JP6518150B2 - Block valve, fluid control device having block valve, and method of cleaning chamber using block valve - Google Patents

Description

  The present invention relates to a technology that enables the flow rate of fluid to be adjusted by a plurality of flow paths provided on one line in a fluid control device.

Conventionally, with regard to a fluid control device provided with a plurality of flow paths, in Patent Document 1, a plurality of fluid devices connected via the flow paths are integrated and integrated on a base member, and are formed on the base member In a fluid device unit structure in which a first valve and a second valve for channel switching are respectively provided in the main fluid channel and the return channel, the position where the return channel branches from the main fluid channel is referred to as the first valve A fluid device unit structure in the vicinity of the upstream side of the above has been proposed.
Further, Patent Document 2 includes a main flow path, a branch flow path branching from the main flow path, a main flow path valve for opening and closing the main flow path, and a branch valve for opening and closing the branch flow path. A manifold valve in which the branch channel, the main channel valve, and the branch valve are integrated, wherein the main channel valve and the branch valve each have a valve body and a valve shaft connected to the valve body. And a control lever connected to the valve stem, the manual valve performing opening and closing of the flow path by swinging the control lever in the axial direction of the valve stem, the main flow path valve and the main flow valve Each branch valve converts the swing of the operating lever into linear motion of the valve body, and causes the valve body to be pressed and separated from the valve seat to open and close the flow path, thereby the main flow path valve and the branch When one of the valves is open and the other is closed, the operating lever of the one valve is the valve of the other valve. Manifold valve with an interlock mechanism that disables the swing of the work lever has been proposed.

JP, 2009-92191, A JP, 2008-190576, A

  As in Patent Documents 1 and 2 above, techniques for providing a plurality of flow paths have been proposed, but if there is a technique in which the flow rate of fluid can be adjusted by a plurality of flow paths provided in a valve on one line Absent. In addition, when it is possible to adjust the flow rate by controlling a plurality of valves arranged on one line, it is conceivable to draw the pipe, but in general, the drawing structure of the pipe tends to be complicated, It is difficult to fit in one line, and the cost of installing piping is high.

  Therefore, according to the present invention, according to the opening and closing operation of the plurality of valves provided on one line, the fluid corresponding to the desired flow rate among the plurality of passages provided on the block valve on one line And the flow rate of the fluid can be adjusted.

  In order to achieve the above object, a block valve according to one aspect of the present invention is a block valve in which a plurality of valves are connected and the flow rate is adjusted according to a flow path through which the fluid flows. And a plurality of flow paths formed between the inlet and the outlet, through which the fluid flows, and the plurality of flow paths include: A flow path through which an orifice intervenes is provided, and one flow path through which the fluid flows is selected from the plurality of flow paths by opening and closing the plurality of valves, and the selected flow path or the selected flow path The fluid is discharged at a flow rate corresponding to an orifice provided in the flow path.

  Further, the diameter of the orifices provided in the plurality of flow paths may be such that the diameter of the orifice provided on the upstream side is larger than the diameter of the orifice provided on the downstream side.

  Further, among the plurality of valves constituting the block valve, the valve disposed between the start and end valves may be a three-way valve having a flow passage of the same shape.

  Further, the block valve may be used in a fluid control device provided with a plurality of lines, and may fit within one line width of the plurality of lines.

  A fluid control system according to another aspect of the present invention is characterized in that the block valve is disposed.

  Further, in a method of cleaning a chamber according to still another aspect of the present invention, in the semiconductor manufacturing apparatus having the fluid control device, the flow rate of the fluid is changed by the opening and closing operation of the block valve to remove particles in the chamber. It is characterized by

According to the present invention, according to the opening / closing operation of the plurality of valves provided on one line, the fluid is supplied to the flow passage corresponding to the desired flow rate among the plurality of passages provided on the valve on one line It can be made to flow so that the flow rate of the fluid can be made adjustable.
In addition, since the flow rate of the fluid can be adjusted by the flow path formed in the valve, it is not necessary to draw the piping complicatedly or to interpose the block joint in which the flow path is formed between the valves. Therefore, various fluid controllers can be easily accommodated on one line, and the cost can be suppressed as compared with the case where pipes and block joints are provided.

