JP2018176580A - Liquid ejection head and its manufacturing method - Google Patents

Liquid ejection head and its manufacturing method Download PDF

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JP2018176580A
JP2018176580A JP2017080793A JP2017080793A JP2018176580A JP 2018176580 A JP2018176580 A JP 2018176580A JP 2017080793 A JP2017080793 A JP 2017080793A JP 2017080793 A JP2017080793 A JP 2017080793A JP 2018176580 A JP2018176580 A JP 2018176580A
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support member
element substrate
discharge head
liquid discharge
adhesive layer
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将志 石川
Masashi Ishikawa
将志 石川
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Canon Inc
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Canon Inc
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Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid ejection head, which is able to highly accurately adjust an amount of projection of a protective member even in a case where a warped support member is used.SOLUTION: First, a support member 1 provided with an adhesive layer 12 for sticking an element substrate 2 and a projection 13 provided around the adhesive layer 12 and capable of being deformed and hardened is formed. Then, the element substrate 2 is sucked by a suction surface 101 of a finger having this suction surface 101 and a reference formation surface 102 substantially parallel to the suction surface 101. Then, while the sucked element substrate 2 is placed on and stuck to a support member 1 via the adhesive layer 12, the projection 13 is pressed and deformed with the reference formation surface 102 and, furthermore, the projection 13 is hardened to form a reference part 14. Thereafter, while a protective member 3 is brought into contact with the reference part 14, the protective member is joined to the support member 1.SELECTED DRAWING: Figure 4

Description

本発明は、インクなどの液体を吐出する液体吐出ヘッドおよびその製造方法に関する。   The present invention relates to a liquid discharge head for discharging a liquid such as ink and a method of manufacturing the same.

インクジェット記録装置のような液体吐出装置で使用される液体吐出ヘッドでは、高精細な印字品位などを得るために、液体を吐出する素子基板と被記録媒体との間の距離を短くして、液体の被記録媒体への着弾精度を高める技術が検討されている。また、これとは別に、素子基板と被記録媒体とが接触して素子基板が損傷しないように、素子基板よりも被記録媒体側に突出した保護部材を液体吐出ヘッドに設ける技術も検討されている。これらの技術を用いて高精細な印字品位と素子基板の保護とを両立するためには、保護部材の突出量を高精度に調整して、素子基板と被記録媒体との間の距離をできるだけ短くしつつ、素子基板よりも突出した保護部材を形成することが必要となる。
特許文献1には、ステンレスなどで形成された基板(支持部材)に対して、液体を吐出する吐出口形成部材(素子基板)と保護部材とを接合する液体吐出ヘッドが開示されている。この液体吐出ヘッドでは、保護部材を吐出口形成部材よりも厚くすることで、保護部材を素子基板よりも被記録媒体側に突出させている。
In a liquid discharge head used in a liquid discharge apparatus such as an ink jet recording apparatus, the distance between the element substrate for discharging the liquid and the recording medium is shortened to obtain high definition print quality and the like. A technique for enhancing the landing accuracy of the ink on the recording medium has been studied. In addition to this, a technique for providing a liquid discharge head with a protective member which protrudes to the recording medium side further than the element substrate so that the element substrate and the recording medium do not contact and damage the element substrate is also studied. There is. In order to achieve both high-definition print quality and protection of the element substrate by using these techniques, the protrusion amount of the protection member is adjusted with high accuracy to make the distance between the element substrate and the recording medium as small as possible. While shortening, it is necessary to form a protection member which protrudes beyond the element substrate.
Patent Document 1 discloses a liquid discharge head in which a discharge port forming member (element substrate) for discharging a liquid and a protective member are bonded to a substrate (support member) made of stainless steel or the like. In this liquid discharge head, the protective member is made to protrude to the recording medium side more than the element substrate by making the protective member thicker than the discharge port forming member.

特開2005−014505号公報JP, 2005-014505, A

近年、液体吐出ヘッドの低コスト化のために、支持部材の材料として安価な樹脂材料が注目されている。しかしながら、支持部材を樹脂材料で形成すると、特に液体吐出ヘッドが長尺の場合、支持部材が液体の吐出方向に大きく反ってしまうことがある。
反りを有する支持部材に対して素子基板を接着する場合、素子基板と支持部材とを接着する接着剤層の厚さを場所に応じて変えることで、全ての素子基板の高さを揃えることが考えられる。よって、反りを有する支持部材に対して特許文献1に記載の保護部材を接合する場合、素子基板から突出する保護部材の突出量を均一にするために、保護部材と支持部材とを接着する接着剤層の厚さを場所に応じて変えることが考えられる。しかしながら、接着剤層の厚さが場所によって変わると、接着剤を硬化させた際の収縮量の差によって保護部材の高さ方向の位置が変化してしまう恐れがある。この場合、保護部材の突出量を高精度に調整することが難しく、場合によっては、素子基板が保護部材よりも突出してしまうことがある。
In recent years, inexpensive resin materials have attracted attention as materials for supporting members in order to reduce the cost of liquid discharge heads. However, when the support member is formed of a resin material, particularly when the liquid discharge head is long, the support member may be largely warped in the discharge direction of the liquid.
When bonding the element substrate to the warped support member, the heights of all the element substrates may be made uniform by changing the thickness of the adhesive layer for bonding the element substrate and the support member according to the location. Conceivable. Therefore, when bonding the protection member of patent document 1 with respect to the support member which has curvature, in order to make uniform the projection amount of the protection member which protrudes from an element substrate, the adhesion | attachment which adheres a protection member and a support member It is conceivable to change the thickness of the agent layer depending on the place. However, if the thickness of the adhesive layer changes depending on the location, the position in the height direction of the protective member may change due to the difference in the amount of shrinkage when the adhesive is cured. In this case, it is difficult to adjust the amount of protrusion of the protection member with high accuracy, and in some cases, the element substrate may protrude beyond the protection member.

そこで、本発明は、反りを有する支持部材が使用された場合でも、保護部材の突出量を高精度に調整することが可能な液体吐出ヘッドおよびその製造方法を提供することを目的とする。   Therefore, an object of the present invention is to provide a liquid discharge head capable of adjusting the amount of protrusion of the protective member with high accuracy even when a support member having a warp is used, and a method of manufacturing the same.

