JP2021094616A - Measuring method of suction force - Google Patents

Abstract

To provide a measuring method of a suction force which can easily measure a suction force in an exhaust duct by a suction source on an equipment side.SOLUTION: A measuring method of a suction force includes: a measurement step ST1 of stopping rotation of an impeller of an exhaust fan by a motor of the exhaust fan, which is connected to an exhaust port and an exhaust duct and is arranged in a processing device, and measuring the rotation speed of the impeller of the exhaust fan rotated by wind generated by the suction force of the exhaust duct, which is connected to the processing device, by a suction force of equipment with the processing device installed; and a determination step ST2 of determining shortage of the suction force of the exhaust duct when the rotation speed measured in the measurement step ST1 is below an optional threshold.SELECTED DRAWING: Figure 4

Description

The present invention relates to a method for measuring suction force.

In the case of a processing apparatus that performs processing such as polishing and cutting, processing waste is mixed with the processing cooling water supplied during the mist-ized processing and scattered inside the processing chamber. Therefore, the scattered mist and processing debris are sucked from the exhaust port formed on the wall of the processing chamber to the duct on the equipment side connected to the processing apparatus and discharged to the outside of the processing apparatus. An exhaust fan is provided between the exhaust port and the equipment side duct to ensure the exhaust of mist, and a device that reliably discharges mist at both the exhaust fan and the equipment side suction source is provided. (See, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2000-124165

However, the device shown in Patent Document 1 is generated in the exhaust duct when the number of processing devices sucked by the suction source on the equipment side increases, or when a specific processing device uses a large amount of suction force. There is a problem that the suction power is reduced and mist and the like cannot be discharged normally.

Therefore, it is desired to measure the suction force in the exhaust duct. However, in order to measure the suction force of the exhaust duct, it is necessary to install a dedicated anemometer in the exhaust duct, and the labor required for measuring the suction force tends to increase.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a method for measuring a suction force capable of easily measuring the suction force in an exhaust duct by a suction source on the equipment side. is there.

In order to solve the above-mentioned problems and achieve the object, the suction force measuring method of the present invention measures the suction force of the exhaust duct connecting the processing device and the suction source of the equipment in which the processing device is installed. It is a method of measuring the suction force, and the processing apparatus includes a chuck table for holding a work piece, a processing unit for processing the work piece held on the chuck table, and processing in which the processing unit is arranged. The exhaust fan is provided with an exhaust port for discharging mist generated in the region to the outside, an exhaust fan connected to the exhaust port, the exhaust duct, and arranged in the processing apparatus, and the exhaust fan is provided with the exhaust. It has a motor that rotates the fan and a sensor that detects the number of rotations of the exhaust fan, and the method of measuring the suction force is generated by the suction force of the exhaust duct after stopping the rotation of the exhaust fan by the motor. When the measurement step for measuring the rotation speed of the exhaust fan rotating by the wind and the rotation speed measured in the measurement step are below an arbitrary threshold value, the suction force of the exhaust duct is insufficient. It is characterized by comprising a determination step for determining.

In the method for measuring the suction force, when it is determined in the determination step that the suction force of the exhaust duct is insufficient, the rotation speed of the exhaust fan is increased to promote the discharge of the mist by the exhaust fan. Is also good.

The present invention has an effect that the suction force in the exhaust duct by the suction source on the equipment side can be easily measured.

FIG. 1 is a perspective view showing a configuration example of a processing apparatus that implements the method for measuring suction force according to the first embodiment. FIG. 2 is a side view showing a main part of the processing apparatus shown in FIG. 1 in cross section. FIG. 3 is a perspective view showing an impeller of an exhaust fan of the processing apparatus shown in FIG. FIG. 4 is a flowchart showing the flow of the suction force measuring method according to the first embodiment.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
The method for measuring the suction force according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a processing apparatus that implements the method for measuring suction force according to the first embodiment. FIG. 2 is a side view showing a main part of the processing apparatus shown in FIG. 1 in cross section. FIG. 3 is a perspective view showing an impeller of an exhaust fan of the processing apparatus shown in FIG. FIG. 4 is a flowchart showing the flow of the suction force measuring method according to the first embodiment.

