JP2021507813A - Welding mechanism of vacuum welding furnace - Google Patents

Welding mechanism of vacuum welding furnace Download PDF

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JP2021507813A
JP2021507813A JP2020536686A JP2020536686A JP2021507813A JP 2021507813 A JP2021507813 A JP 2021507813A JP 2020536686 A JP2020536686 A JP 2020536686A JP 2020536686 A JP2020536686 A JP 2020536686A JP 2021507813 A JP2021507813 A JP 2021507813A
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シャンドン リー
シャンドン リー
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シャンドン ツァイジュー エレクトロニック テクノロジー カンパニー リミテッド
シャンドン ツァイジュー エレクトロニック テクノロジー カンパニー リミテッド
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/008Soldering within a furnace
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08Auxiliary devices therefor

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  • Mechanical Engineering (AREA)
  • Furnace Details (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Tunnel Furnaces (AREA)
  • Arc Welding In General (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

真空溶接炉の溶接機構であって、溶接室(18)と、溶接室(18)の上側の炉蓋(4)とを含み、炉蓋(4)と溶接室(18)との間に溶接チャンバが設置され、溶接室(18)の下部に溶接台(20)が設けられ、溶接台(20)の供給端に近接する側は、加熱領域であり、溶接台(20)の排出端に近接する側は、冷却領域であり、負圧吸引モジュール(9)は、加熱領域の冷却領域に近接する一端の上側に設置され、炉蓋(4)に昇降可能に取付けされ、負圧吸引モジュール(9)の底部と加熱領域と囲み密閉した負圧チャンバを形成し、溶接室(18)または炉蓋(4)にシールドガス導入管が設置されることを特徴とする真空溶接炉の溶接機構。本真空溶接炉の溶接機構は、シートの溶接を負圧チャンバ内で速やかに完成でき、加熱過程においてシートが酸素との反応を防止できる。【選択図】図1A welding mechanism for a vacuum welding furnace, including a welding chamber (18) and a furnace lid (4) above the welding chamber (18), and welding between the furnace lid (4) and the welding chamber (18). A chamber is installed, a welding table (20) is provided in the lower part of the welding chamber (18), and the side close to the supply end of the welding table (20) is a heating region and is located at the discharge end of the welding table (20). The adjacent side is a cooling region, and the negative pressure suction module (9) is installed on the upper side of one end close to the cooling region of the heating region, and is mounted on the furnace lid (4) so as to be able to move up and down. A welding mechanism of a vacuum welding furnace characterized in that a closed negative pressure chamber is formed by surrounding the bottom of (9) and a heating region, and a shield gas introduction pipe is installed in the welding chamber (18) or the furnace lid (4). .. The welding mechanism of this vacuum welding furnace can quickly complete the welding of the sheet in the negative pressure chamber, and can prevent the sheet from reacting with oxygen during the heating process. [Selection diagram] Fig. 1

Description

真空溶接の技術分野に属する真空溶接炉の溶接機構に関する。 It relates to a welding mechanism of a vacuum welding furnace belonging to the technical field of vacuum welding.

ダイオード、トランジスタ、サイリスタ又はブリッジ等の電子部品を製造する際、トップシートとボトムシートとの間にチップを半田付けする必要があり、該プロセスは積層と呼ばれる。積層の具体的な作業プロセスは、以下の通りである。まず、ボトムシートの上側に半田ペーストを塗布し、チップをボトムシートの具体的な位置に置き、その後、下側に半田ペーストが塗布されたトップシートをボトムシートの上側に積み重ね、さらに、溶接金型のトップカバーを溶接金型の底板に蓋合わせ、最後に、溶接金型を溶接炉内に送り込んで溶接する。シートの溶接は、真空炉内で行う必要がある。 When manufacturing electronic components such as diodes, transistors, thyristors or bridges, it is necessary to solder a chip between the top sheet and the bottom sheet, a process called lamination. The specific work process of laminating is as follows. First, the solder paste is applied to the upper side of the bottom sheet, the chip is placed at a specific position on the bottom sheet, and then the top sheet to which the solder paste is applied to the lower side is stacked on the upper side of the bottom sheet, and then the welding metal is further applied. The top cover of the mold is put on the bottom plate of the welding mold, and finally, the welding mold is sent into the welding furnace for welding. Sheet welding must be done in a vacuum furnace.

出願番号201420820418.2の中国実用新案特許は、連続型の真空溶接炉を開示し、使用過程において以下のような技術的課題がある。 The Chinese utility model patent of application number 201420820418.2 discloses a continuous vacuum welding furnace and has the following technical problems in the process of use.

(1)その機械テーブルに真空処理装置に連係する加熱領域が1つのみが設置され、半田ペーストを融解させて溶接効果を奏するためにシートを一定の温度に加熱する必要があり、シートの昇温は、移動の時間を必要とするため、加熱時間が長くなる。また、その加熱領域は、トップカバーに設置され、放射によってシートを加熱するため、伝熱効率が低く、さらにシートの加熱時間を長くし、その溶接効率を低下させてしまう。 (1) Only one heating region linked to the vacuum processing device is installed on the machine table, and it is necessary to heat the sheet to a constant temperature in order to melt the solder paste and exert a welding effect, and the sheet rises. Since the temperature requires a moving time, the heating time becomes long. Further, since the heating region is installed on the top cover and heats the sheet by radiation, the heat transfer efficiency is low, the heating time of the sheet is lengthened, and the welding efficiency is lowered.

(2)溶接後のシートの温度が高すぎ、冷却速度が遅く、真空処理装置から搬出されたシートは、酸化されやすい。また、機械テーブルから搬出されたシートの温度は依然として高すぎるため、作業者がシートを直接処理することができない。 (2) The temperature of the sheet after welding is too high, the cooling rate is slow, and the sheet carried out from the vacuum processing apparatus is easily oxidized. Also, the temperature of the sheet carried out of the machine table is still too high for the operator to process the sheet directly.

(3)伝動機構はシートを搬送する際にシートの両端でシートを支持するが、加熱されたシートが軟らかく、両端でシートを支持する際にシートが変形し伝動機構から離脱しやすいという問題があり、動作が不安定であった。 (3) The transmission mechanism supports the sheet at both ends of the sheet when the sheet is conveyed, but the heated sheet is soft, and when the sheet is supported at both ends, the sheet is deformed and easily detached from the transmission mechanism. Yes, the operation was unstable.

本発明が解決しようとする技術的問題は、従来技術の問題点を解決し、シートを段階的に加熱し、溶接速度が速く、且つシートの酸化を回避する真空溶接炉の溶接機構を提供することである。 The technical problem to be solved by the present invention provides a welding mechanism of a vacuum welding furnace that solves the problems of the prior art, heats the sheet stepwise, has a high welding speed, and avoids oxidation of the sheet. That is.

本発明がその技術的課題を解決するために用いる技術的解決手段としての真空溶接炉の溶接機構は、溶接室と、溶接室の上側の炉蓋とを含み、炉蓋と溶接室との間に溶接チャンバが設置され、溶接室の下部に溶接台が設けられ、溶接台の供給端に近接する側は、加熱領域であり、溶接台の排出端に近接する側は、冷却領域であり、負圧吸引モジュールは、加熱領域の冷却領域に近接する一端の上側に設置され、炉蓋に昇降可能に取付けされ、負圧吸引モジュールの底部と加熱領域とが囲み密閉した負圧チャンバを形成し、溶接室または炉蓋にシールドガス導入管が設置されることを特徴とする。 The welding mechanism of a vacuum welding furnace as a technical solution used by the present invention to solve the technical problem includes a welding chamber and a furnace lid on the upper side of the welding chamber, and is between the furnace lid and the welding chamber. A welding chamber is installed in the welding chamber, a welding table is provided at the bottom of the welding chamber, the side close to the supply end of the welding table is the heating region, and the side close to the discharge end of the welding table is the cooling region. The negative pressure suction module is installed on the upper side of one end close to the cooling region of the heating region, and is mounted on the furnace lid so as to be able to move up and down, and the bottom of the negative pressure suction module and the heating region are surrounded to form a sealed negative pressure chamber. It is characterized in that a shield gas introduction pipe is installed in a welding chamber or a furnace lid.

好ましくは、前記溶接台は、複数の加熱板と複数の冷却板とを含み、加熱領域は、複数の加熱板をつなぎ合わせて形成され、冷却領域は、複数の冷却板をつなぎ合わせて形成される。 Preferably, the welding table includes a plurality of heating plates and a plurality of cooling plates, a heating region is formed by connecting the plurality of heating plates, and a cooling region is formed by connecting the plurality of cooling plates. To.

好ましくは、各々の加熱板の両側のいずれにも電気加熱管が対称に設置され、加熱板の中央部にセンサ取付け穴が設置され、センサ取付け穴が2つの電気加熱管の間に設置された止まり穴であり、センサ取り付け穴に温度センサが取り付けられる。 Preferably, electric heating tubes are symmetrically installed on either side of each heating plate, a sensor mounting hole is installed in the center of the heating plate, and a sensor mounting hole is installed between the two electric heating tubes. It is a blind hole, and the temperature sensor is mounted in the sensor mounting hole.

好ましくは、前記冷却板の両側に給水通路が対称に設置され、前記冷却板の少なくとも一端に2つの給水通路に連通する排水通路が設置される。 Preferably, water supply passages are symmetrically installed on both sides of the cooling plate, and drainage passages communicating with the two water supply passages are installed at at least one end of the cooling plate.

好ましくは、前記溶接室の下側に貯液カバーが設置され、貯液カバーの底部の両側は、側部から中央部に徐々に下への傾斜状であり、貯液カバー底部に貯液カバー排出管が設けられる。 Preferably, the liquid storage cover is installed on the lower side of the welding chamber, and both sides of the bottom of the liquid storage cover are gradually inclined downward from the side to the center, and the liquid storage cover is on the bottom of the liquid storage cover. A discharge pipe is provided.

好ましくは、前記シールドガス導入管は、主窒素ガス導入管であり、炉蓋の両端のいずれにも主窒素ガス導入管が設置され、炉蓋の中央部の両側に副窒素ガス導入管が対称に設置され、副窒素ガス導入管が溶接室に連通される。 Preferably, the shield gas introduction pipe is a main nitrogen gas introduction pipe, a main nitrogen gas introduction pipe is installed at both ends of the furnace lid, and secondary nitrogen gas introduction pipes are symmetrical on both sides of the central portion of the furnace lid. The secondary nitrogen gas introduction pipe is connected to the welding chamber.

好ましくは、前記炉蓋の下部の両側に吸気板が対称に設置され、吸気板の上部に上側へ開口する吸気口が設けられ、炉蓋と囲み吸気チャンバを形成し、吸気板に吸気口と溶接室とを連通させる複数の噴気孔が間隔をおいて設置され、副窒素ガス導入管は、吸気口に連通される。 Preferably, the intake plates are symmetrically installed on both sides of the lower portion of the furnace lid, an intake port that opens upward is provided on the upper portion of the intake plate, a surrounding intake chamber is formed with the furnace lid, and the intake plate has an intake port. A plurality of air jet holes communicating with the welding chamber are installed at intervals, and the auxiliary nitrogen gas introduction pipe is communicated with the intake port.

