JP2022001407A - Liquid discharge head, discharge unit, liquid discharging device, bonded substrate - Google Patents

Abstract

To improve board electrical connection reliability.SOLUTION: A liquid discharge head comprises: a first substrate 201 including a piezoelectric element 40 which pressurizes a pressure chamber communication with a nozzle for discharging liquid, and a terminal electrode 44 connected to a pressure generating element 40; and a second substrate 202 which is joined to the first substrate 201, and has a terminal electrode opening 252 for exposing the terminal electrode 44. The first substrate 201 is provided with an open hole 29 that penetrates the first substrate 201, and the second substrate 202 is provided with a communication hole 253 that communicates with the open hole 29 of the first substrate 202. The second substrate 202 has an outside air communication passage 254, that communicates the terminal electrode opening 252 and the communication hole 253 with each other, on a side opposite to a surface joined to the first substrate 201, and the outside air communication passage 254 is provided at any one of four corners of the second substrate 202.SELECTED DRAWING: Figure 1

Description

The present invention relates to a liquid discharge head, a discharge unit, a device for discharging liquid, and a bonded substrate.

For example, as a liquid discharge head, a first substrate provided with a pressure chamber leading to a nozzle for discharging liquid, a pressure generating means, and a terminal electrode communicating with the pressure generating means, a flow path for supplying liquid to the pressure chamber of the first substrate, and the like. There is one that uses a bonded substrate (bonded substrate) that is bonded to the second substrate provided with the above.

Conventionally, a nozzle plate, a flow path board, a drive means, a diaphragm, and a holding board joined to the side opposite to the nozzle plate of the flow path board are provided, and the holding board is a drive means on the flow path board side. It is known that a space portion surrounded by a holding substrate and a flow path substrate is provided at a position facing the holding substrate, and the space portion communicates with the atmosphere through a groove portion provided in the holding substrate (patented). Document 1).

Japanese Unexamined Patent Publication No. 2013-158991

By the way, a protective film for enhancing liquid resistance is formed on the flow path of the liquid discharge head, but if the protective film is formed on the terminal electrode leading to the pressure generating means, the reliability of the electrical connection is lowered. There is a problem.

The present invention has been made in view of the above problems, and an object of the present invention is to improve the reliability of electrical connection.

In order to solve the above problems, the liquid discharge head according to the present invention is
A pressure generating means that pressurizes the pressure chamber leading to the nozzle that discharges the liquid,
A first substrate including a terminal electrode connected to the pressure generating means,
A second substrate bonded to the first substrate and having a terminal electrode opening for exposing the terminal electrode is provided.
The first substrate is provided with a through hole that penetrates the first substrate.
The second substrate is provided with a communication hole leading to the through hole of the first substrate.
The second substrate has an outside air communication passage through the terminal electrode opening and the communication hole on the side opposite to the joint surface with the first substrate.
The outside air communication passage is configured to be provided at any one of the four corners of the second substrate or at two diagonal locations.

According to the present invention, the reliability of the electrical connection can be improved.

It is a plane explanatory view of the laminated substrate which constitutes the liquid discharge head which concerns on 1st Embodiment of this invention. It is a plane explanatory view of the 1st substrate and the 2nd substrate of the bonded substrate. Similarly, it is explanatory drawing which shows the detail of the outside air communication passage part of the 2nd substrate. Similarly, it is explanatory drawing provided for the explanation of the outside air communication passage and the gas intrusion detection room. It is a plane explanatory view of the laminated substrate which constitutes the liquid discharge head which concerns on 1st Embodiment of this invention. It is explanatory drawing which provides the explanation of the specific example of each embodiment. It is an external perspective explanatory view of the liquid discharge head which concerns on 3rd Embodiment of this invention as seen from the nozzle surface side. Similarly, it is an external perspective explanatory view seen from the side opposite to the nozzle surface. It is also an exploded perspective explanatory view. Similarly, it is an exploded perspective explanatory view of the flow path constituent member. FIG. 10 is an enlarged perspective explanatory view of a main part of FIG. Similarly, it is a cross-sectional perspective explanatory view of a flow path portion. It is a schematic explanatory drawing of an example of the apparatus which discharges a liquid which concerns on this invention. It is a plane explanatory view of an example of the head unit of the same apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The first embodiment of the present invention will be described with reference to FIGS. 1 to 3. FIG. 1 is a plan explanatory view of a bonded substrate constituting the liquid discharge head according to the same embodiment, and FIG. 2 is a planar explanatory view of a first substrate and a second substrate of the bonded substrate. 3A and 3B are explanatory views showing the details of the outside air communication passage portion of the second substrate, FIG. 3A is a plan explanatory view, and FIG. 3B is a cross-sectional explanatory view taken along the line AA of FIG.

