JP2000141667A - Manufacture of ink-jet head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To minimize influences of molding errors and working errors of parts by obtaining a positional shift amount of a center position of islands at right and left ends of a diaphragm to a center position of liquid chamber grooves at right and left ends of a chamber with use of an aligning apparatus loading a two-field optical system and aligning the diaphragm. SOLUTION: A chamber 10 is processed to have a rough face after molded by a mold. After parts of a face 12 to be bonded to a diaphragm which are uneven because of the face-roughing of a surface treatment are removed by wet lapping, an epoxy adhesive is applied to the face 12 by a letterpress printing method and a diaphragm 20 is fixedly bonded to the face. In aligning the diaphragm 20 at this time, a position where an added value of shift amounts at two points of a center position of right and left end islands 22 and 23 of the diaphragm 20 to a position of two liquid chamber grooves 14 and 15 at right and left ends where a distance between centers of the liquid chamber grooves of the chamber 10 is maximum is set as an optimum position. The diaphragm 20 is then pressed and united to the chamber 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet printer head, and more particularly to an improvement of a multi-element ink jet head which forms elements for ejecting a large number of ink droplets within a certain size.

[0002]

2. Description of the Related Art Conventionally, a chamber is formed by molding an epoxy-based thermosetting resin by an injection molding method and then performing a surface roughening treatment to bond a diaphragm. The bonding between the chamber and the diaphragm was performed by applying an epoxy adhesive to the surface to be bonded of the diaphragm of the chamber subjected to the surface roughening treatment by a screen printing method, and then pressing and heating and curing the diaphragm after positioning the diaphragm.

A conventional method of aligning the center of the liquid chamber groove of the chamber with the center of the island of the diaphragm is to fit a jig pin into two reference holes provided in both the chamber and the diaphragm. In this method, the displacement between the center of the liquid chamber groove of the chamber and the center of the island of the diaphragm is about 10 μm. The reason is that the molding error from the center of the liquid chamber groove of the chamber to the chamber reference hole, the gap between the chamber reference hole and the jig pin, the gap between the jig pin and the reference hole of the diaphragm, the reference hole of the diaphragm and the island This is because processing errors up to the center are accumulated.

A conventional ink jet head has 60 elements /
Inches. The spacing between the elements is 423 μm, the width of the liquid chamber groove of the chamber is 220 μm, and the width of the liquid chamber partition is 203 μm.
Is set to The diaphragm has an island portion which is a high rigidity portion for transmitting the actuator displacement into the liquid chamber, and a flexible portion made of a polyphenylene sulfide film for facilitating the actuator displacement on both sides of the island portion. In addition, an island portion having a width of 60 μm and a flexible portion having a width of 80 μm are provided on both sides of the island portion between the groove widths of the chamber liquid chamber of 220 μm.

The width of the flexible portion of the conventional diaphragm is 80 μm.
Therefore, even if there is an assembly error of about 10 μm due to the pin fitting method, the fluctuation amount of the substantial flexible portion width of the diaphragm is ± 13% (70 to 90 μm / 80 μm). The flexible part width variation of about ± 13% was at a level that could actually tolerate actual harm to image quality.

A conventional method of positioning and bonding a nozzle plate to a nozzle plate bonding surface is to fit a jig pin into two nozzle plate reference grooves provided in a chamber and two reference holes provided in the nozzle plate. It was a way to make it. In this method, the positional deviation between the center of the liquid chamber opening at the end face of the chamber and the center of the nozzle is about 10 μm. The reason is that the molding error from the center of the liquid chamber opening at the end face of the chamber to the nozzle plate reference groove of the chamber, the gap between the nozzle plate reference groove of the chamber and the jig pin, and the gap between the jig pin and the reference hole of the nozzle plate. This is because the gap and the processing error between the reference hole of the nozzle plate and the center of the nozzle are accumulated.

The width of the liquid chamber opening at the end face of the chamber in the case of the conventional 60 element / inch is 220 μm, which is the same as the liquid chamber groove width. Although the deviation at the nozzle hole position of 10 μm corresponds to 5%, the influence on the ink ejection direction and the ejection speed was at a level that can be ignored.

[0008]

In order to achieve the high image quality required by the market with an ink jet printer, it is essential to increase the resolution by narrowing the liquid chamber pitch of the head.