(Processing equipment)
The method for measuring the suction force according to the first embodiment is carried out by the processing apparatus 1 shown in FIG. The processing apparatus 1 shown in FIG. 1 is installed in the factory equipment 300, which is an equipment. The factory equipment 300 is equipped with a plurality of processing devices 1 illustrated in FIG. The factory equipment 300 includes a suction source 301 connected to the processing device 1 and an exhaust duct 302 connecting the processing device 1 and the suction source 301. The suction source 301 is connected to the exhaust duct 302 and exhausts the atmosphere inside the exhaust duct 302 to the outside of the processing device 1. The suction source 301 is composed of, for example, a vacuum pump or the like. The exhaust duct 302 is formed in a tubular shape.

The processing device 1 shown in FIG. 1 is a cutting device that cuts (corresponds to processing) the workpiece 200. In the first embodiment, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, gallium, or the like. In the workpiece 200, a device is formed in a region divided in a grid pattern by a plurality of scheduled division lines formed in a grid pattern on the surface 201.

Further, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer in which a central portion is thinned and a thick portion is formed on an outer peripheral portion. In addition to the wafer, a device sealed with a resin is used. A rectangular package substrate having a plurality of wafers, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, a glass substrate, or the like may be used. In the first embodiment, the back surface 202 of the workpiece 200 is attached to an adhesive tape 204 having an annular frame 203 attached to the outer peripheral edge thereof, and is supported by the annular frame 203.

The machining apparatus 1 shown in FIG. 1 is a cutting apparatus in which the workpiece 200 is held by the chuck table 10 and cut by the cutting blade 21 along the scheduled division line. As shown in FIG. 1, the machining apparatus 1 is a chuck table 10 that sucks and holds the workpiece 200 on the holding surface 11 and a machining unit that cuts the workpiece 200 held by the chuck table 10 with a cutting blade 21. A certain cutting unit 20, an imaging unit 30 for photographing a workpiece 200 held on a chuck table 10, and a control unit 100 are provided.

Further, as shown in FIG. 1, the processing apparatus 1 includes a moving unit that relatively moves the chuck table 10 and the cutting unit 20. The moving unit is an X-axis moving unit that processes and feeds the chuck table 10 in the horizontal direction and in the X-axis direction parallel to the lateral direction of the device main body 2, and the cutting unit 20 in the horizontal direction and parallel to the longitudinal direction of the device main body 2. A Y-axis moving unit that indexes and feeds in the Y-axis direction that is orthogonal to the X-axis direction, and a Z that cuts and feeds the cutting unit 20 in the Z-axis direction that is parallel to the vertical direction that is orthogonal to both the X-axis direction and the Y-axis direction. It includes an axial movement unit and a rotary movement unit that rotates the chuck table 10 around an axis parallel to the Z-axis direction and is machined and fed in the X-axis direction together with the chuck table 10 by the X-axis movement unit.

The X-axis moving unit moves the chuck table 10 in the X-axis direction, which is the machining feed direction, so that the chuck table 10 and the cutting unit 20 are machined and fed relatively along the X-axis direction. The X-axis moving unit covers a loading / unloading region 3 in which the workpiece 200 is loaded / unloaded from the chuck table 10 and a machining region 4 in which the workpiece 200 held in the chuck table 10 is machined by the cutting unit 20. And move it in the X-axis direction.

The Y-axis moving unit moves the cutting unit 20 in the Y-axis direction, which is the indexing and feeding direction, so that the chuck table 10 and the cutting unit 20 are relatively indexed and fed along the Y-axis direction. The Z-axis moving unit moves the cutting unit 20 in the Z-axis direction, which is the cutting feed direction, so that the chuck table 10 and the cutting unit 20 are relatively cut and fed along the Z-axis direction.

