JP2021513147A5 - - Google Patents

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Publication number
JP2021513147A5
JP2021513147A5 JP2020541667A JP2020541667A JP2021513147A5 JP 2021513147 A5 JP2021513147 A5 JP 2021513147A5 JP 2020541667 A JP2020541667 A JP 2020541667A JP 2020541667 A JP2020541667 A JP 2020541667A JP 2021513147 A5 JP2021513147 A5 JP 2021513147A5
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JP
Japan
Prior art keywords
mass flow
differential pressure
flow
absolute pressure
vacant space
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JP2020541667A
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English (en)
Japanese (ja)
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JP2021513147A (ja
JP7216736B2 (ja
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Priority claimed from US16/195,432 external-priority patent/US11073846B2/en
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Publication of JP2021513147A5 publication Critical patent/JP2021513147A5/ja
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Publication of JP7216736B2 publication Critical patent/JP7216736B2/ja
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JP2020541667A 2018-01-30 2018-11-20 絶対圧及び差圧トランスデューサーを有する質量流量コントローラー Active JP7216736B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862624059P 2018-01-30 2018-01-30
US62/624,059 2018-01-30
US16/195,432 2018-11-19
US16/195,432 US11073846B2 (en) 2018-01-30 2018-11-19 Mass flow controller with absolute and differential pressure transducer
PCT/US2018/062127 WO2019152089A1 (en) 2018-01-30 2018-11-20 Mass flow controller with absolute and differential pressure transducer

Publications (3)

Publication Number Publication Date
JP2021513147A JP2021513147A (ja) 2021-05-20
JP2021513147A5 true JP2021513147A5 (https=) 2022-01-04
JP7216736B2 JP7216736B2 (ja) 2023-02-01

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ID=67392855

Family Applications (1)

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JP2020541667A Active JP7216736B2 (ja) 2018-01-30 2018-11-20 絶対圧及び差圧トランスデューサーを有する質量流量コントローラー

Country Status (7)

Country Link
US (2) US11073846B2 (https=)
EP (1) EP3746860B1 (https=)
JP (1) JP7216736B2 (https=)
KR (1) KR102691172B1 (https=)
CN (1) CN111902786B (https=)
TW (1) TWI796417B (https=)
WO (1) WO2019152089A1 (https=)

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JP2022047815A (ja) * 2020-09-14 2022-03-25 アズビル株式会社 マスフローコントローラ
US11940307B2 (en) 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
DE102021130134A1 (de) * 2021-11-18 2023-05-25 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Vorrichtung zur Fluidbegrenzung und Vorrichtung zum Messen einer Eigenschaft eines Prozessfluids
US12000723B2 (en) 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control
US12436049B2 (en) 2023-02-16 2025-10-07 Te Connectivity Solutions Gmbh Sensor die with a diaphragm
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US12449322B2 (en) 2023-04-05 2025-10-21 Te Connectivity Solutions Gmbh Sensor assembly
US20250076141A1 (en) * 2023-09-01 2025-03-06 Te Connectivity Solutions Gmbh Sensor Having a Package with a Sensor Die
US20250130600A1 (en) * 2023-10-20 2025-04-24 Illinois Took Works Inc. Valve assembly and system used to control flow rate of a fluid
CN117148877B (zh) * 2023-11-01 2024-01-02 苏芯物联技术(南京)有限公司 一种高精度管道流量测量控制装置及设计方法

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KR20170092556A (ko) * 2014-12-04 2017-08-11 일리노이즈 툴 워크스 인코포레이티드 유량계의 무-와이어형 유동 제한기
JP6828687B2 (ja) * 2015-09-30 2021-02-10 日立金属株式会社 質量流量制御装置、及び流量計の診断方法
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JP6871721B2 (ja) * 2016-11-17 2021-05-12 株式会社堀場エステック 圧力式流量計
CN106679925A (zh) * 2016-12-15 2017-05-17 中国航空工业集团公司沈阳空气动力研究所 一种微质量射流流量高精度控制装置和控制方法
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