JP2021164965A - Cutting device and managing method of cutting blade - Google Patents

Abstract

To provide a cutting device and a managing method of a cutting blade that can suppress processing defects caused by glazing or clogging of the cutting blade.SOLUTION: A cutting device 1 includes a cutting unit 20, a detection unit 30 that detects the state of the cutting edge of a cutting blade 21 of the cutting unit 20, and a notification unit 50. The detection unit 30 has a light-emitting unit 33 and a light-receiving unit 34 arranged so as to sandwich the cutting blade 21-1 on the outer circumference of the cutting blade 21, a wear amount measuring unit 43 that measures the wear amount of the cutting blade 21 from the change in the light receiving amount of the light-receiving unit 34, and a determination unit 48 that determines the state of the cutting blade 21 based on the measurement result of the wear amount measuring unit 43. The determination unit 48 determines that the cutting of the workpiece with the cutting blade 21 should be stopped when the amount of wear does not reach a predetermined value. The notification unit 50 provides notification of the determination result of the determination unit 48.SELECTED DRAWING: Figure 2

Description

The present invention relates to a cutting device and a method for managing a cutting blade.

As a processing device that divides a work piece such as a semiconductor wafer into chip sizes, a cutting device that cuts the work piece by attaching a cutting blade to the tip of a spindle and bringing it into contact with the work piece while rotating at high speed. It is known (see Patent Documents 1 to 3).

Japanese Unexamined Patent Publication No. 62-053803 Japanese Unexamined Patent Publication No. 2001-298001 JP-A-2002-370140

The cutting edge of the cutting blade used in such a cutting device is formed by fixing the abrasive grains with a bond, is worn by the cutting process, and the self-generated blade always maintains a constant sharpness. Therefore, by periodically measuring the amount of wear of the cutting blade and adjusting the height (cutting depth) of the cutting blade according to the amount of wear, it is controlled so that the cutting amount of a predetermined depth can be maintained. .. The cutting devices of Patent Documents 1 and 2 are provided with a light emitting portion and a light receiving portion facing each other, and the cutting blade is lowered between them, and the cutting edge of the cutting blade is changed from the change in the amount of light received caused by the light being shielded by the cutting blade. A mechanism for detecting the position and measuring the amount of wear of the cutting blade has been proposed. Further, in the cutting apparatus of Patent Document 3, a mechanism has also been proposed in which a blade breakage detector provided with a light emitting portion and a light receiving portion facing each other is used to detect chipping of the cutting edge of the cutting blade at any time.

However, the above-mentioned mechanism only detects an abnormality when the amount of wear of the cutting blade is larger than a predetermined value or when the cutting edge is chipped, and the cutting blade is regarded as an abnormality such as clogging or clogging. I wasn't. Therefore, there is a problem that it is not possible to suppress processing defects such as sudden chipping caused by abnormalities of these cutting blades.

The present invention has been made in view of such problems, and an object of the present invention is to provide a cutting device and a cutting blade management method capable of suppressing machining defects caused by clogging or clogging of the cutting blade. be.

In order to solve the above-mentioned problems and achieve the object, the cutting apparatus of the present invention cuts a workpiece held on the chuck table with a chuck table for holding the workpiece and a cutting blade mounted on the spindle. A cutting unit for cutting, a detection unit for detecting the state of the cutting edge of the cutting blade, and a notification unit for notifying the detection result of the detection unit, and the detection unit sandwiches a cutting edge on the outer periphery of the cutting blade. A wear amount measuring unit that has a light emitting part and a light receiving part arranged in, and measures the wear amount of the cutting blade from a change in the light receiving amount of the light receiving part, and a cutting blade based on the measurement result of the wear amount measuring part. A determination unit for determining a state is provided, and the determination unit determines that cutting of a workpiece by the cutting blade should be stopped when the measured amount of wear does not reach a predetermined value, and notifies the notification. The unit is characterized in that the determination result of the determination unit is notified.

A sub-chuck table holding a dressing board for dressing the cutting blade, and when the determination unit determines that the cutting blade requires dressing, the dressing board held on the sub-chuck table is cut by the cutting blade. It may be provided with a control unit to be operated.

