JP2000124165A - Cutting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To economically exhaust the mist, etc., without taking a space, by forming an exhaust hole for exhausting the mist produced by cutting at a cutting zone to outside, connecting the exhaust hole to a duct fan and connecting an exhaust duct extending outside to the duct fan. SOLUTION: At a cutting zone 18, a cutting means 20 having a rotary blade 17 and a cutting water feed nozzle 19 is disposed with an exhaust hole 21 disposed at the apparatus body. The cutting zone 18 is covered with a transparent cover 18a, the exhaust hole 21 communicates with a duct fan 22 disposed in a cutter 10, an exhaust duct 23 extending outside the apparatus is connected to the duct fan 22, and the duct fan 22 is composed of an intake 24 communicating with the exhaust hole 21, a body 27 having blades 26, a discharge part 28 communicating with the duct 23, seal members 29, 30 and a bracket 31 for fixing the duct fan 22.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a cutting device for cutting a workpiece such as a semiconductor wafer, and more particularly, to a cutting device having a mechanism for discharging mist generated by cutting to the outside.

[0002]

2. Description of the Related Art For example, in a cutting device 40 shown in FIG.
In the cutting area 42 covered with the transparent cover 41, the cutting water is supplied from the cutting water supply nozzle 43, and the workpiece 45 is cut by the high-speed rotation of the cutting blade 44. Therefore, at the time of cutting, the cutting water becomes mist together with the cutting waste (contamination) and scatters inside the cutting area 42.

[0003] The scattered mist impairs visibility from the outside, and the scattered contamination adheres to various parts in the cutting area 42 and contaminates the adhered parts, which may adversely affect the cutting operation. . In order to avoid such an adverse effect, an exhaust port 46 is provided in the cutting area 42 as shown in FIG.
From the cutting device 40 and discharged to the outside of the device through an exhaust duct 47 extending from the inside of the cutting device 40 to the outside.

[0004]

However, as shown in FIG. 4, the exhaust duct 47 is connected to a duct fan 48 outside the apparatus, which is a suction source.
Since the mist and the like are discharged to the outside of the device by the suction force of the cutting device 8, a space for installing the duct fan 48 separately from the cutting device 40 is required. Therefore, inconvenience arises when there is no space for installing the duct fan 48.

[0005] Even if there is space for installing the duct fan 48, the cost and man-hours are required to install the duct fan 48, so that the cost for introducing the cutting device 40 increases accordingly. There is also a problem.

As described above, when mist and contamination generated in the cutting area of the cutting device are discharged to the outside,
There is a problem to be solved in that mist or the like can be economically discharged without taking up space for installation.

[0007]

SUMMARY OF THE INVENTION As a specific means for solving the above-mentioned problems, the present invention provides a chuck table for holding a workpiece, and cutting water supplied to the workpiece held on the chuck table. And a cutting means for performing cutting while performing the cutting, wherein an exhaust port for discharging mist generated by cutting to the outside is formed in a cutting area where the cutting means is disposed, and the exhaust port Is provided with a cutting device which is connected to a duct fan provided inside the apparatus, and to which an exhaust duct extending to the outside of the apparatus is connected.

[0008] The duct fan has an additional requirement that it be formed of a material that does not rust or that it is subjected to a rust-proof treatment.

In the cutting apparatus thus constructed, since a duct fan conventionally installed outside the cutting apparatus is built in the cutting apparatus, it is necessary to separately provide ventilation equipment such as a duct fan. There is no. Also, there is no cost or man-hour for installing the duct fan.

Further, since the duct fan is made of a non-rusting material or is subjected to a rust-proof treatment,
Since it does not rust even if water adheres, the function as a duct fan does not deteriorate, and replacement of parts is not required.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS As an embodiment of the present invention, FIG.
The cutting device 10 shown in FIG. When, for example, the semiconductor wafer W is to be cut using the cutting device 10 of FIG. 1, the semiconductor wafer W is held by the frame F via the holding tape T and stored in the cassette 11 in a plurality of layers.

Semiconductor wafer W held by frame F
Is transported out of the cassette 11 by the loading / unloading means 12 and placed in the temporary storage area 13 and then the first transporting means 1
The wafer is conveyed to and mounted on the chuck table 15 by the pivotal movement of No. 4 and is suction-held.

The semiconductor wafer W is placed on the chuck table 15
The chuck table 15 moves in the X-axis direction and is positioned immediately below the alignment means 16, and a street to be cut is detected by a process such as pattern matching. Is performed in the Y-axis direction. When the positioning is performed in this manner, the chuck table 15 is further moved.
Moves in the X-axis direction and is cut by the action of the rotating blade 17 in the cutting area 18.