本発明による液体吐出ヘッドの製造方法は、液体を吐出する素子基板と、前記素子基板を支持する支持部材と、前記素子基板を保護する保護部材とを有する液体吐出ヘッドの製造方法において、前記素子基板を接着するための接着剤層と、前記接着剤層の周囲に設けられ、変形および硬化が可能な突起部とが設けられた前記支持部材を形成する突起形成工程と、吸着面と前記吸着面と略平行な基準形成面とを有する吸着部材の前記吸着面にて前記素子基板を吸着し、当該吸着した素子基板を前記支持部材に前記接着剤層を介して載置して接着させつつ、前記基準形成面で前記突起部を押圧して前記突起部を変形させ、さらに当該突起部を硬化させて基準部として形成する基準形成工程と、前記基準部に前記保護部材を当接させながら、前記保護部材を前記支持部材に接合する接合工程と、を含むことを特徴とする。
本発明による液体吐出ヘッドは、支持部材と、前記支持部材に支持された液体を吐出する素子基板と、前記素子基板を保護する保護部材と、を有する液体吐出ヘッドにおいて、前記保護部材は、前記支持部材に設けられた突起部である基準部に当接した状態で前記支持部材に接合されていることを特徴とする。
A method of manufacturing a liquid discharge head according to the present invention is a method of manufacturing a liquid discharge head including an element substrate that discharges liquid, a support member that supports the element substrate, and a protective member that protects the element substrate. A protrusion forming step of forming the support member provided with an adhesive layer for bonding a substrate, and a protrusion which is provided around the adhesive layer and capable of deformation and curing, an adsorption surface, and the adsorption The element substrate is adsorbed by the adsorption surface of the adsorption member having a reference forming surface substantially parallel to the surface, and the adsorbed element substrate is mounted on the support member via the adhesive layer and adhered. A reference forming step of pressing the projection with the reference forming surface to deform the projection and then curing the projection to form a reference, and bringing the protective member into contact with the reference; , Said Characterized in that it comprises a bonding step of bonding the member to the supporting member.
A liquid discharge head according to the present invention comprises a support member, an element substrate for discharging a liquid supported by the support member, and a protection member for protecting the element substrate, wherein the protection member is It is characterized in that it is joined to the support member in a state of being in contact with a reference portion which is a projection provided on the support member.

本発明によれば、反りを有する支持部材が使用された場合でも、保護部材の突出量を高精度に調整することが可能になる。   According to the present invention, even when a support member having a warp is used, it is possible to adjust the amount of protrusion of the protection member with high accuracy.

第1の実施形態に係る液体吐出ヘッドを示す図である。FIG. 2 is a view showing a liquid discharge head according to a first embodiment. 第1の実施形態に係る液体吐出ヘッドの製造方法で使用するフィンガを示す図である。FIG. 7 is a view showing a finger used in the method of manufacturing a liquid discharge head according to the first embodiment. 第1の実施形態に係る塗布工程を説明するための図である。It is a figure for demonstrating the application | coating process which concerns on 1st Embodiment. 第1の実施形態に係る基準形成工程を説明するための図である。It is a figure for demonstrating the reference | standard formation process which concerns on 1st Embodiment. 第1の実施形態に係る基準形成工程を説明するための図である。It is a figure for demonstrating the reference | standard formation process which concerns on 1st Embodiment. 第1の実施形態に係る接合工程で使用する接合ジグを示す図である。It is a figure which shows the joining jig used at the joining process which concerns on 1st Embodiment. 第1の実施形態に係る接合工程を説明するための図である。It is a figure for demonstrating the joining process concerning 1st Embodiment. 第2の実施形態に係る液体吐出ヘッドを示す図である。It is a figure which shows the liquid discharge head which concerns on 2nd Embodiment. 第3の実施形態に係る液体吐出ヘッドの支持部材を示す図である。It is a figure which shows the support member of the liquid discharge head which concerns on 3rd Embodiment.

以下、本発明の実施形態について図面を参照して説明する。なお、各図面において同じ機能を有するものには同じ符号を付け、その説明を省略する場合がある。
(第1の実施形態)
図1は、本発明の第1の実施形態の液体吐出ヘッド(より具体的には、液体吐出ヘッドで使用される素子基板)の要部を示す概略斜視図である。図1に示す液体吐出ヘッド10は、支持部材1と、液体を吐出する吐出口(図示せず)を備えた素子基板2と、素子基板2を保護する保護部材3とを備える。素子基板2および保護部材3は、支持部材1に接合(接着)されている。また、素子基板2は支持部材1に支持されている。
素子基板2の数は、特に限定されない。図1の例では、3つの素子基板2が支持部材1の長手方向であるX方向に沿って一直線上に配置されている。また、素子基板2の長手方向が支持部材1の長手方向に沿っている。
保護部材3は、素子基板2を囲むように形成される。保護部材3は、高さ方向であるZ方向において、素子基板2よりも突出している。Z方向は、素子基板2が液体を吐出する吐出方向と略平行である。
Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, components having the same function may be denoted by the same reference numerals, and the description thereof may be omitted.
First Embodiment
FIG. 1 is a schematic perspective view showing the main part of a liquid discharge head (more specifically, an element substrate used in a liquid discharge head) according to a first embodiment of the present invention. A liquid discharge head 10 shown in FIG. 1 includes a support member 1, an element substrate 2 having a discharge port (not shown) for discharging a liquid, and a protection member 3 for protecting the element substrate 2. The element substrate 2 and the protective member 3 are bonded (bonded) to the support member 1. The element substrate 2 is supported by the support member 1.
The number of element substrates 2 is not particularly limited. In the example of FIG. 1, the three element substrates 2 are arranged in line along the X direction which is the longitudinal direction of the support member 1. Further, the longitudinal direction of the element substrate 2 is along the longitudinal direction of the support member 1.
The protective member 3 is formed to surround the element substrate 2. The protective member 3 protrudes further than the element substrate 2 in the Z direction which is the height direction. The Z direction is substantially parallel to the discharge direction in which the element substrate 2 discharges the liquid.

