JP2021087135A - Fixture and vibration device - Google Patents

Abstract

To provide a fixture and vibration device for improving reliability.SOLUTION: A fixture includes: a shaft part 80 extending in one direction; and a head part 81 arranged at one end of the shaft part 80 in the one direction. When viewed from the one direction, an outer shape of the head part 81 is larger than an outer shape of the shaft part 80. The head part 81 includes: a first head part 81a connected to the one end of the shaft part 80; and a second head part 81b connected to the first head part 81a, extended from the first head part 81a to the other end of the shaft part 80 in the one direction, and arranged by opposing to an outer peripheral surface 80a of the shaft part 80 at a predetermined interval.SELECTED DRAWING: Figure 10

Description

The present invention relates to fixtures and vibrating devices.

A vibration device including a piezoelectric body and a piezoelectric element having a pair of external electrodes is known (see, for example, Patent Document 1). In such a vibrating device, a configuration is conceivable in which a pair of external electrodes are arranged on one main surface of the piezoelectric body, and the pair of external electrodes and a wiring portion are connected on one main surface.

Japanese Unexamined Patent Publication No. 2006-33774

In the vibration device having the above configuration, the wiring portion may be fixed to the case. The wiring portion and the case are fixed by a fixing portion (fixing tool) provided on the case. The fixed portion has a shaft portion protruding from the case and a head portion connected to the shaft portion and locked to the wiring portion. In the fixing portion, the shaft portion is inserted through the through hole of the wiring portion, and the wiring portion is fixed to the case by a head having a larger outer shape than the through hole. In a vibrating device, the wiring portion may push up the head due to the vibration of the piezoelectric element. As a result, cracks may occur starting from the connecting portion between the shaft portion and the head portion (the corner portion formed by the shaft portion and the head portion). If the head is damaged due to the occurrence of cracks, the wiring portion may not be fixed. This can reduce the reliability of the vibrating device.

One aspect of the present invention provides a fixture and a vibrating device that can improve reliability.

The fixture according to one aspect of the present invention has a shaft portion extending along one direction and a head portion provided at one end in one direction of the shaft portion, and is viewed from one direction. The outer shape of the head is larger than the outer shape of the shaft, and the head is connected to the first head, which is connected to one end of the shaft, and is connected to the first head. It has a second head that extends to the other end side of the shaft portion in the direction and is arranged so as to face the outer peripheral surface of the shaft portion at a predetermined distance.

In the fixture according to one aspect of the present invention, the head has a first head and a second head. The second head is connected to the first head and extends from the first head to the other end side in one direction of the shaft portion, and is spaced from the outer peripheral surface of the shaft portion at a predetermined distance. They are placed facing each other. That is, the second head is provided apart from the shaft portion. As a result, in the fixture, even when the second head is pushed up by the wiring portion or the like, the stress from the outside can be dispersed in the second head. Therefore, in the fixture, it is possible to suppress the occurrence of cracks starting from the connection portion between the shaft portion and the head portion. Therefore, the fixture can prevent the head from being damaged. As a result, the reliability of the fixture can be improved.

In one embodiment, the second head may be arranged so as to surround the entire circumference of the outer peripheral surface of the shaft portion. In this configuration, stress from the outside can be more effectively dispersed in the second head.

In one embodiment, the tip of the second head may have a curved portion. In this configuration, since the tip of the second head that contacts (contacts) the wiring portion or the like does not have a corner portion, it is possible to prevent damage to the wiring portion or the like that the second head can come into contact with.

The vibration device according to one aspect of the present invention includes a piezoelectric element having a piezoelectric element having a first main surface and a pair of external electrodes arranged on the first main surface, and a pair on the first main surface. A strip-shaped first wiring member connected to the external electrode of the above, and a plate-shaped second wiring member having a second main surface and a third main surface facing each other and connected to the first wiring member. A case in which the second wiring member is arranged is provided, and the second wiring member is provided with a plurality of through holes penetrating the second wiring member in the opposite directions of the second main surface and the third main surface. The case has a fourth main surface facing the third main surface, and is integrally formed with an arrangement portion in which the second wiring member is arranged and an arrangement portion, and the second wiring member is arranged. It has a plurality of fixing portions fixed to the portions, and each of the plurality of fixing portions protrudes from the fourth main surface in one direction and is inserted into a through hole. It has a head provided at one end in the direction and locked to a third main surface, and the head includes a first head connected to one end of a shaft and a first head. The second head is connected and extends from the first head to the other end side of the shaft portion in one direction, and is arranged so as to face the outer peripheral surface of the shaft portion at a predetermined interval. And have.

In the vibrating device according to one aspect of the present invention, the case has a plurality of fixing portions. The fixed portion has a shaft portion and a head portion. The head has a first head and a second head. The second head is connected to the first head and extends from the first head to the other end side in one direction of the shaft portion, and is spaced from the outer peripheral surface of the shaft portion at a predetermined distance. They are placed facing each other. That is, the second head is provided apart from the shaft portion. As a result, in the vibrating device, even when the second head is pushed up by the second wiring member, the stress from the outside can be dispersed in the second head. Therefore, in the vibrating device, it is possible to suppress the occurrence of cracks starting from the connection portion between the shaft portion and the head portion. Therefore, in the vibrating device, it is possible to prevent the head from being damaged. As a result, the reliability of the vibrating device can be improved.

In one embodiment, each of the plurality of fixed portions may have a different shape of the second head of the head. In this configuration, the frequency of contact between the second head of each fixed portion and the second wiring member may be different. As a result, in the vibrating device, the durability (life) of each fixed portion may be different. Therefore, it is possible to prevent all the fixed portions from being damaged at the same time.

According to one aspect of the present invention, reliability can be improved.

FIG. 1 is a cross-sectional view of a vibration device according to an embodiment. FIG. 2 is a partially enlarged view of FIG. FIG. 3 is a perspective view of the vibrating portion. FIG. 4 is an exploded perspective view of the vibrating portion. FIG. 5 is a top view of the vibrating portion. FIG. 6 is an exploded perspective view of the piezoelectric element. FIG. 7 is a bottom view of the wiring member. FIG. 8 is a cross-sectional view taken along the line VIII-VIII of FIG. FIG. 9 is a cross-sectional view taken along the line IX-IX of FIG. FIG. 10 is a partially enlarged view of FIG. 11 (a), 11 (b), 11 (c) and 11 (d) are cross-sectional views of the fixed portion. 12 (a) and 12 (b) are cross-sectional views for explaining a method of fixing the second wiring member to the bottom plate. FIG. 13 is a cross-sectional view of a conventional fixed portion. 14 (a) and 14 (b) are cross-sectional views of the fixed portion according to the modified example. FIG. 15 is a cross-sectional view of the fixed portion according to the modified example.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same or equivalent elements are designated by the same reference numerals, and duplicate description will be omitted.

