JP2022022142A - 支持ユニット、これを含む基板処理装置 - Google Patents
支持ユニット、これを含む基板処理装置 Download PDFInfo
- Publication number
- JP2022022142A JP2022022142A JP2021118513A JP2021118513A JP2022022142A JP 2022022142 A JP2022022142 A JP 2022022142A JP 2021118513 A JP2021118513 A JP 2021118513A JP 2021118513 A JP2021118513 A JP 2021118513A JP 2022022142 A JP2022022142 A JP 2022022142A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support unit
- curved surface
- reflector
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 218
- 238000012545 processing Methods 0.000 title claims abstract description 82
- 238000010438 heat treatment Methods 0.000 claims abstract description 66
- 238000000034 method Methods 0.000 claims description 81
- 230000008569 process Effects 0.000 claims description 78
- 239000007788 liquid Substances 0.000 claims description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 26
- 239000010453 quartz Substances 0.000 claims description 25
- 238000005530 etching Methods 0.000 claims description 21
- 239000000126 substance Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- 238000011084 recovery Methods 0.000 description 38
- 238000012546 transfer Methods 0.000 description 30
- 239000007789 gas Substances 0.000 description 9
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- 238000001816 cooling Methods 0.000 description 7
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 6
- 239000012809 cooling fluid Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 230000003028 elevating effect Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000004380 ashing Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012487 rinsing solution Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Weting (AREA)
Abstract
Description
支持ユニット300はチャック310、スピン駆動部320、バックノズル部330、加熱部材340、冷却部材350、反射板360、そして放熱板370を含むことができる。
310 チャック
312 チャックステージ
314 石英ウインドー
316 チャッキングピン
318 支持ピン
320 スピン駆動部
330 バックノズル部
340 加熱部材
350 冷却部材
360 反射板
362 ベース部
364 突出部
R 曲面
P 加熱位置
C 加熱部材中心
370 放熱板
Claims (20)
- 基板を支持する支持ユニットにおいて、
加熱部材及び反射板を含み、
前記反射板は、
前記加熱部材が発生させる熱エネルギーを前記基板の縁領域に反射させる曲面を含む支持ユニット。 - 前記曲面は、
前記支持ユニットを正断面から見る時、仮想の楕円の一部を構成する請求項1に記載の支持ユニット。 - 前記仮想の楕円は、
第1焦点、そして第2焦点を有し、
前記正断面から見た前記加熱部材は、前記第1焦点、そして前記第2焦点の中でいずれか1つと重畳されるように位置される請求項2に記載の支持ユニット。 - 前記正断面から見た前記基板の縁領域は、前記第1焦点、そして前記第2焦点の中で他の1つと重畳される請求項3に記載の支持ユニット。
- 前記加熱部材は、
前記基板を加熱する光を照射する少なくとも1つ以上のランプを含む請求項2乃至請求項4のいずれかの一項に記載の支持ユニット。 - 前記ランプの中で少なくとも一部は、
リング形状を有し、
互いに異なる半径を有し、その中心が互いに一致するように離隔されて配列される請求項5に記載の支持ユニット。 - 前記反射板は、
前記加熱部材の下に配置されるベース部と、
前記ベース部から上方向に突出される突出部と、を含み、
前記ベース部及び/又は前記突出部は、前記曲面を含む請求項6に記載の支持ユニット。 - 前記突出部は、
上部から見る時、前記ランプの中で最外側に配置されるランプと、そして前記最外側に配置されるランプに隣接するランプの間に配置される請求項7に記載の支持ユニット。 - 前記突出部は、
前記基板の縁領域の中で第1位置に前記熱エネルギーを反射させる第1曲面を含む第1突出部と、
前記基板の縁領域の中で前記第1位置と異なる位置である第2位置に前記熱エネルギーを反射させる第2曲面を含む第2突出部と、を含む請求項7に記載の支持ユニット。 - 前記第1曲面は、
前記正断面から見る時、第1仮想の楕円の一部を構成し、
前記第2曲面は、
前記正断面から見る時、前記第1仮想の楕円と異なる焦点を有する第2仮想の楕円の一部を構成する請求項9に記載の支持ユニット。 - 前記ユニットは、
前記基板を支持するチャックと、
前記チャックを回転させるスピン駆動部と、をさらに含む請求項10に記載の支持ユニット。 - 前記反射板、そして前記加熱部材は、前記記チャックの回転から独立的である請求項11に記載の支持ユニット。
- 基板を処理する装置において、
基板を支持する支持ユニットと、
前記支持ユニットに支持された基板に処理液を供給する液供給ユニットと、を含み、
前記支持ユニットは、
基板を支持するチャックと、
前記チャックに支持された基板を加熱する光を照射する加熱部材と、
