JP2021028600A - Sheet inspection apparatus - Google Patents

Abstract

To make it possible to inspect various defects possibly existing in a sheet.SOLUTION: An inspection method for inspecting defects of a sheet comprises: a detection device and a transport device for transporting the sheet to the detection device. The detection device includes: first detection means for detecting at least one defect such as foreign substances adhered to the surface of the sheet, flaws, and voids existing in the sheet by using transmitted light; second detection means for detecting at least one fine defect such as fine linear stains, accretions, scratches, and wrinkles on the surface of the sheet by using refracted light in the sheet; and third detection means for detecting at least one defect such as scrapes on the sheet and chips on an edge of the sheet by using reflection light.SELECTED DRAWING: Figure 3

Description

The present invention relates to a sheet body inspection device.

As a conventional sheet body inspection device, for example, there is one disclosed in Patent Document 1. In the same document, a sheet-like object (sheet body) that is continuously conveyed is irradiated with light, transmitted light or reflected light from the sheet body is projected, the projected image is imaged, and the image is taken. An inspection system for detecting defects (defects) existing in a sheet-like object from the image data is described. It is described that the defect to be detected in the same document refers to a defect having an uneven shape extending in the same direction as the transport direction of the sheet body, and is present on the surface of the sheet-like object such as a streak or a scratch. Has been done.

On the other hand, in order to inspect the sheet body with high accuracy, it is strongly desirable to apply a transport system that conveys the sheet body with high accuracy to the inspection system. Therefore, Patent Document 2 has a configuration capable of transporting a base material (sheet body) such as a wiring board or a repreg with high position accuracy and preventing an excessive load from being applied to the sheet body. It is disclosed. Specifically, a mechanism is disclosed in which a clamp portion is attached to each of rails provided in parallel and the clamp portion is directly moved along the rail. The clamp portion is provided with a clamp body that sandwiches the side end portion of the seat body along the rail, and the clamp body that sandwiches one side end portion of the seat body can freely move in a direction orthogonal to the transport direction of the seat body. It is described that the clamp body that sandwiches the other end of the sheet body is in such a state that it does not move in the direction orthogonal to the transport direction of the sheet body.

International Publication No. 2017/134985 Japanese Unexamined Patent Publication No. 2005-15147

Patent Document 1 mainly targets defects appearing on the surface of the sheet body. However, in reality, there are various types of sheet bodies, and there are also various defects that appear. Further, in Patent Document 2, it is conceivable that the operation of sandwiching both end portions of the seat body along the rail between the clamp bodies, that is, the operation of setting the seat body becomes complicated.

Therefore, an object of the present invention is to enable highly versatile inspection of a wide range of sheet bodies.

Another object of the present invention is to enable a wide range of sheet body setting operations to be easily and accurately performed, and to enable more accurate transportation.

Therefore, the present invention is an inspection device for inspecting defects in the sheet body.
A first detecting means for detecting foreign matter, scratches, and at least one defect of voids existing inside the sheet body by using transmitted light, refracted light inside the sheet body. The sheet body is utilized by utilizing a second detecting means for detecting fine linear stains, deposits, scratches and wrinkles on the surface of the sheet body, and reflected light. A detection device including a third detection means for detecting at least one defect of slippage and chipping of the edge.
A transport device that transports the sheet body to the detection means, and
It is characterized by being equipped with.

Here, the transport device includes a transport stage that holds and transports the rectangular sheet body, and the transport stage has a holding portion that abuts and holds the four corners of the rectangular sheet body. be able to.

According to the present invention, it becomes possible to carry out a highly versatile inspection on a wide range of sheet bodies. Further, according to the present invention, a wide range of sheet body setting operations can be easily and accurately performed, and more accurate transportation can be performed.

