JP2021020267A - Cutting blade, method for mounting cutting blade, and method for processing workpiece - Google Patents

Abstract

To provide a cutting blade which can highly maintain accuracy of processing.SOLUTION: A cutting blade that is mounted on a spindle so as to be sandwiched between a first flange fixed to a spindle and a second flange corresponding to the first flange and is used when a workpiece is processed includes: an annular cutting blade part having a first surface contacting the first flange and a second surface opposite to the first surface; and a mark part provided on the cutting blade part, in which a part outside the radial direction of the cutting blade part is curved toward the first flange contacting the first surface, and the mark part is provided so as to identify the first surface and the second surface.SELECTED DRAWING: Figure 3

Description

The present invention relates to a cutting blade used for processing a work piece, a method for mounting a cutting blade used for mounting the cutting blade on a spindle, and a method for processing a work piece using the cutting blade.

In electronic devices such as mobile phones and personal computers, a device chip including a device such as an electronic circuit is an indispensable component. In the device chip, for example, the surface side of a wafer made of a semiconductor material such as silicon is divided into a plurality of regions by a planned division line (street), a device is formed in each region, and then the wafer is placed along the planned division line. Obtained by dividing.

When a plate-shaped workpiece represented by a wafer is divided into small pieces such as device chips, for example, a cutting device equipped with an annular grindstone tool called a cutting blade is attached to a spindle which is a rotating shaft. Used. By rotating the cutting blade at high speed and cutting into the work piece along the planned division line, the work piece can be cut and divided into a plurality of small pieces.

The structure of the cutting blade is roughly classified into a hub type in which an annular cutting edge is fixed to a base and a washer type (hubless type) composed of only an annular cutting edge (see, for example, Patent Document 1). ). When mounting this washer-type cutting blade on the spindle, for example, a mount flange having a cylindrical boss portion and a holding flange having an opening corresponding to the boss portion are used. The mounting procedure is, for example, as follows.

First, the mount flange is fixed to the tip of the spindle. Next, the cutting blade and the holding flange are attached to the mount flange in this order so that the boss portion is inserted into the opening of the cutting blade and the opening of the holding flange. Then, the fixing nut is fastened to the boss portion, and the cutting blade is fixed so as to be sandwiched between the holding flange and the mount flange.

Japanese Unexamined Patent Publication No. 2013-997999

By the way, since the rigidity of the holding flange is lower than the rigidity of the mount flange, if a force is applied to the holding flange when fastening the fixing nut to the boss portion, the holding flange is deformed and the cutting blade is warped. The warp of the cutting blade becomes even greater when the spindle rotates and centrifugal force acts on each part. If the warp of the cutting blade becomes large, the machining accuracy cannot be maintained sufficiently high.

The present invention has been made in view of such problems, and an object of the present invention is a cutting blade capable of maintaining high machining accuracy, a cutting blade mounting method used when mounting the cutting blade on a spindle, and the like. And to provide a method of processing a workpiece using this cutting blade.

According to one aspect of the present invention, it is mounted on the spindle so as to be sandwiched between the first flange fixed to the spindle and the second flange corresponding to the first flange, and is used when machining an workpiece. An annular cutting edge portion having a first surface in contact with the first flange and a second surface opposite to the first surface, and a mark portion provided on the cutting edge portion. The radial outer portion of the cutting edge portion is curved toward the first flange in contact with the first surface, and the mark portion is formed on the first surface and the second surface. A cutting blade provided in a manner that can be distinguished from a surface is provided.

In one aspect of the present invention, the radial outer portion of the cutting edge portion is mounted on the spindle so as to be sandwiched between the first flange and the second flange and is not rotating. It is preferable that the amount of curvature of the cutting edge portion in a state where the cutting edge portion is not mounted on the spindle is adjusted so that the blade is curved toward the first flange.

In one aspect of the present invention, in a state where the cutting edge portion is mounted on the spindle so as to be sandwiched between the first flange and the second flange and rotated, the radial outer portion of the cutting edge portion is curved. It is preferable that the amount of curvature of the cutting edge portion when not mounted on the spindle is adjusted so that the amount of the cutting edge becomes smaller than a predetermined threshold value.