In order to solve the above-mentioned problems and achieve the object, the cutting blade management method of the present invention is a cutting blade management method using the above-mentioned cutting device, and the work piece is defined by the cutting blade. A registration step for registering a threshold value which is a lower limit of the amount of wear when cutting a distance, and a wear for measuring the amount of wear of the cutting edge of the cutting blade during or before and after cutting the workpiece held on the chuck table. A quantity measuring step and a comparison step for comparing the amount of wear measured in the wear amount measuring step with the threshold value registered in the registration step are provided, and in the comparison step, the wear amount is registered in the registration step. It has a warning step that issues a warning if it falls below the threshold.

The warning step may prompt the dressing of the cutting blade.

The warning step may prompt the replacement of the cutting blade.

INDUSTRIAL APPLICABILITY According to the present invention, processing defects caused by clogging or clogging of a cutting blade can be suppressed.

FIG. 1 is a perspective view showing a configuration example of a cutting device according to the first embodiment. FIG. 2 is a cross-sectional view showing a configuration example of a main part of the cutting apparatus of FIG. FIG. 3 is a flowchart showing an example of a procedure for processing the cutting blade management method according to the first embodiment. FIG. 4 is a perspective view showing a configuration example of a main part of the cutting apparatus according to the second embodiment. FIG. 5 is a cross-sectional view showing a configuration example of a main part of the cutting device of FIG.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
The cutting apparatus 1 and the cutting blade management method according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the cutting device 1 according to the first embodiment. FIG. 2 is a cross-sectional view showing a configuration example of a main part of the cutting device 1 of FIG. As shown in FIG. 1, the cutting device 1 includes a chuck table 10, a sub-chuck table 15, a cutting unit 20, a detection unit 30, a notification unit 50, and a control unit 60.

The workpiece 100 to be cut by the cutting device 1 is, for example, a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, gallium arsenide, or the like. In the workpiece 100, a chip-sized device 103 is formed in a region partitioned by a plurality of scheduled division lines 102 formed in a grid pattern on a flat surface 101. In the workpiece 100, the adhesive tape 105 is attached to the back surface 104 on the back side of the front surface 101, and the annular frame 106 is attached to the outer edge of the adhesive tape 105. Further, in the present invention, the workpiece 100 may be a rectangular package substrate, a ceramic plate, a glass plate or the like having a plurality of devices sealed with resin.

The chuck table 10 holds the workpiece 100. The chuck table 10 has a disk-shaped suction portion having a flat holding surface 11 for holding the workpiece 100 formed on the upper surface and made of porous ceramic or the like having a large number of porous holes, and a suction portion having a suction portion at the center of the upper surface. It is a disk shape equipped with a frame body that is fitted and fixed in the recessed portion of the table. The holding surface 11 is formed parallel to the XY plane, which is a horizontal plane. In the chuck table 10, the suction portion is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and the workpiece 100 is sucked and held by the entire holding surface 11.

The chuck table 10 is movably provided in the X-axis direction, which is one direction in the horizontal direction, by the X-axis moving unit. A rotation drive unit (not shown) is connected to the chuck table 10, and the chuck table 10 can rotate around the Z axis orthogonal to the XY plane and parallel to the vertical direction by the rotation drive unit.

The sub-chuck table 15 is provided at a position adjacent to the chuck table 10 and sucks and holds the dressing board 200 on the holding surface 16. The dressing board 200 is used for dressing that is cut by a cutting blade 21 to remove the bond material covering the abrasive grains of the cutting blade 21 to project the abrasive grains and improve the processing quality.

As shown in FIG. 2, the cutting unit 20 includes a cutting blade 21, a spindle 22, and a cutting blade elevating portion 23. The cutting blade 21 has a cutting blade 21-1 provided on the outer peripheral edge. The cutting edge 21-1 is formed of, for example, abrasive grains such as diamond and CBN (Cubic Boron Nitride) and a bonding material (bonding material) such as metal and resin, and is formed to have a predetermined thickness. The cutting blade 21 spontaneously generates a blade as the cutting blade 21-1 wears as it is cut, and the sharpness of a certain level or more is always maintained. On the other hand, when the cutting blade 21 is clogged or clogged, the amount of wear becomes abnormally small due to the clogged or clogged, causing processing defects such as sudden chipping. There is a risk that it will end up.

