JP2020515870A - 密封シール・カバー・キャップ付き移植可能光学センサ - Google Patents
密封シール・カバー・キャップ付き移植可能光学センサ Download PDFInfo
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Abstract
Description
2 基板
3 光学微細構造
4 光学的相互作用エリア
5 表面
6 カバー・キャップ
8 能動構成要素
9 シールされたキャビティ
10 光フィードスルー
12 アンダー・バンプ金属化
13 カプラ
14 導波路
15 アンテナ、マルチループ・アンテナ
16 電源ユニット、エネルギ供給デバイス
17 インターフェース回路
18 接合ワイヤ
19 保護層、電磁遮蔽層
20 電気フィードスルー
25 保護層
Claims (17)
- 基板(2)および前記基板(2)とともに集積される光学微細構造(3)を包含するフォトニック集積回路(1)を包含する移植可能な光学センサであって、
前記光学微細構造(3)が、前記基板(2)の表面(5)の一部の上に露出された光学的相互作用エリア(4)を形成するべく位置決めされ、
前記フォトニック集積回路(1)が、さらに、前記光学的相互作用エリア(4)に隣接する前記基板(2)の一部の上にカバー・キャップ(6)を包含し、前記カバー・キャップが、ウェファ対ウェファ接合テクノロジまたは別のウェファ・レベルの密封パッケージング・テクニックによって前記基板に密封シールされ、前記表面(5)と前記カバー・キャップ(6)の間に形成されるシールされたキャビティ(9)内に少なくとも1つの能動構成要素(8)が位置決めされ、
それにおいて、前記基板(2)が、前記シールされたキャビティ(9)から前記光学的相互作用エリア(4)まで延びる少なくとも1つの光フィードスルー(10)を包含し、前記光フィードスルーが、前記基板内に埋め込まれた導波路である、
移植可能な光学センサ。 - さらに、前記シールされたキャビティ(9)から前記シールされたキャビティ(9)の外側の前記基板(2)のエリアまで延びる少なくとも1つの電気フィードスルー(20)を包含する、請求項1に記載の移植可能な光学センサ。
- 少なくとも1つの電気フィードスルー(20)が、前記シールされたキャビティ(9)から前記カバー・キャップ(6)とは反対側の前記基板(2)の表面まで延びる、請求項1または2に記載の移植可能な光学センサ。
- 前記カバー・キャップ(6)が、流体シール材料、たとえば、ガラス、金属、シリコン、ポリマ、またはこれらの組み合わせから作られる、請求項1乃至3のいずれか1つに記載の移植可能な光学センサ。
- 前記カバー・キャップ(6)が、電磁遮蔽層(19)を包含する、請求項1乃至4のいずれか1つに記載の移植可能な光学センサ。
- さらに、前記光学アッセンブリの周りに内部損傷を防止する保護層(25)を包含する、請求項1乃至5のいずれか1つに記載の移植可能な光学センサ。
- 前記保護層(25)が、前記露出される光学的相互作用エリアのための開口を有する、請求項6に記載の移植可能な光学センサ。
- さらに、前記シールされたキャビティ9内に位置決めされたエネルギ供給デバイス(16)を包含する、請求項1乃至7のいずれか1つに記載の移植可能な光学センサ。
- 前記少なくとも1つの能動構成要素(8)が、前記シールされたキャビティ9内の前記表面(5)に取り付けられる、請求項1乃至8のいずれか1つに記載の移植可能な光学センサ。
- さらに、アンテナ(15)を包含する、請求項1乃至9のいずれか1つに記載の移植可能な光学センサ。
- 前記光学的相互作用エリア(4)が、検知エリアである、請求項1乃至10のいずれか1つに記載の移植可能な光学センサ。
- 前記カバー・キャップ(6)の、前記カバー・キャップが前記基板に密封シールされるボトム・エッジがフランジなしであり、かつ前記基板(2)の前記表面(5)と直接接触する、請求項1乃至11のいずれか1つに記載の移植可能な光学センサ。
- 移植可能な光学センサ、たとえば、請求項1乃至12のいずれか1つに記載のセンサを製造する方法であって、
− 露出される光学的相互作用エリア(4)を形成するべく位置決めされた集積光学微細構造(3)および少なくとも1つの光フィードスルー(10)を伴う基板(2)を包含し、前記光フィードスルーが、前記光学的相互作用エリア(4)から前記光学的相互作用エリア(4)に隣接する前記基板の一部まで延び、前記光フィードスルーが、前記基板内に埋め込まれた導波路であるフォトニック集積回路を提供することと、
− 前記光学的相互作用エリア(4)に隣接する前記一部の前記表面(5)上に少なくとも1つの能動構成要素(8)を提供することと、
− 前記基板(2)の前記一部の上に、前記少なくとも1つの能動構成要素(8)が位置決めされるシールされたキャビティ(9)を形成するべくカバー・キャップ(6)を提供することと、