The X-axis moving unit, the Y-axis moving unit, and the Z-axis moving unit are a well-known ball screw rotatably provided around the axis, a well-known motor that rotates the ball screw around the axis, and a chuck table 10 or a cutting unit. A well-known guide rail that movably supports the 20 in the X-axis direction, the Y-axis direction, or the Z-axis direction is provided.

The chuck table 10 has a disk shape, and the holding surface 11 for holding the workpiece 200 is formed of porous ceramic or the like. Further, the chuck table 10 is provided so as to be movable in the X-axis direction over the carry-in / out area 3 and the machining area 4 by the X-axis moving unit, and is rotated around the axis parallel to the Z-axis direction by the rotary moving unit. It is provided freely. The chuck table 10 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 11. In the first embodiment, the chuck table 10 sucks and holds the back surface 202 side of the workpiece 200 via the adhesive tape 204.

The cutting unit 20 is a cutting means which is disposed in the machining region 4 and is detachably attached with a cutting blade 21 for cutting the workpiece 200 held on the chuck table 10. The cutting unit 20 is provided movably in the Y-axis direction by the Y-axis moving unit and movably provided in the Z-axis direction by the Z-axis moving unit with respect to the workpiece 200 held by the chuck table 10. Has been done. The cutting unit 20 can position the cutting blade 21 at an arbitrary position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit and the Z-axis moving unit.

The cutting unit 20 is provided with a spindle housing 22 movably provided in the Y-axis direction and the Z-axis direction by the Y-axis moving unit and the Z-axis moving unit, and the spindle housing 22 is rotatably provided around the axis and is not shown. It includes a spindle 23 that is rotated by a motor and has a cutting blade 21 mounted on the tip thereof, and a cutting water supply nozzle (not shown) that supplies cutting water to the cutting blade 21.

The cutting blade 21 is an ultra-thin cutting grindstone having a substantially ring shape. In the first embodiment, the cutting blade 21 is a so-called hub blade including an annular circular base and an annular cutting blade disposed on the outer peripheral edge of the circular base to cut the workpiece 200. The cutting edge is composed of abrasive grains such as diamond and CBN (Cubic Boron Nitride) and a bonding material (bonding material) such as metal and resin, and is formed to have a predetermined thickness. In the present invention, the cutting blade 21 may be a so-called washer blade composed of only the cutting blade 212.

The spindle 23 rotates the cutting blade 21 by rotating the spindle 23 around the axis by a motor. Since the cutting blade 21 is rotated around the axis by the spindle 23, the cutting water is scattered together with the cutting chips generated by cutting the workpiece 200 from the lower end of the cutting blade that cuts the workpiece 200. Since the rotation speed of the spindle 23 is, for example, 30,000 rpm or more and 100,000 rpm or less, the cutting water scattered from the lower end of the cutting blade of the cutting blade 21 is scattered in a mist state.

The imaging unit 30 images the workpiece 200 held by the holding surface 11 of the chuck table 10. The image pickup unit 30 includes an image pickup element that images a region to be divided of the workpiece 200 before cutting held on the chuck table 10. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The image pickup unit 30 takes an image of the workpiece 200 held on the chuck table 10 and obtains an image such as for performing alignment for aligning the scheduled division line of the workpiece 200 with the cutting blade 21. The obtained image is output to the control unit 100.

The control unit 100 controls each of the above-mentioned units of the processing device 1 to cause the processing device 1 to perform a processing operation on the workpiece 200. The control unit 100 is an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and input / output. A computer having an interface device. In the arithmetic processing unit of the control unit 100, the arithmetic processing unit executes arithmetic processing according to a computer program stored in the storage device, and a control signal for controlling the processing apparatus 1 is sent to the processing apparatus via an input / output interface device. Output to the above-mentioned component of 1.

