JP2021085623A - Heat treatment furnace - Google Patents

Abstract

To provide a heat treatment furnace capable of uniformly cooling an object to be treated.SOLUTION: A heat treatment furnace 10 comprises a pressure container 12, a heat insulation body 16, a heater 20, a first port 26 feeding a cooling gas to an internal space 14 of the pressure container 12, a second port 28 exhausting the cooling gas to the outside of the pressure container 12, a first through hole 30 formed at the heat insulation body 16 and introducing the cooling gas into an internal space 18 formed by the heat insulation body 16, a second through hole 32 formed at the heat insulation body 16 and exhausting the cooling gas from the internal space 18 formed by the heat insulation body 16, a first fan 74 circulating the cooling gas, a cooling apparatus 76 cooling the cooling gas and a tight box 24 placed at the internal space 18 formed by the heat insulation body 16, storing an object to be treated 22, cooled by the cooling gas and cooling the object to be treated 22 by the radiation of heat.SELECTED DRAWING: Figure 1

Description

The present invention relates to a heat treatment furnace.

Conventionally, an object to be treated made of a metal or a magnetic material is placed in a heat treatment furnace and heat-treated in a vacuum or pressurized environment. For example, Patent Document 1 below discloses a heat treatment furnace in which cooling fins are provided on the inner surface of the furnace lid of a pressure vessel. The area where the gas flowing in the pressure vessel is cooled by the cooling fins is expanded to increase the cooling capacity.

Japanese Unexamined Patent Publication No. 2005-121308

Since a plurality of objects to be processed are processed at one time in the heat treatment furnace, it is preferable that the objects to be processed are treated under the same conditions regardless of the position in the heat treatment furnace. For example, if all the objects to be processed are not cooled uniformly, some objects to be processed may become defective. If the object to be processed becomes defective, the yield will deteriorate. Patent Document 1 discloses that the cooling capacity is enhanced, but does not disclose that the object to be treated is uniformly cooled.

Therefore, an object of the present invention is to provide a heat treatment furnace capable of uniformly cooling an object to be treated.

In order to solve the above problems, the heat treatment furnace according to the present invention has the following configuration.

The heat treatment furnace of the present invention includes a container-shaped pressure vessel, a heat insulating body arranged in the internal space of the pressure vessel, a heater arranged in the internal space formed by the heat insulating body, and an internal space of the pressure vessel. A first port for supplying the cooling gas to the outside of the pressure vessel, a second port for exhausting the cooling gas to the outside of the pressure vessel, and an internal space formed in the heat insulating body to guide the cooling gas to the internal space formed by the heat insulating body. A first through hole, a second through hole formed in the heat insulating body for exhausting the cooling gas from the internal space formed by the heat insulating body, a first fan for circulating the cooling gas, and the cooling gas. It is provided with a cooling device for cooling the object to be processed, and a tight box which is arranged in the internal space formed by the heat insulating body, accommodates the object to be processed, is cooled by the cooling gas, and cools the object to be processed by radiation of heat. ..

Conventionally, the cooling gas flows in the front-rear direction of the pressure vessel, but according to the present invention, the cooling gas flows from the first port to the second port so that the cooling gas flows around the tight box. Before the cooling gas is applied to the object to be treated, it is uniformly applied to the tight box to uniformly cool the tight box. It is possible to radiatively cool the object to be processed, and the object to be processed is uniformly cooled.

It is a figure which shows the structure of the heat treatment furnace of this application. It is a figure which shows the gas flow when the tight box lid is opened. It is a figure which shows the gas flow when the tight box lid is opened. FIG. 2 is a cross-sectional view taken along the line AA in FIG. It is a figure which shows the gas flow when the insulation body lid is opened. It is a figure which shows the gas flow when the insulation body lid is opened. It is a figure which shows the structure of the heat treatment furnace provided with a shower plate.

The heat treatment furnace of the present invention will be described with reference to the drawings. Although a plurality of embodiments will be described, the same means may be designated by the same reference numerals and the description thereof may be omitted even in different embodiments. The x-direction, y-direction, and z-direction in each drawing are directions orthogonal to each other.