前記加熱部材の下に配置される反射板と、を含み、
前記反射板は、
前記光を前記チャックに支持された基板の縁領域に反射させる曲面を含む基板処理装置。 - 前記曲面は、
前記支持ユニットの正断面から見る時、仮想の楕円の一部を構成する請求項13に記載の基板処理装置。 - 前記仮想の楕円は、
第1焦点、そして第2焦点を有し、
前記正断面から見た前記加熱部材の中心は、前記第1焦点、そして第2焦点の中でいずれか1つと互いに重畳され、
前記正断面から見た前記チャックに支持された基板の縁領域は、前記第1焦点、そして前記第2焦点の中で他の1つと重畳される請求項14に記載の基板処理装置。 - 前記反射板は、
前記加熱部材の下に配置されるベース部と、
前記ベース部から上方向に突出される突出部と、を含み、
前記ベース部及び/又は前記突出部は、各々前記曲面を含み、
前記曲面は、各々前記支持ユニットに支持された基板の異なる位置に前記光を反射させる請求項15に記載の基板処理装置。 - 前記処理液は、
基板の上の膜を蝕刻するためのケミカルを含み、
前記反射板は、
アルミニウム、銅、クォーツ、金、銀の中で少なくともいずれか1つを含む材質で提供される請求項15又は請求項16に記載の基板処理装置。 - 基板を処理する装置において、
基板を支持する支持ユニットと、
前記支持ユニットに支持された基板に処理液を供給する液供給ユニットと、を含み、
前記支持ユニットは、
基板を支持するチャックと、
前記チャック内に提供され、前記チャックに支持された基板を加熱する光を照射するランプと、
前記光を前記基板の縁領域に反射させる反射板と、を含み、
前記反射板は、
前記支持ユニットの正断面から見る時、第1焦点及び第2焦点を有する仮想の楕円の一部を構成する曲面を含み、
前記第1焦点は、
前記正断面から見る時、前記ランプの中心と一致し、
前記第2焦点は、
前記正断面から見る時、前記チャックに支持された基板の縁領域と重畳される基板処理装置。 - 前記反射板は、
前記ランプの下に配置されるベース部と、
前記ベース部から上方向に突出され、前記ベース部と共に前記曲面を含む突出部と、を含み、
前記突出部の各々は、
大体に弧形状を有し、
前記突出部は、
上部から見る時、大体に円形状をなすように互いに離隔されて提供される請求項18に記載の基板処理装置。 - 前記曲面は、各々前記支持ユニットに支持された基板の異なる位置に前記光を反射させる請求項19に記載の基板処理装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2020-0092023 | 2020-07-24 | ||
KR1020200092023A KR102564838B1 (ko) | 2020-07-24 | 2020-07-24 | 지지 유닛, 이를 포함하는 기판 처리 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022022142A true JP2022022142A (ja) | 2022-02-03 |
JP7407773B2 JP7407773B2 (ja) | 2024-01-04 |
Family
ID=79586346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021118513A Active JP7407773B2 (ja) | 2020-07-24 | 2021-07-19 | 支持ユニット、これを含む基板処理装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11961748B2 (ja) |
JP (1) | JP7407773B2 (ja) |
KR (2) | KR102564838B1 (ja) |
CN (1) | CN113972151A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102263006B1 (ko) * | 2019-07-18 | 2021-06-10 | 세메스 주식회사 | 기판 처리 장치 |
KR102564838B1 (ko) * | 2020-07-24 | 2023-08-10 | 세메스 주식회사 | 지지 유닛, 이를 포함하는 기판 처리 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160013079A1 (en) * | 2014-07-11 | 2016-01-14 | Semes Co., Ltd. | Apparatus for treating substrate |
US20190311923A1 (en) * | 2018-04-06 | 2019-10-10 | Semes Co., Ltd. | Substrate support unit and substrate processing apparatus having the same |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5651827A (en) * | 1996-01-11 | 1997-07-29 | Heraeus Quarzglas Gmbh | Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same |
US6080965A (en) * | 1997-09-18 | 2000-06-27 | Tokyo Electron Limited | Single-substrate-heat-treatment apparatus in semiconductor processing system |
JPH1197370A (ja) * | 1997-09-18 | 1999-04-09 | Tokyo Electron Ltd | 熱処理装置 |
KR20130074562A (ko) * | 2011-12-26 | 2013-07-04 | 엘지이노텍 주식회사 | 발광 모듈 |
TWI602253B (zh) | 2012-10-12 | 2017-10-11 | 蘭姆研究股份公司 | 圓盤狀物件之液體處理用設備及用於該設備中之加熱系統 |
US9748118B2 (en) * | 2013-07-31 | 2017-08-29 | Semes Co., Ltd. | Substrate treating apparatus |
KR102440986B1 (ko) * | 2015-08-31 | 2022-09-08 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
KR101757813B1 (ko) | 2015-11-17 | 2017-07-26 | 세메스 주식회사 | 스핀 헤드와 이를 포함하는 기판 처리 설비 및 기판 처리 방법 |
KR102208753B1 (ko) * | 2018-04-06 | 2021-01-28 | 세메스 주식회사 | 기판 지지 유닛 및 이를 갖는 기판 처리 장치 |
