JP2021123096A - Liquid discharge head and manufacturing method of the same - Google Patents

Liquid discharge head and manufacturing method of the same Download PDF

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JP2021123096A
JP2021123096A JP2020020590A JP2020020590A JP2021123096A JP 2021123096 A JP2021123096 A JP 2021123096A JP 2020020590 A JP2020020590 A JP 2020020590A JP 2020020590 A JP2020020590 A JP 2020020590A JP 2021123096 A JP2021123096 A JP 2021123096A
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cover member
discharge head
liquid discharge
adhesive
recording element
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JP7475882B2 (en
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新平 大▲高▼
Shinpei Otaka
新平 大▲高▼
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Canon Inc
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Abstract

To provide a liquid discharge head in which a plate-like cover member is disposed around a recording element substrate including at least a discharge port for discharging a liquid and which prevents a resin sealing a gap between the recording element substrate and the cover member from oozing on a surface of the cover member.SOLUTION: A recording element substrate 101 and a cover member 103 are joined to a first surface of a support substrate 102 so that the cover member 103 protrudes farther, and a sealing resin 104 is provided so as to fill a gap formed between the recording element substrate 101 and the cover member 103. At least a part of a side surface of the cover member 103 facing the gap between the recording element substrate 101 and the cover member 103 is covered with a solid material different from the sealing resin 104.SELECTED DRAWING: Figure 3

Description

本発明は、記録媒体などに対して吐出口から液体を吐出する液体吐出ヘッドとその製造方法とに関する。 The present invention relates to a liquid discharge head that discharges a liquid from a discharge port to a recording medium or the like, and a method for manufacturing the same.

液体吐出ヘッドには、液体に吐出のためのエネルギーを付与する記録素子の上方に向けて液体を吐出するサイドシューター型のものがある。この種の液体吐出ヘッドでは、記録素子と吐出口とが形成された記録素子基板が支持基板上に接合され、支持基板から記録素子基板が突出する。記録素子基板が支持基板から突出していると、記録媒体を搬送しているときに搬送の不具合によって記録媒体が液体吐出ヘッドに接触したときや、液体吐出ヘッド自体が落下したときに、記録素子基板が破損するおそれがある。そこで特許文献1は、支持基板からの突出量が記録素子基板よりも大きいカバー部材を支持基板上において記録素子基板を取り囲むように配置した液体吐出ヘッドを開示している。この液体吐出ヘッドでは、カバー部材が記録素子基板よりも突出しているので、物体の接触による記録素子基板の破損のおそれが軽減する。 The liquid discharge head includes a side shooter type that discharges the liquid toward the upper side of the recording element that applies energy for discharging the liquid. In this type of liquid discharge head, the recording element substrate on which the recording element and the discharge port are formed is joined onto the support substrate, and the recording element substrate protrudes from the support substrate. If the recording element substrate protrudes from the support substrate, the recording element substrate is present when the recording medium comes into contact with the liquid discharge head due to a transfer defect while the recording medium is being conveyed, or when the liquid discharge head itself is dropped. May be damaged. Therefore, Patent Document 1 discloses a liquid discharge head in which a cover member having a larger amount of protrusion from the support substrate than the recording element substrate is arranged on the support substrate so as to surround the recording element substrate. In this liquid discharge head, since the cover member protrudes from the recording element substrate, the risk of damage to the recording element substrate due to contact with an object is reduced.

特開2017−209942号公報JP-A-2017-209942

記録素子基板の周囲にカバー部材を配置した液体吐出ヘッドでは、記録素子基板とカバー部材との隙間を封止するためにこの隙間に封止用の樹脂を塗布して硬化させるときに、この樹脂がカバー部材の表面に滲み出て硬化することがある。カバー部材の表面に付着して硬化した樹脂は、記録素子基板の表面のクリーニング時などに剥離して吐出口に侵入し、吐出不良の原因となるおそれがある。 In a liquid discharge head in which a cover member is arranged around a recording element substrate, this resin is used when a sealing resin is applied to the gap between the recording element substrate and the cover member and cured. May seep out onto the surface of the cover member and harden. The resin that adheres to the surface of the cover member and is hardened may peel off when cleaning the surface of the recording element substrate and enter the discharge port, which may cause a discharge failure.

本発明の目的は、記録素子基板の周囲にカバー部材を配置した液体吐出ヘッドであって、記録素子基板とカバー部材との間を封止する樹脂がカバー部材の表面に滲み出す恐れを抑制可能な液体吐出ヘッドとその製造方法とを提供することにある。 An object of the present invention is a liquid discharge head in which a cover member is arranged around a recording element substrate, and it is possible to suppress the possibility that a resin sealing between the recording element substrate and the cover member exudes to the surface of the cover member. It is an object of the present invention to provide a liquid discharge head and a method for manufacturing the same.

本発明の液体吐出ヘッドは、
支持基板と、
液体を吐出する吐出口を少なくとも備えて前記支持基板の第1の表面に接合された記録素子基板と、
前記第1の表面において前記記録素子基板を取り囲むように配置されて前記第1の表面に接合されたカバー部材と、前記第1の表面において前記記録素子基板と前記カバー部材との隙間を充填するように設けられた封止用樹脂と、
を有し、前記隙間に面する前記カバー部材の側面の少なくとも一部が、前記封止用樹脂とは異なる固体物によって被覆されていることを特徴とする。
The liquid discharge head of the present invention
Support board and
A recording element substrate bonded to the first surface of the support substrate having at least a discharge port for discharging a liquid, and a recording element substrate.
The cover member arranged so as to surround the recording element substrate on the first surface and joined to the first surface, and the gap between the recording element substrate and the cover member are filled on the first surface. With the sealing resin provided in the above
At least a part of the side surface of the cover member facing the gap is covered with a solid substance different from the sealing resin.

本発明によれば、記録素子基板の周囲にカバー部材を配置した液体吐出ヘッドであって、記録素子基板とカバー部材との間を封止する樹脂がカバー部材の表面に滲み出す恐れを抑制可能な液体吐出ヘッドを得ることができる。 According to the present invention, it is a liquid discharge head in which a cover member is arranged around the recording element substrate, and it is possible to suppress the possibility that the resin sealing between the recording element substrate and the cover member exudes to the surface of the cover member. Liquid discharge head can be obtained.

液体吐出ヘッドを説明する図である。It is a figure explaining the liquid discharge head. カバー部材の支持基板への接合を説明する図である。It is a figure explaining the joining of a cover member to a support substrate. 本発明の第1の実施形態の液体吐出ヘッドを説明する図である。It is a figure explaining the liquid discharge head of 1st Embodiment of this invention. 接着剤の量に応じたカバー部材の接合状態を説明する図である。It is a figure explaining the bonding state of the cover member according to the amount of adhesive. 第2の実施形態の液体吐出ヘッドを説明する図である。It is a figure explaining the liquid discharge head of the 2nd Embodiment. 第3の実施形態の液体吐出ヘッドを説明する図である。It is a figure explaining the liquid discharge head of 3rd Embodiment. 第4の実施形態の液体吐出ヘッドを説明する図である。It is a figure explaining the liquid discharge head of 4th Embodiment.

次に、本発明を実施するための形態について、図面を参照して説明する。本発明に基づく液体吐出ヘッドを説明する前に、図1を用いて液体吐出ヘッドの一般的な構成について説明する。図1(a)は液体吐出ヘッドの斜視図であり、図1(b)は液体吐出ヘッドの平面図である。 Next, a mode for carrying out the present invention will be described with reference to the drawings. Before explaining the liquid discharge head based on the present invention, a general configuration of the liquid discharge head will be described with reference to FIG. FIG. 1A is a perspective view of the liquid discharge head, and FIG. 1B is a plan view of the liquid discharge head.

図1に示す液体吐出ヘッドは、例えばインクジェット記録装置などの液体吐出ヘッドに搭載されて用紙などの記録媒体に対してインクなどの液体を吐出するために用いられるものであり、サイドシューター型のものである。支持基板102の第1の表面に、1または複数の記録素子基板101が接着剤などによって接合している。図1に示す例では3個の記録素子基板101が支持基板102の図示上面に接合されている。記録素子基板101は、少なくとも支持基板102と接合する部分がシリコン基板で構成されている。記録素子基板101では、シリコン基板の一方の表面に複数のエネルギー発生素子(不図示)が設けられ、エネルギー発生素子の形成領域を覆うように吐出口形成部材が配置している。吐出口形成部材では、エネルギー発生素子ごとにそのエネルギー発生素子に対面する位置に、液体が吐出する吐出口が貫通孔として形成されている。シリコン基板の一方の表面と吐出口形成部材とに挟まれた空間は、エネルギー発生素子の位置にまで液体を供給する流路となっている。さらにシリコン基板には、流路に対して液体を供給するために、シリコン基板の他方の表面から一方の表面に貫通する液体供給路(不図示)が形成されている。図1(a)及び図1(b)において記録素子基板101として示されている部分は、記録素子基板101に含まれる吐出口形成部材の表面を示している。 The liquid ejection head shown in FIG. 1 is mounted on a liquid ejection head such as an inkjet recording device and is used for ejecting a liquid such as ink to a recording medium such as paper, and is a side shooter type. Is. One or more recording element substrates 101 are bonded to the first surface of the support substrate 102 with an adhesive or the like. In the example shown in FIG. 1, three recording element substrates 101 are joined to the illustrated upper surface of the support substrate 102. The recording element substrate 101 is made of a silicon substrate at least at a portion to be joined to the support substrate 102. In the recording element substrate 101, a plurality of energy generating elements (not shown) are provided on one surface of the silicon substrate, and the discharge port forming member is arranged so as to cover the forming region of the energy generating element. In the discharge port forming member, a discharge port for discharging a liquid is formed as a through hole at a position facing the energy generating element for each energy generating element. The space sandwiched between one surface of the silicon substrate and the discharge port forming member is a flow path for supplying the liquid to the position of the energy generating element. Further, the silicon substrate is formed with a liquid supply path (not shown) penetrating from the other surface of the silicon substrate to one surface in order to supply the liquid to the flow path. The portion shown as the recording element substrate 101 in FIGS. 1A and 1B shows the surface of the discharge port forming member included in the recording element substrate 101.

液体吐出ヘッドを搭載した液体吐出装置の本体から記録素子基板101に対して電気信号を供給するために、電気配線を有する配線基板(不図示)も設けられ、配線基板も支持基板102の第1の表面に対して接着剤などにより接合している。記録素子基板101と配線基板との電気的接続には種々の方法を用いることができるが、フライングリードを用いた接続や、ワイヤーボンディングによる接続が一般的である。記録素子基板101と配線基板とを電気的に接続した後、その電気接続部であるリード部分もしくはワイヤー部分は、液体に触れないよう絶縁保護される。一般的な絶縁保護方法は、電気接続部の上方より硬化可能な液状の樹脂を塗布して硬化させ、硬化された樹脂内に電気接続部を埋包する方法である。ここで用いられる液状の樹脂としては、熱硬化性、UV(紫外線)硬化性または湿気硬化性のエポキシ樹脂やアクリル樹脂、シリコーン樹脂などの組成物が挙げられる。なお、配線基板と液体吐出装置の本体との電気的な接続には、コンタクトピンやコネクター等が一般に用いられる。 In order to supply an electric signal from the main body of the liquid discharge device equipped with the liquid discharge head to the recording element board 101, a wiring board (not shown) having electrical wiring is also provided, and the wiring board is also the first support board 102. It is joined to the surface of the surface with an adhesive or the like. Various methods can be used for the electrical connection between the recording element substrate 101 and the wiring board, but the connection using flying leads and the connection by wire bonding are common. After the recording element substrate 101 and the wiring board are electrically connected, the lead portion or the wire portion, which is the electrical connection portion, is insulated and protected so as not to come into contact with the liquid. A general insulation protection method is a method in which a curable liquid resin is applied from above the electrical connection portion and cured, and the electrical connection portion is embedded in the cured resin. Examples of the liquid resin used here include compositions such as thermosetting, UV (ultraviolet) curable or moisture curable epoxy resins, acrylic resins, and silicone resins. A contact pin, a connector, or the like is generally used for the electrical connection between the wiring board and the main body of the liquid discharge device.

記録素子基板101と配線基板とを支持基板102に接合するための接着剤としては、熱硬化型やUV硬化型の接着剤を用いることができ、特に、エポキシ系接着剤、アクリル系接着剤あるいはウレタン系接着剤などを用いることができる。支持基板102には、記録素子基板101に形成されている液体供給路に連通して記録素子基板101に液体を供給する液体供給口が形成されている。支持基板102の液体供給口から記録素子基板101に供給された液体は、記録素子基板101においてエネルギー発生素子の位置にまで供給される。そして、配線基板を介して供給された電気信号によってエネルギー発生素子が駆動されると、エネルギー発生素子の作用により液体が液滴となって吐出口から吐出して記録媒体上に着弾する。その結果、液体による記録媒体への記録が行われたことになる。記録素子基板101と配線基板とが電気的に接続し、支持基板102に対して記録素子基板101と配線基板とが接合していれば、液体吐出ヘッドとして一応は動作できる。 As an adhesive for joining the recording element substrate 101 and the wiring substrate to the support substrate 102, a heat-curable or UV-curable adhesive can be used, and in particular, an epoxy-based adhesive, an acrylic-based adhesive, or an acrylic adhesive or A urethane adhesive or the like can be used. The support substrate 102 is formed with a liquid supply port that communicates with the liquid supply path formed in the recording element substrate 101 to supply the liquid to the recording element substrate 101. The liquid supplied from the liquid supply port of the support substrate 102 to the recording element substrate 101 is supplied to the position of the energy generating element on the recording element substrate 101. Then, when the energy generating element is driven by the electric signal supplied through the wiring board, the liquid becomes droplets due to the action of the energy generating element, is discharged from the discharge port, and lands on the recording medium. As a result, the liquid was recorded on the recording medium. If the recording element substrate 101 and the wiring board are electrically connected and the recording element substrate 101 and the wiring board are joined to the support substrate 102, the liquid discharge head can be operated for the time being.

ところで支持基板102の第1の表面に記録素子基板101が接合している状態では、支持基板102から記録素子基板101が突出しており、記録媒体の接触や液体吐出ヘッドの落下時に記録素子基板101が破損しやすくなる。そこで液体吐出ヘッドでは、支持基板102の第1の表面において、記録素子基板101を取り囲むようにカバー部材103が設けられている。支持基板102の第1の表面からの突出量は、カバー部材103の方が記録素子基板101よりも大きくなっている。より具体的には、カバー部材103は板状の部材であって、記録素子基板101に対応する形状の開口部がくりぬかれている。カバー部材103の方が記録素子基板101よりも支持基板102から突出しているので、記録素子基板101への物体の接触の可能性が低減され、記録素子基板101の損傷の可能性も低減される。製造コストが安くて済むという観点から、カバー部材103には樹脂成型品が広く用いられている。そしてカバー部材103は、接着剤105によって支持基板102の一方の表面に接合されている。ここで用いる接着剤105としては、熱硬化型あるいは常温硬化型の樹脂組成物からなるものを適宜選択して用いることができる。 By the way, in the state where the recording element substrate 101 is bonded to the first surface of the support substrate 102, the recording element substrate 101 protrudes from the support substrate 102, and the recording element substrate 101 is projected when the recording medium is contacted or the liquid discharge head is dropped. Is easily damaged. Therefore, in the liquid discharge head, a cover member 103 is provided on the first surface of the support substrate 102 so as to surround the recording element substrate 101. The amount of protrusion of the support substrate 102 from the first surface of the cover member 103 is larger than that of the recording element substrate 101. More specifically, the cover member 103 is a plate-shaped member, and an opening having a shape corresponding to the recording element substrate 101 is hollowed out. Since the cover member 103 protrudes from the support substrate 102 more than the recording element substrate 101, the possibility of contact of an object with the recording element substrate 101 is reduced, and the possibility of damage to the recording element substrate 101 is also reduced. .. From the viewpoint of low manufacturing cost, a resin molded product is widely used for the cover member 103. The cover member 103 is joined to one surface of the support substrate 102 by an adhesive 105. As the adhesive 105 used here, one made of a thermosetting type or a room temperature curing type resin composition can be appropriately selected and used.

カバー部材103に形成される開口部は、記録素子基板101がカバー部材103と接触しないように、記録素子基板101の外形よりもやや大きな寸法を有するように形成されており、記録素子基板101とカバー部材103との間には隙間が存在する。この隙間は残しておいてもよいが、吐出口から吐出された液体の一部などがこの隙間に溜まるとそれが記録媒体上に落下して記録媒体を汚す恐れがあるので、可能な限り隙間を埋めることが好ましい。そこで記録素子基板101とカバー部材103との隙間に対し、硬化可能な樹脂を封止用樹脂104として塗布し、そののち封止用樹脂104を硬化させることにより、隙間が封止用樹脂104によって充填され封止されるようにする。 The opening formed in the cover member 103 is formed so as to have a size slightly larger than the outer shape of the recording element substrate 101 so that the recording element substrate 101 does not come into contact with the cover member 103. There is a gap between the cover member 103 and the cover member 103. This gap may be left, but if a part of the liquid discharged from the discharge port collects in this gap, it may fall on the recording medium and contaminate the recording medium. It is preferable to fill in. Therefore, a curable resin is applied as the sealing resin 104 to the gap between the recording element substrate 101 and the cover member 103, and then the sealing resin 104 is cured, so that the gap is formed by the sealing resin 104. To be filled and sealed.