[Embodiment 1]
The heat treatment furnace 10 of the present application shown in FIG. 1 includes a container-shaped pressure vessel 12, a heat insulating body 16 arranged in the internal space 14 of the pressure vessel 12, a heater 20 arranged in the internal space 18 of the heat insulating body 16, and an object to be treated. A tight box (inner case) 24 in which 22 is housed, a first port 26 for supplying cooling gas to the internal space 14 of the pressure vessel 12, a second port 28 for exhausting cooling gas to the outside of the pressure vessel 12, and cooling gas. A first through hole 30 for guiding to the internal space 18 of the heat insulating body 16, a second through hole 32 for exhausting the cooling gas from the internal space 18 of the heat insulating body 16, and a cooling unit 34 for circulating the cooling gas are provided. ..

Further, the heat treatment furnace 10 reduces the pressure of the gas source 38 that introduces gas into the internal space 14 of the pressure vessel 12 and the internal space 36 of the tight box 24, and the internal space 14 of the pressure vessel 12 and the internal space 36 of the tight box 24. The pump 40 is provided.

The heat treatment furnace 10 is a furnace for performing sintering, semi-sintering, firing, degreasing, brazing, metallizing, quenching, materialization treatment, tempering, annealing, aging heat treatment, and the like.

[Pressure vessel]
As shown in FIGS. 2 and 3, the pressure vessel 12 includes a container body 42 and a container lid 44. The container body 42 has a cylindrical shape (FIG. 4). The container lid 44 opens and closes both ends of the container body 42. When both ends of the container body 42 are closed by the container lid 44, the internal space 14 of the pressure vessel 12 becomes an airtight space. The internal space 14 of the pressure vessel 12 is depressurized or pressurized. The pressure resistance of the pressure vessel 12 is, for example, about 10 MPa, which can be changed by various designs. The pressure vessel 12 has a double structure including an inner wall 46 and an outer wall 48, and a coolant flows between the inner wall 46 and the outer wall 48. When lowering the temperature of the internal space 14, it can be lowered by the coolant.

[Insulation]
The heat insulating body 16 is arranged in the internal space 14 of the pressure vessel 12. The heat insulating body 16 includes a heat insulating body body 50 and a heat insulating body lid 52. The heat insulating body 50 has a tubular shape. As shown in FIG. 2, the heat insulating body body 50 includes a heat insulating body protruding portion 54, and the heat insulating body protruding portion 54 is in contact with the inner wall 46 of the pressure vessel 12. The heat insulating body protrusions 54 are provided at the upper and lower portions of the heat insulating body 16 at both ends in the longitudinal direction. There is a gap between the pressure vessel 12 and the heat insulating body 16. The heat insulating body lid 52 opens and closes both ends of the heat insulating body 50. An opening / closing device (not shown) for the heat insulating body lid 52 is provided so that the heat insulating body lid 52 can be opened / closed with the container lid 44 closed. The insulation 16 is made of a heat resistant material such as graphite felt or graphite foil.

[heater]
The heater 20 is arranged in the internal space 18 of the heat insulating body 16. Examples of the heater 20 include a rod heater made of graphite. The heater 20 is arranged parallel to the tight box 24. Further, a plurality of heaters 20 are arranged so as to rotate around the tight box 24 (FIG. 4). The heater 20 is supplied with three-phase alternating current power from electrodes (not shown) to generate heat.

[Tight box]
The tight box 24 is arranged in the internal space 18 of the heat insulating body 16. The tight box 24 is made of graphite or the like. The tight box 24 includes a tight box body 56 and a tight box lid 58. The tight box body 56 has a tubular shape. The tight box lid 58 opens and closes both ends of the tight box body 56. As shown in FIGS. 2 and 3, a switchgear 60 for opening and closing the tight box lid 58 is provided so that the tight box lid 58 can be opened and closed. The opening / closing device 60 is attached to the heat insulating body lid 52, and is a device for moving the tight box lid 58 toward the heat insulating body lid 52. By closing both ends of the tight box body 56 with the tight box lid 58, the internal space of the tight box 24 is sealed.

[Processed object]
The object to be processed 22 is arranged in the internal space 36 of the tight box 24. The material of the object to be treated 22 is a superhard metal, an iron-based metal, a non-ferrous metal, a magnetic material, ceramics, graphite, high-speed steel, die steel, low alloy steel, or the like, and the metal includes an alloy. The object to be treated 22 is a powder or a solid having a predetermined shape. By accommodating the object to be processed 22 in the tight box 24, the binder (gas and wax) released from the object to be processed 22 when the object to be processed 22 is degreased is released to the outside of the tight box 24. Can be prevented. It is possible to prevent the inner wall 46 of the pressure vessel 12, the heat insulating body 16, the heater 20, and the like from being contaminated.

[port]
The heat treatment furnace 10 includes a first port 26 for supplying cooling gas to the internal space 14 of the pressure vessel 12 and a second port 28 for exhausting the cooling gas. The first port 26 is provided in the lower part of the pressure vessel 12. The second port 28 is provided on the upper part of the pressure vessel 12. The first port 26 and the second port 28 are arranged at positions symmetrical with respect to the center of the pressure vessel 12. Cooling gas flows from the first port 26 across the internal space 14 of the pressure vessel 12 to the second port 28. The number of each port 26, 28 is not limited.

[Through hole]
A first through hole 30 for supplying cooling gas and a second through hole 32 for discharging the cooling gas are provided in the internal space 18 of the heat insulating body 16. The first through hole 30 is provided in the lower part of the heat insulating body 50. The second through hole 32 is provided in the upper part of the heat insulating body 50. The first through hole 30 and the second through hole 32 are arranged at positions symmetrical with respect to the center of the heat insulating body 16. Cooling gas flows from the first through hole 32 across the internal space 18 of the heat insulating body 16 to the second through hole 32. The number of the through holes 30 and 32 is plural, and the number of the through holes 30 and 32 is not limited. The cooling gas is made to flow uniformly in the internal space 18 of the heat insulating body 16.

A heat insulating member 64 is provided between the pressure vessel 12 and the heat insulating body 16 in order to guide the cooling gas from the first port 26 to the first through hole 30 and from the second through hole 32 to the second port 28 (FIG. 4). ). The heat insulating member 64 connects the container body 42 and the heat insulating body 50. Both ends of the heat insulating member 64 are in contact with the heat insulating body protruding portion 54. The air passage 66 for the cooling gas is formed by the container body 42, the heat insulating body 50, the heat insulating member 64, and the heat insulating body protrusion 54.

In the air passage 66 of the cooling gas, a heat insulating back heat insulating body 68 in contact with the inner wall 46 of the container main body 42 may be provided. The back insulation 68 includes through holes 70 leading to the first port 26 and the second port 28. The first through hole 30 and the second through hole 32 are formed in the heat insulating body 16, and the heat insulating performance of the internal space 18 of the heat insulating body 16 may be deteriorated. However, the back heat insulating body 68 prevents the deterioration of the heat insulating performance. To do.

A second port lid 72 that opens and closes the second port 28 may be provided (FIG. 1). The second port lid 72 is opened and closed by an opening / closing device (not shown). The second port lid 72 is made of a heat insulating material. When the object 22 to be treated is heat-treated, the internal space 18 of the heat insulating body 16 is insulated by closing the second port lid 72.

[Cooling unit]
As shown in FIG. 1, the cooling unit 34 includes a first fan 74 and a cooling device 76. The first fan 74 and the cooling device 76 are housed in the housing 78. The first fan 74 circulates the cooling gas. A first motor 80 is provided to rotate the first fan 74. The cooling device 76 is a water-cooled heat exchanger. The cooling unit 34 and the first port 26 are connected by a first pipe 82, and the cooling unit 34 and the second port 28 are connected by a second pipe 84. The cooling gas cooled by the cooling device 76 is blown to the pressure vessel 12 through the first pipe 82 and the first port 26. Further, the cooling gas is returned to the cooling unit 34 through the second port 28 and the second pipe 84. The cooling gas is cooled by the cooling unit 34 and sent to the pressure vessel 12 again. A valve may be provided in each of the first pipe 82 and the second pipe 84 to control the flow of the cooling gas.

The cooling unit 34 may be directly attached to the pressure vessel 12 or may be arranged at a position away from the pressure vessel 12. The cooling unit 34 is installed at an arbitrary location according to the area of the installation location of the heat treatment furnace 10 and the size of the pressure vessel 12.

[Gas source]
The gas source 38 stores, produces, or both stores nitrogen, argon, hydrogen, carbon monoxide, helium, methane, and the like. The gas source 38, the internal space 14 of the pressure vessel 12, and the internal space 36 of the tight box 24 are connected by a third pipe 90. The third pipe 90 is branched and is provided with valves 92 and 94, respectively. The gas flow rate can be controlled by opening and closing the valves 92 and 94. Gas is introduced from the gas source 38 into the internal space 14 of the pressure vessel 12 and the internal space 36 of the tight box 24 via the third pipe 90. A plurality of gas sources 38 may be used to supply a plurality of types of gas to the internal space 14 of the pressure vessel 12 and the internal space 36 of the tight box 24. A plurality of third pipes 90 are provided so that a plurality of types of gas can be supplied. Since the heat insulating body 16 is not completely airtight, gas can be introduced from the internal space 18 of the heat insulating body 16 into the internal space 14 of the pressure vessel 12.

[pump]
The pump 40 exhausts air to the internal space 14 of the pressure vessel 12 and the internal space 36 of the tight box 24. The pump 40 and the pressure vessel 12 are connected by a fourth pipe 96, and the pump 40 and the tight box 24 are connected by a fifth pipe 98. The pump 40 decompresses the internal space 14 of the pressure vessel 12 and the internal space 36 of the tight box 24. The fourth pipe 96 and the fifth pipe 98 are provided with valves 100 and 102, respectively, and the exhaust can be controlled by opening and closing the valves 100 and 102, respectively.

The fifth pipe 98 is provided with a wax tank 104 and a wax filter 106. The binder degreased by the object to be treated 22 is captured by the wax tank 104 and the wax filter 106. The binder does not reach the pump 40.

[Other]
A second fan 108 may be provided in the internal space 14 of the pressure vessel 12. The second fan 108 rotates when the container lid 44 is closed and the heat insulating body lid 52 is opened. The gas circulates in the internal space 14 of the pressure vessel 12 and the internal space 18 of the heat insulating body 16. The gas may be a gas introduced from the gas source 38 into the internal spaces 14 and 18. The tight box lid 58 may be opened. A second motor 110 for rotating the second fan 108 is attached to the container lid 44.

A guide 112 connected from the heat insulating body 50 to the second fan 108 may be provided. The guide 112 determines the direction of the circulating gas. The shape of the guide 112 is not limited as long as the direction of the gas is determined. Since the pressure vessel 12 has a double structure and a cooling liquid flows inside the pressure vessel 12, the circulating gas is cooled by the cooling liquid. A water-cooled heat exchanger may be arranged between the second fan 108 and the heat insulating body body 50, and the heat exchanger may also cool the gas.

The heat treatment furnace 10 is a thermometer (not shown) that measures the temperature of the internal space 18 of the heat insulating body 16 or the internal space 36 of the tight box 24, and a pressure gauge (not shown) that measures the pressure of the internal space 14 of the pressure vessel 12. To be equipped. The electric power supplied to the heater 20 is controlled according to the temperature measured by the thermometer. The gas source 38 and the pump 40 are controlled according to the pressure measured by the pressure gauge.

[Heat treatment]
Next, the heat treatment using the heat treatment furnace 10 of the present application will be described. The heat treatment to be described is an example, and is appropriately changed depending on the type of the object to be treated 22 and the treatment method.