KR102294220B1 (ko) * | 2019-08-14 | 2021-08-30 | 세메스 주식회사 | 지지 유닛, 이를 포함하는 기판 처리 장치 및 기판 처리 방법 |
KR102407266B1 (ko) * | 2019-10-02 | 2022-06-13 | 세메스 주식회사 | 지지 유닛, 이를 포함하는 기판 처리 장치 및 기판 처리 방법 |
KR102564838B1 (ko) * | 2020-07-24 | 2023-08-10 | 세메스 주식회사 | 지지 유닛, 이를 포함하는 기판 처리 장치 |
KR20220066592A (ko) * | 2020-11-16 | 2022-05-24 | 삼성전자주식회사 | 윈도우 및 반사 부재를 포함하는 기판 가열 장치 및 이를 갖는 기판 처리 장치 |
KR102584511B1 (ko) * | 2020-12-07 | 2023-10-06 | 세메스 주식회사 | 지지 유닛 및 이를 포함하는 기판 처리 장치 |
-
2020
- 2020-07-24 KR KR1020200092023A patent/KR102564838B1/ko active IP Right Grant
-
2021
- 2021-07-19 JP JP2021118513A patent/JP7407773B2/ja active Active
- 2021-07-20 US US17/380,339 patent/US11961748B2/en active Active
- 2021-07-23 CN CN202110837199.3A patent/CN113972151A/zh active Pending
-
2023
- 2023-08-03 KR KR1020230101532A patent/KR20230119620A/ko not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160013079A1 (en) * | 2014-07-11 | 2016-01-14 | Semes Co., Ltd. | Apparatus for treating substrate |
US20190311923A1 (en) * | 2018-04-06 | 2019-10-10 | Semes Co., Ltd. | Substrate support unit and substrate processing apparatus having the same |
Also Published As
Publication number | Publication date |
---|---|
KR102564838B1 (ko) | 2023-08-10 |
KR20220014377A (ko) | 2022-02-07 |
CN113972151A (zh) | 2022-01-25 |
JP7407773B2 (ja) | 2024-01-04 |
US20220028708A1 (en) | 2022-01-27 |
KR20230119620A (ko) | 2023-08-16 |
US11961748B2 (en) | 2024-04-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11043403B2 (en) | Substrate support unit and substrate processing apparatus having the same including reflective member configured to reflect light toward substrate | |
KR102078157B1 (ko) | 기판 가열 유닛 및 이를 갖는 기판 처리 장치 | |
KR20230119620A (ko) | 지지 유닛, 이를 포함하는 기판 처리 장치 | |
KR102208753B1 (ko) | 기판 지지 유닛 및 이를 갖는 기판 처리 장치 | |
KR102294220B1 (ko) | 지지 유닛, 이를 포함하는 기판 처리 장치 및 기판 처리 방법 | |
US20220181168A1 (en) | Supporting unit and substrate treating apparatus including the same | |
KR102152904B1 (ko) | 기판 처리 장치 및 기판 처리 방법 | |
JP7269307B2 (ja) | 支持ユニット及び基板処理装置 | |
KR102037908B1 (ko) | 기판 가열 유닛 및 이를 갖는 기판 처리 장치 | |
KR102407266B1 (ko) | 지지 유닛, 이를 포함하는 기판 처리 장치 및 기판 처리 방법 | |
KR102054222B1 (ko) | 기판 가열 유닛 | |
KR102201877B1 (ko) | 기판 지지 유닛 및 이를 갖는 기판 처리 장치 | |
JP2021019204A (ja) | 基板処理装置 | |
KR20230068176A (ko) | 기판 처리 장치 | |
KR20200056969A (ko) | 기판 지지 유닛 및 이를 갖는 기판 처리 장치 | |
KR20220096025A (ko) | 지지 유닛, 기판 처리 장치 및 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210719 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220826 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220906 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221201 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20230124 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230519 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20230711 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230829 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20231128 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20231205 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20231219 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7407773 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |