JP2021056158A - Electric contactor, electric connection structure, and electric connection device - Google Patents

Abstract

To improve the slidability of an elastic member and electric contact stability with a contact object, with reduced component counts, and improve electrical continuity in an electric contactor.SOLUTION: With a tabular member comprising a body part, an upper arm part, a first tip part at the tip of the upper arm part, a lower arm part, and a second tip part at the tip of the lower arm part, the present invention comprises: a first contact part formed by winding the first tip part around; a first elastic part of a telescopic spring structure formed by winding the upper arm part around; a second contact part formed by winding the second tip part around; a second elastic part of a telescopic spring structure formed by winding the lower arm part around; and a connecting part for winding the body part around so as to retain the elasticity of the first and second elastic parts and connecting the first and second elastic parts. Both of, or one of the tip face of the first contact part coming in contact with a first contact object and the tip face of the second contact part coming in contact with a second contact object is an inclined plane.SELECTED DRAWING: Figure 1

Description

The present invention relates to electrical contacts, electrical connection structures and electrical connection devices, for example, electrical contacts, electrical connection structures and electrical connections used for energization tests of integrated circuits and objects to be inspected on semiconductor wafers. It can be applied to the device.

An integrated circuit formed on a semiconductor wafer, a packaged integrated circuit, or the like to be inspected is inspected for electrical characteristics at each manufacturing stage. An electrical connection device such as a probe card is used for electrical inspection of an integrated circuit on a semiconductor wafer, and an electrical connection device such as a socket is used for electrical inspection of a packaged integrated circuit. In such an electrical connection device, an electrical contactor that contacts the first contact object and the second contact object is used, and the first contact object and the second contact object are connected to each other via the electrical contact element. The electrical signal is conducting between them.

Conventionally, there are various types of electrical contacts, but there is an electrical contact formed by combining a plurality of components. When an electrical contact formed of a plurality of components is used to conduct an electric signal between a first contact target and a second contact target, resistance is generated at the contact points between the components. It can grow and affect electrical conductivity.

In Patent Document 1, a thin-walled strip-shaped substrate is bent to integrally mold a spiral tubular sleeve, a first terminal at one end of the tubular sleeve, and a second terminal at the other end of the tubular sleeve. Spring probes are disclosed. Since such a spring probe is integrally formed of a thin-walled strip-shaped substrate, the conductivity becomes good.

Japanese Unexamined Patent Publication No. 2011-12992

However, when an electric signal is conducted between the first contact object and the second contact object by using the spring probe described in Patent Document 1, the electrical conduction path in the spring probe becomes spiral. Since it passes through a pair of wound coil springs, the path length becomes long, and improvement of electrical conductivity is required.

Therefore, in view of the above problems, the present invention is formed with a small number of parts, improves the slidability of the elastic member and the electrical contact stability with the contact target, and improves the conductivity in the electrical contactor. It seeks to provide improved electrical contacts, electrical connection structures and electrical connection devices.

In order to solve such a problem, the first electric contact of the present invention is an electric contact formed of a plate-shaped member having conductivity, and the plate-shaped member is a main body portion and a main body portion. A tapered upper arm that extends diagonally upward from one end of the body, a first tip provided at the tip of the upper arm, and a taper that extends diagonally downward from one end of the main body. A first contact having a shaped lower arm portion and a second tip portion provided at the tip of the lower arm portion, and (1) being formed by winding the first tip portion and contacting a first contact target. It was formed by winding a portion, (2) a first elastic portion of a bamboo child spring structure which is formed by winding the upper arm portion and elastically elasticizes the first contact portion in the axial direction, and (3) a second tip portion. , A second contact portion that comes into contact with the second contact object, (4) a second elastic portion of a bamboo child spring structure that is formed by winding the lower arm portion and elastically elasticizes the second contact portion in the axial direction, and (5) ) The main body portion is wound to enable the elasticity of each of the first elastic portion and the second elastic portion, and a connecting portion for connecting the first elastic portion and the second elastic portion is provided to provide a first contact target. It is characterized in that both or one of the tip surface of the first contact portion that comes into contact and the tip surface of the second contact portion that contacts the second contact object is an inclined surface.

The second electric contact of the present invention is an electric contact formed of a plate-shaped member having conductivity. (1) The plate-shaped member is oblique to the main body and one end of the main body. It is provided with a tapered upper arm portion that extends upward, a tip portion provided at the tip of the upper arm portion, and a plurality of chevron protrusions provided at the lower end portion of the main body portion. (2) Tip A bamboo child spring structure formed by winding a first contact portion that comes into contact with a first contact object and (3) a bamboo child spring structure that is formed by winding the upper arm portion and elastically elasticizes the first contact portion in the axial direction. An elastic portion and (4) a tubular portion that is wound around the main body portion to accommodate the base end portion of the elastic portion inside, and is in contact with a second contact object with a plurality of chevron protrusions at the lower end portion. The tip surface of the first contact portion that comes into contact with the first contact target is an inclined surface.

A third electrical connection structure of the present invention comprises a first contact object, a second contact object, and an electrical contactor that electrically contacts the first contact object and the second contact object. , An electrical connection structure for making an electrical connection between a first contact object and a second contact object via an electrical contactor, wherein the electrical contactor contacts the first contact object. The first elastic part, the first elastic part of the bamboo child spring structure that elastically elasticizes the first contact part in the axial direction, the second contact part that comes into contact with the second contact object, and the second contact part elastically elastic in the axial direction. It has a second elastic portion of the bamboo child spring structure, a connecting portion that enables the elasticity of each of the first elastic portion and the second elastic portion, and a connecting portion that connects the first elastic portion and the second elastic portion. The tip surface of the first contact portion and / or the second contact portion and the surface of the first contact target and / or the second contact target are relatively inclined to face each other, and the tip surface of the first contact portion and the first contact target. When the front surface of the second contact portion and the surface of the second contact target come into contact with each other, the inner member of the first elastic portion and the second elastic portion is deformed due to the deformation of the electrical contactor. It is characterized in that the outer wall and the inner wall of the outer member can be electrically contacted.

The fourth electrical connection device of the present invention is an electrical connection device including a plurality of electrical contacts that bring the first contact object into contact with the second contact object, wherein the plurality of electrical contacts are the first. It is characterized by being the first or second electrical contactor of the present invention.

According to the present invention, it is formed with a small number of parts, and it is possible to improve the slidability of an elastic member and the electrical contact stability with a contact target, and also to improve the conductivity of an electrical contactor.

It is a block diagram which shows the structure of the connector which concerns on 1st Embodiment. It is a block diagram which shows the structure of the plate-like member before forming the connector of 1st Embodiment. It is a block diagram which shows the structure of the electric connection device which concerns on 1st Embodiment. It is explanatory drawing explaining the manufacturing method of the connector of 1st Embodiment (the 1). It is explanatory drawing explaining the manufacturing method of the connector of 1st Embodiment (the 2). It is a figure which illustrates the housing state of the connector of 1st Embodiment, and the state when a load is applied. It is explanatory drawing explaining the contact state between the 1st inclined contact part and a contact terminal which concerns on 1st Embodiment. It is explanatory drawing explaining the structure before and after the deformation of the connector of 1st Embodiment, the structure in a plan view, and the electrical conduction path. It is explanatory drawing explaining the contact state between the 1st inclined contact part and a contact terminal which concerns on a modification embodiment. It is a block diagram which shows the structure of the plate-like member before forming the electric contact of 2nd Embodiment. It is a block diagram which shows the structure of the electric contact according to 2nd Embodiment. It is a block diagram which shows the structure of the plate-like member before forming the electric contact of 3rd Embodiment. It is a block diagram which shows the structure of the electric contact according to 3rd Embodiment. It is a block diagram which shows the structure of the plate-shaped member which concerns on a modification embodiment. It is a block diagram which shows the structure of the plate-shaped member and the electric contact according to the modification embodiment.

(A) First Embodiment In the following, the first embodiment of the electrical contactor and the electrical connection device according to the present invention will be described in detail with reference to the drawings.

In the first embodiment, a case where the electrical contactor according to the present invention is applied to a connector mounted on an electrical connection unit which is a component of an electrical connection device will be illustrated, as will be described later. The electrical contact according to the present invention is capable of electrically contacting a first contact object and a second contact object and conducting an electric signal between the first contact object and the second contact object. Can be applied to. In the first embodiment, the case where the electrical contactor of the present invention is applied to the connector of the electrical connection unit is illustrated, but the present invention also includes a probe or the like connected to the electrode terminal of the object to be inspected. Applicable.

Further, in the first embodiment, the electrical connection device according to the present invention uses an integrated circuit formed on a semiconductor wafer as an inspected object, and is used for electrical inspection of the inspected object. An example is given. The electrical connection device according to the present invention uses the electrical contact according to the present invention to conduct an electric signal between the first contact object and the second contact object to electrically connect them. Applicable to things.