In a high resolution 120 element / inch ink jet head, the distance between elements is 212 μm.
The liquid chamber groove width of the chamber is 130 μm, and the liquid chamber partition width is 82 μm.
μm. The diaphragm has a chamber liquid chamber groove width of 1
Since it is 30 μm, the width of the island portion is 60 μm, and the width of the flexible portions on both sides is 35 μm.

When the pitch of the liquid chamber is 120 elements / inch, the width of the flexible portion of the diaphragm due to positional deviation is ± 29 with the assembly error of 10 μm, which is the prior art level.
% (25 to 45 μm / 35 μm), and the actual harm to image quality due to fluctuations in the ink ejection speed is large.

The first improvement to address this is:
The alignment method was changed from the pin type to the optical type with the target of a positional deviation tolerance of 5 μm between the center position of the liquid chamber groove of the chamber and the center position of the island of the diaphragm.
Specifically, an alignment device for optically aligning a central portion of the liquid chamber of the chamber with a central portion of the island of the diaphragm was manufactured, and a method of aligning and bonding and fixing the optical alignment device was used. .

However, in this method, the positional deviation amount is ± 5 μm.
The yield below m could not exceed 70%. The positional shift amount tended to be large at both left and right ends of the liquid chamber groove and the island. As a result of analyzing the cause, it was found that the main cause was a variation in the dimensions of both the chamber and the diaphragm. Specifically, there is unevenness in the groove spacing of the chamber and unevenness in the island spacing of the diaphragm,
Although the center of the liquid chamber of the chamber and the center of the island of the diaphragm coincided with each other at the center, the displacement was large at the right and left ends. Processing errors in chambers and diaphragms have led to the limits of process capability limits, and any higher quality requirements were impractical when considering mass production.

(Purpose) An object of the present invention is to provide an ink jet head of a level that can neglect actual harm to image quality even in a high-density liquid chamber configuration in which elements are 120 elements / inch and an element interval is 212 μm. Is to do. It is another object of the present invention to provide a method suitable for mass production in which the yield of the allowable deviation amount of ± 5 μm or less in the alignment step exceeds 90%.

[0014]

SUMMARY OF THE INVENTION A nozzle plate having a plurality of nozzle holes for discharging ink droplets, an actuator comprising a plurality of piezoelectric elements for generating mechanical displacement for discharging ink droplets from the nozzle holes, A diaphragm having a plurality of liquid chamber grooves for filling a liquid chamber, a plurality of islands that are superposed and fixed to the chamber to form a liquid chamber, and a plurality of islands to which an actuator top is fixed and mechanical displacement is transmitted to the liquid chamber; and a diaphragm. As a method of manufacturing an ink jet head having a frame that sandwiches a diaphragm in combination with a chamber, which is fixed by being superimposed on a chamber, a positioning device equipped with a two-view optical system for positioning the chamber and the diaphragm is used. Left and right ends of the diaphragm with respect to the center position of the liquid chamber grooves at the left and right ends Of the center position of the island, the sum of the left and right both positional deviation amount is nearly zero, is bonded and fixed after yelling combined two places fields simultaneously.

A nozzle plate having a plurality of nozzle holes for discharging ink droplets, an actuator including a plurality of piezoelectric elements for generating mechanical displacement for discharging ink droplets from the nozzle holes, and a plurality of liquids for filling ink; A chamber having a chamber groove, a diaphragm having a plurality of islands which are overlapped and fixed to the chamber to form a liquid chamber and the top of the actuator is fixed and which transmits mechanical displacement to the liquid chamber; and a diaphragm which is overlapped and fixed to the diaphragm. As a method for manufacturing an ink jet head having a frame that sandwiches a diaphragm in combination with a chamber, a nozzle plate to be bonded is formed on the same end face of the chamber, the diaphragm and the frame, and the nozzle plate is positioned on the surface. Positioning device equipped with a two-field optical system in the bonding process after alignment The sum of the left and right deviation amounts of the center positions of the nozzle holes at the left and right ends of the nozzle plate with respect to the center positions of the left and right ends of the liquid chamber opening formed on the chamber end surface that is a part of the nozzle plate adhered surface is After the two visual fields are simultaneously adjusted to almost zero, they are bonded and fixed.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. 1, 2, 3, 4, 5, and 6. FIG. FIG. 2 is a diagram showing the assembly of the chamber and the diaphragm,
1 and 3 are views for explaining a process of aligning the chamber and the diaphragm. 4 is a view showing assembly of the frame, FIG. 5 is a view showing assembly of the nozzle, and FIG. 6 is a view showing assembly of the actuator.

