TWI823601B - Probe assembly - Google Patents

Abstract

The probe head includes: a body formed into a columnar shape with the first direction as the central axis and having a contact surface; and at least one contact portion located above the contact surface; the contact portion has a structure that is substantially perpendicular to the contact surface and A cross-section facing the central axis; the contact portion has an inclined surface with an inclination of less than 45 degrees to the first direction on the opposite side to the aforementioned cross-section; the aforementioned cross-section and the aforementioned inclined surface are used to contact the object to be measured during electrical testing .

Description

Probe assembly

The invention relates to a probe head and a method for manufacturing the probe head.

In the semiconductor manufacturing industry, electrical testing of semiconductor devices is required after completion of manufacturing to confirm the reliability of the semiconductor device and ensure that it can operate normally. During testing, a testing device and a testing socket are typically used to test the semiconductor device. The detection device includes pads, and the detection socket is used to connect the terminals of the semiconductor device to the pads of the detection device, thereby establishing an electrical connection between the terminals of the semiconductor device and the detection device for the exchange of electrical signals.

Usually, a probe array as a detection component is provided in the detection socket. The probe array includes a plurality of probe assemblies. Each probe assembly basically includes a probe head, an elastic member, an insert rod, and a probe head. Combined casing. As an example, FIG. 1 shows an exploded perspective view of a conventional probe assembly, which includes a probe head 91 , a sleeve 92 coupled with the probe head, a plunger 94 , and an elastic member 93 . As shown in FIG. 1 , the probe head 91 includes a body and a contact portion formed on one end of the probe head body. 911. As shown in FIG. 1 , the contact portion 911 of the conventional probe head 91 has a pyramid structure. As shown in FIG. 2 , when such a conventional probe head is used to detect a semiconductor device, the contact portion 911 of the probe head 91 will contact the object under test 19 with its cone tip.

In the past, in order to reduce the wear of the contact portion of the probe head and extend the service life of the probe head, the contact portion was usually made of materials with high hardness and high wear resistance (such as nickel or nickel alloy materials). On the other hand, a layer of oxide is usually formed on the surface of the object to be tested. During the detection process, the elastic member is deformed under pressure to generate the elastic force required by the probe. This elastic force will be transmitted to the contact part of the probe head, making the contact The part exerts a positive force on the object to be measured. Thereby, the contact portion can penetrate the oxide on the surface of the object to be measured to contact the object to be measured, and establish electrical signal exchange.

However, whenever the contact portion of the probe head comes into contact with the object to be measured, not only will destructive depressions and indentations be formed in the center or central area of the object to be measured, but debris generated during the contact will also remain. This destructive dent indentation will destroy the integrity of the object under test, resulting in poor packaging yield. In addition, debris remaining on the surface of the object to be tested will affect the consistency and reliability of the electrical testing results.

In addition, the contact portion of the conventional probe head generally forms a tapered tip, and the tip angle is usually greater than 60 degrees. When the probe tip is connected When the contact part contacts the object under test for inspection, the tip of the contact part is not easy to remove chips, and debris from the object under test is easily accumulated, resulting in excessive resistance and the risk of needle melting.

In view of the above problems, the object of the present invention is to provide a probe head and a manufacturing method of the probe head. When conducting electrical testing, it is not easy to damage the central area of the object to be tested, and it is easy to remove the debris generated during the testing. In addition to improving the packaging The yield of the manufacturing process can be achieved, and the consistency and reliability of electrical testing results can be achieved, and needle melting is less likely to occur.

The probe head of the present invention includes: a body formed into a columnar shape with the first direction as the central axis and having a contact surface; and at least one contact portion located on the aforementioned contact surface; the aforementioned contact portion has a structure approximately the same as the aforementioned contact surface. A cross-section that is perpendicular and faces the central axis; the contact portion has an inclined surface with an inclination of less than 45 degrees to the first direction on the opposite side to the aforementioned cross-section; the aforementioned cross-section and the aforementioned inclined surface are used for contact during electrical detection The object to be tested.

Furthermore, in the probe head of the present invention, the first contact portion further has a connecting surface connected to the inclined surface and substantially perpendicular to the contact surface.

Furthermore, the first contact portion has an extension portion that is in contact with the contact surface and extends toward the outer direction of the main body on the opposite side to the cross section.

Furthermore, in the probe head of the present invention, the extending portion Extend beyond the aforementioned ontology.

Furthermore, in the probe head of the present invention, the first contact portion has a cushion layer and a needle tip layer; and the needle tip layer has a hardness greater than a hardness of the cushion layer.

Moreover, in the probe head of this invention, the said body has a 1st body part, a 2nd body part, and a 3rd body part.

Furthermore, in the probe head of the present invention, the outer diameter of the second body part is larger than the outer diameters of the first body part and the third body part.

Furthermore, in the probe head of the present invention, the first body part, the second body part, and the third body part have a material with a conductivity greater than or equal to 30% of international annealed standard copper.