(A-1) Configuration of First Embodiment (A-1-1) Electrical Connection Device FIG. 3 is a configuration diagram showing a configuration of an electrical connection device according to the first embodiment.
The electrical connection device 10 of FIG. 3 illustrates the main components, but is not limited to these components, and actually has components not shown in FIG. Further, in the following, "upper" and "lower" will be referred to by paying attention to the vertical direction in FIG.

In FIG. 3, the electrical connection device 10 according to this embodiment includes a flat plate-shaped support member 12, a flat plate-shaped wiring board 14 held on the lower surface 12a of the support member 12, and the wiring board 14 and electrical. It has an electrical connection unit 15 connected to the electrical connection unit 15 and a probe substrate 16 that is electrically connected to the electrical connection unit 15 and has a plurality of probes 20.

The electrical connection device 10 uses a large number of fixing members (for example, screwing members such as bolts) when assembling the support member 12, the wiring board 14, the electrical connection unit 15, and the probe board 16. These fixing members are not shown in FIG.

The electrical connection device 10 uses, for example, a semiconductor integrated circuit formed on a semiconductor wafer as the inspected body 2, and electrically inspects the inspected body 2. Specifically, the test object 2 is pressed toward the probe substrate 16 to electrically contact the tip of each probe 20 of the probe substrate 16 with the electrode terminal 2a of the probe substrate 2, and a tester (not shown) (not shown). The inspection device) supplies an electric signal to the electrode terminal 2a of the inspected body 2, and further gives an electric signal from the electrode terminal 2a of the inspected body 2 to the tester side to perform an electric inspection of the inspected body 2. Do it.

The object 2 to be inspected is placed on the upper surface of the chuck top 3. The position of the chuck top 3 can be adjusted in the horizontal X-axis direction, the Y-axis direction perpendicular to the X-axis direction on the horizontal plane, and the Z-axis direction perpendicular to the horizontal plane (XY plane). Further, the rotational posture can be adjusted in the θ direction around the Z axis. When performing an electrical inspection of the object 2 to be inspected, the chuck that can be raised and lowered in the vertical direction (Z-axis direction) is moved so that the electrode terminal 2a of the object 2 to be inspected is moved to the tip of each probe 20 of the probe substrate 16. Make electrical contact with the part. Therefore, the lower surface of the probe substrate 16 of the electrical connection device 10 and the object 2 to be inspected on the upper surface of the chuck top 3 are moved so as to be relatively close to each other.

[Support member]
The support member 12 suppresses deformation (for example, bending) of the wiring board 14. For example, since the probe board 16 has a large number of probes 20, the weight of the probe board 16 attached to the wiring board 14 side is large. Further, when the probe substrate 16 is electrically inspected, the probe substrate 16 is pressed by the subject 2 on the chuck top 3 so that the probe substrate 16 protrudes from the lower surface of the probe substrate 16 with the tip of the probe 20. The electrode terminal 2a of the object 2 to be inspected comes into electrical contact. In this way, during the electrical inspection, a reaction force (contact load) that pushes up from the bottom to the top acts, and a large load is also applied to the wiring board 14. The support member 12 functions as a member that suppresses deformation (for example, bending) of the wiring board 14.

Further, the support member 12 is provided with a plurality of through holes 121 that penetrate the upper surface and the lower surface. Each of the plurality of through holes 121 is provided at a position corresponding to each position of the plurality of anchors 50 arranged on the upper surface of the probe substrate 16 described later, and the plurality of through holes 141 provided in the wiring board 14 are provided. It is provided at the position corresponding to each position of.

A spacer (hereinafter, also referred to as a "support portion") 51 is inserted into each through hole 121 of the support member 12 from above to below, and the lower end portion of the spacer (support portion) 51 and the lower end portion thereof. The structure is such that the corresponding anchor 50 can be fixed. For example, the lower end of the spacer (support portion) 51 is a male screw portion, and the substantially central portion of the anchor 50 arranged on the upper surface of the probe substrate 16 is a female screw portion 501. ) 51 can be fixed by screwing the lower end portion (male screw portion) into the female screw portion of the anchor 50. As a result, the distance between the upper surface of the probe substrate 16 and the upper surface of the support member 12 can be maintained at a predetermined distance length.

[Wiring board]
The wiring board 14 is made of, for example, a resin material such as polyimide, and is, for example, a printed circuit board formed in a substantially circular plate shape. A large number of electrode terminals (not shown) for electrically connecting to a test head (not shown) of a tester (inspection device) are arranged on the peripheral edge of the upper surface of the wiring board 14. A wiring pattern is formed on the lower surface of the wiring board 14, so that the connection terminal 14a of the wiring pattern is electrically connected to the upper end of the connector 30 provided in the electrical connection unit 15. It has become.

Further, a wiring circuit (not shown) is formed inside the wiring board 14, and the wiring pattern on the lower surface of the wiring board 14 and the electrode terminals on the upper surface of the wiring board 14 form a wiring circuit inside the wiring board 14. It is possible to connect via. Therefore, each connector 30 of the electrical connection unit 15 that is electrically connected to the connection terminal 14a of the wiring pattern on the lower surface of the wiring board 14 via the wiring circuit in the wiring board 14 and the electrode on the upper surface of the wiring board 14 An electrical signal can be conducted with the test head connected to the terminal. A plurality of electronic components necessary for electrical inspection of the object to be inspected 2 are also arranged on the upper surface of the wiring board 14.

Further, the wiring board 14 is provided with a plurality of through holes 141 that penetrate the upper surface and the lower surface of the wiring board 14. Each of the plurality of through holes 141 is arranged at a position corresponding to each position of the plurality of anchors 50 arranged on the upper surface of the probe substrate 16, and is arranged at a position corresponding to each position of the plurality of through holes 121 of the support member 12. It is located in the corresponding position.

The opening shape of each through hole 141 can be a shape corresponding to the shape of the support portion 51 to be inserted. Further, in order to allow the support portion 51 to be inserted into each through hole 141, the inner diameter of each through hole 141 is about the same as or slightly larger than the outer diameter of the support portion 51.

In this embodiment, in order to illustrate the case where the support portion 51 is a cylindrical member, the case where the opening shape of the through hole 141 is substantially circular is illustrated, but the present invention is not limited to this. For example, the support portion 51 may be a member of a right-angled column having a substantially square cross-sectional shape, a member of a polygonal column having a polygonal cross-sectional shape, or the like. The shape can be a shape through which the support portion 51 can be inserted.

[Electrical connection unit]
The electrical connection unit 15 has a plurality of connector 30s. In the assembled state of the electrical connection device 10, the upper end of each connector 30 is electrically connected to the connection terminal 14a of the wiring pattern on the lower surface of the wiring board 14, and the lower end of each connector 30 is connected to the probe board. It connects to a pad provided on the upper surface of 16. Since the tip of the probe 20 electrically contacts the electrode terminal of the object 2 to be inspected, the electrode terminal of the object 2 to be inspected is electrically connected to the tester (inspection device) through the probe 20 and the connector 30. The inspection body 2 can be electrically inspected by a tester (inspection device).

For example, the electrical connection unit 15 has a plurality of insertion holes for inserting each connector 30, and by inserting the connector 30 into each insertion hole, the upper end and the lower end of each connector 30 are inserted. Is protruding. In the electrical connection unit 15, the mechanism for mounting the plurality of connectors 30 is not limited to the configuration in which the through holes are provided, and various configurations can be widely applied. A flange portion 151 is provided around the electrical connection unit 15.

[Probe substrate]
The probe substrate 16 is a substrate having a plurality of probes 20, and is formed in a substantially circular shape or a polygonal shape (for example, a hexadecagon). As the probe 20, for example, a cantilever type probe or the like can be used, but the probe 20 is not limited thereto. Further, the probe substrate 16 has, for example, a substrate member 161 formed of a ceramic plate and a multilayer wiring board 162 formed on the lower surface of the substrate member 161.

A large number of conductive paths (not shown) penetrating in the plate thickness direction are formed inside the substrate member 161 which is a ceramic substrate, and pads 161a are formed on the upper surface of the substrate member 161. One end of the conductive path in the member 161 is formed so as to connect to the corresponding pad 161a on the upper surface of the substrate member 161. Further, on the lower surface of the substrate member 161, the other end of the conductive path in the substrate member 161 is formed so as to be connected to a connection terminal provided on the upper surface of the multilayer wiring board 162.

The multilayer wiring board 162 is formed of a plurality of multilayer substrates formed of, for example, a synthetic resin member such as polyimide, and a wiring path (not shown) is formed between the plurality of multilayer substrates. One end of the wiring path of the multilayer wiring board 162 is connected to the other end of the conductive path on the substrate member 161 side which is a ceramic substrate, and the other end of the multilayer wiring board 162 is provided on the lower surface of the multilayer wiring board 162. It is connected to the probe land. A plurality of probes 20 are arranged on a probe land provided on the lower surface of the multilayer wiring board 162, and the plurality of probes 20 of the probe board 16 correspond to the wiring board 14 via the electrical connection unit 15. It is electrically connected to the connection terminal 14a.

