JP2021163823A5 - - Google Patents

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Publication number
JP2021163823A5
JP2021163823A5 JP2020062496A JP2020062496A JP2021163823A5 JP 2021163823 A5 JP2021163823 A5 JP 2021163823A5 JP 2020062496 A JP2020062496 A JP 2020062496A JP 2020062496 A JP2020062496 A JP 2020062496A JP 2021163823 A5 JP2021163823 A5 JP 2021163823A5
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JP
Japan
Prior art keywords
pressure
fluid
regulating valve
chamber
pressure regulating
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JP2020062496A
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English (en)
Japanese (ja)
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JP7430902B2 (ja
JP2021163823A (ja
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Priority to JP2020062496A priority Critical patent/JP7430902B2/ja
Priority claimed from JP2020062496A external-priority patent/JP7430902B2/ja
Priority to PCT/JP2021/002169 priority patent/WO2021199611A1/ja
Publication of JP2021163823A publication Critical patent/JP2021163823A/ja
Publication of JP2021163823A5 publication Critical patent/JP2021163823A5/ja
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Publication of JP7430902B2 publication Critical patent/JP7430902B2/ja
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JP2020062496A 2020-03-31 2020-03-31 ウェハ処理装置、及び流体排出装置 Active JP7430902B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020062496A JP7430902B2 (ja) 2020-03-31 2020-03-31 ウェハ処理装置、及び流体排出装置
PCT/JP2021/002169 WO2021199611A1 (ja) 2020-03-31 2021-01-22 ウェハ処理装置、流体排出装置、流体供給装置、及び流体供給方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020062496A JP7430902B2 (ja) 2020-03-31 2020-03-31 ウェハ処理装置、及び流体排出装置

Publications (3)

Publication Number Publication Date
JP2021163823A JP2021163823A (ja) 2021-10-11
JP2021163823A5 true JP2021163823A5 (https=) 2023-03-31
JP7430902B2 JP7430902B2 (ja) 2024-02-14

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ID=78003671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020062496A Active JP7430902B2 (ja) 2020-03-31 2020-03-31 ウェハ処理装置、及び流体排出装置

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JP (1) JP7430902B2 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005142301A (ja) 2003-11-05 2005-06-02 Kobe Steel Ltd 高圧処理方法、及び高圧処理装置
JP4649322B2 (ja) 2005-12-02 2011-03-09 株式会社レクザム 超臨界流体洗浄装置
JP2012049446A (ja) * 2010-08-30 2012-03-08 Toshiba Corp 超臨界乾燥方法及び超臨界乾燥システム
JP5458314B2 (ja) * 2011-06-30 2014-04-02 セメス株式会社 基板処理装置及び超臨界流体排出方法

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