以下、図1に示した液体吐出ヘッド10の製造方法について説明する。液体吐出ヘッド10の製造方法は、支持部材1に接着剤を塗布する塗布工程と、支持部材1に素子基板2を接着するとともに、保護部材3の位置の基準となる基準部を形成する基準形成工程と、支持部材1に保護部材3を接合する接合工程とを含む。
図2は、本実施形態に係る液体吐出ヘッドの製造方法で使用されるフィンガを模式的に示す概略図である。図2(a)は、フィンガを示す概略斜視図であり、図2(b)は、フィンガを示す概略正面図である。なお、図2では、使用状態とは上下反転させた反転状態のフィンガが示されている。
図2に示すフィンガ100は、基準形成工程において、素子基板2を吸着(把持)して支持部材1に載置する際に使用される吸着部材である。フィンガ100は、本体部100aと、本体部100aに形成された吸着面101および基準形成面102とを有する。吸着面101および基準形成面102は、使用状態において本体部100aよりも重力方向下向きに突出している。
吸着面101は、素子基板2を吸着する面である。吸着面101には、素子基板を吸着するための吸着穴101aが形成されている。吸着穴101aは、図の例では、複数あり、2列に並設されているが、この例に限らない。吸着穴101aから空気を吸引することで吸着面101に素子基板2が吸着される。
基準形成面102は、保護部材3を支持部材1に接合する際に、Z方向における保護部材3の位置の基準となる基準部を形成するための面である。基準形成面102は、フィンガ100の使用時に支持部材1の短手方向となるY方向における吸着面101の両側に設けられる。X方向における基準形成面102の位置は特に限定されないが、本実施形態では、吸着面101の中心とその両側に設けられた基準形成面102の中心とがY方向に沿って一直線状に並んでいる。なお、基準形成面102は、2つ以上あってもよい。
吸着面101および基準形成面102は互いに略平行である。吸着面101と基準形成面102の高さ(Z方向の位置)の差である面間距離dは、後述するように基準部の高さを規定する。また、後述するように保護部材3は接合工程において基準部に当接しながら支持部材1に接合されるため、基準部の高さはZ方向における保護部材3の突出量を規定する。したがって、面間距離dを調整することで、保護部材3の突出量を調整することが可能である。本実施形態では、面間距離dは、素子基板2の厚さと略同じである。ここで略同じとは、面間距離dと素子基板2の厚さとの差が±50μm以内であることを意味する。
Hereinafter, a method of manufacturing the liquid discharge head 10 shown in FIG. 1 will be described. In the method of manufacturing the liquid discharge head 10, a coating step of applying an adhesive to the support member 1 and a reference formation of bonding the element substrate 2 to the support member 1 and forming a reference portion to be a reference of the position of the protective member 3 And a bonding step of bonding the protective member 3 to the support member 1.
FIG. 2 is a schematic view schematically showing a finger used in the method of manufacturing a liquid discharge head according to the present embodiment. Fig.2 (a) is a schematic perspective view which shows a finger, FIG.2 (b) is a schematic front view which shows a finger. In addition, in FIG. 2, the finger of the inversion state which upside down was used is shown.
The finger 100 shown in FIG. 2 is a suction member used when the element substrate 2 is suctioned (held) and placed on the support member 1 in the reference formation step. The finger 100 has a main body portion 100 a and a suction surface 101 and a reference forming surface 102 formed on the main body portion 100 a. The suction surface 101 and the reference forming surface 102 project downward in the direction of gravity than the main body 100 a in the use state.
The adsorption surface 101 is a surface for adsorbing the element substrate 2. In the suction surface 101, suction holes 101a for suctioning the element substrate are formed. A plurality of suction holes 101a are provided in parallel in two rows in the illustrated example, but the present invention is not limited to this example. The element substrate 2 is adsorbed to the adsorption surface 101 by suctioning air from the adsorption holes 101 a.
The reference forming surface 102 is a surface for forming a reference portion which becomes a reference of the position of the protective member 3 in the Z direction when the protective member 3 is joined to the support member 1. The reference forming surfaces 102 are provided on both sides of the suction surface 101 in the Y direction which is the lateral direction of the support member 1 when the finger 100 is used. The position of the reference forming surface 102 in the X direction is not particularly limited, but in the present embodiment, the center of the suction surface 101 and the center of the reference forming surface 102 provided on both sides are aligned in a straight line along the Y direction. There is. Note that two or more reference formation surfaces 102 may be provided.
The suction surface 101 and the reference forming surface 102 are substantially parallel to each other. The inter-plane distance d, which is the difference between the height (position in the Z direction) of the suction surface 101 and the reference formation surface 102, defines the height of the reference portion as described later. Further, as described later, since the protective member 3 is joined to the support member 1 while being in contact with the reference portion in the joining process, the height of the reference portion defines the amount of protrusion of the protective member 3 in the Z direction. Therefore, by adjusting the inter-plane distance d, it is possible to adjust the amount of protrusion of the protective member 3. In the present embodiment, the inter-plane distance d is substantially the same as the thickness of the element substrate 2. Here, “substantially the same” means that the difference between the inter-plane distance d and the thickness of the element substrate 2 is within ± 50 μm.

次に液体吐出ヘッドの製造工程について説明する。
先ず、支持部材1に接着剤を塗布する塗布工程について説明する。図3は、塗布工程を説明するための図である。具体的には、図3(a)は、塗布工程終了後の支持部材を示す概略斜視図であり、図3(b)は、塗布工程終了後の支持部材を示す概略正面図である。図3(c)は、塗布工程終了後の支持部材を示す概略上面図である。
図3に示すように、支持部材1には、素子基板2に液体を供給する供給口11が設けられている。供給口11の位置、形状および数などは特に限定されない。本実施形態では、供給口11ごとに素子基板2を支持部材1に接合させるため、3つの供給口11が支持部材1の長手方向であるX方向に沿って一直線上に配置されている。
支持部材1の材料は、本実施形態では、樹脂材料である。より具体的には、支持部材1の材料は、フィラーを充填して線膨張係数を小さくした樹脂材料である。支持部材1を樹脂材料で形成した場合、支持部材1は、図3(b)に示すように、Z方向にたわむことがある。
塗布工程は、素子基板2を接着するための接着剤層12と、接着剤層12の周囲に設けられた突起部13とを有する支持部材1を形成する突起形成工程でもある。具体的には、塗布工程は、支持部材1に対して接着剤が塗布することで、接着剤層12と突起部13とを支持部材1に形成する。
接着剤層12は、各供給口11を囲むように形成されている。接着剤層12を形成する接着剤の種類は、接着剤を硬化させる硬化手段および接着剤層12として必要な高さに応じて選択される。本実施形態では、接着剤層12は熱硬化性接着剤で形成されている。
接着剤層12の高さh1は、素子基板2を、接着剤層12を介して支持部材1に接着させた際に、全ての素子基板2を同じ高さに揃えることができるように決定される。接着剤層12の高さh1を決定するパラメータとしては、例えば、支持部材1の高さ方向の反り量および平面度と、素子基板の厚み公差および平面度と、フィンガ5の使用時の傾きなどが挙げられる。本実施形態では、接着剤層12の高さh1は0.2mmである。
Next, the manufacturing process of the liquid discharge head will be described.
First, an application step of applying an adhesive to the support member 1 will be described. FIG. 3 is a view for explaining the coating process. Specifically, FIG. 3 (a) is a schematic perspective view showing the support member after the end of the coating process, and FIG. 3 (b) is a schematic front view showing the support member after the end of the coating process. FIG.3 (c) is a schematic top view which shows the support member after completion | finish of a coating process.
As shown in FIG. 3, the support member 1 is provided with a supply port 11 for supplying a liquid to the element substrate 2. The position, shape and number of the supply ports 11 are not particularly limited. In the present embodiment, in order to bond the element substrate 2 to the support member 1 for each supply port 11, the three supply ports 11 are arranged in a straight line along the X direction which is the longitudinal direction of the support member 1.
The material of the support member 1 is a resin material in the present embodiment. More specifically, the material of the support member 1 is a resin material filled with a filler to reduce the linear expansion coefficient. When the support member 1 is formed of a resin material, the support member 1 may be bent in the Z direction as shown in FIG. 3 (b).
The application step is also a projection forming step of forming the support member 1 having the adhesive layer 12 for bonding the element substrate 2 and the projection 13 provided around the adhesive layer 12. Specifically, in the application step, the adhesive is applied to the support member 1 to form the adhesive layer 12 and the protrusion 13 on the support member 1.
The adhesive layer 12 is formed to surround each supply port 11. The type of adhesive forming the adhesive layer 12 is selected according to the curing means for curing the adhesive and the height required for the adhesive layer 12. In the present embodiment, the adhesive layer 12 is formed of a thermosetting adhesive.
The height h1 of the adhesive layer 12 is determined so that when the element substrate 2 is bonded to the support member 1 via the adhesive layer 12, all the element substrates 2 can be aligned to the same height. Ru. The parameters for determining the height h1 of the adhesive layer 12 include, for example, the amount of warpage and flatness of the support member 1 in the height direction, the thickness tolerance and flatness of the element substrate, the inclination of the finger 5 during use, etc. Can be mentioned. In the present embodiment, the height h1 of the adhesive layer 12 is 0.2 mm.

