JP2021530707A - 回転角度測定システム - Google Patents
回転角度測定システム Download PDFInfo
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- JP2021530707A JP2021530707A JP2021502938A JP2021502938A JP2021530707A JP 2021530707 A JP2021530707 A JP 2021530707A JP 2021502938 A JP2021502938 A JP 2021502938A JP 2021502938 A JP2021502938 A JP 2021502938A JP 2021530707 A JP2021530707 A JP 2021530707A
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- 238000005259 measurement Methods 0.000 title claims description 28
- 239000000463 material Substances 0.000 claims abstract description 8
- 239000004020 conductor Substances 0.000 claims 1
- 230000035699 permeability Effects 0.000 abstract description 3
- 241000196324 Embryophyta Species 0.000 abstract 1
- 238000010586 diagram Methods 0.000 abstract 1
- 238000011156 evaluation Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/2033—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils controlling the saturation of a magnetic circuit by means of a movable element, e.g. a magnet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
Abstract
Description
12 シャフト
14 駆動モータ
16 モータハウジング
18 ロータユニット
20 ステータユニット
22;22´ 磁気遮蔽装置
24 ロータ円周板
26 センサ磁石
32 ステータ円周板
34 マルチターンセンサユニット
35 集積回路
36 ウィーガンドセンサ
37 ホールセンサ
38 評価ユニット
39 ステータ留め具
40;40´ 第1の遮蔽要素
42;42´ 第2の遮蔽要素
43 第1の遮蔽要素壁部
44 底壁部
45 第2の遮蔽要素壁部
46 第1の前壁部
48 第2の前壁部
50 第1の側壁部
52 第2の側壁部
54 ステータハウジング
56 底壁部
57 カバー壁部
58 内壁部
59 内壁部
60 外壁部
61 外壁部
A1 第1の軸方向側
A2 第2の軸方向側
Claims (11)
- シャフト(12)の回転を検出するための回転角度測定システム(10;10´)であって、
実質的に軸方向に延びる前記シャフト(12)と、
前記シャフト(12)を半径方向に取り囲み、少なくとも1つのセンサ磁石(26)を備え、前記シャフト(12)に連結されて共に回転するロータユニット(18)と、
前記シャフト(12)から半径方向に離間して配置されるマルチターンセンサユニット(34)を備え、前記マルチターンセンサユニット(34)が機能的に前記センサ磁石(26)と相互作用してシャフト回転を検出する少なくとも1つのウィーガンドセンサ(36)を含む、静止したステータユニット(20)と、
高透磁率材料からなる、前記少なくとも1つのウィーガンドセンサ(36)に対する少なくとも1つの磁気遮蔽装置(22;22´)と、を備え、
前記少なくとも1つの磁気遮蔽装置(22;22´)は、前記少なくとも1つの前記ウィーガンドセンサ(36)を、その半径方向内側、半径方向外側、第1の軸方向側(A1)、及び第2の軸方向側(A2)で取り囲む遮蔽要素(40、42;40´、42´)を含む、ことを特徴とする回転角度測定システム(10;10´)。 - 前記磁気遮蔽装置(22;22´)は、前記第1の軸方向側(A1)で前記ウィーガンドセンサ(36)を取り囲む第1の遮蔽要素(40;40´)と、前記第1の軸方向側(A1)の反対側の第2の軸方向側(A2)で前記ウィーガンドセンサ(36)を取り囲む第2の遮蔽要素(42;42´)とを備える、請求項1に記載の回転角度測定システム(10;10´)。
- 前記第1の遮蔽要素(40´)が静止して配置され、前記第2の遮蔽要素(42´)が前記シャフト(12)に連結されて共に回転する、請求項2に記載の回転角度測定システム(10´)。
- 両方の前記遮蔽要素(40、42)が静止して配置され、互いに直接連結されている、請求項2に記載の回転角度測定システム(10)。
- 前記ステータユニット(20)及び静止した前記第1の遮蔽要素(40´)が内部に配置され、非磁化材料からなるステータハウジング(54)が設けられる、請求項2又は3に記載の回転角度測定システム(10´)。
- 前記磁気遮蔽装置(22;22´)は、前記ウィーガンドセンサ(36)が配置されたステータユニット部分のみを前記磁気遮蔽装置(22;22´)が取り囲むように、前記ウィーガンドセンサ(36)の少なくとも軸方向側(A1)において円周方向に延びるリング部分として構成される、請求項1乃至5のいずれか1項に記載の回転角度測定システム(10;10´)。
- 前記磁気遮蔽装置(22)は、半径方向内側、半径方向外側及び互いに対向して円周方向に延びる両側面において前記ウィーガンドセンサ(36)を取り囲む遮蔽要素(40、42)を備える、請求項1乃至6のいずれか1項に記載の回転角度測定システム(10)。