It is a schematic diagram which shows the inspection apparatus of the sheet body which concerns on one Embodiment of this invention. It is a block diagram which shows the structural example of the control system of the inspection apparatus of FIG. It is a flowchart which shows an example of the inspection processing procedure by the control system of FIG. It is a schematic diagram for demonstrating the detection operation performed in the 1st inspection step in the processing procedure of FIG. (A) and (b) are schematic diagrams for explaining the detection operation carried out in the 2nd inspection step in the processing procedure of FIG. It is a schematic diagram for demonstrating the detection operation performed in the 3rd inspection step in the processing procedure of FIG. It is a perspective view which shows the structural example of the transfer stage of the sheet body used for the transfer device which is a component of an inspection device. It is a side view which shows the transport stage seen from the VIII direction of FIG. It is a perspective view for demonstrating the movement mode of the holding part of the sheet body arranged in the transfer stage of FIG. It is an exploded perspective view which shows an example of the structure of a holding part. (A) to (c) are explanatory views for explaining the holding mode of the sheet body by the holding part of FIG. It is explanatory drawing for demonstrating the modification of the holding part.

Hereinafter, the present invention will be described in detail with reference to the drawings.

The sheet body to be the subject of the present invention includes a sheet body made of plastic, glass, carbon fiber, metal, paper, non-woven fabric, rubber or other materials as a base material. The present invention can be applied to inspections of rigid sheet bodies such as touch panels, liquid crystal panels, and prepregs, as well as thin and flexible sheet bodies such as flexible printed circuit boards. In addition, the types of defects inspected by the present invention include foreign substances, scratches, stains, stains, black spots, unevenness, wrinkles, streaks, air bubbles, chips, dents, pinholes, irregularities and the like.

(Overview of inspection equipment)
FIG. 1 is a schematic view showing an inspection device for a sheet body according to an embodiment of the present invention. The inspection device according to the present embodiment is roughly classified into a detection device 100, a transfer device 200, and a control device 300. In the following, a case where a sheet body having a rectangular touch panel shape in a plan view is to be inspected will be illustrated.

The detection device 100 is a device for detecting defects in the sheet body 1, and has a camera 102 and a reflection system illumination device 104 above the transfer surface, and a transmission system illumination device 112 below the transfer surface. .. In the present embodiment, the camera 102 is fixedly arranged so that the optical axis is perpendicular to the transport surface, and the lighting device 104 projects light in a direction inclined with respect to the optical axis of the camera 102 to form a sheet body. It is fixedly arranged so as to irradiate 1. The illuminating device 112 is supported by the moving mechanism 114 and can be set at a position moved in the left-right direction in the drawing. The moving mechanism 114 includes, for example, a carriage on which the lighting device 112 is mounted, a guide for guiding the carriage, a DC servomotor which is a driving source for moving the lighting device 112, and a transmission for transmitting the driving force thereof to the carriage. It can be equipped with a mechanism or the like. Further, sensors 116M and 116R for managing the moving position of the lighting device 112, that is, the position facing the camera 102 and the position not facing the camera 102 (hereinafter, also referred to as the first inspection position and the second inspection position, respectively) may be provided. it can. However, these sensors are not essential when a pulse motor is used as the drive source.

Although the details will be described later, the transport device 200 supports a pair of linear motors juxtaposed at a predetermined distance in a direction orthogonal to FIG. 1 (a direction orthogonal to the transport direction of the seat body 1) and the seat body 1. The transport mechanism 210 includes a transport stage that can move in the transport direction shown by F and B in the drawing according to the drive of the linear motor. As will be described later, the transport stage has two holding portions for abutting and fixing two corners at the F-direction end (front end) of the rectangular sheet body 1, and a B-direction end (rear end). It has two holding parts that abut and fix the two corners on the part), the former is fixed to the transport stage, and the latter is movable. FIG. 1 shows a state at the time of setting the sheet body 1 or at the start of transport in the F direction. In this state, the position of the front end portion of the sheet body 1 does not change regardless of the dimensions in the transport direction, but the rear end The position of the portion may change according to the dimensions of the sheet body 1 in the transport direction.

Further, the transfer device 200 is provided with sensors 232S, 232L and 232E used for recognizing the transfer position of the sheet body 1 and the transfer start / end timing. The sensor 232L is arranged at a position corresponding to the front end portion of the set seat body 1, while the sensor 232S is located at a position (origin) corresponding to the rear end portion before the inspection start (before the transfer start) of the transfer stage described later. Is placed in. The sensor 232E is arranged at a position where the inspection performed while transporting the sheet body 1 in the F direction is completed and the rear end portion of the sheet body 1 away from the detection device 100 is recognized.