突起部13は、変形および硬化が可能な材料で形成される。突起部13を形成する材料の種類は、硬化手段、必要な高さおよび硬化後の硬度に応じて選択される。突起部13は、接着剤層12と同じ材料で形成されてもよいし、異なる材料で形成されてもよいが、本実施形態では、接着剤層12と同じ材料(熱硬化性接着剤)で形成される。例えば、ある組成物を用意し、この組成物を用いて製造したもの同士は、同じ材料で形成されていると見なす。
突起部13は、後述する基準形成工程において変形され、Z方向における保護部材3の位置の基準となる基準部として形成される。具体的には、突起部13は、図2に示したフィンガ100の吸着面101に吸着された素子基板2が供給口11の上に載置された際に、フィンガ100の基準形成面102により押圧され、さらに硬化されることで基準部として形成される。このため、突起部13は、素子基板2が供給口11の上に載置された際に、基準形成面102と接触する位置に形成される。図の例では、供給口11ごとにフィンガ100の2つの基準形成面102のそれぞれにて基準部が形成されるように、支持部材1の短手方向であるY方向において、各供給口11の両側に設けられる。したがって、突起部13は支持部材1上に6か所形成されている。
突起部13の配置および数は、図の例に限らない。突起部13は、Y方向において供給口11の両側に合計で3か所以上形成されていればよい。突起部13は、保護部材3が接着される接着領域3aのX方向の長さをLとした場合、突起部13と接着領域3aの外周までの距離がL/2以下となるように配置されることが好ましい。これは、保護部材3を支持部材1に接合する際に保護部材3が傾くことを抑制するためである。
また、突起部13の高さh2は、フィンガ100の吸着面101と基準形成面102の高さ(Z方向の位置)の差である面間距離dとした場合、h1−d以上であれば良い。本実施形態では、突起部13の高さh2は、h2=0.2mm(=h1)である。
The protrusions 13 are formed of a material that can be deformed and cured. The type of material forming the protrusions 13 is selected according to the curing means, the required height and the hardness after curing. The protrusion 13 may be formed of the same material as the adhesive layer 12 or may be formed of a different material, but in the present embodiment, the same material (thermosetting adhesive) as the adhesive layer 12 is used. It is formed. For example, a composition is prepared, and those manufactured using this composition are considered to be formed of the same material.
The protrusion 13 is deformed in a reference formation process described later, and is formed as a reference part which becomes a reference of the position of the protection member 3 in the Z direction. Specifically, when the element substrate 2 adsorbed on the suction surface 101 of the finger 100 shown in FIG. 2 is placed on the supply port 11, the protrusion 13 is formed by the reference forming surface 102 of the finger 100. It is formed as a reference part by being pressed and further cured. Therefore, when the element substrate 2 is placed on the supply port 11, the protrusion 13 is formed at a position in contact with the reference forming surface 102. In the example of the figure, each of the supply ports 11 is formed in the Y direction which is the short direction of the support member 1 so that the reference portion is formed on each of the two reference forming surfaces 102 of the finger 100 for each supply port 11. It is provided on both sides. Therefore, the protrusions 13 are formed at six locations on the support member 1.
The arrangement and number of the protrusions 13 are not limited to the examples shown in the drawings. The protrusions 13 may be formed at three or more places in total on both sides of the supply port 11 in the Y direction. The protrusion 13 is arranged such that the distance between the protrusion 13 and the outer periphery of the bonding area 3a is L / 2 or less, where L is the length in the X direction of the bonding area 3a to which the protective member 3 is bonded. Is preferred. This is to suppress the tilting of the protective member 3 when joining the protective member 3 to the support member 1.
The height h2 of the protrusion 13 is h1-d or more if it is the inter-plane distance d which is the difference between the height (position in the Z direction) of the suction surface 101 of the finger 100 and the reference forming surface 102. good. In the present embodiment, the height h2 of the protrusion 13 is h2 = 0.2 mm (= h1).