The bonded substrate 200 is a substrate in which the first substrate 201 and the second substrate 202 are bonded (bonded) with an adhesive or the like.

The first substrate 201 includes two rows of a plurality of rows of piezoelectric elements 40 which are pressure generating means for pressurizing a pressure chamber leading to a nozzle for discharging a liquid. The piezoelectric element 40 is composed of a piezoelectric body 41, a lower electrode 42 as a common electrode sandwiching the piezoelectric body 41, and an upper electrode 43 as individual electrodes. The first substrate 201 is provided with a terminal electrode 44 connected to the upper electrode 43.

The first substrate 201 is provided with openings 32 that serve as a plurality of supply ports for supplying liquids to the plurality of pressure chambers.

The first substrate 201 is provided with a base 28 to be bonded to the second substrate 202, and a through hole 29 penetrating the first substrate 201 is provided in the portion of the bonded base 28.

The second substrate 202 is provided with a common supply flow path 58 and a supply port 54 through the common supply flow path 58 and the opening 32 of the first substrate 201.

The second substrate 202 has an accommodating portion 251 for accommodating the piezoelectric element 40 of the first substrate 201, and a terminal opening 252 for exposing the terminal electrode 44 of the first substrate 201.

The second substrate 202 is provided with a communication hole 253 leading to the through hole 29 of the first substrate 201. Further, the second substrate 202 has an outside air communication passage 254 through which the terminal opening 252 and the communication hole 253 pass on the side opposite to the joint surface with the first substrate 201.

Here, the outside air communication passage 254 is provided at any one of the four corners of the second substrate 202. The four corners of the second substrate 202 are four corners of a substantially rectangular region facing the terminal opening 252 in a planar shape. In other words, in the present embodiment, it is a portion of the second substrate 202 that is aligned with the accommodating portion 251 at the end in the arrangement direction (arrangement direction of the piezoelectric elements, arrangement direction of the nozzles) of the plurality of accommodating portions 251.

As shown in FIG. 3A, the outside air communication passage 254 has a pattern shape formed in a bellows shape while being bent between the communication hole 253 and the terminal opening 252. When the cross-sectional area of the outside air communication passage 254 is S (see FIG. 3B) and the length is L, in this embodiment, the L / S is set to be within the range of 0.50 to 20.00. There is.

A plurality of gas intrusion detection chambers 255 communicate with the outside air communication passage 254 at predetermined intervals. The widths W1 and W2 of the gas intrusion detection chamber 255 are larger than the width W3 of the outside air communication passage 254.

Next, the operation of this embodiment will be described with reference to FIG. FIG. 4 is an explanatory diagram for explaining a case where a large number of the first substrate and the second substrate are taken.

For the first substrate 201, for example, a 6-inch silicon substrate 203 is used to form a required thin film by a CVD method, a sputtering method, a spin coating method, or the like, and the first substrate 201 is processed by a photolithography method to form a large number of first substrates. 201 is made and divided into individual first substrates 201. Similarly, for the second substrate 202, a large number of second substrates 202 are manufactured on the Si substrate 200 and divided into individual second substrates 202.

Then, in a state where the first substrate 201 and the second substrate 202 are joined (bonded together), a liquid-resistant protective film that protects the wall surface of the flow path is formed. In this case, in order to improve the productivity, in the protective film formation, a plurality of bonded substrates (bonded substrates) 200 are arranged in the chamber of the protective film forming apparatus and batch-processed.

In the batch processing, the film adheres to the entire surface of the first substrate 201 and the second substrate 202, but the protective film is an insulating film, and if the protective film adheres to the terminal electrode 44, the external connection cannot be taken. Therefore, a protective film is formed on the surface of the second substrate 202 facing the surface to be bonded to the first substrate 201 with the protective tape cut out in the shape of the substrate attached.

As a result, the protective film is not formed on the terminal electrode 44, and the protective film can be formed on the common supply flow path 58, the supply port 54, the opening 32, and the pressure chamber, which are the flow paths.

However, when the protective tape is attached to the second substrate 202, it is preferably performed in a vacuum state in order to suppress the biting of voids. When returning from vacuum to atmospheric pressure after attaching the protective tape, the part surrounded by the protective tape, the second substrate 202 and the first substrate 201 and not penetrating the second substrate 202 and the first substrate 201 is in a vacuum state. Become.

In the present embodiment, the terminal opening 252 is opened to the atmosphere in a vacuum state, but under atmospheric pressure, the protective tape of the terminal electrode 44 in the vacuum state is pushed toward the first substrate 201 and is greatly deformed.