According to another aspect of the present invention, it is a method of mounting a cutting blade used when mounting the above-mentioned cutting blade on the spindle, in which the first surface of the cutting blade is brought into contact with the first flange. The second flange is attached so that the second flange is brought into contact with the second surface of the cutting blade attached to the first flange and the blade attachment step for attaching the cutting blade to the first flange. Includes a flange mounting step to attach to one flange and a fixing step to fix the second flange to the first flange so that the cutting blade is sandwiched and fixed between the first flange and the second flange. A method of mounting the cutting blade is provided.

According to still another aspect of the present invention, it is a method of processing a work piece used when the work piece is machined by using the above-mentioned cutting blade, and the first surface of the cutting blade is used. The blade mounting step of attaching the cutting blade to the first flange so as to contact the first flange, and the second flange so as to contact the second surface of the cutting blade attached to the first flange. The second flange is fixed to the first flange so that the cutting blade is sandwiched and fixed between the first flange and the second flange and the flange mounting step for attaching the second flange to the first flange. A workpiece including a fixing step and a machining step of machining the workpiece by rotating the cutting blade fixed by the first flange and the second flange to cut into the workpiece. A method of processing an object is provided.

The cutting blade according to one aspect of the present invention includes an annular cutting edge portion having a first surface in contact with the first flange and a second surface opposite to the first surface, and the cutting edge portion in the radial direction of the cutting edge portion. The outer portion is curved toward the first flange in contact with the first surface. Therefore, when the radial outer portion of the cutting edge portion warps toward the second flange due to deformation of the second flange or the like, the warp toward the second flange cancels the curvature toward the first flange. , The flatness of the cutting edge becomes high. As a result, the processing accuracy can be maintained high.

Further, the cutting blade according to one aspect of the present invention includes a mark portion provided on the cutting edge portion in a manner capable of distinguishing between the first surface and the second surface. Therefore, the orientation of the cutting blade can be easily determined based on the mark portion. That is, it is not necessary to determine the bending direction of the cutting edge portion by using a special tool or method.

It is a perspective view which shows the structural example of a cutting apparatus. It is an exploded perspective view which shows the structural example of a cutting unit. FIG. 3A is a side view showing a configuration example of the cutting blade, and FIG. 3B is a cross-sectional view showing a configuration example of the cutting blade. FIG. 4A is a front view showing a state in which the cutting blade is mounted on the spindle, and FIG. 4B is a front view showing how the workpiece is machined.

Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing a configuration example of the cutting device 2 according to the present embodiment. In addition, in FIG. 1, some components are shown by functional blocks. Further, the X-axis direction (front-back direction, machining feed direction), Y-axis direction (left-right direction, index feed direction), and Z-axis direction (height direction, cut feed direction) used in the following description are perpendicular to each other. is there.

As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each component. An opening 4a is formed in the front corner of the upper surface of the base 4, and a cassette elevator 6 that moves up and down by an elevating mechanism (not shown) is arranged in the opening 4a. A cassette 8 capable of accommodating a plurality of workpieces 11 is placed on the upper surface of the cassette elevator 6. Note that FIG. 1 shows only the outline of the cassette 8 for convenience of explanation.

The workpiece 11 is a disk-shaped wafer formed by using a semiconductor material such as silicon (Si). The surface side of the workpiece 11 is divided into a plurality of small areas by a plurality of scheduled processing lines (streets) intersecting each other, and devices such as ICs (Integrated Circuits) are formed in each small area. There is.

A dicing tape 13 having a diameter larger than that of the workpiece 11 is attached to the back surface side of the workpiece 11. An annular frame 15 having a substantially circular opening is fixed to the outer peripheral portion of the dicing tape 13. That is, the workpiece 11 is supported by the frame 15 via the dicing tape 13.

In the present embodiment, the disk-shaped wafer formed by using silicon or the like is used as the workpiece 11, but the material, shape, structure, size, etc. of the workpiece 11 are not limited. For example, a substrate or the like made of other materials such as semiconductors, ceramics, resins, and metals can be used as the workpiece 11. Similarly, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the device. A device may not be formed on the workpiece 11. Further, the dicing tape 13 may be attached to the back surface side of the workpiece 11.

A rectangular opening 4b long in the X-axis direction is formed on the side of the cassette elevator 6. A first moving mechanism (machining feed mechanism) 10 for moving the X-axis moving table (not shown) in the X-axis direction is arranged in the opening 4b. A table cover 10a is arranged above the X-axis moving table. Further, bellows-shaped dust-proof and drip-proof covers 10b are attached to the front and back of the table cover 10a. The upper part of the opening 4b is covered by the table cover 10a and the dust-proof and drip-proof cover 10b.

Above the X-axis moving table, a chuck table 12 for holding the workpiece 11 during machining is provided so as to be exposed from the table cover 10a. The chuck table 12 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction). Further, the chuck table 12 moves in the X-axis direction together with the X-axis moving table by the first moving mechanism 10 described above (machining feed).

A part of the upper surface of the chuck table 12 is a holding surface 12a for holding the workpiece 11. The holding surface 12a is formed substantially parallel to the X-axis direction and the Y-axis direction, and is connected to a suction source (not shown) via a suction path (not shown) provided inside the chuck table 12. Has been done. Further, around the chuck table 12, four clamps 14 capable of fixing the annular frame 15 that supports the workpiece 11 are provided.

Above the opening 4b, a transport unit (not shown) for transporting the work piece 11 (frame 15) described above to the chuck table 12 or the like is arranged. The workpiece 11 transported by the transport unit is placed on the holding surface 12a of the chuck table 12 so that the surface side is exposed upward, for example.

A cantilever-shaped support structure 20 is arranged on the side of the opening 4b. A second moving mechanism (indexing feed mechanism, cut feed mechanism) 22 is arranged on the upper part of the front surface of the support structure 20. The second moving mechanism 22 includes a pair of Y-axis guide rails 24 fixed to the front surface of the support structure 20 and substantially parallel to the Y-axis direction. The Y-axis moving plate 26 constituting the second moving mechanism 22 is attached to the Y-axis guide rail 24 in a slidable manner.

A nut portion (not shown) is provided on the back surface side (rear surface side) of the Y-axis moving plate 26. A Y-axis ball screw 28, which is substantially parallel to the Y-axis guide rail 24, is connected to the nut portion in a rotatable manner. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 28. When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor, the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rail 24.

A pair of Z-axis guide rails 30 that are substantially parallel to the Z-axis direction are fixed to the surface (front surface) of the Y-axis moving plate 26. The Z-axis moving plate 32 is attached to the Z-axis guide rail 30 in a slidable manner. A nut portion (not shown) is provided on the back surface side (rear surface side) of the Z-axis moving plate 32.

A Z-axis ball screw 34 substantially parallel to the Z-axis guide rail 30 is connected to this nut portion in a rotatable manner. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34. When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36, the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide rail 30.

A cutting unit 38 used for processing the workpiece 11 is arranged below the Z-axis moving plate 32. FIG. 2 is an exploded perspective view showing a configuration example of the cutting unit 38. The cutting unit 38 includes a spindle housing 40 configured in a tubular shape. As shown in FIG. 2, the space inside the spindle housing 40 accommodates a spindle 42 having a rotation axis substantially parallel to the Y-axis direction.

The tip (one end) 42a of the spindle 42 is exposed to the outside of the spindle housing 40. Further, the tip portion 42a of the spindle 42 is formed with an opening 42b having a thread on the inner peripheral surface. On the other hand, a rotary drive source (not shown) such as a motor is connected to the base end side (other end side) of the spindle 42.

A mount flange (first flange) 44 made of a metal such as stainless steel is mounted on the tip end portion 42a of the spindle 42. The mount flange 44 includes a cylindrical boss portion 46 and a disk-shaped flange portion 48 projecting outward in the radial direction from the base end portion of the boss portion 46. An opening (not shown) into which the tip end portion 42a of the spindle 42 is inserted is formed in the central portion of the flange portion 48. Further, an opening 46a leading to the opening of the flange portion 48 is formed in the central portion of the boss portion 46.

Therefore, if the tip 42a of the spindle 42 is inserted into the opening of the flange 48 and the fixing bolt 50 is tightened to the opening 42b of the tip 42a through the opening 46a of the boss 46, the mount flange 44 becomes the spindle 42. It is fixed. By fixing the mount flange 44 to the spindle 42, the mount flange 44 can be rotated together with the spindle 42.

A washer-type (hubless type) cutting blade 52 is attached to the mount flange 44 from the tip of the boss portion 46. FIG. 3A is a side view showing a configuration example of the cutting blade 52, and FIG. 3B is a cross-sectional view showing a configuration example of the cutting blade 52. The cutting blade 52 includes an annular cutting edge portion 54 and a mark portion 56 provided on the cutting edge portion 54.