The vibration device 100 shown in FIGS. 1 to 5 is, for example, an acoustic device used as a speaker or a buzzer. The vibrating device 100 includes a vibrating unit 1, a wiring unit 2 connected to the vibrating unit 1, a case 3 forming an acoustic space in which the vibrating unit 1 is arranged, a joining member 70, and a joining member 71. There is. As shown in FIG. 1, the vibration device 100 is attached to the attached surface 200a of the attached member 200. The attached member 200 is, for example, an electronic device such as a television or a smartphone.

The vibrating unit 1 includes a piezoelectric element 10 and a vibrating member 12. The vibrating member 12 is made of, for example, a metal such as a Ni—Fe alloy, Ni, brass, or stainless steel. The vibrating member 12 is a plate-shaped member. The vibrating member 12 has a main surface 12a provided with the piezoelectric element 10 and a main surface 12b facing the main surface 12a in the thickness direction. The main surfaces 12a and 12b have a rectangular shape. That is, the vibrating member 12 has a rectangular shape when viewed from the thickness direction. Here, the rectangular shape includes, for example, a shape in which each corner is chamfered and a shape in which each corner is rounded. The rectangular shape also includes a square shape. In the present embodiment, the main surfaces 12a and 12b have, for example, a square shape having a side length of 21 mm or more and 29 mm or less. The thickness of the vibrating member 12 is, for example, 0.06 mm or more and 0.15 mm or less.

FIG. 6 is an exploded perspective view of the piezoelectric element. As shown in FIG. 6, the piezoelectric element 10 has a piezoelectric element 11 and a pair of external electrodes 13 and 15 having different polarities from each other. The piezoelectric element 11 has a rectangular parallelepiped shape. The rectangular parallelepiped shape includes, for example, a rectangular parallelepiped shape in which corners and ridges are chamfered, and a rectangular parallelepiped in which corners and ridges are rounded. The piezoelectric body 11 has a main surface (first main surface) 11a and a main surface 11b facing each other. A pair of external electrodes 13 and 15 are provided on the main surface 11a. The main surface 11b faces the main surface 12a (see FIG. 2) and is joined (bonded) to the central portion of the main surface 12a by the joining member 71.

The main surfaces 11a and 11b have a rectangular shape. In the following, the long side direction of the main surfaces 11a and 11b is the X direction, the short side direction of the main surfaces 11a and 11b is the Y direction, and the opposite direction of the main surfaces 11a and 11b is the Z direction. The long side direction, short side direction, and facing direction of the main surfaces 11a and 11b coincide with the long side direction, short side direction, and facing direction of the main surfaces 12a and 12b, respectively. The length of the piezoelectric element 10 in the X direction is, for example, 20 mm. The length of the piezoelectric element 10 in the Y direction is, for example, 10 mm. The length of the piezoelectric element 10 in the Z direction is, for example, 0.45 mm.

The piezoelectric element 11 is configured by laminating a plurality of piezoelectric layers 17a, 17b, 17c, and 17d. That is, the piezoelectric element 11 has a plurality of laminated piezoelectric layers 17a, 17b, 17c, and 17d. In the present embodiment, the piezoelectric body 11 has four piezoelectric layers 17a, 17b, 17c, and 17d. In the piezoelectric body 11, the direction in which the plurality of piezoelectric layers 17a, 17b, 17c, and 17d are laminated coincides with the Z direction. The piezoelectric layer 17a has a main surface 11a. The piezoelectric layer 17d has a main surface 11b. The piezoelectric layers 17b and 17c are located between the piezoelectric layer 17a and the piezoelectric layer 17d.

Each piezoelectric layer 17a, 17b, 17c, 17d is made of a piezoelectric material. In this embodiment, each piezoelectric layer 17a, 17b, 17c, 17d is made of a piezoelectric ceramic material. Piezoelectric ceramic materials include, for example, PZT [Pb (Zr, Ti) O ₃ ], PT (PbTIO ₃ ), PLZT [(Pb, La) (Zr, Ti) O ₃ ], or barium titanate (BaTIO ₃ ). Is used. Each piezoelectric layer 17a, 17b, 17c, 17d is composed of, for example, a sintered body of a ceramic green sheet containing the above-mentioned piezoelectric ceramic material. In the actual piezoelectric body 11, the piezoelectric layers 17a, 17b, 17c, and 17d are integrated to such an extent that the boundary between the piezoelectric layers 17a, 17b, 17c, and 17d cannot be recognized.

The piezoelectric element 10 includes a plurality of internal electrodes 19, 21, 23 arranged in the piezoelectric element 11. In this embodiment, the piezoelectric element 10 includes three internal electrodes 19, 21, 23. Each of the internal electrodes 19, 21, 23 is made of a conductive material. As the conductive material, for example, Ag, Pd, or Ag-Pd alloy is used. Each of the internal electrodes 19, 21, 23 is configured as, for example, a sintered body of a conductive paste containing the above-mentioned conductive material. In the present embodiment, the outer shapes of the internal electrodes 19, 21, 23 are rectangular.

The internal electrodes 19, 21, 23 are arranged at different positions (layers) in the Z direction. The internal electrode 19 and the internal electrode 21 face each other with a gap in the Z direction. The internal electrode 21 and the internal electrode 23 face each other with a gap in the Z direction. The internal electrode 19 is located between the piezoelectric layer 17a and the piezoelectric layer 17b. The internal electrode 21 is located between the piezoelectric layer 17b and the piezoelectric layer 17c. The internal electrode 23 is located between the piezoelectric layer 17c and the piezoelectric layer 17d. The internal electrodes 19, 21, 23 are not exposed on the surface of the piezoelectric body 11. That is, each of the internal electrodes 19, 21, 23 is not exposed on each side surface. The internal electrodes 19, 21, 23 are separated from all the edges (four sides) of the main surfaces 11a and 11b when viewed from the Z direction.

The pair of external electrodes 13 and 15 are arranged on the main surface 11a. The external electrode 13 and the external electrode 15 are arranged in the X direction. The external electrode 13 and the external electrode 15 are adjacent to each other in the X direction. The pair of external electrodes 13 and 15 are arranged at the center of the main surface 11a. The pair of external electrodes 13 and 15 are separated from all the edges (four sides) of the main surface 11a when viewed from the Z direction. Each of the external electrodes 13 and 15 has a rectangular shape when viewed from the Z direction. Each of the external electrodes 13 and 15 is made of a conductive material. As the conductive material, for example, Ag, Pd, or Ag-Pd alloy is used. Each of the external electrodes 13 and 15 is configured as, for example, a sintered body of a conductive paste containing the above-mentioned conductive material.