First, referring to FIG. 2, after the chamber 10 and the diaphragm 20 are positioned, they are bonded and integrated. The material of the chamber 10 is an epoxy-based thermosetting plastic containing glass beads, and is an opaque material that does not transmit light. The chamber 10 has a diaphragm-bonded surface 1.
2, the nozzle bonding surface 13, the 22 liquid chamber grooves 14,
It has two end face liquid chamber openings 16 and an ink supply port 18. After the molding process, the chamber 10 is subjected to surface treatment with a mixed solution of sulfuric acid and hydrogen peroxide solution or the like to roughen the surface. Thereby, hydrophilicity of the surface of the chamber 10 is ensured.

The surface to be bonded to the diaphragm 12 after the surface treatment of the chamber 10 is processed by wet lapping to remove irregularities due to the roughening of the surface treatment and finish the surface roughness and flatness to 1 μm or less.

Diaphragm bonded surface 1 of chamber 10
2 applies an epoxy-based adhesive by letterpress printing.
The number of times of application of the adhesive is 2 to 5 times in order to make the applied thickness uniform, and the adhesive is applied to a thickness of 2 to 5 μm.

The diaphragm 20 includes a frame portion 21, an island 22, a reference hole 24 of the diaphragm, and a flexible portion 28.
And The frame portion 21 and the islands 22 each have 22 pieces, are made of nickel electroformed with a thickness of 30 μm, and are formed with high rigidity. The flexible portion 28 is made of polyphenylene sulfide having a thickness of 3 to 6 μm, is easily bent, is opaque to light, and facilitates displacement of the island 22.

As shown in FIG. 1, the center of the groove of the liquid chamber 14 of the chamber 10 and the center of the island 22 of the diaphragm 20 are aligned using a two-view optical system.
Specifically, with respect to the positions of the two liquid chamber grooves 14 and 15 at the left and right ends where the distance between the centers of the liquid chamber grooves of the chamber 10 is maximized, the islands 2 at the left and right ends of the diaphragm 20 are located.
The position where the added value of the two shift amounts between the center positions of the positions 2 and 23 becomes zero is determined as the optimum position.

After the simultaneous optical alignment at two locations, the diaphragm 20 is pressed into the chamber 10, and after the adhesive is pressed, it is cured by heating.

FIG. 3 shows the chamber 10 and the diaphragm 20.
FIG. 2 is a cross-sectional view showing a state in which is positioned and pressed. In FIG. 3, the center of the island 22 with respect to the center of the liquid chamber groove 14 has a shift B in the left direction, and the center of the island 23 with respect to the center of the liquid chamber groove 15 has a shift A in the right direction. Since A and B have substantially the same amount but different directions, the added value of A and B is almost zero. Thereby, the optimum value can be set so that the influence of the molding error of the groove position of the chamber 10 and the processing error of the position of the island 22 of the diaphragm 20 can be minimized.

The bonded surface 1 of the diaphragm of the chamber 10
2, the surface roughness is 1 μm or less, the adhesive on the surface 12 to be bonded is 2 to 5 μm thick, and the pressing force between the chamber 10 and the diaphragm 20 is 1
By setting the pressure to 3 to 10 kg / cm per square centimeter, the adhesive overflow amount after pressing the chamber 10 and the diaphragm 20 becomes 0 to 10 μm.