FIG. 2 is a block diagram showing a configuration example of a control system of an inspection device including a control unit 300. The control device 300 includes a control unit 302, an input interface 304, an output interface 306, a setting unit 308, a display unit 310, and an external storage device 312.

The control unit 302 integrally controls each part of the inspection device and manages data. Specifically, a CPU or ASIC that executes the processing procedure described later with respect to FIG. 3, a ROM that stores a program or other fixed data corresponding to the processing procedure, and a RAM that is used for temporary storage of data in the processing process. It includes an EEPROM used for storing required data even when the power of the device is turned off, a substrate for processing an image taken by the camera 102, and the like. The control unit 302 may be in the form of a personal computer.

The camera 102, the sensors 116 of the inspection device system including the sensors 116M and 116R shown in FIG. 1, and the sensors 232 of the transport device system including the sensors 232S, 232L and 232B are connected to the input interface 304. .. These sensors may include a sensor for detecting an abnormality when an abnormality occurs and performing an emergency stop. Further, the input interface 304 is provided corresponding to each of the pair of linear motors 242R and 242L, and linear scales 244R and 244L for detecting the transport speed of the sheet body 1 are connected to the input interface 304.

A transmission system lighting device 112 and a reflection system lighting device 104 are connected to the output interface 306. Further, a moving mechanism 114 and a pair of linear motors 242R and 242L are connected to the output interface 306 via a motor driver (not shown) including an amplifier or the like. The transfer stage described later is conveyed by a pair of linear motors 242R and 242L. However, depending on the variation in the characteristics of the linear motor and the variation in the applied load, the transfer speed may differ even if it is driven with a constant electric power. Therefore, in the present embodiment, the transport speed is constantly monitored by the linear scales 244R and 244L, the speed difference is compensated (for example, the drive power is increased with respect to the linear motor whose transport speed is relatively low), and the posture. Enables transportation without collapse.

The setting unit 308 has keys, switches and other input means used for the user to make necessary settings for the inspection device and instruct the start of inspection. The display unit 310 has a form of a display that displays the state of the inspection device, the inspection process inspection result of the sheet body 1, and the like. The external storage device 312 can be used, for example, in association with the sheet body 1 to be inspected to store mapping data indicating the presence or absence of defects, the position of defects, and the like.

(Inspection processing)
The inspection process according to the present embodiment is performed by transporting the sheet body 1 by the transport device 200 and passing it through the detection device 100, and the following three inspection steps are carried out. That is,
A first inspection step of detecting at least one defect such as foreign matter, scratches, and voids (pores) existing inside the sheet body 1 by using transmitted light.
-Using the refracted light inside the sheet body 1, at least one of fine linear stains and deposits, scratches and wrinkles on the surface of the sheet body 1, that is, the height or depth with respect to the surface of the sheet body 1. The second inspection step to detect defects that cannot be detected by transmitted light or reflected light (hereinafter referred to as “fine defects”) due to lack of refraction, and ・ Using reflected light, slippage of the sheet body 1 and chipping of edges, etc. Third inspection step, which detects at least one defect in
FIG. 3 is a flowchart showing an example of the inspection processing procedure according to the present embodiment, and FIGS. 4, 5, and 6 are schematic views showing modes of inspection in the first, second, and third inspection steps, respectively. The inspection process of the present embodiment will be described with reference to these figures.

When the procedure of FIG. 3 starts, in step S1, the user sets the sheet body 1 at the position shown in FIG. Here, when the sensor 232S detects the rear end portion of the transport stage before the start of transport and the sensor 232L detects the front end portion of the sheet body 1, it is determined in step S3 that the setting is completed. Further, when it is confirmed that the instruction to start the inspection is input in step S5, the first inspection step is carried out (step S7).

In the first inspection step, as shown in FIG. 4, the sheet body 1 is conveyed in the F direction, the lighting device 112 at the position facing the camera 102 (first inspection position) is turned on, and the sheet body 1 is mediated. The transmitted light is received by the camera 102, and the presence or absence of defects such as foreign matter, scratches, and voids is detected over the entire length of the sheet body 1 in the transport direction. The control device 300 recognizes the presence or absence of these defects, and if there is a defect, maps the position thereof.