The external electrode 13 is electrically connected to the connecting conductor 25 through the via conductor 31. The connecting conductor 25 is located in the same layer as the internal electrode 19. The connecting conductor 25 is located inside the internal electrode 19. An opening is formed in the internal electrode 19 at a position corresponding to the external electrode 13 when viewed from the Z direction. The connecting conductor 25 is located in the opening formed in the internal electrode 19. When viewed from the Z direction, the entire edge of the connecting conductor 25 is surrounded by the internal electrode 19.

The connecting conductor 25 is located between the piezoelectric layer 17a and the piezoelectric layer 17b. The internal electrode 19 and the connecting conductor 25 are separated from each other. The connecting conductor 25 faces the external electrode 13 in the Z direction. The via conductor 31 is connected to the external electrode 13 and is also connected to the connecting conductor 25. The connecting conductor 25 is electrically connected to the internal electrode 21 through the via conductor 33. The connecting conductor 25 faces the internal electrode 21 in the Z direction. The via conductor 33 is connected to the connecting conductor 25 and is also connected to the internal electrode 21.

The internal electrode 21 is electrically connected to the connecting conductor 27 through the via conductor 35. The connecting conductor 27 is located in the same layer as the internal electrode 23. The connecting conductor 27 is located inside the internal electrode 23. An opening is formed in the internal electrode 23 at a position corresponding to the external electrode 13 (connecting conductor 25) when viewed from the Z direction. The connecting conductor 27 is located in the opening formed in the internal electrode 23. When viewed from the Z direction, the entire edge of the connecting conductor 27 is surrounded by the internal electrode 23.

The external electrode 15 is electrically connected to the internal electrode 19 through the via conductor 37. The internal electrode 19 faces the external electrode 15 in the Z direction. The via conductor 37 is connected to the external electrode 15 and is also connected to the internal electrode 19.

The internal electrode 19 is electrically connected to the connecting conductor 29 through the via conductor 39. The connecting conductor 29 is located in the same layer as the internal electrode 21. The connecting conductor 29 is located inside the internal electrode 21. An opening is formed in the internal electrode 21 at a position corresponding to the external electrode 15 when viewed from the Z direction. The connecting conductor 29 is located in the opening formed in the internal electrode 21. When viewed from the Z direction, the entire edge of the connecting conductor 29 is surrounded by the internal electrode 21.

The connecting conductor 29 is located between the piezoelectric layer 17b and the piezoelectric layer 17c. The internal electrode 21 and the connecting conductor 29 are separated from each other. The connecting conductor 29 faces the internal electrode 19 in the Z direction. The via conductor 39 is connected to the internal electrode 19 and is also connected to the connecting conductor 29. The connecting conductor 29 is electrically connected to the internal electrode 23 through the via conductor 41. The connecting conductor 29 faces the internal electrode 23 in the Z direction. The via conductor 41 is connected to the connecting conductor 29 and is also connected to the internal electrode 23.

The external electrode 13 is electrically connected to the internal electrode 21 through the via conductor 31, the connecting conductor 25, and the via conductor 33. The external electrode 15 is electrically connected to the internal electrode 19 through the via conductor 37. The external electrode 15 is electrically connected to the internal electrode 23 through the via conductor 37, the internal electrode 19, the via conductor 39, the connecting conductor 29, and the via conductor 41.

The connecting conductors 25, 27, 29 and the via conductors 31, 33, 35, 37, 39, 41 are made of a conductive material. Each of the via conductors 31, 33, 35, 37, 39, and 41 is a via conductor group composed of a plurality of via conductors, but may be a single via conductor. The via conductors 31 and 33 arranged on the piezoelectric layers 17a and 17b adjacent to each other in the Z direction are arranged so as to be separated from each other and not overlap each other when viewed from the Z direction. The via conductors 37 and 39 arranged on the piezoelectric layers 17a and 17b are arranged so as to be separated from each other and not overlap each other when viewed from the Z direction. The via conductors 33 and 35 arranged in the piezoelectric layers 17b and 17c adjacent to each other in the Z direction are arranged so as to be separated from each other and not overlap each other when viewed from the Z direction. The via conductors 39 and 41 arranged on the piezoelectric layers 17b and 17c are arranged so as to be separated from each other and not overlap each other when viewed from the Z direction.

As the conductive material, for example, Ag, Pd, or Ag-Pd alloy is used. The connecting conductors 25, 27, 29 and the via conductors 31, 33, 35, 37, 39, 41 are configured as, for example, a sintered body of a conductive paste containing the above conductive material. The connecting conductors 25, 27, and 29 have a rectangular shape. The via conductors 31, 33, 35, 37, 39, 41 are sintered by the conductive paste filled in the through holes formed in the ceramic green sheet for forming the corresponding piezoelectric layers 17a, 17b, 17c. Is formed by.

On the main surface 11b of the piezoelectric body 11, the conductor electrically connected to the internal electrodes 19 and 23 and the conductor electrically connected to the internal electrode 21 are not arranged. In the present embodiment, when the main surface 11b is viewed from the Z direction, the entire main surface 11b is exposed. The main surfaces 11a and 11b are natural surfaces. The natural surface is a surface composed of the surfaces of crystal grains grown by firing.

On each side surface of the piezoelectric body 11, the conductor electrically connected to the internal electrodes 19 and 23 and the conductor electrically connected to the internal electrode 21 are not arranged. In the present embodiment, when each side surface of the piezoelectric body 11 is viewed from the X direction and the Y direction, the entire side surface is exposed. In this embodiment, each of these aspects is also a natural aspect.

The region sandwiched between the internal electrode 19 and the internal electrode 21 in the piezoelectric layer 17b and the region sandwiched between the internal electrode 21 and the internal electrode 23 in the piezoelectric layer 17c form a piezoelectrically active region. .. In the present embodiment, the piezoelectrically active region is located so as to surround the pair of external electrodes 13 and 15 when viewed from the Z direction. When viewed from the Z direction, the piezoelectric element 11 includes a piezoelectrically active region in a region located between the external electrode 13 and the external electrode 15. When viewed from the Z direction, the piezoelectric element 11 also includes a piezoelectrically active region outside the region where the external electrode 13 and the external electrode 15 are located.

As shown in FIGS. 1 to 5, the wiring portion 2 is connected to the band-shaped first wiring member 50 connected to the pair of external electrodes 13 and 15 on the main surface 11a and to the first wiring member 50. It has a plate-shaped second wiring member 60 and a joining member 72.