When, for example, the protective tape of the common supply flow path 58 and the terminal opening 252 is peeled off due to the deformation of the protective tape, the film-forming gas invades from the supply port 54 when the protective film is formed, and the terminal electrode A protective film is formed on 44.

In addition, even if the protective tape can be deformed under atmospheric pressure and the protective film film formation process can be started without causing the protective tape to peel off, the protective film can be formed with a higher vacuum than when the protective tape is attached. This time, the terminal opening 252 may expand and the protective tape may peel off.

In order to solve this problem, it is conceivable to adopt, for example, a protective tape having high adhesive strength to suppress deformation due to the pressure difference of the protective tape. However, a protective tape having a high adhesive strength has a large amount of outgas under vacuum, and the adhesive strength of the protective film may decrease due to deterioration of the film quality of the protective film and adhesion of the outgas component to the substrate.

On the other hand, if an attempt is made to adopt a protective tape having high rigidity so that the protective tape is not deformed, it is not possible to achieve both deformation suppression and heat resistance. Further, if the thickness is increased in order to increase the rigidity of the protective tape, it becomes difficult to process the protective tape itself, which causes inconveniences such as air bubbles easily getting caught during sticking.

Therefore, in the present embodiment, the outside air communication passage 254 and the communication hole 253 of the second substrate 202 communicate the terminal opening 252, which is in a vacuum state after the protective tape is attached, with the through hole 29 of the first substrate 201.

As a result, when the pressure is returned to the atmospheric pressure, the terminal opening 252 also becomes the atmospheric pressure via the through hole 29, the communication hole 253, and the outside air communication passage 254, so that the deformation of the protective tape can be suppressed. Further, even when the terminal opening 252 expands in the high vacuum chamber when the protective film is formed, the terminal opening 252 also becomes a high vacuum through the through hole 29, the communication hole 253, and the outside air communication passage 254. Deformation of the protective tape can be suppressed.

Therefore, it is prevented that a protective film is formed on the terminal electrodes, and the reliability of the electrical connection is improved.

The shape, length, and depth of the outside air communication passage 254 can be easily set, and are appropriately set according to the material of the protective tape, the degree of vacuum at the time of attaching the protective tape and forming the protective film, the vacuum opening time, and the like. do. Further, the length and depth of the flow path of the outside air communication passage 254 are set so that the film-forming gas does not enter through the through hole 253 as much as possible.

Next, the operation of the gas intrusion detection chamber 255 leading to the outside air communication passage 254 will be described.

After forming the protective film, it is necessary to confirm whether or not the film-forming gas has invaded the terminal opening 252. To confirm the presence or absence of intrusion of the film-forming gas, analyze the component to see if the film-forming gas component adheres to the terminal electrode 44, perform a resistance test of the terminal electrode 44, and perform a film-forming gas on the terminal electrode 44 and the communication flow path. It is conceivable to confirm discoloration due to adhesion.

However, it takes time to analyze the components of the film-forming gas. The resistance test may generate foreign matter. Discoloration of the terminal electrode 44 is difficult to discriminate because the amount of deposited gas adhering to the terminal electrode 44 is very small. When confirming the discoloration of the communication flow path, light is diffusely reflected depending on the width and depth of the communication flow path, and the presence or absence of discoloration cannot be confirmed.

Therefore, in the present embodiment, the gas intrusion detection chamber 255 is communicated with the outside air communication passage 254. The gas intrusion detection chamber 255 is wider than the outside air communication passage 254, suppresses diffused reflection of light, and has a size that makes it easy to see discoloration.

A plurality of the gas intrusion detection chambers 255 are connected between the communication holes 253 of the outside air communication passage 254 and the terminal openings 252 at predetermined intervals.

As a result, it is possible to confirm at which position of the outside air communication passage 254 the discoloration due to the intrusion of the film-forming gas is located, and it is possible to easily determine the intrusion of the film-forming gas into the terminal opening 252.

Next, the second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a plan explanatory view of a bonded substrate constituting the liquid discharge head according to the same embodiment.

In the present embodiment, outside air communication passages 254 are provided at two diagonal portions of the four corners of the second substrate 202, and each outside air communication passage 254 communicates with the communication hole 253 and the terminal opening 252, respectively.

Also in this embodiment, the same effect as that of the first embodiment can be obtained.

Next, a specific example of the intrusion of the film-forming gas will be described with reference to FIG. FIG. 6 is an explanatory diagram for explaining the specific example.