好ましくは、前記負圧吸引モジュールは、密封板と負圧吸引昇降シリンダとを含み、密封板は、加熱領域の上側に設置され、加熱領域と平行に設置され、密封板の底部と加熱領域とが密閉の負圧チャンバを形成し、負圧チャンバに負圧吸引管が連結される。 Preferably, the negative pressure suction module includes a sealing plate and a negative pressure suction elevating cylinder, the sealing plate being installed above the heating region and parallel to the heating region, with the bottom of the sealing plate and the heating region. Form a closed negative pressure chamber, and a negative pressure suction tube is connected to the negative pressure chamber.

好ましくは、前記密封板は、炉蓋の下側に設置され、負圧吸引昇降シリンダが炉蓋の上側に設置され、負圧吸引昇降シリンダのピストンロッドが連結管を介して密封板に連結され、連結管が負圧チャンバと負圧吸引管とを連通させる。 Preferably, the sealing plate is installed on the lower side of the furnace lid, the negative pressure suction elevating cylinder is installed on the upper side of the furnace lid, and the piston rod of the negative pressure suction elevating cylinder is connected to the sealing plate via a connecting pipe. , The connecting pipe communicates the negative pressure chamber and the negative pressure suction pipe.

好ましくは、浄化モジュールをさらに含み、浄化モジュールの吸気端と排気端とのいずれも溶接室と連通する。 Preferably, a purification module is further included, and both the intake end and the exhaust end of the purification module communicate with the welding chamber.

好ましくは、前記浄化モジュールは、浄化箱と、浄化箱内に設置されたコイル及びストレーナとを含み、吸気端と排気端とが浄化箱の両側にそれぞれ設置され、ストレーナは、排気端に近接するように設置され、排気端を封止し、コイルに循環するクーラントが充填され、浄化箱の排気端と溶接室との間にファンが設置される。 Preferably, the purification module includes a purification box and a coil and a strainer installed in the purification box, the intake end and the exhaust end are installed on both sides of the purification box, respectively, and the strainer is close to the exhaust end. The exhaust end is sealed, the coil is filled with coolant, and a fan is installed between the exhaust end of the septic box and the welding chamber.

好ましくは、上記の浄化モジュールは、浄化箱内に設置されたフィンをさらに含む。 Preferably, the purification module further comprises fins installed in a purification box.

従来技術に比べると、本発明の有益な効果は以下のとおりである。 Compared with the prior art, the beneficial effects of the present invention are as follows.

1、本真空溶接炉の溶接機構の加熱領域はシートを加熱することができるため、シートの溶接を負圧チャンバ内で速やかに完成できる。溶接室内にシールドガスが充填されているため、加熱過程においてシートが酸素と反応することを回避することができる。冷却領域は、シートを冷却することができるため、溶接室から搬出されるシートの温度を低減し、シートの酸化を回避するだけでなく、溶接されたシートを早急に処理するのに適する。シートは、加熱領域又は冷却領域と直接接触し、熱伝導の方式により加熱及び冷却を実現し、放射を用いる加熱方式に比べて、加熱速度を大幅に向上させ、シートを迅速に昇温及び降温させることができ、エネルギーの消費を低減する。 1. Since the sheet can be heated in the heating region of the welding mechanism of this vacuum welding furnace, the welding of the sheet can be completed quickly in the negative pressure chamber. Since the welding chamber is filled with the shield gas, it is possible to prevent the sheet from reacting with oxygen during the heating process. Since the cooling region can cool the sheet, it is suitable not only for reducing the temperature of the sheet carried out from the welding chamber and avoiding oxidation of the sheet, but also for promptly processing the welded sheet. The sheet is in direct contact with the heating or cooling area and realizes heating and cooling by a heat conduction method, which greatly improves the heating rate compared to the heating method using radiation, and quickly raises and lowers the temperature of the sheet. Can be made to reduce energy consumption.

2、加熱領域は、複数の加熱板をつなぎ合わせて形成され、冷却領域は、複数の冷却板をつなぎ合わせて形成され、それにより溶接室内に複数のシートを同時に収容することができ、加熱領域が同時に複数のシートを加熱し、シートを迅速に溶接温度に達するようなことを可能にし、溶接速度を向上させる。 2. The heating region is formed by connecting a plurality of heating plates, and the cooling region is formed by connecting a plurality of cooling plates, whereby a plurality of sheets can be simultaneously accommodated in the welding chamber, and the heating region can be accommodated. Heats multiple sheets at the same time, allowing the sheets to reach the welding temperature quickly and improve the welding speed.

3、各加熱板のいずれにも電気加熱管及び温度センサが設置されるため、各加熱板は、独立した温度制御を実現する。それによりシートの搬送過程において徐々にシートを加熱することができ、加熱が速すぎるためシートが変形することを回避し、さらに加熱が速すぎて半田ペーストが融解して流出することにより、不良品が発生することを回避する。 3. Since an electric heating tube and a temperature sensor are installed on each of the heating plates, each heating plate realizes independent temperature control. As a result, the sheet can be gradually heated in the process of transporting the sheet, the sheet is prevented from being deformed because the heating is too fast, and the solder paste is melted and flows out due to the heating too fast, resulting in a defective product. To avoid the occurrence of.

4、冷却板のいずれにも給水通路と排水通路とが設置され、徐々にシートを降温させることを実現し、降温が速すぎるため凝固後の半田ペーストに亀裂が発生し、チップとシートとの接触が不良となり、不良品が発生することを回避し、シートの変形も回避できる。 4. A water supply passage and a drainage passage are installed in each of the cooling plates to gradually lower the temperature of the sheet. Since the temperature is lowered too quickly, cracks occur in the solder paste after solidification, and the chip and the sheet It is possible to avoid poor contact and the occurrence of defective products, and to avoid deformation of the sheet.

5、貯液カバーは、貯液カバー排出管を介して冷却領域において凝集し形成された液体を排出することができる。 5. The liquid storage cover can discharge the liquid aggregated and formed in the cooling region via the liquid storage cover discharge pipe.

6、炉蓋の両端に主窒素ガス導入管が設けられ、炉蓋の中央部の両側に副窒素ガス導入管が対称に設けられることにより、窒素ガスを迅速に溶接室に充填し、溶接前の準備時間を短くし、使い勝手をよくすることを保証することができる。 6. Main nitrogen gas introduction pipes are provided at both ends of the furnace lid, and secondary nitrogen gas introduction pipes are provided symmetrically on both sides of the central part of the furnace lid, so that nitrogen gas is quickly filled in the welding chamber and before welding. It can be guaranteed that the preparation time for the gas will be shortened and the usability will be improved.

7、副窒素ガス導入管は、吸気板によって窒素ガスを溶接室内に均一に噴入し、それにより溶接室内の空気を完全に排出することができ、加熱後のシートが酸素と反応することを回避する。 7. The sub-nitrogen gas introduction pipe uniformly injects nitrogen gas into the welding chamber by the intake plate, so that the air in the welding chamber can be completely discharged, and the heated sheet reacts with oxygen. To avoid.

8、密封板と加熱領域とが囲み負圧チャンバを形成し、負圧吸引昇降シリンダが密封板を昇降させるように駆動することができるため、シートの負圧チャンバへの搬入又は負圧チャンバからの搬出をしやすくする。 8. Since the sealing plate and the heating region surround the negative pressure chamber to form a negative pressure chamber and the negative pressure suction elevating cylinder can be driven to raise and lower the sealing plate, the sheet can be carried into the negative pressure chamber or from the negative pressure chamber. Make it easier to carry out.

9、負圧吸引昇降シリンダが連結管を介して密封板に連結され、密封板を昇降させるように駆動し、負圧吸引管が連結管を介して負圧チャンバと連通し、密封板の取り付け及び連結をしやすくするだけでなく、負圧チャンバの負圧吸引をしやすくする。 9. The negative pressure suction elevating cylinder is connected to the sealing plate via a connecting pipe and is driven to raise and lower the sealing plate, and the negative pressure suction pipe communicates with the negative pressure chamber via the connecting pipe to attach the sealing plate. And not only facilitates connection, but also facilitates negative pressure suction in the negative pressure chamber.

10、浄化モジュールは、溶接室内のシールドガスを抽出し、シールドガス内のフラックスヒュームを除去することができ、半田ペーストが加熱されて過剰なフラックスヒュームが発生するため、シートの溶接に影響を与えることを回避する。 10. The purification module can extract the shield gas in the welding chamber and remove the flux fume in the shield gas, and the solder paste is heated to generate excess flux fume, which affects the welding of the sheet. Avoid that.

11、コイルは、クーラントを介して抽出されたシールドガスと熱交換を行い、シールドガスの温度を低減し、フラックスを液化させ、続いてストレーナを介してシールドガスを濾過することにより、フラックスをストレーナに残す。それによりフラックスとシールドガスとの分離を実現する。 11. The coil exchanges heat with the shield gas extracted through the coolant, reduces the temperature of the shield gas, liquefies the flux, and then filters the shield gas through the strainer to strain the flux. Leave in. As a result, the flux and the shield gas are separated.

12、フィンは、クーラントとシールドガスとの熱交換面積を増加させることにより、シールドガスを迅速に降温させることができ、それによりシールドガス内のフラックスをより徹底的に除去することができる。 12. The fins can quickly lower the temperature of the shield gas by increasing the heat exchange area between the coolant and the shield gas, whereby the flux in the shield gas can be removed more thoroughly.

炉蓋を取り外した後の真空溶接炉の斜視模式図である。It is a perspective schematic view of a vacuum welding furnace after removing a furnace lid.

図1におけるA部の部分拡大図である。It is a partially enlarged view of the part A in FIG.

電動プッシュロッドの取付模式図である。It is a mounting schematic diagram of an electric push rod.

溶接台の斜視模式図である。It is a perspective view schematic diagram of a welding table.

溶接台の右側面模式図である。It is a schematic view of the right side surface of a welding table.

加熱板の平面断面模式図である。It is a schematic plan sectional view of a heating plate.

冷却板の平面断面模式図である。It is a schematic plan sectional view of a cooling plate.

溶接室取付部材の正面断面模式図である。It is a front sectional schematic diagram of the welding chamber mounting member.

取付ピンの正面断面模式図である。It is a front sectional schematic diagram of a mounting pin.

炉蓋の斜視模式図である。It is a perspective schematic view of a furnace lid.

炉蓋の正面断面模式図である。It is a front sectional schematic diagram of the furnace lid.

図11におけるB部の部分拡大図である。It is a partially enlarged view of the part B in FIG.

吸気板の正面断面模式図である。It is a front sectional schematic diagram of the intake plate.

負圧吸引モジュールの正面模式図である。It is a front schematic diagram of a negative pressure suction module.

真空溶接炉の斜視模式図である。It is a perspective schematic diagram of a vacuum welding furnace.

搬送機構を示す斜視模式図である。It is a perspective schematic diagram which shows the transport mechanism.

搬送機構の正面模式図である。It is a front schematic diagram of a transport mechanism.

フラックス浄化モジュールの斜視模式図である。It is a perspective schematic diagram of a flux purification module.

浄化モジュールの正面断面模式図である。It is a front sectional schematic diagram of a purification module.