It is the model which showed the structure of 1 line of the fluid control apparatus which concerns on embodiment of this invention. It is a figure showing typically the channel of the block valve concerning a first embodiment of the present invention. It is a flowchart which shows the flow path of the block valve which concerns on this embodiment. It is a figure which shows typically the flow path of the block valve which concerns on the modification of this embodiment. It is a figure showing typically the channel of the block valve concerning a second embodiment of the present invention. It is a flowchart which shows the flow path of the block valve which concerns on this embodiment. It is a figure which shows typically the flow path of the block valve which concerns on the modification of 2nd embodiment of this invention. It is a figure showing typically the channel of the block valve concerning the embodiment of the present invention. It is a figure showing typically the channel of the block valve concerning the embodiment of the present invention.

Hereinafter, a block valve according to an embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, a plurality of lines are disposed in the fluid control device having the block valve 1 according to the present embodiment. Each line is provided with various fluid controllers, and each fluid controller is suitably bolted to the joint member, etc., and accommodated in the width of each line.
The fluid control device can selectively change the flow rate of fluid line by line and discharge it outside the chamber or the like.

A valve V which constitutes the block valve 1 and which constitutes one of the fluid controllers includes a valve body as a fluid control mechanism and an actuator for operating the valve body. The valve body is provided with a valve body in which a flow path is formed, a seat provided in the flow path, a diaphragm for circulating or blocking fluid by coming into contact with the seat, etc. As a result of opening and closing the valve main body by coming into contact with and separating from the seat, the fluid flows in the flow path and the flow of the fluid is blocked.
Here, the block valves 1a, 1b, 2a, 2b, 3 and 4 in the later-described embodiment are collectively referred to as a valve constituted by a plurality of valves V regardless of the difference in the configuration of individual channels etc. It is called valve 1. The valves V1, V2 and V3 are also collectively referred to as the valve V as one of the fluid controllers constituting the fluid control device, regardless of the difference in the configuration of the individual flow paths.

In the fluid control device, a plurality of valves V constituting the block valve 1 are disposed on one line, and the plurality of valves V are flow paths through which fluid selectively flows according to the opening / closing operation thereof Are formed. Further, in the block valve 1, the gasket G or the orifice gasket OR intervenes in the flow path between the adjacent valves V, and the flow path is communicated by the gasket G or the orifice gasket OR.
Here, the orifice gaskets OR1, OR2, OR3, and OR4 in the embodiments described later are collectively referred to as orifice gaskets OR as orifice gaskets for communicating the flow paths regardless of the difference in the configuration of the individual orifice holes.

The orifice gasket OR is a gasket having an orifice hole with a diameter smaller than the diameter of the flow passage 22 formed in the valve V, as well as communicating the flow passage.
When the fluid flows in a predetermined flow path according to the opening / closing operation of the valve V and the fluid flows in the orifice gasket OR, the flow rate is suppressed to a small amount according to the diameter of the orifice hole of the orifice gasket OR , The flow rate of the fluid to be discharged is adjusted.

With respect to the block valve 1a according to the first embodiment, the flow paths formed by a plurality of valves are shown in FIGS.
In this example, the valve V1 of the two-way valve is disposed on the upstream side into which the fluid flows, and the valve V2 of the three-way valve is disposed on the downstream side in connection with the valve V1.
In the valve V1, there are a flow path 10 in which the fluid flows in, a flow path 11 which branches from the flow path 10 and communicates with the valve chamber of the valve V1, and a flow path 12 which branches from the flow path 10 and communicates in the downstream valve V2 side A flow passage 13 is formed which allows fluid to flow from the valve V1 to the valve V2 adjacent to the downstream side.

