first wavelength, and the first image is taken.
The recognition camera calibration method according to Appendix 9 or 10, wherein the recognition camera calibration plate is illuminated with light having the second wavelength and the second image is captured.
(Appendix 12)
The light of the first wavelength is irradiated with the light of the first wavelength substantially parallel to the optical axis of the recognition camera.
The light of the second wavelength is irradiated with the light of the second wavelength substantially parallel to the optical axis of the recognition camera.
The recognition camera calibration method according to Appendix 11, characterized by the above.
(Appendix 13)
The recognition camera calibration system according to any one of Supplementary note 9 to 12, wherein the light having the first wavelength is red light and the light having the second wavelength is purple light.
(Appendix 14)
The control means
Addendum characterized by calculating the recognition position correction amount of the recognition camera in a plane parallel to the second surface based on the inclination of the optical axis of the recognition camera with respect to the vertical direction of the second main surface. The recognition camera calibration method according to any one of 9 to 13.
(Appendix 15)
A second reference mark is formed on the second main surface of the recognition camera calibration plate.
A third image of the recognition camera calibration plate taken with the light of the first wavelength by the second recognition camera from a direction substantially perpendicular to the first main surface on the side of the first main surface. Obtained and acquired a fourth image of the recognition camera calibration plate taken with the light of the second wavelength.
The recognition position of the second reference mark in the third image is set as the third recognition position.
The recognition position of the second reference mark in the fourth image is set as the fourth recognition position.
Recognition characterized in that the inclination of the optical axis of the second recognition camera with respect to the vertical direction of the first main surface is calculated based on the difference between the third recognition position and the fourth recognition position. Camera calibration method.
(Appendix 16)
The recognition position correction amount of the second recognition camera in the plane parallel to the first surface is calculated based on the inclination of the optical axis of the second recognition camera with respect to the vertical direction of the first main surface. The recognition camera calibration method according to Appendix 11, wherein the recognition camera is calibrated.
(Appendix 17)
A recognition camera calibration plate having a reference mark formed on the first main surface of the translucent plate in which the first main surface and the second main surface are parallel is arranged on the mounting surface of the mounting machine, and the second main surface is described. A recognition camera calibration system that photographs the recognition camera calibration plate with a recognition camera from a direction substantially perpendicular to the second main surface on the side of the main surface.
On the computer
When the recognition camera calibration plate is illuminated with light of the first wavelength and the recognition camera calibration plate is photographed by the recognition camera, the recognition position of the reference mark by the recognition camera is acquired as the first recognition position. And the processing to do
When the recognition camera calibration plate is illuminated with light having a second wavelength different from the first wavelength and the recognition camera calibration plate is photographed by the recognition camera, the recognition position of the reference mark by the recognition camera. And the process of acquiring as the second recognition position,
It is characterized in that it executes a process of calculating the inclination of the optical axis of the recognition camera with respect to the vertical direction of the second main surface based on the difference between the first recognition position and the second recognition position. A control program for the recognition camera calibration system.

1,100 Recognition camera calibration plate 1a, 110 First main surface 2,200 Recognition camera 1b, 120 Second main surface 1c, 130 Reference mark 3 First lighting 4 Second lighting 5,400 Control means 10, 1000 Recognition camera calibration system 300 Lighting means 310 Red lighting 320 Purple lighting 330 Half mirror 500 Recognition camera calibration plate Moving means 600 Second recognition camera 700 Second lighting means 800 Second control means

Claims (10)

A recognition camera calibration plate arranged on the mounting surface of the mounting machine and having a reference mark formed on the first main surface of the translucent plate in which the first main surface and the second main surface are parallel to each other.
The recognition camera calibration plate is photographed with light of the first wavelength, arranged on the side of the second main surface and adjusted so that the optical axis is oriented substantially perpendicular to the second main surface. A recognition camera that acquires an image of 1 and acquires a second image taken with light having a second wavelength different from the first wavelength.
The recognition position of the reference mark in the first image is acquired as the first recognition position, the recognition position of the reference mark in the second image is acquired as the second recognition position, and the first recognition position is acquired. A control means for calculating the inclination of the optical axis of the recognition camera with respect to the vertical direction of the second main surface based on the difference between the second recognition position and the second recognition position.
A recognition camera calibration system characterized by having. The recognition camera
It is characterized in that it receives light including both the light of the first wavelength and the light of the second wavelength and separates the two by an optical element to acquire the first image and the second image. The recognition camera calibration system according to claim 1. It is characterized by having a first lighting means for illuminating the recognition camera calibration plate with the light of the first wavelength and a second lighting means for illuminating the recognition camera calibration plate with the light of the second wavelength. The recognition camera calibration system according to claim 1 or 2. The first lighting means irradiates light having the first wavelength substantially parallel to the optical axis of the recognition camera.
The second lighting means irradiates light having the second wavelength substantially parallel to the optical axis of the recognition camera.
The recognition camera calibration system according to claim 3. The recognition camera calibration system according to any one of claims 1 to 4, wherein the light having the first wavelength is red light and the light having the second wavelength is purple light. A second reference mark is formed on the second main surface of the recognition camera calibration plate.
A first image of the recognition camera calibration plate taken with light of a first wavelength, arranged on the side of the first main surface and adjusted so that the optical axis points in a direction substantially perpendicular to the first main surface. A second recognition camera that acquires an image of 3 and acquires a fourth image taken with light having a second wavelength different from the first wavelength.
The recognition position of the reference mark in the third image is acquired as the third recognition position, the recognition position of the reference mark in the fourth image is acquired as the fourth recognition position, and the third recognition position is acquired. A second control means for calculating the inclination of the optical axis of the second recognition camera with respect to the direction perpendicular to the first main surface based on the difference between the fourth recognition position and the fourth recognition position.
The recognition camera calibration system according to any one of claims 1 to 5, wherein the recognition camera calibration system is provided. A recognition camera calibration plate having a reference mark formed on the first main surface of the translucent plate in which the first main surface and the second main surface are parallel is placed on the mounting surface of the mounting machine.
The recognition camera acquires a first image of the recognition camera calibration plate taken with light of the first wavelength from a direction substantially perpendicular to the second main surface on the side of the second main surface. A second image of the recognition camera calibration plate taken with light of a second wavelength different from the first wavelength was acquired.
The recognition position of the reference mark in the first image is set as the first recognition position.
The recognition position of the reference mark in the second image is set as the second recognition position.
A recognition camera calibration method characterized in that the inclination of the optical axis of the recognition camera with respect to the vertical direction of the second main surface is calculated based on the difference between the first recognition position and the second recognition position. .. The recognition camera
It is characterized in that it receives light including both the light of the first wavelength and the light of the second wavelength and separates the two by an optical element to acquire the first image and the second image. The recognition camera calibration method according to claim 7. The recognition camera calibration plate is illuminated with the light of the first wavelength, and the first image is taken.
The recognition camera calibration method according to claim 7, wherein the recognition camera calibration plate is illuminated with light having the second wavelength and the second image is captured. The recognition camera calibration method according to any one of claims 7 to 9, wherein the light having the first wavelength is red light and the light having the second wavelength is purple light.

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