Here, 50 first substrates 201 were manufactured. On the other hand, regarding the second substrate 202, as described above, when the cross-sectional area of the outside air communication passage 254 is S and the length of the flow path is L (see FIG. 3), the L / S is shaken as shown in FIG. The second substrate 202 of each of the first embodiment and the second embodiment was manufactured five times each.

In the first embodiment, since the outside air communication passage 254 has the narrowest and longest configuration, it takes the longest time to communicate with the outside air, and during that time, the protective tape is likely to be deformed, but the film-forming gas has the most terminal opening 252. It is a structure that is difficult to enter.

On the other hand, in the ninth embodiment, the protective tape is most unlikely to be deformed, but the film-forming gas is easily invaded.

The number of connections is the number of connections of the outside air communication passage 254 to the child opening 252. The number of connections "1" is a state in which one outside air communication passage 254 is arranged for one chip as in the first embodiment (Example 1-9). The number of connections "2" is such that two outside air communication passages 254 and 254 are arranged diagonally with respect to one chip as in the second embodiment, and the outside air communication passages 254 are arranged in the terminal openings 252, respectively. There is (Example 10). In the configuration of the second embodiment (number of connections 2), the value of L / S describes the value of one outside air communication passage 254.

Prior evaluation revealed that the gas intrusion detection chamber 255 needs to have a size of 100 μm × 100 μm (W1 × W2 in FIG. 3).

Therefore, a gas intrusion detection chamber 255 having a size of 100 μm × 100 μm was connected to the folded portion of the outside air communication passage 254. The number of connections of the gas intrusion detection chamber 255 was appropriately set according to the number of folded portions of the outside air communication passage 254.

In order to confirm the effect of the outside air communication passage 254, five second boards 202 of Comparative Example 1 in which the outside air communication passage 254 is not arranged were manufactured.

In each embodiment, one outside air communication passage 254 is arranged per chip as shown in FIG. 1, or two are arranged as shown in FIG. 5, and the pattern shape of the outside air communication passage 254 is a folded pattern. .. The shape can be appropriately set according to the process conditions such as desired tape application conditions and protective film film forming conditions.

By arranging the number and location of the outside air communication passage 254 at one of the four corners or at two diagonal points of the four corners, the strength of the second substrate 202 is reduced by providing the outside air communication passage 254. Can be suppressed.

Further, in the embodiment, the communication hole 253 through which the liquid does not pass is connected to the terminal opening 252, but there may be a case where the communication hole 253 through which the liquid does not pass cannot be provided due to lack of room in the layout. In this case, if a step of sealing the outside air communication passage 254 is provided in a subsequent step, the same effect can be obtained even if the terminal opening 252 is connected by using the common supply flow path 58 in the present embodiment as a communication hole. can.

When the protective tape is attached, the terminal opening 252 does not become a closed space, and tape peeling due to deformation of the tape can be suppressed. A pattern may be formed on the surface to be bonded to the first substrate 201, but care must be taken not to be filled with an adhesive or the like when bonding.

Next, a thin film of the adhesive is transferred to the surface of the second substrate 202 on which the piezoelectric element accommodating portion 151 is formed by flexographic printing, and the first substrate 201 and the second substrate 202 are pressurized / heated using a wafer bonding device. 50 sheets of bonded boards were manufactured by joining them.

Then, using the manufactured substrate, whether or not the protective tape is deformed after the protective tape is attached, whether or not the film-forming gas invades through the outside air communication passage 254 after the protective film is formed, and whether or not the substrate is damaged during flow. Was evaluated.

Regarding the evaluation of the presence or absence of deformation of the protective tape, the terminal opening area was observed in detail with a microscope in order to capture the deformation state of the minute tape. Then, for those in which even a slight deformation of the protective tape was observed, the result is described as "there is some deformation" in the protective tape deformation column of FIG.

The protective tape was attached under the conditions of 25 ° C. and 100 Pa, and the protective film was formed under the conditions of 120 ° C. and 2 Pa and 8 h. This result is shown in FIG.

Regarding the five chips of Comparative Example 1 in which the outside air communication passage 254 is not provided, all the chips have deformation of the protective tape and intrusion of the film-forming gas from the deformed portion, and all the chips have poor connection resistance (NG). became.

On the other hand, with respect to the substrate provided with the outside air communication passage 254, a difference was observed depending on the L / S value.

For Examples 5 to 7 having an L / S value of 1.00 to 10.00, good qualities such as no deformation of the protective tape, no film formation gas intrusion, connection resistance OK, and no substrate damage were obtained. ..

In Example 8 having an L / S value of 0.50, there was no deformation of the protective tape, no damage to the substrate, and the connection resistance was OK, but a slight intrusion of film-forming gas was observed in the terminal opening 252. ..