The cutting edge portion 54 is formed by fixing abrasive grains such as diamond with a binder such as ceramics, resin, or metal, and has a first surface 54a arranged on the mount flange 44 (flange portion 48) side. It has a second surface 54b on the opposite side of the first surface 54a. A circular opening 54c having a size capable of inserting the boss portion 46 is provided in the central portion of the cutting edge portion 54. The cutting blade 52 is attached to the mount flange 44 so that the boss portion 46 is inserted into the opening 54c.

The diameter of the base end side 46b of the boss portion 46 is larger than the diameter of the tip end side 46c of the boss portion 46. Specifically, the diameter of the proximal end side 46b is about the same as the diameter of the opening 54c of the cutting blade 52, or slightly smaller than the diameter of the opening 54c. Therefore, when the proximal end side 46b is inserted into the opening 54c of the cutting blade 52, the cutting blade 52 is arranged at a predetermined position in the radial direction determined by the proximal end side 46b.

Further, when the cutting blade 52 is attached to the mount flange 44 as described above, the first surface 54a of the cutting blade 52 comes into contact with the support surface 48a provided on the boss portion 46 side of the flange portion 48. The support surface 48a is formed in a substantially flat annular shape so that the cutting blade 52 can be supported over the entire circumference.

With the cutting blade 52 attached to the mount flange 44, a holding flange (second flange) 58 made of a metal such as stainless steel is attached to the mount flange 44 from the tip of the boss portion 46. The holding flange 58 is formed in a disk shape having a circular opening 58a having a size capable of inserting the boss portion 46 in the central portion, and is attached to the mount flange 44 so that the boss portion 46 is inserted into the opening 58a. Be done.

When the holding flange 58 is attached to the mount flange 44, the support surface (not shown) provided on the cutting blade 52 side of the holding flange 58 comes into contact with the second surface 54b of the cutting blade 52. The support surface of the holding flange 58 on the cutting blade 52 side is formed in a substantially flat annular shape so that the cutting blade 52 can be supported over the entire circumference.

With the cutting blade 52 and the holding flange 58 attached to the mount flange 44, a fixing nut 60 is attached to the boss portion 46 of the mount flange 44. A thread is formed on the outer peripheral surface of the tip of the boss portion 46, and the nut 60 is formed with an opening 60a having a thread corresponding to the thread of the boss portion 46 on the inner peripheral surface. ..

Therefore, the nut 60 can be tightened to the boss portion 46 to fix the holding flange 58 to the mount flange 44. As a result, the cutting blade 52 is fixed so as to be sandwiched between the holding flange 58 and the mount flange 44. As a result, the cutting blade 52 can be rotated together with the spindle 42.

As shown in FIG. 1, a camera 62 used for photographing the workpiece 11 and the like held by the chuck table 12 is fixed to the lower portion of the Z-axis moving plate 32. If the Y-axis moving plate 26 is moved in the Y-axis direction by the second moving mechanism 22, the cutting unit 38 and the camera 62 move in the Y-axis direction (indexing feed). Further, if the Z-axis moving plate 32 is moved in the Z-axis direction by the second moving mechanism 22, the cutting unit 38 and the camera 62 move in the Z-axis direction.

An opening 4c is formed at a position opposite to the opening 4a with respect to the opening 4b. Inside the opening 4c, a cleaning unit 64 for cleaning the workpiece 11 and the like after processing is arranged. A control unit 66 is connected to components such as a cassette elevator 6, a first moving mechanism 10, a chuck table 12, a second moving mechanism 22, a cutting unit 38, a camera 62, and a cleaning unit 64. The control unit 66 controls each component of the cutting device 2 according to, for example, conditions for machining the workpiece 11.

By the way, the rigidity of the holding flange 58 is lower than the rigidity of the mount flange 44, and when a force is applied to the holding flange 58 when fastening the fixing nut 60 to the boss portion 46, the holding flange 58 is deformed and the cutting blade is formed. The cutting edge portion 54 of 52 is warped. With the cutting blade 52 warped in this way, the machining accuracy cannot be maintained sufficiently high.

For example, when the fixing nut 60 is tightened to the boss portion 46, a force in the direction of pressing the central portion of the pressing flange 58 against the mount flange 44 acts on the central portion of the pressing flange 58. Therefore, the holding flange 58 is slightly deformed so that the area outside the support surface in the radial direction is separated from the second surface 54b of the cutting blade 52.

