JP2021190716A5 - - Google Patents

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JP2021190716A5
JP2021190716A5 JP2021093501A JP2021093501A JP2021190716A5 JP 2021190716 A5 JP2021190716 A5 JP 2021190716A5 JP 2021093501 A JP2021093501 A JP 2021093501A JP 2021093501 A JP2021093501 A JP 2021093501A JP 2021190716 A5 JP2021190716 A5 JP 2021190716A5
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training
poi
pixel block
neural network
classification score
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JP7633094B2 (ja
JP2021190716A (ja
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JP2021093501A 2020-06-03 2021-06-03 弱いラベル付けを使用した半導体試料内の欠陥の検出 Active JP7633094B2 (ja)

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Application Number Priority Date Filing Date Title
US16/892,139 US11379972B2 (en) 2020-06-03 2020-06-03 Detecting defects in semiconductor specimens using weak labeling
US16/892,139 2020-06-03

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JP2021190716A JP2021190716A (ja) 2021-12-13
JP2021190716A5 true JP2021190716A5 (enExample) 2024-06-10
JP7633094B2 JP7633094B2 (ja) 2025-02-19

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JP2021093501A Active JP7633094B2 (ja) 2020-06-03 2021-06-03 弱いラベル付けを使用した半導体試料内の欠陥の検出

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US (2) US11379972B2 (enExample)
JP (1) JP7633094B2 (enExample)
KR (1) KR102749767B1 (enExample)
CN (2) CN118297906B (enExample)
TW (1) TWI864281B (enExample)

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