支持基板102へのカバー部材103の接合と、記録素子基板101とカバー部材103との隙間への封止用樹脂の塗布とについて、図2を用いて説明する。図2は、図1(b)におけるII−II線での模式断面図である。まず図2(a)に示すように、記録素子基板101などが既に接合されている支持基板102の第1の表面に対し、カバー部材103の接合位置に合わせて接着剤105を塗布する。接着剤105としては、塗布したときの断面形状が図2(a)に示すような形状となる物性を有するものが好ましい。次に、図2(b)に示すように、支持基板102上の接着剤105を押し潰すように、接着剤105上に、カバー部材103の一方の表面が上になるようにカバー部材103を押し付け、接着剤105を硬化させる。カバー部材103の一方の表面とは、板状のカバー部材103の表面のうち、支持基板102とは反対側となる表面のことである。したがってカバー部材103の他方の表面は、支持基板102の第1の表面に対向する表面である。この例では、支持基板102とカバー部材103の他方の表面との隙間から接着剤105ははみ出していない。次に、図2(c)に示すように、記録素子基板101とカバー部材103との間にある隙間にこの隙間を充填するように封止用樹脂104を塗布し、封止用樹脂104を硬化させる。封止用樹脂104としては、熱硬化型、UV硬化型、常温硬化型などの硬化可能などのような樹脂組成物を用いることができる。特に封止用樹脂104として、記録素子基板101の支持基板102に対する接合の貼り付け精度に悪影響がないことや吐出用の液体に対する耐薬品性の観点から適宜選択された樹脂組成物を使用することができる。 The joining of the cover member 103 to the support substrate 102 and the application of the sealing resin to the gap between the recording element substrate 101 and the cover member 103 will be described with reference to FIG. FIG. 2 is a schematic cross-sectional view taken along the line II-II in FIG. 1 (b). First, as shown in FIG. 2A, the adhesive 105 is applied to the first surface of the support substrate 102 to which the recording element substrate 101 and the like have already been bonded in accordance with the bonding position of the cover member 103. The adhesive 105 preferably has physical properties such that the cross-sectional shape when applied is as shown in FIG. 2 (a). Next, as shown in FIG. 2B, the cover member 103 is placed on the adhesive 105 so that one surface of the cover member 103 faces up so as to crush the adhesive 105 on the support substrate 102. Press and cure the adhesive 105. The one surface of the cover member 103 is the surface of the plate-shaped cover member 103 that is opposite to the support substrate 102. Therefore, the other surface of the cover member 103 is a surface facing the first surface of the support substrate 102. In this example, the adhesive 105 does not protrude from the gap between the support substrate 102 and the other surface of the cover member 103. Next, as shown in FIG. 2C, the sealing resin 104 is applied so as to fill the gap between the recording element substrate 101 and the cover member 103, and the sealing resin 104 is applied. Let it cure. As the sealing resin 104, any curable resin composition such as a thermosetting type, a UV curing type, and a room temperature curing type can be used. In particular, as the sealing resin 104, a resin composition appropriately selected from the viewpoints that the accuracy of bonding the recording element substrate 101 to the support substrate 102 is not adversely affected and the chemical resistance to the liquid for discharge is used shall be used. Can be done.

記録素子基板101とカバー部材103との隙間に塗布される封止用樹脂104に関し、その塗布量によっては図2(c)に示すようにカバー部材103や記録素子基板101のそれぞれ図示上面側の縁まで延びるメニスカスを形成することがある。記録素子基板101はシリコン基板で形成されているので、液状の封止用樹脂104が記録素子基板101の図示上面の表面にまで滲み出すことはない。これに対し、コスト等の観点から樹脂成型品であるカバー部材103を使用している場合、カバー部材103の側面に触れている封止用樹脂104は、樹脂成型品の表面に特有の細かな溝を伝わってカバー部材103の一方の表面まで滲み出すことがある。カバー部材103の一方の表面に滲み出た封止用樹脂104は、滲み出た先で硬化する。カバー部材103の一方の表面への封止用樹脂104の滲み出しは毛管現象によるものであるので、滲み出て硬化した封止用樹脂104は、微細な大きさであり、カバー部材103から剥離しやすい。液体吐出ヘッドでは、吐出用の液体が記録素子基板101の表面に残存するときに、クリーニング処理の一環として、表面に残存する液体をゴムワイパーで拭き取る拭き取り処理が行われる。このとき、拭き取り動作における助走距離を確保するためにカバー部材103の一方の表面から拭き取り動作を開始すると、カバー部材103の一方の表面に存在する硬化した封止用樹脂104が剥離し、ゴムワイパーとともに移動することがある。ゴムワイパーとともに移動した封止用樹脂104は吐出口を詰まらせ、その結果、液体吐出ヘッドからの液体の正常な吐出ができなくなり、記録媒体への記録を行えなくなるおそれが生ずる。 Regarding the sealing resin 104 applied to the gap between the recording element substrate 101 and the cover member 103, depending on the coating amount thereof, as shown in FIG. 2C, the cover member 103 and the recording element substrate 101 are on the upper surface side of each drawing. May form a meniscus that extends to the edge. Since the recording element substrate 101 is formed of a silicon substrate, the liquid sealing resin 104 does not exude to the surface of the upper surface of the recording element substrate 101 as shown. On the other hand, when the cover member 103, which is a resin molded product, is used from the viewpoint of cost and the like, the sealing resin 104 touching the side surface of the cover member 103 has fine details peculiar to the surface of the resin molded product. It may seep out to one surface of the cover member 103 along the groove. The sealing resin 104 that has exuded to one surface of the cover member 103 is cured at the exuded tip. Since the sealing resin 104 exudes to one surface of the cover member 103 due to the capillary phenomenon, the sealing resin 104 that has exuded and hardened has a fine size and is peeled off from the cover member 103. It's easy to do. In the liquid discharge head, when the liquid for discharge remains on the surface of the recording element substrate 101, a wiping process is performed in which the liquid remaining on the surface is wiped off with a rubber wiper as a part of the cleaning process. At this time, when the wiping operation is started from one surface of the cover member 103 in order to secure the approaching distance in the wiping operation, the cured sealing resin 104 existing on one surface of the cover member 103 is peeled off, and the rubber wiper May move with. The sealing resin 104 that has moved together with the rubber wiper clogs the discharge port, and as a result, the liquid cannot be normally discharged from the liquid discharge head, and recording on a recording medium may not be possible.

そこで本発明に基づく液体吐出ヘッドは、板状のカバー部材103の側面のうち記録素子基板101とカバー部材103との隙間に面する側面の少なくとも一部が、封止用樹脂104以外の固体物で被覆されていることを特徴とする。記録素子基板101とカバー部材103との隙間に面する側面は、記録素子基板101とカバー部材103との隙間から見れば、この隙間部を構成する側壁の一部であり、カバー部材103に形成されている開口部の側壁の一部であるということができる。さらにこの側面は、隙間を介して記録素子基板101に対向している側面でもある。このように固体物によってカバー部材103の少なくとも一部の側面を被覆することで、記録素子基板101とカバー部材103との隙間に液状の封止用樹脂104を塗布した際に、封止用樹脂104のメニスカスの端部がカバー部材103にまで到達しなくなる。その結果、樹脂成型品であるカバー部材103に形成されている溝を伝わって封止用樹脂104がカバー部材103の一方の表面にまで滲み出ることも防止される。以下、本発明に基づく液体吐出ヘッドの各実施形態について説明する。 Therefore, in the liquid discharge head based on the present invention, at least a part of the side surface of the plate-shaped cover member 103 facing the gap between the recording element substrate 101 and the cover member 103 is a solid material other than the sealing resin 104. It is characterized by being covered with. The side surface facing the gap between the recording element substrate 101 and the cover member 103 is a part of the side wall forming the gap when viewed from the gap between the recording element substrate 101 and the cover member 103, and is formed on the cover member 103. It can be said that it is a part of the side wall of the opening. Further, this side surface is also a side surface facing the recording element substrate 101 via a gap. By covering at least a part of the side surface of the cover member 103 with the solid material in this way, when the liquid sealing resin 104 is applied to the gap between the recording element substrate 101 and the cover member 103, the sealing resin The end of the meniscus 104 does not reach the cover member 103. As a result, it is also possible to prevent the sealing resin 104 from seeping out to one surface of the cover member 103 along the groove formed in the cover member 103 which is a resin molded product. Hereinafter, each embodiment of the liquid discharge head based on the present invention will be described.

[第1の実施形態]
図3は、本発明の第1の実施形態の液体吐出ヘッドを示す断面図である。図3(a)は、図1(b)のII−II線での断面に対応して本実施形態の液体吐出ヘッドの断面構成を示し、図3(b)及び図3(c)は、液体吐出ヘッドの製造工程を示している。この液体吐出ヘッドでは、図1及び図2に示した同様に、カバー部材103は接着剤105を介して支持基板102に接合している。しかしながら本実施形態では、図2(c)に示したものに比べて接着剤105はカバー部材103の縁部よりはみ出しており、カバー部材103の側面のうち記録素子基板101とカバー部材103との隙間に面する側面の少なくとも一部を被覆している。接着剤105は、カバー部材103の側面の少なくとも一部を被覆する固体物として機能する。ただし接着剤105は、カバー部材103の一方の表面にまでは到達していない。記録素子基板101とカバー部材103との間にある隙間には封止用樹脂104が充填されるが、封止用樹脂104は、隙間のカバー部材103側の領域において、接着剤105には接しているがカバー部材103自体の側面には接していない。
[First Embodiment]
FIG. 3 is a cross-sectional view showing a liquid discharge head according to the first embodiment of the present invention. FIG. 3 (a) shows a cross-sectional configuration of the liquid discharge head of the present embodiment corresponding to the cross-section taken along the line II-II of FIG. 1 (b), and FIGS. 3 (b) and 3 (c) show. The manufacturing process of the liquid discharge head is shown. In this liquid discharge head, the cover member 103 is joined to the support substrate 102 via the adhesive 105 in the same manner as shown in FIGS. 1 and 2. However, in the present embodiment, the adhesive 105 protrudes from the edge of the cover member 103 as compared with the one shown in FIG. 2C, and the recording element substrate 101 and the cover member 103 are formed on the side surfaces of the cover member 103. It covers at least a part of the side surface facing the gap. The adhesive 105 functions as a solid that covers at least a part of the side surface of the cover member 103. However, the adhesive 105 has not reached one surface of the cover member 103. The gap between the recording element substrate 101 and the cover member 103 is filled with the sealing resin 104, and the sealing resin 104 comes into contact with the adhesive 105 in the region of the gap on the cover member 103 side. However, it is not in contact with the side surface of the cover member 103 itself.

