JP2021011383A5 - - Google Patents
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- JP2021011383A5 JP2021011383A5 JP2019153346A JP2019153346A JP2021011383A5 JP 2021011383 A5 JP2021011383 A5 JP 2021011383A5 JP 2019153346 A JP2019153346 A JP 2019153346A JP 2019153346 A JP2019153346 A JP 2019153346A JP 2021011383 A5 JP2021011383 A5 JP 2021011383A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- transport
- roller
- shaft
- mounting roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims 16
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910892149.8A CN110970337A (zh) | 2018-09-28 | 2019-09-20 | 基板输送装置以及基板处理装置 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018185327 | 2018-09-28 | ||
JP2018185327 | 2018-09-28 | ||
JP2019115089 | 2019-06-21 | ||
JP2019115089 | 2019-06-21 | ||
JP2019133261 | 2019-07-19 | ||
JP2019133261 | 2019-07-19 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021011383A JP2021011383A (ja) | 2021-02-04 |
JP2021011383A5 true JP2021011383A5 (it) | 2022-05-17 |
JP7332391B2 JP7332391B2 (ja) | 2023-08-23 |
Family
ID=74227735
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019153346A Active JP7332391B2 (ja) | 2018-09-28 | 2019-08-26 | 基板搬送装置および基板処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP7332391B2 (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113148657B (zh) * | 2021-05-08 | 2023-07-04 | 深圳市华星光电半导体显示技术有限公司 | 一种基板传送装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6381075U (it) * | 1986-11-15 | 1988-05-28 | ||
JP4079579B2 (ja) | 2000-06-23 | 2008-04-23 | Nec液晶テクノロジー株式会社 | ウェット処理装置 |
JP3960087B2 (ja) | 2001-05-30 | 2007-08-15 | 東京エレクトロン株式会社 | 搬送装置 |
JP4881575B2 (ja) * | 2005-04-28 | 2012-02-22 | 芝浦メカトロニクス株式会社 | 基板の搬送装置 |
KR100672964B1 (ko) * | 2005-08-22 | 2007-01-22 | 주식회사 케이씨텍 | 대면적 기판 이송장치 |
KR101131181B1 (ko) * | 2009-02-24 | 2012-03-28 | (유)에스엔티 | 기판이송장치 |
CN106571326B (zh) | 2016-10-19 | 2019-11-26 | 京东方科技集团股份有限公司 | 一种对压滚轮及基板传送装置 |
-
2019
- 2019-08-26 JP JP2019153346A patent/JP7332391B2/ja active Active
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