JP2021129024A5 - - Google Patents

Download PDF

Info

Publication number
JP2021129024A5
JP2021129024A5 JP2020022759A JP2020022759A JP2021129024A5 JP 2021129024 A5 JP2021129024 A5 JP 2021129024A5 JP 2020022759 A JP2020022759 A JP 2020022759A JP 2020022759 A JP2020022759 A JP 2020022759A JP 2021129024 A5 JP2021129024 A5 JP 2021129024A5
Authority
JP
Japan
Prior art keywords
substrate
container body
sensor
contact pin
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020022759A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021129024A (ja
JP7467152B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2020022759A priority Critical patent/JP7467152B2/ja
Priority claimed from JP2020022759A external-priority patent/JP7467152B2/ja
Priority to US17/168,555 priority patent/US11984332B2/en
Publication of JP2021129024A publication Critical patent/JP2021129024A/ja
Publication of JP2021129024A5 publication Critical patent/JP2021129024A5/ja
Application granted granted Critical
Publication of JP7467152B2 publication Critical patent/JP7467152B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2020022759A 2020-02-13 2020-02-13 収容容器及び基板状センサの充電方法 Active JP7467152B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020022759A JP7467152B2 (ja) 2020-02-13 2020-02-13 収容容器及び基板状センサの充電方法
US17/168,555 US11984332B2 (en) 2020-02-13 2021-02-05 Container and method for charging substrate-like sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020022759A JP7467152B2 (ja) 2020-02-13 2020-02-13 収容容器及び基板状センサの充電方法

Publications (3)

Publication Number Publication Date
JP2021129024A JP2021129024A (ja) 2021-09-02
JP2021129024A5 true JP2021129024A5 (https=) 2023-01-31
JP7467152B2 JP7467152B2 (ja) 2024-04-15

Family

ID=77273061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020022759A Active JP7467152B2 (ja) 2020-02-13 2020-02-13 収容容器及び基板状センサの充電方法

Country Status (2)

Country Link
US (1) US11984332B2 (https=)
JP (1) JP7467152B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11924972B2 (en) 2020-06-02 2024-03-05 Applied Materials, Inc. Diagnostic disc with a high vacuum and temperature tolerant power source
US11589474B2 (en) 2020-06-02 2023-02-21 Applied Materials, Inc. Diagnostic disc with a high vacuum and temperature tolerant power source
TWI899491B (zh) * 2021-08-04 2025-10-01 日商東京威力科創股份有限公司 收容容器及基板狀感測器之充電方法
JP7648310B2 (ja) * 2021-08-04 2025-03-18 東京エレクトロン株式会社 収容容器及び基板状センサの充電方法
US11817724B2 (en) 2022-03-02 2023-11-14 Applied Materials, Inc. Enclosure system with charging assembly
KR102748315B1 (ko) * 2022-09-28 2024-12-31 주식회사 저스템 웨이퍼 용기의 습도 및 온도 센싱 장치
KR102765965B1 (ko) * 2023-02-20 2025-02-07 이규옥 Oht로 이동 가능한 foup 내의 로봇감지 레이저 센서 시스템의 위치 판정 장치
US12562351B2 (en) 2024-01-30 2026-02-24 Applied Materials, Inc. Extreme edge sheath tunability with non-movable edge ring

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3939101B2 (ja) 2000-12-04 2007-07-04 株式会社荏原製作所 基板搬送方法および基板搬送容器
US7282889B2 (en) * 2001-04-19 2007-10-16 Onwafer Technologies, Inc. Maintenance unit for a sensor apparatus
US7289230B2 (en) 2002-02-06 2007-10-30 Cyberoptics Semiconductors, Inc. Wireless substrate-like sensor
US6781205B1 (en) * 2002-10-11 2004-08-24 Ion Systems, Inc. Electrostatic charge measurement on semiconductor wafers
JP3916549B2 (ja) 2002-10-31 2007-05-16 東京エレクトロン株式会社 プロセスモニタ及び半導体製造装置
US7151366B2 (en) 2002-12-03 2006-12-19 Sensarray Corporation Integrated process condition sensing wafer and data analysis system
TWI268429B (en) 2003-11-29 2006-12-11 Onwafer Technologies Inc Systems, maintenance units and substrate processing systems for wirelessly charging and wirelessly communicating with sensor apparatus as well as methods for wirelessly charging and communicating with sensor apparatus
US20110074341A1 (en) 2009-09-25 2011-03-31 Kla- Tencor Corporation Non-contact interface system
US9356822B2 (en) 2012-10-30 2016-05-31 Kla-Tencor Corporation Automated interface apparatus and method for use in semiconductor wafer handling systems
US11569138B2 (en) 2015-06-16 2023-01-31 Kla Corporation System and method for monitoring parameters of a semiconductor factory automation system
JP7037379B2 (ja) * 2018-02-06 2022-03-16 ローツェ株式会社 薄板状基板保持装置、及び保持装置を備える搬送ロボット
US10916464B1 (en) * 2019-07-26 2021-02-09 Applied Materials, Inc. Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
US12237189B2 (en) * 2019-11-19 2025-02-25 Micron Technology, Inc. Wafer storage devices configured to measure physical properties of wafers stored therein

Similar Documents

Publication Publication Date Title
JP2021129024A5 (https=)
US6336567B1 (en) Magnetic secured container closure with release by movement of magnetic member
US4852591A (en) Apparatus for the care of contact lenses
US10919009B2 (en) Automatic stirring cup
JP7467152B2 (ja) 収容容器及び基板状センサの充電方法
CN203263008U (zh) 加热烹调器
CN218304382U (zh) 一种具有消毒杯盖的加热搅拌杯
CN220669970U (zh) 一种高碳链粒状黄药干燥装置
CN216710109U (zh) 一种电子器件储存装置
JP3557535B2 (ja) 電動自転車のバッテリによる駆動電動機の通電及び充電装 置
CN213398119U (zh) 一种用于药物内包材料的光照实验装置
US20020027138A1 (en) Magnetic secured container closure with release by movement of magnetic member
CN213721269U (zh) 一种电动醒酒装置
CN213684587U (zh) 一种分体式移动风扇
CN214622678U (zh) 一种新型血糖试纸储存盒
JPH10284032A (ja) バッテリー支持装置
CN214595594U (zh) 便携式磁力搅拌器
CN222830304U (zh) 一种夹持装置及清洗设备
CN223746242U (zh) 一种便携式搅拌器
CN216570896U (zh) 一种便携式肿瘤内科护理用具消毒装置
CN213464335U (zh) 一种可充电的旋转床头放置柜
CN218752425U (zh) 一种储存罐盖及储存罐
CN214843407U (zh) 一种计算机温湿度环境检测试验箱
CN217919269U (zh) 一种油漆存储装置
CN215588890U (zh) 一种智能对话陪伴机器人