(A-1-2) Connector (electrical contactor)
FIG. 1 is a configuration diagram showing a configuration of a connector 30 according to the first embodiment. FIG. 2 is a configuration diagram showing a configuration of a plate-shaped member before forming the connector 30 of the first embodiment.

The connector 30 of FIG. 1 is formed by forming (for example, rounding, bending, etc.) the plate-shaped member 40 of FIG. That is, the plate-shaped member 40 of FIG. 2 is a member before molding of the connector 30 of FIG. 1, and is a plate-shaped member formed of a conductive material. Therefore, since the connector 30 is formed by molding one plate-shaped member, the conductivity of the electric signal can be stabilized. In other words, in an electrical contact formed by combining a plurality of parts, the plurality of parts come into contact with each other to conduct an electric signal, so that the resistance increases at the contact point between the plurality of parts. , Conductivity may become unstable. On the other hand, the connector 30 formed by molding a plate-shaped member has no or few contact points between parts, so that the resistance value can be reduced and the conductivity of the electric signal is stabilized. it can.

As shown in FIG. 1, the connector 30 which is an example of the electrical contact includes the tubular portion 32 and the first contact portion 34 which contacts the connection terminal 14a of the wiring board 14 as the first contact target. When the first contact portion 34 comes into contact with the connection terminal 14a and receives a load, the upper elastic portion 33 elastically urges in the vertical direction and the pad 161a of the substrate member 161 as the second contact target comes into contact with each other. It has a second contact portion 36 and a lower elastic portion 35 that elastically biases the second contact portion 36 in the vertical direction when the second contact portion 36 comes into contact with the pad 161a and receives a load.

The tip of the first contact portion 34 has a tip surface (hereinafter, also referred to as a "contact surface") that comes into contact with the first contact target, and the tip surface is inclined. Further, the tip of the second contact portion 36 has a tip surface (hereinafter, also referred to as a “contact surface”) that comes into contact with the second contact target, and the tip surface is inclined. In the following, the inclined tip surface of the tip of the first contact portion 34 is referred to as the first inclined contact portion 341, and the inclined tip surface of the tip of the second contact portion 36 is referred to as the second inclined contact portion 361. I will explain by calling it.

As shown in FIG. 2, the plate-shaped member 40 is provided at the main body portion 42, the upper arm portion 43, the first tip portion 44 provided at the tip of the upper arm portion 43, and the tip of the first tip portion 44. The first inclined portion 441, the lower arm portion 45, the second tip portion 46 provided at the tip of the lower arm portion 45, and the second inclined portion 461 provided at the tip of the second tip portion 46. Have.

The plate-shaped member 40 is, for example, a plate-shaped member made of precious metal or metal, or a plate-shaped member obtained by plating the surface of the plate-shaped member with precious metal or metal. The shape of the plate-shaped member 40 can be formed by punching the plate-shaped member or the like. Further, for example, in the plate-shaped member 40, the first contact object and / or the portion in contact with the second contact object (the first tip portion 44 and / or the second tip portion 46, which will be described later) is a precious metal or the like, and other parts. May be formed of a member having excellent elasticity (for example, springiness) such as bimetal. In this way, the conductivity can be improved by using a precious metal or the like as the contact point with the first contact object and / or the second contact object, and the other part is a member such as a bimetal or the like. Therefore, the elasticity (for example, springiness) of the portion can be improved.

[Main body]
The main body portion 42 is a substantially rectangular plate-shaped portion. As will be described later, the connector 30 is formed by winding from the left component side of the plate-shaped member 40 by rounding. When the connector 30 is formed, the main body portion 42 becomes a tubular portion 32 that covers the wound upper arm portion 43 and the lower arm portion 45.

Here, of the four end portions of the main body portion 42, the end portions of the upper end portion 421 and the lower end portion 422 are formed linearly in the lateral direction and are formed parallel to each other. The tubular portion 32 of the connector 30 formed by winding the plate-shaped member 40 functions as a positioning portion in the height direction of the connector 30 when housing the connector 30. Therefore, by making the upper end portion 421 of the main body portion 42 and the end portions of the lower end portion 422 linearly parallel to each other, the posture of the connector 30 to be housing can be stabilized.

[Upper arm]
The upper arm portion 43 is integrally connected to any one of the four end portions of the main body portion 42 (the left end portion in FIG. 2), and is the upper portion of the left end portion of the main body portion 42. It is a member that extends diagonally upward to the left from the left end of the main body 42.

The upper arm portion 43 has a tapered shape (taper) in which the length in the vertical direction (y direction) decreases toward the tip side (that is, the first tip portion 44 side) from the base end portion 431 connected to the main body portion 42. The shape) may be used, or the width may be the same from the base end portion 431 to the tip end side. In this embodiment, the case of a tapered shape is illustrated. More specifically, the length of the base end portion 431 of the upper arm portion 43 connected to the main body portion 42 in the y direction is defined as "a1", and the length of the tip portion 432 of the upper arm portion 43 in the y direction is defined as "a1". If "a2" is set, there is a relationship of a1 ≧ a2. In this embodiment, the case where the upper arm portion 43 has a tapered shape is illustrated.

By forming the upper arm portion 43 into a tapered shape in this way, when the upper arm portion 43 is wound by the rounding process, for example, the upper elastic portion 33 having a bamboo shoot spring structure is formed. That is, of the upper elastic portion 33 formed by winding the upper arm portion 43, the lower end portion of the wound inner member is covered with the upper end portion of the wound outer member. Then, the upper elastic portion 33 elastically urges the first contact portion 34 in the vertical direction. Here, the bamboo shoot spring is a conical spring formed by spirally winding a plate-shaped member and partially covering the wound inner member with the outer member.

The base end portion 431 of the upper arm portion 43 extends from a position slightly lower than the upper corner portion 423 of the left end portion of the main body portion 42 (a position separated from the upper corner portion 423). Here, a part of the left end portion of the main body portion 42 from the upper corner portion 423 to the base end portion 431 is referred to as a “step portion 424”. In this way, by extending the upper arm portion 43 from the position where the step portion 424 is provided from the upper corner portion 423, the plate-shaped member 40 is wound by the rounding process, and the wound upper arm portion is wound. The base end portion 431 of 43 (upper elastic portion 33) is covered with the main body portion 42.

Then, the connector 30 formed by winding the plate-shaped member 40 is housed in the electrical connection unit 15, and when the first contact portion 34 receives a load, the base end portion 431 of the upper elastic portion 33 has a tubular shape. The upper elastic portion 33 elastically strokes in the vertical direction while being included in the portion 32. Therefore, it is possible to prevent the upper elastic portion 33, which is elastically driven as a spring, from being damaged.

[First tip]
The first tip portion 44 is provided at the tip of the upper arm portion 43, and is a portion extending vertically upward. By winding the first tip portion 44 by the rounding process, the wound first tip portion 44 functions as the first contact portion 34 of the connector 30.

[1st inclined part]
The first inclined portion 441 is an inclined surface provided at the tip of the first tip portion 44. By winding the first tip portion 44 by the rounding process, the first inclined portion 441 functions as the first inclined contact portion 341 of the connector 30. The first inclined portion 441 is inclined at a predetermined angle (θ1 in the example of FIG. 2) with respect to the x direction. The inclination angle θ1 may be the same as or different from the inclination angle θ2 of the second inclined portion 461 of the lower arm portion 45, which will be described later. In the example of FIG. 2, a case where the first inclined portion 441 is inclined obliquely upward to the right and the second inclined portion 461 to be described later is inclined diagonally downward to the right is illustrated. The case where the inclination directions of the first inclined portion 441 and the second inclined portion 461 are symmetrical (the y-direction straight line passing through the midpoint of the plate-shaped member 40 in the y direction is line-symmetrical) is illustrated, and more specifically, The first inclined portion 441 is inclined diagonally downward to the right, and the second inclined portion 461 is inclined diagonally upward to the right.

[Lower arm]
The lower arm portion 45 is integrally connected to any one of the four end portions of the main body portion 42 (the left end portion in FIG. 2), and is of the left end portion of the main body portion 42. It is a member that is located at the lower part and extends diagonally downward to the left from the left end of the main body 42. The base end portion 451 of the lower arm portion 45 is located below the position of the base end portion 431 of the upper arm portion 43, and is located at the left end portion of the main body portion 42 with the base end portion 451 of the lower arm portion 45. The base end portion 431 of the upper arm portion 43 is separated.

Like the upper arm portion 43, the lower arm portion 45 also has a length in the vertical direction (y direction) from the base end portion 451 connected to the main body portion 42 toward the tip end side (that is, the second tip portion 46 side). It may have a tapered shape (tapered shape) in which the size becomes smaller, or it may have the same width from the base end portion 431 to the tip end side. In this embodiment, a case where the shape is tapered is illustrated. More specifically, the length of the base end portion 451 of the lower arm portion 45 connected to the main body portion 42 in the y direction is defined as "b1", and the length of the tip portion 452 of the lower arm portion 45 in the y direction is defined as "b1". If "b2" is set, there is a relationship of b1 ≧ b2.

