JP2021105427A - Fluid control device - Google Patents

Abstract

To provide a compact fluid control device capable of branching fluid and controlling a flow rate.SOLUTION: A first flow channel 16a includes a No. 1-1 flow channel 16a1 and a No. 1-2 flow channel 16a2 extending from an entrance 14a. A second flow channel 16b extends from a first concave part 15a to a third concave part 15c. One end of a third flow channel 16c is communicated with the second flow channel 16b and the other end is opened to a second concave part 15b. A fourth flow channel 16d extends from the second concave part 15b to a fourth surface 13D side. One end of a fifth flow channel 16e is communicated with an end part of the fourth flow channel 16d, and the other end is communicated with a first exit 14b. A sixth flow channel 16f extends from the third concave part 15c to a second surface 13B side. One end of a seventh flow channel 16g is communicated with an end part of the sixth flow channel 16f, and the other end is communicated with a second exit 14c. A first orifice 17a is formed so as to communicate the second flow channel 16b with the fifth flow channel 16e. A second orifice 17b is formed so as to communicate the second flow channel 16b with the seventh flow channel 16g.SELECTED DRAWING: Figure 2

Description

The present disclosure relates to a fluid control device used in a semiconductor manufacturing device or the like.

Precisely controlled process gas may be branched by a flow control device provided near the chamber and then supplied to the chamber. Further, in the flow rate control device, it may be required to control the flow rate of the process gas after branching to a desired flow rate immediately before supplying the gas to the chamber. Furthermore, the equipment is densely packed near the chamber, and the space provided to the fluid control device is limited.

However, a compact fluid control device capable of branching and controlling the flow rate of the fluid has not been proposed.

Therefore, one of the purposes of the present disclosure is to provide a compact fluid control device capable of branching a fluid and controlling a flow rate.

In order to solve the above object, the fluid control measure according to one aspect of the present disclosure is a fluid control device including a body and a plurality of valves, and the body is formed on a first surface and the first surface. The connected second surface, the third surface located on the opposite side of the second surface, the first surface, the second surface, and the fourth surface connected to the third surface, and the fourth surface. A sixth surface located on the opposite side of the surface and connected to the first surface, the second surface, and the third surface, and the fourth surface connected to the fourth surface on the opposite side of the first surface. The body has an inlet that opens to the first surface, a first outlet and a second outlet that opens to the sixth surface, a first recess that opens to the second surface, and the like. A second recess that opens on the fifth surface, a third recess that opens on the third surface, a first flow path, a second flow path, a third flow path, a fourth flow path, and a fifth flow path. A path, a sixth flow path, a seventh flow path, a first orifice, and a second orifice are formed, and the first flow path extends from the inlet in a direction orthogonal to the first surface. It has a 1-1 flow path and a 1-2 flow path extending from the end of the 1-1 flow path to the first recess, and the second flow path is orthogonal to the second surface. Along the direction, the first recess extends to the third recess, the third flow path extends in a direction orthogonal to the fourth surface, one end communicates with the second flow path, and the other end is said. An opening is made in the second recess, the fourth flow path extends from the second recess toward the fourth surface side along a direction orthogonal to the fourth surface, and one end of the fifth flow path is the first. It communicates with the end of the four flow paths, the other end communicates with the first outlet, and the sixth flow path is from the third recess to the second surface side along the direction orthogonal to the second surface. One end of the seventh flow path communicates with the end of the sixth flow path, the other end communicates with the second outlet, and the first orifice communicates with the second flow path and the fifth flow path. The second orifice is formed so as to communicate with the flow path, and the second orifice is formed so as to communicate with the second flow path and the seventh flow path on the third surface side of the first orifice. Each valve is mounted in the first recess, the second recess, and the third recess.

The diameter of the second orifice may be smaller than the diameter of the first orifice.

The sixth surface may be inclined with respect to the fourth surface.

Each valve includes an actuator and a valve portion, and each valve may be mounted such that the actuator is orthogonal to each of the second surface, the third surface, and the fifth surface.

According to the present disclosure, it is possible to provide a small fluid control device capable of branching a fluid and controlling a flow rate.

It is a perspective view of the fluid control device which concerns on embodiment. It is a figure which looked at the fluid control apparatus from the 4th surface side. Is. It is sectional drawing of the fluid control apparatus 1 along III-III of FIG. It is sectional drawing of the fluid control apparatus 1 along IV-IV of FIG. It is a schematic diagram of the fluid control device 1.