上述のようにカバー部材103の側面の少なくとも一部を接着剤により被覆するために、液体吐出ヘッドの製造工程において支持基板102における接着剤105の塗布位置は、カバー部材103の開口部に対応する位置にできるだけ近づける。接着剤105としては、後工程で塗布する液状の封止用樹脂104に対する濡れ性が悪いものを選択する。濡れ性を液体状態での封止用樹脂104の接触角で評価するとして、接着剤105に対する接触角が70°以上、好ましくは80°以上、より好ましくは90°以上であるように、封止用樹脂104と接着剤105との組み合わせを選択することが好ましい。このように接着剤105に対する濡れ性が悪い、すなわち接着剤105に撥かれるという性質は、樹脂材料がそれぞれ持つ表面自由エネルギーによるものである。そのため、接着剤105に対する液体状態での封止用樹脂104の濡れ性を事前に確認しておくことが好ましい。本実施形態では封止用樹脂104として、イソシアネート系化合物とフェノール系化合物を混合して得られる常温硬化型のウレタン樹脂を用いている。ウレタン樹脂である封止用樹脂104n濡れ性が悪い樹脂組成物としては、フルオロカーボンやジメチルシロキサン結合を有する化合物、すなわちフッ素樹脂やシリコーン樹脂が挙げられる。本実施形態では、接着剤105として、ジメチルシロキサン構造を有し常温で縮合反応による硬化が可能なシリコーン樹脂組成物を用いる。接着剤105にはある程度の粘度とチキソ比が必要である。接着剤105の粘度は、40〜1000Pa・sが好ましく、50〜300Pa・sがより好ましい。接着剤105のチキソ比は、1.0〜3.0程度が好適である。液体吐出ヘッドの製造では、図3(a)に示すように、ジメチルシロキサン構造を有するシリコーン樹脂からなる接着剤105をカバー部材103の開口部の縁部からせり出させ、カバー部材103の側面の少なくとも一部を接着剤105により被覆する。以下、本実施形態の液体吐出ヘッドを製造する際のこの具体的なプロセスについて説明する。 Since at least a part of the side surface of the cover member 103 is covered with the adhesive as described above, the coating position of the adhesive 105 on the support substrate 102 corresponds to the opening of the cover member 103 in the process of manufacturing the liquid discharge head. Get as close to the position as possible. As the adhesive 105, one having poor wettability with respect to the liquid sealing resin 104 to be applied in the subsequent step is selected. Assuming that the wettability is evaluated by the contact angle of the sealing resin 104 in the liquid state, the sealing is such that the contact angle with respect to the adhesive 105 is 70 ° or more, preferably 80 ° or more, and more preferably 90 ° or more. It is preferable to select a combination of the resin 104 for use and the adhesive 105. The property of poor wettability to the adhesive 105, that is, the property of being repelled by the adhesive 105, is due to the surface free energy of each resin material. Therefore, it is preferable to confirm in advance the wettability of the sealing resin 104 with respect to the adhesive 105 in a liquid state. In the present embodiment, as the sealing resin 104, a room temperature curable urethane resin obtained by mixing an isocyanate compound and a phenol compound is used. Examples of the resin composition having poor wettability of the sealing resin 104n, which is a urethane resin, include fluorocarbons and compounds having a dimethylsiloxane bond, that is, fluororesins and silicone resins. In the present embodiment, as the adhesive 105, a silicone resin composition having a dimethylsiloxane structure and capable of being cured by a condensation reaction at room temperature is used. The adhesive 105 needs a certain viscosity and thixotropy. The viscosity of the adhesive 105 is preferably 40 to 1000 Pa · s, more preferably 50 to 300 Pa · s. The thixotropy ratio of the adhesive 105 is preferably about 1.0 to 3.0. In the manufacture of the liquid discharge head, as shown in FIG. 3A, an adhesive 105 made of a silicone resin having a dimethylsiloxane structure is projected from the edge of the opening of the cover member 103, and the side surface of the cover member 103 is manufactured. At least a part is covered with the adhesive 105. Hereinafter, this specific process when manufacturing the liquid discharge head of the present embodiment will be described.

まず、図3(b)に示すように、図2(a)の状態よりもカバー部材103の側面に近い位置において支持基板102の第1の表面に接着剤105を塗布する。次に、図3(c)に示すように、カバー部材103を接着剤105の層の上に載せるようにして、カバー部材103の支持基板102に対する接着を行う。このとき、支持基板102における接着剤105の塗布位置がカバー部材103の側面に近い位置となっているので、接着剤105がカバー部材103の縁からカバー部材103の側面に沿ってせり上がる。その後、記録素子基板101とカバー部材103との隙間に封止用樹脂104を塗布する。封止用樹脂104はこの隙間を埋める必要があるので、液体状態におけるその粘度は低いことが望ましい。具体的には液体状態における封止用樹脂104の粘度は、10Pa・s以下が好ましく、5Pa・s以下がより好ましく、1Pa・sがさらに好ましい。封止用樹脂104のこのような粘度範囲は、液体状態での接着剤105の粘度に比べてかなり低いものである。 First, as shown in FIG. 3B, the adhesive 105 is applied to the first surface of the support substrate 102 at a position closer to the side surface of the cover member 103 than in the state of FIG. 2A. Next, as shown in FIG. 3C, the cover member 103 is placed on the layer of the adhesive 105 to bond the cover member 103 to the support substrate 102. At this time, since the coating position of the adhesive 105 on the support substrate 102 is close to the side surface of the cover member 103, the adhesive 105 rises from the edge of the cover member 103 along the side surface of the cover member 103. After that, the sealing resin 104 is applied to the gap between the recording element substrate 101 and the cover member 103. Since it is necessary for the sealing resin 104 to fill this gap, it is desirable that the viscosity in the liquid state is low. Specifically, the viscosity of the sealing resin 104 in the liquid state is preferably 10 Pa · s or less, more preferably 5 Pa · s or less, and even more preferably 1 Pa · s. Such a viscosity range of the sealing resin 104 is considerably lower than the viscosity of the adhesive 105 in the liquid state.

カバー部材103の側面を接着剤105が被覆しており、接着剤105に対して液体状態の封止用樹脂104の濡れ性が悪いので、本実施形態では、図2(c)に示したような封止用樹脂104のカバー部材103の開口部の縁までのせり上がりは生じない。液体状態での粘度が4Pa・sであるウレタン樹脂からなる封止用樹脂104を用いて液体吐出ヘッドを製造したところ、封止用樹脂104がカバー部材103自体の側面に触れることもカバー部材103の表面に滲み出ることもなかった。 Since the side surface of the cover member 103 is covered with the adhesive 105 and the sealing resin 104 in the liquid state has poor wettability with respect to the adhesive 105, as shown in FIG. 2C in the present embodiment. No rising up to the edge of the opening of the cover member 103 of the sealing resin 104 does not occur. When the liquid discharge head was manufactured using the sealing resin 104 made of urethane resin having a viscosity of 4 Pa · s in the liquid state, the sealing resin 104 may touch the side surface of the cover member 103 itself. It did not exude to the surface of the plastic.

[第2の実施形態]
第2の実施形態は、第1の実施形態の応用例として、より大きなカバー部材103を有する液体吐出ヘッドに対して本発明を適用したものである。第1の実施形態においては、カバー部材103を支持基板102に接合するときに接合用の接着剤105がカバー部材103の開口部の側面にせり出すように、支持基板102に接着剤105を塗布している。しかしながらカバー部材103のサイズが大きくなるとその寸法公差も大きくなるので、カバー部材103の開口部における側面に接着剤105がせり出すように接着剤を塗布するときに塗布位置の制御が難しくなる。例えば長さが100mmであるカバー部材であれば寸法公差は0.3mmであるが、長さ1000mmのカバー部材ではその寸法公差は0.8mmとなり、長さが100mmの場合に比べて寸法公差は2倍以上となる。接着剤105の塗布位置の制御は、0.5mmでも部品がゆがんだり位置がずれたりしただけで困難になる。以下では、カバー部材103の長さが例えば1000mmであるものとして本実施形態の液体吐出ヘッドを説明する。
[Second Embodiment]
The second embodiment is an application example of the first embodiment in which the present invention is applied to a liquid discharge head having a larger cover member 103. In the first embodiment, the adhesive 105 is applied to the support substrate 102 so that the adhesive 105 for joining protrudes to the side surface of the opening of the cover member 103 when the cover member 103 is joined to the support substrate 102. ing. However, as the size of the cover member 103 increases, the dimensional tolerance also increases, so that it becomes difficult to control the coating position when the adhesive is applied so that the adhesive 105 protrudes from the side surface of the opening of the cover member 103. For example, a cover member having a length of 100 mm has a dimensional tolerance of 0.3 mm, but a cover member having a length of 1000 mm has a dimensional tolerance of 0.8 mm, which is larger than that of a cover member having a length of 100 mm. It will be more than doubled. Controlling the coating position of the adhesive 105 becomes difficult even if the thickness is 0.5 mm, because the parts are distorted or misaligned. Hereinafter, the liquid discharge head of the present embodiment will be described assuming that the length of the cover member 103 is, for example, 1000 mm.