Furthermore, in the probe head of the present invention, the height of the contact portion is greater than 25 microns.

Furthermore, in the probe head of the present invention, the height of the contact portion is greater than 25 microns. The probe assembly of the present invention includes: a probe head; a sleeve; a plunger; and an elastic member; the body of the probe head is inserted into one end of the sleeve so that the probe head and the sleeve are coupled; the plunger The other end of the casing is inserted into the casing; the elastic member is provided in the casing and is between the probe head and the insertion rod.

The manufacturing method of the probe head of the present invention includes: forming at least one recessed portion on the release substrate; and the process of forming a conductive layer in the aforementioned recessed portion; the process of forming a photoresist layer on the aforementioned conductive layer and in the aforementioned recessed portion, and forming a hole in the aforementioned photoresist layer; the process of forming a tip layer in the aforementioned hole; in the aforementioned The process of filling the aforementioned holes on the needle tip layer to form a pad layer; the process of flattening the aforementioned pad layer in a manner aligned with the aforementioned photoresist layer; and the process of forming the aforementioned photoresist layer on the aforementioned photoresist layer and the aforementioned pad layer. resist layer, and the process of forming a recessed portion in the aforementioned photoresist layer; the process of filling the body layer of the aforementioned recessed portion; the process of planarizing the aforementioned body layer in a manner aligned with the aforementioned photoresist layer to form a probe head; and The process of peeling off the probe head from the release substrate.

Furthermore, in the method of manufacturing a probe head of the present invention, the body layer has a first body part, a second body part, and a third body part.

According to the probe head and the manufacturing method of the probe head provided by the present invention, it is not easy to damage the central area of the object under test when performing electrical testing, and it is easy to remove the debris generated during the testing. In addition to improving the yield of the packaging process, it can also It achieves the consistency and reliability of electrical testing results and is less likely to cause needle melting.

91:Probe head

92: Casing

94:Insert rod

93: Elastic component

911:Contact Department

1: Probe head

11: Contact surface

10:Ontology

12:First contact department

13:Second Contact Department

14:Third Contact Department

15:Fourth Contact Department

16: Needle tip layer

17:Building the upper floor

19:Object to be tested

121: Section

123:Extension

122: Incline

124:Connection surface

301: Release substrate

302: concave part

303:Conductive layer

304: Photoresist layer

305: Hole

306: needle tip layer

307:Building the upper floor

308: Depression

309:Ontology layer

101:First Ontology Department

102:Second body part

103:The third body part

[Figure 1] An exploded perspective view of a conventional probe assembly.

[Figure 2] A schematic diagram of a conventional probe head for testing a semiconductor device Figure.

[Fig. 3] The probe head of the first embodiment. FIG. 3A is a side view, FIG. 3B is a perspective view, and FIG. 3C is a plan view.

[Fig. 4] A probe head according to the second embodiment. FIG. 4A is a side view, FIG. 4B is a perspective view, and FIG. 4C is a plan view.

[Fig. 5] A probe head according to the third embodiment. FIG. 5A is a side view, FIG. 5B is a perspective view, and FIG. 5C is a plan view.

[Fig. 6] A probe head according to the fourth embodiment. FIG. 6A is a side view, FIG. 6B is a perspective view, and FIG. 6C is a plan view.

[Fig. 7] An example of a cross-sectional structural diagram of the probe head according to the first to fourth embodiments. 7A is an example of a cross-sectional structural view of the probe head of the first embodiment, FIG. 7B is an example of a cross-sectional structural view of the probe head of the second embodiment, and FIG. 7C is a cross-sectional structural view of the probe head of the third embodiment. An example of the figure, FIG. 7D is an example of a cross-sectional structural diagram of the probe head according to the fourth embodiment.

[Fig. 8] A probe head according to a first modification of the first embodiment. FIG. 8A is a side view, FIG. 8B is a perspective view, and FIG. 8C is a plan view.

[Fig. 9] A probe head according to a first modification of the second embodiment. FIG. 9A is a side view, FIG. 9B is a perspective view, and FIG. 9C is a plan view.

[Fig. 10] A probe head according to a first modification of the third embodiment. FIG. 10A is a side view, FIG. 10B is a perspective view, and FIG. 10C is a plan view.

[Fig. 11] A probe head according to a first modification of the fourth embodiment. FIG. 11A is a side view, FIG. 11B is a perspective view, and FIG. 11C is a plan view.

[Fig. 12] A schematic layout diagram of the contact portion in the first modification of the first to fourth embodiments. Figure 12A shows an asymmetric configuration, Figure 12B shows a configuration with different widths, Figure 12C shows a configuration with different heights, and Figure 12D shows a configuration with different shapes.

[Fig. 13] A probe head according to the second modification. FIG. 13A is a side view, FIG. 13B is a perspective view, and FIG. 13C is a plan view.

[Fig. 14] A probe head according to the third modification example. FIG. 14A is a side view, FIG. 14B is a perspective view, and FIG. 14C is a plan view.