As described above, since the lower arm portion 45 has a tapered shape, when the lower arm portion 45 is wound by the rounding process, for example, a bamboo shoot spring-shaped lower elastic portion 35 is formed. That is, in the lower elastic portion 35 formed by winding the lower arm portion 45, the upper end portion of the wound inner member is covered with the lower end portion of the wound outer member. Then, the lower elastic portion 35 elastically urges the second contact portion 36 in the vertical direction.

The base end portion 451 of the lower arm portion 45 extends from a position slightly above the lower corner portion 425 of the left end portion of the main body portion 42 (a position separated from the lower corner portion 425). Here, a part of the left end portion of the main body portion 42 from the lower corner portion 425 to the base end portion 451 is referred to as a “step portion 426”. In this way, by extending the lower arm portion 45 from the position where the step portion 426 is provided from the lower corner portion 425, the plate-shaped member 40 is wound by the rounding process, and the wound lower arm portion is wound. The base end portion 451 of 45 (lower elastic portion 35) is covered with the main body portion 42.

Then, the connector 30 formed by winding the plate-shaped member 40 is housed in the electrical connection unit 15, and when the second contact portion 36 receives a load, the base end portion 451 of the lower elastic portion 35 has a tubular shape. The lower elastic portion 35 elastically strokes in the vertical direction while being included in the portion 32. Therefore, it is possible to prevent the lower elastic portion 35, which is elastically driven as a spring, from being damaged.

[Second tip]
The second tip 46 is provided at the tip of the lower arm 45 and extends vertically downward. The second tip portion 46 is wound by the rounding process, so that the wound second tip portion 46 functions as the second contact portion 36 of the connector 30.

[Second inclined part]
The second inclined portion 461 is an inclined surface provided at the tip of the second tip portion 46. By winding the second tip portion 46 by the rounding process, the second inclined portion 461 functions as the second inclined contact portion 361 of the connector 30. The second inclined portion 461 is inclined at a predetermined angle (θ2 in the example of FIG. 2) with respect to the x direction.

[Manufacturing method of connector]
4 and 5 are explanatory views illustrating a method of manufacturing the connector 30 of the embodiment.
In FIG. 4A, first, the first tip portion 44 and the second tip portion 46 of the plate-shaped member 40 are rounded, and the first tip portion 44 having the first inclined portion 441 at the tip is wound. By doing so, the first contact portion 34 having the first inclined contact portion 341 at the tip is formed. Similarly, by winding the second tip portion 46 having the second inclined portion 461 at the tip, the second contact portion 36 having the second inclined contact portion 361 at the tip is formed.

Here, when the plate-shaped member 40 is wound to form the connector 30, it is desirable that the inclination directions of the first inclined contact portion 341 and the second inclined contact portion 361 are symmetrical (line symmetry). .. Therefore, when winding the first tip portion 44 and the second tip portion 46, the portions of the first inclined portion 441 and the second inclined portion 461 are wound in the same manner without being rounded. In other words, the first inclined contact portion 341 and the second inclined contact portion 361 of the connector 30 are formed while utilizing the inclination of the first inclined portion 441 and the second inclined portion 461. As a result, the first inclined contact portion 341 and the second inclined contact portion 361 become inclined surfaces.

In FIG. 4A, the upper arm portion 43 and the lower arm portion 45 are rounded and wound from the tip side of the upper arm portion 43 and the lower arm portion 45 toward the base end portions 431 and 451. I will go. For example, here, the case of winding counterclockwise in the plan view of FIGS. 4 and 5 will be illustrated. When winding the upper arm portion 43 and the lower arm portion 45, the central axes related to the winding are aligned or substantially the same. Further, the number of turns of the upper arm portion 43 and the lower arm portion 45 may be the same.

Further, since the upper arm portion 43 and the lower arm portion 45 have a tapered shape (tapered shape) from the base end portions 431 and 451 toward the tip end side, the upper arm portion 43 and the lower arm portion 45 are repeatedly wound. As a result, a part of the lower end portion of the inner member of the upper elastic portion 33 is covered with the upper end portion of the outer member, and a part of the upper end portion of the inner member of the lower elastic portion 35 is on the outer side. It is covered with the lower end portion of the member, and the upper elastic portion 33 and the lower elastic portion 35 are formed. In this way, the upper elastic portion 33 and the lower elastic portion 35 of the bamboo shoot spring structure are formed.

As shown in FIG. 4B, when the upper arm portion 43 and the lower arm portion 45 are wound up to the base end portions 431 and 451 to form the upper elastic portion 33 and the lower elastic portion 35, the upper elastic portion is further formed. The portion 33 and the lower elastic portion 35 are rounded, and the base end portions 431 and 451 of the upper elastic portion 33 and the lower elastic portion 35 are rolled into a tubular shape so as to be wrapped by the main body portion 42.

As shown in FIG. 5A, the base end portion 431 of the upper arm portion 43 extends from the position where the step portion 424 is provided from the upper corner portion 423, and the base end portion 451 of the lower arm portion 45 extends from the upper corner portion 423 to the position where the step portion 424 is provided. Since the lower corner portion 425 extends from the position where the step portion 426 is provided, the upper elastic portion 33 and the base end portions 431 and 451 of the lower elastic portion 35 are inside the tubular wound main body portion 42. It will be covered.

Then, as shown in FIG. 5B, when the remaining portion of the main body portion 42 is wound to form the tubular portion 32, the connector 30 is formed. In this way, since the connector 30 is formed by winding the plate-shaped member 40 made of the conductive material, the conductivity of the electric signal can be stabilized. The end portion of the main body portion 42 may be fixed to the surface of the inner main body portion 42. That is, in order to maintain the external structure of the tubular portion 32 formed by winding the main body portion 42, one or a plurality of points where the end portion of the main body portion 42 and the tubular portion 32 come into contact with each other are welded, for example. It may be fixed with an adhesive or the like. The method of fixing the outer structure of the tubular portion 32 is not limited to welding or adhesive, and may be caulked or the like.

[Electrical conduction path]
Next, the electrical conduction path in the connector 30 when an electrical signal is applied between the first contact object and the second contact object via the connector 30 of the first embodiment is defined. , Will be described with reference to the drawings.

FIG. 6 is a diagram illustrating a housing state and a state when a load is applied to the connector 30 of the first embodiment. The housing method and housing structure of the connector 30 are examples, and are not limited to the structure shown in FIG. FIG. 7 is an explanatory diagram illustrating a contact state between the first inclined contact portion and the contact terminal according to the first embodiment. FIG. 8 (A) is a diagram showing a configuration of the connector before deformation and a configuration in a plan view, and FIG. 8 (B) shows a configuration of the connector as a whole after deformation and a configuration in a plan view, and also shows electricity. It is explanatory drawing which explains the conduction path.

As shown in FIG. 6A, the electrical connection unit 15 is provided with a through hole 60 for inserting the connector 30. The connector 30 is inserted through the through hole 60, and the connector 30 is housed in the connector 30. The inner diameter of the through hole 60 is slightly larger than or similar to the outer diameter of the connector 30. Further, the inner diameter of the lower part of the through hole 60 is slightly smaller than the inner diameter of the upper part of the through hole 60, and a step 61 is provided on the inner surface of the through hole 60. The lower end portion 321 of the tubular portion 32 of the connector 30 inserted is supported by the step 61 on the inner surface of the through hole 60. The lower end portion 321 of the tubular portion 32 of the connector 30 has a flat end face, and is supported by the step 61, so that the inserted connector 30 is accommodated in a stable posture.

In FIG. 6B, the connector 30 inserted through the through hole 60 is in contact with the connection terminal 14a, which is the first contact target, and the pad 161a, which is the second contact target, and receives a load. Is shown. That is, the first contact portion 34 of the connector 30 and the connection terminal 14a come into contact with each other, the upper elastic portion 33 receives a compressive load, and the second contact portion 36 and the pad 161a come into contact with each other, so that the lower elastic portion 35 Is under a compressive load.

Since the upper elastic portion 33 and the lower elastic portion 35 at both ends of the connector 30 in the axial direction (vertical direction) are formed asymmetrically with each other, the upper elastic portion 33 and the lower elastic portion 35 are independently moved up and down. Has directional elasticity.

Since the base end portion 431 of the upper elastic portion 33 of the bamboo shoot spring structure is inside the tubular portion 32, the upper elastic portion 33 under load has the base end portion inside the tubular portion 32 as the end of the spring function. It will be elastic in the vertical direction. Similarly, the base end portion 451 of the lower elastic portion 35 is inside the tubular portion 32, and the loaded lower elastic portion 35 uses the base end portion 451 inside the tubular portion 32 as the end of the spring function. It will be elastic in the vertical direction. Then, since the tubular portion 32 can regulate the stroke of the upper elastic portion 33 and the lower elastic portion 35 that receive the load in the vertical direction, it is possible to prevent the upper elastic portion 33 and the lower elastic portion 35 from being damaged as a spring function. ..

Here, the contact surfaces of the connection terminal 14a and the pad 161a of FIG. 6A are flat surfaces. On the other hand, the first inclined contact portion 341 and the second inclined contact portion 361, which are the contact surfaces of the first contact portion 34 and the second contact portion 36, are inclined surfaces.