The cutting blade 21 cuts the workpiece 100 held by the chuck table 10 by applying a rotational motion around the axis parallel to the Y-axis direction, which is another horizontal direction and orthogonal to the X-axis direction. do. The spindle 22 is provided with an axial center along the Y-axis direction, and supports the cutting blade 21 so as to be rotatable around the axial center at the tip. The spindle 22 is rotationally driven around the Y axis and becomes the rotation axis of the cutting blade 21. The cutting blade elevating portion 23 moves the spindle 22 in the Z-axis direction to elevate and elevate the cutting blade 21 supported by the tip of the spindle 22.

The cutting unit 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit with respect to the workpiece 100 held by the chuck table 10, and is orthogonal to the XY plane by the Z-axis moving unit in the vertical direction. It is provided so as to be movable in the parallel Z-axis direction.

The cutting unit 20 is scheduled to divide the cutting blade 21 with respect to the workpiece 100 held on the chuck table 10 by the X-axis moving unit, the Y-axis moving unit, and the Z-axis moving unit while rotating the cutting blade 21. The workpiece 100 is cut by the cutting blade 21 along the planned division line 102 by relatively moving along the 102.

As shown in FIG. 2, the detection unit 30 includes a sensor unit 31, a light source 35, a light receiving element 36, a photoelectric conversion unit 37, a voltage comparison unit 41, an end position detection unit 45, and a calculation unit 46. A position correction unit 47 and a determination unit 48 are provided. In the first embodiment, the sensor unit 31 of the detection unit 30 is installed below the cutting blade 21 of the cutting unit 20 as shown in FIGS. 1 and 2.

As shown in FIG. 2, the sensor unit 31 has a base portion 31-1 and a pair of side walls 31-2 erected from the base portion 31-1. The pair of side walls 31-2 are arranged at intervals in the Y-axis direction, and the distance between them has a width wider than the thickness of the cutting blade 21-1 of the cutting blade 21. The pair of side walls 31-2 form a groove portion 31-3 through which the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21 rotating between the side walls 31-2 can enter.

As shown in FIG. 2, the sensor unit 31 includes a light emitting unit 33 and a light receiving unit 34. As shown in FIG. 2, the light emitting unit 33 is provided on one side wall 31-2 and emits light toward the other side wall 31-2. As shown in FIG. 2, the light emitting unit 33 emits light from the light source 35 when the light source 35 is optically connected by an optical fiber or the like.

As shown in FIG. 2, the light receiving unit 34 is provided on the other side wall 31-2 at a position facing the light emitting unit 33, and receives the light from the light emitting unit 33. In the light receiving unit 34, the light receiving element 36 is optically connected by an optical fiber or the like, and the light receiving element 36 detects the light received by the light receiving unit 34. The light receiving element 36 is optically connected to the photoelectric conversion unit 37 by an optical fiber or the like, and sends the detected light to the photoelectric conversion unit 37.

The detection unit 30 has the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21 inserted between the light emitting portion 33 and the light receiving portion 34, that is, the groove portion 31-3, and the height of the lower end portion 21-2 ( By detecting the position in the groove portion 31-3 in the depth direction), the state of the cutting edge of the cutting blade 21-1 of the cutting blade 21 is detected. When the light emitting portion 33 and the light receiving portion 34 have the lower end portion 21-2, which is the lower cutting edge of the cutting blade 21-1 of the cutting blade 21, inserted into the groove portion 31-3, the cutting blade 21-1 of the cutting blade 21 It will be in a state of being arranged across.

The photoelectric conversion unit 37 outputs a voltage corresponding to the amount of light detected by the light receiving element 36 to the voltage comparison unit 41. The amount of light detected by the light receiving element 36 corresponds to the amount of light received by the light receiving unit 34. As the cutting blade 21-1 of the cutting blade 21 enters the groove portion 31-3, the amount of the cutting blade 21-1 of the cutting blade 21 blocking between the light emitting unit 33 and the light receiving unit 34 increases, and the photoelectric conversion unit 37 The output voltage from is gradually reduced. In the photoelectric conversion unit 37, when the amount of light received by the light receiving unit 34 reaches a predetermined amount, that is, the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21 is positioned at a predetermined position between the light emitting unit 33 and the light receiving unit 34. Is set so that the output voltage becomes the reference voltage when the voltage is reached. The predetermined position is set as, for example, a position where the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21 comes into contact with the upper surface of the holding surface 11.