Regarding Examples 4 and 3 having an L / S value of 15.00 and 20.00, there was no film formation gas intrusion, no substrate damage, and the connection resistance was OK, but slight deformation of the protective tape was observed. rice field.

In Example 9 having an L / S value of 0.25, the protective tape was not deformed and the substrate was not damaged, but a slight intrusion of film-forming gas was observed in the terminal opening 252, and the connection resistance was OK. There was, but it was near the upper limit of the standard.

In Example 2 having an L / S value of 30.00, there was no film formation gas intrusion through the outside air communication passage 254 and no damage to the substrate, but the protective tape was slightly deformed and the terminal opening was slightly from there. Intrusion of the film-forming gas into the portion 252 was observed. The connection resistance was OK, but it was near the upper limit of the standard.

In Example 1 having an L / S value of 50.00, there was no intrusion of the film-forming gas through the outside air communication passage 254 and no damage to the substrate, but the protective tape was slightly deformed and the terminal opening was slightly from there. Intrusion of the film-forming gas into the portion 252 was observed. Although the connection resistance was OK, it was OK at the upper limit as compared with Example 2.

From the above, it can be seen that a desired connection resistance can be obtained by setting the L / S value within the range of 0.50 to 20.00. Further, it can be seen that the outside air communication passage 254 with a larger margin can be obtained by setting the L / S value within the range of 1.00 to 10.00. Further, it can be seen that by setting the L / S value within the range of 0.25 to 10.00, it is possible to make the protective tape in a state in which no slight deformation is observed even when observed with a microscope.

Further, by arranging the outside air communication passages 254 at one place or two diagonal places, no damage was observed on any of the substrates.

Next, the third embodiment of the present invention will be described with reference to FIGS. 7 to 12. 7 is an explanatory view of an external perspective of the liquid discharge head according to the same embodiment as viewed from the nozzle surface side, FIG. 8 is an explanatory view of an external perspective seen from the side opposite to the nozzle surface, and FIG. 9 is an explanatory view of an exploded perspective view. 10 is an exploded perspective explanatory view of the flow path constituent member, FIG. 11 is an enlarged perspective explanatory view of a main part of FIG. 10, and FIG. 12 is a cross-sectional perspective explanatory view of the flow path portion.

The liquid discharge head 1 includes a nozzle plate 10, a flow path plate (individual flow path member) 20, a diaphragm member 30, a common flow path tributary member 50, a damper member 60, a common flow path mainstream member 70, and a frame. It includes a member 80, a wiring member (flexible wiring board) 101 as a second substrate, and the like. A head driver (driver IC) 102 is mounted on the wiring member 101. In the present embodiment, the individual flow path member 20 and the diaphragm member 30 constitute an actuator board 2 as a first board.

The nozzle plate 10 has a plurality of nozzles 11 for discharging a liquid. The plurality of nozzles 11 are arranged in a two-dimensional matrix.

The individual flow path member 20 includes a plurality of pressure chambers (individual liquid chambers) 21 communicating with the plurality of nozzles 11, a plurality of individual supply flow paths 22 communicating with the plurality of pressure chambers 21, and a plurality of pressure chambers 21. It forms a plurality of individual collection flow paths 23 that communicate with each other. One pressure chamber 21, an individual supply flow path 22 leading to the pressure chamber 21, and an individual recovery flow path 23 are collectively referred to as an individual flow path 25.

The diaphragm member 30 forms a diaphragm 31 which is a deformable wall surface of the pressure chamber 21, and the diaphragm 31 is integrally provided with a piezoelectric element 40. Further, the diaphragm member 30 is formed with a supply side opening 32 leading to the individual supply flow path 22 and a recovery side opening 33 leading to the individual recovery flow path 23. The piezoelectric element 40 is a pressure generating means that deforms the diaphragm 31 to pressurize the liquid in the pressure chamber 21.

The individual flow path member 20 and the diaphragm member 30 are not limited to being separate members. For example, the individual flow path member 20 and the diaphragm member 30 can be integrally formed of the same member by using an SOI (Silicon on Insulator) substrate. That is, an SOI substrate in which a silicon oxide film, a silicon layer, and a silicon oxide film are formed in this order on a silicon substrate is used, and the silicon substrate is used as an individual flow path member 20, and the silicon oxide film, the silicon layer, and the silicon oxide film are used. The vibrating plate 31 can be formed with. In this configuration, the layer structure of the silicon oxide film, the silicon layer, and the silicon oxide film of the SOI substrate is the diaphragm member 30. As described above, the diaphragm member 30 includes a member made of a material formed on the surface of the individual flow path member 20.