As a result, the radial inner portion A of the cutting edge portion 54 is supported by the support surface of the holding flange 58, but the radial outer portion B of the cutting edge portion 54 is sufficiently supported by the supporting surface of the holding flange 58. Will not be supported. Then, the radial outer portion B of the cutting edge portion 54 warps toward the holding flange 58. In other words, the radial outer portion B of the cutting edge portion 54 warps in the direction from the first surface 54a to the second surface 54b.

Therefore, in the present embodiment, as shown in FIG. 3B, the radial outer portion B of the cutting edge portion 54 is pre-curved so as to be directed toward the mount flange 44 in contact with the first surface 54a. deep. That is, the radial outer portion B of the cutting edge portion 54 is curved in the direction from the second surface 54b to the first surface 54a.

As a result, when the radial outer portion B of the cutting edge portion 54 warps toward the holding flange 58 due to deformation of the holding flange 58 or the like, the warp toward the holding flange 58 bends toward the mount flange 44. Is canceled out, and the flatness of the cutting edge portion 54 is increased. Therefore, if the cutting blade 52 is used, the machining accuracy can be maintained high.

The warp of the cutting edge portion 54 of the cutting blade 52 becomes even greater when the spindle 42 rotates and centrifugal force acts on each portion. Therefore, it is desirable that the radial outer portion B of the cutting edge portion 54 is slightly curved toward the mount flange 44 in a state where the cutting edge portion 54 is mounted on the spindle 42 and is not rotating. .. On the other hand, in a state where the spindle 42 rotates and centrifugal force acts on each portion, it is desirable that the flatness of the cutting edge portion 54 is sufficiently high.

Therefore, in the present embodiment, the cutting edge portion 54 of the cutting blade 52 is mounted on the spindle 42 so as to be sandwiched between the mount flange 44 and the holding flange 58 and is not rotating, and is outside the cutting edge portion 54 in the radial direction. The amount of curvature of the cutting edge portion 54 when not mounted on the spindle 42 is adjusted so that the portion B of the portion B is curved toward the mount flange 44.

Further, in the present embodiment, the cutting edge portion 54 of the cutting blade 52 is mounted on the spindle 42 so as to be sandwiched between the mount flange 44 and the holding flange 58 and rotated, and the outer portion in the radial direction of the cutting edge portion 54. The amount of bending of the cutting edge portion 54 when not mounted on the spindle 42 is adjusted so that the amount of bending of B becomes smaller than a predetermined threshold value.

The amount of curvature (warp) of the cutting edge portion 54 is, for example, the distance between the tangent plane in the region corresponding to the inner portion A of the second surface 54b and the region corresponding to the outer portion B of the second surface 54b. Can be represented by. Similarly, the amount of curvature of the cutting edge portion 54 is expressed by the distance between the tangent plane in the region corresponding to the inner portion A of the first surface 54a and the region corresponding to the outer portion B of the first surface 54a. You may.

For example, if the amount of curvature of the cutting edge portion 54 during machining is smaller than 1 μm (that is, a predetermined threshold value is 1 μm), it is considered that the machining accuracy can be maintained sufficiently high. Therefore, consider a condition in which the amount of curvature of the cutting edge portion 54 is smaller than 1 μm when the spindle 42 is rotated at a rotation speed of about 10,000 rpm to 30,000 rpm suitable for machining the workpiece 11.

In order to satisfy this condition, for example, in a state where the cutting edge portion 54 is mounted on the spindle 42 and is not rotating, the amount of curvature of the outer portion B of the cutting edge portion 54 toward the mount flange 44 is 1 μm. It may be about 10 μm. Further, for example, in a state where the cutting edge portion 54 is not mounted on the spindle 42, the amount of curvature of the portion B of the cutting edge portion 54 in the direction toward the mount flange 44 may be set to about 30 μm to 70 μm.

The cutting blade 52 satisfying such conditions is realized, for example, by adjusting conditions such as the shape of the mold when firing the cutting edge portion 54, the heating temperature, and the pressure. However, the above-mentioned conditions are merely examples, and the cutting blade according to the present invention does not necessarily have to satisfy these conditions.

In the present embodiment, the second surface 54b of the cutting edge portion 54 is provided with a mark portion 56 having a mode in which the first surface 54a and the second surface 54b can be distinguished. Therefore, the orientation of the cutting blade 52 can be easily determined based on the mark portion 56. That is, it is not necessary to determine the bending direction of the cutting edge portion 54 by using a special tool or method.