That is, the contact surface (surface) of the connection terminal 14a and the contact surface (first inclined contact portion 341) of the first contact portion 34 are relatively inclined and opposed to each other. In other words, in the example of FIG. 7A, the axial direction and straight line A of the connector 30 (hereinafter, also referred to as “central axis A”) and the normal line (line perpendicular to the surface) of the surface of the connection terminal 14a. However, the contact surface (surface) of the connection terminal 14a and the contact surface of the first contact portion 34 are different from each other so that the normal of the tip surface of the first contact portion 34 and the normal of the surface of the connection terminal 14a are different. The surface (first inclined contact portion 341) faces the surface. The relative relationship between the contact surface (surface) of the second contact portion and the contact surface (second inclined contact portion 361) of the second contact portion 36 is also the same.

As shown in FIGS. 7 (A) and 7 (B), the first inclined contact portion 341 of the first contact portion 34 comes into contact with the connection terminal 14a having a flat surface in an inclined state. Similarly, since the second inclined contact portion 361 of the second contact portion 36 is also an inclined surface, the second inclined contact portion 361 comes into contact with the pad 161a which is a flat surface in an inclined state.

Then, as shown in FIGS. 6B, 7B, and 8B, when the first inclined contact portion 341 and the second inclined contact portion 361 come into surface contact with the connection terminal 14a and the pad 161a, the first inclined contact portion 341 and the second inclined contact portion 361 come into surface contact with each other. Since the first contact portion 34 and the second contact portion 36 are tilted, a bending load acts, the entire connector 30 is slightly bent (deformed), and the upper elastic portion 33 and the lower elastic portion 35 are inside the tubular portion 32. It moves to the unidirectional side (for example, the right side of FIG. 6B) and makes electrical contact with the inner surface of the tubular portion 32. Further, in the upper elastic portion 33 and the lower elastic portion 35, the outer wall of the lower end portion of the inner member and the inner wall of the upper end portion of the outer member can be electrically contacted.

In other words, the first inclined contact portion 341 and the second inclined contact portion 361 can electrically contact the first contact target and the second contact target, the entire connector 30 is deformed, and the upper elastic portion 33 and the lower portion are deformed. The outer wall of the inner member of the elastic portion 35 and the inner wall of the outer member can be electrically contacted, and the upper elastic portion 33 and the lower elastic portion 35 can be electrically contacted with the inner surface of the tubular portion 32. That is, the constituent members of the connector 30 are closer to one side (the right side in FIG. 8B) and become denser, so that electrical contact is possible.

As described above, due to the deformation of the connector 30, each member of the upper elastic portion 33 and the lower elastic portion 35 is partially electrically contacted, and the upper elastic portion 33 and the lower elastic portion 35 are further brought into contact with each other on the inner surface of the tubular portion 32. The connector 30 is formed in a spiral shape by winding a plate-shaped member 40 because it is in electrical contact with the first contact object, and the electrical conduction path R is formed between the first contact object and the second contact object. It becomes a substantially straight path in the vertical direction between them (see FIG. 8 (B)).

More specifically, the electrical conduction path R is "connection terminal 14a" ⇔ "first inclined contact portion 341" ⇔ "contact point between the first contact portion 34 and the upper elastic portion 33" ⇔ "upper elastic portion 33". ⇔ "Cylindrical part 32" ⇔ "Contact point between members of lower elastic part 35" ⇔ "Contact point between lower elastic part 35 and second contact part 36" ⇔ "Second inclined contact" Part 361 ”⇔“ Pad 161a ”. Therefore, the electrical conduction path R is the shortest path between the first contact target and the second contact target via the connector 30.

Further, by adjusting the height lengths of the upper elastic portion 33 and the lower elastic portion 35 protruding from the tubular portion 32 in the vertical direction, the strokes of the upper elastic portion 33 and the lower elastic portion 35 when a load is applied can be adjusted. can do. In other words, since the movable stroke is large, the degree of urging force of the connector 30 can be widely set according to the degree of the contact load with the contact target.

Further, since the length (height) of the tubular portion 32 in the vertical direction does not change, the positioning of the connector 30 in the height direction can be ensured.

Further, since the upper elastic portion 33 and the lower elastic portion 35 function as bamboo shoot springs, the slidability of the upper elastic portion 33 and the lower elastic portion 35 that operate in the vertical direction under the load can be improved. That is, when the connector is formed of a plurality of components, a load acts between the plurality of components to have elasticity in the vertical direction, which may cause a sliding defect. However, since the connector 30 of this embodiment has a structure in which the number of component parts is reduced as compared with the conventional case, the slidability is improved.

(A-2) Effect of First Embodiment As described above, the electrical contactor (connector) of the first embodiment is composed of a smaller number of component parts than the conventional one, and therefore has slidability. And the electrical contact stability with the contact target can be improved.

Further, according to the first embodiment, the tips of the first contact portion and the second contact portion are the first inclined contact portion and the second inclined contact portion formed by the inclined surface, so that the electrical contactor is the first. When contacted with the first contact object and the second contact object, the entire electrical contactor is deformed, and the members constituting the upper elastic portion and the lower elastic portion of the bamboo child spring structure are in electrical contact with each other. Since the lower elastic portion extending over the upper elastic portion makes electrical contact with the inner surface of the tubular portion, the electrical conduction path through the electrical contact is shortened. As a result, the resistance value in the electrical conduction path is lowered, and the electrical conductivity is improved.

(B) Second Embodiment Next, a second embodiment of the electrical contactor and the electrical connecting device according to the present invention will be described in detail with reference to the drawings.

(B-1) Configuration of Second Embodiment FIG. 10 is a configuration diagram showing a configuration of a plate-shaped member before forming an electrical contactor of the second embodiment. FIG. 11 is a configuration diagram showing a configuration of an electrical contact according to a second embodiment.

As shown in FIG. 10, the plate-shaped member 40D of the second embodiment includes a main body portion 42D, an upper arm portion 43 extending diagonally upward to the left from the upper portion of the left end portion of the main body portion 42D, and an upper arm. The first tip portion 44 provided at the tip of the portion 43, the lower arm portion 45D extending diagonally downward to the right from the lower part of the right end portion of the main body portion 42D, and the first tip portion 45D provided at the tip of the lower arm portion 45D. It has two tip portions 46D.

Also in the second embodiment, the tip surface of the first tip portion 44 has a first inclined portion 441 formed of an inclined surface, and the tip surface of the second tip portion 46D is a second inclined portion 461D formed of an inclined surface. have.

In the plate-shaped member 40D of the second embodiment, the upper arm portion 43, the first tip portion 44 and the first inclined portion 441 provided at the tip of the upper arm portion 43 will be described in the first embodiment. Since it is the same as each component, it is given the same code.

The plate-shaped member 40D is, for example, a plate-shaped member made of precious metal or metal, or a plate-shaped member obtained by plating the surface of the plate-shaped member with precious metal or metal, as in the first embodiment. Yes, it is formed by punching a plate-shaped member. Further, for example, in the plate-shaped member 40D, the portion that comes into contact with the first contact object and / or the second contact object is a noble metal or the like, and the other portion is a member having excellent elasticity (for example, springiness) such as a bimetal. It may be formed.

The lower arm portion 45D is integrally connected to the opposite end portion (right end portion) facing the end portion (left end portion) provided with the upper arm portion 43 among the four side ends of the main body portion 42D. It extends diagonally downward to the right from the right end of the main body 42D.

Similar to the first embodiment, the lower arm portion 45D has a tapered shape (tapered shape) in which the width length in the vertical direction becomes smaller from the base end portion 451D on the main body portion 42D side toward the tip end side. Further, also in the second embodiment, as in the other embodiments, the base end portion 451D of the lower arm portion 45D is positioned below the base end portion 431 of the upper arm portion 43 with respect to the main body portion 42D. It extends in a staggered manner and extends from a position slightly above the lower corner 425D at the right end of the main body 42D. Here, a part of the left end portion of the main body portion 42D from the lower corner portion 425D to the base end portion 451D is referred to as a “step portion 426D”.

The second tip portion 46D is provided at the tip of the lower arm portion 45D and is a portion extending vertically downward.

The main body portion 42D is basically substantially rectangular as in the first embodiment, but the lower end portion 427 of the base end portion 431 of the upper arm portion 43 is the base end portion of the upper arm portion 43. It is located closer to the center of the main body 42D than the position of the step 424 on the upper side of the 431. Similarly, in the main body 42D, the upper end 428 of the base end 451D of the lower arm 45D is located closer to the center of the main body 42D than the position of the step 426D below the lower arm 45D. doing.

In this way, the positions of the lower end portion 427 of the upper arm portion 43 and the upper end portion 428 of the lower arm portion 45D are set closer to the central portion of the main body portion 42D, so that the electric contact 30D can be rounded. When forming the tubular portion 32, it is possible to avoid interference between the wound upper arm portion 43 (or lower arm portion 45D) and the end portion (opposing end portion) of the main body portion 42D facing the wound upper arm portion 43 (or the lower arm portion 45D). .. That is, the relief structure is formed by setting each position of the lower end portion 427 of the upper arm portion 43 and the upper end portion 428 of the lower arm portion 45D closer to the central portion of the main body portion 42D.