Then, a through hole 29A provided in the individual flow path member 20 and a through hole 29B provided in the diaphragm member 30 form a through hole 29 penetrating the actuator substrate 2 which is the first substrate.

The common flow path tributary member 50 alternately alternates between a plurality of common supply flow path tributaries 52 leading to two or more individual supply flow paths 22 and a plurality of common recovery flow path tributaries 53 leading to two or more individual recovery flow paths 23. It is formed adjacent to each other.

The common flow path tributary member 50 has a through hole serving as a supply port 54 through the supply side opening 32 of the individual supply flow path 22 and the common supply flow path tributary 52, and the recovery side opening 33 of the individual recovery flow path 23 and common recovery. A through hole is formed to serve as a recovery port 55 through the channel tributary 53.

Further, the common flow path tributary member 50 includes one or a part 56a of one or a plurality of common supply flow path main streams 56 leading to the plurality of common supply flow path tributaries 52, and one or a plurality of common flow path tributaries 53 leading to the plurality of common recovery flow path tributaries 53. A part 57a of the common recovery flow path main stream 57 is formed.

The common flow path tributary member 50 is a second substrate to be joined to the actuator substrate 2 which is the first substrate. The common flow path tributary member 50 has a terminal opening that exposes the accommodating portion 151 that houses the piezoelectric element 40 of the actuator substrate 2 and the terminal electrode (terminal electrode 44 of the first embodiment) of the piezoelectric element 40 of the actuator substrate 2. It has a portion 252 and the like.

Further, the common flow path tributary member 50 is provided with a communication hole 253 communicating with the through hole 29 of the actuator board 2, and the terminal opening 252 and the communication hole 253 are provided on the side opposite to the joint surface with the actuator board 2. It has an outside air communication passage 254 leading to it.

The outside air communication passage 254 has a pattern shape formed in a bellows shape while bending between the communication hole 253 and the terminal opening 252, and the outside air communication passage 254 has a plurality of gas intrusion detection chambers at predetermined intervals. 255 communicates.

The damper member 60 has a supply-side damper 62 facing (opposing) the supply port 54 of the common supply flow path tributary 52 and a collection-side damper 63 facing (opposing) the collection port 55 of the common recovery flow path tributary 53. Have.

Here, in the common supply flow path tributary 52 and the common recovery flow path tributary 53, the grooves arranged alternately in the common flow path tributary member 50, which are the same members, are sealed with a damper member 60 forming a deformable wall surface. It consists of stopping.

The common flow path mainstream member 70 forms a common supply flow path main stream 56 leading to the plurality of common supply flow path tributaries 52 and a common recovery flow path main stream 57 leading to the plurality of common recovery flow path tributaries 53.

The frame member 80 is formed with a part 56b of the main stream 56 of the flow supply flow path and a part 57b of the main stream 57 of the common recovery flow path. A part 56b of the common supply flow path main stream 56 leads to a supply port 81 provided in the frame member 80, and a part 57b of the common recovery flow path main stream 57 leads to a recovery port 82 provided in the frame member 80.

With this configuration, as in the first embodiment, it is possible to prevent a protective film from being formed on the terminal electrodes leading to the pressure generating means, and the reliability of the electrical connection is improved.

Next, an example of the device for discharging the liquid according to the present invention will be described with reference to FIGS. 13 and 14. FIG. 13 is a schematic explanatory view of the device, and FIG. 14 is a plan view of an example of the head unit of the device.

The printing device 500, which is a device for discharging this liquid, guides and conveys the carrying-in means 501 for carrying in the continuous body 510 and the continuous body 510 such as continuous book paper and sheet material carried in from the carrying-in means 501 to the printing means 505. Guidance transport means 503, printing means 505 that discharges liquid to the continuum 510 to form an image, drying means 507 that dries the continuum 510, carry-out means 509 that carries out the continuum 510, and the like. It is equipped with.

The continuous body 510 is sent out from the original winding roller 511 of the carrying-in means 501, guided and conveyed by the rollers of the carrying-in means 501, the guiding and transporting means 503, the drying means 507, and the carrying-out means 509, and is guided and conveyed by the winding roller 591 of the carrying-out means 509. It is wound up at.

In the printing means 505, the continuous body 510 is conveyed on the transfer guide member 559 facing the discharge unit 550 and the discharge unit 555, an image is formed by the liquid discharged from the discharge unit 550, and the continuous body 510 is discharged from the discharge unit 555. Post-treatment is performed with the treatment liquid to be treated.