The mark portion 56 is formed on the second surface 54b of the cutting edge portion 54, for example, by a method of applying paint. However, the mark portion 56 may be formed on the first surface 54a of the cutting edge portion 54. Further, there are no particular restrictions on the method of forming the mark portion 56, the mode of the mark portion 56, and the like. For example, a concavo-convex structure may be formed on the first surface 54a or the second surface 54b of the cutting edge portion 54, and this may be used as the mark portion 56.

Next, a method of mounting the cutting blade for mounting the cutting blade 52 on the spindle 42, and a method for processing the workpiece including the method for mounting the cutting blade will be described. FIG. 4A is a front view showing a state in which the cutting blade 52 is mounted on the spindle 42. When mounting the cutting blade 52 on the spindle 42, first, the cutting blade 52 is mounted on the mount flange 44 (blade mounting step).

Specifically, the cutting blade 52 is attached to the mount flange 44 so that the first surface 54a of the cutting blade 52 comes into contact with the support surface 48a of the mount flange 44. Since the cutting edge portion 54 of the cutting blade 52 is provided with a mark portion 56, the orientation of the cutting blade 52 can be easily confirmed based on the mark portion 56.

Next, the holding flange 58 is attached to the mount flange 44 (flange attachment step). Specifically, the holding flange 58 is attached to the mounting flange 44 so that the supporting surface of the holding flange 58 is in contact with the second surface 54b of the cutting blade 52 attached to the mounting flange 44.

After that, the holding flange 58 is fixed to the mount flange 44 (fixing step). Specifically, the nut 60 is fastened to the boss portion 46 of the mount flange 44. As a result, the cutting blade 52 is fixed so as to be sandwiched between the mount flange 44 and the holding flange 58.

As described above, in the present embodiment, the diameter of the cutting edge portion 54 is in a state where the cutting edge portion 54 of the cutting blade 52 is mounted on the spindle 42 so as to be sandwiched between the mount flange 44 and the holding flange 58 and is not rotating. The amount of curvature of the cutting edge portion 54 when not mounted on the spindle 42 is adjusted so that the outer portion B in the direction curves toward the mount flange 44. Therefore, as shown in FIG. 4A, the cutting edge portion 54 is not completely flat even after being mounted on the spindle 42.

After mounting the cutting blade 52 on the spindle 42 using such a cutting blade mounting method, the workpiece 11 is machined using the cutting blade 52. First, the workpiece 11 is held by the chuck table 12 (holding step). Specifically, for example, the workpiece 11 is placed on the holding surface 12a of the chuck table 12 so that the surface side is exposed upward, and the negative pressure of the suction source is applied to the holding surface 12a. At the same time, the annular frame 15 is fixed by the clamp 14.

After the workpiece 11 is held by the chuck table 12, the cutting blade 52 fixed by the mount flange 44 and the holding flange 58 is rotated to cut into the workpiece 11 on the chuck table 12 (machining step). ). FIG. 4B is a front view showing how the workpiece 11 is processed.

In the present embodiment, the cutting edge portion 54 of the cutting blade 52 is mounted on the spindle 42 so as to be sandwiched between the mount flange 44 and the holding flange 58 and rotated, and the outer portion B of the cutting edge portion 54 in the radial direction. The amount of bending of the cutting edge portion 54 when not mounted on the spindle 42 is adjusted so that the amount of bending becomes smaller than a predetermined threshold value. Therefore, as shown in FIG. 4B, when the spindle 42 is rotated, the cutting blade 52 becomes sufficiently flat due to the action of centrifugal force.

That is, by relatively moving the chuck table 12 and the cutting unit 38 and cutting the cutting blade 52 into the workpiece 11, the workpiece 11 can be machined with high accuracy. Although FIG. 4B illustrates a case where the work piece 11 is cut by using the cutting blade 52, a groove or the like may be formed in the work piece 11 by using the cutting blade 52.

As described above, the cutting blade 52 according to the present embodiment is an annular cutting blade having a first surface 54a in contact with the mount flange (first flange) 44 and a second surface 54b opposite to the first surface 54a. The radial outer portion B of the cutting edge portion 54, including the portion 54, is curved toward the mount flange 44 in contact with the first surface 54a. Therefore, when the radial outer portion B of the cutting edge portion 54 warps toward the holding flange 58 due to deformation of the holding flange (second flange) 58 or the like, the warp toward the holding flange 58 is the mounting flange 44. The flatness of the cutting edge portion 54 is increased by canceling the curvature toward. As a result, the processing accuracy can be maintained high.