続いて、基準形成工程について説明する。
図4および図5は、基準形成工程を説明するための図である。具体的には、図4(a)は、基準形成工程中の液体吐出ヘッドを示す概略斜視図であり、図4(b)は、基準形成工程中の液体吐出ヘッドを示す概略正面図である。図4(c)は、基準形成工程中の液体吐出ヘッドを示す概略斜視図である。図5(a)は、基準形成工程終了後の液体吐出ヘッドを示す概略斜視図であり、図5(b)は、基準形成工程終了後の液体吐出ヘッドを示す概略正面図である。
基準形成工程では、先ず、フィンガ100の吸着面101で素子基板2を吸着し、その吸着した素子基板2を接着剤層12および突起部13が形成された支持部材1の供給口11の上に接着剤層12を介して載置する。そして接着剤層12を加熱して素子基板2を支持部材1と隙間(接着剤層12)を介して接着させつつ、フィンガ100の基準形成面102で突起部13を押圧しながら変形させる。そして、変形後の突起部13を加熱して硬化させることで、突起部13を基準部14として形成する。
基準部14は、上述したようにZ方向におけるフィンガ100の吸着面101と基準形成面102との高さの差である面間距離をdとした場合、素子基板2の上面から面間距離dだけ低く形成される。本実施形態では、接着剤層12および突起部13の硬化による収縮量である硬化収縮量の差を小さくするために、上述したように基準部14の高さを接着剤層12と同じにしている。
なお、接着剤層12および突起部13のZ方向の高さは、支持部材1の反りが最も小さい箇所で所望の値になるように、支持部材1の反り量をレーザー変位計などで予め測定しておき、その反り量に基づいて、フィンガ100を制御することで調整される。
上記の工程を供給口11ごとに繰り返すことで、図5に示すように、素子基板2の上面から面間距離dだけ低い、つまり素子基板2の厚さ分だけ低い基準部14が形成された液体吐出ヘッド10を形成することができる。
Subsequently, the reference forming step will be described.
FIG. 4 and FIG. 5 are diagrams for explaining the reference forming process. Specifically, FIG. 4 (a) is a schematic perspective view showing the liquid discharge head in the reference forming process, and FIG. 4 (b) is a schematic front view showing the liquid discharge head in the reference forming process. . FIG. 4C is a schematic perspective view showing the liquid discharge head in the reference forming process. FIG. 5A is a schematic perspective view showing the liquid discharge head after completion of the reference formation process, and FIG. 5B is a schematic front view showing the liquid discharge head after completion of the reference formation process.
In the reference forming step, first, the element substrate 2 is adsorbed on the adsorption surface 101 of the finger 100, and the adsorbed element substrate 2 is placed on the supply port 11 of the support member 1 on which the adhesive layer 12 and the projection 13 are formed. It is placed via the adhesive layer 12. Then, while the adhesive layer 12 is heated to bond the element substrate 2 with the support member 1 via the gap (adhesive layer 12), the projection 13 is deformed while being pressed by the reference forming surface 102 of the finger 100. Then, the projection 13 is formed as the reference portion 14 by heating and curing the projection 13 after deformation.
Assuming that the inter-plane distance, which is the difference in height between the suction surface 101 of the finger 100 and the reference formation surface 102 in the Z direction, is d, as described above, the inter-plane distance d from the upper surface of the element substrate 2 Only formed lower. In the present embodiment, the height of the reference portion 14 is made the same as that of the adhesive layer 12 as described above in order to reduce the difference in the cure contraction amount which is the contraction amount due to the curing of the adhesive layer 12 and the protrusion 13. There is.
The amount of warpage of the support member 1 is measured in advance by a laser displacement meter or the like so that the height of the adhesive layer 12 and the protrusion 13 in the Z direction becomes a desired value at the place where the warpage of the support member 1 is the smallest. It is adjusted by controlling the finger 100 based on the amount of warpage.
By repeating the above steps for each supply port 11, as shown in FIG. 5, a reference portion 14 is formed which is smaller from the upper surface of the element substrate 2 by the distance d between the surfaces, that is, smaller by the thickness of the element substrate 2. The liquid discharge head 10 can be formed.

接着剤層12と突起部13の加熱はフィンガ100を加熱することで行われる。フィンガ100の加熱温度と加熱時間は、接着剤層12および突起部13に使用される接着剤の種類に応じて適宜設定される。本実施形態では、加熱温度が150℃、加熱時間が60sである。基準部14の形状は、図5では、円筒形状であるが、この例に限らない。基準部14は、後述する保護部材3の変形を抑制する観点から、支持部材1の長手方向であるX方向に沿った線状の突起であることが好ましい。これは、突起部13をX方向に沿って線状に形成することで実現できる。
図5では、全ての基準部14の上面の位置が略揃っているが、実際には、フィンガ100の停止精度や基準部14の高さの違いによる硬化収縮量の差によって僅かにずれている。後の接合工程で保護部材3は、基準部14のうちZ方向の高さが最も高い、つまり最も突出している3つの基準部14に当接することでZ方向の位置が規定される。このとき、最も突出している3つの基準部14を仮想的な直線で結んだ領域である仮想領域に、支持部材1の重心が含まれない場合、後の接合工程で保護部材を支持部材1に接合する際に支持部材1が倒れてしまう可能性がある。この場合、保護部材3が支持部材1に対して傾いて接合されてしまう。
このため、支持部材1と保護部材とが傾いて接合されることを抑制するために、最も突出した3つの基準部14を結んだ仮想領域に支持部材1の重心が含まれるように基準部14を形成することが好ましい。本実施形態では、支持部材1の重心が仮想領域に含まれるように、6つの基準部14のうち3つの基準部14を他の基準部14よりも意図的に突出させる。これは、例えば、他の基準部14よりも突出させる3つの基準部14を形成する際には、フィンガ100のZ方向の停止位置を他の基準部14の形成時よりも高くすることで実現できる。
The heating of the adhesive layer 12 and the protrusion 13 is performed by heating the finger 100. The heating temperature and heating time of the finger 100 are appropriately set according to the type of adhesive used for the adhesive layer 12 and the protrusion 13. In the present embodiment, the heating temperature is 150 ° C., and the heating time is 60 s. Although the shape of the reference part 14 is a cylindrical shape in FIG. 5, it is not limited to this example. It is preferable that the reference | standard part 14 is a linear protrusion along the X direction which is a longitudinal direction of the supporting member 1, from a viewpoint of suppressing a deformation | transformation of the protection member 3 mentioned later. This can be realized by forming the protrusions 13 linearly along the X direction.
In FIG. 5, the positions of the upper surfaces of all the reference portions 14 are substantially aligned, but in fact, they are slightly shifted due to the difference in the cure shrinkage amount due to the difference in the stopping accuracy of the finger 100 and the height of the reference portions 14 . In the subsequent bonding step, the protective member 3 is positioned in the Z direction by contacting the three reference portions 14 having the highest height in the Z direction, that is, the most projecting portions of the reference portions 14. At this time, if the center of gravity of the support member 1 is not included in the virtual region which is the region connecting the three projecting standard portions 14 by virtual straight lines, the protection member is used as the support member 1 in the later bonding step. At the time of joining, there is a possibility that the support member 1 falls. In this case, the protective member 3 is inclined and joined to the support member 1.
For this reason, in order to prevent the support member 1 and the protection member from being inclined and joined, the center of gravity of the support member 1 is included in the virtual region connecting the three projecting reference portions 14. It is preferable to form In the present embodiment, three reference portions 14 out of the six reference portions 14 are intentionally projected more than the other reference portions 14 so that the center of gravity of the support member 1 is included in the virtual area. This is realized, for example, by forming the three reference portions 14 to be projected more than the other reference portions 14 by setting the stop position of the finger 100 in the Z direction higher than that of the other reference portions 14. it can.