1:ラック、2:搬送機構、3:炉蓋シリンダ、4:炉蓋、5:主窒素ガス導入管、6:案内カバー、7:浄化導入管、8:浄化排気管、9:負圧吸引モジュール、10:接続アーム、11:スイングアーム、12:取付アーム、13:接続棒、14:炉蓋取付板、1401:取付口、15:ガスカバー、16:副窒素ガス導入管、17:吸気板、1701:吸気口、1702:噴気孔、18:溶接室、19:排出台、1901:排出台退避口、20:溶接台、21:供給台、2101:供給台退避口、22:取付板、23:調節バネ、24:搬送バー、25:密封カバー、26:エンドカバー、2601:搬送口、2602:バッフル板取付溝、27:バッフル板、28:冷却板、2801:冷却板退避口、2802:給水通路、2803:排水通路、2804:冷却板取付孔、29:給水管、30:加熱板、3001:加熱板退避口、3002:電気加熱管取付孔、3003:センサ取付孔、3004:加熱板取付孔、31:電気加熱管、32:温度センサ、33:貯液カバー、3301:貯液カバー排出管、34:負圧吸引取付枠、35:負圧吸引昇降シリンダ、36:密封板、37:連結管、38:連結板、39:取付ピン、3901:ねじ孔、40:溶接室取付部材、4001:固定部、4002:段付孔、41:並進板、42:開閉取付棒、43:開閉案内板、44:開閉案内輪、45:搬送取付アーム、46:搬送昇降シリンダ、47:昇降案内枠、48:昇降案内ブロック、49:並進枠、50:並進枠ガイドレール、51:並進板ガイドレール、52:搬送取付板、53:並進モータ、54:並進モータ取付枠、55:搬送移動枠、56:開閉移動枠、57:開閉モータ取付枠、58:開閉モータ、59:浄化モジュール、60:給油箱、61:浄化箱、62:浄化箱導入管、63:ストレーナ取付箱、64:ストレーナ、65:ファン、66:フラックス回収バレル、67:コイル、68:フィン、69:電動プッシュロッド 1: Rack, 2: Conveyance mechanism, 3: Furnace lid cylinder, 4: Furnace lid, 5: Main nitrogen gas introduction pipe, 6: Guide cover, 7: Purification introduction pipe, 8: Purification exhaust pipe, 9: Negative pressure suction Module, 10: Connection arm, 11: Swing arm, 12: Mounting arm, 13: Connection rod, 14: Furnace lid mounting plate, 1401: Mounting port, 15: Gas cover, 16: Secondary nitrogen gas introduction pipe, 17: Intake Plate, 1701: Intake port, 1702: Vase hole, 18: Welding chamber, 19: Discharge stand, 1901: Discharge stand evacuation port, 20: Welding table, 21: Supply stand, 2101: Supply stand evacuation port, 22: Mounting plate , 23: Adjustable spring, 24: Conveying bar, 25: Sealing cover, 26: End cover, 2601: Conveying port, 2602: Baffle plate mounting groove, 27: Baffle plate, 28: Cooling plate, 2801: Cooling plate evacuation port, 2802: Water supply passage, 2803: Drainage passage, 2804: Cooling plate mounting hole, 29: Water supply pipe, 30: Heating plate, 3001: Heating plate evacuation port, 3002: Electric heating pipe mounting hole, 3003: Sensor mounting hole, 3004: Heating plate mounting hole, 31: Electric heating pipe, 32: Temperature sensor, 33: Liquid storage cover, 3301: Liquid storage cover discharge pipe, 34: Negative pressure suction mounting frame, 35: Negative pressure suction lifting cylinder, 36: Sealing plate , 37: Connecting pipe, 38: Connecting plate, 39: Mounting pin, 3901: Screw hole, 40: Welding chamber mounting member, 4001: Fixed part, 4002: Stepped hole, 41: Translation plate, 42: Open / close mounting rod, 43: Open / close guide plate, 44: Open / close guide wheel, 45: Transport mounting arm, 46: Transport lift cylinder, 47: Lift guide frame, 48: Lift guide block, 49: Translation frame, 50: Translation frame guide rail, 51: Translation plate guide rail, 52: Transfer mounting plate, 53: Translation motor, 54: Translation motor mounting frame, 55: Transfer movement frame, 56: Open / close movement frame, 57: Open / close motor mounting frame, 58: Open / close motor, 59: Purification Module, 60: Refueling box, 61: Purification box, 62: Purification box introduction pipe, 63: Strainer mounting box, 64: Strainer, 65: Fan, 66: Flux recovery barrel, 67: Coil, 68: Fin, 69: Electric Push rod

図1〜図19は本発明の最適な実施例であり、以下、図面1〜19に合わせて本発明をさらに説明する。 1 to 19 are optimal examples of the present invention, and the present invention will be further described below with reference to FIGS. 1 to 19.

真空溶接炉の溶接機構において、溶接室18と、その上部に炉蓋4とを含み、炉蓋4と溶接室18との間に溶接チャンバが設置され、溶接室18の下部に溶接台20が設けられ、溶接台20の供給端に近接する側は、加熱領域であり、溶接台20の排出端に近接する側は、冷却領域であり、負圧吸引モジュール9は、加熱領域の冷却領域に近接する一端の上側に設置され、炉蓋4に昇降自在に取付けされ、負圧吸引モジュール9の底部と加熱領域とが囲み密閉した負圧チャンバを形成し、溶接室18または炉蓋4にシールドガス導入管が設置されることを特徴とする。本真空溶接炉の溶接機構の加熱領域は、シートを加熱することができるため、シートの溶接を負圧チャンバ内で速やかに完成できる。溶接室内18にシールドガスが充填されているため、加熱過程においてシートが酸素と反応することを回避することができる。冷却領域は、シートを冷却することができるため、溶接室18から搬出されるシートの温度を低減し、シートの酸化を回避するだけでなく、溶接されたシートを早急に処理するのに適する。シートは、加熱領域又は冷却領域と直接接触し、熱伝導の方式により加熱及び冷却を実現し、放射を用いる加熱方式に比べて、加熱速度を大幅に向上させ、シートを迅速に昇温及び降温させることができ、エネルギーの消費を低減する。 In the welding mechanism of a vacuum welding furnace, a welding chamber 18 and a furnace lid 4 are included above the welding chamber 18, a welding chamber is installed between the furnace lid 4 and the welding chamber 18, and a welding table 20 is provided below the welding chamber 18. The side close to the supply end of the welding table 20 is the heating region, the side close to the discharge end of the welding table 20 is the cooling region, and the negative pressure suction module 9 is in the cooling region of the heating region. It is installed on the upper side of one end close to each other, and is vertically attached to the furnace lid 4, forming a closed negative pressure chamber surrounded by the bottom of the negative pressure suction module 9 and the heating region, and shielded in the welding chamber 18 or the furnace lid 4. It is characterized in that a gas introduction pipe is installed. Since the heating region of the welding mechanism of the vacuum welding furnace can heat the sheet, welding of the sheet can be completed quickly in the negative pressure chamber. Since the welding chamber 18 is filled with the shield gas, it is possible to prevent the sheet from reacting with oxygen during the heating process. Since the cooling region can cool the sheet, it is suitable not only for reducing the temperature of the sheet carried out from the welding chamber 18 and avoiding oxidation of the sheet, but also for processing the welded sheet immediately. The sheet is in direct contact with the heating or cooling area and realizes heating and cooling by a heat conduction method, which greatly improves the heating rate compared to the heating method using radiation, and quickly raises and lowers the temperature of the sheet. Can be made to reduce energy consumption.

以下、具体的な実施例に合わせて本発明をさらに説明するが、当業者であれば、ここで図面に合わせた詳細な説明はより良く解釈するためのものであり、本発明の構造は必ずこれらの限られた実施例の範囲を超えるものであり、一部の同等の代替手段又は一般的な手段について本明細書はその説明を省略するが、依然として本発明の保護範囲に属することを理解すべきである。 Hereinafter, the present invention will be further described with reference to specific examples, but those skilled in the art will appreciate the detailed description according to the drawings here, and the structure of the present invention must be. It is understood that beyond the scope of these limited embodiments, some equivalent alternative or general means are omitted herein by reference but still fall within the scope of the invention. Should.

実施例1 Example 1

図1〜2に示すように、溶接室18の下側に搬送機構2が設けられ、溶接室18はラック1の上側に設けられる。搬送機構2は、搬送バー24と、溶接室18の下側に設置された昇降機構、並進機構及び開閉機構とを含み、搬送バー24の中央部は、溶接室18内に設置され、溶接室18の両端は、エンドカバー26によって封止され、且つ各エンドカバー26の両側のいずれにも搬送口2601が設置され、搬送バー24は、溶接室18の長手方向に沿って水平に設置され、且つ2本の搬送バー24は、溶接室18の両側に対称に設置され、各搬送バー24の両端は、いずれもエンドカバー26の搬送口2601を通過し伸出する。溶接室18の下側に搬送取付アーム45が水平に設置され、搬送取付アーム45は、搬送バー24と1対1対応し、対応側の搬送バー24の下側に設置され、各搬送バー24の両端のいずれも取付板22によって対応側の搬送取付アーム45に連結され、取付板22の上端は、搬送バー24に連結され、取付板22の下端は、搬送取付アーム45に連結され、昇降機構は、ラック1に取り付けられ、並進機構は、昇降機構に取り付けられ、開閉機構は、並進機構に取り付けられ、且つ開閉機構は、同時に2本の搬送バー24に連結され、それにより2本の搬送バー24の開閉、昇降及び並進動作を実現し、シートを搬送しやすくする。 As shown in FIGS. 1 and 2, the transport mechanism 2 is provided on the lower side of the welding chamber 18, and the welding chamber 18 is provided on the upper side of the rack 1. The transport mechanism 2 includes a transport bar 24 and an elevating mechanism, a translation mechanism, and an opening / closing mechanism installed under the welding chamber 18, and the central portion of the transport bar 24 is installed in the welding chamber 18 and is installed in the welding chamber. Both ends of 18 are sealed by end covers 26, and transport ports 2601 are installed on both sides of each end cover 26, and the transport bars 24 are installed horizontally along the longitudinal direction of the welding chamber 18. Further, the two transfer bars 24 are symmetrically installed on both sides of the welding chamber 18, and both ends of each transfer bar 24 pass through the transfer port 2601 of the end cover 26 and extend. The transport mounting arm 45 is horizontally installed on the lower side of the welding chamber 18, and the transport mounting arm 45 has a one-to-one correspondence with the transport bar 24 and is installed on the lower side of the corresponding transport bar 24. Both ends of the mounting plate 22 are connected to the corresponding transport mounting arm 45 by the mounting plate 22, the upper end of the mounting plate 22 is connected to the transport bar 24, and the lower end of the mounting plate 22 is connected to the transport mounting arm 45 to move up and down. The mechanism is attached to the rack 1, the translation mechanism is attached to the elevating mechanism, the opening / closing mechanism is attached to the translation mechanism, and the opening / closing mechanism is simultaneously connected to two transport bars 24, whereby two The transfer bar 24 can be opened / closed, raised / lowered, and translated to facilitate the transfer of the sheet.

各搬送バー24の一端と取付板22との間に調節バネ23が設置され、調節バネ23は、搬送バー24に外嵌され、搬送バー24の調節バネ23に近接する一端は、取付板22に摺動するように連結され、調節バネ23は、取付板22の外側に設置され、調節バネ23の一端は、取付板22に支持され、他端は、搬送バー24の端部に支持され、それにより軸方向において搬送バー24の位置を調節しやすくなる。調節バネ23は、さらに緩衝作用を果たし、搬送過程に発生する衝撃荷重によってシートを落下させることを回避する。 An adjusting spring 23 is installed between one end of each transport bar 24 and the mounting plate 22, the adjusting spring 23 is fitted onto the transport bar 24, and one end of the transport bar 24 close to the adjusting spring 23 is the mounting plate 22. The adjusting spring 23 is installed outside the mounting plate 22, one end of the adjusting spring 23 is supported by the mounting plate 22, and the other end is supported by the end of the transport bar 24. This makes it easier to adjust the position of the transport bar 24 in the axial direction. The adjusting spring 23 further acts as a buffer to prevent the seat from dropping due to the impact load generated during the transport process.

