JP2021522079A5 - - Google Patents

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Publication number
JP2021522079A5
JP2021522079A5 JP2020560998A JP2020560998A JP2021522079A5 JP 2021522079 A5 JP2021522079 A5 JP 2021522079A5 JP 2020560998 A JP2020560998 A JP 2020560998A JP 2020560998 A JP2020560998 A JP 2020560998A JP 2021522079 A5 JP2021522079 A5 JP 2021522079A5
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JP
Japan
Prior art keywords
layer
polishing
rotary tool
substrate
corner
Prior art date
Application number
JP2020560998A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2019211719A5 (https=
JP2021522079A (ja
JP7337095B2 (ja
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Publication date
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Priority claimed from PCT/IB2019/053483 external-priority patent/WO2019211719A1/en
Publication of JP2021522079A publication Critical patent/JP2021522079A/ja
Publication of JPWO2019211719A5 publication Critical patent/JPWO2019211719A5/ja
Publication of JP2021522079A5 publication Critical patent/JP2021522079A5/ja
Application granted granted Critical
Publication of JP7337095B2 publication Critical patent/JP7337095B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2020560998A 2018-05-01 2019-04-29 適合性研磨物品 Active JP7337095B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862665065P 2018-05-01 2018-05-01
US62/665,065 2018-05-01
PCT/IB2019/053483 WO2019211719A1 (en) 2018-05-01 2019-04-29 Conformable abrasive article

Publications (4)

Publication Number Publication Date
JP2021522079A JP2021522079A (ja) 2021-08-30
JPWO2019211719A5 JPWO2019211719A5 (https=) 2022-05-11
JP2021522079A5 true JP2021522079A5 (https=) 2022-05-11
JP7337095B2 JP7337095B2 (ja) 2023-09-01

Family

ID=68386000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020560998A Active JP7337095B2 (ja) 2018-05-01 2019-04-29 適合性研磨物品

Country Status (5)

Country Link
US (2) US12128526B2 (https=)
JP (1) JP7337095B2 (https=)
KR (1) KR102713740B1 (https=)
CN (1) CN112041114B (https=)
WO (1) WO2019211719A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023101842A1 (en) * 2021-11-30 2023-06-08 Corning Incorporated Localized polishing fixture and processes of using the same
KR20240059826A (ko) * 2022-10-27 2024-05-08 삼성디스플레이 주식회사 연마 장치

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1189561A (en) 1967-02-21 1970-04-29 E I Du Pont De Neomours And Co Process for Preparing Fluorinated Organic Sulfonyl Derivatives and Sulfones
US4945687A (en) * 1989-07-25 1990-08-07 Jason, Inc. Rotary fininshing tool
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5238970A (en) 1991-04-03 1993-08-24 Imperial Chemical Industries, Plc Manufacture of rigid foams and compositions therefor
US5206992A (en) 1992-06-12 1993-05-04 American Roller Company Compressible roller
JP3040905B2 (ja) * 1993-12-29 2000-05-15 株式会社花村硝子工業 ２連型砥石車、ガラス板の端縁部研削・研磨方法およびガラス板の端縁部研削・研磨装置
JPH0895275A (ja) 1994-09-26 1996-04-12 Ricoh Co Ltd 電子写真感光体用支持体及び該支持体を用いた電子写真感光体
US20040020789A1 (en) * 2000-02-17 2004-02-05 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
CN100537147C (zh) * 2000-12-01 2009-09-09 东洋橡膠工业株式会社 研磨垫及其制造方法和研磨垫用缓冲层
US6580006B1 (en) 2002-05-02 2003-06-17 3M Innovative Properties Company Catalytic process for preparing perfluoroethanesulfonyl fluoride and/or perfluorodiethylsulfone
RU2006107555A (ru) 2003-08-11 2006-07-27 Е.И.Дюпон де Немур энд Компани (US) Способы применения фторсульфонов для пожаротушения, предотвращения возгорания и уменьшения или устранения воспламеняемости воспламеняющейся рабочей жидкости
DE102004047563A1 (de) * 2004-09-30 2006-04-06 Asphericon Gmbh Verfahren zum Polieren
JP2006326795A (ja) * 2005-05-30 2006-12-07 Kurenooton Kk 研磨用砥石
WO2008116049A2 (en) 2007-03-21 2008-09-25 3M Innovative Properties Company Methods of removing defects in surfaces
US8460060B2 (en) * 2009-01-30 2013-06-11 Smr Patents S.A.R.L. Method for creating a complex surface on a substrate of glass
US8540551B2 (en) 2010-12-15 2013-09-24 Corning Incorporated Glass edge finish system, belt assembly, and method for using same
WO2013003566A2 (en) 2011-06-29 2013-01-03 Viztek, Llc Digital retrofit system and method for x-ray radiography
US9028296B2 (en) * 2012-08-30 2015-05-12 Corning Incorporated Glass sheets and methods of shaping glass sheets
US10414021B2 (en) * 2014-02-06 2019-09-17 Asahi Kasei Kogyo Co., Ltd. Polishing abrasive particle, production method therefore, polishing method, polishing device, and slurry
EP3152002B1 (en) * 2014-06-04 2021-02-24 Paolo Baratti Abrasive tool for machining surfaces
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process

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