[Fig. 15] A probe head according to the fourth modification example. FIG. 15A is a side view, FIG. 15B is a perspective view, and FIG. 15C is a plan view.

[Fig. 16] A manufacturing flow chart of the probe heads according to the first to fourth embodiments.

[Fig. 17] The manufacturing flow of the probe heads according to the first to fourth embodiments.

[Figure 18] The structure of the probe head body.

[Figure 19] Structure of the probe assembly.

In the following description, the same components or components with the same functions will be represented by the same symbols, and repeated descriptions will be omitted.

In addition, it should be noted that when this manual uses terms such as "perpendicular", "right angle", and "parallel", there are slight errors, and it does not mean "completely vertical", "completely right-angled", and "completely parallel".

In addition, the terms "first direction" and "third direction" used in the following explanation Although the "second direction" and "third direction" refer to the "Z direction", "Y direction", and "X direction", these directions can be arbitrarily transformed based on the orientation defined by the rectangular coordinates.

[First Embodiment]

3A to 3C show the probe head 1 with a single contact part according to the first embodiment of the present invention. The probe head 1 includes a main body 10 that is cylindrical with the first direction (Z direction) as the central axis and has a contact surface 11 , and a first contact portion 12 located above the contact surface 11 . The first contact portion 12 has a cross section 121 that is substantially perpendicular to the contact surface 11 and faces the central axis. In addition, this cross section 121 does not necessarily have to be a complete plane. The height of the first contact portion 12 is, for example, greater than 25 microns. In addition, the first contact portion 12 has a slope 122 at an angle θ with the first direction (Z direction) on the opposite side to the cross section 121 (that is, toward the outside of the body 10 ). The angle θ is, for example, less than 45 degrees, but a person with ordinary knowledge in the technical field can change the angle θ according to needs. Therefore, as shown in FIG. 3A , when the first contact portion 12 is viewed from the second direction (Y direction), the first contact portion 12 will be substantially triangular in shape. However, it should be noted that the triangle is not necessarily a perfect triangle and may have some errors. A person with ordinary knowledge in the technical field may also change the shape as needed. Next, as shown in FIG. 3A , the cross section 121 and the inclined surface 122 are used to contact the object 19 during electrical testing. Specifically, during electrical testing, the cross section 121 and the inclined surface 122 will contact the far side of the object 19 under test. Sides away from the central area. That is, the cross section 121 and the inclined surface 122 do not directly contact the center of the object 19, but contact the object 19 from the side. This is because the first contact portion 12 is not a tapered tip, but has a smaller angle. When electrical detection is performed, the detection position will be far away from the center of the object 19 . Therefore, the first contact portion 12 will not form destructive concave indentations in the center or central area of the object under test 19 , thereby improving the product yield of subsequent packaging.

In addition, although FIGS. 3A to 3C show the cross-section 121 being perpendicular to the contact surface 11 , the cross-section 121 is not necessarily perpendicular to the contact surface 11 , and there may be some errors. In addition, those skilled in the art can change the angle between the cross section 121 and the contact surface 11 as needed.

In addition, because the first contact portion 12 has an incline 122 less than 45 degrees with the first direction (Z direction) and a cross section 121 perpendicular to the contact surface 11 , the test object 19 is generated when the first contact portion 12 contacts the object 19 . The debris of the body 19 will be eliminated along the slope 122 and the cross section 121, and will not easily accumulate at the tip of the first contact portion 12, thereby reducing the risk of excessive resistance and needle melting.

[Second Embodiment]

Next, FIGS. 4A to 4C show the probe head 1 with a single contact part according to the second embodiment of the present invention. As shown in FIGS. 4A to 4C , the first contact portion 12 also has a connection surface 124 connected to the inclined surface 122 and substantially perpendicular to the contact surface 11 . In addition, the connection surface 124 is not necessarily a complete plane. As shown in the side view of Figure 4A, from the second direction (Y direction) When observing the first contact portion 12 , the first contact portion 12 has a trapezoidal shape with a cross section 121 parallel to the connecting surface 124 . However, it should be noted that the trapezoid is not necessarily a perfect trapezoid (that is, the cross section 121 and the connecting surface 124 may not be completely parallel), and there may be some errors. Those with ordinary knowledge in the technical field may also change the shape as needed. Therefore, because the length of the inclined surface 122 is shorter and has the approximately vertical connection surface 124 and the cross-section 121, the space for the debris to escape is larger or the length of stay is shorter, so the debris excluded from the inclined surface 122 and the cross-section 121 The debris of the object to be measured 19 is more likely to break away from the surface of the first contact portion 12 .

