JP2021126040A5 - - Google Patents

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JP2021126040A5
JP2021126040A5 JP2020203785A JP2020203785A JP2021126040A5 JP 2021126040 A5 JP2021126040 A5 JP 2021126040A5 JP 2020203785 A JP2020203785 A JP 2020203785A JP 2020203785 A JP2020203785 A JP 2020203785A JP 2021126040 A5 JP2021126040 A5 JP 2021126040A5
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Japan
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movable element
sensors
coefficient
region
area
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JP2020203785A
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Japanese (ja)
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JP7625411B2 (ja
JP2021126040A (ja
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Priority to US17/146,797 priority Critical patent/US11472638B2/en
Priority to CN202110160793.3A priority patent/CN113247592B/zh
Publication of JP2021126040A publication Critical patent/JP2021126040A/ja
Publication of JP2021126040A5 publication Critical patent/JP2021126040A5/ja
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JP2020203785A 2020-02-07 2020-12-08 搬送装置、生産システム、及び物品の製造方法 Active JP7625411B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US17/146,797 US11472638B2 (en) 2020-02-07 2021-01-12 Conveyance apparatus, production system, and method for manufacturing article
CN202110160793.3A CN113247592B (zh) 2020-02-07 2021-02-05 输送设备、生产系统以及用于制造物品的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020019511 2020-02-07
JP2020019511 2020-02-07

Publications (3)

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JP2021126040A JP2021126040A (ja) 2021-08-30
JP2021126040A5 true JP2021126040A5 (https=) 2023-12-12
JP7625411B2 JP7625411B2 (ja) 2025-02-03

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JP2020203785A Active JP7625411B2 (ja) 2020-02-07 2020-12-08 搬送装置、生産システム、及び物品の製造方法

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JP (1) JP7625411B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7834464B2 (ja) * 2021-12-13 2026-03-24 キヤノン株式会社 搬送装置
JP2023174388A (ja) * 2022-05-27 2023-12-07 キヤノン株式会社 搬送システム、成膜装置、搬送システムの制御方法及び物品の製造方法
CN115822410A (zh) * 2022-12-19 2023-03-21 杭州双星五金有限公司 一种直线电机型移门控制装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4314555B2 (ja) 2002-12-03 2009-08-19 株式会社ニコン リニアモータ装置、ステージ装置、及び露光装置
JP2006201092A (ja) 2005-01-21 2006-08-03 Yaskawa Electric Corp ６自由度移動体の位置・姿勢計測方法および位置・姿勢計測装置
JP7259198B2 (ja) 2018-03-23 2023-04-18 株式会社東京精密 表面形状測定装置

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