Further, the cutting blade 52 according to the present embodiment includes a mark portion 56 provided on the cutting blade portion 54 in a manner capable of distinguishing the first surface 54a and the second surface 54b. Therefore, the orientation of the cutting blade 52 can be easily determined based on the mark portion 56. That is, it is not necessary to determine the bending direction of the cutting edge portion 54 by using a special tool or method.

The structures, methods, and the like according to the above-described embodiments and modifications can be arbitrarily modified and implemented as long as they do not deviate from the scope of the object of the present invention.

2: Cutting device 4: Base 4a: Opening 4b: Opening 4c: Opening 6: Cassette elevator 8: Cassette 10: First moving mechanism (machining feed mechanism)
10a: Table cover 10b: Dust-proof and drip-proof cover 12: Chuck table 12a: Holding surface 14: Clamp 20: Support structure 22: Second moving mechanism (indexing feed mechanism, notch feed mechanism)
24: Y-axis guide rail 26: Y-axis moving plate 28: Y-axis ball screw 30: Z-axis guide rail 32: Z-axis moving plate 34: Z-axis ball screw 36: Z-axis pulse motor 38: Cutting unit 40: Spindle housing 42: Spindle 42a: Tip (one end)
42b: Opening 44: Mount flange (first flange)
46: Boss part 46a: Opening 46b: Base end side 46c: Tip side 48: Flange part 48a: Support surface 50: Bolt 52: Cutting blade 54: Cutting edge part 54a: First surface 54b: Second surface 54c: Opening 56 : Mark part 58: Holding flange (second flange)
58a: Opening 60: Nut 60a: Opening 62: Camera 64: Cleaning unit 66: Control unit 11: Work piece 13: Dicing tape 15: Frame A: Inner part B: Outer part

Claims (5)

A cutting blade that is mounted on the spindle so as to be sandwiched between a first flange fixed to the spindle and a second flange corresponding to the first flange, and is used when machining an workpiece.
An annular cutting edge portion having a first surface in contact with the first flange and a second surface opposite to the first surface,
Including a mark portion provided on the cutting edge portion,
The radial outer portion of the cutting edge portion is curved toward the first flange in contact with the first surface.
The cutting blade is characterized in that the mark portion is provided in such a manner that the first surface and the second surface can be distinguished. In a state where the cutting edge portion is mounted on the spindle so as to be sandwiched between the first flange and the second flange and is not rotating, the radial outer portion of the cutting edge portion becomes the first flange. The cutting blade according to claim 1, wherein the amount of curvature of the cutting edge portion is adjusted so as to be curved toward the spindle when the cutting edge portion is not mounted on the spindle. In a state where the cutting edge portion is mounted on the spindle so as to be sandwiched between the first flange and the second flange and is rotated, the amount of curvature of the radial outer portion of the cutting edge portion is greater than a predetermined threshold value. The cutting blade according to claim 1 or 2, wherein the amount of curvature of the cutting edge portion is adjusted so that the cutting edge portion is not mounted on the spindle. A method of mounting a cutting blade used when mounting the cutting blade according to any one of claims 1 to 3 on the spindle.
A blade mounting step of attaching the cutting blade to the first flange so that the first surface of the cutting blade is in contact with the first flange.
A flange mounting step of mounting the second flange on the first flange so that the second flange is in contact with the second surface of the cutting blade mounted on the first flange.
Mounting of a cutting blade comprising: a fixing step of fixing the second flange to the first flange so as to sandwich and fix the cutting blade between the first flange and the second flange. Method. A method for processing a work piece, which is used when the work piece is machined using the cutting blade according to any one of claims 1 to 3.
A blade mounting step of attaching the cutting blade to the first flange so that the first surface of the cutting blade is in contact with the first flange.
A flange mounting step of mounting the second flange on the first flange so that the second flange is in contact with the second surface of the cutting blade mounted on the first flange.
A fixing step of fixing the second flange to the first flange so that the cutting blade is sandwiched and fixed between the first flange and the second flange.
A work piece including a machining step of machining the work piece by rotating the cutting blade fixed by the first flange and the second flange to cut into the work piece. Processing method of the work piece.