− 前記カバー・キャップ(6)を前記基板(2)にシールすることであって、前記カバー・キャップが、ウェファ対ウェファ接合テクノロジまたは別のウェファ・レベルの密封パッケージング・テクニックによって前記基板に密封シールされることと、
を包含する方法。 - さらに、前記シールされたキャビティ(9)から前記シールされたキャビティ(9)の外側の前記基板(2)のエリアまで延びる少なくとも1つの電気フィードスルー(20)を提供することを包含する、請求項13に記載の方法。
- さらに、前記光学アッセンブリ(1)の周りに、前記光学的相互作用エリア(4)のための開口を残した保護層(25)を提供することを包含する、請求項13または14に記載の方法。
- 前記カバー・キャップが前記基板に、レーザ接合または陽極接合によって密封シールされる、請求項13乃至15のいずれか1つに記載の方法。
- 前記カバー・キャップ(6)の、前記カバー・キャップが前記基板に密封シールされるボトム・エッジがフランジなしであり、かつそれにおいて、前記シールに先行して、前記ボトム・エッジと前記基板(2)の前記表面(5)の直接接触がもたらされる、請求項13乃至15のいずれか1つに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP17164567.4A EP3385762A1 (en) | 2017-04-03 | 2017-04-03 | Optical assembly with hermetically sealed cover cap |
EP17164567.4 | 2017-04-03 | ||
PCT/EP2018/058325 WO2018185032A1 (en) | 2017-04-03 | 2018-03-30 | Implantable optical sensor with hermetically sealed cover cap |
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JP2020515870A true JP2020515870A (ja) | 2020-05-28 |
JP7128202B2 JP7128202B2 (ja) | 2022-08-30 |
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JP2019555230A Active JP7128202B2 (ja) | 2017-04-03 | 2018-03-30 | 密封シール・カバー・キャップ付き移植可能光学センサ |
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US (1) | US11372176B2 (ja) |
EP (2) | EP3385762A1 (ja) |
JP (1) | JP7128202B2 (ja) |
KR (1) | KR20190136007A (ja) |
CN (1) | CN110709743A (ja) |
BR (1) | BR112019020720A2 (ja) |
CA (1) | CA3056519A1 (ja) |
IL (1) | IL269823A (ja) |
WO (1) | WO2018185032A1 (ja) |
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CN112394457B (zh) * | 2020-11-17 | 2022-01-07 | 深圳市万兆通光电技术有限公司 | 一种光传输模块生产用基板封装装置 |
CN113985533A (zh) * | 2021-10-18 | 2022-01-28 | 上海曦智科技有限公司 | 光子半导体装置及其制造方法 |
EP4223213A1 (en) * | 2022-02-04 | 2023-08-09 | Indigo Diabetes N.V. | Sensor device |
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BR112019020720A2 (pt) | 2020-05-12 |
CA3056519A1 (en) | 2018-10-11 |
US11372176B2 (en) | 2022-06-28 |
WO2018185032A1 (en) | 2018-10-11 |
KR20190136007A (ko) | 2019-12-09 |
EP3385762A1 (en) | 2018-10-10 |
CN110709743A (zh) | 2020-01-17 |
JP7128202B2 (ja) | 2022-08-30 |
EP3607368A1 (en) | 2020-02-12 |
IL269823A (en) | 2019-11-28 |
US20200310051A1 (en) | 2020-10-01 |
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