[Third Embodiment]

Next, FIGS. 5A to 5C show the probe head 1 with a single contact part according to the third embodiment of the present invention. As shown in FIGS. 5A to 5C , the first contact portion 12 has an extension portion 123 that contacts the contact surface 11 and extends toward the outer direction of the body 10 on the opposite side to the cross section 121 . In this way, as shown in the side view of FIG. 5A , when the first contact portion 12 is viewed from the second direction (Y direction), the first contact portion 12 will have a shape in which triangles are stacked on a rectangular base. However, it should be noted that the rectangles and triangles are not necessarily perfect rectangles and triangles, and there may be slight errors. Those with ordinary knowledge in the technical field may also change the shapes according to their needs. The extension portion 123 increases the contact area with the contact surface 11 , making the connection between the first contact portion 12 and the contact surface 11 more stable, making the first contact portion 12 less likely to fall off from the body 10 .

[Fourth Embodiment]

6A to 6C show a probe head 1 with a single contact part according to the fourth embodiment of the present invention. As shown in FIG. 6 , when viewed from the first direction (Z direction) toward the contact surface 11 , the extension portion 123 extends out of the body 10 . In addition, the length of the extension portion 123 extending beyond the body 10 can be freely adjusted by a person with ordinary skill in the art according to his or her needs. Thereby, when assembling the probe head 1 , the extension portion 123 extending out of the body 10 can be used as a reference for alignment, alignment, and placement.

In the probe head 1 of the first to fourth embodiments described above, the first contact portion 12 is formed of a single material. However, as shown in FIGS. 7A to 7D , the first contact portion 12 of the probe head 1 of the above-described first to fourth embodiments may be formed of at least the pad layer 17 and the tip layer 16 . The hardness of the needle tip layer 16 is greater than the hardness of the cushion layer 17 , but the hardness of the cushion layer 17 may be greater than the hardness of the needle tip layer 16 . Because the needle tip layer 16 is used to contact the object to be measured 19, using a material with greater hardness can reduce the wear and tear on the tip of the probe head 1 and increase the service life. Wherein, it suffices to form the cushion layer 17 and the needle tip layer 16 sequentially from the contact surface 11 toward the first direction (Z direction). When viewed from the second direction (Y direction), the contact surface of the cushion layer 17 and the needle tip layer 16 can be The horizontal plane may also be an inclined plane, and a person with ordinary knowledge in this technical field can adjust it as needed. In addition, the thickness of the cushion layer 17 and the thickness of the needle tip layer 16 can also be freely adjusted according to needs.

In addition, the probe heads of the first to fourth embodiments described above are only exemplified for ease of understanding, and those skilled in the art can arbitrarily adjust or combine the various configurations of the first to fourth embodiments. .

[First modification]

8A to 8C show a probe head 1 with double contact parts according to a first modification of the present invention. As shown in FIGS. 8A to 8C , the probe head 1 also has a second contact portion 13 located above the contact surface 11 . As shown in FIG. 8C , when viewed from the first direction (Z direction), the first contact portion 12 and the second contact portion 13 are symmetrically arranged in the third direction (X direction), and the cross section of the first contact portion 12 is the same as that of the second contact portion 13 . The cross-sections of the two contact parts 13 are opposite in the second direction (Y direction) and face the central axis. As shown in FIG. 8A , the first contact part 12 and the second contact part 13 form an accommodation space with the contact surface 11 . During electrical detection, the first contact part 12 and the second contact part 13 contact the object to be measured. 19, so that a part of the object 19 is located in the accommodation space. That is to say, the first contact part 12 and the second contact part 13 do not directly contact the center of the object 19, but encircle and contact the object 19 from the sides. In this way, the number of objects under test 19 that are contacted can be increased, and the objects under test 19 can be contacted at different directions for detection, thereby reducing the contact resistance when the probe contacts the object under test 19 and reducing the needle melting situation, in which the contact portion Arranging them in opposite directions has a more stable detection effect. Moreover, even if one of the first contact part 12 and the second contact part 13 is damaged, the other contact part can be used for inspection. Test.

In addition, the first contact portion 12 and the second contact portion 13 shown in FIGS. 8A to 8C are similar to the shapes of the first contact portion in the first embodiment (FIG. 3). However, the first contact portion 12 in the first modification example The second contact portion 13 is not limited to the shape of the first contact portion in the first embodiment. For example, the first contact portion 12 and the second contact portion 13 shown in FIGS. 9A to 9C compare with the shape of the first contact portion in the second embodiment (FIG. 4). The first contact portion 12 and the second contact portion 13 shown in FIGS. 10A to 10C compare with the shape of the first contact portion in the third embodiment (FIG. 5). The first contact portion 12 and the second contact portion 13 shown in FIGS. 11A to 11C compare with the shape of the first contact portion in the fourth embodiment (FIG. 6).

In addition, the first contact portion 12 and the second contact portion 13 of the various probe heads 1 of the above-mentioned first modification example may also have at least the cushion layer 17 and the tip layer 16, which will not be described in detail here.