The fluid control device according to the embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic view of the fluid control device 1 according to the present embodiment.
FIG. 2 is a view of the fluid control device 1 as viewed from the fourth surface 13D side.
FIG. 3 is a cross-sectional view of the fluid control device 1 along III-III of FIG.
FIG. 4 is a cross-sectional view of the fluid control device 1 along IV-IV of FIG.

The fluid control device 1 includes a body 10, an inlet pipe 2, a first valve 3, a second valve 4, and a third valve 5.

The body 10 includes a first body 11 and a second body 12.

The first body 11 has a substantially rectangular parallelepiped shape having a notch 11a in a part thereof. The second body 12 has a substantially rectangular parallelepiped shape and includes a base portion 12A that abuts on the first body 11 and a protruding portion 12B that protrudes from the base portion 12A. The first body 11 and the second body 12 are connected to each other by a plurality of bolts 10A. A bolt insertion hole 12c is formed in the protruding portion 12B. The fluid control device 1 is mounted on the device to be mounted by inserting a bolt (not shown) into the bolt insertion hole 12c and screwing it into the device to be mounted (not shown).

As shown in FIGS. 1 and 2, the body 10 includes a first surface 13A, a second surface 13B, a third surface 13C, a fourth surface 13D, a fifth surface 13E, a sixth surface 13F, and a fourth surface. It has a 7-sided 13G, an 8th-sided 13H, a 9th-sided 13J, a 10th-sided 13K, and an 11th-sided 13L. The first surface 13A, the fifth surface 13E, and the seventh surface 13G define a part of the first body 11. The second surface 13B, the third surface 13C, the fourth surface 13D, and the eighth surface 13H define a part of the first body 11 and the second body 12. The sixth surface 13F, the ninth surface 13J, the tenth surface 13K, and the eleventh surface 13L define a part of the second body 12.

The first surface 13A has a rectangular shape. The second surface 13B is connected to the first surface 13A and is orthogonal to the first surface 13A. The third surface 13C is located on the opposite side of the second surface 13B and is orthogonal to the first surface 13A. The fourth surface 13D is connected to the first surface 13A, the second surface 13B, and the third surface 13C, and is orthogonal to the first surface 13A, the second surface 13B, and the third surface 13C. The fifth surface 13E is located on the opposite side of the fourth surface 13D and is connected to the first surface 13A, the second surface 13B, and the third surface 13C, and is connected to the first surface 13A, the second surface 13B, and the third surface. It is orthogonal to 13C.

The sixth surface 13F is connected to the fourth surface 13D on the opposite side of the first surface 13A and is inclined with respect to the fourth surface 13D. The seventh surface 13G is connected to the fifth surface 13E on the opposite side of the first surface 13A and is parallel to the first surface 13A. The eighth surface 13H is connected to the second surface 13B, the third surface 13C, and the seventh surface 13G, and is orthogonal to the seventh surface 13G. The ninth surface 13J is connected to the second surface 13B, the third surface 13C, and the eighth surface 13H, and is parallel to the first surface 13A. The connecting portion between the ninth surface 13J and the second surface 13B and the third surface 13C has a curved surface. The tenth surface 13K is connected to the sixth surface 13F and is parallel to the first surface 13A. The eleventh surface 13L is connected to the ninth surface 13J and the tenth surface 13K.

As shown in FIGS. 2 to 4, the body 10 has an inlet 14a, a first outlet 14b, a second outlet 14c, a first recess 15a, a second recess 15b, a third recess 15c, and a first. The flow path 16a, the second flow path 16b, the third flow path 16c, the fourth flow path 16d, the fifth flow path 16e, the sixth flow path 16f, the seventh flow path 16g, and the first orifice. 17a and a second orifice 17b are formed.

The inlet 14a is an inlet for the fluid in the fluid control device 1 and is open to the first surface 13A. The first outlet 14b and the second outlet 14c are fluid outlets in the fluid control device 1 and are open to the sixth surface 13F. The first recess 15a has a substantially columnar shape and is open to the second surface 13B. The second recess 15b has a substantially columnar shape and is open to the fifth surface 13E. The third recess 15c has a substantially columnar shape and is open to the third surface 13C.