ここでカバー部材103のゆがみや位置のずれによる影響について説明するが、最初に接着剤105の塗布量の違いによる影響を説明する。図4は、支持基板102への接着剤105の塗布量の違いによるカバー部材103の側面への接着剤105のせり出しの違いを示す断面図である。図4(a)は接着剤105の塗布量が少ない場合を示しており、カバー部材103の側面のほぼ全面が接着剤で覆われていない。この場合には、記録素子基板101とカバー部材103との隙間に封止用樹脂104を塗布した場合、封止用樹脂104がカバー部材103自体の側面に接することとなる。カバー部材103自体の側面に封止用樹脂104が接した場合、カバー部材103に一方の表面にまで封止用樹脂104の滲み出しが生じる恐れがある。一方、図4(b)は、接着剤105の塗布量が多すぎる場合を示している。接着剤105の塗布量が多すぎる場合には、カバー部材103の側面への接着剤105のせり出し量が多すぎて、カバー部材103の一方の表面に接着剤105が乗り上げてしまう。カバー部材103の一方の表面に乗り上げた接着剤105は、封止用樹脂104と同様に、ゴムワイパーによってカバー部材103の一方の表面の拭き取りを行ったときに剥離し、吐出口の詰まりなどの原因となる。したがって、接着剤105の塗布量は、接着剤105がカバー部材103の側面の主要な部分を被覆するがカバー部材103の一方の表面に乗り上がることがないように管理する必要がある。 Here, the influence of the distortion and the displacement of the cover member 103 will be described, but first, the influence of the difference in the coating amount of the adhesive 105 will be described. FIG. 4 is a cross-sectional view showing a difference in protrusion of the adhesive 105 on the side surface of the cover member 103 due to a difference in the amount of the adhesive 105 applied to the support substrate 102. FIG. 4A shows a case where the amount of the adhesive 105 applied is small, and almost the entire side surface of the cover member 103 is not covered with the adhesive. In this case, when the sealing resin 104 is applied to the gap between the recording element substrate 101 and the cover member 103, the sealing resin 104 comes into contact with the side surface of the cover member 103 itself. When the sealing resin 104 comes into contact with the side surface of the cover member 103 itself, the sealing resin 104 may seep out to one surface of the cover member 103. On the other hand, FIG. 4B shows a case where the amount of the adhesive 105 applied is too large. If the amount of the adhesive 105 applied is too large, the amount of the adhesive 105 protruding to the side surface of the cover member 103 is too large, and the adhesive 105 runs on one surface of the cover member 103. Similar to the sealing resin 104, the adhesive 105 that rides on one surface of the cover member 103 peels off when the one surface of the cover member 103 is wiped with a rubber wiper, causing clogging of the discharge port and the like. It causes. Therefore, the amount of the adhesive 105 applied needs to be controlled so that the adhesive 105 covers the main portion of the side surface of the cover member 103 but does not ride on one surface of the cover member 103.

図4は、接着剤105の塗布量の違いによる接着剤のせり上がりの形態の違いを説明しているが、接着剤105の塗布量は同じであってもカバー部材103の開口部の縁部と接着剤105の塗布位置との関係によって、図4に示したものと同様の問題が生ずる。すなわち、塗布位置とカバー部材103の開口部の縁部との距離が大きすぎれば、図4(a)に示したように、カバー部材103の側面での接着剤105の十分な被覆面積を確保できなくなる。塗布位置とカバー部材103の開口部の縁部とが近すぎる場合には、図4(b)に示したように、カバー部材103の一方の表面上に接着剤が乗り上がる。 FIG. 4 illustrates the difference in the form of the adhesive rising due to the difference in the amount of the adhesive 105 applied, but even if the amount of the adhesive 105 applied is the same, the edge of the opening of the cover member 103 The relationship between the adhesive 105 and the coating position of the adhesive 105 causes the same problem as that shown in FIG. That is, if the distance between the coating position and the edge of the opening of the cover member 103 is too large, a sufficient covering area of the adhesive 105 on the side surface of the cover member 103 is secured as shown in FIG. 4A. become unable. When the coating position and the edge of the opening of the cover member 103 are too close to each other, the adhesive rides on one surface of the cover member 103 as shown in FIG. 4 (b).

本実施形態では、カバー部材103の側面が十分に接着剤105によって覆われるとともにカバー部材103の一方の表面への接着剤105の乗り上げを防ぐように、支持基板102へのカバー部材103の接合の際に圧着板106を使用する。図5は第2の実施形態における液体吐出ヘッドの製造工程を示す断面図である。まず、通常であれば接着剤105がカバー部材103の第1の表面の上に乗り上がるような量の接着剤105を支持基板102の第1の表面に塗布する。接着剤105としては、第1の実施形態で用いたものと同様のものが使用される。そして支持基板102との接合のためにカバー部材103を接着剤105に向けて押し付けるときに、図5(a)に示すように、カバー部材103の一方の表面に対して圧着板106を押し当て、圧着板106を介してカバー部材103が押圧されるようにする。圧着板106は、カバー部材103の開口部の縁部から開口部に向かってはみ出す形状を有している。すなわち圧着板106は、カバー部材103の側面の位置から張り出す部分を含んでいる。その結果、押圧されたことにより接着剤105の層がせり上がったとしても、圧着板106によって阻止されて、カバー部材103の一方の表面に接着剤105が回り込むことが防止される。圧着板106は、カバー部材103の一方の表面の全面を押圧するものであることが好ましく、このため弾性変形する材料で構成されることが好ましい。圧着板106を構成する材料は、一般的なゴム材料で十分である。 In the present embodiment, the side surface of the cover member 103 is sufficiently covered with the adhesive 105, and the cover member 103 is joined to the support substrate 102 so as to prevent the adhesive 105 from riding on one surface of the cover member 103. The crimp plate 106 is used at the time. FIG. 5 is a cross-sectional view showing a manufacturing process of the liquid discharge head according to the second embodiment. First, an amount of the adhesive 105 that would normally allow the adhesive 105 to ride onto the first surface of the cover member 103 is applied to the first surface of the support substrate 102. As the adhesive 105, the same adhesive as that used in the first embodiment is used. Then, when the cover member 103 is pressed against the adhesive 105 for joining with the support substrate 102, the crimp plate 106 is pressed against one surface of the cover member 103 as shown in FIG. 5 (a). , The cover member 103 is pressed via the crimp plate 106. The crimp plate 106 has a shape that protrudes from the edge of the opening of the cover member 103 toward the opening. That is, the crimp plate 106 includes a portion that projects from the position of the side surface of the cover member 103. As a result, even if the layer of the adhesive 105 rises due to being pressed, it is blocked by the crimping plate 106, and the adhesive 105 is prevented from wrapping around one surface of the cover member 103. The pressure-bonding plate 106 preferably presses the entire surface of one surface of the cover member 103, and is therefore preferably made of a material that is elastically deformed. As the material constituting the crimp plate 106, a general rubber material is sufficient.

本実施形態では、図5(a)に示すように。押圧の過程において圧着板106に対して接着剤105が接触するが、接触した接着剤105が圧着板106の表面に付着することがある。この付着を防止するためには、付着防止フィルムとして圧着板106とカバー部材103の間に使い捨てのPTFE(ポリテトラフルオロエチレン)フィルムなどを挟めばよい。PTFEフィルムを挟むことによって、圧着板106への接着剤105の付着を防ぎながら、カバー部材103の側面における接着剤105の所望の被覆状態を得ることができる。接着剤105が硬化したら、圧着板106によるカバー部材103の押圧を停止する。 In this embodiment, as shown in FIG. 5 (a). The adhesive 105 comes into contact with the crimping plate 106 in the process of pressing, but the contacted adhesive 105 may adhere to the surface of the crimping plate 106. In order to prevent this adhesion, a disposable PTFE (polytetrafluoroethylene) film or the like may be sandwiched between the pressure-bonding plate 106 and the cover member 103 as an adhesion-preventing film. By sandwiching the PTFE film, it is possible to obtain a desired coating state of the adhesive 105 on the side surface of the cover member 103 while preventing the adhesive 105 from adhering to the pressure-bonding plate 106. When the adhesive 105 is cured, the pressing of the cover member 103 by the crimping plate 106 is stopped.