In addition, the first contact portion 12 and the second contact portion 13 in the first modification example may be asymmetric. Specifically, as shown in FIG. 12A , the first contact part 12 and the second contact part 13 are not symmetrical about the central axis of the body 10 , that is, the distance between the first contact part 12 and the central axis of the body 10 may also be different from the first contact part 12 and the second contact part 13 . The distance between the two contact parts 13 and the central axis of the body 10. Among them, the first contact part 12 contacts the relative center position of the object to be measured 19, which can ensure electrical exchange. On the other hand, the second contact portion 13 contacts the opposite outer side of the object 19, which can enhance the electrical stability and reduce detection traces and traces in the center area of the object 19. Debris is generated. In addition, as shown in FIG. 12B , the width of the first contact portion 12 may also be different from the width of the second contact portion 13 . When the widths of the two contact portions are different, the debris can be directed to a pre-designed chip removal direction. Furthermore, as shown in FIG. 12C , the height of the first contact part 12 may also be different from the height of the second contact part 13 . During detection, the first contact part 12 and the second contact part 13 are located on both sides of the center of the object 19, and the distance between the first contact part 12 and the center of the body 10 is equal to the distance between the second contact part 13 and the center of the body 10. The distance is different, and the height of the first contact part 12 and the height of the second contact part 13 are also different, so that the time points when the first contact part 12 and the second contact part 13 contact the object to be measured 19 are different, so that when performing detection, The first contact part 12 and the second contact part 13 will have different sizes of detection marks produced on the object to be measured 19, which can increase the detection life of the probe. Finally, as shown in FIG. 12D , the shape of the first contact part 12 may be different from the shape of the second contact part 13 . For example, the first contact part 12 adopts the shape of the first contact part in the first embodiment, and the second contact part 13 adopts the shape of the first contact part 13 in the first embodiment. The portion 13 may adopt the shape of the first contact portion of the second embodiment. Those skilled in the art can change the layout, height, width, and shape of the first contact portion 12 and the second contact portion 13 as needed.

[Second modification]

Next, FIGS. 13A to 13C show a probe head 1 with double contact portions according to a second modification of the present invention. As shown in Figures 13A~C, the probe head 1 also has a second contact portion 13 located above the contact surface 11. The difference between the second modification example and the first modification example lies in the arrangement position of the second contact portions 13 . As shown in FIG. 13C , when viewed from the first direction (Z direction), the first contact portion 12 and the second contact portion 13 are symmetrically arranged in the second direction (Y direction). As shown in FIG. 13A , during electrical detection, the first contact part 12 and the second contact part 13 do not directly contact the central area of the object under test 19 , but contact the object under test 19 from different positions on the side. Compared with the single contact part (Figure 3A~C), the electrical connection is more stable during detection.

In addition, the first contact portion 12 and the second contact portion 13 shown in FIGS. 13A to C are similar to the shapes of the first contact portion in the first embodiment (FIG. 3). However, the first contact portion 12 and the second contact portion 13 have different shapes. 13. It may also be the shape of the first contact portion in the second to fourth embodiments, which will not be described in detail here.

In addition, the first contact portion 12 and the second contact portion 13 of the various probe heads 1 of the above-mentioned second modification example may also have at least the cushion layer 17 and the tip layer 16, which will not be described in detail here.

In addition, those skilled in the art can also change the layout, height, width, and shape of the first contact portion 12 and the second contact portion 13 of the second modification according to their needs, which will not be described in detail here.

[Third modification]

Next, FIGS. 14A to 14C show a probe head 1 having four contact parts according to a third modification of the present invention. As shown in Figures 14A to 14C, the probe head 1 also has a second contact portion 13 and a third contact portion located above the contact surface 11. The third contact part 14 and the fourth contact part 15. As shown in FIG. 14C , when viewed from the first direction (Z direction), the first contact portion 12 and the second contact portion 13 are symmetrically arranged in the third direction (X direction), and the third contact portion 14 and the fourth contact portion 15 are symmetrically arranged in the third direction (X direction), and the first contact portion 12 and the third contact portion 14 are symmetrically arranged in the second direction (Y direction), and the second contact portion 13 and the fourth contact portion 15 are in the third direction (Y direction). Arranged symmetrically in two directions (Y direction). That is, in the third modification, the cross section of the first contact part 12 and the cross section of the second contact part 13 are opposite in the third direction (X direction), and the cross section of the third contact part 14 and the fourth contact part 15 are opposite to each other in the third direction (X direction). The sections face each other in the third direction (X direction). Of course, the above-mentioned contact portions may also be arranged asymmetrically. In addition, as shown in FIG. 14A , the first contact part 12 , the second contact part 13 , the third contact part 14 and the fourth contact part 15 form an accommodation space with the contact surface 11 . When performing electrical detection, The first contact part 12 , the second contact part 13 , the third contact part 14 and the fourth contact part 15 contact the object to be measured 19 so that a part of the object to be measured 19 is located in the accommodation space. That is to say, the first contact part 12 , the second contact part 13 , the third contact part 14 and the fourth contact part 15 do not directly contact the central area of the object under test 19 , but from four sides of the object under test 19 The body under test 19 is surrounded and contacted at different positions. In this way, the object to be measured 19 can be covered in the accommodation space, making the contact stable and increasing the detection success rate. Moreover, even if one of the first contact part 12, the second contact part 13, the third contact part 14, and the fourth contact part 15 is damaged, it can still be used. He contacted the ministry for testing.