The first flow path 16a has a 1-1 flow path 16a1 and a 1-2 flow path 16a2. The 1-1 flow path 16a1 extends from the inlet 14a in a direction orthogonal to the first surface 13A. The 1-2 flow path 16a2 extends from the end of the 1-1 flow path 16a1 to the first recess 15a in a direction orthogonal to the second surface 13B. The second flow path 16b extends from the first recess 15a to the third recess 15c in parallel with the 1-2 flow path 16a2. The second flow path 16b is located on the ninth surface 13J side of the first and second flow paths 16a2. The third flow path 16c extends in a direction orthogonal to the fourth surface 13D, one end communicates with the second flow path 16b, and the other end opens in the second recess 15b.

The fourth flow path 16d extends from the second recess 15b toward the fourth surface 13D in parallel with the third flow path 16c. The fourth flow path 16d is located on the ninth surface 13J side of the third flow path 16c. The fifth flow path 16e has a 5-1st flow path 16e1 and a 5-2nd flow path 16e2. One end of the 5-1th flow path 16e1 communicates with the end of the 4th flow path 16d, and extends from the end of the 4th flow path 16d toward the 9th surface 13J in a direction orthogonal to the 9th surface 13J. ing. The 5-1th flow path 16e1 is formed in the first body 11 and the second body 12. The 5-2th flow path 16e2 extends from the other end of the 5-1th flow path 16e1 in a direction orthogonal to the fourth surface 13D, and the end portion communicates with the first outlet 14b. As shown in FIG. 3, the 1-1 flow path 16a1, the second flow path 16b, the first orifice 17a, and the 5-1th flow path 16e1 are aligned in a straight line.

As shown in FIG. 2, the sixth flow path 16f extends from the third recess 15c toward the second surface 13B side in parallel with the second flow path 16b. The sixth flow path 16f is located on the ninth surface 13J side of the second flow path 16b. As shown in FIGS. 2 and 4, the 7th flow path 16g has a 7th flow path 16g1 and a 7-2th flow path 16g2. One end of the 7-1 flow path 16g1 communicates with the end of the sixth flow path 16f, and extends from the end of the sixth flow path 16f toward the ninth surface 13J in a direction orthogonal to the ninth surface 13J. ing. The 7-1th flow path 16g1 is formed in the first body 11 and the second body 12. The 7-2 flow path 16g2 extends from the other end of the 7-1 flow path 16g1 in a direction orthogonal to the fourth surface 13D, and the end portion communicates with the second outlet 14c. As shown in FIG. 4, the second flow path 16b, the second orifice 17b, and the 7-1 flow path 16g1 are aligned in a straight line.

The first orifice 17a is formed so as to communicate the second flow path 16b and the fifth flow path 16e. The second orifice 17b is formed so as to communicate the second flow path 16b and the seventh flow path 16g on the third surface 13C side of the first orifice 17a. The diameter of the second orifice 17b is smaller than the diameter of the first orifice 17a.

A substantially rectangular recess 12a is formed on the sixth surface 13F of the second body 12, and annular recesses 12b and 12c are formed in the recess 12a around the first outlet 14b and the second outlet 14c, respectively. ing.

The inlet pipe 2 is attached to the first surface 13A of the body 10 so as to cover the inlet 14a. The fluid is supplied into the body 10 via the inlet pipe 2.

The first valve 3 is a diaphragm type shutoff valve that opens and closes the valve portion 3B by, for example, an air-driven actuator 3A. The valve portion 3B includes a valve seat 3C, a diaphragm 3D, and the like, and the diaphragm 3D separates from and contacts the valve seat 3C by the operation of the actuator 3A to block or communicate with the flow path. The second valve 4 and the third valve 5 have the same configuration as the first valve 3, and have actuators 4A and 5A and valve portions 4B and 5B, and the valve portions 4B and 5B have valve seats 4C and 5C and a diaphragm. It has 4D, 5D, etc.

By mounting the valve portions 3B to 5B in the first to third recesses 15a to 15c, the actuators 3A to 5A of the valves 3 to 5 have the second surface 13B, the fifth surface 13E, and the third surface. It is attached to the body 10 so as to be orthogonal to each of the surfaces 13C.

FIG. 5 is a schematic view of the fluid control device 1.