溶接室18の両端のエンドカバー26の下側と溶接台20の上側は、間隔をおいて設置され、それにより溶接室18の両端に供給端と排出端とを形成し、且つ加熱領域に近接する一端は、溶接室18の供給端であり、冷却領域に近接する一端は、溶接室18の排出端である。各エンドカバー26の両端のいずれにも垂直のバッフル板取付溝2602が設置され、バッフル板取付溝2602内にバッフル板27が摺動するように取り付けられ、バッフル板27は、搬送バー24に摺動するように連結され、且つバッフル板27と搬送バー24との間は密閉するように設置され、バッフル板27は、搬送口2601を封止し、それにより搬送バー24がシートを搬送する過程においてバッフル板27は搬送バー24とともにエンドカバー26の位置する平面内で移動し、バッフル板27に常に搬送口2601を封止させることができ、窒素ガスの漏洩を回避し、さらに搬送口2601の大きさに対する制限を解除し、さらに搬送バー24の移動軌跡を設置しやすくすることができる。バッフル板27は、さらにエンドカバー26と溶接台20との間の隙間、即ち供給端又は排出端を封止し、搬送バー24がシートを持ち上げる時に供給端又は排出端を開放することができ、シートの溶接室18への搬入又は溶接室18からの搬出に便利であり、窒素ガスの漏洩を回避する。各搬送バー24の両端のいずれにも密封カバー25が取り付けられ、各搬送バー24は密封カバー25によってバッフル板27に摺動且つ密閉するように連結される。 The lower side of the end cover 26 at both ends of the welding chamber 18 and the upper side of the welding table 20 are installed at intervals, thereby forming supply ends and discharge ends at both ends of the welding chamber 18 and close to the heating region. One end is the supply end of the welding chamber 18, and one end close to the cooling region is the discharge end of the welding chamber 18. Vertical baffle plate mounting grooves 2602 are installed at both ends of each end cover 26, and the baffle plate 27 is mounted so as to slide in the baffle plate mounting groove 2602, and the baffle plate 27 slides on the transport bar 24. A process in which the baffle plate 27 and the transfer bar 24 are connected so as to move and are installed so as to be hermetically sealed, and the baffle plate 27 seals the transfer port 2601, whereby the transfer bar 24 transfers the sheet. In, the baffle plate 27 moves together with the transport bar 24 in the plane where the end cover 26 is located, and the baffle plate 27 can always seal the transport port 2601, avoiding the leakage of nitrogen gas, and further, the transport port 2601. The restriction on the size can be lifted, and the movement locus of the transport bar 24 can be easily installed. The baffle plate 27 further seals the gap between the end cover 26 and the welding table 20, that is, the supply end or the discharge end, and the supply end or the discharge end can be opened when the transport bar 24 lifts the sheet. It is convenient for carrying the sheet into or out of the welding chamber 18, and avoids leakage of nitrogen gas. Sealing covers 25 are attached to both ends of each transport bar 24, and each transport bar 24 is connected to the baffle plate 27 by the sealing cover 25 so as to slide and seal.

図3に示すように、各ステーションの両側の搬送バー24に、搬送バー24の内側に設置された複数の保持部が設けられており、且つ各保持部と搬送バー24との間に、シリンダ又は電動プッシュロッド69、本実施形態では電動プッシュロッド69である伸縮モジュールが設置される。電動プッシュロッド69のピストンロッドは、支持部取付ロッドを介して支持部に連結され、支持部をシートの中央付近まで伸出させ、シートを持ち上げる際の安定化を図っている。電動プッシュロッド69は、水平に設置され、支持部は、電動プッシュロッド69の伸縮部の下側に取付けされ、各ステーションの両側の支持部がステーションの中央部に向けて設置される。 As shown in FIG. 3, a plurality of holding portions installed inside the transport bar 24 are provided on the transport bars 24 on both sides of each station, and a cylinder is provided between each holding portion and the transport bar 24. Alternatively, an electric push rod 69, or a telescopic module which is an electric push rod 69 in this embodiment, is installed. The piston rod of the electric push rod 69 is connected to the support portion via the support portion mounting rod, and the support portion is extended to the vicinity of the center of the seat to stabilize the seat when it is lifted. The electric push rod 69 is installed horizontally, the support portion is attached to the lower side of the telescopic portion of the electric push rod 69, and the support portions on both sides of each station are installed toward the central portion of the station.

図4に示すように、溶接台20は、複数の加熱板30と複数の冷却板28とを含み、複数の加熱板30は、溶接室18の長手方向に沿って順に設置され、加熱領域を形成し、複数の冷却板28は、溶接室18の長手方向に沿って順に設置され、冷却領域を形成し、且つ冷却領域は、排出端に近接するように設置される。各加熱板30と各冷却板28とのいずれも1つのステーションとなる。負圧吸引モジュール9は、冷却領域に近接する一端の加熱板30の上側に設置される。 As shown in FIG. 4, the welding table 20 includes a plurality of heating plates 30 and a plurality of cooling plates 28, and the plurality of heating plates 30 are sequentially installed along the longitudinal direction of the welding chamber 18 to form a heating region. The plurality of cooling plates 28 are formed in order along the longitudinal direction of the welding chamber 18, forming a cooling region, and the cooling region is installed so as to be close to the discharge end. Each of the heating plate 30 and each cooling plate 28 becomes one station. The negative pressure suction module 9 is installed on the upper side of the heating plate 30 at one end close to the cooling region.

各加熱板30の両側に加熱板退避口3001が対称に設置され、各冷却板28の両端に冷却板退避口2801が対称に設置され、支持部は、加熱板退避口3001又は冷却板退避口2801内に伸び、加熱板30又は冷却板28に水平に置かれたシートを持ち上げ、シート全体を冷却板28又は加熱板30に載置させることができ、シートが加熱され柔らかくなり、両端が変形することを回避し、負圧吸引モジュール9と加熱板30とを密閉しやすくする。 Heating plate evacuation ports 3001 are symmetrically installed on both sides of each heating plate 30, cooling plate evacuation ports 2801 are symmetrically installed at both ends of each cooling plate 28, and the support portion is the heating plate evacuation port 3001 or the cooling plate evacuation port. A sheet extending into 2801 and horizontally placed on the heating plate 30 or the cooling plate 28 can be lifted and the entire sheet can be placed on the cooling plate 28 or the heating plate 30, and the sheet is heated and softened, and both ends are deformed. This makes it easier to seal the negative pressure suction module 9 and the heating plate 30.

各加熱板30の両側のいずれにも電気加熱管31が対称に取り付けられ、2つの電気加熱管31の間の加熱板30に温度センサ32が設置され、それにより各加熱板30に対する独立した制御を実現し、加熱板30の排出端に近接する方向に沿い温度を徐々に増加させ、徐々にシートを加熱し、加熱が速すぎるため半田ペーストが滴下することを回避する。各冷却板28のいずれにも給水管29と排水管とが連結され、冷却板28は、冷却水によって冷却板28上のシートを降温し、且つ排出端に近接する方向に沿い、冷却板28の温度は徐々に低減し、それにより徐々にシートを降温し、降温が速すぎるため凝固した半田ペーストが亀裂することを回避する。 Electric heating tubes 31 are symmetrically attached to both sides of each heating plate 30, and a temperature sensor 32 is installed on the heating plate 30 between the two electric heating plates 31, thereby providing independent control over each heating plate 30. The temperature is gradually increased along the direction close to the discharge end of the heating plate 30 to gradually heat the sheet, and the heating is too fast to prevent the solder paste from dripping. A water supply pipe 29 and a drain pipe are connected to each of the cooling plates 28, and the cooling plate 28 lowers the temperature of the sheet on the cooling plate 28 by the cooling water and runs along the direction close to the discharge end. The temperature of the sheet is gradually reduced, thereby gradually lowering the temperature of the sheet, and the temperature is lowered too quickly to prevent the solidified solder paste from cracking.

溶接室18の供給端の外側に供給台21が設置され、供給台21の両端のいずれにも支持部に連係する供給台退避口2101が設置され、シートを供給台21に載置するだけで、搬送機構2は、シートを溶接室18内の溶接台20に搬送することができる。溶接室18の排出端に排出台19が設置され、排出台19の両端のいずれにも支持部に連係する排出台退避口1901が設置され、搬送機構2は、冷却後のシートを排出台19に搬送し、それにより本真空溶接炉の連続的な溶接を実現し、炉蓋4を開けることなく、排出と供給とを実現することができる。 A supply stand 21 is installed outside the supply end of the welding chamber 18, and a supply stand evacuation port 2101 linked to a support portion is installed at both ends of the supply stand 21, and the sheet is simply placed on the supply stand 21. , The transport mechanism 2 can transport the sheet to the welding table 20 in the welding chamber 18. A discharge stand 19 is installed at the discharge end of the welding chamber 18, and a discharge stand evacuation port 1901 linked to a support portion is installed at both ends of the discharge stand 19, and the transport mechanism 2 discharges the cooled sheet to the discharge stand 19. This vacuum welding furnace can be continuously welded, and discharge and supply can be realized without opening the furnace lid 4.

図5に示すように、溶接室18の底部に貯液カバー33が設置され、貯液カバー33の両側は、側部から中央部へ徐々に下への傾斜状であり、且つ貯液カバー33の中央部の両端に貯液カバー排出管3301が対称に設置され、貯液カバー33は、冷却領域に液化して形成された水滴を収集し、溶接室18の外に排出することができ、溶接室18内にシートの溶接を妨げることを回避する。 As shown in FIG. 5, a liquid storage cover 33 is installed at the bottom of the welding chamber 18, and both sides of the liquid storage cover 33 are gradually inclined downward from the side to the center, and the liquid storage cover 33 is formed. Liquid storage cover discharge pipes 3301 are symmetrically installed at both ends of the central portion of the above, and the liquid storage cover 33 can collect water droplets formed by liquefaction in the cooling region and discharge them to the outside of the welding chamber 18. Avoid interfering with the welding of the sheet in the welding chamber 18.

図6に示すように、加熱板30は、長方形板であり、加熱板30の角部に加熱板取付孔3004が設置される。加熱板30の両側に電気加熱管取付孔3002が対称に設置され、電気加熱管取付孔3002は、水平に設置された貫通孔であり、各電気加熱管取付孔3002内のいずれにも電気加熱管31が取り付けられ、それにより均一に加熱することを保証することができる。加熱板30の中央部にさらに水平のセンサ取付孔3003が設置され、センサ取付孔3003は、電気加熱管取付孔3002と平行に設置された止まり穴であり、且つセンサ取付孔3003の長さは、加熱板30の長さの半分であり、温度センサ32は、センサ取付孔3003内に取り付けられ、それによりリアルタイムに加熱板30の温度を検出することができる。 As shown in FIG. 6, the heating plate 30 is a rectangular plate, and the heating plate mounting holes 3004 are installed at the corners of the heating plate 30. Electric heating pipe mounting holes 3002 are symmetrically installed on both sides of the heating plate 30, and the electric heating pipe mounting holes 3002 are through holes installed horizontally, and electric heating is performed in any of the electric heating pipe mounting holes 3002. A tube 31 is attached, which can ensure uniform heating. A horizontal sensor mounting hole 3003 is further installed in the central portion of the heating plate 30, and the sensor mounting hole 3003 is a blind hole installed in parallel with the electric heating pipe mounting hole 3002, and the length of the sensor mounting hole 3003 is , Half the length of the heating plate 30, and the temperature sensor 32 is mounted in the sensor mounting hole 3003, whereby the temperature of the heating plate 30 can be detected in real time.