In addition, the first contact portion 12, the second contact portion 13, the third contact portion 14, and the fourth contact portion 15 shown in FIGS. 14A to C are compared with the first contact portion of the first embodiment (FIG. 3). shape, but the first contact part 12, the second contact part 13, the third contact part 14, and the fourth contact part 15 may also have the shape of the first contact part in the second to fourth embodiments, which will not be repeated here. Elaborate.

In addition, the first contact portion 12, the second contact portion 13, the third contact portion 14, and the fourth contact portion 15 of the various probe heads 1 of the third modification example also have at least the cushion layer 17 and the tip layer 16. Okay, no more details here.

In addition, those skilled in the art may also change the layout, height, and width of the first contact portion 12 , the second contact portion 13 , the third contact portion 14 , and the fourth contact portion 15 of the third modification as needed. , shape will not be described in detail here.

[Fourth modification]

Next, FIGS. 15A to 15C show a probe head 1 having four contact parts according to a fourth modification of the present invention. As shown in FIGS. 15A to 15C , the probe head 1 also has a second contact portion 13 , a third contact portion 14 , and a fourth contact portion 15 located above the contact surface 11 . As shown in FIG. 15C , when viewed from the first direction (Z direction), the first contact portion 12 and the second contact portion 13 are symmetrically arranged in the third direction (X direction), and the third contact portion 14 and the fourth contact portion are arranged symmetrically in the third direction (X direction). 15 are arranged symmetrically in the second direction (Y direction) List. The difference between the fourth modification and the third modification is that the cross section of the first contact part 12 and the second contact part 13 are opposite in the third direction (X direction), and the cross section of the third contact part 14 is opposite to the fourth The cross-sections of the contact portions 15 are opposite in the second direction (Y direction), and the line connecting the first contact portion 12 and the second contact portion 13 intersects with the line connecting the third contact portion 14 and the fourth contact portion 15 at the center of the body 10. In addition, the cross sections of the first contact part 12 , the second contact part 13 , the third contact part 14 and the fourth contact part 15 all face the central axis. As shown in FIG. 15A , the first contact part 12 , the second contact part 13 , the third contact part 14 and the fourth contact part 15 form an accommodation space with the contact surface 11 . When performing electrical detection, the first contact part 14 and the fourth contact part 15 form an accommodation space. The contact part 12, the second contact part 13, the third contact part 14, and the fourth contact part 15 contact the object to be measured 19, so that a part of the object to be measured 19 is located in the accommodation space. That is to say, the first contact part 12 , the second contact part 13 , the third contact part 14 and the fourth contact part 15 do not directly contact the center of the object to be measured 19 , but from the front, rear, left and right sides of the object to be measured 19 The body under test 19 is contacted at different positions. Even if the distribution position of the body under test 19 is offset and not completely in a straight line with the center of the probe, the electrical exchange between the body under test 19 and the contact parts will not be affected, and the number of contact parts will increase. to four. Since each plane toward the center is a discontinuous plane that is approximately a vertical contact surface, there can be a larger accommodation space between the contact part and the object to be measured 19. Therefore, the debris of the object to be measured 19 can be It is eliminated by the inclined surfaces of each contact part and the accommodation space. Moreover, even if the first contact portion 12 and the second contact portion 13. If one of the third contact part 14 and the fourth contact part 15 is damaged, the other contact part can also be used for detection.

In addition, the first contact part 12, the second contact part 13, the third contact part 14, and the fourth contact part 15 shown in FIGS. 15A to 15C are compared with the first contact part of the first embodiment (FIG. 3). shape, but the first contact part 12, the second contact part 13, the third contact part 14, and the fourth contact part 15 may also have the shape of the first contact part in the second to fourth embodiments, which will not be repeated here. Elaborate.

In addition, the first contact portion 12, the second contact portion 13, the third contact portion 14, and the fourth contact portion 15 of the various probe heads 1 of the fourth modification example also have at least the cushion layer 17 and the tip layer 16. Okay, no more details here.

In addition, those skilled in the art may also change the layout, height, and width of the first contact portion 12 , the second contact portion 13 , the third contact portion 14 , and the fourth contact portion 15 of the fourth modification according to their needs. , shape will not be described in detail here.

Finally, although the first to fourth modification examples above show the probe head 1 with two and four contact parts respectively, the number and arrangement of the contact parts are not limited, and those skilled in the art can freely change the contact parts. The number and arrangement of parts.

[Probe head manufacturing method]

Hereinafter, a method of manufacturing the probe head according to the first embodiment of the present invention will be described. Referring to Figures 16 and 17, the exploration of the first embodiment The manufacturing method of the needle adopts micro-electromechanical process and has the following engineering.

First, at least one recess 302 is formed in the release substrate 301 (S01). The shape, size, quantity, and position of the recessed portions 302 can be adjusted arbitrarily according to the shape, size, quantity, and position of the contact portion to be formed. In addition, the method of forming the recessed portion 302 is usually through etching, but is not limited thereto.