Here, the discharge unit 550 is, for example, a full-line head array 551A, 551B, 551C, 551D for four colors from the upstream side in the transport direction (hereinafter, referred to as "head array 551" when the colors are not distinguished). Is placed.

Each head array 551 is a liquid discharging means, and discharges black K, cyan C, magenta M, and yellow Y liquids to the conveyed continuum 510, respectively. The types and numbers of colors are not limited to this.

The head array 551 is, for example, arranged with the liquid discharge heads (which are also simply referred to as “heads”) 100 according to the present invention arranged in a staggered pattern on the base member 552, but is not limited to this.

In the above embodiment, the liquid discharge head is described as an example in which the bonded substrate is a constituent member, but the present invention is not limited to this. That is, in a bonded substrate in which a first substrate including a terminal electrode and a second substrate having a terminal electrode opening for exposing the terminal electrodes of the first substrate are bonded, the first substrate penetrates the first substrate. A through hole is provided, the second substrate is provided with a communication hole leading to the through hole of the first substrate, and the second substrate has a terminal electrode opening on the side opposite to the joint surface with the first substrate. It has an outside air communication passage that passes through the communication hole, and the outside air communication passage is configured to be provided at any one of the four corners of the second substrate or at two diagonal locations.

Examples of such bonded substrates include semiconductor substrates.

This can improve the reliability of the electrical connection.

In the present application, the liquid to be discharged may have a viscosity and surface tension that can be discharged from the head, and is not particularly limited, but the viscosity becomes 30 mPa · s or less at room temperature, under normal pressure, or by heating or cooling. It is preferable that it is a thing. More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functionalizable materials such as polymerizable compounds, resins and surfactants, biocompatible materials such as DNA, amino acids and proteins, and calcium. , Solvents, suspensions, emulsions, etc. containing edible materials such as natural dyes, etc., for example, inks for inkjets, surface treatment liquids, components of electronic elements and light emitting elements, and formation of electronic circuit resist patterns. It can be used in applications such as liquids and material liquids for three-dimensional modeling.

As an energy generation source (pressure generating means) for discharging liquid, a piezoelectric actuator (laminated piezoelectric element and thin film piezoelectric element), a thermal actuator using an electric heat conversion element such as a heat generating resistor, and a static electricity plate and a counter electrode are composed of a vibration plate and a counter electrode. Those that use electric actuators are included.

The "discharge unit" is a liquid discharge head integrated with functional parts and a mechanism, and includes a collection of parts related to liquid discharge. For example, the "discharge unit" includes a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, a main scanning movement mechanism, a liquid circulation device in which at least one of the configurations is combined with a liquid discharge head, and the like.

Here, the term "integration" means, for example, a liquid discharge head and a functional component, a mechanism in which the mechanism is fixed to each other by fastening, bonding, engagement, etc., or one in which one is movably held with respect to the other. include. Further, the liquid discharge head, the functional component, and the mechanism may be configured to be detachable from each other.

For example, as a discharge unit, there is a unit in which a liquid discharge head and a head tank are integrated. In some cases, the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter can be added between the head tank of these discharge units and the liquid discharge head.

Further, as a discharge unit, there is a unit in which a liquid discharge head and a carriage are integrated.

Further, there is a discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably by a guide member constituting a part of the scanning movement mechanism. In some cases, the liquid discharge head, the carriage, and the main scanning movement mechanism are integrated.

Further, as a discharge unit, there is a carriage to which a liquid discharge head is attached, in which a cap member which is a part of the maintenance / recovery mechanism is fixed, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated.

Further, as a discharge unit, there is a unit in which a tube is connected to a head tank or a liquid discharge head to which a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. The liquid of the liquid storage source is supplied to the liquid discharge head through this tube.

The main scanning movement mechanism shall include a single guide member. Further, the supply mechanism includes a single tube and a single loading unit.

Although the "discharge unit" is described here in combination with the liquid discharge head, the "discharge unit" includes a head module or head unit including the above-mentioned liquid discharge head and functional parts as described above. The one with integrated mechanism is also included.

The "device for discharging a liquid" includes a device including a liquid discharge head, a discharge unit, a head module, a head unit, and the like, and driving the liquid discharge head to discharge the liquid. The device for discharging a liquid includes not only a device capable of discharging a liquid to a device to which the liquid can adhere, but also a device for discharging the liquid into the air or into the liquid.

The "device for discharging the liquid" can also include means for feeding, transporting, and discharging paper to which the liquid can adhere, as well as a pretreatment device, a posttreatment device, and the like.