図7に示すように、冷却板28は、長さと幅がそれぞれ加熱板30の長さと幅に等しい長方形板であり、冷却板28の角部に冷却板取付孔2804が設置され、冷却板28の両側に水平の給水通路2802が対称に設置され、給水通路2802は、冷却板28の長手方向に沿って設置され、且つ冷却板28の一端に水平の排水通路2803が設置され、排水通路2803は、2つの給水通路2802を連通し、それにより冷却板28全体の温度を均一にし、冷却効果に優れる。排水通路2803と給水通路2802との両端のいずれにも連結部が設置され、給水管29と排水管とを連結しやすくする。 As shown in FIG. 7, the cooling plate 28 is a rectangular plate whose length and width are equal to the length and width of the heating plate 30, respectively, and cooling plate mounting holes 2804 are installed at the corners of the cooling plate 28, and the cooling plate 28 is provided. Horizontal water supply passages 2802 are symmetrically installed on both sides of the cooling plate 28, the water supply passages 2802 are installed along the longitudinal direction of the cooling plate 28, and a horizontal drainage passage 2803 is installed at one end of the cooling plate 28. Communicates with two water supply passages 2802, thereby making the temperature of the entire cooling plate 28 uniform and excellent in cooling effect. Connecting portions are installed at both ends of the drainage passage 2803 and the water supply passage 2802 to facilitate the connection between the water supply pipe 29 and the drainage pipe.

図8〜図9に示すように、溶接室18は、ラック1の上側に設置され、溶接室取付部材40によってラック1に固定するように連結される。溶接室18の両側には、複数の溶接室取付部材40が対称に設置され、溶接室取付部材40の下側の両端に下へ突出した固定部4001が対称に設置され、固定部4001に貫通孔が設置され、溶接室取付部材40は、固定部4001の貫通孔内に設置されたボルトによってラック1に固定するように連結される。溶接室取付部材40の両端に段付孔4002が対称に設置され、段付孔4002の上部の直径は、下部の直径より大きく、各段付孔4002のいずれにも取付ピン39が取り付けられ、取付ピン39は、円筒状であり、且つ取付ピン39の下端にねじ孔3901が同軸設置され、ねじ孔3901は、取付ピン39に設置された止まり穴であり、取付ピン39の直径は、段付孔4002上部の直径に等しく、取付ピン39の下端は、段付孔4002の上部内に伸び、ボルトによって溶接室取付部材40に固定するように連結される。加熱板30の加熱板取付孔3004は、取付ピン39の上部に外嵌され、加熱板30の取付けを完了させ、冷却板28の冷却板取付孔2804は、取付ピン39の上部に外嵌され、冷却板28の取付けを完了させ、着脱しやすくなる。 As shown in FIGS. 8 to 9, the welding chamber 18 is installed on the upper side of the rack 1 and is connected by the welding chamber mounting member 40 so as to be fixed to the rack 1. A plurality of welding chamber mounting members 40 are symmetrically installed on both sides of the welding chamber 18, and fixing portions 4001 protruding downward are symmetrically installed at both lower ends of the welding chamber mounting member 40 and penetrate the fixing portions 4001. A hole is installed, and the welding chamber mounting member 40 is connected so as to be fixed to the rack 1 by a bolt installed in the through hole of the fixing portion 4001. Stepped holes 4002 are symmetrically installed at both ends of the welding chamber mounting member 40, the diameter of the upper part of the stepped hole 4002 is larger than the diameter of the lower part, and the mounting pin 39 is attached to any of the stepped holes 4002. The mounting pin 39 has a cylindrical shape, and a screw hole 3901 is coaxially installed at the lower end of the mounting pin 39. The screw hole 3901 is a blind hole installed in the mounting pin 39, and the diameter of the mounting pin 39 is a step. Equal to the diameter of the upper part of the hole 4002, the lower end of the mounting pin 39 extends into the upper part of the stepped hole 4002 and is connected by bolts so as to be fixed to the welding chamber mounting member 40. The heating plate mounting hole 3004 of the heating plate 30 is fitted on the upper part of the mounting pin 39 to complete the mounting of the heating plate 30, and the cooling plate mounting hole 2804 of the cooling plate 28 is fitted on the upper part of the mounting pin 39. , The installation of the cooling plate 28 is completed, and it becomes easy to attach / detach.

図10に示すように、炉蓋4は、上側の炉蓋カバーと下側の炉蓋取付板14とを含み、炉蓋カバーは、下側へ開口する直方体筐体であり、炉蓋取付板14は、直方体板であり、炉蓋カバーの下側に設置され、炉蓋カバーの下側の開口を封止する。取付アーム12及び負圧吸引モジュール9は、いずれも炉蓋取付板14に取付けられる。 As shown in FIG. 10, the furnace lid 4 includes an upper furnace lid cover and a lower furnace lid mounting plate 14, and the furnace lid cover is a rectangular housing that opens downward, and is a furnace lid mounting plate. Reference numeral 14 denotes a rectangular body plate, which is installed under the furnace lid cover and seals the opening under the furnace lid cover. Both the mounting arm 12 and the negative pressure suction module 9 are mounted on the furnace lid mounting plate 14.

本実施形態において、シールドガスは、窒素ガスであり、シールドガス導入管は、主窒素ガス導入管5であり、炉蓋取付板14の両端のいずれにも主窒素ガス導入管5が設置され、主窒素ガス導入管5の上端は、炉蓋カバーから伸出し、各主窒素ガス導入管5の上側のいずれにも案内カバー6が設置され、案内カバー6は、対応側の主窒素ガス導入管5の上側に間隔をおいて設置され、主窒素ガス導入管5の上端と間隔をおいて設置され、案内カバー6は、円筒状であり、案内カバー6と主窒素ガス導入管5とのいずれも垂直に設置され、案内カバー6は、炉蓋カバーの上側に設置され、且つ案内カバー6と主窒素ガス導入管5とが同軸に設置され、案内カバー6は、主窒素ガス導入管5と連結される導管に対して案内することができる。各主窒素ガス導入管5と炉蓋取付板14との間のいずれにもガスカバー15が設置され、ガスカバー15の上部の左右両側はいずれも下から上へ徐々に内側への傾斜状であり、ガスカバー15は、炉蓋取付板14と炉蓋カバーとの間に設置され、ガスカバー15の下側は開口するように設置され、ガスカバー15の下側は、炉蓋取付板14に固定するように連結され、且つ炉蓋4の下側にガスカバー15と溶接室18とを連通させるための長孔が設置され、それによりシールドガスを均一に溶接室18内に噴入することができる。 In the present embodiment, the shield gas is nitrogen gas, the shield gas introduction pipe is the main nitrogen gas introduction pipe 5, and the main nitrogen gas introduction pipe 5 is installed at both ends of the furnace lid mounting plate 14. The upper end of the main nitrogen gas introduction pipe 5 extends from the furnace lid cover, and guide covers 6 are installed on any of the upper sides of each main nitrogen gas introduction pipe 5, and the guide cover 6 is the main nitrogen gas introduction pipe on the corresponding side. It is installed at a distance above the main nitrogen gas introduction pipe 5 and at a distance from the upper end of the main nitrogen gas introduction pipe 5. The guide cover 6 has a cylindrical shape, and either the guide cover 6 or the main nitrogen gas introduction pipe 5 is installed. The guide cover 6 is installed above the furnace lid cover, and the guide cover 6 and the main nitrogen gas introduction pipe 5 are installed coaxially, and the guide cover 6 is installed with the main nitrogen gas introduction pipe 5. Can guide to the connecting conduit. A gas cover 15 is installed between each main nitrogen gas introduction pipe 5 and the furnace lid mounting plate 14, and both the left and right sides of the upper part of the gas cover 15 are gradually inclined inward from the bottom to the top. Yes, the gas cover 15 is installed between the furnace lid mounting plate 14 and the furnace lid cover, the lower side of the gas cover 15 is installed so as to open, and the lower side of the gas cover 15 is the furnace lid mounting plate 14. A long hole for communicating the gas cover 15 and the welding chamber 18 is provided under the furnace lid 4 so as to be fixed to the welding chamber 18, whereby the shield gas is uniformly injected into the welding chamber 18. be able to.

炉蓋取付板14の上側さらに浄化導入管7と浄化排気管8とが設置され、浄化導入管7と浄化排気管8とのいずれもガスカバー15によって溶接室18と連通し、浄化導入管7と浄化排気管8とは、負圧吸引モジュール9の同じ側に設置され、それにより窒素ガスの温度が低すぎ溶接室18内でフラックスが液化され、シートの温度を低くし、さらにシートの溶接時間を延長させることを回避することができる。浄化排気管8は、浄化モジュール59の吸気端と連通し、それにより半田ペースト内のフラックスが加熱されて発生するフラックスヒュームを除去することができ、フラックスヒュームがシートの溶接に影響を与えることを回避する。 A purification introduction pipe 7 and a purification exhaust pipe 8 are further installed on the upper side of the furnace lid mounting plate 14, and both the purification introduction pipe 7 and the purification exhaust pipe 8 are communicated with the welding chamber 18 by a gas cover 15, and the purification introduction pipe 7 And the purification exhaust pipe 8 are installed on the same side of the negative pressure suction module 9, so that the temperature of the nitrogen gas is too low and the flux is liquefied in the welding chamber 18 to lower the temperature of the sheet and further weld the sheet. It is possible to avoid extending the time. The purification exhaust pipe 8 communicates with the intake end of the purification module 59, whereby the flux in the solder paste is heated and the flux fume generated can be removed, so that the flux fume affects the welding of the sheet. To avoid.