When the first valve 3 is closed, even if the fluid is supplied to the body 10 through the inlet pipe 2, the fluid does not flow to the second valve 4 and the third valve 5. When the first valve 3 is in the open state and the second valve 4 and the third valve 5 are in the closed state, the fluid passes through the first valve 3 and passes through the first orifice 17a and the second orifice 17b. It flows into the fifth flow path 16e and the seventh flow path 16g, and flows from the first outlet 14b and the second outlet 14c to the outside of the fluid control device 1 (chamber of the device to be mounted (not shown)). When the first valve 3, the second valve 4 and the third valve 5 are closed, the fluid passes through the first valve 3 and the second valve 4, the third valve 5, the first orifice 17a, and the second orifice. It passes through 17b, flows to the fifth flow path 16e and the seventh flow path 16g, and flows from the first outlet 14b and the second outlet 14c to the outside of the fluid control device 1 (chamber of the device to be mounted (not shown)).

As described above, when the first valve 3 is in the open state and the second valve 4 and the third valve 5 are in the closed state, the fluid passes only through the first orifice 17a and the second orifice 17b, and the fluid control device 1 Since the fluid flows to the outside (the chamber of the device to be mounted (not shown)), the amount of fluid that passes through the fluid control device 1 and is supplied to the outside (the device to be mounted (not shown)) is a small flow rate. On the other hand, when the first valve 3, the second valve 4, and the third valve 5 are in the open state, the fluid passes not only through the first orifice 17a and the second orifice 17b, but also through the second valve 4 and the third valve 5. Therefore, the amount of fluid that passes through the fluid control device 1 and is supplied to the outside (the chamber of the device to be mounted (not shown)) is a large flow rate.

As described above, in the fluid control device 1 of the present embodiment, the first flow path 16a has the 1-1 flow path 16a1 extending in the direction orthogonal to the first surface 13A from the inlet 14a and the 1-1 flow path. It has a 1-2 flow path 16a2 extending from the end of the 16a1 to the first recess 15a, and the second flow path 16b has a third recess 15a to a third recess along a direction orthogonal to the second surface 13B. The third flow path 16c extends to 15c, extends in a direction orthogonal to the fourth surface 13D, one end communicates with the second flow path 16b, the other end opens into the second recess 15b, and the fourth flow path 16d , Extends from the second recess 15b to the fourth surface 13D side along the direction orthogonal to the fourth surface 13D, one end of the fifth flow path 16e communicates with the end of the fourth flow path 16d, and the other end ends. Communicating with the first outlet 14b, the sixth flow path 16f extends from the third recess 15c toward the second surface 13B along the direction orthogonal to the second surface 13B, and one end of the seventh flow path 16g is the first. The 6th flow path 16f is communicated with the end portion, the other end is communicated with the second outlet 14c, and the first orifice 17a is formed so as to communicate with the second flow path 16b and the fifth flow path 16e. The orifice 17b is formed so as to communicate the second flow path 16b and the seventh flow path 16g on the third surface 13C side of the first orifice 17a, and is formed so as to communicate with the first recess 15a, the second recess 15b, and the third. Each valve 3 to 5 is mounted in the recess 15c.

According to the fluid control device 1 having such a configuration, when the first valve 3 is in the open state and the second valve 4 and the third valve 5 are in the closed state, the fluid has only the first orifice 17a and the second orifice 17b. It passes through and flows to the outside of the fluid control device 1 (for example, the chamber of the device to be mounted, which is not shown). On the other hand, when the first valve 3, the second valve 4, and the third valve 5 are in the open state, the fluid passes not only through the first orifice 17a and the second orifice 17b, but also through the second valve 4 and the third valve 5. Then, it flows to the outside of the fluid control device 1 (the chamber of the device to be mounted, which is not shown). Therefore, in the fluid control device 1 of the present embodiment, the fluid can be branched, and the flow rate of the fluid after the branch can be controlled.

Further, the second flow path 16b extends in a direction orthogonal to the second surface 13B, the third flow path 16c extends in a direction orthogonal to the fourth surface 13D, and the fourth flow path 16d extends to the fourth surface 13D. The sixth flow path 16f is formed so as to extend in a direction orthogonal to the second surface 13B. As a result, the second flow path 16b, the third flow path 16c, the fourth flow path 16d, and the sixth flow path 16f can be formed at positions close to each other in the direction orthogonal to the first surface 13A. , The size of the body 10 can be reduced, and the fluid control device 1 can be reduced in size.