以上のように支持基板102に対して接着剤105を介してカバー部材103を接合したのち、図5(b)に示すように、第1の実施形態の場合と同様に記録素子基板101とカバー部材103との隙間に封止用樹脂104を塗布し硬化させる。その結果、カバー部材103の側面が接着剤105によって被覆されていることによりカバー部材103の一方の表面に封止用樹脂が滲み出ることがない液体吐出ヘッドを得ることができる。 After joining the cover member 103 to the support substrate 102 via the adhesive 105 as described above, as shown in FIG. 5B, the recording element substrate 101 and the cover are as in the case of the first embodiment. The sealing resin 104 is applied to the gap between the member 103 and cured. As a result, since the side surface of the cover member 103 is covered with the adhesive 105, it is possible to obtain a liquid discharge head in which the sealing resin does not exude to one surface of the cover member 103.

[第3の実施形態]
第1及び第2の実施形態では、記録素子基板101とカバー部材103との隙間に面するカバー部材103の側面に接着剤105をせり上げることにより、カバー部材103の側面に封止用樹脂104が接触することを防いでいた。封止用樹脂104の接触を防ぐためにカバー部材103の側面を被覆する固体物は、カバー部材103を支持基板102に接合するために設けられる接着剤105に限られるものではない。封止用樹脂104とは異なるとともにカバー部材103の接合に用いられる接着剤105でもない固体物によってカバー部材103の側面を被覆してもよい。第3の実施形態では、封止用樹脂104でもなく接着剤105でもない被覆用の樹脂材料を用いてカバー部材103の側面を被覆することによって、封止用樹脂104のせり上がりとカバー部材103の一方の表面への滲み出しを防止した例を説明する。図6は、第3の実施形態の液体吐出ヘッドを示す図であり、図6(a)は、カバー部材103を支持基板102に接合した後の液体吐出ヘッドの要部の断面構成を示している。図において符号Xはカバー部材103の一方の表面を示し、符号Yは、記録素子基板101とカバー部材103との隙間に面するカバー部材103の側面を示している。
[Third Embodiment]
In the first and second embodiments, the adhesive 105 is raised on the side surface of the cover member 103 facing the gap between the recording element substrate 101 and the cover member 103, so that the sealing resin 104 is formed on the side surface of the cover member 103. Was prevented from contacting. The solid material that covers the side surface of the cover member 103 to prevent contact with the sealing resin 104 is not limited to the adhesive 105 provided for joining the cover member 103 to the support substrate 102. The side surface of the cover member 103 may be covered with a solid substance that is different from the sealing resin 104 and is not the adhesive 105 used for joining the cover member 103. In the third embodiment, the side surface of the cover member 103 is covered with a coating resin material that is neither the sealing resin 104 nor the adhesive 105, so that the sealing resin 104 rises and the cover member 103 An example of preventing exudation to one surface will be described. FIG. 6 is a diagram showing the liquid discharge head of the third embodiment, and FIG. 6A shows a cross-sectional configuration of a main part of the liquid discharge head after the cover member 103 is joined to the support substrate 102. There is. In the figure, reference numeral X indicates one surface of the cover member 103, and reference numeral Y indicates the side surface of the cover member 103 facing the gap between the recording element substrate 101 and the cover member 103.

図示されるように、第3の実施形態の液体吐出ヘッドでは、カバー部材103の一方の表面Xと側面Yとに被覆用の樹脂材料107が塗布されている。樹脂材料107は、封止用樹脂104とも接着剤105とも異なるものであり、第1の実施形態の場合と同様に、この樹脂材料107に対する液体状態の封止用樹脂104の濡れ性がよくないような材料からなっている。本実施形態では封止用樹脂104としてウレタン樹脂を用いるが、ウレタン樹脂が低い濡れ性を示す材料としては、撥水性を有する樹脂があり、撥水性を有する樹脂を樹脂材料107に用いることができる。特に、撥水性を有する樹脂として、ジメチルシロキサン構造を有するアルコキシシラン化合物、パーフルオロ基を有するフッ素系化合物などが樹脂材料107として好適に用いられる。濡れ性を液体状態での封止用樹脂104の接触角で評価するとして、樹脂材料107に対する接触角が70°以上、好ましくは80°以上、より好ましくは90°以上であるように、封止用樹脂104と樹脂材料107との組み合わせを選択することが好ましい。樹脂材料107としてカバー部材103に対して高い密着性を有するものを使用することは当然のことである。本実施形態では、ジメチルシロキサン構造を有するアルコキシシラン化合物を含む樹脂組成物を被覆用の樹脂材料107として用い、その膜厚が0.1μm以下となるように樹脂材料107をカバー部材103に塗布する。さらに薄く樹脂材料107を塗布すれば、液体吐出ヘッドの完成後に樹脂材料107が剥離したときであっても、記録素子基板101に設けられる吐出口への影響を低減できる。記録素子基板101に設けられる吐出口の直径を10〜20μmとするのが主流であり、このような大きさの吐出口に対して0.1μmの厚さの樹脂層が混入しても特に問題とはならない。本実施形態では、密着性の高い材料からなる樹脂材料107を用いることを前提とし、樹脂材料107が万が一剥がれたとしても吐出口への影響を最小限にする。目安としては、剥離片の大きさが吐出口の直径の1/100程度であれば、問題は生じない。被覆用の樹脂材料107の塗布方法としては、樹脂材料107を溶媒で希釈した液体にカバー部材103を浸漬する方法や、カバー部材103に対して直接描画する方法、スプレー塗布による方法がある。 As shown in the figure, in the liquid discharge head of the third embodiment, the resin material 107 for coating is applied to one surface X and the side surface Y of the cover member 103. The resin material 107 is different from the sealing resin 104 and the adhesive 105, and as in the case of the first embodiment, the wettability of the sealing resin 104 in a liquid state with respect to the resin material 107 is not good. It is made of such materials. In the present embodiment, urethane resin is used as the sealing resin 104, but as a material showing low wettability of urethane resin, there is a resin having water repellency, and the resin having water repellency can be used for the resin material 107. .. In particular, as the water-repellent resin, an alkoxysilane compound having a dimethylsiloxane structure, a fluorine-based compound having a perfluoro group, and the like are preferably used as the resin material 107. Assuming that the wettability is evaluated by the contact angle of the sealing resin 104 in the liquid state, the sealing is performed so that the contact angle with respect to the resin material 107 is 70 ° or more, preferably 80 ° or more, and more preferably 90 ° or more. It is preferable to select a combination of the resin 104 and the resin material 107. As a resin material 107, it is natural to use a material having high adhesion to the cover member 103. In the present embodiment, a resin composition containing an alkoxysilane compound having a dimethylsiloxane structure is used as the coating resin material 107, and the resin material 107 is applied to the cover member 103 so that the film thickness is 0.1 μm or less. .. If the resin material 107 is applied even thinner, the influence on the discharge port provided on the recording element substrate 101 can be reduced even when the resin material 107 is peeled off after the liquid discharge head is completed. The mainstream is to set the diameter of the discharge port provided on the recording element substrate 101 to 10 to 20 μm, and there is a particular problem even if a resin layer having a thickness of 0.1 μm is mixed with the discharge port of such a size. It does not become. In the present embodiment, it is premised that the resin material 107 made of a material having high adhesion is used, and even if the resin material 107 is peeled off, the influence on the discharge port is minimized. As a guide, if the size of the peeled piece is about 1/100 of the diameter of the discharge port, no problem will occur. Examples of the coating method of the resin material 107 for coating include a method of immersing the cover member 103 in a liquid obtained by diluting the resin material 107 with a solvent, a method of drawing directly on the cover member 103, and a method of spray coating.

樹脂材料107の溶液にカバー部材103を浸漬することにより塗布を行う場合、塗布後のカバー部材103はその全体が撥水性を帯びる。その結果、接着剤105によってカバー部材103を支持基板102に接合することが、撥水性のために困難になる。そこで本実施形態では、カバー部材103に塗布した樹脂材料107を所望の領域だけ残し、その他の部位に塗布されている樹脂材料107の除去を行う。ここでいう所望の領域とは、後工程で塗布する封止用樹脂104が接触するおそれがある領域であり、具体的にはカバー部材103の側面Yのことである。側面Y以外の部位に塗布された樹脂材料107の除去方法としては、常圧プラズマなどを用いるプラズマ照射による方法、UV(紫外線)照射による方法などが挙げられる。本実施形態では常圧プラズマを用いて樹脂材料107を除去する。常圧プラズマによる方法は、プラズマ噴出口から高い直進性をもってプラズマを照射するので、照射部のみがプラズマ処理がされるという特徴を有する。照射部以外の領域はプラズマ処理されない。以下、常圧プラズマによる処理を説明する。 When coating is performed by immersing the cover member 103 in the solution of the resin material 107, the entire cover member 103 after coating is water repellent. As a result, it becomes difficult to join the cover member 103 to the support substrate 102 with the adhesive 105 due to water repellency. Therefore, in the present embodiment, the resin material 107 applied to the cover member 103 is left only in a desired region, and the resin material 107 applied to other parts is removed. The desired region referred to here is a region where the sealing resin 104 to be applied in a later process may come into contact with the cover member 103, specifically, the side surface Y of the cover member 103. Examples of the method for removing the resin material 107 applied to the portion other than the side surface Y include a method by plasma irradiation using normal pressure plasma and the like, a method by UV (ultraviolet) irradiation, and the like. In this embodiment, the resin material 107 is removed using atmospheric pressure plasma. Since the method using normal pressure plasma irradiates plasma from the plasma ejection port with high straightness, it has a feature that only the irradiated portion is subjected to plasma treatment. The area other than the irradiated area is not plasma-treated. Hereinafter, processing by atmospheric pressure plasma will be described.