  On the other hand, the valve V2 is in communication with the flow passage 13 and is in communication with the flow passage 21 in communication with the valve chamber of the valve V2, from the flow passage 22 in communication with the upstream flow passage 12 and with the valve chamber of the valve V2, from the valve V2 A flow path 23 for discharging the fluid to the outside is formed.

Two paths through which fluid flows are formed between the flow passage 10 serving as the fluid inlet and the flow passage 23 serving as the outlet by the valves V1 and V2 having such a configuration, and one passage is provided with the orifice gasket OR1. And the gasket G intervenes in the other path.
Specifically, an orifice gasket OR1 is interposed between the flow path 12 and the flow path 22, and the flow path 12 and the flow path 22 are connected by the orifice gasket OR1. The orifice gasket OR1 is a gasket provided with an orifice hole having a smaller diameter than the flow path 12 and the flow path 22, and can suppress the flow rate of the fluid to a small amount before and after the flow of the fluid.

On the other hand, the flow path 13 and the flow path 21 are connected by the gasket G corresponding to the diameter of the flow path 13 or the flow path 21, and the flow rate of the fluid flowing in the flow path 13 and the flow path 21 does not change. It is supposed to be.
Thereby, in the block valve according to the present embodiment, the fluid can be discharged through the orifice gasket OR1 according to the opening and closing operation of the valves V1 and V2, or the fluid can be discharged without the orifice gasket OR1. it can. When the fluid is discharged through the orifice gasket OR1, the flow rate can be reduced as compared with the case where the fluid is discharged without the orifice gasket OR1. In the following description, the flow rate in the case of discharging the fluid without passing through the orifice gasket OR1 is referred to as a normal amount, and the flow rate in the case of discharging the fluid through the orifice gasket OR1 is referred to as an adjustment amount.

The flow of the fluid accompanying the opening and closing operation of the valves V1 and V2 will be described for the present example having such a configuration.
First, when fluid is discharged in a normal amount without using the orifice gasket OR1, the valve V1 is opened, while the valve V2 opens the flow path 21 and the flow path 23, and the flow path 22 is closed. Control to the state.
When the fluid is circulated in this state, the fluid is sequentially circulated with the flow passage 10, the flow passage 11, the valve chamber of the valve V1, the flow passage 13, the flow passage 21 and the flow passage 23, and is discharged to the outside.

On the other hand, when discharging the fluid by the adjustment amount through the orifice gasket OR1, the valve V1 is closed, while the valve V2 opens the flow path 22 and the flow path 23, and the flow path 21 is closed. Control to the state.
When the fluid is circulated in this state, the fluid sequentially circulates with the flow path 10, the flow path 12, the flow path 22, the valve chamber of the valve V2, the flow path 23, and is discharged to the outside.
At this time, since the fluid passes through the orifice gasket OR1 interposed between the flow passage 12 and the flow passage 22, the flow rate of the fluid is suppressed to a small amount as compared with the case of passing through the flow passage 13 and the flow passage 21.

  In this example, between the flow path 10 and the flow path 23, the orifice gasket OR1 intervenes in one path, the gasket G intervenes in the other path, and the fluid passes through the orifice gasket OR1 and the gasket The flow rate changes depending on the case where it passes through G. However, the present invention is not limited thereto. Instead of the gasket G, an orifice gasket having a different diameter of the orifice hole from the orifice gasket OR1 is interposed, and the difference in the diameter of the orifice hole It is also possible to change the flow rate of the fluid.

In the first embodiment described above, the valve V1 of the two-way valve is disposed upstream and the valve V2 of the three-way valve is disposed downstream, but as shown in FIG. In the block valve 1b, the valve V2 of the three-way valve may be disposed on the upstream side, and the valve V1 of the two-way valve may be disposed on the downstream side.
However, in this example, unlike the first embodiment described above, the orifice gasket OR1 is interposed between the flow path 21 and the flow path 13. Also, in this example, the fluid flows in from the flow path 23 and is discharged from the flow path 10 to the outside.