The voltage comparison unit 41 includes a reference voltage setting unit 42 for setting the above-mentioned reference voltage. The voltage comparison unit 41 compares the output voltage from the photoelectric conversion unit 37 with the reference voltage set by the reference voltage setting unit 42, and when the output voltage from the photoelectric conversion unit 37 reaches the reference voltage, to that effect. The signal is output to the end position detection unit 45. When the above signal is output from the voltage comparison unit 41, the end position detection unit 45 determines the position of the cutting unit 20 acquired from the cutting blade elevating unit 23 in the Z-axis direction of the cutting blade 21-1 of the cutting blade 21. It is detected as a reference position (origin position) of the lower end portion 21-2. That is, in the end position detection unit 45, when the light receiving amount of the light receiving unit 34 reaches a predetermined light amount, that is, the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21 is the light emitting unit 33 and the light receiving unit 34. When the predetermined position is reached, the position of the cutting unit 20 acquired from the cutting blade elevating portion 23 in the Z-axis direction is detected as the reference position of the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21. The end position detection unit 45 outputs the detected reference position of the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21 to the calculation unit 46.

The calculation unit 46 calculates the correction amount of the position of the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21 in the Z-axis direction based on the reference position detected by the end position detection unit 45. The position correction unit 47 corrects the position of the lower end portion 21-2 of the cutting blade 21-1 of the cutting blade 21 in the Z-axis direction based on the correction amount calculated by the calculation unit 46.

The voltage comparison unit 41 also functions as a wear amount measuring unit 43 that measures the wear amount of the cutting blade 21 from the change in the light receiving amount of the light receiving unit 34. The voltage comparison unit 41, which functions as the wear amount measuring unit 43, cuts a predetermined amount with the cutting blade 21, for example, based on the amount of change in the light receiving amount of the light receiving unit 34 before and after cutting the predetermined amount with the cutting blade 21. The amount of wear of the cutting blade 21 is measured. Here, the predetermined amount is appropriately set according to the type of the workpiece 100, the type of the cutting blade 21, the distance and depth that the cutting blade 21 cuts, the number of scheduled division lines 102, and the like. It is set by the cutting distance with the blade 21. The voltage comparison unit 41, which functions as the wear amount measuring unit 43, outputs the measured wear amount information of the cutting blade 21 to the determination unit 48.

The determination unit 48 determines the state of the cutting blade 21 based on the measurement result of the wear amount measuring unit 43. Here, the state of the cutting blade 21 to be determined by the determination unit 48 is, in the first embodiment, a state of whether or not the cutting of the workpiece 100 by the cutting blade 21 should be stopped. When the amount of wear measured by the amount of wear measuring unit 43 does not reach a predetermined value, the determination unit 48 considers that the amount of wear of the cutting blade 21 on which the amount of wear has been measured is abnormally small, and is covered by the cutting blade 21. It is determined that the cutting of the workpiece 100 should be stopped, and the determination result is output to the notification unit 50. Further, when the wear amount measured by the wear amount measuring unit 43 reaches a predetermined value, the determination unit 48 is not in a state where the wear amount of the cutting blade 21 on which the wear amount is measured is abnormally small, and the wear amount is not abnormally small. It is determined that there is no problem even if the cutting of the workpiece 100 by the cutting blade 21 is continued.

In the cutting device 1, if the cutting blade 21 is clogged or clogged, the amount of wear of the cutting blade 21 becomes abnormally small. Therefore, the determination unit 48 determines that the amount of wear of the cutting blade 21 is abnormal. By determining that the cutting blade 21 is small, it can be determined that the cutting blade 21 may be clogged or clogged.

The determination unit 48 includes a threshold value registration unit 49 that registers a threshold value that is a lower limit of the amount of wear of the cutting blade 21. Here, in the first embodiment, the threshold value that is the lower limit of the wear amount of the cutting blade 21 is empirically recognized according to the type of the workpiece 100, the type of the cutting blade 21, and the cutting distance. It is set based on the amount of wear of. Further, in the first embodiment, the threshold value which is the lower limit value of the wear amount of the cutting blade 21 is set for each type of the workpiece 100 and the type of the cutting blade 21.

In the first embodiment, the determination unit 48 determines that the wear amount measured by the wear amount measurement unit 43 is less than the threshold value registered by the threshold value registration unit 49. Is determined when does not reach a predetermined value. Further, when the wear amount measured by the wear amount measuring unit 43 is equal to or more than the threshold value registered by the threshold value registration unit 49, the determination unit 48 determines the wear amount measured by the wear amount measuring unit 43 described above. It is determined that the value has been reached.

