JP2020202167A5 - - Google Patents
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- JP2020202167A5 JP2020202167A5 JP2019127957A JP2019127957A JP2020202167A5 JP 2020202167 A5 JP2020202167 A5 JP 2020202167A5 JP 2019127957 A JP2019127957 A JP 2019127957A JP 2019127957 A JP2019127957 A JP 2019127957A JP 2020202167 A5 JP2020202167 A5 JP 2020202167A5
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- 239000012212 insulator Substances 0.000 claims 1
- 238000002047 photoemission electron microscopy Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Claims (2)
- 下向きに取り付けられた試料１に１ＫＶ以上の高電圧３を印加するためにホルダー本体と絶縁物４で隔離された構造を有する試料ホルダーを備え、前記試料１に光２を当てるために装置下部のカメラ室５または前記試料１より下方の鏡筒フランジ７やレンズ絞り８に光照射機能を設けたことを特徴とするＴＥＭ。
- 薄膜試料とバルク試料の双方の原子分解能観察を同時にまたは交互に可能にしたＰＥＥＭ機能が付加されたことを特徴とするＴＥＭ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019127957A JP7174203B2 (ja) | 2019-06-11 | 2019-06-11 | 光電子顕微鏡（ｐｅｅｍ）機能を備えた透過電子顕微鏡（ｔｅｍ） |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019127957A JP7174203B2 (ja) | 2019-06-11 | 2019-06-11 | 光電子顕微鏡（ｐｅｅｍ）機能を備えた透過電子顕微鏡（ｔｅｍ） |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020202167A JP2020202167A (ja) | 2020-12-17 |
| JP2020202167A5 true JP2020202167A5 (ja) | 2021-11-25 |
| JP7174203B2 JP7174203B2 (ja) | 2022-11-17 |
Family
ID=73742093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019127957A Active JP7174203B2 (ja) | 2019-06-11 | 2019-06-11 | 光電子顕微鏡（ｐｅｅｍ）機能を備えた透過電子顕微鏡（ｔｅｍ） |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7174203B2 (ja) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0374039A (ja) * | 1989-08-11 | 1991-03-28 | Jeol Ltd | 光電子顕微鏡を備えた透過電子顕微鏡 |
| JP3663056B2 (ja) | 1998-07-23 | 2005-06-22 | 株式会社日立製作所 | 電子顕微鏡用試料加熱ホルダ及び試料観察方法 |
| JP4616701B2 (ja) | 2005-05-30 | 2011-01-19 | 日本電子株式会社 | 電子顕微鏡の試料ホルダ |
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2019
- 2019-06-11 JP JP2019127957A patent/JP7174203B2/ja active Active
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