次に保護部材を支持部材1に接合する接合工程について説明する。図6および図7は、接合工程を説明するための図である。具体的には、図6は、保護部材を支持部材に接合するための接合ジグを示す概略斜視図である。図7(a)は、接合工程中の液体吐出ヘッドを示す概略斜視図であり、図7(b)は、接合工程中の液体吐出ヘッドを示す略正面図である。
図6に示すように接合ジグ20には、保護部材3を固定(吸着)するための吸着穴(図示せず)が形成されており、その吸着穴から空気を吸引することで保護部材3を吸着する。このとき、接合ジグ20は、図7(b)に示すように保護部材3における素子基板2を保護する保護面3bが下向き、つまり保護面3bが接合ジグ20と接触するように固定する。保護部材3は、図1に示したように素子基板2を囲むように形成されるため、接合ジグ20の保護部材3で囲まれる領域は、素子基板2と当接しないように、凹部20aが形成されている。
接合ジグ20に保護部材3を固定すると、図7に示すように接合ジグ20の上に、液体吐出ヘッド10を、素子基板2が下向きとなり、かつ、素子基板2が接合ジグ20の凹部20aに収まるように載置する。これにより、保護部材3は支持部材1上の基準部14のみに当接する。また、支持部材1の保護部材3と接着する接着領域には、接着剤を塗布して接着剤層15を予め形成しておく。接着剤層15を形成する接着剤の種類は特に限定されないが、本実施形態では、熱硬化性接着剤である。
液体吐出ヘッド10を接合ジグ20の上に載置した状態で接着剤層15を加熱して硬化させることで、保護部材3と支持部材1とを接合する。なお、保護部材3の突出量は、保護部材3の厚さとフィンガ100の吸着面101と基準形成面102の高さの差である面間距離dとで規定される。本実施形態では、保護部材3の厚さは0.5mmである。
Next, a bonding step of bonding the protective member to the support member 1 will be described. 6 and 7 are views for explaining the bonding process. Specifically, FIG. 6 is a schematic perspective view showing a joining jig for joining the protective member to the support member. FIG. 7A is a schematic perspective view showing the liquid discharge head in the bonding process, and FIG. 7B is a schematic front view showing the liquid discharge head in the bonding process.
As shown in FIG. 6, in the bonding jig 20, suction holes (not shown) for fixing (sucking) the protective member 3 are formed, and the protective member 3 is formed by suctioning air from the suction holes. Adsorb. At this time, as shown in FIG. 7B, the bonding jig 20 is fixed so that the protective surface 3 b of the protective member 3 for protecting the element substrate 2 faces downward, ie, the protective surface 3 b contacts the bonding jig 20. Since the protective member 3 is formed so as to surround the element substrate 2 as shown in FIG. 1, the recess 20 a is formed so that the region surrounded by the protective member 3 of the bonding jig 20 does not abut the element substrate 2. It is formed.
When the protective member 3 is fixed to the bonding jig 20, as shown in FIG. 7, the liquid discharge head 10 is placed on the bonding jig 20 with the element substrate 2 facing downward and the element substrate 2 in the recess 20a of the bonding jig 20. Place to fit. Thereby, the protection member 3 abuts only on the reference portion 14 on the support member 1. Further, an adhesive agent is applied to an adhesion area of the support member 1 to be adhered to the protective member 3 to form an adhesive layer 15 in advance. Although the kind of adhesive which forms the adhesive layer 15 is not specifically limited, In this embodiment, it is a thermosetting adhesive.
The protective layer 3 and the support member 1 are bonded by heating and curing the adhesive layer 15 in a state where the liquid discharge head 10 is placed on the bonding jig 20. The amount of protrusion of the protective member 3 is defined by the thickness of the protective member 3 and the inter-surface distance d which is the difference between the suction surface 101 of the finger 100 and the height of the reference forming surface 102. In the present embodiment, the thickness of the protective member 3 is 0.5 mm.

以上説明した本実施形態によれば、素子基板2を接着するための接着剤層12と、接着剤層12の周囲に設けられ、変形および硬化が可能な突起部13とが設けられた支持部材1が形成される。その後、吸着面101と吸着面101と略平行な基準形成面102とを有するフィンガの吸着面101にて素子基板2を吸着する。そして、その吸着した素子基板2を支持部材1に接着剤層12を介して載置して接着させつつ、基準形成面102で突起部13を押圧して変形させ、さらに突起部13を硬化させて基準部14として形成する。その後、保護部材3を基準部14に当接させながら支持部材1に接合する。
これにより、吸着面101で吸着した素子基板2が支持部材1に載置されつつ、基準形成面102で突起部13が押圧されて変形されることで基準部14が形成され、保護部材3が基準部14に当接した状態で支持部材1に接合される。このため、保護部材3の突出量は基準部14の高さによって規定され、基準部14の高さは吸着面101と基準形成面102との高さの差を調整することにより高精度に調整することができる。したがって、反りを有する支持部材1が使用された場合でも、保護部材3の突出量を高精度に調整することが可能になる。また、接着剤層15の硬化収縮量の差によって保護部材3に対して力が加わったとしても、基準部14で支持されているため、保護部材3の変形を抑制することが可能になる。
また、本実施形態では、基準部14が3つ以上設けられているため、保護部材を3点以上で支持することが可能になる。このため、接合工程において保護部材3が傾き、支持部材1と保護部材3とがずれて接合されることを抑制することが可能になる。したがって、保護部材3の突出量をより精度よく調整することが可能になる。
また、本実施形態では、基準部14のうち最も突出した3つの基準部を直線で結んだ領域に、支持部材1の重心が含まれる。このため、接合工程において支持部材1が傾き、支持部材1と保護部材3とがずれて接合されることを抑制することができる。したがって、保護部材3の突出量をより精度よく調整することが可能になる。
また、本実施形態では、突起部13は、フィンガ100の吸着面101の両側に設けられた基準形成面102のそれぞれで押圧されるように、支持部材1の短手方向における接着剤層12の両側に設けられる。これにより、基準部14を素子基板2の両側に同時に形成することが可能になる。
また、本実施形態では、突起部13と接着剤層12とが同じ材料で形成されるため、突起部13を接着剤層12とを同時形成することが可能になる。
According to the present embodiment described above, the support member provided with the adhesive layer 12 for bonding the element substrate 2 and the projection 13 provided around the adhesive layer 12 and capable of deformation and curing. 1 is formed. Thereafter, the element substrate 2 is adsorbed by the suction surface 101 of a finger having the suction surface 101 and the reference formation surface 102 substantially parallel to the suction surface 101. Then, while attaching and adhering the adsorbed element substrate 2 to the support member 1 via the adhesive layer 12, the protrusion 13 is pressed and deformed by the reference forming surface 102, and the protrusion 13 is further cured. To form the reference portion 14. Thereafter, the protective member 3 is joined to the support member 1 while being in contact with the reference portion 14.
As a result, while the element substrate 2 adsorbed on the adsorption surface 101 is placed on the support member 1, the projection 13 is pressed and deformed on the reference formation surface 102 to form the reference portion 14, and the protection member 3 is formed. It is joined to the support member 1 in a state of being in contact with the reference portion 14. Therefore, the amount of protrusion of the protective member 3 is defined by the height of the reference portion 14, and the height of the reference portion 14 is adjusted with high accuracy by adjusting the difference in height between the suction surface 101 and the reference formation surface 102. can do. Therefore, even when the support member 1 having a warp is used, the amount of protrusion of the protection member 3 can be adjusted with high accuracy. In addition, even if a force is applied to the protective member 3 due to the difference in the amount of curing and shrinkage of the adhesive layer 15, the deformation of the protective member 3 can be suppressed because it is supported by the reference portion.
Further, in the present embodiment, three or more reference portions 14 are provided, so that it is possible to support the protection member at three or more points. For this reason, it becomes possible to suppress that the protection member 3 inclines in a joining process, and the support member 1 and the protection member 3 are shifted and joined. Therefore, it becomes possible to adjust the projection amount of the protection member 3 more accurately.
Further, in the present embodiment, the center of gravity of the support member 1 is included in a region where the three projecting reference portions of the reference portions 14 are connected by a straight line. For this reason, it is possible to suppress that the support member 1 tilts in the joining step and the support member 1 and the protective member 3 are shifted and joined. Therefore, it becomes possible to adjust the projection amount of the protection member 3 more accurately.
Further, in the present embodiment, the protrusions 13 are formed of the adhesive layer 12 in the lateral direction of the support member 1 so as to be pressed by each of the reference forming surfaces 102 provided on both sides of the suction surface 101 of the finger 100. It is provided on both sides. Thus, the reference portions 14 can be formed simultaneously on both sides of the element substrate 2.
Further, in the present embodiment, since the protrusion 13 and the adhesive layer 12 are formed of the same material, it becomes possible to simultaneously form the protrusion 13 with the adhesive layer 12.