- 前記マルチターンセンサユニット(34)は、ホールセンサ(37)を備え、前記磁気遮蔽装置(22´)は、半径方向内側、半径方向外側、前記第1の軸方向側(A1)、及び前記第2の軸方向側(A2)で前記ホールセンサ(37)を取り囲む遮蔽要素(40´、42´)を備える、請求項1乃至7のいずれか1項に記載の回転角度測定システム(10´)。
- 前記ロータユニット(18)は、円周方向に沿って均一に分布された4つのセンサ磁石を備える、請求項1乃至8のいずれか1項に記載の回転角度測定システム(10;10´)。
- 前記シャフト(12)が中空シャフトである、請求項1乃至9のいずれか1項に記載の回転角度測定システム(10;10´)。
- 前記シャフトの部分回転を検出するための容量性のシングルターンユニットを備え、第1のシングルターンセンサ素子が前記ロータユニット(18)に配置され、第2のシングルターンセンサ素子が前記ステータユニット(20)に配置される、請求項1乃至10のいずれか1項に記載の回転角度測定システム(10;10´)。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2018/069744 WO2020015834A1 (de) | 2018-07-20 | 2018-07-20 | Drehwinkelmesssystem |
Publications (2)
Publication Number | Publication Date |
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JP2021530707A true JP2021530707A (ja) | 2021-11-11 |
JP7247318B2 JP7247318B2 (ja) | 2023-03-28 |
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JP2021502938A Active JP7247318B2 (ja) | 2018-07-20 | 2018-07-20 | 回転角度測定システム |
Country Status (5)
Country | Link |
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US (1) | US11525663B2 (ja) |
EP (1) | EP3824249B1 (ja) |
JP (1) | JP7247318B2 (ja) |
CN (1) | CN112703371A (ja) |
WO (1) | WO2020015834A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20240018466A (ko) * | 2021-06-08 | 2024-02-13 | 오리엔탈모터가부시끼가이샤 | 운동 검출기 |
WO2024088529A1 (de) | 2022-10-26 | 2024-05-02 | Fraba B.V. | Messanordnung |
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2018
- 2018-07-20 CN CN201880095661.3A patent/CN112703371A/zh active Pending
- 2018-07-20 US US17/261,031 patent/US11525663B2/en active Active
- 2018-07-20 EP EP18752421.0A patent/EP3824249B1/de active Active
- 2018-07-20 JP JP2021502938A patent/JP7247318B2/ja active Active
- 2018-07-20 WO PCT/EP2018/069744 patent/WO2020015834A1/de unknown
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JPS54162556A (en) * | 1978-06-13 | 1979-12-24 | Nec Corp | Angle detector |
JPS57133309A (en) * | 1981-02-12 | 1982-08-18 | Ricoh Co Ltd | Magnetic sensor device |
JPH0378258U (ja) * | 1989-11-30 | 1991-08-07 | ||
JPH0933548A (ja) * | 1995-07-24 | 1997-02-07 | Unitika Ltd | 回転センサ |
JPH1078443A (ja) * | 1996-09-03 | 1998-03-24 | Sumitomo Electric Ind Ltd | 電磁発電式回転センサ |
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JP2018054573A (ja) * | 2016-09-30 | 2018-04-05 | 株式会社ニコン | エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 |
Also Published As
Publication number | Publication date |
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CN112703371A (zh) | 2021-04-23 |
US11525663B2 (en) | 2022-12-13 |
EP3824249A1 (de) | 2021-05-26 |
US20210302148A1 (en) | 2021-09-30 |
WO2020015834A1 (de) | 2020-01-23 |
EP3824249B1 (de) | 2022-08-31 |
JP7247318B2 (ja) | 2023-03-28 |
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