More specifically, a method of aligning the chamber 10 and the diaphragm 20 using a two-view engineering system will be described step by step. 1. The diaphragm adhered surface 12 of the chamber 10 to which the adhesive has been applied is opposed to a CCD camera which is installed downward. 2. Two liquid chamber grooves 14, at both left and right ends of the chamber 10,
15 is photographed by a CCD camera, the θ axis, the X axis and the Y axis of the table for the chamber 10 are adjusted, and the center position of the liquid chamber grooves 14 and 15 is adjusted to the electron beam position fixed on the CRT. 3. The chamber 10 is primarily moved to the retreat position. 4. The diaphragm 20 is set on the position adjustment jig, and the diaphragm 2 is
The islands 22 and 23 of 0 are confirmed. 5. The two islands 22 and 23 at the left and right ends of the diaphragm 20 are photographed by a CCD camera, and the θ axis, the X axis and the Y axis of the table for the diaphragm 20 are adjusted.
The center positions of 2, 23 are simultaneously adjusted to two electron beam positions fixed on the CRT. 6. If the position of the electron beam on the CRT does not match the center of the islands 22 and 23, the sum of the two amounts of displacement between the position of the electron beam on the CRT and the center of the islands 22 and 23 becomes zero. In other words, the directions are different, but the deviation amounts are adjusted to the same value. As a result, positioning can be performed as shown in FIG. 7. In order to enable the chamber 10 to be pressed and bonded, the diaphragm 20 is transferred from the position adjusting jig to the pressing jig.
Specifically, the surface 20 to be adhered to the chamber of the diaphragm 20
Is vacuum-sucked into the position adjusting jig, the position is adjusted as described above, and then a pressing jig coated with an organic elastic film having a uniform thickness of 5 to 30 μm is attached to the frame bonding surface 26 of the diaphragm 20.
, And also vacuum suction. Next, the vacuum suction of the position adjusting jig is released, and the position adjusting jig is separated. Thereby, the transfer to the pressing jig is completed. The positional deviation due to the transfer is negligible if the parallelism between the positioning device and the various jigs is ensured. 8. The chamber 10 is returned and pressed against the diaphragm 20. 9. The pressing state of the chamber 10 and the diaphragm 20 is held by a pressing holding jig. 10. After holding the diaphragm 20 in the chamber 10 with the pressing / holding jig, it is placed in a heating furnace and heated and held for a predetermined time to cure.

According to the above-described method, even in the case of a non-light-transmitting component, the functional portion of the component can be directly confirmed, and two positions can be aligned at the same time. As a result, it has become possible to perform adhesive bonding and fixation in which the actual harmful effects of component processing errors are minimized.

Second, as shown in FIG. 4, the frame 30 is positioned and adhered to the diaphragm 20. The frame 30 has a reference hole (not shown) of the frame, a diaphragm bonding surface 34, and a nozzle bonding surface 36. A relief groove is provided on the surface of the frame 30 other than the adhesive seal securing portion of the diaphragm adhered surface 34 so that the adhesive is selectively pressed to secure the sealing property and the adhesive uncured component is accommodated.

The diaphragm bonding surface 34 of the frame 30
Secures a flatness of 1 μm or less by wet lapping. The adhesive is uniformly applied to the entire surface of the diaphragm-bonded surface 34 of the frame 30 a plurality of times by letterpress printing.

The alignment between the frame 30 and the diaphragm 20 is performed by fitting a jig pin into two reference holes (not shown) of the frame, and fitting the pin into the reference hole 24 of the diaphragm of the diaphragm 20. adopt. After the alignment, the frame 30 is pressed against the diaphragm 20,
It is cured by heating after pressing the adhesive.

Third, as shown in FIG. 5, the end faces shared by the three members of the bonded chamber 10, the diaphragm 20, and the frame 30 are simultaneously processed to be the same surface, and the nozzle adhered surface 62 is formed. The nozzle adhered surface 62 has the end surface liquid chamber openings 16 and 17 of 22 chambers 10.

Next, the nozzle 40 is positioned with respect to the nozzle-bonded surface 62, and is fixed by bonding. Nozzle 40 is 22
It is a flat plate made of nickel or stainless steel provided with the nozzle holes 42. The nozzle hole 42 has a conical shape, and its surface is subjected to water-repellent plating containing fluorine particles.

An adhesive is selectively applied to the nozzle bonding surface 62 by a screen printing method. The adhesive application pattern has a shape in which the opening of the liquid chamber of the chamber 10 is closed with the adhesive to prevent leakage of the pressure for ejecting ink.

The nozzle 40 and the head main body 60 are aligned with each other by adjusting the position of the liquid chamber opening 1
The centers of 6 and 17 and the center of the nozzle hole 42 of the nozzle 40 are optically aligned.

More specifically, the center positions of the two positions of the left and right ends of the nozzle hole 42 of the nozzle 40 with respect to the center positions of the left and right ends of the liquid chamber openings 16 and 17 on the end face of the chamber on the nozzle adhered surface 62. The position where the added value of the positional deviation amount becomes zero is adjusted as the optimum position. Thereby, the influence of the positional deviation amount due to the molding error of the chamber 10 and the processing error of the nozzle 40 can be minimized.

After the optical alignment of the two visual fields at the same time, the nozzle 40 is pressed against the head main body 60 and cured by heating.