(1) The object to be processed 22 is housed in the internal space 36 of the tight box 24, and the tight box lid 58, the heat insulating body lid 52, and the container lid 44 are closed.

(2) Exhaust is performed by the pump 40, and the internal space 14 of the pressure vessel 12, the internal space 18 of the heat insulating body 16, and the internal space 36 of the tight box 24 are controlled to a predetermined pressure. Gas is introduced from the gas source 38 into the internal space 14 of the pressure vessel 12, the internal space 18 of the heat insulating body 16, and the internal space 36 of the tight box 24, and the spaces 14, 18 and 62 are filled with a predetermined gas.

(3) An electric current is passed through the heater 20 to raise the temperature of the internal space 18 of the heat insulating body 16. The tight box 24 arranged in the internal space 18 of the heat insulating body 16 is heated, and the object to be processed 22 is further heated. When raising the temperature, the port lid 72 is closed.

The temperature of the object to be processed 22 in the internal space 36 of the tight box 24 rises, and the object to be processed 22 is degreased. At the time of degreasing, the pump 40 is driven, and the binder generated from the object to be processed 22 is stored in the wax tank 104 and the wax filter 106 in the middle of the fifth pipe 98.

After the degreasing of the object to be processed 22 is completed, the current flowing through the heater 20 is increased to raise the temperature of the object to be processed 22 for heat treatment. For example, the object to be processed 22 is sintered at about 1600 ° C. or higher.

(4) After the object to be processed 22 is heat-treated, the object to be processed 22 is cooled. The object to be processed 22 is cooled in two steps. In the first step, the port lid 72 is opened and the first fan 74 is rotated. As indicated by reference numeral w1 in FIG. 2, cooling gas is supplied to the internal space 18 of the heat insulating body 16 through the first port 26 and the first through hole 30. The cooling gas is blown against the lower part of the tight box 24. After that, as shown by reference numeral w1 in FIG. 4, the cooling gas orbits around the tight box 24. When the tight box 24 is cooled by the cooling gas, the object to be processed 22 arranged in the internal space 36 is cooled by heat radiation.

As shown in FIG. 2, the y direction (height direction) of the tight box 24 is shorter than the x direction (length direction). Since the cooling gas is uniformly applied to the tight box 24 in the y direction, it is easy to uniformly cool the tight box 24. By uniformly cooling the tight box 24, the object to be processed 22 is also uniformly cooled.

As shown in FIGS. 2 and 3, the tight box lid 58 is opened from the position of reference numeral 58'. A part of the cooling gas enters the internal space 36 of the tight box 24. The object to be processed 22 is directly cooled by the cooling gas. The cooling rate of the object 22 to be processed becomes high. The presence / absence of opening / closing and the degree of opening / closing of the tight box lid 58 during cooling are appropriately changed depending on the cooling method for the object to be processed 22.

The cooling gas that hits the tight box 24 returns to the cooling unit 34 through the second through hole 32 and the second port 28 while raising the temperature. The cooling device 76 of the cooling unit 34 lowers the temperature of the cooling gas. After that, the cooling gas is blown to the first port 26 again. That is, the cooling gas is cooled by the cooling device 76 by circulating the gas that was in the internal space 18 of the heat insulating body 16, and is blown back to the internal space 18 of the heat insulating body 16.

When the object 22 to be processed changes from a high temperature to a low temperature in the first stage cooling, the second stage cooling is performed. In the second stage, in addition to the cooling in the first stage, the heat insulating body lid 52 is opened to rotate the second fan 108. As shown by reference numeral w2 in FIGS. 5 and 6, the gas is circulated in the internal space 14 of the pressure vessel 12 by opening the heat insulating body lid 52. The inside of the furnace is cooled by the coolant inside the double structure of the pressure vessel 12. The cooling capacity is increased and it is cooled rapidly. The tight box lid 58 may be opened together with the heat insulating body lid 52, and the gas may be circulated in the internal space 36 of the tight box 24 as well.