Since the diameter of the second orifice 17b is smaller than the diameter of the first orifice 17a, the fluid passing through the first valve 3 is on the side of the second orifice 17b downstream of the first orifice 17a in the second flow path 16b. The fluid can easily flow to the first orifice 17a.

Since the sixth surface 13F is inclined with respect to the fourth surface 13D and the first outlet 14b and the second outlet 14c are open to the sixth surface 13F, the mounting surface of the device to be mounted is an inclined surface. In some cases, the fluid control device 1 can be attached to the inclined surface.

Each valve 3 to 5 includes actuators 3A to 5A and valve portions 3B to 5B, and each valve 3 to 5 has actuators 3A to 5A on the second surface 13B, the third surface 13C, and the fifth surface 13E, respectively. It is mounted so that it is orthogonal. Thereby, the structures of the flow paths 16b, 16c, 16d, 16f communicating with the recesses 15a to 15c corresponding to the valves 3 to 5 and the recesses 15a to 15c can be simplified, and the body 10 can be easily manufactured. be able to.

Although the description of one embodiment of the present invention has been completed above, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

For example, in the above embodiment, the diameter of the second orifice 17b is smaller than the diameter of the first orifice 17a, but both may be the same, and the diameter of the second orifice 17b is larger than the diameter of the first orifice 17a. It may be larger than the diameter of.

1: Fluid control device 3: 1st valve 3A, 4A, 5A: Actuator 3B, 4B, 5B: Valve portion 10: Body 13A: 1st surface 13B: 2nd surface 13C: 3rd surface 13D: 4th surface 13E: Fifth surface 13F: Sixth surface 14a: Inlet 14b: First outlet 14c: Second outlet 15a: First recess 15b: Second recess 15c: Third recess 16a: First flow path 16b: Second flow path 16c: 3rd flow path 16d: 4th flow path 16e: 5th flow path 16f: 6th flow path 16g: 7th flow path 17a: 1st orifice 17b: 2nd orifice

Claims (4)

A fluid control device with a body and multiple valves.
The body includes a first surface, a second surface connected to the first surface, a third surface located on the opposite side of the second surface, the first surface, the second surface, and the first surface. On the fourth surface connected to the three surfaces, the fifth surface located on the opposite side of the fourth surface, the first surface, the second surface, and the fifth surface connected to the third surface, and the fourth surface. It has a sixth surface connected on the opposite side to the first surface.
The body has an inlet that opens to the first surface, a first outlet and a second outlet that opens to the sixth surface, a first recess that opens to the second surface, and an opening to the fifth surface. The second recess, the third recess that opens to the third surface, the first flow path, the second flow path, the third flow path, the fourth flow path, the fifth flow path, and the sixth flow path. A path, a seventh flow path, a first orifice, and a second orifice are formed.
The first flow path includes a 1-1 flow path extending from the inlet in a direction orthogonal to the first surface, and a 1-2 flow path extending from an end of the 1-1 flow path to the first recess. With a road,
The second flow path extends from the first recess to the third recess along a direction orthogonal to the second surface.
The third flow path extends in a direction orthogonal to the fourth surface, one end communicates with the second flow path, and the other end opens in the second recess.
The fourth flow path extends from the second recess toward the fourth surface along a direction orthogonal to the fourth surface.
One end of the fifth flow path communicates with the end of the fourth flow path, and the other end communicates with the first outlet.
The sixth flow path extends from the third recess toward the second surface along a direction orthogonal to the second surface.
One end of the seventh flow path communicates with the end of the sixth flow path, and the other end communicates with the second outlet.
The first orifice is formed so as to communicate the second flow path and the fifth flow path.
The second orifice is formed so as to communicate the second flow path and the seventh flow path on the third surface side of the first orifice.
A fluid control device in which valves are mounted on the first recess, the second recess, and the third recess. The fluid control device according to claim 1, wherein the diameter of the second orifice is smaller than the diameter of the first orifice. The fluid control device according to claim 1 or 2, wherein the sixth surface is inclined with respect to the fourth surface. Each valve has an actuator and a valve section
The fluid according to any one of claims 1 to 3, wherein each valve is equipped with the actuator so as to be orthogonal to each of the second surface, the third surface, and the fifth surface. Control device.

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