When the sheet body 1 passes through the detection device 100 and the rear end portion is detected by the sensor 232E, the transfer of the sheet body 1 in the F direction is stopped, and the first inspection step is completed. Next, in step S9, the moving mechanism 114 is driven, and the lighting device 112 is moved from the position facing the camera 102 to the position not facing the camera 102 (the second inspection position in FIG. 1 on the downstream side in the F direction from the facing position). And start the second inspection step (step S11).

In the second inspection step, as shown in FIG. 5A, the seat body 1 is conveyed in the B direction, and the lighting device 112 set at a position not opposed to the camera 102 is turned on to light the inside of the seat body 1. The presence or absence of fine defects is detected using refracted light. When the microdefects are directly irradiated with light, the irradiated light transmits the microdefects as they are, and it becomes difficult to detect the microdefects when the illumination device 112 is in the first inspection position. However, when the lighting device 112 is in the second inspection position, when the sheet body 1 is irradiated with light, as shown in FIG. 5B, a part of the incident light passes through the sheet body 1 as it is. There is also light that is totally reflected at the interface between the sheet body 1 and the outside and travels while refracting the inside of the sheet body 1. When it hits the minute defect W in the process of progress, diffused reflection of the refracted light occurs, and a part of the light goes to the camera from there. That is, if the illuminating device 112 is located at a position non-opposing to the camera 102, it can be detected by, so to speak, making fine defects emerge by refracted light coming from another position. In this way, by setting the lighting device 112 at a position non-opposite to the camera 102 and transporting the sheet body 1 in the B direction, the presence or absence of minute defects is detected over the entire length of the sheet body 1 in the transport direction. The control device 300 recognizes the presence or absence of minute defects, and if there are minute defects, maps the positions thereof.

When the sheet body 1 passes through the detection device 100, the state of FIG. 1 in which the front end portion of the transport stage and the rear end portion of the sheet body when transported in the B direction are detected by the sensors 232S and 232L is obtained. Therefore, the transport of the sheet body 1 in the B direction is stopped, and the second inspection step is completed. Next, in step S13, the moving mechanism 114 is driven to move the lighting device 112 to a position facing the camera 102 (first inspection position), and the third inspection step is started (step S15).

In the third inspection step, as shown in FIG. 6, the lighting device 104 conveys the sheet body 1 again in the F direction and projects light in a direction inclined with respect to the optical axis of the camera 102 to irradiate the sheet body 1. Is lit, and the camera 102 receives the reflected light from the sheet body 1 to detect the presence or absence of defects such as slippage of the sheet body 1 and chipping of the edge portion over the entire length of the sheet body 1 in the transport direction. At this time, when the lighting device 104 projects light obliquely, shadows are formed when there are defects, so that it is easy to detect. The control device 300 recognizes the presence or absence of these defects, and if there is a defect, maps the position thereof.

When the above inspection step is completed, the sheet body 1 is conveyed to the removal position in step S17, and the user removes the sheet body 1 in step S19. The removal position may be the position shown in FIG. 1 or the position on the opposite side of the detection device 100. After that, the user visually inspects the four corners (four corners) of the rectangular sheet body 1 which has been the blind spot for detection by the holding portion described later (step S21), and the inspection process is completed.

(Modified example of inspection process)
In the above inspection process, if the sheet body 1 is reciprocated 1.5 times with respect to the detection device 100, various defects can be inspected by the first to third inspection steps. However, it is also possible to perform the detection process by moving in only one direction without performing reciprocating transportation.

Further, the first to third inspection steps are not essential to be carried out in this order. For example, the third, second, and first inspection steps may be performed in this order. Alternatively, if the moving position (second inspection position) of the lighting device 112 is a position deviated in the B direction opposite to FIG. 5, the second, third (or first), first (or third) It is also possible to carry out in the order of inspection steps.

In any case, the above inspection processing method can be applied regardless of the type of sheet body. If it is made of a transparent or translucent material, all the first to third inspection steps can be carried out. Further, depending on the type of defect, it is possible to increase the number of inspection steps by changing the angle and moving distance of each lighting device. For example, a motor may be connected to the reflective lighting device 104 to make it movable or rotatable.