Further, the control unit 100 is connected to a display unit composed of a liquid crystal display device or the like for displaying a processing operation state, an image, or the like, and an input unit used by an operator when registering processing content information or the like. The input unit is composed of at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

Further, the processing apparatus 1 has an X-axis direction position detection unit (not shown) for detecting the position of the chuck table 10 in the X-axis direction and a Y-axis direction position (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction. It includes a detection unit and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction by the pulse of the motor. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the positions of the chuck table 10 in the X-axis direction, the cutting unit 20 in the Y-axis direction, or the Z-axis direction to the control unit 100. .. In the first embodiment, each position is determined by the distance in the X-axis direction, the Y-axis direction, and the Z-axis direction from the predetermined reference position.

Further, as shown in FIG. 1, the processing apparatus 1 includes a cassette elevator 40 on which a cassette 41 accommodating a workpiece 200 before and after cutting is placed and moves the cassette 41 in the Z-axis direction, and a workpiece after cutting. A cleaning unit 50 for cleaning the object 200 and a transfer unit 60 for moving the workpiece 200 in and out of the cassette 41 and transporting the workpiece 200 are provided.

Further, the processing device 1 includes a plurality of exterior side walls 5 that surround the upper part of the device main body 2, and a ceiling wall 6 that is connected to the upper ends of the plurality of exterior side walls 5 and closes the upper openings of the plurality of exterior side walls 5. The exterior side wall 5 is a wall that surrounds the chuck table 10, the cutting unit 20, the imaging unit 30, the moving unit, the cassette elevator 40, the cleaning unit 50, and the transport unit 60, and serves as a side wall of the processing device 1 itself. The ceiling wall 6 is a wall that closes the upper openings of the plurality of exterior side walls 5 and serves as the ceiling of the processing apparatus 1 itself.

Further, as shown in FIG. 2, the processing apparatus 1 is provided in a plurality of exterior side walls 5 and surrounds the outside of the processing area 4 together with the exterior side wall 5 and the ceiling wall 6 to suppress the diffusion of cutting water mist. The chamber wall 7, the exhaust port 8 that discharges the mist generated in the processing area 4 in which the cutting unit 20 is arranged to the outside, the connection duct 9 that connects the exhaust port 8 and the exhaust duct 302, and the processing device 1 The exhaust fan 70 is provided in the above.

The exhaust port 8 is open to the processing chamber wall 7. The connection duct 9 is formed in a tubular shape, one end of which is connected to the exhaust port 8 and the other end of which is connected to one end of the exhaust duct 302. The exhaust fan 70 includes an impeller 71 (shown in FIG. 3) arranged in the connection duct 9, a motor 72 that rotates the impeller 71 of the exhaust fan 70, and the number of rotations of the impeller 71 of the exhaust fan 70. It has a sensor 73 for detecting the above.

The exhaust fan 70 is arranged in a connection duct 9 in which the impeller 71 connects the exhaust port 8 and the exhaust duct 302, and is connected to the exhaust port 8 and the exhaust duct 302. The impeller 71 is rotatably provided around the axis. The motor 72 rotates the impeller 71 around the axis. In the first embodiment, the exhaust fan 70 is a so-called DC (Direct Current) fan in which the motor 72 is supplied with direct current power to rotate the impeller 71.

The sensor 73 detects the rotation speed of the impeller 71 and outputs the detection result to the control unit 100. As the sensor 73, a hall sensor that detects the rotation speed by changing the magnetic field of the magnet, or a pulse sensor that detects the voltage generated on the motor 72 side by the rotation can be used.

The exhaust fan 70 exhausts the atmosphere in the processing region 4, that is, the mist, through the exhaust port 8 through the connecting duct 9 and the exhaust duct 302 by rotating the impeller 71 around the axis of the motor 72.