When cooling, gas may be introduced from the gas source 38 into the internal space 14 of the pressure vessel 12, the internal space 18 of the heat insulating body 16, and the internal space 36 of the tight box 24.

The boundary between the first stage and the second stage is an arbitrary temperature of the internal space 36 of the tight box 24. This temperature is appropriately changed depending on the object to be processed 22. If it is higher than this temperature, it is the first stage, and if it is lower than this temperature, it is the second stage. In the present application, the object to be processed 22 is uniformly cooled in the first stage, and the object to be processed 22 is rapidly cooled in the second stage.

When the object 22 to be processed is cooled, the container lid 44, the heat insulating body lid 52, and the tight box lid 58 are opened, and the object 22 to be processed is taken out.

As described above, in the present application, the object to be processed 22 arranged in the internal space 36 of the tight box 24 can be uniformly cooled by passing the cooling gas from the first through hole 30 to the second through hole 32. In particular, since the object to be processed 22 is uniformly cooled at a high temperature at which defective products are likely to occur due to non-uniform cooling, the yield can be improved.

[Embodiment 2]
The positions of the first port 26 and the second port 28 may be interchanged with respect to the first embodiment. The first port 26 is arranged at the upper part of the pressure vessel 12, and the second port 28 is arranged at the lower part of the pressure vessel 12. Further, the first through hole 30 is arranged in the upper part of the heat insulating body 16, and the second through hole 32 is arranged in the lower part of the heat insulating body 16. The cooling gas flows from the upper part to the lower part of the pressure vessel 12.

[Embodiment 3]
A port lid that opens and closes the first port 26 may be provided. Port lids 72 are provided on the first port 26, the second port 28, or both ports 26 and 28. By closing the port lid 72, the heat insulating performance of the heat insulating body 16 is enhanced. When cooling the object to be processed 22, the port lid 72 is opened.

[Embodiment 4]
The shower plate 122 may be arranged between the pressure vessel 12 and the heat insulating body 16 in the air passage 66 (FIG. 7). The shower plate 122 is provided with a plurality of openings 124 in the plate body. The shower plate 122 equalizes the flow of cooling gas. The density of the opening 234 of the shower plate 122 may vary from place to place. For example, the density of the opening 124 is sparse at a position close to the ports 26 and 28, and the density of the opening 124 is sparse at a position far from the ports 26 and 28.

(Paragraph 1) The heat treatment furnace according to one aspect includes a container-shaped pressure vessel, a heat insulating body arranged in the internal space of the pressure vessel, and a heater arranged in the internal space formed by the heat insulating body. A first port for supplying cooling gas to the internal space of the pressure vessel, a second port for exhausting cooling gas to the outside of the pressure vessel, and the heat insulating body were formed, and the cooling gas was formed by the heat insulating body. A first through hole for guiding to the internal space, a second through hole formed in the heat insulating body for exhausting the cooling gas from the internal space formed by the heat insulating body, and a first through hole for circulating the cooling gas. It is arranged in an internal space formed by a fan, a cooling device for cooling the cooling gas, and the heat insulating body, accommodates an object to be processed, is cooled by the cooling gas, and cools the object to be processed by radiation of heat. It is equipped with a tight box.

According to the heat treatment furnace according to the first item, the cooling gas flows from the first port to the second port so that the cooling gas flows around the tight box as compared with the conventional case. The tight box is uniformly cooled, and the object to be treated is uniformly cooled.

(Item 2) The first port is provided at the lower part of the pressure vessel and the second port is provided at the upper part of the pressure vessel, or the first port is provided at the upper part of the pressure vessel and the second port is provided at the lower part of the pressure vessel. There is.

According to the heat treatment furnace according to the second item, since the cooling gas flows in the vertical direction of the tight box, it is easy to uniformly cool the tight box.

(Item 3) The tight box is composed of a tubular tight box main body and a tight box lid that opens and closes both ends of the tight box main body, includes an opening / closing device for the tight box lid, and the cooling gas is a heat insulating body. The tight box lid can be opened and closed when supplied to the interior space of the.