(第2の実施形態)
図8は、本実施形態の液体吐出ヘッドを示す概略斜視図である。図8では、基準形成工程終了後の液体吐出ヘッドが示されている。図8に示す本実施形態の液体吐出ヘッド10aは、図1に示した第1の実施形態の液体吐出ヘッド10と比べて、素子基板2の配置が異なる。具体的には、第1の実施形態の液体吐出ヘッド10では、素子基板2の長手方向が支持部材1の長手方向に沿って設けられていたが、本実施形態の液体吐出ヘッド10aは、素子基板2の長手方向が支持部材1の短手方向に沿って設けられている。このような場合でも、第1の実施形態と同様にして保護部材の突出量を高精度に調整した液体吐出ヘッド10aを製造することができる。なお、このような液体吐出ヘッド10aは、素子基板2のそれぞれから互いに異なる色のインクを吐出するものに好適である。
Second Embodiment
FIG. 8 is a schematic perspective view showing the liquid discharge head of the present embodiment. FIG. 8 shows the liquid discharge head after completion of the reference formation process. The liquid discharge head 10a of the present embodiment shown in FIG. 8 differs from the liquid discharge head 10 of the first embodiment shown in FIG. Specifically, in the liquid discharge head 10 of the first embodiment, the longitudinal direction of the element substrate 2 is provided along the longitudinal direction of the support member 1. However, the liquid discharge head 10 a of the present embodiment is an element The longitudinal direction of the substrate 2 is provided along the lateral direction of the support member 1. Even in such a case, it is possible to manufacture the liquid discharge head 10a in which the protrusion amount of the protection member is adjusted with high accuracy as in the first embodiment. Such a liquid ejection head 10 a is suitable for ejecting ink of different colors from each of the element substrates 2.

(第3の実施形態)
図9は、本実施形態の支持部材を示す概略斜視図である。図9では、塗布工程終了後の支持部材が示されている。
第1の実施形態では、基準部14を、図2に示した接着剤で形成された突起部13を硬化することで作成していた。図9に示す本実施形態の支持部材1には、突起部13の代わりに樹脂で形成された突起部13aが設けられている。突起部13aを形成する樹脂は、変形および硬化が可能なものであればよい。例えば、突起部13aを形成する樹脂は、熱硬化性樹脂でもよいし、熱可塑性樹脂でもよい。本実施形態では、突起部13aは、熱可塑性樹脂で形成される。
突起部13aは、支持部材1の成型時に形成されてもよいし、支持部材1の成型後に支持部材1に接着されてもよい。突起部13aの高さは、第1の実施形態の突起部13の高さと同様である。
基準形成工程では、フィンガ100の吸着面101で吸着した素子基板2を支持部材1に対して下降させていくと、フィンガ100の基準形成面102が突起部13aに当接する。その状態で突起部13aを加熱溶融させながらフィンガ100をさらに下降させていく、これにより、突起部13aが変形していく。その後、接着剤層12が所望の高さになったところで接着剤層12を加熱して、素子基板2を支持部材1に接着させる。素子基板2が接着した後に、フィンガ100の基準形成面102を冷却することで突起部13aを硬化させて、突起部13aを基準部14として形成する。
上記の工程を供給口11ごとに繰り返すことで図1に示した液体吐出ヘッド10を製造することができる。
本実施形態では、基準部14を接着剤層12とは別の材料で形成できるため、所望の基準部を容易に形成することが可能になる。
Third Embodiment
FIG. 9 is a schematic perspective view showing the support member of the present embodiment. In FIG. 9, the support member after the end of the coating process is shown.
In the first embodiment, the reference portion 14 is formed by curing the projection 13 formed of the adhesive shown in FIG. The supporting member 1 of the present embodiment shown in FIG. 9 is provided with a protrusion 13 a made of resin instead of the protrusion 13. The resin forming the projection 13a may be any resin that can be deformed and cured. For example, the resin forming the protrusion 13a may be a thermosetting resin or a thermoplastic resin. In the present embodiment, the protrusion 13a is formed of a thermoplastic resin.
The protrusion 13 a may be formed when the support member 1 is molded, or may be adhered to the support member 1 after the support member 1 is molded. The height of the protrusion 13a is the same as the height of the protrusion 13 of the first embodiment.
In the reference formation step, as the element substrate 2 adsorbed on the suction surface 101 of the finger 100 is lowered with respect to the support member 1, the reference formation surface 102 of the finger 100 abuts on the projection 13 a. In this state, the finger 100 is further lowered while heating and melting the protrusion 13a, whereby the protrusion 13a is deformed. Thereafter, when the adhesive layer 12 reaches a desired height, the adhesive layer 12 is heated to adhere the element substrate 2 to the support member 1. After the element substrate 2 is bonded, the projection 13 a is cured by cooling the reference forming surface 102 of the finger 100 to form the projection 13 a as the reference 14.
By repeating the above steps for each supply port 11, the liquid discharge head 10 shown in FIG. 1 can be manufactured.
In the present embodiment, since the reference portion 14 can be formed of a material different from that of the adhesive layer 12, a desired reference portion can be easily formed.