In the second embodiment, the winding direction of the upper arm portion 43 and the winding direction of the lower arm portion 45D are different from each other. For example, the winding direction of the upper arm portion 43 is counterclockwise in the plane view of FIG. 10, and the winding direction of the lower arm portion 45D is clockwise in the plane view of FIG.

First, the upper arm portion 43 is rounded and the upper arm portion 43 is wound counterclockwise, and the lower arm portion 45D is rounded and the lower arm portion 45D is wound clockwise.

Next, when the upper elastic portion 33 is wound around the upper arm portion 43 and the lower elastic portion 35D is formed by winding the lower arm portion 45D, the main body portion 42D is the center of the alternate long and short dash line (center line). The main body 42D is wound evenly from the left and right toward the surface. As a result, the electrical contactor 30D illustrated in FIG. 11 (A) is formed.

Here, a method of forming the tubular portion 32 will be described with reference to FIGS. 11 (A) and 11 (B). The base end portion 431 of the upper elastic portion 33 formed by winding the upper arm portion 43 is wound so as to be wrapped by the left side portion of the main body portion 42D to which the base end portion 431 is connected. That is, the base end portion 431 of the upper elastic portion 33 is wound inside the left side portion of the main body portion 42D. Similarly, the base end portion 451D of the lower elastic portion 35D formed by winding the lower arm portion 45D is wound so as to be wrapped in the right side portion of the main body portion 42D to which the base end portion 451D is connected. ..

In this way, the upper elastic portion 33 is wound around the left side portion of the main body portion 42D, and at the same time, the lower elastic portion 35D is wound around the right side portion of the main body portion 42D, and the left end portion and the right end portion of the main body portion 42D are wound. By matching (contacting), the tubular portion 32 is formed. That is, the upper elastic portion 33 is covered on the back side of the upper end portion 428 of the right end portion of the main body portion 42D so as to wrap around the upper elastic portion 33, and the lower elastic portion 35D is covered on the back side of the lower end portion 427 of the left end portion of the main body portion 42D. Cover it so that it wraps around. As a result, the electrical contactor 30D illustrated in FIG. 11B is formed. In FIG. 11B, the tubular portion 32 formed by the main body portion 42D exemplifies a structure in which the left end portion and the right end portion of the main body portion 42D are brought into contact with each other, but the present invention is not limited to this. ..

As illustrated in FIG. 11C, the left end portion and the right end portion of the main body portion 42D may be slightly separated from each other so as to face each other. Further, in FIGS. 11A to 11C, when the main body portion 42D is wound to form the tubular portion 32, the left side of the main body portion 42D is maintained in order to maintain the external structure of the tubular portion 32. It may be fixed to any one or more places on the end and / or the right end by welding, adhesive, or the like. For example, in FIG. 11 (B), the left end portion and the right end portion of the main body portion 42D are fixed at one or a plurality of places where they come into contact with each other, for example, by welding or an adhesive, or in FIG. 11C, the main body portion. Even if it is fixed to one or more places where the left end portion (and / or the right end portion) of the 42D and the end portion of the tubular portion 32 facing the left end portion (and / or the right end portion) of the 42D are in contact with each other, for example, by welding or adhesive. Good. The method of fixing the outer structure of the tubular portion 32 is not limited to welding or adhesive, and may be caulked or the like.

Since the upper arm portion 43 and the lower arm portion 45D extend so as to be displaced from each other in the height direction with respect to the main body portion 42D, the upper elastic portion 33 and the lower elastic portion 35D are wound so as to be wrapped by the main body portion 42D. Even if it is turned, the upper elastic portion 33 and the lower elastic portion 35D do not interfere with each other. As a result, the upper elastic portion 33 and the lower elastic portion 35D of the electrical contactor 30D have elasticity in the axial direction independently of each other.

In this way, by setting the winding directions of the upper arm portion 43 and the lower arm portion 45D to different directions, the first contact portion 34 comes into contact with the first contact target, and the second contact portion 36D becomes the second. It is possible to cancel the stress acting on the upper elastic portion 33 and the stress acting on the lower elastic portion 35D when the load is applied in contact with the contact object. Therefore, it is possible to reduce the rotational load generated at the contact point when the first contact portion 34 comes into contact with the first contact object and the contact point when the second contact portion 36D comes into contact with the second contact object.

Further, when the first inclined contact portion 341 of the first contact portion 34 comes into contact with the first contact object and the second inclined contact portion 361D of the second contact portion 36D comes into contact with the second contact object, the first implementation is performed. Similar to the embodiment, since the entire electrical contactor 30D is deformed, the constituent members of the upper elastic portion 33 and the lower elastic portion 35D can be electrically contacted on one side. Therefore, a substantially linear conduction path is formed between the first contact object and the second contact object, and the electrical conductivity is improved.

(B-2) Effect of Second Embodiment As described above, according to the second embodiment, the effect described in the first embodiment can be obtained, and the upper arm portion and the lower arm portion can be wound. By setting the directions to different directions, it is possible to cancel the stress acting on the upper elastic portion and the stress acting on the lower elastic portion, and it is possible to reduce the rotational load at the contact point.

(C) Third Embodiment Next, a third embodiment of the electrical contactor and the electrical connection device according to the present invention will be described in detail with reference to the drawings.

(C-1) Configuration of Third Embodiment FIG. 12 is a configuration diagram showing a configuration of a plate-shaped member before forming an electrical contactor of the third embodiment. FIG. 13 is a configuration diagram showing a configuration of an electrical contact according to a third embodiment.

As shown in FIG. 12, the plate-shaped member 40E of the third embodiment includes a main body portion 42E, an upper arm portion 43 extending diagonally upward to the left from the left end portion of the main body portion 42E, and an upper arm portion 43. The first tip portion 44 provided at the tip of the lower arm portion 44, the lower arm portion 45E extending diagonally downward to the right from the right end portion of the main body portion 42E, and the second tip portion 46E provided at the tip of the lower arm portion 45E. And have.

Also in the third embodiment, the tip surface of the first tip portion 44 has a first inclined portion 441 formed of an inclined surface, and the tip surface of the second tip portion 46E is a second inclined portion 461E formed of an inclined surface. have.

In the first and second embodiments, the plate-shaped members 40 and 40D have substantially rectangular main body portions 42 and 42D, and the plate-shaped members 40 and 40D are wound around the connector 30 and 30D. An example shows a case where the tubular portion 32 is formed when the tubular portion 32 is formed. The tubular portion 32 functions as a stopper that regulates the vertical strokes of the upper elastic portion 33 and the lower elastic portions 35 and 35D when the connector 30 and 30D are housing.

On the other hand, in the third embodiment, the plate member is wound so that the connector can be manufactured more easily. That is, by making the main body portion 43E, which had a substantially rectangular shape, into a band shape, the shape of the entire plate-shaped member 40E is also made into a band shape. Further, by forming the main body portion 43E into a band shape, the size of the entire plate-shaped member 40E and the electric contact 30E formed from the plate-shaped member 40E can be reduced in size.

As shown in FIG. 12, the plate-shaped member 40E of the third embodiment can be said to be an elongated plate-shaped member extending in an oblique direction. For example, in FIG. 12, the vertical width length of the main body portion 42E is the same as the vertical width length of the base end portion 431 of the upper arm portion 43 (or the base end portion 451E of the lower arm portion 45E). Although the case where the main body portion 42E is a parallelogram is illustrated, the shape of the main body portion 42E is not limited to FIG.

The winding direction of the upper arm portion 43 and the winding direction of the lower arm portion 45E are different from each other. For example, in the plan view of FIG. 12, the upper arm portion 43 may be wound counterclockwise, the lower arm portion 45E may be wound clockwise, and the like. Further, when the upper arm portion 43 and the lower arm portion 45E are wound to form the upper elastic portion 33 and the lower elastic portion 35E, for example, they may be formed by close contact winding. That is, a method of winding the upper arm portions 43 (or the lower arm portions 45E) with the same diameter may be used.

Then, for example, the upper arm portion 43 is wound, and the outer side of the base end portion 431 of the upper arm portion 43 is wound so as to be covered with the main body portion 42E. The portion 33 is formed. Similarly, the lower arm portion 45E is wound so as to cover the outside of the base end portion 451E of the lower arm portion 45 with the main body portion 42E, and as shown in FIG. 13, the lower elastic portion is inside the main body portion 42E. Part 35E is formed.

Here, the wound main body portion 42E is referred to as a connecting portion 32E that connects the upper elastic portion 33 and the lower elastic portion 35E. The connecting portion 32E of the electrical contactor 30E is located so as to cover the outside of both the upper elastic portion 33 and the lower elastic portion 35E of the bamboo shoot spring structure. Therefore, when the upper elastic portion 33 and the lower elastic portion 35E receive a compressive load, the upper elastic portion 33 and the lower elastic portion 35E independently have elasticity in the vertical direction in the axial direction.