According to the heat treatment furnace according to the third item, the tight box lid can be opened when the tight box is cooled, and the cooling gas can be directly applied to the object to be processed by opening the tight box lid. ..

(Item 4) A shower plate is arranged between the pressure vessel and the heat insulating body.

According to the heat treatment furnace according to the fourth item, the flow of the cooling gas can be made uniform by the shower plate.

(Item 5) The first fan and a cooling device are provided outside the pressure vessel.

According to the heat treatment furnace according to the fifth item, the first fan and the cooling device can be freely arranged outside the pressure vessel.

(Section 6) A second fan is provided in the internal space of the pressure vessel.

According to the heat treatment furnace according to the sixth item, a gas flow can be generated even in the internal space of the pressure vessel.

(Section 7) A back heat insulating body is arranged on the inner wall of the pressure vessel.

According to the heat treatment furnace according to the seventh item, the heat insulating performance deteriorated by the first through hole and the second through hole can be enhanced by the back heat insulating body.

(Item 8) The first port, the second port, or both ports are provided with a port lid capable of opening and closing the port.

According to the heat treatment furnace according to the eighth item, the heat insulating performance of the heat insulating body can be maintained by closing the first port and the second port.

In addition, the present invention can be carried out in a mode in which various improvements, modifications and changes are made based on the knowledge of those skilled in the art without departing from the gist thereof. Each of the described embodiments is not independent and can be appropriately combined and implemented based on the knowledge of those skilled in the art.

10: Heat treatment furnace 12: Pressure vessel 14: Internal space of pressure vessel 16: Insulation body 18: Internal space of insulation body 20: Heater 22: Object 24: Tight box 26, 28: Port 30, 32: Through hole 34 : Cooling unit 36: Internal space of tight box 68: Back heat insulating body 72: Second port lid 74: First fan 76: Cooling device 80: First motor 122: Shower plate 124: Opening of shower plate

Claims (8)

A container-shaped pressure vessel and
With the heat insulating body arranged in the internal space of the pressure vessel,
A heater arranged in the internal space formed by the heat insulating body and
A first port that supplies cooling gas to the internal space of the pressure vessel,
A second port that exhausts cooling gas to the outside of the pressure vessel,
A first through hole formed in the heat insulating body and for guiding the cooling gas to the internal space formed by the heat insulating body,
A second through hole formed in the heat insulating body and for exhausting the cooling gas from the internal space formed by the heat insulating body,
The first fan that circulates the cooling gas and
A cooling device that cools the cooling gas and
A tight box arranged in an internal space formed by the heat insulating body, accommodating an object to be processed, being cooled by the cooling gas, and cooling the object to be processed by heat radiation.
Heat treatment furnace equipped with. The heat treatment according to claim 1, wherein the first port is provided at the lower part of the pressure vessel, the second port is provided at the upper part of the pressure vessel, or the first port is provided at the upper part of the pressure vessel and the second port is provided at the lower part of the pressure vessel. Furnace. The tight box is composed of a tubular tight box main body and a tight box lid that opens and closes both ends of the tight box main body.
The tight box lid opening / closing device is provided.
The heat treatment furnace according to claim 1 or 2, wherein the tight box lid can be opened and closed when the cooling gas is supplied to the internal space of the heat insulating body. The heat treatment furnace according to any one of claims 1 to 3, wherein a shower plate is arranged between the pressure vessel and the heat insulating body. The heat treatment furnace according to any one of claims 1 to 4, wherein the first fan and a cooling device are provided outside the pressure vessel. The heat treatment furnace according to any one of claims 1 to 5, wherein a second fan is provided in the internal space of the pressure vessel. The heat treatment furnace according to any one of claims 1 to 6, wherein a back insulator is arranged on the inner wall of the pressure vessel. The heat treatment apparatus according to any one of claims 1 to 7, wherein the first port, the second port, or both ports are provided with a port lid capable of opening and closing the port.

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