JP2021179569A - 光デバイス、及びこれを用いた光送受信機 - Google Patents
光デバイス、及びこれを用いた光送受信機 Download PDFInfo
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- 238000007740 vapor deposition Methods 0.000 description 1
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0121—Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
- G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/127—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode travelling wave
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- Electromagnetism (AREA)
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- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
電気光学効果を有する結晶薄膜で形成された光導波路と、
前記光導波路に高周波電圧を印加するRF電極と、
前記光導波路に直流電圧を印加するDC電極)と、
を有し、前記RF電極はコプレーナ構造を有し、前記DC電極はマイクロストリップ構造を有する。
図7は、第1の変形例による光変調器10Aの電極構造を示す。図7の(A)はDC電極断面、(B)はRF電極断面である。第1の変形例では、RF信号電極210Sの厚さをDC信号電極120Sの厚さよりも大きくする。その他の断面構成は図4と同じであり、同じ構成要素には同じ符号をつけて、重複する説明を省略する。RF信号電極210SとDC信号電極120Sの平面配置は、図3と同じである。
図8は、第2の変形例による光変調器10Bの電極構造を示す。図8の(A)はDC電極断面、(B)はRF電極断面である。図7では、RF接地電極110Gの厚さを、DC信号電極120Sの厚さと同じにしていた。図8では、RF接地電極210Gの厚さを、DC信号電極120Sの厚さよりも大きくする。その他の断面構成は図7と同じであり、同じ構成要素には同じ符号をつけて重複する説明を省略する。RF信号電極210SとDC信号電極120Sの平面配置形状は、図3と同様である。
図10は、第3の変形例による光変調器10Cの電極構造を示す。図10の(A)はDC電極断面、(B)はRF電極断面である。第3の変形例では、DC信号電極120Sの幅と、RF信号電極310Sの幅を異ならせる。その他の断面構成は図4と同じであり、同じ構成要素には同じ符号をつけて、重複する説明を省略する。
図11は、光変調器10が適用される光送受信機1の模式図である。この例では、光送受信機1は、光送信回路2、光受信回路3、デジタル信号プロセッサ(DSP)5、及びレーザダイオード(LD)4を有する。
2 光送信回路
3 光受信回路
4 LD
5 DSP
6,7 光伝送路
10、10A〜10C 光変調器(光デバイス)
11 光導波路
110 RF電極
110S、210S、310S RF信号電極
110G、210G RF接地電極
120 DC電極
120S DC信号電極
120G DC接地電極
Claims (7)
- 電気光学効果を有する結晶薄膜で形成された光導波路と、
前記光導波路に高周波電圧を印加するRF電極と、
前記光導波路に直流電圧を印加するDC電極と、
を有し、
前記RF電極はコプレーナ構造を有し、前記DC電極はマイクロストリップ構造を有する、光デバイス。 - 前記RF電極は、同一面内に形成されたRF信号電極とRF接地電極を有し、
前記RF信号電極の厚みは、DC信号電極の厚みよりも大きい、
請求項1に記載の光デバイス。 - 前記RF電極は、同一面内に形成されたRF信号電極とRF接地電極を有し、
前記RF接地電極の厚みは、DC信号電極の厚みよりも大きい、
請求項1または2に記載の光デバイス。 - 前記RF信号電極の厚みは、3μm以上、10μm未満である、
請求項2または3に記載の光デバイス。 - 前記DC電極は、前記RF電極と同じ層に形成されたDC信号電極を有し、
前記DC信号電極の幅はRF信号電極の幅と異なる、
請求項1の光デバイス。 - 前記RF信号電極の幅と、前記DC信号電極の幅は異なる、
請求項2〜4のいずれか1項に記載の光デバイス。 - 請求項1〜6のいずれか1項に記載の光デバイス、
を用いた光送受信機。
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JP2020085978A JP2021179569A (ja) | 2020-05-15 | 2020-05-15 | 光デバイス、及びこれを用いた光送受信機 |
CN202110140643.6A CN113671767B (zh) | 2020-05-15 | 2021-02-02 | 光学装置以及使用该光学装置的光收发器 |
US17/167,564 US20210356836A1 (en) | 2020-05-15 | 2021-02-04 | Optical device and optical transceiver using the same |
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JP2020085978A JP2021179569A (ja) | 2020-05-15 | 2020-05-15 | 光デバイス、及びこれを用いた光送受信機 |
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JP (1) | JP2021179569A (ja) |
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CN115145061A (zh) * | 2021-03-30 | 2022-10-04 | Tdk株式会社 | 光调制器 |
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JPS638300A (ja) * | 1986-06-27 | 1988-01-14 | Tokai Carbon Co Ltd | ウイスカ−の分級方法 |
JP3638300B2 (ja) * | 1993-12-27 | 2005-04-13 | 三菱電線工業株式会社 | 光導波路型デバイス |
US6222965B1 (en) * | 1999-07-08 | 2001-04-24 | Agere Systems Opto Electronics Guardian Inc. | Bias control system for electrooptic devices |
US6584240B2 (en) * | 2001-03-30 | 2003-06-24 | Fujitsu Limited | Optical modulator having ridge and associated structure on substrate |
US7079714B2 (en) * | 2002-11-27 | 2006-07-18 | Lucent Technologies Inc. | Electro-optic devices having flattened frequency response with reduced drive voltage |
US7408693B2 (en) * | 2004-07-27 | 2008-08-05 | Jds Uniphase Corporation | Electro-optic device |
JP4110182B2 (ja) * | 2006-09-30 | 2008-07-02 | 住友大阪セメント株式会社 | 光制御素子 |
JP4187771B2 (ja) * | 2007-03-30 | 2008-11-26 | 住友大阪セメント株式会社 | 光制御素子 |
JP5267476B2 (ja) * | 2010-01-29 | 2013-08-21 | 富士通オプティカルコンポーネンツ株式会社 | 光デバイスおよび光送信装置 |
JP5930124B2 (ja) * | 2013-12-11 | 2016-06-08 | 住友大阪セメント株式会社 | 電気光学素子 |
EP3306381B1 (en) * | 2015-06-02 | 2020-01-29 | Nippon Telegraph And Telephone Corporation | Semiconductor optical modulation element |
CN112180520A (zh) * | 2016-01-28 | 2021-01-05 | 申泰公司 | 光收发器 |
CN107957631A (zh) * | 2016-10-18 | 2018-04-24 | 天津领芯科技发展有限公司 | 一种高调制效率的铌酸锂薄膜电光调制器 |
US11366344B2 (en) * | 2017-10-02 | 2022-06-21 | Tdk Corporation | Optical modulator |
JP7334616B2 (ja) * | 2019-12-26 | 2023-08-29 | 住友大阪セメント株式会社 | 光導波路素子、光変調器、光変調モジュール、及び光送信装置 |
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Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240410 |