The flow of the fluid accompanying opening / closing operation of valve V1 and V2 is explained about a modification which consists of such composition.
First, when the fluid is discharged in a normal amount without using the orifice gasket OR1, the valve V2 opens the flow path 22 and the flow path 23 and closes the flow path 21 while the valve V1 is closed. Control to the state.
When the fluid is circulated in this state, the fluid sequentially flows through the flow passage 23, the valve chamber of the valve V2, the flow passage 22, the flow passage 12 and the flow passage 10, and is discharged to the outside.

On the other hand, when discharging the fluid by the adjustment amount through the orifice gasket OR1, the valve V2 opens the flow path 21 and the flow path 23, and closes the flow path 22 while opening the valve V1. Control to the state.
When the fluid is circulated in this state, the fluid sequentially circulates with the flow passage 23, the valve chamber of the valve V2, the flow passage 21, the flow passage 13, the valve chamber of the valve V1, the flow passage 11, the flow passage 10, and to the outside Exhausted.
At this time, since the fluid passes through the orifice gasket OR1 interposed between the flow passage 21 and the flow passage 13, the flow rate of the fluid is suppressed to a small amount as compared with the case of passing through the flow passage 22 and the flow passage 12.

In the first embodiment, the flow rate of the fluid can be adjusted in two steps by two valves of the valve V1 and the valve V2, but in the present example, the flow rate of the fluid can be adjusted in three steps. .
With respect to the block valve 2a according to the second embodiment, the flow paths constituted by a plurality of valves are shown in FIG. 5 and FIG.
In this example, the valve V1 of the two-way valve, the valve V3 of the three-way valve, and the valve V2 of the three-way valve are arranged in order from the upstream side into which the fluid flows.
The configurations of the valve V1 and the valve V2 are the same as those of the first embodiment described above.

  The valve V3 used in this example is a valve connected between the valve V1 and the valve V2, communicates with the flow path 13, and communicates with the flow path 31 communicating with the valve chamber of the valve V3, and the upstream flow path 12 The flow path 32, flow path 33 branched from the flow path 32 and communicated with the valve chamber of the valve V3, flow path 34 branched from the flow path 32 and communicated with the flow path 22 downstream, and flow path 21 downstream from the valve A flow passage 35 communicating with the fluid passage is formed.

Here, an orifice gasket OR2 intervenes between the flow path 12 and the flow path 32, and an orifice gasket OR3 intervenes between the flow path 34 and the flow path 22.
The orifice gaskets OR2 and OR3 are provided with orifice holes having a diameter smaller than that of the flow path 12, the flow path 22, the flow path 32 or the flow path 34 as in the orifice gasket OR1 described above. The flow rate can be reduced to a small amount. With regard to the diameter of the orifice hole provided in the orifice gasket OR2 and the orifice gasket OR3, the diameter of the orifice hole of the upstream orifice gasket OR2 is larger than the diameter of the orifice hole of the downstream orifice gasket OR3. It is related.

On the other hand, the flow path 13 and the flow path 31 and the flow path 35 and the flow path 21 are connected by a normal gasket G, and these flow path 13, flow path 31, flow path 35 and flow path The flow rate of the fluid flowing at 21 does not change.
Thereby, in the block valve 2a according to the present embodiment, the fluid can be discharged through the orifice gasket OR2 or the orifice gasket OR3 in accordance with the opening and closing operation of the valves V1, V2, V3. The orifice gasket OR2 and the orifice gasket It is also possible to drain the fluid without going through OR3.

  When the fluid is discharged through the orifice gasket OR2 or the orifice gasket OR3, the flow rate can be reduced as compared with the case where the fluid is discharged without the orifice gasket OR2 or the orifice gasket OR3. Furthermore, when the fluid is discharged through the orifice gasket OR3, the flow rate can be reduced as compared with the case where the fluid is discharged through the orifice gasket OR2. In the following description, the flow rate in the case of discharging the fluid without passing through the orifice gaskets OR2 and OR3 is a normal amount, and the flow rate in the case of discharging the fluid through the orifice gasket OR2 is a first adjustment amount, Further, the smaller flow rate in the case of discharging the fluid through the orifice gasket OR3 is referred to as a second adjustment amount.