The first wiring member 50 extends along the long side of the main surface 11a and is orthogonal to the short side of the main surface 11a when viewed from the orthogonal direction (Z direction) orthogonal to the main surface 11a. The first wiring member 50 extends in the X direction and is orthogonal to the Y direction. The first wiring member 50 has one end portion 50a that is electrically and physically connected to the second wiring member 60, and the other end portion 50b that is electrically and physically connected to the piezoelectric element 10. ing. The first wiring member 50 has a narrow portion 50c having a narrow width (length in the Y direction) between one end portion 50a and the other end portion 50b. The narrow portion 50c is provided adjacent to one end portion 50a. The first wiring member 50 has a constant width in a portion other than the narrow portion 50c. The width of the narrow portion 50c is, for example, 56% or more and 83% or less of the width of the portion other than the narrow portion 50c.

The other end 50b of the first wiring member 50 is joined to the pair of external electrodes 13 and 15 by the joining member 70. The joining member 70 is arranged between the pair of external electrodes 13 and 15 and the other end portion 50b, and joins the pair of external electrodes 13 and 15 and the other end portion 50b. The joining member 70 is a resin layer containing a plurality of conductive particles (not shown). The conductive particles are, for example, metal particles and gold-plated particles. The joining member 70 contains, for example, a thermosetting elastomer. The joining member 70 is formed, for example, by curing an anisotropic conductive paste or an anisotropic conductive film. The joining member 70 electrically connects the pair of external electrodes 13, 15 and the other end 50b. When viewed from the Z direction, the joining member 70 integrally covers the pair of external electrodes 13 and 15. When viewed from the Z direction, the joining member 70 integrally covers a pair of end portions 53b and 55b (see FIG. 7) provided at the other end portion 50b.

The first wiring member 50 is joined to the main surface 11a and the main surface 12a by the joining member 71. The joining member 71 is a resin layer that does not contain conductive particles and has electrical insulation. The joining member 71 is, for example, a hot melt resin containing a reactive phenol resin and a nitrile rubber as main components. The joining member 71 may contain the same resin material as the resin material contained in the joining member 70. The joining member 71 is arranged along one short side of the main surface 11a. The joining member 71 joins the entire width direction (Y direction) of the first wiring member 50 to the main surface 11a and the main surface 12a. The joining member 71 is separated from the joining member 70 in the X direction.

One end 50a of the first wiring member 50 is joined to the second wiring member 60 by the joining member 72. The joining member 72 is arranged between the pair of conductor layers 63, 65 (see FIG. 4) described later and one end portion 50a, and joins the pair of conductor layers 63, 65 and one end portion 50a. The joining member 72 is a resin layer containing a plurality of conductive particles (not shown). The conductive particles are, for example, metal particles and gold-plated particles. The joining member 72 contains, for example, a thermosetting elastomer. The joining member 72 is formed, for example, by curing the anisotropic conductive paste or the anisotropic conductive film. The joining member 72 is made of, for example, the same material as the joining member 70. The joining member 72 electrically connects the pair of conductor layers 63 and 65 with one end portion 50a. When viewed from the Z direction, the joining member 70 integrally covers the pair of conductor layers 63 and 65. When viewed from the Z direction, the joining member 70 integrally covers a pair of end portions 53a and 55a, which will be described later, provided at the other end portion 50b.

The joining members 70, 71, and 72 all have a rectangular shape when viewed from the thickness direction (Z direction). The longitudinal direction of the joining member 70 coincides with the direction (X direction) in which the pair of end portions 53b and 55b (see FIG. 7), which will be described later, are lined up. The longitudinal direction of the joining member 71 coincides with the short side direction (Y direction) of the main surface 11a. The longitudinal direction of the joining member 72 coincides with the direction (Y direction) in which the pair of conductor layers 63, 65 (see FIG. 4), which will be described later, are lined up. The longitudinal direction of the joining member 70 and the longitudinal direction of the joining members 71 and 72 intersect (orthogonally) with each other.

As shown in FIGS. 1 and 7, the first wiring member 50 has a base 51, a pair of conductor layers 53, 55, a cover 57, and a reinforcing portion 59. The first wiring member 50 has flexibility and is, for example, a flexible printed circuit board (FPC) or a flexible flat cable (FFC).

The base 51 has a band shape and has a pair of main surfaces 51a and 51b facing each other. The base 51 has electrical insulation. The base 51 is a resin layer made of a resin such as a polyimide resin, for example. The thickness of the base 51 is, for example, 100 μm.

The conductor layers 53 and 55 are arranged on the main surface 51a of the base 51. The conductor layers 53 and 55 are joined (bonded) to the main surface 51a by an adhesive layer (not shown). Each conductor layer 53, 55 is made of, for example, Cu. Each of the conductor layers 53 and 55 may have, for example, a configuration in which a Ni plating layer and an Au plating layer are provided in this order on the Cu layer. The conductor layer 53 and the conductor layer 55 are arranged so as to be separated from each other. The thickness of each conductor layer 53, 55 is, for example, 20 μm.

The conductor layer 53 includes an end portion 53a connected to the second wiring member 60, an end portion 53b connected to the external electrode 13, and a connection portion 53c connecting the end portion 53a and the end portion 53b. Includes. The connecting portion 53c extends in the direction (X direction) in which the first wiring member 50 extends. The end portion 53a is adjacent to one end portion of the connection portion 53c in the direction in which the first wiring member 50 extends. The end portion 53b is adjacent to the other end portion of the connection portion 53c in the width direction (Y direction) of the first wiring member 50.

The conductor layer 55 includes an end portion 55a connected to the second wiring member 60, an end portion 55b connected to the external electrode 15, and a connecting portion 55c connecting the end portion 55a and the end portion 55b. Includes. The connecting portion 55c extends in the direction (X direction) in which the first wiring member 50 extends. The end portion 55a is adjacent to one end portion of the connection portion 55c in the direction in which the first wiring member 50 extends. The end portion 55b is adjacent to the other end portion of the connecting portion 55c in the width direction (Y direction) of the first wiring member 50.

The end portion 53a and the end portion 55a are arranged apart from each other in the width direction of the first wiring member 50. The end portion 53b and the end portion 55b are arranged apart from each other in the extending direction of the first wiring member 50. The connecting portion 53c and the connecting portion 55c are arranged parallel to each other and separated from each other in the width direction of the first wiring member 50.

A joining member 70 exists between the end portion 53b and the external electrode 13. The end portion 53b and the external electrode 13 are electrically connected to each other through conductive particles contained in the joining member 70. A joining member 70 exists between the end portion 55b and the external electrode 15. The end portion 55b and the external electrode 15 are electrically connected to each other through conductive particles contained in the joining member 70.