Considering that various types of sheet bodies (not limited to the rectangular shape according to the embodiment) can be inspected by the sheet body manufacturer, it is an inspection device that is configured to be able to inspect various defects. It is preferable for improving the versatility of the above. If there is an unnecessary inspection step depending on the type of sheet body, the inspection step may be skipped. For example, when the sheet body is non-light transmissive, defect inspection such as misalignment or chipping of edges may be performed using only reflected light, and finer details may be obtained by changing the color of the illumination. If defects can be detected, another lighting device can be added, or a color-adjustable lighting device can be used.

Further, as described above, it is preferable to map the inspection results in the control device 300. For example, if there is regularity in the position where defects appear, it can contribute to improvement of the manufacturing process. Further, if a printing device is added to mark the defective portion (a different marking may be performed depending on the type of defect), the user (inspector) can clearly indicate the presence or absence of the defect and the position where the defect occurs. Can be recognized.

In addition, the transport speed of the sheet body does not have to be constant, and may be variable depending on the type of the sheet body, the type of defects, or the content of the inspection process.

(Transport device)
FIG. 7 is a perspective view showing a configuration example of a transfer stage of a sheet body used for the transfer mechanism 210, FIG. 8 is a side view of the transfer stage viewed from the VIII direction of FIG. 7, and FIG. 9 is arranged on the transfer stage. It is a perspective view for demonstrating the moving mode of the holding part of a sheet body. In these figures, the F and B directions (FB directions) coincide with the F and B directions (transport direction of the sheet body 1) in FIG. 1, and the R and L directions (RL directions) are It is defined as a direction orthogonal to the FB direction.

The transport stage 250 has a frame structure formed in a rectangular shape, and has a front edge side frame element 252F located on the front edge side in the F direction and extending in the RL direction, and a front edge side frame element 252F located on the trailing edge side in the RL direction. It has a trailing edge side frame element 252B extending to the side and side edge side frame elements 252R and 252L extending in the FB direction so as to connect them.

As shown in FIG. 8, the linear motors 242R and 242L are composed of stator members 246R and 246L and mover members 248R and 248L. The stator members 246R and 246L have a substantially U-shaped cross section and extend over the movable range of the transport stage. The mover members 248R and 248L are attached so as to project from the lower surface of the side edge side frame elements 252R and 252L, and are fitted into the grooves of the stator members 246R and 246L with an appropriate clearance and have a substantially U-shaped cross section. It is slidably supported by the two upper end surfaces of the stator members 246R and 246L. The groove shape of the stator members 246R and 246L and the external shape of the mover members 248R and 248L are appropriately defined so that the mover members 248R and 248L do not float and can be slid without rattling. There is.

A guide 254F extending in the RL direction is provided on the front edge side frame element 252F to support a pair of holding portions 270Fr and 270Fl. The pair of holding portions 270Fr and 270Fl are brought into a slidable state or a fixed state with respect to the guide 254F in the RL direction by operating the lock levers 272Fr and 272Fl. The lock levers 272Fr and 272Fl can have an arm portion that can be brought into contact with and detached from the guide 254F by applying an operating force to the guide 254F, for example, and the holding portions 270Fr and 270Fl can be placed at arbitrary positions. Can be set.

However, the structure is not limited to this, and the structures of the lock levers 272Fr and 272Fl and the guide 254F can be in an appropriate form. For example, if the type of seat body size is fixed, the lock levers 272Fr and 272Fl are provided with spring-loaded rods, while the guide 254F has engagement holes at positions corresponding to the type of seat body size. The holding portions 270Fr and 270Fl may be moved to desired positions and the holding portions 270Fr and 270Fl may be appropriately engaged with each other to set the positions of the holding portions 270Fr and 270Fl. Further, a display corresponding to the dimension may be attached to the position corresponding to the engaging hole. The same applies to the lock lever and the like described below.