図11〜図13に示すように、炉蓋取付板14の中央部の両側にさらに副窒素ガス導入管16が対称に設置される。副窒素ガス導入管16は、炉蓋取付板14の上側に設置され、副窒素ガス導入管16の排気端は、溶接室18と連通し、それにより溶接室18内に窒素ガスをより均一に噴入することができ、溶接室18内の窒素ガスが完全に排出されることを保証し、シートが加熱された後に酸素と反応することを回避する。炉蓋取付板14の中央部の下側に吸気板17が設置され、吸気板17は、長方形板であり、吸気板17の上側に開口が上向きである吸気口1701が設置され、吸気口1701は、吸気板17の長手方向に沿って設置された長孔であり、炉蓋取付板14の各側のいずれにも2つの吸気板17が設置され、且つ2つの吸気板17は、炉蓋取付板14の長手方向に沿って順に配列され、各吸気板17のいずれにも長手方向に沿って複数の噴気孔1702が間隔をおいて設置され、それにより窒素ガスが均一に溶接室18内に噴入されることを保証することができる。炉蓋取付板14の下側に内側へ凹んだ取付口1401が設置され、取付口1401は、吸気板17と1対1対応し、吸気板17の上部は、炉蓋取付板14の取付口1401内に取り付けられ、且つ各吸気板17の吸気口1701は、いずれも炉蓋取付板14の取付口1401と囲み吸気チャンバを形成し、副窒素ガス導入管16の排気端は、吸気チャンバと連通し、それにより吸気チャンバ内に窒素ガスを噴入しやすくなる。 As shown in FIGS. 11 to 13, sub-nitrogen gas introduction pipes 16 are symmetrically installed on both sides of the central portion of the furnace lid mounting plate 14. The sub-nitrogen gas introduction pipe 16 is installed above the furnace lid mounting plate 14, and the exhaust end of the sub-nitrogen gas introduction pipe 16 communicates with the welding chamber 18, whereby the nitrogen gas is more uniformly distributed in the welding chamber 18. It can be injected, ensuring that the nitrogen gas in the welding chamber 18 is completely exhausted and avoids reacting with oxygen after the sheet has been heated. An intake plate 17 is installed below the central portion of the furnace lid mounting plate 14, the intake plate 17 is a rectangular plate, and an intake port 1701 having an upward opening is installed on the upper side of the intake plate 17, and the intake port 1701 Is an elongated hole installed along the longitudinal direction of the intake plate 17, two intake plates 17 are installed on each side of the furnace lid mounting plate 14, and the two intake plates 17 are the furnace lids. A plurality of air intake holes 1702 are arranged in order along the longitudinal direction of the mounting plates 14 at intervals along the longitudinal direction in each of the intake plates 17, whereby the nitrogen gas is uniformly contained in the welding chamber 18. It can be guaranteed that it will be injected into. An inwardly recessed mounting port 1401 is installed on the lower side of the furnace lid mounting plate 14, the mounting port 1401 has a one-to-one correspondence with the intake plate 17, and the upper part of the intake plate 17 is the mounting port of the furnace lid mounting plate 14. The intake port 1701 of each intake plate 17 installed in 1401 forms an intake chamber surrounded by the attachment port 1401 of the furnace lid mounting plate 14, and the exhaust end of the sub-nitrogen gas introduction pipe 16 is the intake chamber. The communication facilitates the injection of nitrogen gas into the intake chamber.

図14に示すように、負圧吸引モジュール9は、負圧吸引取付枠34と、密封板36と、連結管37と、負圧吸引昇降シリンダ35とを含み、負圧吸引取付枠34は、炉蓋取付板14の上側に取り付けられ、負圧吸引昇降シリンダ35は、負圧吸引取付枠34に取り付けられ、負圧吸引昇降シリンダ35のピストンロッドは、下へ垂直に設置され、制御モジュールは、負圧吸引昇降シリンダ35の下への移動を制御し、密封板36は、炉蓋取付板14の下側に設置され、密封板36は、水平に設置されており、密封板36の底部は、内側へ凹み、密封板36の底面の密封板36を取り囲む外縁にシールリングが設置され、密封板36と加熱板30とが囲み負圧チャンバを形成し、溶接されるシートは、負圧チャンバ内に設置され、負圧吸引昇降シリンダ35のピストンロッドに水平の連結板38が取り付けられ、連結板38は、炉蓋取付板14の上側に設置され、連結管37は、連結板38と密封板36との間に設置され、連結管37は、炉蓋取付板14に摺動且つ密封するように連結され、連結管37の下端は、負圧チャンバと連通し、連結管37の上端に負圧吸引管が連結される。 As shown in FIG. 14, the negative pressure suction module 9 includes a negative pressure suction mounting frame 34, a sealing plate 36, a connecting pipe 37, and a negative pressure suction elevating cylinder 35, and the negative pressure suction mounting frame 34 includes a negative pressure suction mounting frame 34. Attached to the upper side of the furnace lid mounting plate 14, the negative pressure suction elevating cylinder 35 is attached to the negative pressure suction mounting frame 34, the piston rod of the negative pressure suction elevating cylinder 35 is installed vertically downward, and the control module is , Controls the downward movement of the negative pressure suction elevating cylinder 35, the sealing plate 36 is installed under the furnace lid mounting plate 14, the sealing plate 36 is installed horizontally, and the bottom of the sealing plate 36. Is recessed inward, and a seal ring is installed on the outer edge surrounding the seal plate 36 on the bottom surface of the seal plate 36. The seal plate 36 and the heating plate 30 surround the seal plate 36 to form a negative pressure chamber, and the sheet to be welded has a negative pressure. A horizontal connecting plate 38 is attached to the piston rod of the negative pressure suction elevating cylinder 35 installed in the chamber, the connecting plate 38 is installed above the furnace lid mounting plate 14, and the connecting pipe 37 is attached to the connecting plate 38. Installed between the sealing plate 36, the connecting pipe 37 is connected to the furnace lid mounting plate 14 so as to slide and seal, the lower end of the connecting pipe 37 communicates with the negative pressure chamber, and the upper end of the connecting pipe 37. A negative pressure suction tube is connected to.

図15に示すように、本発明は、搬送機構2と、上述した真空溶接炉の溶接機構とを含み、搬送機構2が溶接室18の下側のラック1に設けられた真空溶接炉をも提供する。 As shown in FIG. 15, the present invention includes a transfer mechanism 2 and the welding mechanism of the vacuum welding furnace described above, and also includes a vacuum welding furnace in which the transfer mechanism 2 is provided in the rack 1 below the welding chamber 18. provide.

図16〜図17に示すように、溶接室18の下側に並進板41が間隔をおいて設置され、搬送取付アーム45は、並進板41と溶接室18との間に設置され、搬送取付アーム45は、取付座によって並進板41に摺動するように取り付けられ、並進機構は、並進板41に連結され、シートの搬送方向に沿って並進板41を並進させるように駆動する。並進板41の下側に水平の搬送取付板52が間隔をおいて設置され、搬送取付板52の上部の両側に並進板ガイドレール51が対称に設置され、並進板ガイドレール51は、搬送バー24の中心線と平行に設置され、並進板41は、下側に設置された並進板スライダによって並進板ガイドレール51に摺動するように取り付けられ、搬送取付板52は、昇降機構に取り付けられ、昇降機構とともに昇降する。 As shown in FIGS. 16 to 17, translation plates 41 are installed at intervals on the lower side of the welding chamber 18, and the transport mounting arm 45 is installed between the translation plate 41 and the welding chamber 18, and the transport mounting arm 45 is mounted. The arm 45 is attached so as to slide on the translation plate 41 by the mounting seat, and the translation mechanism is connected to the translation plate 41 and drives the translation plate 41 to translate along the sheet conveying direction. Horizontal transport mounting plates 52 are installed at intervals on the lower side of the translation plate 41, translation plate guide rails 51 are symmetrically installed on both sides of the upper portion of the transport mounting plate 52, and the translation plate guide rail 51 is a transport bar. Installed in parallel with the center line of 24, the translation plate 41 is attached so as to slide on the translation plate guide rail 51 by the translation plate slider installed on the lower side, and the transport attachment plate 52 is attached to the elevating mechanism. , Elevate with the elevating mechanism.

昇降機構は、水平に設置された並進枠49と、昇降案内ブロック48と、昇降案内枠47と、搬送昇降シリンダ46とを含み、ラック1に水平の並進枠ガイドレール50が取り付けられ、並進枠ガイドレール50は、並進板ガイドレール51と平行に設置され、並進枠49は、下側の並進枠スライダによって並進枠ガイドレール50に摺動するように取り付けられる。搬送昇降シリンダ46は、ラック1に水平に取り付けられ、且つ搬送昇降シリンダ46のピストンロッドは、並進枠49の方向に向けて設置され、搬送昇降シリンダ46のピストンロッドは、並進枠49に連結され、シートの搬送方向に沿い並進枠49を移動させるように駆動する。並進枠49の両側のいずれにも昇降案内ブロック48が対称に設置され、昇降案内ブロック48の上側に昇降案内部が設置され、昇降案内部は、搬送昇降シリンダ46に近接する方向に沿い徐々に上への傾斜状であり、昇降案内枠47は、昇降案内ブロック48と1対1対応し、昇降案内枠47の下側に昇降案内輪が回転可能に取り付けられ、昇降案内輪は、対応側の昇降案内ブロック48の昇降案内部に貼り合わせられ、搬送取付板52の昇降を実現する。ラック1に垂直の昇降ガイドレールが設置され、昇降取付板52は、昇降スライダによって昇降ガイドレールに摺動するように取り付けられ、搬送取付板52を案内する。 The elevating mechanism includes a horizontally installed translation frame 49, an elevating guide block 48, an elevating guide frame 47, and a transport elevating cylinder 46, and a horizontal translation frame guide rail 50 is attached to the rack 1 to form a translation frame. The guide rail 50 is installed in parallel with the translation plate guide rail 51, and the translation frame 49 is attached so as to slide on the translation frame guide rail 50 by the lower translation frame slider. The transport elevating cylinder 46 is horizontally mounted on the rack 1, the piston rod of the transport elevating cylinder 46 is installed toward the translation frame 49, and the piston rod of the transport elevating cylinder 46 is connected to the translation frame 49. , The translation frame 49 is driven so as to move along the sheet conveying direction. The elevating guide block 48 is symmetrically installed on both sides of the translation frame 49, the elevating guide portion is installed on the upper side of the elevating guide block 48, and the elevating guide portion gradually moves along the direction approaching the transport elevating cylinder 46. The elevating guide frame 47 has a one-to-one correspondence with the elevating guide block 48, and the elevating guide wheel is rotatably attached to the lower side of the elevating guide frame 47. It is attached to the elevating guide portion of the elevating guide block 48 to realize the elevating and lowering of the transport mounting plate 52. A vertical elevating guide rail is installed on the rack 1, and the elevating mounting plate 52 is attached so as to slide on the elevating guide rail by the elevating slider to guide the transport mounting plate 52.

並進機構は、並進モータ取付枠54と、搬送移動枠55と、並進モータ53とを含み、並進モータ取付枠54は、搬送取付板52の下側に設置され、並進モータ53は、並進モータ取付枠54に取り付けられ、並進モータ53の出力軸は、水平に設置され、シートの搬送方向と平行に設置される。並進モータ53に、同軸に並進ねじが取り付けられ、並進ねじは、並進モータ53とともに同期しつつ回転し、搬送移動枠55は、並進モータ取付枠54に摺動するように取り付けられ、搬送移動枠55に並進ねじに連係する並進ナットが設置される。搬送移動枠55の上側は、搬送取付板52を通過した後に並進板41に連結され、並進板41を同期しつつ移動させるように駆動し、搬送移動枠55と搬送取付板52とが摺動するように設置される。 The translation mechanism includes a translation motor mounting frame 54, a transport moving frame 55, and a translation motor 53. The translation motor mounting frame 54 is installed under the transport mounting plate 52, and the translation motor 53 is mounted on the translation motor. Attached to the frame 54, the output shaft of the translational motor 53 is installed horizontally and parallel to the sheet transport direction. A translation screw is coaxially attached to the translation motor 53, the translation screw rotates in synchronization with the translation motor 53, and the transfer movement frame 55 is attached so as to slide on the translation motor mounting frame 54. A translation nut linked to the translation screw is installed at 55. The upper side of the transport moving frame 55 is connected to the translation plate 41 after passing through the transport mounting plate 52, drives the translation plate 41 to move in synchronization, and the transport moving frame 55 and the transport mounting plate 52 slide. It is installed to do.