The flow of fluid involved in the opening and closing operation of the valves V1, V2, and V3 will be described for the present example having such a configuration.
First, when fluid is discharged in a normal amount without using the orifice gaskets OR2 and OR3, the valve V1 is opened, while the valve V3 opens the flow path 31 and the flow path 35, and the flow path 33 In the closed state, the valve V2 opens the flow path 21 and the flow path 23, and controls the flow path 22 in the closed state.
When fluid is allowed to flow in this state, the fluid is sequentially flow passage 10, flow passage 11, valve chamber of valve V1, flow passage 13, flow passage 31, valve chamber of valve V3, flow passage 35, flow passage 21, valve It distribute | circulates with the valve chamber of V2, the flow path 23, and is discharged | emitted outside.

On the other hand, when discharging the fluid by the first adjustment amount through the orifice gasket OR2, the valve V1 is closed, the valve V3 closes the flow path 31, and the flow path 33 and the flow path 35 are opened. In addition, the valve V2 opens the flow path 21 and the flow path 23, and controls the flow path 22 in a closed state.
When the fluid is circulated in this state, the fluid is sequentially flow passage 10, flow passage 12, flow passage 32, flow passage 33, valve chamber of valve V3, flow passage 35, flow passage 21, valve chamber of valve V2, flow It circulates with the passage 23 and is discharged to the outside.
At this time, since the fluid passes through the orifice gasket OR2 interposed between the flow passage 12 and the flow passage 32, as compared with the case where the fluid passes through the flow passage 13, the flow passage 31, the flow passage 35 and the flow passage 21, The flow rate of fluid can be reduced to a small amount.

Further, in the present example, by causing the fluid to flow out through the orifice gasket OR3, the fluid can be discharged at a second adjustment amount of a flow rate smaller than the case where the fluid is discharged through the orifice gasket OR2. In this case, the valve V1 and the valve V3 are closed, while the valve V2 opens the flow path 22 and the flow path 23, and controls the flow path 21 to be closed.
When the fluid is circulated in this state, the fluid is sequentially circulated with the flow path 10, the flow path 12, the flow path 32, the flow path 34, the flow path 22, the valve chamber of the valve V2, the flow path 23, and discharged to the outside Ru.
At this time, since the fluid passes through the orifice gasket OR3 interposed between the flow path 34 and the flow path 22, the flow rate of the fluid is further suppressed to a small amount as compared with the case where it passes only the orifice gasket OR2.

In the second embodiment, the valve V1 of the two-way valve, the valve V3 of the three-way valve, and the valve V2 of the three-way valve are disposed sequentially from the upstream side to the downstream side, but as shown in FIG. Alternatively, as a modification, the block valve 2b may have the valve V2 of the three-way valve, the valve V3 of the three-way valve, and the valve V1 of the two-way valve disposed sequentially from the upstream side to the downstream side.
However, in this example, unlike the above-described second embodiment, the orifice gasket OR2 is interposed between the flow path 21 and the flow path 31, and the orifice gasket OR3 is interposed between the flow path 35 and the flow path 13. Also, in this example, the fluid flows in from the flow path 23 and is discharged from the flow path 10 to the outside.

The flow of the fluid accompanying opening / closing operation of valve V1, V2, V3 is demonstrated about the modification which consists of such a structure.
First, when fluid is discharged in a normal amount without passing through the orifice gaskets OR2 and OR3, the valve V2 keeps the flow path 23 and the flow path 22 open and the flow path 21 closed. V3 is in the closed state, and the valve V2 is also in the closed state.
When the fluid is circulated in this state, the fluid sequentially flows through the flow passage 23, the valve chamber of the valve V2, the flow passage 22, the flow passage 32, the flow passage 34, the flow passage 12, the flow passage 10, and is discharged to the outside Ru.