When the determination unit 48 determines that the cutting of the workpiece 100 by the cutting blade 21 should be stopped, in the first embodiment, it further determines that the cutting blade 21 needs dressing, or the determination unit 48 It is determined that the cutting blade 21 needs to be replaced. In the first embodiment, the determination unit 48 determines that the cutting edge 21-1 of the cutting blade 21 that is determined to be in a state where the cutting of the workpiece 100 should be stopped remains even if the workpiece is worn by dressing. When it is an amount that can be used for cutting 100, it is determined that the cutting blade 21 needs dressing, and the remaining amount of the cutting blade 21-1 is an amount that cannot be used for cutting the workpiece 100 if it is worn by the dressing. In this case, it is determined that the cutting blade 21 needs to be replaced.

In the first embodiment, the voltage comparison unit 41, the end position detection unit 45, the calculation unit 46, the position correction unit 47, and the determination unit 48, which are the functional units of the detection unit 30, include a computer system. The functional units of these detection units 30 include an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit) and a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory). , With an input / output interface device. The arithmetic processing unit executes arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the detection unit 30 to each component of the detection unit 30 via the input / output interface device. do. The arithmetic processing unit receives the conditions for each processing of the detection unit 30 input from the operator to the input device (not shown) via the input / output interface device.

In the first embodiment, the arithmetic processing unit of the functional unit of the detection unit 30 is stored in the storage device for each function of the voltage comparison unit 41, the end position detection unit 45, the calculation unit 46, the position correction unit 47, and the determination unit 48. It is realized by executing the stored computer program. In the first embodiment, the reference voltage setting unit 42 of the voltage comparison unit 41 and the threshold value registration unit 49 of the determination unit 48 are realized by the storage device of the functional unit of the detection unit 30 described above.

When the determination unit 48 determines that the cutting of the workpiece 100 by the cutting blade 21 should be stopped, the notification unit 50 notifies the warning information to that effect of the determination result. In the first embodiment, the warning information notified by the notification unit 50 is based on a further determination result of the determination unit 48. For example, the cutting determined by the determination unit 48 to stop cutting the workpiece 100. Information to encourage dressing of the blade 21 and information to encourage replacement of the cutting blade 21.

In the first embodiment, the notification unit 50 includes a display unit 51 and an indicator light 52. The display unit 51 is composed of a liquid crystal display device or the like that displays a state of processing operation, an image, or the like. The display unit 51 is controlled by the control unit 60 to switch the image to be displayed. The display unit 51 displays the determination result of the determination unit 48 and notifies the operator of the cutting device 1. The indicator lamp 52 is composed of a light emitting diode or the like. The indicator light 52 is turned on by being controlled by the control unit 60. When the indicator light 52 is turned on, the determination result of the determination unit 48 is notified to the operator of the cutting device 1. The notification unit 50 is not limited to this in the present invention, and may also include a voice unit composed of a speaker or the like and transmitting voice.

The control unit 60 controls each component of the cutting device 1. The control unit 60 realizes a cutting process by the cutting blade 21 of the cutting unit 20. The control unit 60 cuts the workpiece 100 with the cutting blade 21 according to, for example, the cutting conditions of the workpiece 100 input and set by the operator. When the determination unit 48 determines that the cutting of the workpiece 100 by the cutting blade 21 should be stopped, and further determines that the cutting blade 21 needs dressing, the control unit 60 sets the sub-chuck table 15. By cutting the held dressing board 200 with the cutting blade 21, the cutting blade 21 is dressed.

The control unit 60 includes a computer system in the first embodiment. The control unit 60 includes an arithmetic processing unit having a microprocessor such as a CPU, a storage device having a memory such as ROM or RAM, and an input / output interface device. The arithmetic processing device executes arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the cutting device 1 to each component of the cutting device 1 via an input / output interface device. do. The arithmetic processing device receives the conditions of each processing of the cutting device 1 input from the operator to the input device (not shown) via the input / output interface device.

The computer of the functional unit of the detection unit 30 and the computer of the control unit 60 may be separate or integrated.

Next, this specification describes an example of the procedure of the processing of the cutting blade management method, which is an example of the operation of the cutting apparatus 1 according to the first embodiment, based on the drawings. FIG. 3 is a flowchart showing an example of a procedure for processing the cutting blade management method according to the first embodiment. As shown in FIG. 3, the cutting blade management method according to the first embodiment includes a registration step 1001, a wear amount measurement step 1002, a comparison step 1003, and a warning step 1005.