More specifically, a method of positioning the nozzle 40 and the head main body 60 using an optical system having two fields of view will be described step by step. 1. The nozzle adhered surface 62 of the head body 60 on which the adhesive has been applied is opposed to the camera installed downward. 2. The two end face liquid chamber openings 16 and 17 at the left and right ends of the chamber of the head body 60 are photographed with a CCD camera, and the θ axis, X axis and Y axis of the table for the head body 60 are adjusted, and the end face liquid chamber openings 16 and 17 are adjusted. , 17 are aligned with the position of the electron beam fixed on the CRT. 3. The head body 60 is primarily moved to the retracted position. 4. The nozzle 40 is set on the position adjusting jig, and the head body 6
The position of the nozzle hole 42 of the nozzle 40 is confirmed by the same camera that has confirmed the end surface liquid chamber openings 16 and 17 of the chamber 0. 5. Two nozzle holes 42CC at both left and right ends of the nozzle 40
The image is taken with a D camera, the θ axis, the X axis, and the Y axis of the table for the nozzle 40 are adjusted, and the center of the nozzle hole 42 is simultaneously adjusted to the electron beam position fixed on the CRT in the two visual fields. 6. The position of the electron beam on the CRT and two nozzle holes 4 at the left and right ends
If the center of the nozzle 2 does not coincide with the center of the nozzle hole 42, the sum of the deviations at the two right and left ends between the position of the electron beam on the CRT and the center of the nozzle hole 42 is zero. Adjust to the value. 7. The nozzle 40 is transferred from the position adjusting jig to the pressing jig so that the nozzle can be pressed and adhered to the head main body 60. Specifically, after the position of the surface to be bonded of the nozzle 40 is adjusted in a state of being vacuum-sucked to the position adjusting jig, the pressing jig coated with an organic elastic film having a uniform thickness of 5 to 30 μm is applied to the nozzle 40 by the water repellency. Crimping is applied to the plated surface, and this is also vacuum sucked. Next, the vacuum suction of the position adjusting jig is released, and the position adjusting jig is separated. Thereby, the transfer to the pressing jig is completed. 8. The head body 60 is returned and pressed against the nozzle 40. 9. The pressing state of the head body 60 and the nozzle 40 is held by a pressing holding jig. 10. After holding the nozzle 40 on the head main body 60 with a pressing and holding jig, the nozzle is placed in a heating furnace and is heated and held for a predetermined time to be cured.

Fifth, as shown in FIG. 6, the actuator top 52 of the actuator 50 is
0 is fixed to the island 22. The actuator 50 has an actuator bottom 54 fixed to a base 56 which is a common member. Actuator top 52
Are fixed to the island 22 of the diaphragm 20, and a mechanical displacement is caused by the application of a voltage.
Is pushed up toward the liquid chamber groove 14 to increase the pressure of the ink in the liquid chamber groove 14 and discharge the ink.

Specifically, the actuator top 5
2, an epoxy adhesive is applied by a screen printing method. The adhesive application pattern is shorter than the length of the island 22 and is applied to a position near the nozzle 40 side. The actuator top 52 to which the adhesive has been applied is pressed against the island 22 of the diaphragm 20, and is heated and cured after the adhesive is pressed.

As a result, since the actuator top 52 and the island 22 are fixed at a portion near the nozzle 40 side, the liquid chamber pressure due to the mechanical displacement of the actuator 50 can be effectively increased at the nozzle 40 side. with this,
The ink jet head is completed.

Next, the operation of filling and discharging ink will be described. First, ink is supplied from the ink supply port 18 of the chamber 10 into the liquid chamber groove 14. Chamber 10
Since the surface is made hydrophilic by surface treatment, the liquid chamber groove 14 can be filled with ink without bubbles.

When a voltage is applied to the actuator 50, the actuator top 52 is mechanically displaced to push the island 22 into the liquid chamber, and the pressure in the liquid chamber increases.
Ink is ejected.

When the application of the voltage to the actuator 50 is released, the top 52 of the actuator returns to its initial length, the ink is replenished by the surface tension of the ink, and the interior of the liquid chamber groove 14 returns to the initial state.

In the present invention, the amount of positional deviation between the centers of the liquid chamber grooves 14 and 15 and the islands 22 and 23 is minimized, so that the mechanical displacement of the actuator top 52 can be effectively used to improve the pressure in the liquid chamber, and the uniformity can be obtained. Ink can be ejected from the nozzle hole 42 at a high speed. Also, the actuator top 52
And the island 22 are fixed at a portion near the nozzle 40 side, so that the liquid chamber pressure on the nozzle 40 side can be increased,
Pressure can be used effectively. Further, the end face liquid chamber openings 16, 1
Since the amount of displacement of the nozzle hole 42 with respect to 7 is minimized, the direction in which ink is ejected from the nozzle hole 42 is stable.