Further, the control unit 100 of the processing device 1 includes a storage unit 101 and a determination unit 102. The storage unit 101 stores the set rotation speed 401 and an arbitrary threshold value 402 of the rotation speed. The rotation speed of the impeller 71 of the exhaust fan 70 and the wind speed in the exhaust duct 302 correspond to each other and are proportional to each other in the first embodiment. That is, in the first embodiment, when the rotation speed of the exhaust fan 70 increases, the wind speed in the exhaust duct 302 increases, and when the rotation speed of the exhaust fan 70 decreases, the wind speed in the exhaust duct 302 decreases.

With the rotation of the impeller 71 of the exhaust fan 70 stopped by the motor 72, a dedicated anemometer is installed in the exhaust duct 302, and during the machining operation of the machining device 1 in which the wind speed of the exhaust duct 302 is predetermined. Confirm that the required wind speed is 502 or higher. Then, in a state where the wind speed 502 equal to or higher than the specified value is generated, the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 is stopped, and the rotation of the impeller 71 rotated by the suction force of the exhaust duct 302 is measured and measured. An arbitrary threshold value 402 is set as the number of rotations measured or the number of measurements appropriately adjusted from the measured number of rotations.

If the wind speed of the exhaust duct 302 can be easily adjusted, a dedicated anemometer is installed in the exhaust duct 302 so that the wind speed of the exhaust duct 302 becomes the minimum required during the processing operation of the processing device 1. And adjust. Then, even if the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 is stopped, the rotation of the impeller 71 rotated by the suction force of the exhaust duct 302 is measured, and the measured rotation speed is set as the threshold value 402. Good.

The process of setting the arbitrary threshold value 402 is performed, for example, in a state where the exhaust duct 302 is connected to the suction source 301 of the factory equipment 300 after the processing device 1 is installed in the factory.

The determination unit 102 stops the rotation of the impeller 71 of the exhaust fan 70 by the motor 72, and the rotation speed of the impeller 71 of the exhaust fan 70 rotated by the wind generated by the suction force of the exhaust duct 302 by the suction source 301 is determined. If it falls below an arbitrary threshold value 402, it is determined that the suction force of the exhaust duct 302 by the suction source 301 is insufficient. The determination unit 102 stops the rotation of the impeller 71 of the exhaust fan 70 by the motor 72, and the rotation speed of the impeller 71 of the exhaust fan 70 rotated by the wind generated by the suction force of the exhaust duct 302 by the suction source 301 is determined. When it is equal to or higher than an arbitrary threshold value 402, it is determined that the suction force of the exhaust duct 302 by the suction source 301 is sufficient.

Further, the storage unit 101 stores the determination result of the determination unit 102. The determination result of the determination unit 102 is stored in a second predetermined storage area set in advance in the storage device of the control unit 100. Only one determination result of the determination unit 102 is stored in a predetermined storage area, and when a new one is written by the arithmetic processing unit, the already written one is deleted. That is, the latest determination result of the determination unit 102 is always overwritten in the predetermined storage area by the arithmetic processing unit.

Further, when the determination result of the determination unit 102 stored in the storage unit 101 shows that the suction force of the exhaust duct 302 by the suction source 301 is insufficient, the determination unit 102 of the impeller 71 of the exhaust fan 70 during the machining operation. The impeller 71 of the exhaust fan 70 is rotated by setting the rotation speed higher than the set rotation speed 401 by a predetermined rotation speed. When the determination result of the determination unit 102 stored in the storage unit 101 shows that the suction force of the exhaust duct 302 by the suction source 301 is sufficient, the determination unit 102 determines the rotation speed of the impeller 71 of the exhaust fan 70 during the machining operation. Perform the process of increasing.

The function of the storage unit 101 is realized by the storage device, and the function of the determination unit 102 is realized by the arithmetic processing unit executing the computer program stored in the storage device.