The cover 57 is arranged on the main surface 51a. The cover 57 covers the conductor layers 53 and 55 and the main surface 51a. The cover 57 is bonded (adhered) to each of the conductor layers 53 and 55 and a region of the main surface 51a exposed from each of the conductor layers 53 and 55 by an adhesive layer (not shown). The cover 57 is a resin layer made of a resin such as a polyimide resin, for example. The thickness of the cover 57 is, for example, 25 μm. The ends 53a, 53b of the conductor layer 53, the ends 55a, 55b of the conductor layer 55, and the regions near the ends 53a, 53b, 55a, 55b on the main surface 51a are exposed from the cover 57.

The reinforcing portion 59 is arranged on the main surface 51b of the base 51. The reinforcing portion 59 is joined (adhered) to the main surface 51b by an adhesive layer (not shown). The reinforcing portion 59 is provided at least in the narrow portion 50c. The reinforcing portion 59 is provided over both the portion of the first wiring member 50 that overlaps with the second wiring member 60 and the portion that does not overlap with the second wiring member 60 when viewed from the Z direction. The reinforcing portion 59 is, for example, a resin layer made of polyimide. The thickness of the reinforcing portion 59 is, for example, 200 μm.

As shown in FIGS. 4 and 8, the second wiring member 60 includes a substrate 61, a pair of conductor layers 63, 65, and a pair of resist layers 67, 69. The second wiring member 60 has a rectangular plate shape and has a main surface 60a (second main surface) and a main surface 60b (third main surface) facing each other in the thickness direction (Z direction). .. The main surface 60a includes a main surface 61a described later, a surface of a pair of conductor layers 63 and 65, and a surface of a resist layer 67. The main surface 60b includes the surface of the resist layer 69.

The second wiring member 60 is provided with a plurality of through holes 60c that penetrate the second wiring member 60 in the opposite direction (Z direction) of the main surface 60a and the main surface 60b. The through hole 60c has a circular cross section. The second wiring member 60 is harder and less flexible than the first wiring member 50. The second wiring member 60 is, for example, a printed circuit board (PCB). The second wiring member 60 is harder than the case 3.

The substrate 61 has a rectangular plate shape. The substrate 61 is made of glass, for example, and has electrical insulation. The substrate 61 has a pair of rectangular main surfaces 61a and 61b facing each other. The length of the pair of main surfaces 61a and 61b in the long side direction (X direction) is, for example, 17 mm. The length of the pair of main surfaces 61a and 61b in the short side direction (Y direction) is, for example, 10.9 mm. The thickness of the substrate 61 (the length of the substrate 61 in the Z direction) is, for example, 0.8 mm.

The conductor layers 63 and 65 are provided on the main surface 61a. Each conductor layer 63, 65 is made of, for example, Cu. Each of the conductor layers 63 and 65 may have, for example, a configuration in which a Ni plating layer and an Au plating layer are provided in this order on the Cu layer. The conductor layer 63 and the conductor layer 65 are arranged so as to be separated from each other. The thickness of each conductor layer 63, 65 is, for example, 20 μm. The resist layer 67 covers the main surface 61a of the substrate 61 and the conductor layers 63 and 65, respectively. The thickness of the resist layer 67 is, for example, 1 μm. The resist layer 69 covers the main surface 61b of the substrate 61. The thickness of the resist layer 69 is, for example, 1 μm.

The conductor layer 63 has an end portion 63a exposed from the resist layer 67. A joining member 72 exists between the end portion 63a and the end portion 53a. The end portion 63a is joined to the end portion 53a by a joining member 72. The conductor layer 63 is electrically connected to the end portion 53a through conductive particles contained in the joining member 72. The conductor layer 65 has an end portion 65a exposed from the resist layer 67. A joining member 72 exists between the end portion 65a and the end portion 55a. The end portion 65a is joined to the end portion 55a by a joining member 72. The conductor layer 65 is electrically connected to the end portion 55a through conductive particles contained in the joining member 72. Although not shown, the second wiring member 60 is provided on the lower surface of the substrate 61 and further has a pair of conductor layers connected to the conductor layers 63 and 65 by through-hole conductors.

Case 3 shown in FIGS. 1 to 5 is made of a resin material such as an acrylic resin, a vinyl chloride resin, or a molding resin. The case 3 has a first accommodating portion 3a in which the vibrating portion 1 is accommodated and a second accommodating portion 3b in which the wiring portion 2 is accommodated. A vibrating portion 1 and a wiring portion 2 are arranged in the case 3.

The first accommodating portion 3a is, for example, a rectangular parallelepiped-shaped box member having an open upper surface (the surface on the side to be attached member 200). The first accommodating portion 3a has a bottom plate 4, a pair of side plates 5, a pair of side plates 6, and a support portion 7.

The bottom plate 4 has a main surface 4a (third main surface) facing the main surface 12b of the vibrating member 12. The main surface 4a has, for example, a rectangular shape having a pair of long sides and a pair of short sides. Here, the rectangular shape includes, for example, a shape in which each corner is chamfered and a shape in which each corner is rounded. The rectangular shape also includes a square shape. The long side direction of the main surface 4a coincides with the X direction, the short side direction of the main surface 4a coincides with the Y direction, and the thickness direction of the bottom plate 4 coincides with the Z direction. The main surface 4a is larger than the main surfaces 12a and 12b, and the outer edge of the main surface 4a is located outside the main surfaces 12a and 12b apart from the main surfaces 12a and 12b when viewed from the Z direction. The thickness of the bottom plate 4 (length in the Z direction) is, for example, 1.2 mm or more and 1.4 mm or less.

In the present embodiment, the main surface 4a has, for example, a shape similar to the shapes of the main surfaces 12a and 12b, and has a square shape having a side length of 30 mm or more and 33 mm or less. The main surface 4a is different from the main surfaces 12a and 12b in that each corner is chamfered or each corner is rounded, but the similar shape is such a shape. The case is also included. That is, the general shape of the main surface 4a and the general shape of the main surfaces 12a and 12b are similar figures without considering whether each corner is chamfered or each corner is rounded. If so, it is assumed that the main surface 4a has a shape similar to the shapes of the main surfaces 12a and 12b.

The pair of side plates 5 are arranged at both ends of the bottom plate 4 in the X direction and face each other in the X direction. The side plate 5 has a rectangular shape when viewed from the thickness direction (X direction). One side plate 5 is provided with a pair of through holes 5a arranged side by side in the Y direction. The through hole 5a has a rectangular shape and penetrates one side plate 5 in the X direction. The pair of through holes 5a have the same shape as each other. The sound generated by the vibrating device 100 is mainly transmitted to the outside of the case 3 through the through hole 5a. The other side plate 5 is connected to the second accommodating portion 3b. A notch-shaped recess 5b is formed at the upper end of the other side plate 5 (the end opposite to the bottom plate 4).