Next, the conductive layer 303 is formed on the release substrate 301 and in the recessed portion 302 (S02). The conductive layer 303 is used to form a metal layer thereon in subsequent processes. In addition, the method of forming the conductive layer 303 is usually through sputtering, but is not limited thereto.

Next, a photoresist layer 304 is formed on the conductive layer 303 and in the recess 302, and a hole 305 is formed in the photoresist layer 304 (S03). As mentioned above, the shape, size, quantity, and position of the holes 305 can be adjusted arbitrarily according to the shape, size, quantity, and position of the contact portion to be formed. In addition, the method of forming the photoresist layer 304 is usually spin coating, but is not limited thereto. In addition, the method of forming the hole portion 305 is usually through photolithography, but is not limited thereto.

Next, the tip layer 306 is formed in the hole portion 305 (S04). The material of the tip layer 306 will be described later. In addition, the method of forming the tip layer 306 is usually through electroplating, but is not limited thereto. In addition, when the pad layer is not formed, the tip layer corresponds to the contact portion.

Next, fill the holes 305 on the needle tip layer 306 to form a pad. High-rise 307. Among them, if the cushion layer 307 is not needed, the hole portion 305 can be directly filled with the needle tip layer 306 in (S04). In addition, the method of forming the pad layer 307 is usually through electroplating, but is not limited thereto.

Next, the pad layer 307 is planarized in a manner aligned with the photoresist layer 304 ( S06 ). Among them, the planarization method usually uses grinding method, but it is not limited to this. In addition, when the pad layer 307 is not formed, the tip layer 306 is planarized.

Next, a photoresist layer 304 is formed on the photoresist layer 304 and the pad layer 307, and a recessed portion 308 is formed in the photoresist layer 304 (S07). The shape of the recessed portion 308 can be adjusted arbitrarily according to the desired shape of the body 10 . In addition, the method of forming the photoresist layer 304 is usually spin coating, but is not limited thereto. In addition, the method of forming the recessed portion 308 is usually through photolithography, but is not limited thereto.

Next, the recessed portion 308 is filled to form the body layer 309 (S08). Among them, the body layer 309 will become the body 10 . In addition, the method of filling the body layer 309 is usually through electroplating, but it is not limited to this.

Next, the body layer 309 is planarized in a manner aligned with the photoresist layer 304 to form a probe head (S09). Among them, the planarization method usually uses grinding method, but it is not limited to this.

Finally, the probe head is peeled off from the release substrate 301 (S10). Thereby, the probe head of the first embodiment can be formed.

On the other hand, although the formation of the probe head having a single contact portion in the first embodiment has been described above, if it is desired to form the probe head having a plurality of contact portions in the first modification, it is only necessary to perform the process of forming the recessed portion 302 ( S01 ), the plurality of recessed portions 302 may be formed, and the plurality of hole portions 305 may be formed in the step of forming the hole portions 305 ( S04 ). In addition, those skilled in the art can freely adjust the number, position, and arrangement of the recessed portions 302 and the hole portions 305 according to the number and arrangement of the contact portions.

Moreover, the body layer has a first body part, a second body part, and a third body part.

[Contact part material]

Hereinafter, materials for each contact portion of the probe heads of the above-described embodiments and modifications will be described. In addition, in the following description, for convenience, the first and second contact parts are collectively referred to as "contact parts". In addition, if the contact part is formed by the tip layer and the cushion layer, in the following description of the material of the contact part, the "contact part" can be read as the "tip layer".

In the above embodiments and modifications, because the contact portion contacts the object to be measured with a cross section that is approximately perpendicular to the contact surface, the friction between the tip of the contact portion and the object to be measured is reduced, thereby improving the wear resistance of the contact portion. In other words, when the contact part has better or the same wear resistance, it can be made of a material with a lower hardness than nickel or nickel alloy, and has functions other than wear resistance, thereby satisfying a more diverse range of applications. Testing requirements.

In more detail, without reducing the wear resistance of the contact portion, the contact portion can be changed from nickel or nickel alloy material with high wear resistance to palladium or palladium alloy material with lower wear resistance. Palladium or palladium alloy materials not only have the property of not sticking to the object to be measured, but also have no magnetic attraction effect of nickel or nickel alloy materials, which can meet the needs of high-frequency detection. Therefore, a contact portion with wear resistance and high frequency is formed, which can meet the detection requirements of wear resistance and high frequency at the same time.

Furthermore, the contact portion may have a hardness of 500 Vickers hardness (Hv) or greater than 500 Vickers hardness. The contact part may include nickel or nickel alloy, and the nickel alloy may include at least one alloying element from the following group in addition to nickel (Ni): iron (Fe), tungsten (W), copper (Cu), Boron (B), carbon (C), cobalt (Co), silver (Ag), manganese (Mn), palladium (Pd), and rhodium (Rh).