板状のカバー部材103を樹脂材料107の溶液に浸漬して樹脂材料107の層をカバー部材103の全体に形成した後、図6(b)に示すようにカバー部材103の他方の表面に常圧プラズマを照射すると、他方の表面の樹脂材料107が除去される。加えてカバー部材103の他方の表面は、プラズマ処理により、接着性が向上した状態となる。その後、第1の実施形態と同様に接着剤105によってカバー部材103を支持基板102に接合し、そののち封止用樹脂104を塗布することによって、図6(a)に示すような断面構成を有する液体吐出ヘッドが形成される。記録素子基板101とカバー部材103との隙間に封止用樹脂104を塗布するときに、重力により封止用樹脂104はカバー部材103の側面Yに多少の接触はする。しかしながらカバー部材103の側面Yに被覆用の樹脂材料107の層が形成されているので、樹脂成型物であるカバー部材103に形成されている微細な溝をつたってカバー部材103の一方の表面Xに封止用樹脂104が滲み出すことは抑制される。 After the plate-shaped cover member 103 is immersed in the solution of the resin material 107 to form a layer of the resin material 107 over the entire cover member 103, it is always on the other surface of the cover member 103 as shown in FIG. 6 (b). Irradiation with pressure plasma removes the resin material 107 on the other surface. In addition, the other surface of the cover member 103 is in a state where the adhesiveness is improved by the plasma treatment. Then, as in the first embodiment, the cover member 103 is joined to the support substrate 102 with the adhesive 105, and then the sealing resin 104 is applied to obtain a cross-sectional configuration as shown in FIG. 6A. The liquid discharge head to have is formed. When the sealing resin 104 is applied to the gap between the recording element substrate 101 and the cover member 103, the sealing resin 104 comes into some contact with the side surface Y of the cover member 103 due to gravity. However, since the layer of the resin material 107 for coating is formed on the side surface Y of the cover member 103, one surface X of the cover member 103 is formed through a fine groove formed in the cover member 103 which is a resin molded product. The exudation of the sealing resin 104 is suppressed.

本実施形態に基づく液体吐出ヘッドを製造した例を説明する。ジメチルシロキサン構造を有するアルコキシシラン化合物を溶媒に溶解させた液体にカバー部材103を浸漬することにより、樹脂材料107をカバー部材103の全体に塗布し、その後、上述のように常圧プラズマによる処理を行った。その結果、カバー部材103の一方の表面Xに封止用樹脂104が滲み出ることのない液体吐出ヘッドを作成することができた。 An example of manufacturing a liquid discharge head based on the present embodiment will be described. By immersing the cover member 103 in a liquid in which an alkoxysilane compound having a dimethylsiloxane structure is dissolved in a solvent, the resin material 107 is applied to the entire cover member 103, and then the treatment with atmospheric pressure plasma is performed as described above. went. As a result, it was possible to create a liquid discharge head in which the sealing resin 104 does not exude on one surface X of the cover member 103.

[第4の実施形態]
第4の実施形態では、第3の実施形態の応用例として、カバー部材103の側面において段差が形成されている液体吐出ヘッドを説明する。図7は第4の実施形態の液体吐出ヘッドを示す図である。図7(a)に示すように、板状のカバー部材103の図示右側の側面には段差が形成されている。図において符号Dはカバー部材103の他方の表面であり、符号Bは、段差が形成されていることによってカバー部材103の他方の表面と平行なものとして現れた面を示している。符号Aは、カバー部材103の側面における、段差とカバー部材103の一方の表面との間の領域を示し、同様に符号Cは、段差とカバー部材103の他方の表面との間の領域を示している。段差が形成されていることにより、カバー部材103の他方の表面は一方の表面よりも狭くなっている。このように側面に段差が形成されているカバー部材103を、第3の実施形態と同様に被覆用の樹脂材料107を溶媒に溶解させた液体に浸漬することにより、カバー部材103の全体に樹脂材料107が塗布される。樹脂材料107としては、例えばジメチルシロキサン構造を有するアルコキシシラン化合物が用いられる。図7(a)は、カバー部材103の全体に樹脂材料107が塗布された状態を示している。
[Fourth Embodiment]
In the fourth embodiment, as an application example of the third embodiment, a liquid discharge head in which a step is formed on the side surface of the cover member 103 will be described. FIG. 7 is a diagram showing a liquid discharge head according to the fourth embodiment. As shown in FIG. 7A, a step is formed on the side surface of the plate-shaped cover member 103 on the right side of the drawing. In the figure, reference numeral D indicates the other surface of the cover member 103, and reference numeral B indicates a surface that appears as parallel to the other surface of the cover member 103 due to the formation of the step. Reference numeral A indicates a region between the step and one surface of the cover member 103 on the side surface of the cover member 103, and similarly, reference numeral C indicates a region between the step and the other surface of the cover member 103. ing. Due to the formation of the step, the other surface of the cover member 103 is narrower than the one surface. By immersing the cover member 103 having the stepped side surface in the liquid in which the resin material 107 for coating is dissolved in a solvent as in the third embodiment, the entire cover member 103 is covered with resin. Material 107 is applied. As the resin material 107, for example, an alkoxysilane compound having a dimethylsiloxane structure is used. FIG. 7A shows a state in which the resin material 107 is applied to the entire cover member 103.

樹脂材料107を塗布した後、図7(b)に示すように、カバー部材103の他方の表面Dに対して常圧プラズマを照射する。その結果、カバー部材103の他方の表面Dと段差部の小さな面Bにおいて樹脂材料107が除去される。段差における面Bは、プラズマ処理を受けることにより、より高い接着性を有する表面状態になる。次に図7(c)に示すように、第1の実施形態と同様に支持基板102の第1の表面に接着剤105を塗布し、接着剤105を介してカバー部材103を支持基板102に接合する。さらに、記録素子基板101とカバー部材103との隙間に封止用樹脂104を塗布することによって、図7(d)に示す断面構成を有する液体吐出ヘッドが得られる。本実施形態において封止用樹脂104及び接着剤105には、それぞれ、第1の実施形態において使用したものと同様のものを使用することができる。 After applying the resin material 107, as shown in FIG. 7B, the other surface D of the cover member 103 is irradiated with atmospheric pressure plasma. As a result, the resin material 107 is removed from the other surface D of the cover member 103 and the small surface B of the stepped portion. The surface B at the step becomes a surface state having higher adhesiveness by undergoing plasma treatment. Next, as shown in FIG. 7C, the adhesive 105 is applied to the first surface of the support substrate 102 as in the first embodiment, and the cover member 103 is attached to the support substrate 102 via the adhesive 105. Join. Further, by applying the sealing resin 104 to the gap between the recording element substrate 101 and the cover member 103, a liquid discharge head having the cross-sectional structure shown in FIG. 7D can be obtained. As the sealing resin 104 and the adhesive 105 in the present embodiment, the same ones as those used in the first embodiment can be used, respectively.

常圧プラズマによる処理を行ったことによって接着性が高められた面Bは、図7(d)に示す状態において、支持基板102の側を向いている。これに対しカバー部材103の側面である領域A及び領域Cは、封止用樹脂104の濡れ性が悪い樹脂材料107によって被覆されている。図ではカバー部材103の側面において封止用樹脂104が接触するのは領域Aに限られているが、封止用樹脂104の量が多くなった場合、面Bにも封止用樹脂104が接触するようになる。封止用樹脂104が面Bに接触した場合、高い接着力で面Bに封止用樹脂104が接着することになるが、領域Cに対しては封止用樹脂104の濡れ性が悪いため、領域Cの部分を封止用樹脂104が這い上がることはない。したがって、この液体吐出ヘッドにおいても、封止用樹脂104がカバー部材103の一方の表面に滲み出ることはない。 The surface B whose adhesiveness has been enhanced by the treatment with normal pressure plasma faces the side of the support substrate 102 in the state shown in FIG. 7 (d). On the other hand, the regions A and C, which are the side surfaces of the cover member 103, are covered with the resin material 107, which has poor wettability of the sealing resin 104. In the figure, the sealing resin 104 comes into contact with the side surface of the cover member 103 only in the region A, but when the amount of the sealing resin 104 increases, the sealing resin 104 also comes into contact with the surface B. Come into contact. When the sealing resin 104 comes into contact with the surface B, the sealing resin 104 adheres to the surface B with a high adhesive force, but the sealing resin 104 has poor wettability with respect to the region C. , The sealing resin 104 does not crawl up the portion of the region C. Therefore, even in this liquid discharge head, the sealing resin 104 does not exude to one surface of the cover member 103.