As for the cutting blade management method according to the first embodiment, is it appropriate that the cutting blade 21 mounted on the cutting unit 20 and used for the cutting process is further continuously used for cutting the workpiece 100? Whether or not it is determined, and a predetermined action is urged to the cutting blade 21 based on the determination result. The cutting blade management method according to the first embodiment is periodically carried out according to the use of the cutting blade 21, and may be carried out every time a predetermined amount is cut by the cutting blade 21, for example, one piece of covering. It may be performed every time all scheduled division lines 102 of the workpiece 100 are cut, or every time all scheduled division lines 102 of one lot (for example, 25 sheets) of the workpiece 100 are cut. May be good.

Before implementing the cutting blade management method according to the first embodiment, the cutting blade 21 by the voltage comparison unit 41, the reference voltage setting unit 42, the end position detection unit 45, the calculation unit 46, and the position correction unit 47 is previously used. The position of the lower end portion 21-2 of the cutting edge 21-1 in the Z-axis direction is corrected. This correction enables the voltage comparison unit 41, which functions as the wear amount measuring unit 43, to accurately measure the wear amount of the cutting edge of the cutting blade 21.

The registration step 1001 is a step in which the threshold value registration unit 49 registers a threshold value that is a lower limit of the amount of wear when the workpiece 100 is cut by the cutting blade 21 by a predetermined distance. In the registration step 1001, the threshold value registration unit 49 registers the threshold value of the amount of wear based on, for example, an input setting by the operator.

In the wear amount measurement step 1002, the voltage comparison unit 41, which functions as the wear amount measurement unit 43, measures the wear amount of the cutting edge of the cutting blade 21 during or before and after cutting the workpiece 100 held by the chuck table 10. It is a step to do. In the wear amount measurement step 1002, the voltage comparison unit 41, which functions as the wear amount measurement unit 43, cuts the workpiece 100 based on the amount of change in the light receiving amount before and after cutting the workpiece 100 by a predetermined distance. The amount of wear of the cutting edge 21-1 of the cutting blade 21 by cutting the workpiece 100 with the blade 21 by a predetermined distance is measured. In the wear amount measurement step 1002, the voltage comparison unit 41, which functions as the wear amount measurement unit 43, outputs the measured wear amount information to the determination unit 48.

The comparison step 1003 is a step in which the determination unit 48 compares the wear amount measured in the wear amount measurement step 1002 with the threshold value registered in the registration step 1001. In the comparison step 1003, when the wear amount measured in the wear amount measurement step 1002 is equal to or greater than the threshold value registered in the registration step 1001, the determination unit 48 has an abnormality in the wear amount of the cutting blade 21 in which the wear amount is measured. It is determined that the cutting blade 21 is not in a small state and there is no problem even if the cutting of the workpiece 100 is continued (No in step 1004 of FIG. 3), and the processing of the cutting blade management method is completed. ..

In the comparison step 1003, when the wear amount measured in the wear amount measurement step 1002 is less than the threshold value registered in the registration step 1001, the determination unit 48 abnormally wears the cutting blade 21 in which the wear amount is measured. Assuming that it is small, it is determined that the cutting of the workpiece 100 by the cutting blade 21 should be stopped (Yes in step 1004 of FIG. 3), and this determination result is output to the notification unit 50 to manage the cutting blade. The process of is advanced to the warning step 1005.

In the comparison step 1003, when the determination unit 48 determines that the cutting of the workpiece 100 by the cutting blade 21 should be stopped, in the first embodiment, it is further determined that the cutting blade 21 needs dressing. Or, it is determined that the cutting blade 21 needs to be replaced, and these determination results are also output to the notification unit 50.

The warning step 1005 is a step in which the notification unit 50 issues a warning when the wear amount measured in the wear amount measurement step 1002 is less than the threshold value registered in the registration step 1001 in the comparison step 1003. The warning step 1005 is performed when the notification unit 50 is Yes in step 1004 of FIG.

Warning In step 1005, when the determination unit 48 determines that the cutting blade 21 needs dressing in the comparison step 1003, the notification unit 50 notifies the operator to prompt the operator to dress the cutting blade 21. Further, in the warning step 1005, when the determination unit 48 determines in the comparison step 1003 that the cutting blade 21 needs to be replaced, the notification unit 50 notifies the operator to prompt the operator to replace the cutting blade 21.