開閉機構は、開閉取付棒42と、開閉案内板43と、開閉移動枠56と、開閉モータ取付枠57と、開閉モータ移動枠56と、開閉動力モジュールとを含み、本実施例において、開閉動力モジュールは、開閉モータ58である。開閉モータ取付枠57は、搬送取付板52の下側に設置され、開閉モータ取付枠57の上側は、並進板41に連結され、並進板41とともに同期しつつ移動し、開閉モータ取付枠57は、搬送取付板52に摺動するように連結される。開閉モータ58は、開閉モータ取付枠57に取り付けられる。開閉移動枠56は、開閉モータ取付枠57に摺動するように取り付けられ、開閉モータ58の出力軸に開閉ねじが同軸に取り付けられ、開閉移動枠56に開閉ねじに連係する開閉ナットが設置され、開閉モータ58は、ねじナットのペアによって開閉移動枠56をシートの搬送方向に沿い並進させるように駆動する。並進板41の上側に取付棒スライダが設置され、開閉取付棒42は、取付棒スライダに摺動するように取付けられ、開閉取付棒42は、シートの搬送方向に沿い設置され、開閉移動枠56の前の上側は、開閉取付棒42に連結され、開閉取付棒42を同期しつつ移動させるように駆動し、開閉移動枠56は、搬送取付板52に摺動するように連結される。開閉取付棒42の両端のいずれにも開閉案内板43が設置され、開閉案内板43の両側のいずれにも開閉案内部が設置され、開閉案内部は、シートの搬送方向に沿い徐々に内側への傾斜状であり、各搬送取付アーム45の両端のいずれにも開閉案内輪44が取り付けられ、2つの搬送取付アーム45の間にさらに開閉案内輪44と開閉案内板43の開閉案内部とを貼り合わせする開閉バネが設置される。並進板41にさらに取付アームガイドレールが取り付けられ、取付アームガイドレールは、開閉取付棒42と垂直に設置され、搬送取付アーム45は、開閉スライダによって取付アームガイドレールに摺動するように取り付けられる。 The opening / closing mechanism includes an opening / closing mounting rod 42, an opening / closing guide plate 43, an opening / closing moving frame 56, an opening / closing motor mounting frame 57, an opening / closing motor moving frame 56, and an opening / closing power module. The module is an opening / closing motor 58. The opening / closing motor mounting frame 57 is installed below the transport mounting plate 52, and the upper side of the opening / closing motor mounting frame 57 is connected to the translation plate 41 and moves in synchronization with the translation plate 41. , It is connected so as to slide on the transport mounting plate 52. The opening / closing motor 58 is attached to the opening / closing motor mounting frame 57. The opening / closing moving frame 56 is attached so as to slide on the opening / closing motor mounting frame 57, an opening / closing screw is coaxially attached to the output shaft of the opening / closing motor 58, and an opening / closing nut linked to the opening / closing screw is installed on the opening / closing moving frame 56. The opening / closing motor 58 is driven by a pair of screw nuts so as to translate the opening / closing moving frame 56 along the sheet conveying direction. A mounting rod slider is installed on the upper side of the translation plate 41, the opening / closing mounting rod 42 is mounted so as to slide on the mounting rod slider, the opening / closing mounting rod 42 is installed along the sheet conveying direction, and the opening / closing moving frame 56 is installed. The upper side in front of the above is connected to the opening / closing mounting rod 42 and is driven so as to move the opening / closing mounting rod 42 in synchronization, and the opening / closing moving frame 56 is connected so as to slide on the transport mounting plate 52. Opening / closing guide plates 43 are installed on both ends of the opening / closing mounting rod 42, opening / closing guides are installed on both sides of the opening / closing guide plate 43, and the opening / closing guides gradually move inward along the sheet conveying direction. The opening / closing guide ring 44 is attached to both ends of each transport mounting arm 45, and the opening / closing guide ring 44 and the opening / closing guide portion of the opening / closing guide plate 43 are further placed between the two transport mounting arms 45. An opening / closing spring to be bonded is installed. A mounting arm guide rail is further attached to the translation plate 41, the mounting arm guide rail is installed perpendicular to the opening / closing mounting rod 42, and the transport mounting arm 45 is mounted so as to slide on the mounting arm guide rail by the opening / closing slider. ..

図18〜19に示すように、浄化モジュール59は、浄化箱61と、浄化箱61内に設置されたコイル67及びストレーナ64とを含み、浄化箱61は、直方体筐体であり、浄化箱61の一側に浄化箱導入管62が連結され、浄化箱61の他側に浄化箱排気管が連結されており、浄化箱排気管と溶接室18との間にファン65が設置される。コイル67は、浄化箱61内に設置され、コイル67にさらに給油箱60が連結され、給油箱60の排油口は、循環ポンプを介してコイル67の一端と連通し、コイル67の他端は、給油箱60と連通して、冷却油の循環を実現する。浄化箱61内にさらにコイル67に連結されたフィン68が設置され、それにより窒素ガスとより速く熱交換を行い、窒素ガスの温度を低減することができる。浄化箱61の浄化箱排気管に近接する側にストレーナ取付箱63が設置され、浄化箱の排気管は、ストレーナ取付箱63によって浄化箱61と連通し、ストレーナ64は、ストレーナ取付箱63内に垂直に設置され、冷却後の窒素ガスは、ストレーナ64を通過した後に浄化箱排気管を介して排出され、再び溶接室18内に輸送され、ストレーナ64は、液化後のフラックスを濾過し、それにより窒素ガス内のフラックスヒュームを除去するのに用いられる。 As shown in FIGS. 18 to 19, the purification module 59 includes a purification box 61, a coil 67 and a strainer 64 installed in the purification box 61, and the purification box 61 is a rectangular parallelepiped housing and the purification box 61. A septic box introduction pipe 62 is connected to one side, a septic box exhaust pipe is connected to the other side of the septic box 61, and a fan 65 is installed between the septic box exhaust pipe and the welding chamber 18. The coil 67 is installed in the purification box 61, and the oil supply box 60 is further connected to the coil 67. The oil exhaust port of the oil supply box 60 communicates with one end of the coil 67 via a circulation pump, and the other end of the coil 67. Communicates with the refueling box 60 to realize circulation of cooling oil. Further, fins 68 connected to the coil 67 are installed in the purification box 61, whereby heat exchange with nitrogen gas can be performed faster and the temperature of nitrogen gas can be reduced. A strainer mounting box 63 is installed on the side of the septic box 61 close to the septic box exhaust pipe, the exhaust pipe of the septic box communicates with the purification box 61 by the strainer mounting box 63, and the strainer 64 is placed in the strainer mounting box 63. Installed vertically, the cooled nitrogen gas is discharged through the septic box exhaust pipe after passing through the strainer 64 and transported back into the welding chamber 18, where the strainer 64 filters the liquefied flux. Is used to remove the flux fume in the nitrogen gas.

浄化箱61の下側にさらにフラックス回収バレル66が設置され、浄化箱61の下側は、フラックス回収バレル66に近接する一端が他端より低い傾斜状であり、それにより降温し液化された液体をフラックス回収バレル66内に流れ込むようにすることができる。 A flux recovery barrel 66 is further installed on the lower side of the septic box 61, and the lower side of the septic box 61 has an inclined shape in which one end close to the flux recovery barrel 66 is lower than the other end, thereby lowering the temperature and liquefying the liquid. Can flow into the flux recovery barrel 66.

上記の真空溶接炉の溶接方法であって、以下のステップを含む。 The above-mentioned method for welding a vacuum welding furnace, which includes the following steps.

1)炉蓋4は、溶接室18を封止し、シールドガス導入管は、溶接室18内にシールドガスを充填する。 1) The furnace lid 4 seals the welding chamber 18, and the shield gas introduction pipe fills the welding chamber 18 with the shield gas.

溶接室18に、主窒素ガス導入管5および副窒素ガス導入管16を介して窒素ガスが充填され、溶接室18全体が窒素ガスで充満され、溶接室18内の空気が完全に排出される。同時に、電気加熱管31が加熱板30を加熱し、給水管29が冷却板28内に冷却水を通水する。 The welding chamber 18 is filled with nitrogen gas via the main nitrogen gas introduction pipe 5 and the sub-nitrogen gas introduction pipe 16, the entire welding chamber 18 is filled with nitrogen gas, and the air in the welding chamber 18 is completely discharged. .. At the same time, the electric heating pipe 31 heats the heating plate 30, and the water supply pipe 29 allows the cooling water to pass through the cooling plate 28.

2)搬送機構2は、シートを1枚ずつ負圧チャンバ内に搬送し、加熱領域は、搬送中のシートを段階的に加熱する。 2) The transport mechanism 2 transports the sheets one by one into the negative pressure chamber, and the heating region gradually heats the sheets being transported.

シートを供給台21に載置し、昇降機構が搬送バー24を下へ移動させるように駆動し、開閉機構が2本の搬送バー24を下へシートに近接する位置に移動させるように駆動し、供給台21上の供給台退避口2101と位置合わせ、昇降機構が再び搬送バー24を下へ移動させるように駆動し、支持部を供給台退避口2101内に位置するようにし、続いて電動プッシュロッド69が支持部を移動させるように駆動し、支持部をシートの下側に延ばすようにする。昇降機構は、搬送バー24を上へ移動させるように駆動し、シートの持ち上げを完了させ、同時に供給端のバッフル板27により供給端をオープンにさせ、並進機構が溶接室18の排出端に近接する方向へ搬送バー24を移動させるように駆動し、シートを溶接室18内の加熱板30に搬送する。搬送機構2は、逐次に搬送し、それによりシートを各加熱板30により加熱した後、負圧吸引モジュール9の真下の加熱板30に入る。 The seat is placed on the supply base 21, the elevating mechanism drives the transport bar 24 to move downward, and the opening / closing mechanism drives the two transport bars 24 to move downward to a position close to the seat. , Aligned with the supply base evacuation port 2101 on the supply base 21, the elevating mechanism drives the transport bar 24 to move downward again so that the support portion is located in the supply base evacuation port 2101, and then electrically. The push rod 69 is driven to move the support so that the support extends underneath the seat. The elevating mechanism drives the transport bar 24 to move upward, completes the lifting of the seat, and at the same time opens the supply end by the baffle plate 27 at the supply end, and the translation mechanism is close to the discharge end of the welding chamber 18. The transfer bar 24 is driven so as to move in the direction of the welding, and the sheet is transferred to the heating plate 30 in the welding chamber 18. The transport mechanism 2 sequentially transports the sheet, heats the sheet by each of the heating plates 30, and then enters the heating plate 30 directly under the negative pressure suction module 9.

負圧吸引昇降シリンダ35が密封板36を下へ移動させるように駆動し、密封板36とその真下の加熱板30とが囲み密封した負圧チャンバに形成するようにし、同時に負圧吸引管が負圧チャンバ内のガスを抽出し、負圧チャンバ内を負圧ないし真空状態に維持するようにし、半田ペースト内の気泡が確実に溢れ出るようにし、溶接の品質を保証する。溶接完了後に負圧吸引昇降シリンダ35は、密封板36を上昇させるように駆動する。 The negative pressure suction elevating cylinder 35 drives the sealing plate 36 to move downward so that the sealing plate 36 and the heating plate 30 directly below the sealing plate 36 form a sealed negative pressure chamber, and at the same time, the negative pressure suction pipe is formed. The gas in the negative pressure chamber is extracted, the inside of the negative pressure chamber is maintained in a negative pressure or vacuum state, the air bubbles in the solder paste are surely overflowed, and the quality of welding is guaranteed. After the welding is completed, the negative pressure suction elevating cylinder 35 is driven so as to raise the sealing plate 36.