さらに、カバー部材103の側面部分の一部である面Bに対して封止用樹脂104が高い接着力で接着していると、封止用樹脂104がカバー部材103の側面から剥がれることを抑制することができる。封止用樹脂104がカバー部材103の側面から剥離すると、剥離後の隙間に記録液などの液体が溜まり、溜まった液体が記録媒体などに落下する場合がある。実施形態によれば、この液体の落下のおそれを払拭することができる。したがって、液体の落下のおそれを低減するために、隙間に液体状態の封止用樹脂104を塗布する際に、封止用樹脂104を面Bに接触させるようにしてもよい。 Further, when the sealing resin 104 is adhered to the surface B which is a part of the side surface portion of the cover member 103 with a high adhesive force, it is possible to prevent the sealing resin 104 from peeling off from the side surface of the cover member 103. can do. When the sealing resin 104 is peeled from the side surface of the cover member 103, a liquid such as a recording liquid may be accumulated in the gap after the peeling, and the collected liquid may fall on a recording medium or the like. According to the embodiment, the risk of the liquid falling can be eliminated. Therefore, in order to reduce the risk of the liquid falling, the sealing resin 104 may be brought into contact with the surface B when the sealing resin 104 in the liquid state is applied to the gap.

101 記録素子基板
102 支持基板
103 カバー部材
104 封止用樹脂
105 接着剤
101 Recording element substrate 102 Support substrate 103 Cover member 104 Sealing resin 105 Adhesive

Claims (16)

支持基板と、
液体を吐出する吐出口を少なくとも備えて前記支持基板の第1の表面に接合された記録素子基板と、
前記第1の表面において前記記録素子基板を取り囲むように配置されて前記第1の表面に接合された板状のカバー部材と、
前記第1の表面において前記記録素子基板と前記カバー部材との隙間を充填するように設けられた封止用樹脂と、
を有し、前記隙間に面する前記カバー部材の側面の少なくとも一部が、前記封止用樹脂とは異なる固体物によって被覆されていることを特徴とする、液体吐出ヘッド。
Support board and
A recording element substrate bonded to the first surface of the support substrate having at least a discharge port for discharging a liquid, and a recording element substrate.
A plate-shaped cover member arranged so as to surround the recording element substrate on the first surface and joined to the first surface.
A sealing resin provided so as to fill the gap between the recording element substrate and the cover member on the first surface, and
A liquid discharge head, wherein at least a part of a side surface of the cover member facing the gap is covered with a solid substance different from the sealing resin.
前記カバー部材は樹脂成型品によって構成されている、請求項1に記載の液体吐出ヘッド。 The liquid discharge head according to claim 1, wherein the cover member is made of a resin molded product. 前記カバー部材は接着剤を介して前記第1の表面に接合し、前記固体物は前記接着剤である、請求項1または2に記載の液体吐出ヘッド。 The liquid discharge head according to claim 1 or 2, wherein the cover member is bonded to the first surface via an adhesive, and the solid substance is the adhesive. 前記固体物は、前記封止用樹脂とは異なる樹脂材料からなり、前記カバー部材における前記第1の表面に対向する表面には設けられていない、請求項1または2に記載の液体吐出ヘッド。 The liquid discharge head according to claim 1 or 2, wherein the solid material is made of a resin material different from the sealing resin and is not provided on the surface of the cover member facing the first surface. 前記第1の表面に向く面を有するように前記カバー部材において前記側面に段差が形成され、前記段差において前記第1の表面を向く面には前記固体物が設けられていない、請求項4に記載の液体吐出ヘッド。 According to claim 4, a step is formed on the side surface of the cover member so as to have a surface facing the first surface, and the solid object is not provided on the surface facing the first surface at the step. The liquid discharge head described. 前記段差において前記第1の表面を向く面に前記封止用樹脂が接触している、請求項5に記載の液体吐出ヘッド。 The liquid discharge head according to claim 5, wherein the sealing resin is in contact with a surface facing the first surface at the step. 支持基板と、液体を吐出する吐出口を少なくとも備えて前記支持基板の第1の表面に接合された記録素子基板と、前記第1の表面において前記記録素子基板を取り囲むように配置されて前記第1の表面に接合された板状のカバー部材と、を有する液体吐出ヘッドの製造方法において、
前記第1の表面において前記カバー部材の前記記録素子基板に対向する側面の少なくとも一部を固体物によって被覆する工程と、
前記記録素子基板と前記固体物によって被覆されている前記カバー部材との間に形成される隙間に、前記固体物とは異なる封止用樹脂を塗布する工程と、
を有する、液体吐出ヘッドの製造方法。
A support substrate, a recording element substrate bonded to a first surface of the support substrate having at least a discharge port for discharging a liquid, and a recording element substrate arranged so as to surround the recording element substrate on the first surface. In the method for manufacturing a liquid discharge head having a plate-shaped cover member joined to the surface of 1.
A step of covering at least a part of the side surface of the cover member facing the recording element substrate with a solid material on the first surface.
A step of applying a sealing resin different from the solid material to the gap formed between the recording element substrate and the cover member covered with the solid material.
A method for manufacturing a liquid discharge head.
前記カバー部材は樹脂成型品によって構成され、前記封止用樹脂は、液体状態において、前記固体物に対する70°以上の接触角を有する。請求項7に記載の液体吐出ヘッドの製造方法。 The cover member is made of a resin molded product, and the sealing resin has a contact angle of 70 ° or more with respect to the solid substance in a liquid state. The method for manufacturing a liquid discharge head according to claim 7. 前記被覆する工程は、前記第1の表面に接着剤を塗布する工程と、前記接着剤に向けて前記カバー部材を押圧する工程と、を有し、
前記押圧する工程により、前記接着剤を介して前記カバー部材を前記第1の表面に接合するとともに前記側面において前記接着剤をせり上げさせ、前記固体物として、せり上げられた前記接着剤によって前記側面を被覆する、請求項7または8に記載の液体吐出ヘッドの製造方法。
The coating step includes a step of applying an adhesive to the first surface and a step of pressing the cover member toward the adhesive.
By the pressing step, the cover member is joined to the first surface via the adhesive, and the adhesive is raised on the side surface, and the adhesive is raised as a solid substance. The method for manufacturing a liquid discharge head according to claim 7 or 8, wherein the side surface is covered.
前記押圧する工程において、前記カバー部材における前記第1の表面とは反対側となる表面に対し、前記側面の位置から張り出す部分を含む圧着板を押し付ける、請求項9に記載の液体吐出ヘッドの製造方法。 The liquid discharge head according to claim 9, wherein in the pressing step, a crimping plate including a portion protruding from the position of the side surface is pressed against a surface of the cover member opposite to the first surface. Production method. 前記押圧する工程において、前記圧着板と前記カバー部材との間に、前記接着剤の前記圧着板への付着を防ぐ付着防止フィルムを挟む、請求項10に記載の液体吐出ヘッドの製造方法。 The method for manufacturing a liquid discharge head according to claim 10, wherein in the pressing step, an adhesion prevention film for preventing the adhesive from adhering to the crimp plate is sandwiched between the crimp plate and the cover member. 前記固体物は、前記封止用樹脂とは異なる樹脂材料からなり、前記カバー部材における前記第1の表面に対向する面には設けられていない、請求項7または8に記載の液体吐出ヘッドの製造方法。 The liquid discharge head according to claim 7 or 8, wherein the solid material is made of a resin material different from the sealing resin and is not provided on the surface of the cover member facing the first surface. Production method. 前記固体物を前記カバー部材の全体に設ける工程と、
前記カバー部材における前記第1の表面に対向する面から前記固体物を除去する工程とを有し、
前記除去する工程ののち、前記カバー部材を前記第1の表面に接合し、前記塗布する工程を実施する、請求項12に記載の液体吐出ヘッドの製造方法。
The step of providing the solid material on the entire cover member and
The cover member includes a step of removing the solid substance from the surface of the cover member facing the first surface.
The method for manufacturing a liquid discharge head according to claim 12, wherein after the removing step, the cover member is joined to the first surface and the coating step is carried out.
前記除去する工程はプラズマ処理により前記固体物を除去する工程である、請求項13に記載の方法。 The method according to claim 13, wherein the removing step is a step of removing the solid substance by plasma treatment. 前記第1の表面に向く面を有するように前記カバー部材において前記側面に段差が形成されており、前記プラズマ処理によって、前記段差において前記第1の表面を向く面から前記固体物を除去する、請求項14に記載の液体吐出ヘッドの製造方法。 A step is formed on the side surface of the cover member so as to have a surface facing the first surface, and the solid matter is removed from the surface facing the first surface at the step by the plasma treatment. The method for manufacturing a liquid discharge head according to claim 14. 前記塗布する工程において、前記封止用樹脂を前記第1の表面に向く面に接触させる、請求項15に記載の液体吐出ヘッドの製造方法。
The method for manufacturing a liquid discharge head according to claim 15, wherein in the coating step, the sealing resin is brought into contact with a surface facing the first surface.
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