Further, in the cutting blade management method according to the first embodiment, when the determination unit 48 determines that the cutting blade 21 needs dressing in the comparison step 1003, the notification unit 50 dresses the cutting blade 21 in the warning step 1005. The cutting blade 21 is notified by the control unit 60 to cut the dressing board 200 held by the sub-chuck table 15 with the cutting blade 21 instead of notifying the operator to prompt the operator. May be dressed.

In the cutting device 1 and the cutting blade management method according to the first embodiment having the above configuration, when the measured amount of wear of the cutting blade 21 does not reach a predetermined threshold, the determination unit 48 is covered by the cutting blade 21. It is determined that the cutting of the workpiece 100 should be stopped, and the notification unit 50 notifies that fact. Therefore, in the method of managing the cutting device 1 and the cutting blade according to the first embodiment, the cutting blade 21 is clogged or clogged by determining a state in which the amount of wear is abnormally small. Since it can be determined that there is a possibility and the cutting of the workpiece 100 by the cutting blade 21 can be stopped according to this determination result, processing defects such as sudden chipping due to clogging or clogging of the cutting blade 21 can be stopped. It has the effect of being able to suppress.

Further, the cutting device 1 and the cutting blade management method according to the first embodiment correspond to the remaining amount of the cutting blade 21-1 of the cutting blade 21 when the measured amount of wear of the cutting blade 21 does not reach a predetermined threshold value. Therefore, the dressing of the cutting blade 21 can be urged, and the replacement of the cutting blade 21 can be urged. Therefore, the cutting device 1 and the cutting blade management method according to the first embodiment further have an effect of being able to promote an appropriate response according to the determination result of the state of the cutting blade 21.

Further, in the method of managing the cutting device 1 and the cutting blade according to the first embodiment, when the measured amount of wear of the cutting blade 21 does not reach a predetermined threshold value, the dressing board 200 held on the sub-chuck table 15 is used as the cutting blade. By cutting with 21, by dressing the cutting blade 21, the working object 100 can be quickly cut by the cutting blade 21.

[Embodiment 2]
The cutting apparatus 1-2 and the cutting blade management method according to the second embodiment of the present invention will be described with reference to the drawings. FIG. 4 is a perspective view showing a configuration example of a main part of the cutting device 1-2 according to the second embodiment. FIG. 5 is a cross-sectional view showing a configuration example of a main part of the cutting device 1-2 of FIG. In FIGS. 4 and 5, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

As shown in FIGS. 4 and 5, the cutting device 1-2 according to the second embodiment changes the cutting unit 20 to the cutting unit 20-2 in the cutting device 1 according to the first embodiment, and detects the detection unit 30. It was changed to unit 30-2.

As shown in FIGS. 4 and 5, the cutting unit 20-2 includes a cutting blade 21, a spindle 22, a blade cover 25, a water supply nozzle 26, a water supply source connecting portion 27, and an elevating portion 29. .. The blade cover 25 is provided on the tip end side of the spindle 22 and covers the upper side, the front side, and the rear side of the cutting blade 21. A plurality of water channels are formed in the blade cover 25, a water supply nozzle 26 is provided at one end on the lower side of the plurality of water channels, and a water supply source connection portion 27 is provided at the other end on the upper side of the plurality of water channels. Has been done. The water supply nozzle 26 supplies the cutting water supplied from the water supply source connecting portion 27 to the front and side of the cutting blade 21-1 of the cutting blade 21 and to the workpiece 100 further in front of the cutting blade 21-1. do. The cutting water is, for example, pure water.

In the detection unit 30-2, the reference voltage setting unit 42, the end position detection unit 45, the calculation unit 46, and the position correction unit 47 are omitted in the detection unit 30. In the second embodiment, the sensor unit 31 of the detection unit 30-2 is installed above the cutting blade 21 of the cutting unit 20-2, as shown in FIGS. 4 and 5. Specifically, the sensor unit 31 is installed at a position facing the upper end portion 21-3, which is the cutting edge above the cutting blade 21 of the blade cover 25.

The elevating unit 29 moves the sensor unit 31 of the detection unit 30-2 in the Z-axis direction to move the sensor unit 31 in a direction approaching or separating from the upper end portion 21-3 of the cutting blade 21.