The pair of side plates 6 are arranged at both ends of the bottom plate 4 in the Y direction and face each other in the Y direction. The side plates 6 connect a pair of side plates 5 to each other. The side plate 6 has a rectangular shape when viewed from the thickness direction (Y direction). The pair of side plates 6 have the same shape as each other.

The support portion 7 projects from the main surface 4a of the bottom plate 4 and supports the peripheral edge portion 12c of the main surface 12b of the vibrating member 12. The upper surface of the support portion 7 is joined to the peripheral edge portion 12c of the main surface 12b. The support portion 7 is a convex portion (protruding portion) having a rectangular frame shape. The width of the support portion 7 is, for example, 3 mm. The support portion 7 has four side portions 7a and supports the four sides of the main surface 12b. Of the four side portions 7a, a communication portion 7b is provided at the center of each of the pair of side portions 7a facing each other in the Y direction in the length direction (X direction). The communication portion 7b is a notch-shaped recess that crosses the side portion 7a in the width direction (Y direction). The communication portion 7b is provided over the entire width of the side portion 7a. The length of the communicating portion 7b in the length direction of the side portion 7a is, for example, shorter than the length of the side portion 7a and is 2.5 mm or more and 3.5 mm or less.

The support portion 7 is separated from the piezoelectric element 10 when viewed from the opposite direction (Z direction) of the main surface 12b and the main surface 4a. When viewed from the Z direction, the piezoelectric element 10 is arranged at the center of the region inside the support portion 7 in the X and Y directions. That is, the distance between one end of the piezoelectric element 10 and one end of the support portion 7 in the X direction is equal to the distance between the other end of the piezoelectric element 10 and the other end of the support portion 7 in the X direction. The distance between one end of the piezoelectric element 10 and one end of the support portion 7 in the Y direction is equal to the distance between the other end of the piezoelectric element 10 and the other end of the support portion 7 in the Y direction. According to such an arrangement of the piezoelectric element 10, the piezoelectric element 10 can be vibrated in a well-balanced manner.

The second accommodating portion 3b is attached to the other side plate 5. The second accommodating portion 3b has a groove shape having a U-shaped cross section. The internal space of the second accommodating portion 3b communicates with the internal space of the first accommodating portion 3a via the recess 5b. The second accommodating portion 3b has a bottom plate 8 (arranged portion) in which the wiring portion 2 is arranged, and a pair of side plates 9.

As shown in FIGS. 4, 5 and 9, the bottom plate 8 has a main surface 8a (fourth main surface) facing the main surface 60b of the second wiring member 60 in the Z direction. A gap G is formed between the main surface 60b and the main surface 8a. The main surface 8a is provided with a step corresponding to the thickness of the second wiring member 60. As a result, there is no step between the portion of the first wiring member 50 arranged on the second wiring member 60 and the other portion. Therefore, the first wiring member 50 is arranged in a straight line without being curved. The bottom plate 8 has a rectangular shape when viewed from the thickness direction (Z direction). The pair of side plates 9 are arranged at both ends of the bottom plate 8 in the Y direction and face each other in the Y direction. The pair of side plates 9 have a rectangular shape when viewed from the thickness direction (Y direction).

The second accommodating portion 3b is integrally formed with the bottom plate 8, and a plurality of (four in this case) fixing portions (fixing tools) 8b, 8c, 8d, 8e for fixing the second wiring member 60 to the bottom plate 8 are provided. have. Each of the fixing portions 8b, 8c, 8d, and 8e has a shaft portion 80 and a head portion 81. The shaft portion 80 and the head portion 81 are integrally formed.

As shown in FIG. 10, the shaft portion 80 extends along one direction. The shaft portion 80 projects from the main surface 8a (is erected on the main surface 8a). The other end of the shaft portion 80 in the extending direction is connected to the main surface 8a. The shaft portion 80 has a columnar shape and a circular cross section. The shaft portion 80 is inserted through the corresponding through hole 60c. The inner diameter d1 of the through hole 60c is equivalent to the outer diameter d2 of the shaft portion 80, and is, for example, 1.55 mm or more and 1.65 mm or less. The outer peripheral surface 80a of the shaft portion 80 and the inner peripheral surface of the through hole 10c are in surface contact with each other. Here, the entire outer peripheral surface 80a of the shaft portion 80 and the entire inner peripheral surface of the through hole 10c are in surface contact with each other.

The head 81 is connected to the shaft portion 80 and is locked to the main surface 60a of the second wiring member 60. The head 81 has a disk shape. The outer diameter d3 of the head 81 is larger than the inner diameter d1 of the through hole 60c. The head 81 has a first head 81a and a second head 81b. The first head 81a and the second head 81b are integrally formed. The first head 81a is connected to one end of the shaft portion 80. The first head 81a has a disk shape. The upper surface of the first head 81a is, for example, a flat surface.

The second head 81b is connected to the first head 81a. The second head 81b is connected to the lower surface of a portion of the first head 81a that projects radially from the shaft portion 80. The second head 81b extends from the first head 81a to the other end side of the shaft portion 80 in one direction. That is, the second head 81b extends from the first head 81a toward the second wiring member 60 (main surface 8a) side. The second head 81b is arranged so as to face the outer peripheral surface 80a of the shaft portion 80 at a predetermined distance. That is, the inner surface 81bs of the second head 81b is arranged so as to face the outer peripheral surface 80a of the shaft portion 80. A gap (gap) is formed between the second head portion 81b and the shaft portion 80.

The second head 81b is arranged so as to surround the entire circumference of the outer peripheral surface 80a of the shaft portion 80. That is, the second head 81b has an annular shape. The tip portion of the second head 81b (the end opposite to the end connected to the first head 81a) has a curved portion. That is, in the second head 81b, no corner portion is formed at the end portion that can come into contact with the main surface 60b of the second wiring member 60.

In the present embodiment, the shapes of the second head 81b of the head 81 are different from each of the plurality of fixing portions 8b, 8c, 8d, 8e. As shown in FIG. 11A, in the fixed portion 8c, the second head 81b of the head 81 is not in contact with the main surface 60a of the second wiring member 60. As shown in FIG. 11B, in the fixed portion 8b, the second head 81b of the head 81 is in contact with the main surface 60a of the second wiring member 60. As shown in FIG. 11C, in the fixed portion 8e, a part of the second head 81b of the head 81 comes into contact with the main surface 60a of the second wiring member 60, and one of the second head 81b. The portion is not in contact with the main surface 60a of the second wiring member 60. As shown in FIG. 11D, in the fixed portion 8d, a part of the second head 81b of the head 81 abuts on the main surface 60a of the second wiring member 60, and one of the second head 81b. The portion is not in contact with the main surface 60a of the second wiring member 60.