For example, as a "device that ejects a liquid", an image forming device that is a device that ejects ink to form an image on paper, and a three-dimensional object (three-dimensional object) are formed in layers in order to form a three-dimensional object. There is a three-dimensional modeling device (three-dimensional modeling device) that discharges the modeling liquid into the powder layer.

Further, the "device for discharging a liquid" is not limited to a device in which a significant image such as characters and figures is visualized by the discharged liquid. For example, those that form patterns that have no meaning in themselves and those that form a three-dimensional image are also included.

The above-mentioned "thing to which a liquid can adhere" means a material to which a liquid can adhere at least temporarily, such as a material to which the liquid adheres and adheres, and a material to which the liquid adheres and permeates. Specific examples include paper, recording paper, recording paper, film, recorded media such as cloth, electronic substrates, electronic components such as piezoelectric elements, powder layers (powder layers), organ models, and media such as inspection cells. Yes, and includes everything to which the liquid adheres, unless otherwise specified.

The material of the above-mentioned "material to which a liquid can adhere" may be paper, thread, fiber, cloth, leather, metal, plastic, glass, wood, ceramics or the like as long as the liquid can adhere even temporarily.

Further, the "device for discharging the liquid" includes, but is not limited to, a device in which the liquid discharge head and the device to which the liquid can adhere move relatively. Specific examples include a serial type device that moves the liquid discharge head, a line type device that does not move the liquid discharge head, and the like.

In addition, as a "device for ejecting a liquid", a treatment liquid coating device for ejecting a treatment liquid to the paper in order to apply the treatment liquid to the surface of the paper for the purpose of modifying the surface of the paper, etc. There is an injection granulation device that granulates fine particles of raw materials by injecting a composition liquid in which raw materials are dispersed in a solution through a nozzle.

In addition, in the term of this application, image formation, recording, printing, printing, printing, modeling, etc. are all synonymous.

1 Liquid discharge head 2 Actuator board (first board)
10 Nozzle plate 11 Nozzle 20 Individual flow path member 21 Pressure chamber 22 Individual supply flow path 23 Individual recovery flow path 30 Diaphragm member 40 Piezoelectric element 50 Common flow path member 52 Common supply flow path tributary 53 Common recovery flow path tributary 56 Common supply Channel main stream 57 Common recovery channel main stream 101 Wiring member (second substrate)
201 1st substrate 202 2nd substrate 203 anisotropic conductive film 212 wiring electrode 213 1st insulating film 214 2nd insulating film 222 wiring electrode 500 Printing device (device for discharging liquid)
550 discharge unit

Claims (9)

A pressure generating means that pressurizes the pressure chamber leading to the nozzle that discharges the liquid,
A first substrate including a terminal electrode connected to the pressure generating means,
A second substrate bonded to the first substrate and having a terminal electrode opening for exposing the terminal electrode is provided.
The first substrate is provided with a through hole that penetrates the first substrate.
The second substrate is provided with a communication hole leading to the through hole of the first substrate.
The second substrate has an outside air communication passage through the terminal electrode opening and the communication hole on the side opposite to the joint surface with the first substrate.
The liquid discharge head is characterized in that the outside air communication passage is provided at any one of the four corners of the second substrate or at two diagonal locations. The liquid discharge head according to claim 1, wherein the outside air communication passage has an L / S in the range of 0.50 to 20.00 when the cross-sectional area is S and the length is L. .. The liquid discharge head according to claim 1, wherein the outside air communication passage has an L / S in the range of 1.00 to 10.00 when the cross-sectional area is S and the length is L. .. The liquid discharge head according to any one of claims 1 to 3, wherein the through hole of the first substrate is independent of the liquid flow path. The liquid discharge head according to any one of claims 1 to 4, wherein a gas intrusion detection chamber having a width equal to or larger than the width of the outside air communication passage communicates with the outside air communication passage of the second substrate. The liquid discharge head according to claim 5, wherein a plurality of the gas intrusion detection chambers are arranged at predetermined intervals. A discharge unit including the liquid discharge head according to any one of claims 1 to 6. A device for discharging a liquid, which comprises the liquid discharge head according to any one of claims 1 to 6 or the discharge unit according to claim 7. The first substrate including the terminal electrodes and
A second substrate bonded to the first substrate and having a terminal electrode opening for exposing the terminal electrode is provided.
The first substrate is provided with a through hole that penetrates the first substrate.
The second substrate is provided with a communication hole leading to the through hole of the first substrate.
The second substrate has an outside air communication passage through the terminal electrode opening and the communication hole on the side opposite to the joint surface with the first substrate.
The bonded substrate is characterized in that the outside air communication passage is provided at any one of the four corners of the second substrate or at two diagonal locations.

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