Further, as in the second embodiment, by setting the winding directions of the upper arm portion 43 and the lower arm portion 45E to different directions, the first contact portion 34 comes into contact with the first contact target, and the second Contact portion 36E When a load is applied in contact with the second contact target, the stress acting on the upper elastic portion 33 and the stress acting on the lower elastic portion 35E can be canceled out. Therefore, it is possible to reduce the rotational load generated at the contact point when the first contact portion 34 comes into contact with the first contact object and the contact point when the second contact portion 36E comes into contact with the second contact object.

Further, as in the first and second embodiments, the first inclined contact portion 341 of the upper elastic portion 33 comes into contact with the first contact target, and the second inclined contact portion 361E of the second contact portion 36E is second. Since the entire electrical contactor 30E is deformed when it comes into contact with the contact target of the above, the constituent members of the upper elastic portion 33 and the lower elastic portion 35E can be electrically contacted on one side. Therefore, a substantially linear conduction path is formed between the first contact object and the second contact object, and the electrical conductivity is improved.

(C-2) Effect of Third Embodiment As described above, according to the third embodiment, the effects described in the first and second embodiments can be obtained, and the plate member is wound around. This makes it easier to manufacture the connector to be formed.

(D) Other Embodiments Although various modified embodiments have been mentioned in the above-mentioned first to third embodiments, the present invention can also be applied to the following modified embodiments.

(D-1) In the first to third embodiments, the case where the electric contact is applied to the connector 30 is illustrated as an example of the electric contact, but the electric contact of the present invention is not limited to this, and the electric contact of the present invention has a wiring pattern. It can be applied to a probe that electrically contacts a wiring terminal (for example, a first contact target) and an electrode terminal (for example, a second contact target) of an object to be inspected such as a semiconductor integrated circuit.

Further, in the first to third embodiments, there is a case where the tips of both the first contact portion and the second contact portion of the electric contact are inclined surfaces (first inclined contact portion, second inclined contact portion). Although illustrated, the contact portion of either the first contact portion or the second contact portion may be an inclined surface (inclined contact portion).

For example, when the electrical contactor of the present invention is applied to a probe that electrically contacts a wiring terminal having a flat contact surface and, for example, a hemispherical (hemispherical) electrode terminal, it contacts the hemispherical electrode terminal. The tip of the second contact portion is formed into a needle shape, for example, and the needle-shaped second contact portion is pierced into the surface of the hemispherical electrode terminal, while the tip of the first contact portion that comes into contact with the wiring terminal on the flat contact surface is inclined. It may be a surface (first inclined contact portion). In this case, the second contact portion that pierces the surface of the electrode terminal serves as an axis, and the first inclined contact portion comes into contact with the wiring terminal in an inclined state, so that the entire probe or a part of the component is bent (deformed). , The electrical conduction path is shortened and the electrical conductivity is improved. Of course, as described in the first embodiment, even if the tips of both the first contact portion and the second contact portion of the probe are inclined surfaces (first inclined contact portion, second inclined contact portion), they are electrically operated. Conductivity is improved.

(D-2) In the first to third embodiments, for example, the surface of the connection terminal 14a to be contacted first and the tip surface of the first contact portion 34 (first inclined contact portion 341) are relatively relative to each other. When tilted, that is, the normal direction of the surface of the connection terminal 14a to be contacted first and the normal direction of the tip surface of the first contact portion 34 (first tilted contact portion 341) are relatively different. The case was illustrated.

As an example of the modification, as illustrated in FIGS. 9 (A) and 9 (B), the connection terminal 14a as the first contact target is tilted (does not maintain horizontality), and the first The present invention can be applied even when the surface of the connection terminal 14a to be contacted and the tip surface (first inclined contact portion 341) of the first contact portion 34 are relatively inclined. That is, in the example of FIG. 9A, the normal on the surface of the connection terminal 14a and the central axis A of the connector 30 do not match. Even in this case, as in the first embodiment, when the first contact portion 34 comes into surface contact with the connection terminal 14a, the connector 30 is deformed, the electrical conduction path is shortened, and the same effect is obtained. Be done.

(D-3) The plate-shaped member before the formation of the electrical contact is not limited to the shape described in the first to third embodiments. For example, the plate-shaped member may have the following shape.

For example, the shape of the upper arm portion 43 of the plate-shaped member 40 in FIG. 2 may be an arc shape such as an arc shape or a bent shape. In this way, the upper elastic portion 33 formed by winding the upper arm portion 43 by forming the shape of the upper arm portion 43 into an arc-shaped curved shape or a bent shape and narrowing the width in the vertical direction is formed. The urging force in the vertical direction can be reduced (low load). That is, the contact load when the first contact portion 34 comes into contact with the first contact target can be reduced.

Further, for example, the width length of the tapered lower arm portion 45 in the vertical direction may be made thicker than that of the upper arm portion 43. By making the lower arm portion 45 thicker in this way, the lower elastic portion 35 formed by winding the lower arm portion 45 can increase the urging force in the vertical direction (high load). That is, the contact load when the second contact portion 36 comes into contact with the second contact target can be increased.

Further, for example, in the first embodiment, the case where the upper arm portion 43 and the lower arm portion 45 extend from the same end of the four side ends of the main body portion 42 has been illustrated. Not limited to. For example, the upper arm portion 43 extends diagonally upward to the left from the upper part of the left end portion of the main body portion 42, and the lower arm portion 45 extends diagonally downward to the right from the lower portion of the right end portion of the main body portion 42. It may be in shape.

Further, for example, the upper arm portion 43 extending from the main body portion 42 is hung from the base end portion 431 to the tip end side to be hollowed out to form one or a plurality of substantially trapezoidal slit portions. The lower arm portion 45 may be hollowed out from the base end portion 451 to the tip end side to form one or a plurality of substantially trapezoidal slit portions. The number, shape, etc. of the slits provided in the upper arm and / or the lower arm are not limited. In this way, by providing one or more slits in the upper arm portion and / or the lower arm portion, the load of the first contact portion and the second contact portion of the connector formed by winding the plate-shaped member is large. The vertical strokes of the upper elastic portion and the lower elastic portion can be adjusted.

(D-4) In order to maintain the external structure of the tubular portion exemplified in the above-described embodiment, it is fixed to an arbitrary portion of the tubular portion by a predetermined method (for example, welding, adhesive, etc.). You may.

(D-5) FIG. 14 is a configuration diagram showing a configuration of a plate-shaped member according to a modified embodiment. The plate-shaped member 40C of FIG. 14 is a modified example of the plate-shaped member for forming the electrical contactor 30D of the second embodiment of FIG. 11 (B). The difference between the plate-shaped member 40C of FIG. 14 and the plate-shaped member 40D of FIG. 12 is the inclination of the tip surface of the second tip portion 46D of the lower arm portion 45D.

In order for the electrical conduction path in the electrical contactor 30D to function effectively, the first inclination of the first contact portion 34 in the state of the finally created electrical contactor 30D in FIG. 11 (B). The inclined surfaces of the contact portion 341 and the second inclined contact portion 361D of the second contact portion 36D are line-symmetrical (for example, the first inclined contact portion 341 is diagonally upward to the right and the second inclined contact portion 361D is diagonally downward to the right). ) Is desirable.

However, when the electrical contact 30D is actually built, the upper arm portion 43 and the lower arm portion 45D are each wound to form the upper arm portion 43, but the winding numbers of the upper arm portion 43 and the lower arm portion 45D do not necessarily match. Not always. Therefore, the shape is not limited to the shape of the plate-shaped member 40D in FIG. 12, and as in the example of FIG. 14, the first inclined portion 441 of the first tip portion 44 of the upper arm portion 43 and the second tip of the lower arm portion 45D. The inclination of the second tip portion 461D of the portion 46D may be parallel or substantially parallel. If the inclination of the first inclined portion 441 and the second inclined portion 461D is parallel or substantially parallel, the shape is not limited to that shown in FIG.

(D-6) FIG. 15 is a configuration diagram showing a configuration of a plate-shaped member and an electrical contact according to a modified embodiment.

For example, the electrical contacts of the present invention may be applied to a probe or the like mounted on a socket such as a test socket used for electrical inspection of a packaged integrated circuit. In that case, the contact target of the electrical contactor may be a hemispherical shape such as a solder ball. Therefore, in this modified embodiment, an electrical contactor that can be used even when a solder ball or the like is a contact target will be described with reference to FIG.

As shown in FIG. 15B, the electrical contact 30A of the second embodiment has a first contact portion that contacts the tubular portion 32 and the connection terminal 14a of the wiring board 14 as the first contact target. A plurality of second parts 34, an upper elastic portion 33 elastically biased in the vertical direction when the first contact portion 34 comes into contact with the connection terminal 14a and receives a load, and a lower end portion 321 of the tubular portion 32. It has a contact portion 37.