Subsequently, a method of fixing the wiring portion 2 to the bottom plate 8 will be described. As shown in FIG. 12A, the fixing portion 8b0 before the wiring portion 2 is fixed has a different shape from the fixing portion 8b after the wiring portion 2 is fixed. The shaft portion 800 before the wiring portion 2 is fixed is larger than, for example, the inner diameter d1 of the through hole 60c. The head portion 810 before the wiring portion 2 is fixed is formed in a tapered shape that narrows as the distance from the shaft portion 800 increases. The outer diameter of the tip of the head 810 is smaller than the inner diameter d1 of the through hole 60c.

When fixing the wiring portion 2 to the bottom plate 8, first, the wiring portion 2 is aligned with the bottom plate 8 so that the through hole 60c of the second wiring member 60 is arranged on the corresponding fixing portion 8b0, and the shaft A through hole 60c is inserted through the portion 800. Subsequently, as shown in FIG. 12B, the fixing portion 8b0 is pressed by the press plate P toward the main surface 8a. The press plate P is heated. As a result, the head 810 made of resin is melted and crushed by the press plate P to become the head 81.

As shown in FIG. 2, the case 3 is attached to the mounted surface 200a of the mounted member 200, and forms an acoustic space S in which the vibrating portion 1 is arranged between the case 3 and the mounted surface 200a. The acoustic space S has a first space S1 and a second space S2 that communicate with each other through the communication portion 7b. The first space S1 is formed between the mounted surface 200a and the main surface 12a. The second space S2 is formed between the case 3 and the main surface 12b. The first space S1 is wider than, for example, the second space S2.

The piezoelectric element 10, the vibrating member 12, and the acoustic space S are configured to have different resonance frequencies (resonance points) in the audible range (for example, in the range of 2 kHz or more and 20 kHz or less). For example, the resonance frequency of the piezoelectric element 10 and the vibrating member 12 becomes higher when the outer shapes of the piezoelectric element 10 and the vibrating member 12 are made smaller, and becomes lower when the outer shapes of the piezoelectric element 10 and the vibrating member 12 are made larger. The resonance frequency of the piezoelectric element 10 and the vibrating member 12 is also adjusted by, for example, the material constituting the piezoelectric element 10 and the vibrating member 12, the shape of the piezoelectric element 10 and the vibrating member 12, and the like. The resonance frequency of the acoustic space S is adjusted, for example, by adjusting the size and shape of the acoustic space S. The resonance frequency of the acoustic space S is also adjusted by the material constituting the member such as the case 3 defining the acoustic space S and the attached member 200. The resonance frequency is a frequency at which the sound pressure is maximized by resonance.

The piezoelectric element 10 is configured to have a resonance frequency in the range of 2000 Hz or more and 3000 Hz or less, for example. The acoustic space S is configured to have a resonance frequency in a range of, for example, 3000 Hz or more and 6000 Hz or less. The vibrating member 12 is configured to have a resonance frequency in the range of 13000 Hz or more and 17,000 Hz or less, for example. The piezoelectric element 10, the vibrating member 12, and the acoustic space S have resonance frequencies in different ranges (ranges that do not overlap each other) in the audible range. The resonance frequencies of the piezoelectric element 10, the vibrating member 12, and the acoustic space S are adjusted so as to disperse each other with a difference of at least 500 Hz or more. The difference between the resonance frequency of the piezoelectric element 10 and the resonance frequency of the vibrating member 12 is, for example, 10000 Hz or more. The difference between the resonance frequency of the vibrating member 12 and the resonance frequency of the acoustic space S is, for example, 7,000 Hz or more.

As shown in FIG. 13, the conventional fixing portion 8P has a shaft portion 80P and a head portion 81P. The head 81P has a flat plate shape. In the fixed portion 8P, the second wiring member 60 may push up the head 81P due to the vibration of the piezoelectric element. As a result, cracks may occur starting from the connection portion between the shaft portion 80P and the head portion 81P (the corner portion formed by the outer peripheral surface 80Pa of the shaft portion 80 and the lower surface of the head portion 81P). If the head 81P is damaged due to the occurrence of cracks, the second wiring member 60 may not be fixed. This can reduce the reliability of the vibrating device.

In the vibration device 100 according to the present embodiment, the case 3 has a plurality of fixing portions 8b, 8c, 8d, 8e. Each of the fixed portions 8b, 8c, 8d, and 8e has a shaft portion 80 and a head portion 81. The head 81 has a first head 81a and a second head 81b. The second head 81b is connected to the first head 81a and extends from the first head 81a to the other end side in one direction of the shaft portion 80, and is connected to the outer peripheral surface 80a of the shaft portion 80. They are arranged facing each other with a predetermined interval. That is, the second head 81b is provided apart from the shaft portion 80. As a result, in the vibration device 100, even when the second head 81b is pushed up by the second wiring member 60, the stress from the outside can be dispersed in the second head 81b. Therefore, in the vibration device 100, it is possible to suppress the occurrence of cracks starting from the connection portion between the shaft portion 80 and the head portion 81. Therefore, in the vibration device 100, it is possible to prevent the head 81 from being damaged. As a result, the reliability of the vibration device 100 can be improved.

In the present embodiment, the fixing portions 8b, 8c, 8d, 8e are made of a resin material such as an acrylic resin, a vinyl chloride resin, and a molding resin. Therefore, since the second head 81b has flexibility, it bends when an external force is applied. As a result, in the vibration device 100, when the second head 81b is pushed up by the second wiring member 60, the stress from the outside can be effectively dispersed in the second head 81b.

In the vibration device 100 according to the present embodiment, the second head 81b is arranged so as to surround the entire circumference of the outer peripheral surface 80a of the shaft portion 80. In this configuration, stress from the outside can be more effectively dispersed in the second head 81b.

In the vibration device 100 according to the present embodiment, the tip portion of the second head 81b has a curved portion. In this configuration, since the tip of the second head 81b that contacts (contacts) the second wiring member 60 does not have a corner, the second wiring member 60 (mainly) that the second head 81b can contact. It is possible to prevent the surface 60a) from being damaged.

In the vibration device 100 according to the present embodiment, the shapes of the second head 81b of the head 81 are different from each of the plurality of fixing portions 8b, 8c, 8d, 8e. In this configuration, the frequency of contact between the second head 81b of each of the fixing portions 8b, 8c, 8d, and 8e and the second wiring member 60 may be different. As a result, in the vibration device 100, the durability (life) of the fixed portions 8b, 8c, 8d, 8e may differ. Therefore, it is possible to prevent all the fixing portions 8b, 8c, 8d, and 8e from being damaged at the same time.

Although the embodiments of the present invention have been described above, the present invention is not necessarily limited to the above-described embodiments, and various modifications can be made without departing from the gist thereof.