On the other hand, when discharging the fluid by the first adjustment amount through the orifice gasket OR2, the valve V2 opens the flow path 23 and the flow path 21 and closes the flow path 22 and the valve V3 flows 31 and the flow path 33 are opened and the flow path 35 is closed, and the valve V1 is controlled to be closed.
When the fluid is circulated in this state, the fluid sequentially flows in the channel 23, the valve chamber of the valve V2, the channel 21, the channel 31, the valve chamber of the valve V3, the channel 33, the channel 34, the channel 12, the flow It circulates with the road 10 and is discharged outside.
At this time, since the fluid passes through the orifice gasket OR2 interposed between the flow passage 21 and the flow passage 31, as compared with the case where the fluid passes through the flow passage 22, the flow passage 32, the flow passage 34, and the flow passage 12. The flow rate of fluid can be reduced to a small amount.

Furthermore, in the case where the fluid is allowed to flow through the orifice gasket OR3 and the fluid is discharged with a second adjustment amount of a flow rate smaller than in the case of discharging the fluid through the orifice gasket OR2, The flow path 21 is opened, the flow path 22 is closed, the flow path 31 and the flow path 35 are opened, the flow path 33 is closed, and the valve V1 is controlled open.
When the fluid is circulated in this state, the fluid sequentially flows in the flow passage 23, the valve chamber of the valve V2, the flow passage 21, the flow passage 31, the valve chamber of the valve V3, the flow passage 35, the flow passage 13 and the valve chamber of the valve V1. , The flow path 11, and the flow path 10, and are discharged to the outside.
At this time, since the fluid passes through the orifice gasket OR3 interposed between the flow path 35 and the flow path 13, the flow rate of the fluid is further suppressed to a small amount as compared with the case where it passes only the orifice gasket OR2.

  As shown in the above embodiments of the present invention, a plurality of flow paths are provided by a plurality of valves, and the flow paths through which the fluid flows are changed by opening and closing operations of the valves, whereby the flow rate of fluid is increased in two or three steps It was possible to change it. Similarly, it is also possible to change the flow rate in four steps, and in this case, as shown in FIG. 8, this is realized by adding the same valve as the valve V3 shown in the second embodiment. can do.

In the block valve 3 shown in this example, two valves V3 are disposed between the valve V1 and the valve V2.
Two flow paths are formed between adjacent valves (between valve V1 and valve V3, between valve V3 and valve V3, between valve V3 and valve V2), and one flow path is an orifice gasket OR2, The other flow paths are connected by gaskets G by OR3 and OR4.

  The orifice gasket OR2, the orifice gasket OR3, and the orifice gasket OR4 intervene between the adjacent valves V1 and V2, between the valves V3 and V3, and between the valves V3 and V2 in this order from the upstream side of the flow path There is. The diameter of the orifice hole formed in each orifice gasket OR2, OR3, OR4 is such that the diameter of the orifice hole of the adjacent upstream orifice gasket is larger than the diameter of the orifice hole of the downstream orifice gasket. Specifically, the diameters of the orifice holes of the orifice gaskets OR2, OR3, and OR4 are in the relationship of orifice gasket OR2> orifice gasket OR3> orifice gasket OR4.

  As mentioned above, multi-stage flow adjustment is possible by increasing the valve V3 arranged between the valve V1 and the valve V2 and attaching the orifice gaskets OR1, OR2, OR3, OR4 between the adjacent valves V1, V2, V3 However, when it is possible to adjust the flow rate in three or more steps, the configuration of the valve group is generally as shown in FIG.

  That is, FIG. 9 shows a flow path constituted by a group of valves provided in the block valve 4 capable of adjusting the flow rate to n steps (n: natural number of 3 or more), and the valve V1 at the beginning or the most upstream side of the flow path Are disposed, and the valve V2 is disposed at the end or the most downstream side. Further, (n−2) valves V3 are disposed between the valve V1 and the valve V2.