Guides 254R and 254L are provided on the side edge side frame elements 252R and 252L, and the movable frame element 256 is supported in a state of being bridged between the guides 254R and 254L. By operating the lock levers 258R and 258L, the movable frame element 256 becomes slidable or fixed in the FB direction with respect to the guides 254R and 254L. Further, the movable frame element 256 is provided with a guide 254B extending in the RL direction to support a pair of holding portions 270Br and 270Bl. The pair of holding portions 270Br and 270Bl are in a slidable state or a fixed state with respect to the guide 254B in the RL direction by operating the lock levers 272Br and 272Bl.

The sheet body 1 has various dimensions. Therefore, as shown in FIG. 9, the positions of the holding portions 270Fr and 270Fl in the RL direction, the movable frame elements 256 and thus the positions of the holding portions 270Br and 270Bl in the FB direction, and the holding portions 270Br and 270Bl are adjusted according to the dimensions. By adjusting the position of the sheet body 1 in the RL direction, the four corners of the sheet body 1 can be held by the holding portions 270Fr, 270Fl; 270Br, 270Bl. The transport stage 250 of the present embodiment has a structure corresponding to, for example, a 5-32 inch touch panel.

FIG. 10 is an exploded perspective view showing an example of the structure of the holding portion. Although the figure shows the one corresponding to the holding portion 270 Fl, the structure is the same for the other holding portions.

The holding portion 270Fl generally has a sliding block 282 slidable along the guide 254F and a holding block 284 fixedly mounted on the sliding block 282. For example, two dowels 282a and 282b are erected on the sliding block 282, and these are inserted into 284a and 284b provided at corresponding positions of the holding block 284. Further, a screw 286 is screwed into the screw hole 282c provided in the sliding block 282 through a hole provided at a corresponding position of the holding block 284. As a result, the holding block 284 is fixed to the sliding block 282 without rattling.

The holding block 284 mounts abutting surfaces 283a and 283b that abut two adjacent corners of the rectangular sheet body 1 in a plan view, and a portion near the corners of the bottom surface of the sheet body 1. It has a mounting surface 283c. Therefore, by setting the sheet body 1 on these holding portions while adjusting the positions of the holding portions 270Fr and 270Fl; 270Br and 270Bl, the seat body 1 is prevented from being displaced in the plane direction by the abutting surfaces 283a and 283b. At the same time, the vicinity of the corners of the bottom surface is placed on the mounting surface 283c, and the four corners are firmly held.

11 (a) to 11 (c) are explanatory views for explaining the holding mode of the sheet body 1. FIGS. (A) and (b) are an enlarged view of a perspective view showing a holding state of the sheet body 1 and a part thereof (a part near the holding portion 270 Fl), respectively. If there are no accessories at the corners of the sheet body 1, there is no problem even if the two side portions adjacent to the corners of the sheet body 1 are abutted against the abutting surfaces 283a and 283b. ..

However, depending on the sheet body 1, the electrode wiring may be arranged on one side near the corner. In this case, if the two side portions adjacent to the corners of the sheet body 1 are abutted against the abutting surfaces 283a and 283b, the electrode wiring may be bent at a right angle and be damaged. In this case, as shown in FIG. 6C, the portion of one side on which the electrode wiring 1a is arranged does not abut against the abutting surface (the abutting surface 283a of the holding portion 270Bl in the illustrated example), and the other. Hold the electrode wiring 1a so as to abut against the abutting surface (the abutting surface 283b of the holding portion 270Bl in the illustrated example), and gently bend the electrode wiring 1a so as not to apply a load. Just do it. Even in this case, if the other three holding portions (holding portions 270Fr, 270Fl, 270Br) are abutted on the two sides, the abutting is performed at seven places, so that the sheet body 1 is held. It can be said that there is virtually no effect on performance.

(Advantage of the transport stage according to the embodiment)
The transport stage according to the above-described embodiment has a technique disclosed in Patent Document 2, that is, a configuration in which a clamp body is attached to each of rails provided in parallel and a clamp body is provided to sandwich one side end portion of the seat body. It is more advantageous than the following points.