In the detection unit 30-2, the sensor unit 31 is brought closer to the upper end portion 21-3 of the cutting blade 21 by the elevating unit 29, and the cutting blade 21 is placed between the light emitting unit 33 and the light receiving unit 34, that is, in the groove portion 31-3. The cutting edge 21- of the cutting blade 21 is detected by inserting the upper end portion 21-3 of the cutting blade 21-1 and detecting the height of the upper end portion 21-3 (position in the depth direction in the groove portion 31-3). Detects the state of the cutting edge of 1. The light emitting portion 33 and the light receiving portion 34 are arranged so as to sandwich the cutting blade 21-1 of the cutting blade 21 when the upper end portion 21-3 of the cutting blade 21-1 of the cutting blade 21 is inserted into the groove portion 31-3. It will be in a state of being.

The cutting device 1-2 and the cutting blade management method according to the second embodiment are obtained by changing the cutting unit 20 to the cutting unit 20-2 and changing the detection unit 30 to the detection unit 30-2 in the first embodiment. Instead of detecting the height of the lower end portion 21-2 of the cutting blade 21, the height of the upper end portion 21-3 of the cutting blade 21 is detected. Therefore, the cutting device 1-2 and the cutting blade management method according to the second embodiment have the same effects as those of the first embodiment.

In the method of managing the cutting device 1-2 and the cutting blade according to the second embodiment, the state of the cutting edge 21-1 of the cutting blade 21 of the cutting blade 21 is further determined by the detection unit 30-2 even while the workpiece 100 is being cut. Since it can be detected, it has an effect that it is possible to determine whether or not it is appropriate for the cutting blade 21 during cutting to be continuously used for cutting the workpiece 100.

The present invention is not limited to the above embodiment. That is, it can be modified in various ways without departing from the gist of the present invention. For example, in the above embodiment, a lower limit value of the amount of wear is provided to notify when the lower limit value is exceeded, but in the present invention, an upper limit value of the amount of wear is also provided to notify when the upper limit value is exceeded. It may have a function to do.

1,1-2 Cutting device 10 Chuck table 15 Sub-chuck table 20,20-2 Cutting unit 21 Cutting blade 21-1 Cutting blade 22 Spindle 30,30-2 Detection unit 33 Light emitting part 34 Light receiving part 43 Abrasion amount measuring part 48 Judgment unit 49 Threshold registration unit 50 Notification unit 60 Control unit 100 Work piece 200 Dressing board

Claims (5)

A chuck table that holds the work piece and
A cutting unit that cuts the workpiece held on the chuck table with a cutting blade mounted on the spindle, and
A detection unit that detects the state of the cutting edge of the cutting blade, and
A notification unit for notifying the detection result of the detection unit is provided.
The detection unit is
It has a light emitting part and a light receiving part arranged so as to sandwich the cutting edge on the outer periphery of the cutting blade.
A wear amount measuring unit that measures the wear amount of the cutting blade from a change in the light receiving amount of the light receiving unit, and a wear amount measuring unit.
A determination unit for determining the state of the cutting blade based on the measurement result of the wear amount measuring unit is provided.
When the measured amount of wear does not reach a predetermined value, the determination unit determines that the cutting of the workpiece by the cutting blade should be stopped.
The notification unit is a cutting device that notifies the determination result of the determination unit. A sub-chuck table holding a dressing board for dressing the cutting blade,
When the determination unit determines that the cutting blade requires dressing, a control unit for cutting the dressing board held on the sub-chuck table with the cutting blade.
The cutting apparatus according to claim 1. A method for managing a cutting blade using the cutting device according to claim 1.
A registration step for registering a threshold value which is a lower limit of the amount of wear when the workpiece is cut by a predetermined distance with the cutting blade, and
A wear amount measuring step for measuring the amount of wear on the cutting edge of the cutting blade during or before and after cutting the workpiece held on the chuck table.
A comparison step for comparing the wear amount measured in the wear amount measurement step with the threshold value registered in the registration step is provided.
A method of managing a cutting blade, comprising a warning step of issuing a warning when the amount of wear falls below the threshold value registered in the registration step in the comparison step. The cutting blade management method according to claim 3, wherein in the warning step, dressing of the cutting blade is promoted. The cutting blade management method according to claim 3, wherein the warning step prompts the replacement of the cutting blade.

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