In the above embodiment, a mode in which the upper surface of the second head 81b of the head 81 of the fixing portions 8b, 8c, 8d, 8e is a flat surface has been described as an example. The shape of the head 81 is not limited to this. As shown in FIG. 14A, the fixing portion 8Ab has a shaft portion 80 and a head portion 81A. The head 81A has a first head 81Aa and a second head 81Ab. The upper surface of the first head 81Aa is, for example, a curved surface. The first head 81Aa has a hemispherical shape. The first head 81Aa has a so-called single mount shape. The second head 81Ab is arranged so as to face the outer peripheral surface 80a of the shaft portion 80 at a predetermined distance. That is, the inner surface 81Abs of the second head 81Ab is arranged so as to face the outer peripheral surface 80a of the shaft portion 80.

As shown in FIG. 14B, the fixing portion 8Bb has a shaft portion 80 and a head portion 81BC. The head 81B has a first head 81Ba and a second head 81Bb. The upper surface of the first head 81Ba is, for example, a curved surface. The first head 81Ba has a hemispherical shape with a recessed central portion. The first head 81Ba has a so-called double mount shape. The second head 81Bb is arranged so as to face the outer peripheral surface 80a of the shaft portion 80 at a predetermined interval. That is, the inner surface 81Bbs of the second head 81Bb is arranged so as to face the outer peripheral surface 80a of the shaft portion 80.

In the above embodiment, the embodiment in which the shaft portion 80 of the fixing portions 8b, 8c, 8d, 8e and the head portion 81 are integrally formed has been described as an example. However, as shown in FIG. 15, the fixing portion 8Cb may be provided separately from the shaft portion 80 and the head portion 81C. The head 81C has a first head 81Aa and a second head 81Ab. The head 81C is fixed to the shaft portion 80 by bolts 82. As a result, the second head 81Cb is arranged so as to face the outer peripheral surface 80a of the shaft portion 80 at a predetermined distance. That is, the inner surface 81Cbs of the second head 81Cb is arranged so as to face the outer peripheral surface 80a of the shaft portion 80.

In the above embodiment, a mode in which the second head 81b of the head 81 is arranged so as to surround the entire circumference of the outer peripheral surface 80a of the shaft portion 80 has been described as an example. However, the second head 81b may be arranged so as to surround a part of the outer peripheral surface 80a of the shaft portion 80.

In the above embodiment, as shown in FIG. 10, a mode in which the outer peripheral surface 80a of the shaft portion 80 and the second head 81b are arranged to face each other at a predetermined interval has been described as an example. That is, a mode in which a space is formed between the shaft portion 80 and the second head portion 81b has been described as an example. However, the fact that they are arranged so as to face each other with a predetermined interval means that at least a gap exists between the shaft portion and the head portion (second head head). The gap referred to here may be any one that exists between the shaft portion and the second head portion and separates the shaft portion and the second head portion. Therefore, the gap may be linear, for example, a weld line. By providing such a gap in the fixture (fixing portion), even if a crack occurs starting from the connection portion between the shaft portion and the head portion, the extension of the crack can be suppressed. Further, in the fixture, by providing the above gap, the structure becomes prominent before the head is completely damaged, and it is possible to prevent the head from being completely damaged.

In the above embodiment, a mode in which the shape of the second head 81b of the head 81 is different from each of the plurality of fixing portions 8b, 8c, 8d, 8e has been described as an example. However, the shape of the second head 81b of the head 81 of each of the plurality of fixing portions 8b, 8c, 8d, 8e may be the same. Further, among the plurality of fixing portions 8b, 8c, 8d, 8e, the shape of the second head 81b of the head 81 may be different in the two fixing portions.

In the above embodiment, the embodiment in which the shaft portion 80 is columnar and the head portion 81 is disk-shaped has been described as an example. However, the shaft portion may be prismatic. Further, the head may have a rectangular plate shape.

In the above embodiment, a mode in which the fixtures (fixing portions 8b, 8c, 8d, 8e) are applied to the vibration device 100 has been described as an example. However, the fixture may be applied to other devices (structures). Further, the fixture may be used alone.

In the above embodiment, in FIG. 10, the thickness of the second head 81b of the head 81 is shown evenly. However, the thickness of the second head 81b does not have to be uniform. That is, the second head 81b may have a thick portion and a thin portion.

3 ... Case, 8 ... Bottom plate (arrangement part), 8a ... Main surface (fourth main surface), 8b ... Fixing part (fixing tool), 10 ... Piezoelectric element, 11 ... Piezoelectric element, 11a ... Main surface, 13, 15 ... External electrode, 50 ... First wiring member, 50c ... Narrow portion, 59 ... Reinforcing part, 60 ... Second wiring member, 60a ... Main surface (second main surface), 60b ... Main surface (third main surface) ), 60c ... Through hole, 80 ... Shaft, 80a ... Outer surface, 81 ... Head, 81a ... First head, 81b ... Second head, 100 ... Vibration device.

Claims (5)

A shaft extending in one direction and
It has a head provided at one end of the shaft in one direction, and has.
When viewed from the one direction, the outer shape of the head portion is larger than the outer shape of the shaft portion.
The head
The first head connected to the one end of the shaft and
It is connected to the first head and extends from the first head to the other end side of the shaft portion in the one direction, and faces the outer peripheral surface of the shaft portion at a predetermined distance. A fixture having a second head, which is arranged in such a manner. The fixture according to claim 1, wherein the second head is arranged so as to surround the entire circumference of the outer peripheral surface of the shaft portion. The fixture according to claim 1 or 2, wherein the tip of the second head has a curved portion. A piezoelectric element having a piezoelectric element having a first main surface and a pair of external electrodes arranged on the first main surface.
A strip-shaped first wiring member connected to the pair of external electrodes on the first main surface,
A plate-shaped second wiring member having a second main surface and a third main surface facing each other and connected to the first wiring member,
A case in which the second wiring member is arranged is provided.
The second wiring member is provided with a plurality of through holes that penetrate the second wiring member in the opposite directions of the second main surface and the third main surface.
The case is
An arrangement portion having a fourth main surface facing the third main surface and in which the second wiring member is arranged,
It has a plurality of fixing portions that are integrally formed with the arrangement portion and that fix the second wiring member to the arrangement portion.
Each of the plurality of fixing portions
A shaft portion that protrudes from the fourth main surface in one direction and is inserted through the through hole, and a shaft portion.
It has a head provided at one end of the shaft in one direction and locked to the third main surface.
The head
The first head connected to the one end of the shaft and
It is connected to the first head and extends from the first head to the other end side of the shaft portion in the one direction, and faces the outer peripheral surface of the shaft portion at a predetermined distance. A vibrating device having a second head, which is arranged in a manner. The vibrating device according to claim 4, wherein each of the plurality of fixing portions has a different shape of the second head of the head.

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