3)搬送機構2は、負圧チャンバ内で溶接が完了したシートを排出端に搬送し、冷却領域はシートを徐冷する。 3) The transport mechanism 2 transports the welded sheet to the discharge end in the negative pressure chamber, and the cooling region slowly cools the sheet.

搬送機構2は、引き続き、排出端に向けてシートを搬送し、順次に各冷却板28により冷却した後に排出台19上に移動し、シートの溶接を完了する。 The transport mechanism 2 continues to transport the sheet toward the discharge end, sequentially cools it by each cooling plate 28, and then moves onto the discharge table 19 to complete welding of the sheet.

実施例2 Example 2

実施例2が実施例1と異なる点は、支持部を搬送バー24に直接に取付け、加熱板30の両端に加熱板退避口3001を設置し、冷却板28の両端に冷却板退避口2801を設置し、支持部がシートの両端でシートを支持する点である。 The difference between the second embodiment and the first embodiment is that the support portion is directly attached to the transport bar 24, the heating plate evacuation ports 3001 are installed at both ends of the heating plate 30, and the cooling plate evacuation ports 2801 are provided at both ends of the cooling plate 28. It is a point where the seat is installed and the support part supports the seat at both ends of the seat.

以上の説明は、本発明の好ましい実施例に過ぎず、本発明を限定するものではなく、如何なる当業者であっても、以上に開示された技術的内容により同等に変更された同等の実施例に変更又は変形することができる。但し、本発明の技術的解決手段の内容から逸脱することなく、本発明と均等の範囲で以上の実施例に対して行われる如何なる簡単な修正、同等の変更及び変形は、依然として本発明の技術的解決手段の保護範囲に属する。 The above description is merely a preferred embodiment of the present invention, and does not limit the present invention, and any person skilled in the art will have an equivalent embodiment similarly modified by the technical contents disclosed above. Can be changed or transformed into. However, any simple modifications, equivalent modifications and modifications made to the above examples within the same scope as the present invention without departing from the content of the technical solution of the present invention are still the same as the present invention. It belongs to the scope of protection of the solution.

Claims (12)

真空溶接炉の溶接機構であって、溶接室(18)と、溶接室(18)の上側の炉蓋とを含み、炉蓋(4)と溶接室(18)との間に溶接チャンバが設置され、溶接室(18)の下部に溶接台(20)が設けられ、溶接台(20)の供給端に近接する側は、加熱領域であり、溶接台(20)の排出端に近接する側は、冷却領域であり、負圧吸引モジュール(9)は、加熱領域の冷却領域に近接する一端の上側に設置され、炉蓋(4)に昇降可能に取付けされ、負圧吸引モジュール(9)の底部と加熱領域と囲み密閉した負圧チャンバを形成し、溶接室(18)または炉蓋(4)にシールドガス導入管が設置される、ことを特徴とする真空溶接炉の溶接機構。 A welding mechanism of a vacuum welding furnace, including a welding chamber (18) and a furnace lid on the upper side of the welding chamber (18), and a welding chamber is installed between the furnace lid (4) and the welding chamber (18). The welding table (20) is provided in the lower part of the welding chamber (18), and the side close to the supply end of the welding table (20) is the heating region, and the side close to the discharge end of the welding table (20). Is a cooling region, and the negative pressure suction module (9) is installed on the upper side of one end close to the cooling region of the heating region, and is mounted on the furnace lid (4) so as to be able to move up and down. A welding mechanism for a vacuum welding furnace, characterized in that a sealed negative pressure chamber is formed around the bottom of the welding chamber and a heating region, and a shield gas introduction pipe is installed in a welding chamber (18) or a furnace lid (4). 前記溶接台(20)は、複数の加熱板(30)と複数の冷却板(28)とを含み、加熱領域は、複数の加熱板(30)をつなぎ合わせて形成され、冷却領域は、複数の冷却板(28)をつなぎ合わせて形成される、ことを特徴とする請求項1に記載の真空溶接炉の溶接機構。 The welding table (20) includes a plurality of heating plates (30) and a plurality of cooling plates (28), a heating region is formed by connecting the plurality of heating plates (30), and a plurality of cooling regions are formed. The welding mechanism of the vacuum welding furnace according to claim 1, wherein the cooling plates (28) of the above are joined together to form a welding mechanism. 各々の加熱板(30)の両側のいずれにも電気加熱管(31)が対称に設置され、加熱板(30)の中央部にセンサ取付け穴(3003)が設置され、センサ取付け穴(3003)が2つの電気加熱管(31)の間に設置された止まり穴であり、センサ取り付け穴(3003)に温度センサ(32)が取り付けられる、ことを特徴とする請求項2に記載の真空溶接炉の溶接機構。 Electric heating tubes (31) are symmetrically installed on both sides of each heating plate (30), a sensor mounting hole (3003) is installed in the center of the heating plate (30), and a sensor mounting hole (3003) is installed. The vacuum welding furnace according to claim 2, wherein is a blind hole installed between two electric heating pipes (31), and a temperature sensor (32) is attached to the sensor mounting hole (3003). Welding mechanism. 前記冷却板(28)の両側に給水通路(2802)が対称に設置され、前記冷却板(28)の少なくとも一端に2つの前記給水通路(2802)に連通する排水通路(2803)が設置される、ことを特徴とする請求項2に記載の真空溶接炉の溶接機構。 Water supply passages (2802) are symmetrically installed on both sides of the cooling plate (28), and drainage passages (2803) communicating with the two water supply passages (2802) are installed at at least one end of the cooling plate (28). The welding mechanism of the vacuum welding furnace according to claim 2, wherein the welding mechanism is characterized by the above. 前記溶接室(18)の下側に貯液カバー(33)が設置され、貯液カバー(33)の底部の両側は、側部から中央部に徐々に下への傾斜状であり、貯液カバー(33)底部に貯液カバー排出管(3301)が設けられる、ことを特徴とする請求項1に記載の真空溶接炉の溶接機構。 A liquid storage cover (33) is installed on the lower side of the welding chamber (18), and both sides of the bottom of the liquid storage cover (33) are gradually inclined downward from the side to the center to store liquid. The welding mechanism of a vacuum welding furnace according to claim 1, wherein a liquid storage cover discharge pipe (3301) is provided at the bottom of the cover (33). 前記シールドガス導入管は、主窒素ガス導入管(5)であり、炉蓋(4)の両端のいずれにも主窒素ガス導入管(5)が設置され、炉蓋(4)の中央部の両側に副窒素ガス導入管(16)が対称に設置され、副窒素ガス導入管(16)が溶接室(18)に連通される、ことを特徴とする請求項1に記載の真空溶接炉の溶接機構。 The shield gas introduction pipe is a main nitrogen gas introduction pipe (5), and main nitrogen gas introduction pipes (5) are installed at both ends of the furnace lid (4), and the central portion of the furnace lid (4) is provided. The vacuum welding furnace according to claim 1, wherein the sub-nitrogen gas introduction pipes (16) are symmetrically installed on both sides, and the sub-nitrogen gas introduction pipes (16) are communicated with the welding chamber (18). Welding mechanism. 炉蓋(4)の下部の両側に吸気板(17)が対称に設置され、吸気板(17)の上部に上側へ開口する吸気口(1701)が設けられ、炉蓋(4)と囲み吸気チャンバを形成し、吸気板(17)に吸気口(1701)と溶接室(18)とを連通させる複数の噴気孔(1702)が間隔をおいて設置され、副窒素ガス導入管(16)を吸気口(1701)に連通させる、ことを特徴とする請求項6に記載の真空溶接炉の溶接機構。 Intake plates (17) are symmetrically installed on both sides of the lower part of the furnace lid (4), and an intake port (1701) that opens upward is provided on the upper part of the intake plate (17), and the intake plate (4) is surrounded by intake air. A plurality of air jet holes (1702) that form a chamber and communicate the intake port (1701) and the welding chamber (18) are installed in the intake plate (17) at intervals, and a secondary nitrogen gas introduction pipe (16) is provided. The welding mechanism of a vacuum welding furnace according to claim 6, wherein the welding mechanism communicates with an intake port (1701). 前記負圧吸引モジュール(9)は、密封板(36)と負圧吸引昇降シリンダ(35)とを含み、密封板(36)は、加熱領域の上側に設置され、加熱領域と平行に設置され、密封板(36)の底部と加熱領域とが密閉の負圧チャンバを形成し、負圧チャンバに負圧吸引管が連結される、ことを特徴とする請求項1に記載の真空溶接炉の溶接機構。 The negative pressure suction module (9) includes a sealing plate (36) and a negative pressure suction elevating cylinder (35), and the sealing plate (36) is installed above the heating region and parallel to the heating region. The vacuum welding furnace according to claim 1, wherein the bottom of the sealing plate (36) and the heating region form a closed negative pressure chamber, and the negative pressure suction pipe is connected to the negative pressure chamber. Welding mechanism. 前記密封板(36)は、炉蓋(4)の下側に設置され、負圧吸引昇降シリンダ(35)は、炉蓋(4)の上側に設置され、負圧吸引昇降シリンダ(35)のピストンロッドが連結管(37)を介して密封板(36)に連結され、連結管(37)が負圧チャンバと負圧吸引管とを連通させる、ことを特徴とする請求項8に記載の真空溶接炉の溶接機構。 The sealing plate (36) is installed on the lower side of the furnace lid (4), and the negative pressure suction elevating cylinder (35) is installed on the upper side of the furnace lid (4) of the negative pressure suction elevating cylinder (35). The eighth aspect of claim 8, wherein the piston rod is connected to the sealing plate (36) via the connecting pipe (37), and the connecting pipe (37) communicates the negative pressure chamber and the negative pressure suction pipe. Welding mechanism of vacuum welding furnace. 浄化モジュール(59)をさらに含み、浄化モジュール(59)の吸気端と排気端とのいずれも溶接室と連通させることを特徴とする請求項1に記載の真空溶接炉の溶接機構。 The welding mechanism for a vacuum welding furnace according to claim 1, further comprising a purification module (59), wherein both the intake end and the exhaust end of the purification module (59) communicate with the welding chamber.
前記浄化モジュール(59)は、浄化箱(61)と、浄化箱(61)内に設置されたコイル(67)及びストレーナ(64)とを含み、吸気端と排気端とが浄化箱(61)の両側にそれぞれ設置され、ストレーナ(64)は、排気端に近接するように設置され、排気端を封止し、コイル(67)に循環するクーラントが充填され、浄化箱(61)の排気端と溶接室(18)との間にファン(65)が設置される、ことを特徴とする請求項10に記載の真空溶接炉の溶接機構。
,
The purification module (59) includes a purification box (61), a coil (67) and a strainer (64) installed in the purification box (61), and the intake end and the exhaust end are the purification box (61). Strainers (64) are installed close to the exhaust end, seal the exhaust end, are filled with coolant circulating in the coil (67), and are installed on both sides of the septic box (61). The welding mechanism of a vacuum welding furnace according to claim 10, wherein a fan (65) is installed between the welding chamber (18) and the welding chamber (18).
前記浄化モジュール(59)は、浄化箱(61)内に設置されたフィン(68)をさらに含む、ことを特徴とする請求項11に記載の真空溶接炉の溶接機構。 The welding mechanism of a vacuum welding furnace according to claim 11, wherein the purification module (59) further includes fins (68) installed in a purification box (61).
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