That is, in the above-mentioned transport stage, the seat body is fixed and held by abutting the four corners of the sheet body 1 against the abutting surface while adjusting the positions of the four holding portions, so that the seat body can be easily set. It will be accurate. Moreover, since the seat body is not clamped (not pinched), the load applied to the seat body is small. Further, since the seat body is not held by the clamp body provided on the free end side of the clamp portion in the cantilever state, it is not substantially affected by fluctuations caused by acceleration / deceleration during transportation. In addition, although the held portion of the sheet body is visually inspected, it is easier to grasp the position of the visual inspection when the held portion is provided at the four corners than when the held portion is provided at the side end portion. It is possible to eliminate the complexity of changing hands and searching for the part to be held.

(Modification example of transfer stage)
The transport stage according to the above-described embodiment can be deformed as follows, in addition to the modified examples described everywhere.

For example, in the above-described embodiment, all of the four holding portions 270Fr and 270Fl; 270Br and 270Bl are movable in the RL direction. This is advantageous in that transport can be performed with reference to the axis in any transport direction. However, if the sheet body is held with reference to one guide, for example, the guide 254L, the holding portions 270Fl and 270Bl may be fixed in the RL direction. Further, for example, in the case of transporting with reference to the center line in the RL direction, when one holding portion (270Fr, 270Br) is moved by a predetermined amount in one direction, the other holding portion (270Fr, 270Br) follows the movement. A link mechanism may be added so that the 270Fl270Bl) moves in the opposite direction by the same amount.

Further, although the movable frame element is provided on the side of the trailing edge side stage element 252B in the above-described embodiment, it may be provided on the side of the front edge side stage element 252F.

Further, the sheet body 1 has various thicknesses, and the thickness of the sheet body may change beyond the depth of field. In this case, it is possible to add an elevating mechanism to the camera 102, but since it is considered that the inspection is usually performed in units of tens or hundreds of sheets of the same thickness, the depth from the upper surface It is advantageous in terms of cost to prepare holding portions or holding blocks having different D (see FIG. 10) and replace them as appropriate to cope with changes in the thickness of the sheet body.

Further, the sheet body to be inspected includes not only a highly rigid one but also a thin and highly flexible one. In this case, as shown in FIG. 12, a suction hole 290 extending from the side surface of the holding block 284 to the mounting surface 283c is formed, a suction tube is connected to the opening on the side surface, and the opening 290a on the mounting surface 283a is formed. Fixed holding can be performed by applying a suction force from (two openings in the illustrated courtesy). Further, a member (O-ring or the like) that enhances the adhesion to the sheet body 1 may be provided in relation to the opening 290a so that the suction force acts appropriately.

In addition, the above-mentioned transport device 200 can be preferably applied not only to the detection device 100 that performs the detection process described above, but also to various detection devices. However, depending on the type of sheet body, the type of defect, or the content of the inspection process, multiple transfers (1.5 round trips in the above example) are performed to the detection device in order to undergo multiple inspection processes. Considering that the transfer speed is variable, the matching property of the above-mentioned transfer device capable of firmly holding the sheet body under any conditions is high, and its application is particularly preferable. obtain.

1 Sheet body 100 Detection device 102 Camera 104, 112 Lighting device 114 Moving mechanism 200 Transfer device 210 Transfer mechanism 242R, 242L Linear motor 250 Transfer stage 252F, 252B, 252R, 252L Frame element 254F, 254B, 254R, 254L Guide 256 Movable frame Element 258R, 258L, 272Fr, 272Fl, 272Br, 272Bl Lock lever 270Fr, 270Fl, 270Br, 270Bl Holding part 283a, 283b Abutting surface 283c Mounting surface 284 Holding block 290 Suction hole 300 Control device 302 Control unit

Claims (2)

An inspection device that inspects defects in the sheet body.
A first detecting means for detecting foreign matter, scratches, and at least one defect of voids existing inside the sheet body by using transmitted light, refracted light inside the sheet body. The sheet body is utilized by utilizing a second detecting means for detecting fine linear stains, deposits, scratches and wrinkles on the surface of the sheet body, and reflected light. A detection device including a third detection means for detecting at least one defect of slippage and chipping of the edge.
A transport device that transports the sheet body to the detection means, and
An inspection device characterized by being equipped with. The transfer device includes a transfer stage that holds and conveys a rectangular sheet body, and the transfer stage has a holding portion that abuts and holds the four corners of the rectangular sheet body. Item 1. The inspection device according to item 1.

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