In the cutting area 18, a cutting means 20 having a rotary blade 17 and a cutting water supply nozzle 19 is provided, and an exhaust port 21 is provided on the apparatus body side.
The cutting area 18 is covered by a transparent cover 18a.

As shown in FIG. 2, the exhaust port 21 communicates with a duct fan 22 provided inside the cutting device 10, and an exhaust duct 23 extending outside the device is connected to the duct fan 22. . That is, the duct fan 22 is built in the cutting device 10, and there is no need to separately provide ventilation equipment outside the cutting device 10.

The duct fan 22 is, as shown in FIG.
A suction unit 24 communicating with the exhaust port 21, a main body 27 having a motor 25 and the blade 26 shown in FIG. 2 driven and rotated by the motor 25, a discharge unit 28 communicating with the exhaust duct 23, and a suction unit Seal members 29 and 30 disposed between the main body portion 24 and the main body portion 27 and between the main body portion 27 and the discharge portion 28; and a bracket 31 that is mounted inside the main body of the cutting device 10 and fixes the duct fan 22. , And is a centrifugal fan discharged from the discharge unit 28 by the centrifugal force of the rotating blades 26, such as mist sucked from the suction unit 24.

Here, the sealing member 29 of the suction part 24 is used.
A liquid seal such as a silicone sealant is applied to the surface to which is adhered and the both surfaces of the seal member 30 to further enhance the sealing performance, and water adheres to the suction part 24, the main body part 27, and the discharge part 28 The insides are formed of a non-rusting material such as aluminum. Even if these are not formed of a material that does not rust, they may be subjected to rust prevention treatment such as plating or coating with a resin.

The duct fan incorporated in the cutting device 10 is not limited to the one shown in FIGS. 2 and 3 as long as it can be accommodated inside the device.

When cutting the semiconductor wafer W, cutting water is supplied from the cutting water supply nozzle 19, so that the rotating blade 1
By the rotation of 7, the cutting water becomes mist and scatters in the cutting area 18. At this time, contamination generated by cutting also scatters.

The scattered mist and contaminants are sucked from the exhaust port 21, flow into the discharge section 28 through the suction section 24 and the main body section 27, and are further discharged outside the apparatus through the exhaust duct 23. By discharging the mist and contaminants to the outside in this manner, the semiconductor wafer W can be cut smoothly.

[0021]

As described above, in the cutting device according to the present invention, since the duct fan conventionally installed outside the cutting device is built in the cutting device, it is separately provided as a duct fan. It is not necessary to install a suitable ventilation facility, and it is possible to save space, and it is convenient when there is no space for installing the ventilation facility in a factory having no ventilation facility. In addition, since no cost and man-hours are required for installing the duct fan, the cost can be reduced.

Further, since the duct fan is formed of a non-rusting material or is subjected to a rust-proof treatment,
Since it does not rust even if water adheres, the function as a duct fan does not decrease, and there is no need to replace parts and maintenance is easy.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an external appearance of an example of a cutting device according to the present invention.

FIG. 2 is a sectional view showing an internal mechanism of a duct fan and an exhaust duct in the cutting device.

FIG. 3 is a perspective view showing a configuration of the duct fan.

FIG. 4 is a cross-sectional view illustrating a conventional cutting device and a duct fan installed outside the cutting device.

[Explanation of symbols]

Reference Signs List 10 Cutting device 11 Cassette 12 Loading / unloading means 13 Temporary storage area 14 First transporting means 15
... Chuck table 16 ... Alignment means 17 ... Rotating blade 1
8 Cutting area 18a Cover 19 Cutting water supply nozzle 20
... Cutting means 21 ... Exhaust port 22 ... Duct fan 23 ... Exhaust duct 24 ... Suction unit 25 ... Motor 26 ... Blade
27 body part 28 discharge part 29, 30 seal member 31
...... bracket 40 ... cutting device 41 ... cover 42 ... cutting area 43 ... cutting water supply nozzle 44 ... cutting blade 4
5 Workpiece 46 Exhaust port 47 Exhaust duct 48 Duct fan

Claims (2)

[Claims] 1. A cutting apparatus comprising at least a chuck table for holding a workpiece, and cutting means for performing cutting while supplying cutting water to the workpiece held on the chuck table. In the cutting area where is disposed, an exhaust port for discharging mist generated by cutting to the outside is formed,
The cutting device, wherein the exhaust port is connected to a duct fan provided inside the apparatus, and an exhaust duct extending to the outside of the apparatus is connected to the duct fan. 2. The cutting device according to claim 1, wherein the duct fan is formed of a non-rusting material or is subjected to a rust prevention treatment.