[0044]

As is apparent from the above description, according to the present invention, by using a two-field optical alignment device, the two fields of view at the right and left ends of the chamber and the diaphragm can be simultaneously and uniformly adjusted. Since the effects of part forming errors and processing errors can be minimized, a yield of less than 5 μm in displacement amount can achieve 90% or more. Further, the amount of positional deviation between the center of the liquid chamber opening at the end face of the chamber and the center of the nozzle hole could be suppressed to the same extent. By integrating these effects, it is possible to achieve a uniform ink ejection speed and an improved landing accuracy in a high-density inkjet head, and an effect that high image quality can be ensured.

Further, the method of the present invention uses the same fixed CCD.
Use a camera to directly check the functional parts of the two components that align with the fixed electron beam on the CRT, perform alignment, and use a jig coated with an organic elastic film of uniform thickness of 5 to 30 μm. By transferring the components between the jigs, the opaque component that does not transmit light can be optically aligned, and has a wide application range.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating an ink jet head alignment process of the present invention.

FIG. 2 is a perspective view showing the assembly of the chamber and the diaphragm of the inkjet head of the present invention.

FIG. 3 is a cross-sectional view illustrating a step of aligning the inkjet head of the present invention.

FIG. 4 is a perspective view showing the assembly of the frame of the inkjet head of the present invention.

FIG. 5 is a perspective view showing the assembly of the nozzle of the ink jet head of the present invention.

FIG. 6 is a perspective view showing the assembly of the actuator of the inkjet head of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Chamber 12 Diaphragm adhesion surface 13 Nozzle adhesion surface 14 Liquid chamber groove 15 Liquid chamber groove 16 End liquid chamber opening 17 End liquid chamber opening 20 Diaphragm 22 Island 23 Island 24 Reference hole of diaphragm 25 Chamber adhesion surface 26 Frame coating Bonding surface 28 Flexible portion 30 Frame 34 Diaphragm bonding surface 36 Nozzle bonding surface 40 Nozzle 42 Nozzle hole 50 Actuator 52 Actuator top 56 Base 60 Head body 62 Nozzle bonding surface

Claims (2)

[Claims] 1. A nozzle plate having a plurality of nozzle holes for discharging ink droplets, an actuator including a plurality of piezoelectric elements for generating a mechanical displacement for discharging ink droplets from the nozzle holes, and a plurality of ink filling holes. A chamber having a liquid chamber groove, a diaphragm having a plurality of islands which are fixed to the chamber by being overlapped and fixed to form a liquid chamber, and a top of the actuator is fixed and a mechanical displacement is transmitted to the liquid chamber; and A method for manufacturing an ink jet head having a frame fixed to a chamber and holding a diaphragm in combination with a chamber, using an alignment device equipped with a two-view optical system for aligning the chamber and the diaphragm, and using a positioning device equipped with left and right ends of the chamber. In the islands on the left and right ends of the diaphragm with respect to the center of the liquid chamber groove Position, to zero approximately the sum of the left and right both positional displacement amount, method of manufacturing an ink jet head, characterized in that bonding and fixing after yelling combined two places simultaneously. 2. A nozzle plate having a plurality of nozzle holes for discharging ink droplets, an actuator including a plurality of piezoelectric elements for generating mechanical displacement for discharging ink droplets from the nozzle holes, and a plurality of ink filling holes. A chamber having a liquid chamber groove, a diaphragm having a plurality of islands which are fixed to the chamber by being overlapped and fixed to form a liquid chamber, and a top of the actuator is fixed and a mechanical displacement is transmitted to the liquid chamber; and What is claimed is: 1. A method for manufacturing an ink jet head comprising: a frame fixed to a chamber and holding a diaphragm in combination with a chamber, wherein a nozzle plate adhered surface having a common end surface of the chamber, the diaphragm and the frame is formed on the same surface, and a nozzle is formed on the surface. Positioning device equipped with a two-view optical system in the process of bonding plates after positioning The sum of the left and right deviation amounts of the center positions of the nozzle holes at the left and right ends of the nozzle plate with respect to the center positions of the left and right ends of the liquid chamber opening formed on the chamber end surface that is a part of the nozzle plate adhered surface is A method for manufacturing an ink jet head, wherein two locations are combined at almost the same time and then adhesively fixed.