The method for measuring the suction force according to the first embodiment is carried out periodically or at an arbitrary timing such as when there are many defects in the processing result of the processing apparatus 1. The method for measuring the suction force according to the first embodiment is a method for measuring the suction force of the exhaust duct 302 connecting the processing device 1 and the suction source 301 of the factory equipment 300, and as shown in FIG. 4, the measurement step. It includes ST1 and determination step ST2.

In the determination step ST2, the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 is stopped, and the rotation speed of the impeller 71 of the exhaust fan 70 rotated by the wind generated by the suction force of the exhaust duct 302 by the suction source 301 is measured. It is a step to do. In the determination step ST2, the control unit 100 of the processing device 1 stops the rotation of the impeller 71 by the motor 72 of the exhaust fan 70. Then, the impeller 71 of the exhaust fan 70 rotates by the wind generated by the suction force of the exhaust duct 302 by the suction source 301. In the determination step ST2, the sensor 73 detects the rotation speed of the impeller 71 of the exhaust fan 70 and outputs the detection result to the control unit 100.

The determination step ST2 is a step of determining that the suction force of the exhaust duct 302 by the suction source 301 is insufficient when the rotation speed of the impeller 71 measured in the measurement step ST1 is lower than an arbitrary threshold value 402. is there. In the determination step ST2, the determination unit 102 of the control unit 100 compares the rotation speed of the impeller 71, which is the detection result of the sensor, with the predetermined threshold value 402. In the determination step ST2, when the rotation speed of the impeller 71, which is the detection result of the sensor, falls below a predetermined threshold value 402, the suction force of the exhaust duct 302 by the suction source 301 becomes insufficient. It is determined that it is. In the determination step ST2, when the determination unit 102 of the control unit 100 determines that the rotation speed of the impeller 71, which is the detection result of the sensor, is equal to or higher than a predetermined threshold value 402, the suction force of the exhaust duct 302 by the suction source 301 is sufficient. Is determined to be. In the determination step ST2, the control unit 100 stores the determination result of the determination unit 102 in the storage unit 101, and ends the suction force determination method.

In the processing device 1 having the above-described configuration, the operator registers the processing content information in the control unit 100, places the cassette 51 containing the workpiece 200 on the cassette elevator 40, and controls the operation start instruction from the operator. When the unit 100 receives it, the machining operation is started. When the machining operation is started, the determination unit 102 of the control unit 100 refers to the determination result of the determination unit 102 of the storage unit 101, and the determination result of the determination unit 102 is the suction of the exhaust duct 302 by the suction source 301. When the force is insufficient, the impeller 71 of the exhaust fan 70 is rotated at a rotation speed higher than the set rotation speed 401 by a predetermined rotation speed. Further, in the processing device 1, when the determination unit 102 of the control unit 100 determines that the determination result of the determination unit 102 is that the suction force of the exhaust duct 302 by the suction source 301 is sufficient, the impeller 71 of the exhaust fan 70 is set to the set rotation speed. Rotate at 401. In this way, the processing device 1 and the suction force determination method determine the rotation speed of the impeller 71 of the exhaust fan 70 when it is determined in the determination step ST2 that the suction force of the exhaust duct 302 by the suction source 301 is insufficient. The number of revolutions is increased from 401 to promote the discharge of mist by the impeller 71 of the exhaust fan 70.

Further, the processing apparatus 1 rotates the spindle 23 around the axis while supplying cutting water from the cutting water supply nozzle to rotate the cutting blade 21, and the transport unit 60 takes one piece of the workpiece 200 from the cassette 51. It is taken out and the back surface 202 side is placed on the holding surface 11 of the chuck table 10 via the adhesive tape 204.

The processing apparatus 1 sucks and holds the workpiece 200 on the holding surface 11 via the adhesive tape 204, moves the chuck table 10 to the lower part of the image pickup unit 30 by the moving unit, and sucks and holds the chuck table 10 on the chuck table 10 by the image pickup unit 30. The work piece 200 is imaged and the alignment is performed.