As shown in FIG. 15A, the plate-shaped member 40A includes a main body portion 42, an upper arm portion 43, a first tip portion 44 provided at the tip of the upper arm portion 43, and a first tip portion 44. It has a large inclined portion 441 which is an inclined surface provided at the tip end, and a plurality of chevron protruding portions 47 which are chevron-shaped convex portions at the lower end portion 422 of the main body portion 42. The plate-shaped member 40A is, for example, a plate-shaped member made of precious metal or metal, or a plate-shaped member obtained by plating the surface of the plate-shaped member with precious metal or metal, as in the first embodiment. It is a member, and is formed by punching a plate-shaped member or the like. Further, for example, in the plate-shaped member 40A, the portion that comes into contact with the first contact object and / or the second contact object is a noble metal or the like, and the other portion is a member having excellent elasticity (for example, springiness) such as a bimetal. It may be formed.

The electrical contact 30A of FIG. 15 (B) is formed by subjecting the plate-shaped member 40A of FIG. 15 (A) to a molding process (rounding or the like) and winding the plate-shaped member 40A to roll it. To. When the plate-shaped member 40A is wound to form the electrical contact 30A, the lower end portion 321 and the second contact portion 37 of the tubular portion 32 function as a crown-shaped contact portion.

The manufacturing method of forming the electrical contactor 30A of FIG. 15B by rounding the plate-shaped member 40A of FIG. 15A is basically the same as that of the first embodiment. Since they are the same, detailed description of the manufacturing method will be omitted here.

In the examples of FIGS. 15A and 15B, the case where three chevron protrusions 47 are provided is illustrated, but the number of chevron protrusions 47 is not particularly limited, and two or four chevron protrusions 47 are provided. It may be the above. Further, the installation interval of the chevron protrusions 47 can be determined according to the size (outer shape) of the solder balls to be contacted.

The plurality of second contact portions 37 are provided as chevron-shaped convex portions (projections) on the lower end portion 321 of the tubular portion 32. With such a shape, the plurality of second contact portions (mountain-shaped protrusions 47) 37 and the lower end portion 321 of the tubular portion 32 can be electrically contacted with the solder ball 80, and the cylinder can be formed. By providing the second contact portion (angle-shaped protrusion 47) 37 at the lower end portion 321 of the shaped portion 32, the second contact portion (angle protrusion 47) 37 hits (pierces) the surface of the solder ball 80 to provide electrical contactability. You can be sure. Further, in the above-described example, the case where the second contact portion 37 as the chevron protrusion 47 is located at the lower end portion 321 of the tubular portion 32 has been illustrated, but the tubular portion 32 has a tubular portion 32 depending on the contact mode with the contact target. A second contact portion 37 as a chevron protrusion 47 may be provided at the upper end portion.

In this case, for example, a plurality of second contact portions 37 of the tubular portion 32 become shafts by electrically contacting the solder balls to be contacted, and the first inclined contact portion 341 is electrically connected to the wiring terminal in a tilted state. As a result, the entire probe or a part of the component is bent (deformed), the electrical conduction path is shortened, and the electrical conductivity is improved.

As described above, according to this modified embodiment, in addition to the effects described in the above-described embodiment, the contact target is a hemispherical object such as a solder ball, and the contact target is electrically connected to the contact target. Contactability can be ensured.

30, 30D and 30E ... Connector (electrical contactor), 32 ... Cylindrical part, 33 ... Upper elastic part, 34 ... First contact part, 341 ... First inclined contact part, 35, 35D and 35E ... Lower elastic part Parts, 36, 36D and 36E ... 2nd contact part, 361, 361D and 361E ... 2nd inclined contact part, 37 ... 2nd contact part,
40, 40A, 40D, 40C and 40E ... Plate-shaped members, 42, 42D and 42E ... Main body, 43 ... Upper arm, 44 ... First tip, 441 ... First inclined, 45, 45D and 45E ... Lower Arms, 46, 46D and 46E ... 2nd tip, 461, 461C and 461D ... 2nd inclined, 47 ... chevron, 421 ... upper end, 422 ... lower end, 423 ... upper corner, 424 ... step Parts, 425 and 425D ... Lower corners, 426 and 426D ... Steps, 431 ... Base end, 432 ... Tip, 451 ... Base end, 452 and 452D ... Tip.

Claims (10)

An electrical contact made of a conductive plate-like member.
The plate-shaped member includes a main body portion, a tapered upper arm portion extending obliquely upward from one end portion of the main body portion, a first tip portion provided at the tip of the upper arm portion, and the above. A tapered lower arm portion extending diagonally downward from one end of the main body portion and a second tip portion provided at the tip of the lower arm portion are provided.
A first contact portion that comes into contact with the first contact target, which is formed by winding the first tip portion,
A first elastic portion of a bamboo shoot spring structure formed by winding the upper arm portion and elastically elasticizing the first contact portion in the axial direction.
A second contact portion that comes into contact with the second contact target, which is formed by winding the second tip portion,
A second elastic portion of a bamboo shoot spring structure formed by winding the lower arm portion and elastically elasticizing the second contact portion in the axial direction.
The main body portion is wound to enable the elasticity of each of the first elastic portion and the second elastic portion, and a connecting portion for connecting the first elastic portion and the second elastic portion is provided.
The tip surface of the first contact portion that comes into contact with the first contact object and the tip surface of the second contact portion that comes into contact with the second contact object, or one of them, is an inclined surface. Characterized electrical contacts. The upper arm portion extends from one end of the main body portion, and the first elastic portion is formed by being wound in the first direction.
The lower arm portion extends from an opposing end portion of the main body portion with the upper arm portion extending so as to face the one end portion, and the second elastic portion is a second portion different from the first direction. The electrical contact according to claim 1, wherein the electric contact is formed by being wound in a direction. 2. The second aspect of the present invention is characterized in that the vertical width length of the main body portion of the plate-shaped member is about the same as the vertical width length of the base end portion of the upper arm portion and the lower arm portion. The electrical contacts described. The main body of the plate-shaped member has a rectangular shape.
Each arm portion extending from the end portion of the rectangular shape main body portion extends from a position separated from the corner portion of the end portion.
The base end portion of each elastic portion formed by winding each arm portion is covered with the inner surface of the main body portion formed by winding and tubular shape, and is included in the tubular main body portion. The electrical contact according to claim 1 or 2, characterized in that the contact is made. An electrical contact made of a conductive plate-like member.
The plate-shaped member includes a main body portion, a tapered upper arm portion extending diagonally upward from one end portion of the main body portion, a tip portion provided at the tip of the upper arm portion, and the main body portion. It is equipped with a plurality of chevron protrusions provided at the lower end of the
A first contact portion that comes into contact with the first contact target, which is formed by winding the tip portion,
An elastic portion of a bamboo shoot spring structure formed by winding the upper arm portion and elastically elasticating the first contact portion in the axial direction.
The main body portion is wound to accommodate the base end portion of the elastic portion inside, and the tubular portion that comes into contact with the second contact target together with the plurality of chevron protrusions at the lower end portion is provided.
An electrical contactor characterized in that the tip surface of the first contact portion that comes into contact with the first contact object is an inclined surface. An electric contact having a first contact object, a second contact object, and an electric contact that electrically contacts the first contact object and the second contact object is provided, and the electric contact is provided with the electric contact. An electrical connection structure for making an electrical connection between the first contact object and the second contact object.
The first contact portion in which the electrical contactor comes into contact with the first contact target, the first elastic portion of the bamboo child spring structure that elastically elasticizes the first contact portion in the axial direction, and the second contact target. The second contact portion that comes into contact, the second elastic portion of the bamboo child spring structure that elastically elasticizes the second contact portion in the axial direction, and the first elastic portion and the second elastic portion can each be elastic. It has a connecting portion that connects the first elastic portion and the second elastic portion, and has a connecting portion.
The front end surface of the first contact portion and / or the second contact portion and the surface of the first contact object and / or the second contact object are relatively inclined to face each other.
When the tip surface of the first contact portion and the surface of the first contact target come into contact with each other and the tip surface of the second contact portion and the surface of the second contact target come into contact with each other, the electrical contact is deformed. As a result, the electrical connection structure of the first elastic portion and the second elastic portion is characterized in that the outer wall of the inner member and the inner wall of the outer member can be electrically contacted with each other. The direction perpendicular to the tip surface of the first contact portion and / or the second contact portion and the direction perpendicular to the surface of the first contact object and / or the second contact object do not face each other. The electrical connection structure according to claim 6. The electricity according to claim 6 or 7, wherein the direction perpendicular to the surface of the first contact object and / or the surface of the second contact object is deviated from the axial direction of the electrical contactor. Connection structure. The first contact object is a wiring terminal, the second contact object is an electrode terminal of an object to be inspected, and the electrical contactor is electrically connected to the wiring terminal and the electrode terminal of the object to be inspected. The electrical connection structure according to any one of claims 6 to 8, wherein the probe is in contact with a target. In an electrical connection device including a plurality of electrical contacts that bring contact between a first contact object and a second contact object.
The electrical connection device according to any one of claims 1 to 5, wherein the plurality of electrical contacts are the electrical contacts according to any one of claims 1 to 5.

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