In addition, the contact portion may also include palladium or a palladium alloy, and the palladium alloy may include, in addition to palladium (Pd), at least one alloying element from the following group: nickel (Ni), molybdenum (Mo), copper ( Cu), indium (In), carbon (C), cobalt (Co), silver (Ag), and manganese (Mn).

[Probe head body]

Hereinafter, the structure of the main body 10 of the probe head will be described. As shown in FIG. 18 , the body 10 usually has a first body part 101 , a second body part 102 , and a third body part 103 laminated in sequence. The contact surface 11 is formed on the first body part 101 .

In addition, the hardness of the first body part 101 is greater than or equal to the hardness of the contact part. In other words, the first body part 101 has a relatively strong rigid structure, which can reduce the mechanical impact of the contact part during the detection operation and provide a relatively stable contact electrical signal. Of course, the hardness of the first body part 101 may also be smaller than the hardness of the contact part. In this embodiment, the first body portion has a Vickers hardness of about 700 to 1200.

In addition, the first body part 101, the second body part 102 and the third body part 103 are made of materials with a conductivity greater than or equal to 30% of the international annealed standard copper, thereby providing better conductivity when riveted with pipe fittings. .

In addition, the outer diameter of the second body part 102 is larger than the outer diameters of the first body part 101 and the third body part 103, thereby forming a flange. Through the flange structure, the first body part 101 and the third body part 103 can form a limiting space that can firmly limit the second body part 102 . For example, when the probe head 1 is riveted to one end of the hollow pipe of the probe assembly, the hollow pipe can be deformed and recessed in the limiting space of the first body part 101 and the third body part 103 to limit the probe. The head 1 moves relative to the hollow pipe and is riveted to the hollow pipe.

In addition, although the main body 10 is shown to have a cylindrical structure in the figure, the main body 10 may also be in the shape of an angular column, or a polygonal prism such as a triangular prism, a quadrangular prism, a pentagonal prism, etc., and a person of ordinary skill in the technical field may make any configuration. The shape of the main body 10 is changed.

[Probe assembly]

Next, the probe assembly of the present invention will be described. As shown in FIG. 19 , the probe assembly of the present invention includes the probe head 1 of any of the above embodiments or modifications, a sleeve 92 , a plunger 94 , and an elastic member 93 . The body of the probe head 1 is inserted into one end of the cannula 92 so that the probe head 1 is coupled with the cannula 92 , and the insertion rod 94 is inserted into the other end of the cannula 92 . In addition, the elastic member 93 is provided in the sleeve 92 and between the probe head 1 and the plunger 94 .

As above, embodiments and examples of the probe head of the present invention have been described with reference to the drawings. However, it should be noted that this does not mean that the present invention is limited to the features and structures described above and shown in the drawings. The above-mentioned embodiments and examples are only examples, and a person with ordinary knowledge in the technical field can change the contents of the above-mentioned embodiments and examples and combine them with each other. All other possible changes and combinations of the present invention fall within the scope of the present invention as defined by the patent application and its equivalents.

1: Probe head

11: Contact surface

10:Ontology

12:First contact department

19:Object to be tested

121: Section

122: Incline

Claims (9)

A probe assembly, including: a probe head; a sleeve; a plunger; and an elastic member; the body of the probe head is inserted into one end of the sleeve so that the probe head is coupled with the sleeve; the plunger is inserted into the sleeve The other end of the tube; the elastic member is provided in the sleeve and is between the probe head and the plunger; wherein the probe head includes: a columnar shape with the first direction as the central axis, and The body having a contact surface; and at least one contact portion located on the aforementioned contact surface; the aforementioned contact portion has a cross-section that is substantially perpendicular to the aforementioned contact surface and faces the aforementioned central axis; the aforementioned contact portion is at a distance from the aforementioned cross-section. The opposite side has the same An inclined plane with an inclination of less than 45 degrees in one direction; the aforementioned cross section and the aforementioned inclined plane are used to contact the aforementioned object under test from the side away from the center of the object under test during electrical testing. The probe assembly according to claim 1, wherein the contact portion further has a connecting surface connected to the inclined surface and substantially perpendicular to the contact surface. The probe assembly according to claim 2, wherein the contact portion has an extension portion in contact with the contact surface on the opposite side to the cross section and extending toward an outer direction of the body. The probe assembly according to claim 3, wherein the extension part extends out of the main body. The probe assembly according to any one of claims 1 to 4, wherein the contact portion has a cushion layer and a needle tip layer; the hardness of the needle tip layer is greater than the hardness of the cushion layer. The probe assembly according to any one of claims 1 to 4, wherein the body has a first body part, a second body part, and a third body part. The probe assembly according to claim 6, wherein the outer diameter of the second body part is larger than the outer diameters of the first body part and the third body part. The probe assembly according to claim 6, wherein the first body part, the second body part, and the third body part have a material with a conductivity greater than or equal to 30% of the international annealed standard copper. The probe assembly head according to any one of claims 1 to 4, wherein the height of the contact portion is greater than 25 microns.