Based on the processing content information, the processing apparatus 1 supplies cutting water from the cutting water supply nozzle while relatively moving the cutting blade 21 and the workpiece 200 along the scheduled division line by the moving unit. The cutting blade 21 is cut into the planned division line of the workpiece 200 until it reaches the adhesive tape 204, and the cutting is performed. When the processing apparatus 1 cuts all the scheduled division lines of the workpiece 200, the workpiece 200 is transported to the cleaning unit 50 by the transport unit 60, cleaned by the cleaning unit 50, and then in the cassette 51 by the transport unit 60. Carry in to.

As described above, the method for determining the suction force according to the first embodiment is to stop the rotation of the impeller 71 of the exhaust fan 70 by the motor 72 and use the wind generated by the suction force of the exhaust duct 302 only by the suction source 301. The rotation speed of the impeller 71 of the rotating exhaust fan 70 is measured by the sensor 73. Therefore, in the method for determining the suction force according to the first embodiment, the suction force of the exhaust duct 302 of the suction source 301 on the factory equipment 300 side can be measured by the rotation speed of the impeller 71 of the exhaust fan 70. It is efficient because there is no need to install a measuring device such as a wind speed sensor inside. As a result, the method for measuring the suction force according to the first embodiment has an effect that the suction force in the exhaust duct 302 by the suction source 301 on the factory equipment 300 side can be easily measured.

Further, in the method of measuring the suction force according to the first embodiment, when it is determined in the determination step ST2 that the suction force of the exhaust duct 302 by only the suction source 301 is insufficient, the impeller of the exhaust fan 70 is in the processing operation. The rotation speed of 71 is increased from the set rotation speed 401 to promote the discharge of mist in the processing region 4 by the exhaust fan 70. As a result, the method for measuring the suction force according to the first embodiment promotes the discharge of mist in the processing region 4, so that it is possible to suppress the occurrence of processing defects in the workpiece 200.

The present invention is not limited to the above embodiment. That is, it can be modified in various ways without departing from the gist of the present invention. In the first embodiment, the processing device 1 is a cutting device that cuts the workpiece 200, but in the present invention, the grinding device 200 is not limited to the cutting device, and the workpiece 200 is ground (corresponding to machining). , A polishing device for polishing (corresponding to processing) may be used.

1 Machining equipment 4 Machining area 8 Exhaust port 10 Chuck table 20 Cutting unit (machining unit)
70 Exhaust fan 72 Motor 73 Sensor 200 Work piece 300 Factory equipment (equipment)
301 Suction source 302 Exhaust duct ST1 Measurement step ST2 Judgment step

Claims (2)

It is a method of measuring the suction force for measuring the suction force of the exhaust duct connecting the processing device and the suction source of the equipment in which the processing device is installed.
The processing device is
A chuck table that holds the work piece and
A processing unit for processing the workpiece held on the chuck table, and
An exhaust port that discharges mist generated in the processing area where the processing unit is arranged to the outside,
An exhaust fan connected to the exhaust port, the exhaust duct, and arranged in the processing apparatus is provided.
The exhaust fan
A motor that rotates the exhaust fan and
It has a sensor that detects the rotation speed of the exhaust fan and
The method of measuring suction power is
The rotation of the exhaust fan by the motor is stopped,
A measurement step for measuring the rotation speed of the exhaust fan that rotates with the wind generated by the suction force of the exhaust duct, and
When the rotation speed measured in the measurement step is lower than an arbitrary threshold value, a determination step of determining that the suction force of the exhaust duct is insufficient, and a determination step.
A method for measuring suction force, which comprises. In the determination step
When it is determined that the suction force of the exhaust duct is insufficient,
The method for measuring suction force according to claim 1, wherein the rotation speed of the exhaust fan is increased to promote the discharge of the mist by the exhaust fan.

Images