  Further, an orifice gasket OR2 and an orifice gasket OR3... An orifice gasket OR (n) are provided in this order from the upstream side in one of the two flow paths between the adjacent valves. Regarding the orifice gasket OR2 to the orifice gasket OR (n), the diameter of the orifice hole of the adjacent upstream orifice gasket is larger than the diameter of the orifice hole of the downstream orifice gasket. Specifically, the diameters of the orifice gaskets OR2 to OR (n) are in the relation of orifice gasket OR2> orifice gasket OR3>... Orifice gasket OR (n-1)> orifice gasket OR (n).

  By arranging the valves V1, V2 and V3 and the orifice gaskets OR1 to OR (n) in this way, it is possible to adjust the flow rate of the fluid to be discharged to the outside according to the opening and closing operation of the valves V1, V2 and V3. .

  Also in the example of adjusting the flow rate of the fluid in four stages, the valve V2 is disposed at the start end side or the most upstream side, and the valve V1 is arranged at the termination side or the most downstream side as in the first embodiment and the second embodiment. It can be configured to be able to adjust the flow rate.

According to the block valve according to the present embodiment described above, the desired flow rate among the plurality of flow paths provided in the block valve on one line according to the opening / closing operation of the plurality of valves provided on one line The fluid can be made to flow through the flow path corresponding to the above, and the flow rate of the fluid can be made adjustable.
Further, since the flow rate of the fluid can be adjusted by the flow path formed in the block valve, it is not necessary to draw the piping complicatedly or to interpose the block joint in which the flow path is formed between the valves. Therefore, various fluid controllers can be accommodated in the width of one line including the block valve, and the cost can be suppressed as compared with the case of providing the piping and the block joint.

  In the description of this embodiment, an example using an orifice gasket has been described, but the orifice is not limited to the orifice gasket, and the fluid such as a sonic nozzle, a throttling device, or a restrictor provides resistance to the fluid to It may be any member to be controlled.

  Moreover, according to the block valve concerning the above this embodiment, in the semiconductor manufacturing apparatus which has the said block valve, the inside of the chamber connected with the block valve can be wash | cleaned. That is, by changing the flow rate of the fluid intermittently according to the opening and closing operation of the valve, particles can be effectively removed from the chamber connected to the block valve.

V valve OR orifice gasket G gasket 1, 1a, 1b, 2a, 2b, 3, 4 block valve 10, 11, 12, 13, 21, 22, 23, 31, 32, 33, 34, 35 flow path

Claims (5)

A block valve in which a plurality of valves are connected and the flow rate is adjusted according to the flow path through which fluid flows,
One inlet through which the fluid flows;
One outlet from which the fluid flows out;
And a plurality of flow paths formed between the inlet and the outlet and in which the fluid flows.
Among the plurality of valves constituting the block valve, the valve disposed between the start and end valves comprises a three-way valve having a flow passage of the same shape,
The plurality of flow paths are provided with flow paths through which an orifice intervenes,
One flow path through which the fluid flows is selected from the plurality of flow paths by opening and closing the plurality of valves, and the selected flow path or an orifice provided in the selected flow path is selected. The fluid is discharged by the flow rate,
A block valve characterized by The diameters of the orifices provided in the plurality of flow paths are such that the diameter of the orifice provided on the upstream side is larger than the diameter of the orifice provided on the downstream side.
The block valve according to claim 1. The block valve is used in a fluid control device having a plurality of lines, and fits within one line width of the plurality of lines.
Block valve according to claim 1 or 2. A block valve according to any one of claims 1 to 3 is arranged,
A fluid control device characterized in that. A semiconductor manufacturing apparatus comprising the fluid control device according to claim 4 .
By opening and closing the block valve, the flow rate of the fluid is changed to remove particles in the chamber.
A method of cleaning a chamber characterized in that

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