以上説明した各実施形態において、図示した構成は単なる一例であって、本発明はその構成に限定されるものではない。   In each embodiment described above, the illustrated configuration is merely an example, and the present invention is not limited to the configuration.

1 支持部材
2 素子基板
3 保護部材
10、10a 液体吐出ヘッド
12 接着剤層
13、13a 突起部
14 基準部
100 フィンガ
101 吸着面
102 基準形成面
Reference Signs List 1 support member 2 element substrate 3 protective member 10, 10a liquid discharge head 12 adhesive layer 13, 13a protrusion 14 reference portion 100 finger 101 suction surface 102 reference formation surface

Claims (9)

液体を吐出する素子基板と、前記素子基板を支持する支持部材と、前記素子基板を保護する保護部材とを有する液体吐出ヘッドの製造方法において、
前記素子基板を接着するための接着剤層と、前記接着剤層の周囲に設けられ、変形および硬化が可能な突起部とが設けられた前記支持部材を形成する突起形成工程と、
吸着面と前記吸着面と略平行な基準形成面とを有する吸着部材の前記吸着面にて前記素子基板を吸着し、当該吸着した素子基板を前記支持部材に前記接着剤層を介して載置して接着させつつ、前記基準形成面で前記突起部を押圧して前記突起部を変形させ、さらに当該突起部を硬化させて基準部として形成する基準形成工程と、
前記基準部に前記保護部材を当接させながら、前記保護部材を前記支持部材に接合する接合工程と、を含むことを特徴とする液体吐出ヘッドの製造方法。
A method of manufacturing a liquid discharge head, comprising: an element substrate for discharging a liquid; a support member for supporting the element substrate; and a protective member for protecting the element substrate.
A protrusion forming step of forming the support member provided with an adhesive layer for bonding the element substrate, and a protrusion which is provided around the adhesive layer and which can be deformed and cured;
The element substrate is adsorbed by the adsorption surface of an adsorption member having an adsorption surface and a reference formation surface substantially parallel to the adsorption surface, and the adsorbed element substrate is placed on the support member via the adhesive layer. A reference forming step of pressing the projection with the reference forming surface to deform the projection while curing and forming the projection as a reference;
And a bonding step of bonding the protective member to the support member while bringing the protective member into contact with the reference portion.
前記基準部は3つ以上設けられる、請求項1に記載の液体吐出ヘッドの製造方法。   The method of manufacturing a liquid discharge head according to claim 1, wherein three or more reference portions are provided. 前記基準形成工程では、前記基準部のうち最も突出した3つの基準部を直線で結んだ領域に、前記支持部材の重心が含まれるように前記基準部を形成する、請求項2に記載の液体吐出ヘッドの製造方法。   The liquid according to claim 2, wherein, in the reference forming step, the reference portion is formed such that the center of gravity of the support member is included in a region connecting the three projecting most reference portions of the reference portions by straight lines. Method of manufacturing a discharge head. 前記突起部は、前記吸着面の両側に設けられた前記基準形成面のそれぞれで押圧されるように、前記支持部材の短手方向における前記接着剤層の両側に設けられる、請求項1ないし3のいずれか1項に記載の液体吐出ヘッドの製造方法。   4. The projection according to claim 1, wherein the projections are provided on both sides of the adhesive layer in the lateral direction of the support member so as to be pressed by each of the reference forming surfaces provided on both sides of the suction surface. The manufacturing method of the liquid discharge head of any one of these. 前記突起部は、熱硬化性接着剤で形成される請求項1ないし4のいずれか1項に記載の液体吐出ヘッドの製造方法。   The method for manufacturing a liquid discharge head according to any one of claims 1 to 4, wherein the protrusion is formed of a thermosetting adhesive. 前記突起部は、熱硬化性樹脂で形成される請求項1ないし4のいずれか1項に記載の液体吐出ヘッドの製造方法。   The method for manufacturing a liquid discharge head according to any one of claims 1 to 4, wherein the protrusion is formed of a thermosetting resin. 前記突起部は、熱可塑性樹脂で形成される請求項1ないし7のいずれか1項に記載の液体吐出ヘッドの製造方法。   The method for manufacturing a liquid discharge head according to any one of claims 1 to 7, wherein the protrusion is formed of a thermoplastic resin. 前記突起部は、前記接着剤層と同じ材料で形成される請求項1ないし4のいずれか1項に記載の液体吐出ヘッドの製造方法。   The method of manufacturing a liquid discharge head according to any one of claims 1 to 4, wherein the protrusion is formed of the same material as the adhesive layer. 支持部材と、前記支持部材に支持された液体を吐出する素子基板と、前記素子基板を保護する保護部材と、を有する液体吐出ヘッドにおいて、
前記保護部材は、前記素子基板よりも突出し、かつ、前記支持部材に設けられた突起部である基準部に当接した状態で前記支持部材に接合されていることを特徴とする液体吐出ヘッド。
A liquid discharge head comprising: a support member; an element substrate for discharging a liquid supported by the support member; and a protection member for protecting the element substrate.
The liquid discharge head according to claim 1, wherein the protective member protrudes from the element substrate and is joined to the support member in a state of being in contact with a reference portion which is a projection provided on the support member.
JP2017080793A 2017-04-14 2017-04-14 Liquid ejection head and its manufacturing method Pending JP2018176580A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020040284A (en) * 2018-09-10 2020-03-19 キヤノン株式会社 Liquid discharge head, liquid discharge device and method for manufacturing liquid discharge head
JP7475882B2 (en) 2020-02-10 2024-04-30 キヤノン株式会社 Liquid ejection head and manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020040284A (en) * 2018-09-10 2020-03-19 キヤノン株式会社 Liquid discharge head, liquid discharge device and method for manufacturing liquid discharge head
JP7195829B2 (en) 2018-09-10 2022-12-26 キヤノン株式会社 Manufacturing method of liquid ejection head and liquid ejection device
JP7475882B2 (en) 2020-02-10 2024-04-30 キヤノン株式会社 Liquid ejection head and manufacturing method thereof

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